CN1724117B - Volatile organic compound treatment apparatus - Google Patents
Volatile organic compound treatment apparatus Download PDFInfo
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- CN1724117B CN1724117B CN2005100811820A CN200510081182A CN1724117B CN 1724117 B CN1724117 B CN 1724117B CN 2005100811820 A CN2005100811820 A CN 2005100811820A CN 200510081182 A CN200510081182 A CN 200510081182A CN 1724117 B CN1724117 B CN 1724117B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The invention provides a volatile organic compound (VOC) treatment apparatus, which comprises an absorber for being into contact with a gas to be treated and adsorbing volatile organic compounds; a pairs of electrodes for discharging with the absorber clamped therebetween; and a flow adjustment mechanism for enabling the flow of the gas to be treated flowing towards the absorber during discharging to be less than the flow of the gas to be treated flowing towards the absorber when the pairs of electrodes are not discharging.
Description
Technical field
If the present invention relates to for example toluene, xylenes, styrene etc. be released in the atmosphere be the organic solvent that is harmful to or other organic compound steam, be the volatile organic compound treatment apparatus that uses in the decomposition of VOC (abbreviating VOC as).
Background technology
In coating factory, semiconductor factory or printery etc., used a large amount of organic solvents.Knownly be discharged to VOC the atmosphere from such factory and formed harmful organic property particulate because of reaction or made ozone concentration increase in the atmosphere etc. produce great dysgenic situation atmospheric environment with sunshine or ozone etc.Therefore, require consumingly to reclaim VOC and make it innoxious.
In order to carry out the recovery of VOC, develop and popularized the gas concentration impeller (rotor) that has formed the sheet of carrying hydrophobic zeolite or active carbon with honeycomb.Utilize catalyst or burner to decompose and make its innoxious being released in the atmosphere afterwards by absorption of gas concentration impeller and concentrated VOC.
Also developed and utilized discharge to decompose the device of VOC.The structure of utilizing discharge to decompose the device of VOC is to reinstate the structure that pair of electrodes is clamped the VOC adsorbent of the corrugated of having carried hydrophobic zeolite with insulator one.Saturated and before can not adsorbing VOC fully in VOC adsorbent absorption; The alternating voltage that between electrode, applies 5～7kV discharges; Utilize the discharge plasma that has taken place from VOC adsorbent desorb VOC, and then the VOC of desorb is decomposed into water and carbon dioxide.During with discharge resolution process VOC, also flow through the process object gas of the amount identical with not being situation in the discharge generation.Have again, if make the contact discharge of VOC adsorbent and when resolution process VOC, stop gas flow, then because the VOC adsorbent has only 1, so can not carry out the processing of gas.
Have again, VOC adsorbent absorption is saturated and can not adsorb the VOC this point fully and be called the VOC adsorbent and change and imitate.(for example, with reference to patent documentation 1)
[patent documentation 1] spy opens the 2002-126445 communique
Hoping to have can resolution process VOC and do not take place environment is produced dysgenic material, power consumption is few, installation cost is cheap device.The following problem of device existence that utilization is in the past discharged and decomposed VOC.
(1) owing to once handling whole VOC adsorbents, thus discharge current must be increased, and then the increase power supply capacity, installation cost has improved.
(2) owing to when discharge takes place, also flow through the gas of amount identical when not taking place with discharge, so nitrogen in the gas and oxygen react because of discharge, a large amount of nitrogen oxide (abbreviating NOx as) that is harmful to takes place.
Summary of the invention
The volatile organic compound treatment apparatus relevant with the present invention is characterised in that: possess: contact the adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode that accompanies this adsorbent betwixt; And the flow guiding mechanism, the flow the when flow-rate ratio that flows to the process object gas of above-mentioned adsorbent when discharge takes place is not discharged is few.
In addition, relevant with the present invention volatile organic compound treatment apparatus possesses: contact the adsorbent with the adsorb volatile organic compound with process object gas; The pair of electrodes of discharging with the mode that contacts with the part of this adsorbent; And the discharge controlling organization, the said electrode of at least one side or the some at least of said adsorbent are moved, said electrode pair is applied voltage, so that the part of different said adsorbents sequentially contacts with discharge.
Moreover the volatile organic compound treatment apparatus relevant with the present invention possesses: contact the adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair that discharges with the mode that contacts with this adsorbent; A plurality of air processing units are divided into having above-mentioned adsorbent and above-mentioned electrode pair are contained in a plurality of groups of wherein sealable compartment; And the discharge controlling organization, above-mentioned electrode pair is applied voltage, so that in the group of this air processing unit, sequentially discharge.
