CN1725091A - Manufacturing method of wavelength regulatable broadband full optical wave length converter - Google Patents

Manufacturing method of wavelength regulatable broadband full optical wave length converter Download PDF

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CN1725091A
CN1725091A CN 200510027943 CN200510027943A CN1725091A CN 1725091 A CN1725091 A CN 1725091A CN 200510027943 CN200510027943 CN 200510027943 CN 200510027943 A CN200510027943 A CN 200510027943A CN 1725091 A CN1725091 A CN 1725091A
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wavelength
making
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wave length
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CN100362418C (en
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陈玉萍
张军锋
陈险峰
吴锐
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Shanghai Jiaotong University
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Abstract

The invention is a method for making adjustable wavelength wideband full wavelength converter, belonging to the optical communication field. The invention selects a Mg-doped lithium niobate based wafer, firstly making a periodical optical super lattice with a period range of 21-26 mum on the wafer, i.e. making room temperature electric filed polarization on the wafer to realize the periodical reversal of the polarized domain of the wafer, then making Ti diffused waveguide structure, and finally arranging a polarizing plate in front of the light path of the wafer, thus obtaining the converter. The invention extremely reduces the cost and the polarizing pulse voltage and is beneficial for the light energy to enter devices, and realizes the dynamic recombination of the network and the function of broadcasting the wavelength route.

