CN1727294A - Sintering appts. - Google Patents

Sintering appts. Download PDF

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Publication number
CN1727294A
CN1727294A CN 200410054673 CN200410054673A CN1727294A CN 1727294 A CN1727294 A CN 1727294A CN 200410054673 CN200410054673 CN 200410054673 CN 200410054673 A CN200410054673 A CN 200410054673A CN 1727294 A CN1727294 A CN 1727294A
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CN
China
Prior art keywords
substrate
burning apparatus
suspender
transport unit
conveyer chain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 200410054673
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Chinese (zh)
Inventor
浦西芳和
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JTEKT Thermo Systems Corp
Original Assignee
Koyo Thermo Systems Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koyo Thermo Systems Co Ltd filed Critical Koyo Thermo Systems Co Ltd
Priority to CN 200410054673 priority Critical patent/CN1727294A/en
Publication of CN1727294A publication Critical patent/CN1727294A/en
Pending legal-status Critical Current

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Abstract

A firing apparatus with low electric consumption and cost and small sizes is composed of a firing furnace, two heaters on both lateral inner surfaces of said firing furnace, a transfer unit with two transfer routes having a standing transfer plate for each route, a gas supplying pipe and a gas exhausting pipe.

Description

Burning apparatus
Technical field
The present invention relates to a kind of burning apparatus, this burning apparatus for example is used for burning till employed substrates as the sheet glass such as liquid-crystal display, plasma display.
Background technology
Well-knownly as this kind burning apparatus be, it is called as the roller bottom type continuous burning device, comprise firing furnace and continuously arranged along the longitudinal a plurality of pottery system transfer rollers in firing furnace, on this transfer roller, carry substrate by setting glass, thereby under this state, substrate is heat-treated (for example, with reference to TOHKEMY 2003-262473 communique).
In device in the past, there is following problems.The first, owing to need to use the glass that sets of big thermal capacity, institute thinks to make and sets glass and heat up and will expend a lot of electric power.The second, because the transverse width dimension of device is subjected to setting the restriction of the transverse width dimension of glass, be limitary so shorten the transverse width dimension of device.The 3rd, because part must use the expensive ceramic roller of price, so be difficult to reduce installation cost.
Summary of the invention
The object of the present invention is to provide a kind of burning apparatus, this burning apparatus can address the above problem fully, can reduce power consumption, the transverse width dimension that shortens device and the reduction of implement device cost.
Burning apparatus of the present invention comprises: firing furnace; Well heater, this well heater are installed in respectively on the interior two sides of firing furnace; Transport unit, this transport unit have 2 transmission routes that are spaced from each other the interval along the stove longitudinal extension, and transmit on route with state transmission substrate parallel with delivery direction and on end at each; Air-supply duct and vapor pipe, this air-supply duct and vapor pipe transmit between the route two and extend.
In burning apparatus of the present invention,, thereby can reduce power consumption owing to the member that need not to use as setting glass.In addition, because be to transmit substrate with upright state, thus but the transverse width dimension of reduction means.And need not the member that uses ceramic roller such, so but the reduction of implement device cost.And, can heat the substrate transmitting by well heater from its outside, carry out the dust discharge ventilation from its inboard by air-supply duct and vapor pipe.Substrate for example is the occasion of plasma display with panel, can make attached to the vaporization of the tackiness agent on it and can take a breath to the gas after the vaporization.Transmit route owing on the both sides of air-supply duct and vapor pipe, be formed with 2 substrates, so except that can carrying out the exhaust ventilation expeditiously, can also transmit substrate expeditiously with 2 row.
