CN1729416A - Optical device - Google Patents
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- CN1729416A CN1729416A CN 200380107021 CN200380107021A CN1729416A CN 1729416 A CN1729416 A CN 1729416A CN 200380107021 CN200380107021 CN 200380107021 CN 200380107021 A CN200380107021 A CN 200380107021A CN 1729416 A CN1729416 A CN 1729416A
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Abstract
The present invention provides an optical device, wherein when the multi-layer film (56) side surface of a filter member (20) is defined as a first surface (70) and the quartz substrate (54) side surface thereof is defined as a second surface (72), and the inner wall surface of a slit (18) opposed to the first surface (70) of the filter member (20) is defined as a first inner wall surface (74) and the inner wall surface thereof opposed to the second surface (72) of the filter member (20) is defined as a second inner wall surface (76), one or more of the first inner wall surface (74) and the second inner wall surface (76) of the slit (18) and the second surface (72) of the filter member (20) are positioned non-parallel with the first surface (70) of the filter member (20).
Description
Technical field
The present invention relates to have one or the fiber array of multifiber or optical device, more specifically, relate to the optical device that is suitable for monitoring the flashlight that transmits by these optical transmission means on the way with one or more optical waveguides.
Background technology
In existing optical communication technique, the surveillance technology of communication quality is extremely important.Wherein, the supervision for light output particularly occupies critical positions in wavelength multichannel communication multiple telecommunication technology (wavelength multiplex communicationtechnology) field.
In recent years, the requirement to the miniaturization of such light output surveillance technology, high performance, cost degradation improves day by day.
In the past, for example, disclosed technology in the TOHKEMY 2001-264594 communique had been proposed.This technology disposes optical fiber 202 as shown in figure 18 in the V-shaped groove of glass substrate 200, then, glass substrate 200 is formed slits 204 make its oblique (with respect to optical axis) pass optical fiber 202.And, light reflector base (filter part) 206 is inserted in this slit 204, fill ultraviolet hardening resin (bonding agent) 208 in the crack betwixt again.Filter part 206 has substrate 210 and is formed at multilayer film 212 on the first type surface of this substrate 210.This multilayer film 212 be designed to the refractive index of substrate 210 and slit 204 in the refractive index of the resins 208 of filling be complementary (match).
Therefore, in the flashlight 214 via optical fiber 202 transmission, the light component (reflected light) 216 that is reflected by filter part 206 is extracted outside the covering.So, availablely detect this reflected light 216 with supervisory signal light 214 such as light receiving element.
Yet up to now, slit 204 is parallel ditches, and the surface of the substrate 210 of the first type surface (side of multilayer film 212) of the inner wall surface of slit 204, filter part 206, filter part 206 and another inner wall surface of slit 204 are designed to parallel to each other.
In addition, because the refractive index of optical fiber 202 is different with the refractive index of resin 208, and the refractive index of the substrate 210 of filter part 206 is different with the refractive index of resin 208, so reflected light 226,228 and 230 betides the second contact surface 224 of 208 of the interface 222, slit 204 of 208 of the substrate 210 of first interface 220, filter part 206 of 208 of slit 204 and resins and resins and resins.
Usually, because the resin 208 of filling in the slit 204 has the function of coupling refractive index, so the refringence of optical fiber 202 and resin 208 is very little.Therefore, reflected light 226,228 that is caused by so little refringence and 230 output are negative tens dB to the decibels of input light (flashlight 214).But, because light has undulatory property, so caused interference.
Therefore, though the reflected light 226,228 that causes by refringence and 230 and power is less, but because its exit direction is identical with exit direction cardinal principle from the reflected light 216 of the multilayer film 212 of filter part 206, so can exert one's influence to the characteristic of reflected light 216.In addition, when inserting filter part 206 with respect to the slit 204 of the oblique formation of optical axis direction and carry out beam split (dividing light), exist characteristic from the reflected light 216 of filter part 206 to be subjected to problem easily from the interference of the reflected light 226,228 of above-mentioned first and second interface 220 and 224 etc. and 230.
Summary of the invention
The present invention considered these problems and proposed, and its objective is to provide can reduce by the light of other parts reflection from the catoptrical interference effect of the multiple-level surface of filter part and can improve the optical device that flashlight monitors the reliability of merit function.
The feature of optical device of the present invention is, it has: optical transmission means, the slit that is provided with in the optical transmission means, insert in the above-mentioned slit, be used for separating the filter part of the part of the flashlight by above-mentioned optical transmission means transmission, be filled in this slit in the above-mentioned slit and the resin in the gap between above-mentioned filter part; Above-mentioned filter part has substrate and the optical thin film that is formed on this substrate main surface; When the face with above-mentioned optical thin film one side of above-mentioned filter part is defined as first surface, the face of substrate one side of above-mentioned filter part is defined as second surface, in the inner wall surface of above-mentioned slit, the face relative with the above-mentioned first surface of above-mentioned filter part is defined as first inner wall surface, the face relative with the above-mentioned second surface of above-mentioned filter part is defined as second inner wall surface constantly, first inner wall surface of above-mentioned slit, the first surface of the one or more and above-mentioned filter part in the second surface of above-mentioned second inner wall surface and above-mentioned filter part is not parallel.
In the second surface of first inner wall surface of above-mentioned slit, above-mentioned second inner wall surface and above-mentioned filter part, because by being reflected the exit direction of light of (separation) and different, so can reduce to catoptrical interference effect from above-mentioned first surface from the exit direction of the reflected light (separated light) of the first surface of filter part with uneven of the first surface of above-mentioned filter part.This can improve the reliability of flashlight function for monitoring.
At this,, under most situation, all adopt the optical thin film of multilayer film on the filter part first type surface with optimal design though the optical thin film that forms also has the situation of individual layer.In addition, the first type surface of filter part is not only configurable in the light incident side of light, and is also configurable in exiting side.
Above-mentioned two unparalleled surface angulations are more preferably greater than equaling 0.5 °.If this is because less than 0.5 °, then can not reach the catoptrical interference effect that reduces from above-mentioned first surface.
And, in said structure, second inner wall surface of first inner wall surface of the second surface of the first surface of above-mentioned filter part, above-mentioned filter part, above-mentioned slit and above-mentioned slit and above-mentioned flashlight optical axis place vertical intersected and when the line segment that forms was defined as first line segment, second line segment, the 3rd line segment and the 4th line segment respectively, one or more line segments and above-mentioned first line segment in above-mentioned second line segment, above-mentioned the 3rd line segment and above-mentioned the 4th line segment can be not parallel.