Description

The method for making of wavelength regulatable broadband full optical wave length converter
Technical field
What the present invention relates to is the method for making in a kind of optical communication technique field, specifically, is a kind of method for making of wavelength regulatable broadband full optical wave length converter.
Background technology
Existing Wavelength conversion devices mainly contains the mutual gain of based semiconductor amplifier (SOA) or phase modulation (PM) wavelength converter, Mach-Zehnder wavelength shifter, but all there is incomplete transparent translation in they mutually to amplitude, frequency and the position of input signal; And based on SOA or passive wave guide, though be transparent fully full light conversion as the four-wave mixing of optical fiber, because it is the third-order non-linear process, generally speaking, the second nonlinear process is more much higher than three rank process efficiencies, so there is the low problem of conversion efficiency; This in addition wavelength shifter noise is big, causes cross-talk easily, and its application is limited; Therefore the difference frequency in based semiconductor (as AlGaAs) or the ferroelectric crystal waveguiding structure or the wavelength shifter of cascading become the developing direction of broad band full wavelength shifter gradually.Based on the All Optical Wave Converter part of second nonlinear difference frequency or cascading to information transparency; It only is a pure two-phonon process, has overcome the speed bottle-neck of electro-optical device; In addition, it also possesses low noise, wide adjusting wavelength coverage and can change the characteristics of multi-wavelength simultaneously.Based semiconductor or ferroelectric domain counter-rotating waveguide difference frequency or cascade wavelength shifter are the bright schemes of unique full impregnated, have remarkable advantages with other wavelength shifter scheme ratio.And compare with the wavelength shifter based on beat effect based on the wavelength shifter of cascading, pumping wavelength has solved the waveguide transmission mode problem still at 1.5 μ m communication bands.And can obtain wideer bandwidth.Though the existing demonstration of the difference frequency wavelength shifter of based semiconductor (as AlGaAs), having difficulties at present is the phase matching that is difficult to realize two-beam, owing to the scattering loss of waveguide, all causes conversion efficiency low, thereby uses less at present in addition.
Find by prior art documents, " the Mutiple-channel wavelength conversion by use ofengineered QPM structures in LiNbO that people such as M.H.Chou deliver on " Optics Letters " (24,1999) 3Waveguides " (" in the lithium niobate waveguide with the accurate position of design be complementary the multi-wavelength conversion that structure realizes "); this article introduced utilize a kind of based on the be complementary beat effect of lithium niobate waveguiding structure of aperiodic accurate position; at two different pumping wavelengths, realized the broad band wavelength conversion simultaneously on the signal wavelength passage.The document is also pointed out, utilizes based on this aperiodic structure, can realize the wavelength Conversion of many pumping wavelengths passage/many signal wavelengths passage (Multiple Pump CHs/MultipleSignal CHs).Utilize the time by this M pumping wavelength, this wavelength shifter can be realized the dynamic reorganization of network and the broadcast capability of wavelength route, be that a signal in every N input signal light can be converted into M output wavelength, thereby obtain the wavelength Conversion function of ultra broadband.In addition based on the wavelength shifter of this aperiodic structure, owing to expanded the pumping wavelength position bandwidth that is complementary, thus greatly improved the stability and the bandwidth of device.The method for making of the wavelength shifter of above aperiodic structure though all utilize beat effect to realize wavelength Conversion, is equally applicable to the cascading of frequency multiplication and difference frequency.Change although can realize the wavelength channel of N*M simultaneously owing to All Optical Wave Converter, make the reorganization performance optimization of network greatly based on dielectric aperiodic structure superlattice.But owing to be by the nonlinear factor Fourier transform is calculated in design based on the making of the wavelength shifter of aperiodic structure, the multi-wavelength conversion is realized in the position, farmland (block) that obtains the counter-rotating of required farmland; Existing bibliographical information, experiment and analog result show that all wavelength Conversion output spectra and conversion efficiency are all made quite sensitivity of error to the block that this structure fabrication produced, thereby bring such device unsurmountable intrinsic difficulty on method for making.Therefore, there are at present two problems on the method for making based on the All Optical Wave Converter of this aperiodic structure at least: the one, because of the difficulty of " aperiodic structure " caused designs and making, influenced the quality of accurate the superlattice structure that is complementary, thereby cause the drift of (meeting the ITU standard) of institute's Wavelength-converting, and the reduction of conversion efficiency; The 2nd, the meeting under the working and room temperature state based on " lithium niobate " superlattice device in the past produces light and sell off damage, causes the position not match mutually, so also need to carry out temperature compensation, has improved cost of manufacture.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, a kind of method for making of wavelength regulatable broadband full optical wave length converter is provided, make it pass through control to flashlight incident polarization state, produce second nonlinear difference frequency or cascading that accurate position is complementary, realize a kind of work at room temperature, amplitude, frequency and phase information full impregnated are bright, the broad band wavelength conversion of many pumping wavelengths passage/many signal wavelengths passage.
The present invention is achieved by the following technical solutions, and the present invention selects a kind of based on magnesium-doped lithium niobate (MgO:LiNbO 3) wafer, at first making has the periodicity optical superlattices that periodic regime is 21-26 μ m on this wafer, promptly wafer is carried out the room temperature electric field polarization, to realize the periodic inversion on crystal polarization farmland; And then on wafer, make titanium diffused waveguide structure; Before the logical light light path of wafer a polaroid is set at last, promptly obtains wavelength regulatable broadband full optical wave length converter, this wavelength shifter is a single domain dielectric wafer, and the upper and lower surface of wafer is parallel.The present invention includes following steps:
(1) select a kind of dielectric, this dielectric is a kind of growing up in growth course along the ferroelectric single domain crystal of Z direction spontaneous polarization, and is that the doping mol ratio is 5% or 6.5% or 7% magnesium-doped lithium niobate (MgO:LiNbO 3), along the cutting of this dielectric Z direction, its thickness is 0.2mm-lmm, and upper and lower surface is parallel and all polished, and the normal direction of upper and lower surface is the spontaneous polarization direction of crystal;
(2) the titanium diffusion technique is used on this wafer-Z surface, promptly under 1130 ℃ high temperature, led to argon gas tens hours, diffusion is more than 1 hour behind the logical oxygen, be to diffuse into magnesium-doped lithium niobate substrate in the titanium bar of 2-8 micron with the width of-pre-sputter of Z face, form a ducting layer, the feature of this waveguide is that the guided wave of transverse electric wave and transverse magnetic wave pattern all can be excited;