And then the volatile organic compound treatment apparatus relevant with the present invention possesses: contact the adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; Detect the VOC concentration sensor of the concentration of the VOC in the process object gas; And discharge controlling organization; From obtain the amount of the VOC of above-mentioned adsorbent absorption with the concentration of the detected VOC of this VOC concentration sensor; After the amount of the VOC of this absorption is more than or equal to setting; Above-mentioned electrode pair is applied voltage, discharge.
Moreover the volatile organic compound treatment apparatus relevant with the present invention possesses: contact the adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; Detect the VOC concentration sensor of the concentration of the VOC in the process object gas; And discharge controlling organization; From obtain the amount of the VOC of above-mentioned adsorbent absorption with the concentration of the detected VOC of this VOC concentration sensor; Amount according to the VOC of the above-mentioned adsorbent absorption of discharge zero hour makes to apply voltage, discharge current, the some at least variations in the discharge continuation time.
And then the volatile organic compound treatment apparatus relevant with the present invention possesses: contact the adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; And the flow guiding mechanism, the flow the when flow-rate ratio that flows to the process object gas of above-mentioned adsorbent when discharge takes place is not discharged is few.
Moreover the volatile organic compound treatment apparatus relevant with the present invention possesses: contact the adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; And the gas gigback, when discharge takes place and in specified time limit thereafter in above-mentioned adsorbent court's direction opposite with the process object gas flow flow through gas.
And then the volatile organic compound treatment apparatus relevant with the present invention possesses: contact the adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair that discharges with the mode that contacts with this adsorbent; Air processing unit has the sealable compartment that holds above-mentioned adsorbent and above-mentioned electrode pair therein; And the gas gigback, on the direction opposite, flow through gas in during the regulation after when discharge takes place, discharging in the airtight above-mentioned compartment with the process object gas flow.
Moreover; The volatile organic compound treatment apparatus relevant with the present invention possesses: as dielectric adsorbent; Contact with the adsorb volatile organic compound with process object gas, form with the porosity of regulation the regulation that process object gas flows through diameter the hole and constitute; And the electrode pair that applies alternating voltage that disposes with the mode of clamping this adsorbent betwixt.
And then; The volatile organic compound treatment apparatus relevant with the present invention possesses: adsorbent; Contact with the adsorb volatile organic compound with process object gas, have the gas passage that process object gas passes through, the wall of this gas passage is formed as dielectric; And with the electrode pair that applies alternating voltage of clamping this adsorbent betwixt and the mode of generation discharge on the direction that the wall with the gas passage intersects disposes.
Moreover the volatile organic compound treatment apparatus relevant with the present invention possesses: contact the adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair that applies alternating voltage of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; Dielectric with certain above-mentioned electrode among above-mentioned electrode pair solid of configuration in abutting connection with ground; And the power supply layer that between above-mentioned dielectric and above-mentioned electrode, is provided with in order to combine this dielectric and above-mentioned electrode with mode heat and electricity.
Because the volatile organic compound treatment apparatus relevant with the present invention is characterised in that to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The a plurality of electrode pairs that discharge with the mode that contacts with the part of this adsorbent; And through this electrode pair being applied the discharge controlling organization that voltage is controlled at generation discharge in which above-mentioned electrode pair; Above-mentioned electrode pair is divided into a plurality of groups; Above-mentioned discharge controlling organization applies voltage to each group of above-mentioned electrode pair; So that the part of different above-mentioned adsorbents sequentially with the discharge contact, so have the effect that can handle VOC with little power supply capacity efficiently.
In addition, owing to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The pair of electrodes of discharging with the mode that contacts with the part of this adsorbent; And discharge controlling organization; The above-mentioned electrode or the some at least of above-mentioned adsorbent of at least one side are moved; Above-mentioned electrode pair is applied voltage; So that the part of different above-mentioned adsorbents sequentially with the discharge contact, so have the effect that can handle VOC with little power supply capacity efficiently.
And then, owing to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair that discharges with the mode that contacts with this adsorbent; A plurality of air processing units are divided into having above-mentioned adsorbent and above-mentioned electrode pair are contained in a plurality of groups of wherein sealable compartment; And the discharge controlling organization, above-mentioned electrode pair is applied voltage, so that in the group of this air processing unit, sequentially discharge, so have the effect that can handle VOC with little power supply capacity efficiently.