Perhaps, also can be that above-mentioned first line segment and above-mentioned second line segment are not parallel mutually, above-mentioned the 3rd line segment and above-mentioned the 4th line segment are not parallel mutually, and above-mentioned first line segment and above-mentioned the 3rd line segment are not parallel mutually.
Perhaps, also can be that above-mentioned first line segment and above-mentioned second line segment are parallel to each other, above-mentioned the 3rd line segment and above-mentioned the 4th line segment are parallel to each other, and above-mentioned first line segment and above-mentioned the 3rd line segment are not parallel mutually.
Perhaps, also can be that above-mentioned first line segment and above-mentioned second line segment are not parallel mutually, above-mentioned the 3rd line segment and above-mentioned the 4th line segment are parallel to each other, and above-mentioned first line segment and above-mentioned the 3rd line segment are not parallel mutually.
Perhaps, also can be that above-mentioned first line segment and above-mentioned second line segment can be parallel to each other, above-mentioned the 3rd line segment and above-mentioned the 4th line segment are not parallel mutually, and above-mentioned first line segment and above-mentioned the 3rd line segment are not parallel mutually.
And, the surface level at second inner wall surface of first inner wall surface of the second surface of the first surface of above-mentioned filter part, above-mentioned filter part, above-mentioned slit and above-mentioned slit and above-mentioned flashlight optical axis place is intersected formed line segment when being defined as the 5th line segment, the 6th line segment, the 7th line segment and the 8th line segment respectively, and one or more line segments and above-mentioned the 5th line segment in above-mentioned the 6th line segment, above-mentioned the 7th line segment and above-mentioned the 8th line segment can be not parallel.
Perhaps, also can be that above-mentioned the 7th line segment and above-mentioned the 8th line segment are parallel to each other, above-mentioned the 5th line segment and the 7th line segment are not parallel mutually.
In addition, the feature of optical device of the present invention is, it has: a plurality of optical transmission means, the slit that is provided with jointly in above-mentioned a plurality of optical transmission means, insert in the above-mentioned slit, be used for separating a filter part of each part of the flashlight by above-mentioned a plurality of optical transmission means transmission, be filled in this slit in the above-mentioned slit and the resin in the gap between above-mentioned filter part; Above-mentioned filter part has relative with above-mentioned slit at least curved surface.
Therefore, by a plurality of optical transmission means, the face relative with filter part of slit and the face relative with slit of filter part are not parallel mutually, and the surface of filter part and the back side are not parallel mutually.Therefore, can reduce catoptrical interference effect from the surface of filter part.This can improve the reliability of flashlight function for monitoring.
The feature of optical device of the present invention is, it has: optical transmission means, the slit that is provided with in the optical transmission means, insert in the above-mentioned slit, be used for separating the filter part of the part of the flashlight by above-mentioned optical transmission means transmission, be filled in this slit in the above-mentioned slit and the resin in the gap between above-mentioned filter part; Above-mentioned filter part has substrate and the optical thin film that is formed on this substrate main surface; When the face with above-mentioned optical thin film one side of above-mentioned filter part is defined as first surface, the face of substrate one side of above-mentioned filter part is defined as second surface, in the inner wall surface of above-mentioned slit, the face relative with the above-mentioned first surface of above-mentioned filter part is defined as first inner wall surface, when will the face relative with the above-mentioned second surface of above-mentioned filter part being defined as second inner wall surface, the above-mentioned second surface of above-mentioned at least filter part is a rough surface.
Usually, be subjected to the strong interference that the reflected light from the filter part second surface takes place according to the thickness of filter part etc. from the reflected light of filter part first surface.Yet, in the present invention, because the second surface of filter part is made rough surface, owing to penetrating randomly, the reflected light from the second surface of filter part becomes scattered light, so can reduce to catoptrical interference effect from the filter part first surface.
And in said structure, above-mentioned first inner wall surface of above-mentioned slit and above-mentioned second inner wall surface also can be rough surfaces.Like this, can reduce effectively by the caused interference effect of reflected light from first inner wall surface and second inner wall surface of slit.
As the face of above-mentioned rough surface, its surfaceness Rt is 0.05 μ m≤Rt 〉=2 μ m preferably.
In addition, in said structure, the part of the bottom surface of above-mentioned at least filter part can contact with the bottom of above-mentioned slit.At this moment, only the part of the bottom surface by making filter part contacts with the bottom of slit, just can make filter part keep desired angle, and assembling also becomes and carries out easily.
As above above-mentioned, if adopt optical device of the present invention, the reflected light that can reduce other parts is to the catoptrical interference effect from the multilayer face of filter part, but and can improve the property of flashlight function for monitoring.
Description of drawings
Fig. 1 is the cut-open view of the optical device of first embodiment that sees from the front of expression.
Fig. 2 is a cut-open view of representing the optical device of first embodiment that sees from the side.
Fig. 3 is the cut-open view that amplifies the pith of the optical device of representing first embodiment.
Fig. 4 is the cut-open view of pith of first variation that amplifies the optical device of expression first embodiment.
Fig. 5 is the cut-open view of pith of second variation that amplifies the optical device of expression first embodiment.
Fig. 6 is the cut-open view of pith that amplifies the 3rd variation of the optical device represented first embodiment that enlarged.
Fig. 7 is the cut-open view of pith of the 4th variation that amplifies the optical device of expression first embodiment.
Fig. 8 is the cut-open view of pith of the 5th variation that amplifies the optical device of expression first embodiment.
Fig. 9 is the cut-open view of pith of the 6th variation that amplifies the optical device of expression first embodiment.
Figure 10 is the cut-open view of pith of the 7th variation that amplifies the optical device of expression first embodiment.
Figure 11 is the cut-open view of pith of the 8th variation that amplifies the optical device of expression first embodiment.
Figure 12 is the cut-open view of pith of the 9th variation that amplifies the optical device of expression first embodiment.
Figure 13 is the cut-open view that amplifies the pith of the optical device of representing second embodiment.
Figure 14 is the cut-open view that amplifies the pith of the optical device of representing the 3rd embodiment.