(3) use photoetching technique then, promptly at first apply the photoresist of a bed thickness 1 μ m, after exposure, development, obtain periodically grating fringe in twin polishing crystal+Z surface rotation; And then sputter one bed thickness is the conduction nickel dam of 0.1 μ m on photoresist, the array metal grating electrode that constitutes at the long nickel bar that has formed one-period property on the sample (other part metals on photoresist, thereby with lithium niobate+Z surface insulation).The cycle of metal grating electrode is Λ = λ 0 2 ( N eff 2 e - N eff 1 o ) ; λ 0 2 ( n 2 e - n 1 o ) (a)，
λ in the formula 0---the flashlight centre wavelength of required conversion in pump light of frequency multiplication (first-harmonic) or the difference frequency in the cascade process;
Figure A20051002794300063
---(wavelength is λ to second harmonic in the waveguide 0/ 2) effective refractive index of non-ordinary light;
Figure A20051002794300064
---first-harmonic (λ in the waveguide 0) effective refractive index of ordinary light;
---the ordinary refraction index of second harmonic in the body medium;
---the very optical index of first-harmonic in the body medium;
For dutycycle is 1: 1 periodic structure, and the length l of electrode is half of cycle, i.e. l=Λ/2 in each cycle; For dutycycle is 1: 2 periodic structure, and the length of electrode is 1/3 of the cycle in each cycle, i.e. l=Λ/3;-Z face plating plane electrode.
(4) in the room temperature electric field polarization process, in the zone, farmland that electrode is arranged, thereby the coercive field that utilizes high-voltage electric field to overcome crystals makes the spontaneous polarization direction of this electricdomain reverse; Zone, electrodeless farmland, the polarised direction of its electricdomain still keeps original direction.
At room temperature, put between two electrodes with high pressure rectangle electric pulse forward, the impulse electric field crest voltage that adds high pressure is greater than the coercive field V corresponding to crystal thickness C(the coercive field V of mg-doped lithium niobate wafer CBe 2-10kv/mm).
Be being connected between positive electrode (be coated with nickel bar+Z face) and high-voltage power supply to contact conducting by being limited in lithium chloride electrolytic solution in the O circle.The negative electrode of high-voltage power supply is connected a ground connection, on the sheet metal of surface finish, directly with sample-the Z face contacts.Guaranteeing has good Ohmic contact between external electric field and the metal electrode, and will prevent high-voltage breakdown.Used external electric field is the high voltage pulse electric field.The length of recurrence interval is relevant with number of times and electrode surface area.
The high-voltage pulsed source that polarized circuit is made up of a high-voltage power supply and a series of resistance.Polarization current I Pol, Q be plane of crystal transport electric charge and polarization time t PolProvide by following three formulas respectively:
I pol = V l - V c R S - V c R vm , Q＝2P sA，
t pol = Q I pol , (b)
V lBe the directly magnitude of voltage of output of high-voltage power supply, V cIt is the actual polarizing voltage that is added on the wafer; R s, R VmBe respectively divider resistance; Ps is LiNbO 3The crystal spontaneous polarization strength is 81 μ c/cm 2, A is the polarization area.
The present invention utilizes magnesium-doped lithium niobate (MgO:LiNbO first 3) I type coherence length in optical harmonic generation has an extreme point (following will call broadband frequency multiplication centre wavelength to this wavelength unification) at the communication band place, mate and accurate the frequency multiplication condition that is complementary owing to satisfying group velocity simultaneously at this some place, thereby can access desired frequency multiplication broadband; Simultaneously, the present invention has utilized the intrinsic broadband periodic structure of mg-doped lithium niobate material dexterously, method by control frequency multiplication pump light polarization direction is proposed first, the periodic waveguide superlattice are combined with titanium diffused waveguide structure, overcome the aperiodic structure that utilizes the waveguide of electric field polarization lithium niobate proton exchange and realized the adjustable ultra broadband wavelength Conversion of pumping wavelength, the difficulty that on the element manufacturing of aperiodic structure, exists.
The present invention utilizes magnesium-doped lithium niobate (MgO:LiNbO 3) make material, at room temperature do not exist light to sell off the problem of damage, need not to carry out the high temperature compensation, greatly reduced cost; Because the coercive field of magnesium-doped lithium niobate crystal is 1/10th of a lithium columbate crystal commonly used, reduced polarization pulse voltage, improved the making thickness of crystal, can reach 1mm thick (and based on the device of the periodicity super crystal lattice material of lithium niobate except that the stoichiometric proportion material, maximum ga(u)ge can only arrive 0.5mm), help luminous energy and be coupled into device; Do not reducing conversion efficiency and do not changing under the prerequisite of wavelength Conversion output spectra, realizing the wavelength channel conversion of the N*M of ultra broadband, thereby realized the dynamic reorganization of network and the broadcast capability of wavelength route.
Embodiment
Embodiment
(1) choosing thickness is 1mm, and the long and wide Z that is the 7%mol doping ratio of 10mm cuts the mg-doped lithium niobate wafer ,+/-the Z face all polishes.
(2) making a width at-Z face with the titanium diffusion technique is 6 microns bar waveguide;
(3) forming one-period on+Z surface with photoetching method is 23.5 μ m, wide by 6 μ m, the array positively charged metal utmost point (supposing that dutycycle is 6: 17.5) that 10mm is long.The grating cycle is the Sellmier equation substitution formula with 25 ℃ of following mg-doped lithium niobates Λ = λ 0 2 ( n 1 e - n 1 o ) Gained is wherein supposed λ 0=1.55 μ m, and the refractive index Sellmeier equation of the magnesium-doped lithium niobate crystal of 7%mol doping ratio is as follows:
n o 2 ( λ 0 ) = 4.8762 + 0.11554 / ( λ 0 2 - 0.04674 ) - 0.033119 · λ 0 2
n e 2 ( λ 0 ) = 4.5469 + 0.094749 / ( λ 0 2 - 0.04439 ) - 0.026721 · λ 0 2
(4) be being connected between positive electrode and high-voltage power supply to contact conducting by being limited in lithium chloride electrolytic solution in the O circle.The negative electrode of high-voltage power supply is connected a ground connection, on the sheet metal of surface finish, directly with sample-the Z face contacts.Guaranteeing has good Ohmic contact between external electric field and the metal electrode, and will prevent high-voltage breakdown.Used external electric field is the high voltage pulse electric field, because the coercive field of magnesium-doped lithium niobate crystal is 4.5kv/mm, peak impulse voltage is greater than 4.5kv/mm on the mg-doped lithium niobate wafer of 1mm so be applied to thickness and be, the length of recurrence interval is long-pending relevant with the real surface of number of times and electrode, can calculate by formula (b).With centre wavelength is λ 0=1.55 μ m are example, can draw in theory, and under 25 ℃, 7% magnesium doping ratio, the grating cycle of periodic polarized lithium niobate is Λ=23.5 μ m.
The present invention utilizes magnesium-doped lithium niobate (MgO:LiNbO 3) make material, at room temperature do not exist light to sell off the problem of damage, need not to carry out the high temperature compensation, greatly reduced cost; Because the coercive field of magnesium-doped lithium niobate crystal is 1/10th of a lithium columbate crystal commonly used, has reduced polarization pulse voltage, has improved the making thickness of crystal, it is thick to reach 1mm, helps luminous energy and is coupled into device; Do not reducing conversion efficiency and do not changing under the prerequisite of wavelength Conversion output spectra, realizing the wavelength channel conversion of the N * M of ultra broadband, thereby realized the dynamic reorganization of network and the broadcast capability of wavelength route.