Moreover, owing to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; Detect the VOC concentration sensor of the concentration of the VOC in the process object gas; And discharge controlling organization; From obtain the amount of the VOC of above-mentioned adsorbent absorption with the concentration of the detected VOC of this VOC concentration sensor; After the amount of the VOC of this absorption is more than or equal to setting; Above-mentioned electrode pair is applied voltage, discharge, so have the effect that to handle VOC with few power consumption.
And then, owing to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; Detect the VOC concentration sensor of the concentration of the VOC in the process object gas; And discharge controlling organization; From obtain the amount of the VOC of above-mentioned adsorbent absorption with the concentration of the detected VOC of this VOC concentration sensor; Amount according to the VOC of the above-mentioned adsorbent absorption of discharge zero hour; Make to apply voltage, discharge current, the some at least variations in the discharge continuation time, so have the effect that to handle VOC with few power consumption.
Moreover, owing to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; And the flow guiding mechanism, the flow the when flow-rate ratio that flows to the process object gas of above-mentioned adsorbent when discharge takes place is not discharged is few, so have the effect of the generation that can reduce nitrogen oxide.
Moreover, owing to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; And the gas gigback, when discharge takes place and in specified time limit thereafter in above-mentioned adsorbent court's direction opposite with the process object gas flow flow through gas, so have the effect of the discharge rate that can reduce nitrogen oxide.
And then, owing to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair that discharges with the mode that contacts with this adsorbent; Air processing unit has the sealable compartment that holds above-mentioned adsorbent and above-mentioned electrode pair therein; And the gas gigback, on the direction opposite, flow through gas in during the regulation after when discharge takes place, discharging in the airtight above-mentioned compartment, so have the generation that can reduce nitrogen oxide and the effect of discharge rate with the process object gas flow.
Moreover, owing to possess:, contact with the adsorb volatile organic compound hole of the diameter of the regulation that flows through with the porosity formation process object gas of regulation and constituting as dielectric adsorbent with process object gas; And, can make the effect that becomes stable of discharging so have with the electrode pair that applies alternating voltage that the mode of clamping this adsorbent betwixt disposes.
And then, owing to possess: adsorbent, contact with the adsorb volatile organic compound with process object gas, have the gas passage that process object gas passes through, the wall of this gas passage is formed as dielectric; And, can make the effect that becomes stable of discharging so have with the electrode pair that applies alternating voltage that the mode of clamping this adsorbent betwixt and on the direction that the wall with the gas passage intersects, take place to discharge disposes.
Moreover, owing to possess: contact adsorbent with the adsorb volatile organic compound with process object gas; The electrode pair that applies alternating voltage of the generation discharge of disposing with the mode of clamping this adsorbent betwixt; Dielectric with certain above-mentioned electrode among above-mentioned electrode pair solid of configuration in abutting connection with ground; And the power supply layer that between above-mentioned dielectric and above-mentioned electrode, is provided with in order to combine this dielectric and above-mentioned electrode with mode heat and electricity, so have the effect that the discharge of making becomes stable.
Description of drawings
Fig. 1 is the system block diagram of the volatile organic compound treatment apparatus in the embodiments of the invention 1.
Fig. 2 is the figure of the structure of the VOC treating apparatus in the explanation embodiments of the invention 1.
Fig. 3 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 1.
Fig. 4 is the figure of the sequence of the group of air processing unit in the control mode of VOC treating apparatus of explanation in embodiments of the invention 1 duty of getting.
Fig. 5 is the figure of effect of the control mode of the VOC treating apparatus of explanation in embodiments of the invention 1.
Fig. 6 is the figure of another control mode of the explanation VOC treating apparatus relevant with the present invention.
Fig. 7 is the figure of the another control mode of the explanation VOC treating apparatus relevant with the present invention.
Fig. 8 is the figure that explanation makes the control mode of the variable situation of the formation of group of the VOC treating apparatus relevant with the present invention.
Fig. 9 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 2.
Figure 10 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 3.
Figure 11 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 4.
Figure 12 is the figure of example of the structure of the power supply layer of explanation in the embodiments of the invention 4.
Figure 13 shows the figure of the profilograph of the high-field electrode that is provided with insulating barrier in the inlet portion in embodiments of the invention 4.
Figure 14 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 5.
Figure 15 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 6.
Figure 16 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 7.
Figure 17 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 8.
Figure 18 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 9.
Figure 19 is the figure of the structure of the air processing unit in the explanation embodiments of the invention 10.
Figure 20 is the figure of structure that is provided with the high-field electrode of insulant between the heat sink of explanation in embodiments of the invention 10.