And air-supply duct is responsible for by air feed and is responsible for many gas manifolds of ramose from air feed and constitutes, and is formed with a plurality of air feed ports on the longitudinal direction of gas manifold; Vapor pipe is responsible for by exhaust and is responsible for many exhaust branch pipes of ramose from each exhaust and constitutes, exhaust branch pipe vertically on be formed with a plurality of venting ports, can carry out air feed and exhaust from number thus.
In addition, if air feed is responsible for and the exhaust person in charge separates the just direction extension up and down of predetermined distance ground on the delivery direction of substrate, and gas manifold and exhaust branch pipe are adjacent and extend to the opposite direction of delivery direction or Xiang Yuqi on above-below direction, and gas manifold and exhaust branch pipe are arranged compactly.
In addition, if the outstanding grid-like thermal barrier in side in two sides are provided with in the firing furnace, well heater be by be configured in respectively be equivalent on the formed grate opening of the thermal barrier part and respectively a plurality of radiator bodies of controlled temperature constitute, then can improve the temperature control performance of each several part in the stove, each several part in the stove can be heated to desired temperature.
In addition, if transport unit comprises the transfer body of the lower edge of bearing substrate and the liner that moves that guides the rising wood of substrate, deadweight is acted on the substrate transmits.
In addition, if transport unit is equipped with the liner that moves of the lower edge of the suspender of the rising wood of hanging base board, the conveyer chain that suspender is installed and guiding substrate, then can constitute transport unit simply.
In addition, if transport unit is equipped with conveyer chain, at the suspender and the supporting mass between conveyer chain and suspender of the rising wood of the overhung substrate of conveyer chain, then need not the member as the liner of lower edge of guiding substrate, can constitute transport unit simply.
According to the present invention, a kind of burning apparatus can be provided, this burning apparatus can reduce the transverse width dimension of power consumption, reduction means and reduce installation cost.
Description of drawings
Fig. 1 is the explanatory view of the firing furnace of burning apparatus of the present invention.
Fig. 2 is the vertical longitudinal diagram in the preheating zone of burning apparatus of the present invention.
Fig. 3 is the drawing in side sectional elevation of identical burning apparatus.
Fig. 4 is the explanatory view of change of the transport unit of the identical burning apparatus of expression.
Fig. 5 is the explanatory view of other distortion of expression same conveyor.
Fig. 6 is the explanatory view of the another variation of expression same conveyor.
Fig. 7 is the explanatory view of the another variation of expression same conveyor.
Fig. 8 is the explanatory view of the another variation of expression same conveyor.
Fig. 9 is the explanatory view of the another variation of expression same conveyor.
Figure 10 is the explanatory view of the another variation of expression same conveyor.
Figure 11 is an explanatory view of watching Figure 10 from the side.
Figure 12 is the explanatory view of the another variation of expression same conveyor.
Embodiment
Below, with reference to accompanying drawing embodiments of the present invention are described.
In the following description, so-called front and back are meant and are called preceding (right side of Fig. 1) with transmitting substrate progressive one side, after a side opposite with it is called; Be meant about what is called when the rear is seen its left and right sides is called about.
Fig. 1 represents the one-piece construction of firing furnace 11.Import 11A from firing furnace 11 in its stove is divided into 4 zones up to outlet 11B.So-called 4 zones are meant: the preheating quenching zone, burn till zone, annealing region and cooled region.Contrast Fig. 1 represents the temperature distribution in these 4 zones.
Below, describe the structure that burns down in the zone in detail.
With reference to Fig. 2 and Fig. 3 as seen, burning apparatus comprise in firing furnace 11, the heating firing furnace 11 well heater 12 and firing furnace 11 in the transport unit 13 of and the state transmission substrate erect parallel with delivery direction.
Firing furnace 11 be have long edge above-below direction rectangular cross section, in front and back the structure of upwardly extending horizontal square tube shape, it is made of roof 21, diapire 22 and left and right sides sidewall 23,24.These furnace walls 21~24 are made of ceramic fiber moulding lagging material.In addition, the desired location place of 21~24 inner faces is provided with and has suppressed the specific coatings that dirt is used in the furnace wall.
