CN1734244B

CN1734244B - High precision micro-sensor and its manufacture method

Info

Publication number: CN1734244B
Application number: CN 200410046654
Authority: CN
Inventors: 李丰良; 李敏
Original assignee: Central South University
Current assignee: Central South University
Priority date: 2004-08-12
Filing date: 2004-08-12
Publication date: 2010-09-08
Anticipated expiration: 2024-08-12
Also published as: CN1734244A

Abstract

This invention relates to a high accuracy mini-spoke-like sensor and force-guiding device. This sensor comprises the following parts: elastic body (the length of the axle can be lengthened according to the need) contains rim (1a), spoke (2a) and axle (3a), sensitive element (4a) and the protector composing of the sealing diaphragm (6a) and (7a), which is characterized by the following: the diameter is much less than the traditional spoke-like sensor. This design and craft can make the mini-spoke-like sensor satisfy the dimension of the sensor or the strict standard quality. The force-guiding device which measures the parameter of the electrical road pantograph and the touching pressure among the halftone contact is a double layer casing structure. One of the casings connects the slide (also named bower) of the pantograph; the other connects the shelf of the pantograph.

Description

High precision miniature sensor and manufacture method thereof

(1) technical field

The present invention relates to a kind of high precision miniature sensor, the invention still further relates to the manufacture method of this high precision miniature sensor.

In the family of high-precision sensor, the radial sensor is with the precision height, feature such as antijamming capability is strong and enjoy people's favor.Such elastomer structure pattern has the atomic characteristics of volume change little and that caused by distortion to the stress point Influence of Displacement, and its duty is very stable.Simultaneously, also has fabulous natural linear degree.As the Weighing type sensor, generally be used for (the measurement of 500kg～50t) of medium range by various countries since the end of the seventies; As moment of torsion formula sensor, also be widely used simultaneously.

The detection of bow net contact pressure is a kind of advanced person's in the world a bow net detection method, by detecting the contact pressure between the bow net, can find the pantograph and catenary fault hidden danger that other method of many usefulness can not be found.

(2) background technology

In present radial product sensor, its radial dimension is all more than 70mm.Reduce size, sensitive element (for example strainometer) will occur and be difficult to apply ointment or plaster, can't carry out difficulty in process such as cure under pressure.Yet, for example, in pantograph that this document is related and the isoparametric test item of the contact pressure of contact net, just need high-precision micro-force sensor in some special occasion.The microminiaturization of radial sensor has at first solved the difficult problem that detection system requires sensor bulk.

The difficult point that the bow net contact pressure detects is can not be with being intended to impost on the pantograph, otherwise will influence the dynamic perfromance of bow net, reduces the performance of pantograph.It is little how to design a kind of volume, and lightweight sensor and the force guide device supporting with it are to carry out the key that the bow net contact pressure detects exactly.

(3) summary of the invention

One of task of the present invention is: break through the boundary that radial sensor diameter is not less than 70mm, make this sensor both can do very for a short time, can keep the high precision characteristic of radial sensor simultaneously again.This makes the radial sensor stride into small volume, the ranks of high-precision sensor.At present, the inventor of this patent can make the radial dimension of sensor be no more than 30mm through repetition test, highly is no more than 10mm.Through optimizing, can also do forr a short time.

Second technical matters to be solved by this invention provides the manufacture method of this high precision miniature sensor.

In order to solve the problems of the technologies described above; a kind of high precision miniature sensor provided by the invention; comprise: by taking turns the elastic body of forming along (1a), spoke (2a) and wheel shaft (3a); wherein wheel shaft (3a) length can extend as required; sensitive components (4a); one sealing film (6a) and another sealing film (7a) are formed protective seam, and the radial dimension of sensor is less than 60mm.

Make the method for high precision miniature sensor, adopt strainometer as sensitive components (4a), in the cure under pressure process, film (1b) is placed between strainometer and the rubber (2b), hardboard (3b) tightly is close together by the extruding and the sheet rubber of plug-in unit (4b), plays the effect of pressurization.

The radial sensor mainly consists of the following components: wheel edge, spoke and load axle.These three elastic bodys of forming the radial sensor.Can attached subsides sensitive element on the side of spoke.

Except above components and parts, the present invention adopts following technology to the sealing of sensor: with diaphragm with the sensor internal sealing, make it avoid the infringement of moist and electromagnetic interference (EMI).

Applying ointment or plaster of sensitive components: the sensitive components of this patent document indication is: strainometer, semiconductor sensitive element etc. can be used for experiencing the device of distortion.Strainometer need stick on the elastic body usually; The form that semiconductor sensor spare can be made strainometer sticks on the elastic body, also can be solidificated on the elastic body with process forms such as diffuse si.No matter use which kind of method,, all be called as and apply ointment or plaster so long as sensitive components and elastic body are coupled to an integral body.Usually, strainometer adopts the method for pasting, and diffuse si adopts special technology pattern etc.