Figure 21 is the figure of the structure of the VOC treating apparatus in the explanation embodiments of the invention 11.
Figure 22 is the figure of the structure of the VOC treating apparatus in the explanation embodiments of the invention 12.
Figure 23 is the figure of the structure of the VOC treating apparatus in the explanation embodiments of the invention 13.
Figure 24 is the figure of the structure of the VOC treating apparatus in the explanation embodiments of the invention 14.
Figure 25 is the profilograph of structure of the air processing unit of the VOC treating apparatus of explanation in the embodiments of the invention 14.
Figure 26 is the drawing in side sectional elevation that the electrode of the air processing unit of the VOC treating apparatus in the explanation embodiments of the invention 14 disposes.
Figure 27 is the profilograph of structure of the electrode of the VOC treating apparatus of explanation in the embodiments of the invention 14.
Figure 28 is the figure of the variation of the VOC adsorbance that causes of the position because of adsorbent in the air processing unit in the VOC treating apparatus of explanation in the embodiments of the invention 14.
Figure 29 is the drawing in side sectional elevation that the electrode of the air processing unit of the VOC treating apparatus in the explanation embodiments of the invention 15 disposes.
Figure 30 is the profilograph of structure of the electrode of the VOC treating apparatus of explanation in the embodiments of the invention 15.
Figure 31 is the locational profilograph of the earth electrode that approaches the VOC treating apparatus in the explanation embodiments of the invention 15.
Figure 32 is the drawing in side sectional elevation that the electrode of the air processing unit of the VOC treating apparatus in the explanation embodiments of the invention 16 disposes.
Figure 33 is the plane of the structure of the VOC treating apparatus in the explanation embodiments of the invention 17.
Figure 34 is the profilograph of structure of the air processing unit of the VOC treating apparatus of explanation in the embodiments of the invention 17.
Figure 35 is the figure of the structure of the VOC treating apparatus in the explanation embodiments of the invention 18.
Figure 36 is the figure of the structure of the VOC treating apparatus in the explanation embodiments of the invention 19.
Figure 37 is the figure of the structure of the VOC treating apparatus in the explanation embodiments of the invention 20.
Figure 38 is the system block diagram of the VOC treating apparatus in the explanation embodiments of the invention 21.
Figure 39 is the figure of the VOC treating apparatus of explanation in the embodiments of the invention 21 duty of getting.
Figure 40 is the figure of the sequence of the group of air processing unit in the control mode of VOC treating apparatus of explanation in embodiments of the invention 21 duty of getting.
Figure 41 is the system block diagram of the VOC treating apparatus in the explanation embodiments of the invention 22.
Figure 42 is the figure of the VOC treating apparatus of explanation in the embodiments of the invention 22 duty of getting.
Figure 43 is the figure of the sequence of the group of air processing unit in the control mode of VOC treating apparatus of explanation in embodiments of the invention 22 duty of getting.
Figure 44 is the system block diagram of the VOC treating apparatus in the explanation embodiments of the invention 23.
Figure 45 is the figure of relation of the VOC adsorbance of the adsorbent during each of VOC concentration and air processing unit in the process object gas of explanation in the embodiments of the invention 23 organized.
The specific embodiment
Fig. 1 is the system block diagram of the volatile organic compound treatment apparatus (abbreviating the VOC treating apparatus as) among the embodiment 1.Suppose in the VOC treating apparatus and have: the air processing unit 1 of the number of the regulation of the group that is divided into regulation number (more than or equal to 2) of the VOC that absorption and utilization discharge decomposition gas are supplied to side by side; Cause the high-voltage generating device 2 of the ac high voltage of discharge usefulness; Certain air processing unit 1 is applied high-tension voltage switch controlling organization 3; Be in the filter 4 of the suction inlet of gas; Adjust the flow guiding mechanism 5 of the flow of the gas that flows through each air processing unit 1; And exhaust fan 6.At this, voltage switch controlling organization 3 is the discharge controlling organizations among the present invention.Have, supposition has the air processing unit 1 more than or equal to 1 in the group of air processing unit 1 again.
The VOC treating apparatus is discharged gas through utilizing exhaust fan 6 from device, sucks the gas of identical amount from suction inlet.The gas that the VOC treating apparatus is sucked is called process object gas, will be called from the gas that the VOC treating apparatus is discharged to handle gas.Making and handling the air that gas becomes the cleaning that does not comprise VOC or NOx etc. is the mission of VOC treating apparatus.