Figure 15 is the cut-open view that amplifies the pith of the optical device of representing the 4th embodiment.
Figure 16 is the cut-open view of pith of variation that amplifies the optical device of expression the 4th embodiment.
Figure 17 is the cut-open view that amplifies the pith of the optical device of representing the 4th embodiment.
Figure 18 is the cut-open view that amplifies the pith of the optical device of representing the prior art example.
Embodiment
Below, illustrate with reference to Fig. 1-Figure 17 optical device of the present invention is applied to for example embodiment of 4 channel single-column type power-monitoring modules.
The optical device 10A of first embodiment, as shown in Figures 1 and 2, have: glass substrate 12, the fiber array 16 that constitutes by many optical fiber 15 that are fixed in a plurality of V-shaped grooves 14 set on this glass substrate 12, extend to slit set the glass substrate 12 18 (with reference to Fig. 2) from the upper surface of each optical fiber 15, be inserted into the light splitting part (filter part) 20 (with reference to Fig. 2) in this slit 18, arranging the flashlight 22 that is used for detecting by 15 transmission of each optical fiber, at least by PD (photodiode) array 28 of a plurality of active layers 26 of the light (reflected light) of filter part 20 grades reflections, be used to that PD array 28 is installed and make it towards the fixing auxiliary fixing member 30 of fiber array 16 and be used for stably the fixedly liner 32 of PD array 28 at least.In addition, the surface of two of slit 18 end faces and filter part 20 and work that spectrum part 33 (with reference to Fig. 2) played at the back side are in order to separate the part by the flashlight 22 of optical fiber 15 transmission.And as shown in Figure 3, optical fiber 15 has inner core 40 and covering 42.
Promptly, the optical device 10A of this first embodiment has the substrate 12 that is formed with V-shaped groove 14, be fixed in the V-shaped groove 14 of substrate 12 and on each optical fiber 15, be provided with the fiber array 16 of beam split function (slit 18, filter part 20 etc.), PD array 28 on the light path of the separated light 24 that is fixed in the surrounding layer of each optical fiber 15 by adhesive linkage 52, produces because of the beam split function at least and the auxiliary fixing member 30 that is used to install this PD array 28, and this auxiliary fixing member 30 is arranged to make the installed surface of PD array 28 towards glass substrate 12.
In addition, at this, owing to represent to constitute the example of fiber array 16 with many root optical fiber 15, thereby " each optical fiber 15 " refers to " four optical fiber in every ".But, owing to also can constitute fiber array 16 by an optical fiber 15, so at this moment, " each optical fiber " or " multifiber " be read like " optical fiber " also.
Consider the suffered load of each optical fiber 15 of fiber array 16 when processing slit 18 subsequently, the angle that is formed at the V-shaped groove 14 on the glass substrate 12 is more preferably greater than equaling 45 °; Otherwise, for making the uncovered fiber array, being the bonding agent (=bonding strength) of guaranteeing to provide capacity, this angle is preferably smaller or equal to 95 °.In this first embodiment, angle is 70 °.
The process that fiber array 16 is fixed on the glass substrate 12 is: at first, fiber array 16 is positioned in the V-shaped groove 14, and under this state, smear UV cured type bonding agent, then from the back side of fiber array 16 and the top irradiation ultraviolet radiation so that above-mentioned bonding agent harden fully.
The tilt angle alpha of slit 18 (with reference to Fig. 2), promptly with vertical angulation, preferably 15 °-25 °.If tilt angle alpha is too small, then scatter from the separated light 24 of filter part 20 excessive, the deterioration of under the situation that is used for multichannel (multichannel), can cause crosstalking (crosstalk).On the other hand, if the angle of inclination is excessive, then the polarization dependence (polarization dependency) from the separated light 24 of filter part 20 increases, and trends towards the reduction of characteristic.
As shown in Figure 3, filter part 20 has quartz substrate 54, is formed at the separatory multilayer film 56 on the interarea of this quartz substrate 54.Consider the situation of the operation etc. of this filter part 20, though the material of filter part 20 can be plastic material, macromolecular material, polyimide material, but because the tilt angle alpha of slit 18 is greatly to 15 °-25 °, so in order to suppress the optical axis deviation owing to transmission one side that produces of refraction, the material of filter part 20 is preferably made by having identical refractive index materials with optical fiber 15 (quartz).
In addition, be filled with ultraviolet hardening resin (bonding agent) 19 in the gap of 20 of this slit 18 in slit 18 and filter parts.It is resin that this resin 19 uses silicon, makes the refractive index cardinal principle of quartz substrate 54 of the refractive index of its refractive index and the inner core 40 of optical fiber 15 and filter part 20 identical.
As shown in Figure 2, the structure of PD array 28 adopts back surface incident type.The pastel of anisotropic conductive pastel 58 rather than Au solder flux and electrode or silver is arranged at the top of active layer 26 (auxiliary fixing member 30 1 sides).From the viewpoint of crosstalking, this part is anisotropic conductive pastel 58 and the low material of air isoreflectance preferably, rather than the high material of Au isoreflectance.Certainly, also can use surperficial incident type PD array as PD array 28.
The diameter of the light receiving part of back surface incident type PD array 28 (active layer 26) is about 60 μ m.The diameter of light receiving part (active layer 26) is preferably 40-80 μ m.This is because if diameter is then too small owing to light receiving part (active layer 26) less than 40 μ m, thereby the PD light receiving efficiency is descended.During more than or equal to 80 μ m, then PD array 28 is easy to obtain parasitic light (stray light), crosstalks thereby can increase.
In addition, the installation constitution of auxiliary fixing member 30 has adopted the such structure of optical fiber 15-PD array 28-auxiliary fixing member 30.Though also can adopt the structure of optical fiber 15-auxiliary fixing member 30-PD array 28, but, at this moment be present between optical fiber 15 and the PD array 28 owing to auxiliary fixing member 30, so the light path of separated light 24 is elongated, then the distribution of separated light 24 becomes big, and this is disadvantageous from PD light receiving efficiency and the viewpoint of crosstalking.In addition, the constituent material of auxiliary fixing member 30 is Al
2O
3
Back surface incident type PD array 28 disposes positive electrode and negative electrode on its active layer 26 1 sides (auxiliary fixing member 30 1 sides), and forms the pattern of the positive electrode of shared negative electrode and each channel at auxiliary fixing member 30 patrixes with Au electrode pattern 60.Be provided with the prominent point (bump) 62 of Au corresponding to the positive electrode of each channel and the part of negative electrode, and on the part of active layer 26, be filled with anisotropic conductive pastel 58.Adopt the purpose of the prominent point of Au 62 this structures to realize the reliable conducting,, also can be used for reducing by reflection in this part and the caused parasitic light of scattering by increasing the interelectrode distance of active layer 26 and auxiliary fixing member 30 except that being used to.Anisotropic conductive pastel 58 makes the conductive materials such as silver that have in this anisotropic conductive pastel 58 be gathered into the concentrated place of prominent 62 such conductive material of Au by heating thereby have.Like this, only between itself and Au electrode pattern 60, has electric conductivity.