Its preparation method is: film is placed between strainometer and the rubber, and hardboard tightly is close together by the extruding and the sheet rubber of plug-in unit, plays the effect of pressurization.Plug-in unit differs and is decided to be circle, and any hard objects that can play squeezing action all can.Also can not adopt plug-in unit, and adopt any way that hardboard and rubber blanket can be close together to solve.

Two of task of the present invention is: several force guide devices are provided, just can finish the detection of the pantograph and the contact pressure between the contact net of electric railway behind the sensor installation.The essential characteristic of these force guide devices is, can eliminate the influence of side force well, and sensor is among the desirable single load bearing environment.Sensor can adopt various ways can ergometry sensor, but volume is little, quality is little, precision is high because sensor provided by the invention has, and recommends to use radial sensor provided by the invention.

(5) description of drawings:

Fig. 1 is a radial sensor construction synoptic diagram;

Fig. 2 is the cure under pressure synoptic diagram of radial sensor:

Fig. 3 is force guide device case 1 synoptic diagram;

Fig. 4 is force guide device case 2 synoptic diagram:

Fig. 5 is force guide device case 3 synoptic diagram.

(4) embodiment:

If adopt strainometer as sensitive element, can adopt the method cure under pressure of Fig. 2.In Fig. 2, film 1b is placed between strainometer and the rubber 2b, and hardboard 3b tightly is close together by extruding and the sheet rubber of plug-in unit 4b, plays the effect of pressurization.Plug-in unit 4b differs and is decided to be circle, and any hard objects that can play squeezing action all can.Also can not adopt plug-in unit 4b, and adopt any way that hardboard 3b and rubber blanket 2b can be close together to solve.

To different pantographs, should adopt different force guide devices.Respectively the case study on implementation of several force guide devices is introduced below.

1. one of case study on implementation of force guide device as shown in Figure 3.At first, the coupling part that the slide plate of pantograph and support are original is cut at the 4c place, and it is welded with sheet metal.Shell 6c and slide plate 5c with force guide device tightens together with the screw on the slide plate.Inner casing 3c is fixedlyed connected with support.Be connected with 1c with two connecting rod 7c between inner casing and the shell.Force transducer 2c be placed on that connecting rod 1c goes up and with slide plate on the nut sliding contact.When pantograph pan afforded downward power, support will produce a power that makes progress and its balance.Be placed in force transducer on the connecting rod and will measure the size of this power.The feature of this device is that inside and outside shell is mutually nested, and horizontal side force is got rid of effectively.

2. two of the case study on implementation of force guide device as shown in Figure 4.At first, the slide plate of pantograph and support are cut in original coupling part.Shell 2d and slide plate 1d with force guide device tightens together with the screw on the slide plate.Inner casing left end 8d is fixedlyed connected with support by cored screw 7d.Inner casing right-hand member 11d is connected with shell with screw.Inner casing right-hand member and shell form an integral body, and the two moves together.The inner casing left end is connected with 10d with connecting rod 4d with the inner casing right-hand member.Force transducer 9d be placed on that connecting rod 10d goes up and with slide plate on the nut sliding contact.When pantograph pan afforded downward power, support will produce a power that makes progress and its balance.Be placed in force transducer on the connecting rod and will measure the size of this power.The feature of this device is that inside and outside shell is mutually nested, and horizontal side force is got rid of effectively.Compare with one of embodiment, present case has the characteristics of convenient disassembly.

3. three of the case study on implementation of force guide device as shown in Figure 5.In present case, inner casing 6e is original parts of pantograph, and it is split into the oval hole at 2e and 4e place.Like this, shell 3e and inner casing 6e just have small relative motion.Shell links to each other with the support of pantograph with connecting rod 8e with 4e and spring 7e by screw 2e.When the slide plate of pantograph was subjected to downward power, support will produce power upwards balance with it by spring 7e.Be placed in force transducer 5e between inner casing and the shell and will detect the size of this power.The feature of this device is that inside and outside shell is mutually nested, can get rid of horizontal side force effectively.

Claims

1. high precision miniature sensor; comprise: by taking turns the elastic body of forming along (1a), spoke (2a) and wheel shaft (3a); wherein wheel shaft (3a) length can extend as required; sensitive components (4a); one sealing film (6a) and another sealing film (7a) are formed protective seam, and it is characterized in that: the radial dimension of sensor is less than 60mm.

2. make the method for the described high precision miniature sensor of claim 1, it is characterized in that: adopt strainometer as sensitive components (4a), in the cure under pressure process, film (1b) is placed between strainometer and the rubber (2b), hardboard (3b) tightly is close together by the extruding and the sheet rubber of plug-in unit (4b), plays the effect of pressurization.