It is high and than being easier to from the composition of process object gas separation that filter 4 is used for removing the bond degree of Oil Paint Slag or oil content etc.Filter 4 is useful, but concerning the VOC treating apparatus not necessarily.Become at gas under the situation that in process object gas, does not comprise the composition that to remove with filter 4 of process object gas etc., do not need filter 4 with other apparatus processes.
At the figure that the structure of VOC treating apparatus is described shown in Fig. 2.At drawing in side sectional elevation shown in Fig. 2 (a), at profilograph shown in Fig. 2 (b).In addition, at the figure that the structure of air processing unit 1 is described shown in Fig. 3.At drawing in side sectional elevation shown in Fig. 3 (a), at profilograph shown in Fig. 3 (b).Have, the profile in the BB section among Fig. 2 (a) is Fig. 2 (b) and Fig. 3 (b) again, and the profile in the AA section among Fig. 2 (b) is Fig. 2 (a) and Fig. 3 (a).
Can know in present embodiment 1, in the container 7 of section, to have 36 air processing units 1 that are divided into 6 groups (6 every group) for circle from Fig. 2 (a).Dotted line means the division of the group of air processing unit 1 in Fig. 2 (a).Shown in Fig. 2 (b), has the valve 5A of the flow of adjustment gas in each group at this.In Fig. 2 (b); Process object gas gets into the inside of VOC treating apparatus from the air entry 7A of the bottom right that is in container 7; And then pass through valve 5A and handled by the air processing unit 1 of configuration side by side, the exhaust outlet 7B under a left side that is in container 7 is discharged from as handling gas.Have filter 4 in the outside of air entry 7A, have exhaust fan 6 in the inboard that is close to of exhaust outlet 7B.Have again, in Fig. 2 (b), be not as profile but describe as the figure that sees from the side with the outside of container 7.
As shown in Figure 3,1 air processing unit 1 is made up of following part: earth electrode 1A cylindraceous; Exist in the inside of earth electrode 1A, an end is hemispherical glass tube 1B cylindraceous; The adsorbent 1C that disposes with the mode that is full of the space between glass tube 1B and the earth electrode 1A as adsorbent; The high-field electrode 1D cylindraceous that connects airtight at inner surface with glass tube 1B; Link the high-voltage conducting wires 1E between high-field electrode 1D and the voltage switch controlling organization 3; Surpass the fuse 1F that cuts off under the situation of feasible value at the electric current that flows through high-voltage conducting wires 1E; And in glass tube 1B, support the backing material 1G that high-voltage conducting wires 1E flows through the brush shape of electric current.Interval between earth electrode 1A and the high-field electrode 1D is decided to be the value that discharge can take place with the high voltage that is applied.Adsorbent 1C is spherical hydrophobic zeolite, and the diameter of hydrophobic zeolite is roughly the same with the interval of earth electrode 1A and glass tube 1B.If so, then make 1 row hydrophobic zeolite enter into earth electrode 1A and glass tube 1B.
The part of the adsorbent 1C that in VOC treating apparatus integral body, exists just is present in each air processing unit 1.Therefore, if the high-field electrode 1D of air processing unit 1 is applied high voltage, then a part of adsorbent 1C contacts with discharge.In addition, air processing unit 1 has earth electrode 1A and the such electrode pair of high-field electrode 1D, and the group of air processing unit 1 also is the group of electrode pair.
The high-voltage conducting wires 1E in left side is connected on the voltage switch element 3A among the figure of fuse 1F.In each air processing unit 1, all has voltage switch element 3A.The high-voltage conducting wires 1H that is connected with the high-tension terminal of generation of the high-voltage generating device 2 that exists in the outside of container 7 enters into internal tank from the high-voltage line introducing port 7C of container 7, is connected on the terminal of voltage switch element 3A.On another terminal of voltage switch element 3A, connected high-voltage conducting wires 1E, if voltage switch element 3A is connected, then the high-field electrode 1D to the air processing unit 1 of correspondence applies high voltage.High-tension part such as being applied in of high-voltage conducting wires 1E and high-voltage conducting wires 1H etc. is implemented necessary insulation.Though not shown, between the terminal that is grounded of electrical connection high-voltage generating device 2 and the earth electrode 1A of each air processing unit 1.In addition, high-voltage line introducing port 7C has necessary air-tightness.