In addition, in order to suppress, in the lower surface of auxiliary fixing member 30, be coated with not shown SiN on the part corresponding with active layer 26 by the caused reflection of refringence.
And, on the installed surface of auxiliary fixing member 30, the liner 32 in the gap that is used for determining 28 of fiber array 16 and PD arrays with UV cured type adhesive securement for example.
And, as shown in Figure 3, in the optical device 10A of this first embodiment, the face of multilayer film 56 1 sides of filter part 20 is defined as first surface 70, and the face of quartz substrate 54 1 sides of filter part 20 is defined as second surface 72, to be defined as first inner wall surface 74 towards the face of the first surface 70 of filter part 20 in the inner wall surface of slit 18, and will be defined as second inner wall surface 76 towards the face of the second surface 72 of filter part 20 time, first inner wall surface 74 of slit 18, one or more the first surfaces 70 with filter part 20 in the second surface 72 of second inner wall surface 76 and filter part 20 are not parallel.At this, " not parallel " refers to and form the folded angle of these uneven two faces is more than or equal to 0.5 °.
Particularly, in this first embodiment, vertical of the optical axis place of the first surface 70 of filter part 20 and flashlight 22 intersected formed line segment be defined as first line segment 80, the second surface 72 of filter part 20 is defined as second line segment 82 with above-mentioned vertical crossing formed line segment, first inner wall surface 74 of slit 18 is defined as the 3rd line segment 84 with above-mentioned vertical crossing formed line segment, second inner wall surface 76 of slit 18 is intersected formed line segment when being defined as the 4th line segment 86 with above-mentioned vertical, then first line segment 80 and second line segment 82 are not parallel mutually, the 3rd line segment 84 and the 4th line segment 86 are not parallel mutually, and first line segment 80 and the 3rd line segment 84 are not parallel mutually.In addition, the magnitude relationship of the angle of inclination of the tilt angle alpha of slit 18 and first line segment 80 (with the plumb line angulation) β is α＜β.In addition, PD array 28 (with reference to Fig. 2) is set at from the light path of the light 24 of the surface (first surface 70) of the multilayer film 56 of filter part 20 reflection.
Therefore, because light 90 by part (first inner wall surface, 74 1 sides of the slit 18 and interface of the resin 19) reflection of first inner wall surface 74 of slit 18, by the light 92 of part (second inner wall surface, 76 1 sides of the slit 18 and interface of the resin 19) reflection of second inner wall surface 76 of slit 18 and by each exit direction of the light 94 of part (interface of quartz substrate 54 and the resin 19) reflection of the second surface 72 of filter part 20 respectively with different by the exit direction of the light 24 of part (multilayer film 56 of filter part 20 and the interface of the resin 19) reflection of the first surface 70 of filter part 20, therefore, can reduce other reflected light 90,92,94 grades are to the interference effect of this reflected light (separated light) 24.This can improve flashlight 22 function for monitoring reliabilities.
Secondly, several variation of the optical device 10A of first embodiment are described with reference to Fig. 4-Figure 12.
At first, as shown in Figure 4, though the optical device 10Aa of first variation has identical substantially structure with the optical device 10A of above-mentioned first embodiment, but difference is: first line segment 80 of filter part 20 is parallel to each other with second line segment 82 of filter part 20, the 3rd line segment 84 of slit 18 is parallel to each other with the 4th line segment 86 of slit 18, and first line segment 80 of filter part 20 is not parallel mutually with the 3rd line segment 84 of slit 18.
As shown in Figure 5, though the optical device 10Ab of second variation has identical substantially structure with the optical device 10Aa of above-mentioned first variation, difference is: the magnitude relationship of the inclination angle beta of the tilt angle alpha of slit 18 and first line segment 80 is α＞β.
As shown in Figure 6, though the optical device 10Ac of the 3rd variation has identical substantially structure with the optical device 10Aa of above-mentioned first variation, difference is: first line segment 80 of filter part 20 is not parallel mutually with second line segment 82 of filter part 20.
As shown in Figure 7, though the optical device 10Ad of the 4th variation has identical substantially structure with the optical device 10Aa of above-mentioned first variation, difference is: the 3rd line segment 84 of slit 18 is not parallel mutually with the 4th line segment 86 of slit 18.
As shown in Figure 8, though the optical device 10Ae of the 5th variation has identical substantially structure with the optical device 10Ac of above-mentioned the 3rd variation, difference is as follows:
That is, the magnitude relationship of the inclination angle beta of the tilt angle alpha of slit 18 and first line segment 80 is α＞β.In addition, the bottom surface 20a of filter part 20 touches the bottom 18a of slit 18.At this moment, the bottom surface 20a of filter part 20 is contacted with the bottom 18a of slit 18 just can make filter part 20 keep desired angle beta, assembling operation is also easy.
As shown in Figure 9, though the optical device 10Af of the 6th variation has identical substantially structure with the optical device 10Ae of above-mentioned the 5th variation, but difference is: the 4th line segment 86 of first line segment 80, second line segment 82 and the slit 18 of filter part 20 is parallel to each other, and the bottom 18a of the bottom surface 20a of filter part 20 contact slit 18.
As shown in figure 10, though the optical device 10Ag of the 7th variation has identical substantially structure with the optical device 10Ab of above-mentioned second variation, difference is as follows:
At first, the angle of the line segment (being expressed as the lower part 82a of second line segment 82) of the part that the inner core 40 from bottom surface 20a no show and optical fiber 15 in second line segment 82 of filter part 20 is corresponding, with above-mentioned second line segment 82 interior comprise different with the angle of the line segment (being expressed as the top 82b of second line segment 82) of the corresponding part of the inner core 40 of optical fiber 15.That is, the second surface 72 of filter part 20 bends halfway.