Be formed with in the firing furnace 11 along the continuously arranged a plurality of regional Zn of fore-and-aft direction (n is an integer, is illustrated as Z2, Z3 and Z4).And, in each regional Zn, be formed with arrange along the vertical direction a plurality of, be 3 dividing regions D1, D2 and D3 at this.
The outstanding grid-like thermal barrier 25 in side in firing furnace 11, being respectively arranged with on the face of the left and right sides.The material of this thermal barrier 25 is identical with the lagging material of the furnace wall 21~24 that forms firing furnace 11.Thermal barrier 25 formed grid ordinates extend in the mode corresponding with the boundary of adjacent 2 regional Zn, thermal barrier 25 formed grid horizontal lines with each regional Zn in the mode of boundary correspondence of adjacent 2 dividing regions Dn (n is an integer, is Z2, Z3, Z4 among the figure) extend.
Well heater 12 is made of a plurality of radiator bodies 26, and these radiator bodies 26 are configured in respectively on the part that is equivalent to thermal barrier 25 formed grate openings.Each radiator body 26 is made of the resistance metal line that is configured as the shape that crawls and is embedded in corresponding side walls 33,34 inner faces with integral way.
In each regional Zn, be provided with air-supply duct 31 and vapor pipe 32.
Air-supply duct 31 is responsible for 41 and be responsible for 3 horizontal gas manifolds 42 that 3 local branches longitudinally of 41 come out from air feed and constitute by the vertical configuration air feed.The air feed person in charge 41 is run through roof 21 and direction extension up and down in the left and right directions centre portion of the leading section of each regional Zn.Each gas manifold 42 extends back near having the upper end of perisporium that cross section is a upside-down triangle shape and its dividing regions D1 in correspondence, D2, D3.Place, many places longitudinally in the V of perisporium word shape bottom down forms per 2 and becomes a pair of many to air feed port 43.Paired 2 air feed ports 43 have the angle towards about rightabout 45 degree mutually with respect to vertical line.
Vapor pipe 32 is responsible for 44 and be responsible for 4 horizontal exhaust branch pipes 45 that 4 local branches of 44 longitudinal direction come out from exhaust and constitute by the vertical configuration exhaust.The exhaust person in charge 44 is run through roof 21 and direction extension up and down in the left and right directions central part of the rearward end of each regional Zn.It is that foursquare perisporium and its extend forward that each exhaust branch pipe 45 has cross section.Article 4, contacts below the uppermost exhaust branch pipe 45 in the exhaust branch pipe 45 and the roof 21, from last several the 2nd with the 3rd exhaust branch pipe 45 with contact nethermost exhaust branch pipe 45 and diapire 22 top contacts above the corresponding gas manifold 42.In addition, in 4 exhaust branch pipes 45, on the flat condition bottom surface of uppermost exhaust branch pipe 45 perisporiums, down form per 2 and become a pair of many, become a pair of many venting port 46 but on the flat condition top of other the 2nd~4th exhaust branch pipe 45 perisporium, up form per 2 to venting port 46.Paired per 2 venting ports 46 with respect to vertical line have remain mutually towards rightabout 45 the degree about angle.
Transport unit 13 is equipped with near row transfer roller row 51 that extend along fore-and-aft direction that are configured in firing furnace 11 inner bottom parts, and be configured near firing furnace 11 inner tops along fore-and-aft direction extend about each a pair of guide roller row 52.
Transfer roller row 51 are made of a plurality of horizontal transmission rollers 53 that are arranged as 1 row and extend along left and right directions with separating predetermined distance on fore-and-aft direction.Below nethermost radiator body 26, the both ends of each transfer roller 53 are run through two side 23,24 and are projected into the side in the mode of the top that passes across nethermost exhaust branch pipe 45.On part transfer roller 53 outsides, that be positioned at firing furnace 11, be formed with pair of right and left ring-type substrate receiver 54.Two substrates receiver 54 clips air-supply duct 31 and vapor pipe 32 and is positioned at their both sides.