Claims (8)

1. the method for making of a wavelength regulatable broadband full optical wave length converter, it is characterized in that, select a kind of based on magnesium-doped lithium niobate crystal chip, on this wafer, at first make and have the periodicity optical superlattices that periodic regime is 21-26 μ m, promptly wafer is carried out the room temperature electric field polarization,, on wafer, make titanium diffused waveguide structure then to realize the periodic inversion on crystal polarization farmland, before the logical light light path of wafer, a polaroid is set at last, promptly obtains wavelength regulatable broadband full optical wave length converter.
2. the method for making of wavelength regulatable broadband full optical wave length converter according to claim 1 is characterized in that, may further comprise the steps:
(1) selects a kind of dielectric, this dielectric is a kind of growing up in growth course along the ferroelectric single domain crystal of Z direction spontaneous polarization, and be magnesium-doped lithium niobate, cut along this dielectric Z direction, upper and lower surface is parallel and all polished, and the normal direction of upper and lower surface is the spontaneous polarization direction of crystal;
(2) the titanium diffusion technique is used on this wafer-Z surface, and promptly at high temperature logical argon gas spreads behind the logical oxygen, diffuses into magnesium-doped lithium niobate substrate in the titanium bar the with-pre-sputter of Z face, forms a ducting layer;
(3) use photoetching technique then, promptly at first apply one deck photoresist in twin polishing crystal+Z surface rotation, after exposure, development, obtain periodically grating fringe, and then on photoresist sputter one deck conduction nickel dam, formed the array metal grating electrode of the long nickel bar formation of one-period property on sample, the cycle of metal grating electrode is Λ = λ 0 2 ( N eff 2 e - N eff 1 o ) ; λ 0 2 ( n 2 e - n 1 o ) - - - ( a ) ;
(4) in room temperature electric field polarization process, in the zone, farmland that electrode is arranged, thereby the coercive field that utilizes high-voltage electric field to overcome crystals makes the spontaneous polarization direction of this electricdomain reverse, zone, electrodeless farmland, and the polarised direction of its electricdomain still keeps original direction.
3. the method for making of wavelength regulatable broadband full optical wave length converter according to claim 1 and 2 is characterized in that, described magnesium-doped lithium niobate, and its doping mol ratio is 5% or 6.5% or 7%.
4. the method for making of wavelength regulatable broadband full optical wave length converter according to claim 2 is characterized in that, described cutting, and its thickness is 0.2mm-1mm.
5. the method for making of wavelength regulatable broadband full optical wave length converter according to claim 2, it is characterized in that, described titanium diffusion technique, be meant under 1130 ℃ high temperature and led to argon gas tens hours, diffusion is more than 1 hour behind the logical oxygen, with the width of-pre-sputter of Z face is to diffuse into magnesium-doped lithium niobate substrate in the titanium bar of 2-8 micron.
6. the method for making of wavelength regulatable broadband full optical wave length converter according to claim 2 is characterized in that, described ducting layer, and the feature of this waveguide is that the guided wave of transverse electric wave and transverse magnetic wave pattern all can be excited.
7. the method for making of wavelength regulatable broadband full optical wave length converter according to claim 2, it is characterized in that described metal grating electrode is 1: 1 periodic structure for dutycycle, the length l of electrode is half of cycle, i.e. l=Λ/2 in each cycle; For dutycycle is 1: 2 periodic structure, and the length of electrode is 1/3 of the cycle in each cycle, i.e. l=Λ/3 ,-Z face plating plane electrode.
8. the method for making of wavelength regulatable broadband full optical wave length converter according to claim 2, it is characterized in that, the described coercive field that utilizes high-voltage electric field to overcome crystals, be meant with high pressure rectangle electric pulse forward to put between two electrodes that the impulse electric field crest voltage that adds high pressure is greater than the coercive field V corresponding to crystal thickness C=2-10kv/mm.
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CN101592844B (en) * 2009-07-02 2010-09-29 上海交通大学 Method for manufacturing all-optical wavelength convertor with tunable non-periodic broadband
CN102394467A (en) * 2007-07-31 2012-03-28 C2C晶芯科技公司 Method of ferroelectronic domain inversion and its applications
CN104880887A (en) * 2015-06-19 2015-09-02 天津大学 Method for manufacturing near-stoichiometry PPLN all-optical wavelength converter low in Mg doping
CN105093406A (en) * 2014-10-26 2015-11-25 派尼尔科技（天津）有限公司 Lithium niobate optical waveguide and method for preparing near-stoichiometric lithium niobate optical waveguide by means of titanium diffusion and vapor transport equilibration (VTE)
WO2016138775A1 (en) * 2015-03-03 2016-09-09 深圳大学 Directional wave separator based on electro-optical diffraction, and wavelength division multiplexing system
CN112835262A (en) * 2021-01-04 2021-05-25 南京大学 Preparation method of magnesium-doped lithium niobate domain structure