In addition, the 3rd line segment 84 of slit 18 and the 4th line segment 86 are parallel to each other.The angle of the lower part 82a of second line segment 82 of filter part 20 is identical substantially with the angle of the 4th line segment 86 of slit 18.The top 82b of second line segment 82 of filter part 20 and first line segment 80 of filter part 20 are parallel to each other.The bottom surface 20a of filter part 20 contacts with the bottom 18a of slit 18.
That is, the form of this optical device 10Ag is: contact with the bending side that is formed by the surperficial 72a of the downside of the basal surface 20a of filter part 20 and second surface 72 (corresponding to the face of the lower part 82a of second line segment 82) at the bending side that is formed by the bottom 18a of slit 18 and second inner wall surface 76.
Therefore, in assembling, when inserting filter part 20 in the slit 18, only need pass through above-mentioned bending side with the above-mentioned bending side alignment slot 18 of filter part 20, just can simply filter part 20 be temporarily fixed in the slit 18 with desired angle, thereby make the assembling of back become easy.
Then, as shown in figure 11, though the optical device 10Ah of the 8th variation has identical substantially structure with the optical device 10Ag of above-mentioned the 7th variation, difference is as follows:
At first, first line segment 80 of filter part 20 and second line segment 82 are parallel to each other.The bottom surface 20a of filter part 20 contacts with the bottom 18a of slit 18.In addition, the bottom of the first surface 70 of filter part 20 contacts with the bottom of first inner wall surface 74 of slit 18, and the upper end of the second surface 72 of filter part 20 contacts with the upper end of second inner wall surface 76 of slit 18.
At this moment, also same with the optical device 10Ag of above-mentioned the 7th variation, in assembling, filter part 20 was inserted in the slit 18 so that the stage that the bottom surface 20a of filter part 20 contacts with the bottom 18a of slit 18, can simply filter part 20 be temporarily fixed in the slit 18 with desired angle, thereby make the assembling of back become easy.
Then, as shown in figure 12, though the optical device 10Ai of the 9th variation has identical substantially structure with the optical device 10Af of above-mentioned the 6th variation, difference is as follows:
The angle of the line segment (being expressed as the lower part 84a of the 3rd line segment 84) of the part that the inner core 40 from bottom 18a no show and optical fiber 15 in the 3rd line segment of slit 18 is corresponding is different with the corresponding angle corresponding to line segment (being expressed as the top 84b of the 3rd line segment 84) partly of the inner core 40 of optical fiber 15 with comprising in above-mentioned the 3rd line segment 84.That is, first inner wall surface 74 of filter part 20 bends halfway.
This can be from existing actual configuration, promptly, in first inner wall surface 74 of the first surface 70 of filter part 20 and second surface 72 and slit 18 and second inner wall surface 76 structure all parallel to each other substantially, only, promptly make the optical device 10Ai of the 9th variation by first inner wall surface 74 that is cut into slit 18 from top.This situation with the optical device 10Aa-10Ah that makes first-Di, eight variation is compared and can also be made more simply, and, can freely change the differential seat angle of slit 18 and filter part 20.Certainly, can also promptly tackle the change etc. of this optical device description.
Even in the optical device 10Aa-10Ai of these first-Di, nine variation, also same with the optical device 10A of above-mentioned first embodiment, other reflected light 90,92 and 94 etc. can be reduced to interference effect, and the reliability of flashlight 22 function for monitoring can be improved from the reflected light 24 of the part of the first surface 70 of filter part 20.
Secondly, the optical device 10B of second embodiment is described with reference to Figure 13.
As shown in figure 13, in the optical device 10B of this second embodiment, the first surface 70 of filter part 20 is defined as the 5th line segment 100 with the crossing formed line segment of the optical axis place surface level of flashlight 22, the second surface 72 of filter part 20 is defined as the 6th line segment 102 with the crossing formed line segment of above-mentioned surface level, first inner wall surface 74 of slit 18 is defined as the 7th line segment 104 with the crossing formed line segment of above-mentioned surface level, second inner wall surface 76 of slit 18 and above-mentioned surface level are intersected formed line segment when being defined as the 8th line segment 106, then the 7th line segment 104 and the 8th line segment 106 are parallel to each other, and the 5th line segment 100 and the 7th line segment 104 are not parallel mutually.
At this moment also same with the optical device 10A of above-mentioned first embodiment, other reflected light 90,92,94 etc. can be reduced to interference effect, and the reliability of flashlight 22 function for monitoring can be improved from the reflected light 24 (with reference to Fig. 2) of the reflection of the part of the first surface 70 of filter part 20.
In this second embodiment, no matter the 5th line segment 100 and the 7th line segment 104 also can be not parallel mutually and the relation of other line segment.For example, the 5th line segment 100 and the 6th line segment 102 can be parallel to each other or not parallel, and the 5th line segment 100 and the 8th line segment 106 also can be parallel to each other or not parallel.Equally, the 6th line segment 102 and the 7th line segment 104 can be parallel to each other or not parallel, and the 6th line segment 102 and the 8th line segment 106 also can be parallel to each other or not parallel.
Secondly, the optical device 10C of the 3rd embodiment is described with reference to Figure 14.
As shown in figure 14, the optical device 10A of the optical device 10C of the 3rd embodiment and above-mentioned first embodiment has identical construction substantially.Especially, for example, a slit 18 is set jointly, and a filter part 20 is inserted in the slit 18 for the fiber array 16 that constitutes by seven optical fiber 15, and potting resin 19 in the gap of this slit 18 in this slit 18 and filter part 20.
And relative with first inner wall surface 74 of slit 18 at least face (first surface) 70 of filter part 20 bends to concavity towards above-mentioned first inner wall surface 74.Degree of crook preferably the difference of the middle body of filter part 20 and two end portions more than or equal to 5 μ m smaller or equal to 100 μ m.This be because, during less than 5 μ m, be difficult to be provided with desired angle, during greater than 100 μ m, be difficult to insert filter part 20.