About guide roller row 52 have identical structure, it is arranged to be separated with between two guide rollers with the mode of two substrates receiver 54 identical distance.Each guide roller row 52 is made of a plurality of vertically-guided rollers 55 of lining up 2 row on front and back and left and right directions with separating predetermined distance.About the thickness that separates than substrate P of guide roller 55 only be installed on the vertical roll shaft 56 compartment of terrain of big denier.Roll shaft 56 extends through on the roof 21.
The rising wood that the lower edge of 2 substrate P enters into 54,2 substrate P of substrate receiver by about the state that clips of guide roller 55 under, in firing furnace 11, forward simultaneously.At this moment, by not making illustrated drive unit, all transfer rollers 53 are driven in rotation with identical speed along the clockwise direction among Fig. 2.Substrate P is the occasion of plasma display with plate, is coated with apposition tackiness agent etc. on this surface.Under the state of inboard, transmit substrate P making its surface.When by the preheating zone, tackiness agent etc. produce vaporization, expeditiously it are led the outside by air-supply duct 31 and vapor pipe 32.
Below, the various variation of transport unit 13 are described.In following explanation, for convenience and the symbol that mark is identical on pairing part is represented.
On Fig. 4, there is expression to bear the transfer roller 61 of lower edge of 1 substrate P and the guide roller 62 that guides the upper limb of same substrate P.On transfer roller 61 outside surfaces, be formed with 1 ring-type substrate receiver 63.On guide roller 62 outside surfaces, be formed with 1 ring-type substrate pushing groove 64.
Fig. 5 is an example of representing to transmit simultaneously 2 substrate P.On the outside surface of the transfer roller 61 identical, be formed with 2 substrate receivers 63 with the transfer roller 61 shown in Fig. 4.Equally, on guide roller 62 outsides, be formed with 2 ring-type substrate pushing grooves 64.
In Fig. 6, bear the lower edge of substrate P by transfer body 71.Transfer body 71 is the chain of ceramic travelling belt or the band of guipure travelling belt.The bottom that is the bar-shaped supporting accessory 72 of a shape is installed on transfer body 71.Be formed with on the top of supporting accessory 72 that the lower edge portion that makes substrate P enters to upper substrate receiver mouth 73.Guide roller 74 by pair of right and left is clamped the rising wood of substrate P.
In Fig. 7, on the supporting accessory 72 identical, be formed with the substrate receiver 73 of pair of right and left with the supporting accessory 72 shown in Fig. 6.With about in two pairs the guide roller 74 paired guide roller to clamping the rising wood of 2 substrate P.
Top along firing furnace 11 in Fig. 8 disposes transfer body 71 movably and suspender 81, the mode of hanging the rising wood of holding substrate P by suspender 81 is installed on this transfer body 71.Between the guide roller 74 about the lower edge of substrate P is clipped in and by they guiding.Fig. 9 is the structure that makes after basic structure 2 rowization of Fig. 8.2 suspenders 81 are installed on transfer body 71.By about two pairs guide roller 74 paired guide rollers clamp the lower edge of 2 substrate P respectively.
With reference to Figure 10 and Figure 11 as seen, substrate supporting body 91 is installed on transfer body 71.This substrate supporting body 91 is made of a pair of vertical longitudinal member 92 of cross section コ word shape in front and back, the horizontal cross member 93 of cross section コ word shape and suspender 81, wherein, the a pair of vertical longitudinal member 92 of cross section コ word shape in these front and back has the big interval of length than the substrate P fore-and-aft direction of upright state, so that the relative to each other mode of opening is erected on the transfer body 71 and has the height that surpasses with the length of substrate P above-below direction; The horizontal cross member 93 of cross section コ word shape makes it Open Side Down and the upper end of two vertical materials 92 is joined to one another; Suspender 81 is hung oneself down and is hung the rising wood of substrate P from cross member 93.
Figure 12 represents can transmit the transport unit of 2 substrate P simultaneously by the substrate supporting body 91 shown in Figure 10 and 11.About on the cross member 93 of substrate supporting body 91, be provided with 2 suspenders 81 side by side.