Shown in Fig. 2 (a), respectively hold 1 air processing unit 1 in the hole that in container 7, forms.Have, after the wiring of configuration earth electrode 1A and necessity, the inscape of inserting other makes air processing unit 1 on the side in the hole that in container 7, forms again.Between hole that holds air processing unit 1 and container 7 sealable empty 7D.In the 7D of this cavity, be full of the water of cooling usefulness and make its circulation.Have next door 7E on the position of the central authorities in Fig. 2 of empty 7D (b), have the through hole 7F at 1 position among the next door 7E on top.At the downside of container 7, has cooling water supply port 7G on the position that is in the right side comparing with next door 7E.At the downside of container 7, on the position of comparing with next door 7E on the left of being in, has cooling water outlet 7H.The water that enters in the empty 7D from cooling water supply port 7G moves to direction because of having next door 7E, moves to the left side of next door 7E through through hole 7F, and then moves down, and 7H is discharged from from cooling water outlet.
Secondly, its work is described.The duty of air processing unit 1 at first, is described.Air processing unit 1 is got duty A and 2 such duties of duty B.Duty A is that valve 5A opens and high-field electrode 1D do not applied high-tension state, is the duty of adsorbent 1C absorption VOC.Different therewith, among the B, be that valve 5A is closed, high-field electrode 1D is applied high voltage, the state that discharges has taken place between earth electrode 1A and high-field electrode 1D in working order.Among the B, high-field electrode 1D is applied the alternating current of about 1kHz, about 10kV in working order.So, stable discharge takes place between the inner surface as the outer surface of the dielectric glass tube 1B that surrounds high-field electrode 1D and earth electrode 1A.Have again, also can use earthenware or the ceramic meltallizing glass lining of aluminium oxide (alumina) or zirconia (zirconia) etc. to wait and replace glass tube.
The life-span of decomposing the strong oxygen atom of the force rate ozone of VOC is as short as about 1 microsecond, if take place, then moves hardly and has just disappeared.Therefore, in the decomposition of the VOC that carries out very nearby causing at the position that discharge has taken place by oxygen atom.Because the life-span of ozone is long, is about 100 seconds, so even in the place far away, position of leaving the discharge that air processing unit 1 inside has taken place, if ozone moves, then ozone also decomposes VOC with the VOC reaction.
Sequence in the duty that air processing unit 1 is got in the control mode of VOC treating apparatus shown in Fig. 4.Have from mutually 1 to mutually 6, the in running order B of group n in phase n, remaining group is duty A.From 1 sequentially changing to phase 6 mutually, turning back to phase 1 mutually after 6.In present embodiment 1,1 is 10 minutes mutually, and 1 cycle was 60 minutes.
The effect of the mode (being called this mode) that explanation is obtained by the sequence of Fig. 4 in Fig. 5.In Fig. 5, on transverse axis, get and make time shaft, the power consumption of VOC treating apparatus is described on the longitudinal axis.Solid line is this mode, and dotted line is continuation mode (afterwards stating), and dotted line is intermittent mode (afterwards stating).Can know that from Fig. 5 this mode is compared with arbitrary mode of continuation mode, intermittent mode, power consumption is all lacked.Have, about the integrated value of the power consumption in 1 cycle, this mode is roughly the same with intermittent mode again, and the integrated value of the power consumption of continuation mode is bigger than above-mentioned two modes.
At this, intermittent mode is the mode in the patent documentation 1, while be in adsorbent 1C, to have adsorbed fully to flow through the mode that process object gas makes whole adsorbent contact discharges handle simultaneously behind the VOC.So-called continuation mode is while be to flow through the mode that process object gas discharges continuously, carries out the regeneration of adsorbent 1C always.
As record in the patent documentation 1, the concentration of VOC is high more, and the energy that in the processing of VOC, needs is few more.As having explained in front, the active material of VOC and oxygen atom that is bumped by the electronics that discharged or take place with the oxygen molecule collision with the electronics that is discharged or ozone etc. reacts and is decomposed.Therefore, the concentration of the VOC in the process object gas is high more, and the probability of VOC and active material or electron reaction is high more, and the efficient of processing is also high more.Therefore, not concentrating in the continuation mode of VOC, compare with intermittent mode with this mode of concentrated VOC, power consumption is bigger.
If this mode of comparison and intermittent mode, then in intermittent mode, owing to consume and the roughly the same amount of power consumption of this mode at short notice, so the power supply capacity of device becomes greatly, the cost of supply unit also uprises.Different therewith, in this mode,, can decompose VOC with high efficiency owing to stably consume little power consumption, so can reduce the power supply capacity of device, can realize the cost degradation of VOC treating apparatus.