Like this, in the optical device 10C of the 3rd embodiment, for 7 light 15, face (first inner wall surface) 74 relative with the filter part 20 of slit 18 and the face (first surface) 70 relative with first inner wall surface 74 of the slit 18 of filter part 20 are not parallel mutually, and then the first surface 70 of filter part 20 is not parallel mutually with second surface 72.Therefore, other reflected light 90,92,94 etc. can be reduced, and the reliability of flashlight 22 function for monitoring can be improved interference effect from the reflected light 24 on the surface of the multilayer film 56 of filter part 20.
Method as crooked filter part 20 has, and for example, can realize at an easy rate by the structure at the surperficial formed multilayer film 56 of quartz substrate 54.That is, by forming multilayer film 56, because quartz substrate is produced stress, quartz substrate 54 is bent to concavity by 56 formed of multilayer films.Crooked degree can suitably be adjusted according to the thickness of each tunic that constitutes multilayer film 56 and the number of plies of material and multilayer film 56 etc.
As other method, the machining precision (for example, polishing degree) that also preferably adopts the surface by changing quartz substrate 54 and the back side is so that the method for quartz substrate 54 bendings.In quartz substrate 54, can make the machining precision higher (for example, representing) on the surface that forms multilayer film 56, the machining precision at the back side lower (for example, representing) with finish mark with finish mark .
In addition, as other method, also preferably adopt by when making with extra care quartz substrate 54, to the surface and the back side blowing of quartz substrate 54, and then change blows to the air quantity at the surface and the back side so that the method for quartz substrate 54 bendings.By making air quantity to the surface of quartz substrate 54 greater than air quantity to the back side, then the compression stress that the surface produced of the quartz substrate 54 when refining is so just made surface (forming the face of multilayer film a 56) side in the refining stage that is through with and is the quartz substrate 54 of concavity bending than the compression stress height that the back side produced.
Secondly, the optical device 10D of the 4th embodiment is described with reference to Figure 15.
As shown in figure 15, the optical device 10D of the 4th embodiment and the optical device 10A of above-mentioned first embodiment have identical construction substantially, but difference is: first inner wall surface 74 of the first surface 70 of filter part 20, slit 18 is parallel to each other with second inner wall surface 76 of slit 18, and the second surface 72 of filter part 20 (quartz substrate 54 back sides) is a rough surface.
Certainly, the first surface 70 of filter part 20 also can be not parallel mutually with first inner wall surface 74 of slit 18.
Usually, from thickness of the reflected light reason filter part 20 of the first surface 70 (surface of multilayer film 56) of filter part 20 etc. and be subjected to catoptrical strong interference from the second surface 72 of filter part 20.In addition, from the reflected light of the part of first inner wall surface 74 of slit 18 and recently little from the catoptrical interference of above-mentioned second surface 72 from the catoptrical interference of the part of second inner wall surface 76 of slit 18.
In the 3rd embodiment, because the second surface 72 of filter part 20 is made rough surface, so penetrate at random and become scattered light from the reflected light of the second surface 72 of filter part 20.Therefore, can reduce effectively from the reflected light of second surface 72, and can improve the reliability of flashlight 22 function for monitoring effectively catoptrical interference effect from the first surface 70 of filter part 20.
Have as the method for quartz substrate 54 back sides being made rough surface, for example, when processing quartz substrate 54, use the low thicker grinding tool of particle of granularity number to carry out abrasive method.Preferably adopt with chemicals etching methods such as hydrofluorite.In addition, also can adopt Laser Processing to make the method for fiber fuse, or only change near the method for the shape of inner core with same laser with the change surface state.
In addition, when making quartz substrate 54 with spin coating (spin coating), be pre-formed by surface at the spin coating part concavo-convex, thereby can be with the above-mentioned concavo-convex back side that is transferred to quartz substrate 54.
When making quartz substrate 54 with the glass compacting, by in advance the part at the back side that is used to form quartz substrate 54 in the metal die being made rough surface, thereby can be when compacting finishes the above-mentioned rough surface of metal die be transferred on the back side of quartz substrate 54.
In the optical device 10D of above-mentioned the 4th embodiment, though only the second surface 72 of filter part 20 is made rough surface, but, the optical device 10Da of variation as shown in figure 16 is such, and first inner wall surface 74 of slit 18 and second inner wall surface 76 wait other face also can all make rough surface.At this moment, owing to be scattered light, so can further reduce to catoptrical interference effect from the first surface 70 of filter part 20 from the reflected light of the part of first inner wall surface 74 of slit 18 with from the reflected light of the part of second inner wall surface 76 of slit 18.
In addition, the optical device 10E of the 5th embodiment as shown in figure 17 is such, the end face and end face that will have the first glass substrate 12A of the V-shaped groove 14A that fixes the first fiber array 16A with second glass substrate 12B of the V-shaped groove 14B that fixes the second fiber array 6B, and the end face of the end face of the first fiber array 16A and the second fiber array 16B combines by light splitting part 20.At this moment, make it be aligned with each other the center by first and second fiber array 16A and 16B are adjusted, and be individually fixed among each V-shaped groove 14A and 14B of first and second glass substrate.According to the 5th embodiment, its optical device 10A-10D with first-Di, four embodiment is different, the problem of glass substrate 12 strength degradation that taken place in the time of needn't considering to increase the degree of depth of slit 18.
In the optical device 10A-10E of above-mentioned first-Di, five embodiment, though the example of the fiber array of having represented to be applicable to that multifiber 15 is arranged in 16, still, also applicable to for example on the LN substrate, arranging the optical waveguide array that becomes by a plurality of optical waveguides that forms.
Secondly, the example application according to the optical device 10A of first embodiment is described.At first, make the glass substrate 12 that is used for single-column type fiber array 16 by attrition process.
As the material of glass substrate 12, used borosilicate glass (, specifically using Pyrex (registered trademark) glass material) at this.The size of glass substrate 12 is long 16mm, thick 1mm, and being used to make the V-shaped groove 14 of fiber array 16 proper alignment is that 250 μ m, the degree of depth are 12 of 90 μ m by attrition process formation spacing.
Then, carry out the assembling of fiber array 16.It is the strap-like member (12-core tape-armored fiber assembly) of the 12 core fibre band protective sleeves of 250 μ m that fiber array 16 uses spacing.The middle protective sleeve of the strap-like member of 12 core fibre band protective sleeves is peelled off, and the length of the part that protective sleeve is peelled off in the middle of making is 12mm, then it is positioned in the V-shaped groove 14 of glass substrate 12, and with UV cured type adhesive securement.