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Publication number Priority date Publication date Assignee Title
CN1183402C (en) * 2003-01-28 2005-01-05 南开大学 Period polarized magnesium doped lithium niobate all light switch and preparation process thereof

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102394467A (en) * 2007-07-31 2012-03-28 C2C晶芯科技公司 Method of ferroelectronic domain inversion and its applications
CN102394467B (en) * 2007-07-31 2013-11-06 南京长青激光科技有限责任公司 Broad waveband light source device
CN101592844B (en) * 2009-07-02 2010-09-29 上海交通大学 Method for manufacturing all-optical wavelength convertor with tunable non-periodic broadband
CN105093406A (en) * 2014-10-26 2015-11-25 派尼尔科技（天津）有限公司 Lithium niobate optical waveguide and method for preparing near-stoichiometric lithium niobate optical waveguide by means of titanium diffusion and vapor transport equilibration (VTE)
WO2016138775A1 (en) * 2015-03-03 2016-09-09 深圳大学 Directional wave separator based on electro-optical diffraction, and wavelength division multiplexing system
CN104880887A (en) * 2015-06-19 2015-09-02 天津大学 Method for manufacturing near-stoichiometry PPLN all-optical wavelength converter low in Mg doping
CN112835262A (en) * 2021-01-04 2021-05-25 南京大学 Preparation method of magnesium-doped lithium niobate domain structure
CN112835262B (en) * 2021-01-04 2023-03-14 南京大学 Preparation method of magnesium-doped lithium niobate domain structure

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