Decide cycle and the power consumption etc. of number, the processing of the group of air processing unit 1 according to the concentration of contemplated VOC or the amount of process object gas etc., make it become suitable value.Owing to must make adsorbent not change effect, so in the large-scale device that can use a large amount of adsorbents, the cycle of processing is elongated, in small-sized device, the cycle of processing shortens.Even under the situation of VOC concentration change, if see fifty-fifty by the cycle, then the cycle long more, the probability that the amount of VOC enters in the scope of regulation is high more, can reduce adsorbent and change the probability of imitating.About the many ways of the number of the group that makes air processing unit 1, owing to reduced the amount of once carrying out the adsorbent that desorb handles, so it is big further to reduce the possibility of power supply capacity.In order to make adsorbent desorb VOC, even because the amount of adsorbent also must use the discharge process official hour less, so even under the situation of the number of increase group, also must make the time of getting duty B in respectively organizing is more than or equal to this official hour.Power consumption is decided to be under the situation of the VOC that in air processing unit 1 is got time of duty B, has adsorbed contemplated maximum can desorb and the size of decomposing VOC from adsorbent.
In this mode, in air processing unit 1, do not flow through process object gas in working order among the B.This is for NOx does not take place as far as possible.Generate high-velocity electrons through injecting discharge energy, generate the NOx that is harmful to through high-velocity electrons and oxygen molecule in the process object gas or the nitrogen molecular collision that has been generated.If when discharge process, stop gas stream, then reduce the growing amount of NOx.If the NOx in the gas is about 3%, then the decomposition of NOx with become the roughly state of balance, even input discharge energy becomes greatly, the concentration of NOx does not rise yet.Under the situation that has stopped gas, in the inner space of air processing unit 1, become this poised state, only generate with respect to the volume of the inner space of air processing unit 1 amount of the NOx of about 3% generation.It is very little that the volume of the inner space of air processing unit 1 is compared with gas flow, and the amount of the NOx of generation is also few.When discharge takes place, also flow through under the situation of gas of amount identical when discharge not taking place, roughly the discharge energy with input generates NOx pro rata.
Have, the effect that stops the growing amount of the minimizing NOx that gas conduction causes because of discharge in taking place also is applicable to intermittent mode again.But, be applied under the situation of intermittent mode,, discharge in the VOC treating apparatus, can not flow through process object gas in taking place, and must be stored in the process object gas that takes place somewhere in advance therebetween, or process object gas is not taken place.Different therewith, in this mode, the unit that stops gas stream is the air processing unit 1 of a part just, has as the VOC treating apparatus integral body effect of the processing of Interrupt Process object gas not.
If make the adsorbent contact discharge of having adsorbed VOC fully; Then adsorbent temperature rises; The VOC that has been adsorbed is flowing through under the situation of gas apace by desorb, exists the VOC conduct of not decomposing because of discharge to handle the problem of gas leakage outside the VOC treating apparatus.Through when discharging, stopping gas, VOC can not spill into the outside of air processing unit 1.Rested in the air processing unit 1 by the VOC of desorb, with the reaction of electronics or active material and be decomposed.
In present embodiment 1, implemented in the air processing unit 1 of a part, sequentially to take place discharge simultaneously and when discharge, stopped gas stream, but also can only implement wherein a certain.
From the basis of adsorbent 1C desorb VOC, if the temperature of adsorbent 1C is high, then desorption efficiency has also improved.But if the temperature of the gas in the space that discharge takes place uprises, the temperature of glass tube 1B is too high, then causes the withstand voltage decline of glass tube 1B, causes the insulation breakdown of glass tube 1B sometimes.Through the insulation breakdown of glass tube 1B, then air processing unit 1 can not be brought into play its function.Even be unlikely to cause insulation breakdown, if glass tube 1B temperature rise, then the dielectric loss tan δ of glass tube 1B increases, power consumption increases.Therefore, in present embodiment 1, earth electrode 1A is carried out water-cooled, the temperature that suppresses glass tube 1B indirectly rises, even in discharge, the temperature of glass tube 1B or adsorbent 1C also is about 100 ℃.In existing gas concentration impeller etc.; Owing to because of the VOC concentration around the adsorbent uprises the phenomenon (be called saturated phenomenon) of VOC from the speed decline of adsorbent desorb takes place; Even there is this phenomenon, be heated to about 300 ℃ and make it desorb VOC, also desorb VOC.In this mode of utilizing discharge desorb VOC, owing to decompose the VOC of desorb on the spot, thus saturated phenomenon does not take place, even the temperature of adsorbent is suppressed at about 100 ℃, but also desorb VOC.Have again, also can be not necessarily about 100 ℃.So long as can protect dielectric and can carry out the desorb treatment temperature efficiently, comparable about 100 ℃ high, also comparable about 100 ℃ low.