Then, fiber array 16 is carried out the processing of slit 18.Slit 18 wide 30 μ m, dark 200 μ m, tilt angle alpha are 20 °.
Then, make filter part 20.For example form on quartz substrate 54 from optional multilayer films 56 such as tantalum oxide, quartz, alumina, titanium dioxide by evaporation, the quartz substrate 54 that will be formed with multilayer film 56 then is processed into the shape of thick 20 μ m, long 5mm, wide 200 μ m and is made into filter part 20.It is transmissivity 93%, reflectivity 7% that the angle of inclination is designed to 20 °, segregation ratio.
, filter part 20 inserted slit 18 in, adjust at positioning stage again, make the inclination angle beta of 70 pairs of optical axises of first surface of filter part 20 be for example 20.5 °-21 thereafter.Filter part 20 is inserted in the slit 18, and under the state fixing, resin 19 is filled in the slit 18 with above-mentioned inclination angle beta.It is resin that resin 19 uses the refractive index silicon identical substantially with the refractive index of the inner core 40 of optical fiber 15.Behind potting resin 19, make this resin 19 sclerosis.
The optical device 10A of the structure of PD array 28 and first embodiment is same, adopts back surface incident type.Anisotropic conductive pastel 58 has been filled on the top of active layer 26 (auxiliary fixing member 30 1 sides).
Secondly, carry out the aligning of PD array.Particularly, the liner 32 that will be used for determining the spacing of fiber array 16 and PD array 28 is installed in auxiliary fixing member 30.
The constituent material of liner 32 is borosilicate glasses, at this moment, is specially Pyrex (registered trademark) glass material.In addition, gap length is set at 10 μ m.That is, owing to comprise that the thickness of the PD array 28 of the prominent point 62 of Au is 190 μ m, so liner 32 is decided to be 200 μ m.
And, for the active layer 26 that makes PD array 28 is positioned on the light path from the reflected light 24 of the first surface 70 of filter part 20, on one side PD array 28 is carried out aligning, by liner 32 auxiliary fixing member 30 is installed on the fiber array 16 on one side.
And, the optical device of example application has been carried out evaluation of measuring.By the catoptrical influence that refringence causes, present the characteristic variations of the light receiving efficiency that causes because of temperature variation along with PD array 28 and the characteristic variations of the light receiving efficiency of PD array 28 behind high temperature and humidity test and become more remarkable.Therefore, assess with comparative example with regard to these 2.
The structure that comparative example has is, in the optical device 10A of the 1st embodiment, the difference of the inclination angle beta of the first surface 70 of the tilt angle alpha of slit 18 and filter part 20 set for less than 0.5 degree.
In comparative example, be about 0.5dB by the caused light receiving efficiency variation of temperature variation.In addition, the variation of the light receiving efficiency behind the high temperature and humidity test also is about 0.5dB.
On the other hand, the optical device of example application is about 0.1dB by the light receiving efficiency variation behind caused light receiving efficiency variation of temperature variation and the high temperature and humidity test, therefore as can be known, almost can't see the variation of characteristic.
In addition, optical device of the present invention is not limited to the foregoing description, only otherwise break away from purport of the present invention, can adopt various structures certainly.
Claims (14)
1. optical device is characterized in that:
Have:
Optical transmission means (15),
The slit (18) that is provided with in the above-mentioned optical transmission means (15),
Insert in the above-mentioned slit (18), be used for separating the part of the flashlight (22) that transmits by above-mentioned optical transmission means (15) filter part (20),
Be filled in interior above-mentioned slit (18) of above-mentioned slit (18) and the resin (19) in the gap between above-mentioned filter part (20);
Above-mentioned filter part (20) has substrate (54) and is formed at optical thin film (56) on the first type surface of above-mentioned substrate (54);
When with above-mentioned filter part, (20) above-mentioned optical thin film, the face of (56) one sides is defined as first surface, (70), with above-mentioned filter part, (20) above-mentioned substrate, the face of (54) one sides is defined as second surface, (72), at above-mentioned slit, (18) in the inner wall surface, will with above-mentioned filter part, (20) above-mentioned first surface, (70) relative face is defined as first inner wall surface, (74), will with above-mentioned filter part, (20) above-mentioned second surface, (76) relative face is defined as second inner wall surface, (76) time
One or more the first surfaces (70) with above-mentioned filter part (20) in the above-mentioned second surface (72) of first inner wall surface (74) of above-mentioned slit (18), above-mentioned second inner wall surface (76) and above-mentioned filter part (20) are not parallel.
2. optical device according to claim 1 is characterized in that: above-mentioned uneven two surperficial angulations are more than or equal to 0.5 °.
3. optical device according to claim 1 is characterized in that:
The above-mentioned first surface (70) of above-mentioned filter part (20) and vertical crossing formed line segment in optical axis place of above-mentioned flashlight (22) are defined as first line segment (80), the above-mentioned second surface (72) of above-mentioned filter part (20) is defined as second line segment (82) with above-mentioned vertical crossing formed line segment, above-mentioned first inner wall surface (74) of above-mentioned slit (18) is defined as the 3rd line segment (84) with above-mentioned vertical crossing formed line segment, above-mentioned second inner wall surface (76) of above-mentioned slit (18) is intersected formed line segment when being defined as the 4th line segment (86) with above-mentioned vertical
One or more line segments and above-mentioned first line segment (80) in above-mentioned second line segment (82), above-mentioned the 3rd line segment (84) and above-mentioned the 4th line segment (86) are not parallel.
4. optical device according to claim 3 is characterized in that:
Above-mentioned first line segment (80) and above-mentioned second line segment (82) are not parallel mutually;
Above-mentioned the 3rd line segment (84) and above-mentioned the 4th line segment (86) are not parallel mutually;
Above-mentioned first line segment (80) and above-mentioned the 3rd line segment (84) are not parallel mutually.
5. optical device according to claim 3 is characterized in that:
Above-mentioned first line segment (80) and above-mentioned second line segment (82) are parallel to each other;
Above-mentioned the 3rd line segment (84) and above-mentioned the 4th line segment (86) are parallel to each other;
Above-mentioned first line segment (80) and above-mentioned the 3rd line segment (84) are not parallel mutually.