Claims (10)

1. burning apparatus, this burning apparatus comprises: firing furnace; Well heater, this well heater are installed in respectively on the interior two sides of firing furnace; Transport unit, this transport unit have 2 transmission routes that are spaced from each other the compartment of terrain along the stove longitudinal extension, and transmit substrate under this respectively transmits on the route with and on end state parallel with delivery direction; Air-supply duct and vapor pipe, this air-supply duct and vapor pipe transmit between the route two and extend.
2. burning apparatus according to claim 1 is characterized in that, air-supply duct is responsible for by air feed and is responsible for many gas manifolds of ramose from air feed and constitutes, gas manifold vertically on be formed with a plurality of air feed ports; Vapor pipe is responsible for by exhaust and is responsible for many exhaust branch pipes of ramose from each exhaust and constitutes, exhaust branch pipe vertically on be formed with a plurality of venting ports.
3. burning apparatus according to claim 2, it is characterized in that, air feed is responsible for and exhaust be responsible on the substrate delivery direction at interval the distance of regulation up and down direction extend, gas manifold and exhaust branch pipe on the above-below direction in abutting connection with and on the delivery direction or extending in the opposite direction with this sender.
4. according to each described burning apparatus in the claim 1 to 3, it is characterized in that, the outstanding grid-like thermal barrier in side in two sides are provided with in the firing furnace, well heater be by be configured on the part that is equivalent to the formed grate opening of thermal barrier respectively and discriminably a plurality of radiator bodies of controlled temperature constitute.
5. according to each described burning apparatus in the claim 1 to 3, it is characterized in that transport unit comprises the transfer body of the lower edge of bearing substrate and the liner that moves that guides the rising wood of substrate.
6. burning apparatus according to claim 4 is characterized in that, transport unit comprises the transfer body of the lower edge of bearing substrate and the liner that moves that guides the rising wood of substrate.
7. according to each described burning apparatus in the claim 1 to 3, it is characterized in that transport unit comprises the liner that moves of the lower edge of the suspender of the rising wood of hanging base board, the conveyer chain that suspender is installed and guiding substrate.
8. burning apparatus according to claim 4 is characterized in that, transport unit comprises the liner that moves of the lower edge of the suspender of the rising wood of hanging base board, the conveyer chain that suspender is installed and guiding substrate.
9. according to each described burning apparatus in the claim 1 to 3, it is characterized in that transport unit comprises conveyer chain, at the suspender and the supporting mass between conveyer chain and suspender of the rising wood of the overhung substrate of conveyer chain.
10. burning apparatus according to claim 4 is characterized in that, transport unit comprises conveyer chain, at the suspender and the supporting mass between conveyer chain and suspender of the rising wood of the overhung substrate of conveyer chain.
CN 200410054673 2004-07-27 2004-07-27 Sintering appts. Pending CN1727294A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200410054673 CN1727294A (en) 2004-07-27 2004-07-27 Sintering appts.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200410054673 CN1727294A (en) 2004-07-27 2004-07-27 Sintering appts.

Publications (1)

Publication Number Publication Date
CN1727294A true CN1727294A (en) 2006-02-01

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Application Number Title Priority Date Filing Date
CN 200410054673 Pending CN1727294A (en) 2004-07-27 2004-07-27 Sintering appts.

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Country Link
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101016188B (en) * 2006-02-08 2011-06-08 光洋热系统株式会社 Heat treatment apparatus
CN105121368A (en) * 2013-04-10 2015-12-02 日本电气硝子株式会社 Glass substrate with holding part, method for heat treating glass substrate, and glass substrate supporting unit

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101016188B (en) * 2006-02-08 2011-06-08 光洋热系统株式会社 Heat treatment apparatus
CN105121368A (en) * 2013-04-10 2015-12-02 日本电气硝子株式会社 Glass substrate with holding part, method for heat treating glass substrate, and glass substrate supporting unit
CN105121368B (en) * 2013-04-10 2018-03-30 日本电气硝子株式会社 The glass substrate of band maintaining part, the heat treatment method of glass substrate and glass substrate bearing unit

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