6. optical device according to claim 3 is characterized in that:
Above-mentioned first line segment (80) and above-mentioned second line segment (82) are not parallel mutually;
Above-mentioned the 3rd line segment (84) and above-mentioned the 4th line segment (86) are parallel to each other;
Above-mentioned first line segment (80) and above-mentioned the 3rd line segment (84) are not parallel mutually.
7. optical device according to claim 3 is characterized in that:
Above-mentioned first line segment (80) and above-mentioned second line segment (82) are parallel to each other;
Above-mentioned the 3rd line segment (84) and above-mentioned the 4th line segment (86) are not parallel mutually;
Above-mentioned first line segment (80) and above-mentioned the 3rd line segment (84) are not parallel mutually.
8. optical device according to claim 1 is characterized in that:
The above-mentioned first surface (70) of above-mentioned filter part (20) is defined as the 5th line segment (100) with the crossing formed line segment of the surface level at the optical axis place of above-mentioned flashlight (22), the above-mentioned second surface (72) of above-mentioned filter part (20) is defined as the 6th line segment (102) with the crossing formed line segment of above-mentioned surface level, above-mentioned first inner wall surface (74) of above-mentioned slit (18) is defined as the 7th line segment (104) with the crossing formed line segment of above-mentioned surface level, above-mentioned second inner wall surface (76) of above-mentioned slit (18) and above-mentioned surface level are intersected formed line segment when being defined as the 8th line segment (106)
One or more line segments and above-mentioned the 5th line segment (100) in above-mentioned the 6th line segment (102), above-mentioned the 7th line segment (104) and above-mentioned the 8th line segment (106) are not parallel.
9. optical device according to claim 8 is characterized in that:
Above-mentioned the 7th line segment (102) and above-mentioned the 8th line segment (104) are parallel to each other;
Above-mentioned the 5th line segment (100) and above-mentioned the 7th line segment (102) are not parallel mutually.
10. optical device is characterized in that:
Have:
A plurality of optical transmission means (15),
The slit (18) that is provided with jointly in above-mentioned a plurality of optical transmission means (15),
Insert in the above-mentioned slit (18), be used for separating the filter part (20) of each part of the flashlight (22) that transmits by above-mentioned a plurality of optical transmission means (15),
Be filled in interior above-mentioned slit (18) of above-mentioned slit (18) and the resin (19) in the gap between above-mentioned filter part (20);
Above-mentioned filter part (20) has relative with above-mentioned slit (18) at least curved surface (70).
11. an optical device is characterized in that:
Have:
Optical transmission means (15),
The slit (18) that is provided with in the above-mentioned optical transmission means (15),
Insert in the above-mentioned slit (18), be used for separating the filter part (20) of the part of the flashlight (22) that transmits by above-mentioned optical transmission means (15),
Be filled in interior above-mentioned slit (18) of above-mentioned slit (18) and the resin (19) in the gap between above-mentioned filter part (20);
Above-mentioned filter part (20) has substrate (54) and is formed at optical thin film (56) on the first type surface of above-mentioned substrate (54);
When with above-mentioned filter part, (20) above-mentioned optical thin film, the face of (56) one sides is defined as first surface, (70), with above-mentioned filter part, (20) above-mentioned substrate, the face of (54) one sides is defined as second surface, (72), at above-mentioned slit, (18) in the inner wall surface, will with above-mentioned filter part, (20) above-mentioned first surface, (70) relative face is defined as first inner wall surface, (74), will with above-mentioned filter part, (20) above-mentioned second surface, (72) relative face is defined as second inner wall surface, (76) time
The above-mentioned second surface (72) of above-mentioned at least filter part (20) is a rough surface.
12. optical device according to claim 11 is characterized in that: above-mentioned first inner wall surface (74) and above-mentioned second inner wall surface (76) of above-mentioned slit (18) are rough surfaces.
13., it is characterized in that according to claim 11 or 12 described optical device:
Surfaceness Rt as the face of above-mentioned rough surface is 0.05 μ m≤Rt 〉=2 μ m.
14. according to each described optical device among the claim 1-13, it is characterized in that: the part of the bottom surface (20a) of above-mentioned at least filter part (20) contacts with above-mentioned slit (18) bottom (18a).
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP370751/2002 | 2002-12-20 | ||
| JP2002370751 | 2002-12-20 | ||
| JP11560/2003 | 2003-01-20 | ||
| JP157201/2003 | 2003-06-02 |
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| CN1729416A true CN1729416A (en) | 2006-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200380107021 Pending CN1729416A (en) | 2002-12-20 | 2003-12-19 | Optical device |
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| CN (1) | CN1729416A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102667565A (en) * | 2009-12-22 | 2012-09-12 | 恩普乐股份有限公司 | Lens array and optical module provided therewith |
| CN103424820A (en) * | 2012-05-14 | 2013-12-04 | 三菱电机株式会社 | Optical receiver |
| CN104635291A (en) * | 2007-10-11 | 2015-05-20 | 瑞尔D股份有限公司 | Curved optical filters |
| CN107515054A (en) * | 2017-09-25 | 2017-12-26 | 中国计量大学 | A kind of fiber optic temperature and refractometry sensing device based on Michelson's interferometer |
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2003
- 2003-12-19 CN CN 200380107021 patent/CN1729416A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104635291A (en) * | 2007-10-11 | 2015-05-20 | 瑞尔D股份有限公司 | Curved optical filters |
| CN102667565A (en) * | 2009-12-22 | 2012-09-12 | 恩普乐股份有限公司 | Lens array and optical module provided therewith |
| CN102667565B (en) * | 2009-12-22 | 2015-05-13 | 恩普乐股份有限公司 | Lens array and optical module provided therewith |
| CN103424820A (en) * | 2012-05-14 | 2013-12-04 | 三菱电机株式会社 | Optical receiver |
| US8989604B2 (en) | 2012-05-14 | 2015-03-24 | Mitsubishi Electric Corporation | Optical receiver |
| CN103424820B (en) * | 2012-05-14 | 2015-10-28 | 三菱电机株式会社 | Optical receiver |
| CN107515054A (en) * | 2017-09-25 | 2017-12-26 | 中国计量大学 | A kind of fiber optic temperature and refractometry sensing device based on Michelson's interferometer |
| CN107515054B (en) * | 2017-09-25 | 2023-10-27 | 中国计量大学 | Optical fiber temperature and refractive index measurement sensing device based on Michelson interferometer |
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