Even owing in discharge takes place, also only adsorbent 1C is heated to about 100 ℃, and so the temperature of adsorbent descends immediately after being changed to the duty A that does not discharge, adsorbable VOC.Have, the temperature in the air processing unit among the A 1 is about the temperature of cooling water in working order again.Even under the situation that the air processing unit 1 that can not adsorb VOC is fully arranged after duty B turns back to duty A; More than half air processing units 1 also for adsorbing the state of VOC fully, has the effect of the operation of the decomposition that can not stop VOC for adsorbent is regenerated.
In present embodiment 1, suppose that some group air processing unit 1 is got duty B always, but also can such as shown in Figure 6 whole group get as the such sequence of the phase of duty A 0.
In present embodiment 1, the number of air processing unit 1 in each group is decided to be identical, the time of getting duty B also is decided to be identical.This is for the VOC treating apparatus is stably worked efficiently.The number of the air processing unit 1 in the group can be different, maybe can make the time of getting duty B or the variations such as power consumption of discharge.But, in this case, if there is the possibility of not taking certain countermeasure efficient just to descend simultaneously.So long as through sequentially the group of the air processing unit 1 that in adsorbent 1C, adsorbed VOC fully being applied the control mode that discharge takes place high voltage, even adopt any control mode all to have to reduce the power of needs in the decomposition of the VOC that causes because of raising VOC concentration and reduce the effect of power supply capacity.
In present embodiment 1, possess a plurality of air processing units 1, but also can not have air processing unit 1.So long as can adsorbent zone be divided into a plurality of parts, make adsorbent adsorb VOC fully, handle the part of the adsorbent of differentiation, just have the power that needs in the decomposition that reduces VOC and reduce the effect of power supply capacity with the discharge that sequentially between electrode, takes place.Have, what is called can be divided into a plurality of parts again, supposes the situation that also comprises the method variation that according to circumstances makes differentiation.
Also available a plurality of electrode pair dual-purpose earth electrode 1A or high-field electrode 1D's is some.Can constitute earth electrode 1A as long as arbitrary side of earth electrode 1A or high-field electrode 1D has right number and high-field electrode 1D a plurality of to.
At this, in general, the classification of game that will in the VOC treating apparatus, necessitate is that performance is kept countermeasure and efficient improves countermeasure.So-called performance is kept countermeasure, be as VOC treating apparatus no problem its work is used countermeasure.So-called efficient improves countermeasure, is the countermeasure that improves as the efficient of VOC treating apparatus.Implement performance as required and keep countermeasure and efficient raising countermeasure.
Make the different this point of number of the air processing unit 1 in each group become efficient raising countermeasure sometimes.For example, in Fig. 2 (a), be provided with the cavity, but also air processing unit 1 can be set on this position in central authorities.In this case, even the measure-alike container 7 in the outside also can be provided with 1 air processing unit 1 more.But, 37 air processing units 1 likewise are being divided under the situation of 6 groups, the number of the air processing unit 1 of group be 6 be 5 groups, the number of the air processing unit 1 of group be 7 be 1 group.If in the power supply capacity of VOC treating apparatus affluence is arranged; Then need not implement countermeasure; But do not have at power supply capacity under the situation of surplus, the performance of power supply capacity is kept countermeasure also can adapt to so that the number of air processing unit 1 is 7 a group even must implement to increase.Moreover, improve countermeasure as efficient, must or make the identical change of power consumption that makes of the time that becomes duty B according to the number of the air processing unit that becomes duty B simultaneously 1, or make power consumption identical and the time that becomes duty B is changed.Have, if power supply capacity does not have surplus, then make under the identical situation of time of becoming duty B, must make power supply capacity is 7/6 times, makes under the situation that time of becoming duty B changes, and must make power supply capacity is 37/36 times.
, also can component be become more than or equal to 2 kinds under the situation for the integral multiple of group number at the sum of air processing unit 1, wherein 1 group is sequentially got duty B in each kind.For example 37 air processing units 1 are divided into 3 groups of kind A of each 4 air processing unit with the kind B of each 5 air processing unit 5 groups, the work sequence that also desirable Fig. 7 is such.In Fig. 7, sequentially become duty B from group A1 for some group to group A3, sequentially become duty B from group B1 for some group to group B5.In Fig. 7, in kind A and kind B, make the time of getting duty B identical, make the number of power consumption and air processing unit 1 proportional.Even control like this, also can in each air processing unit 1, likewise handle VOC efficiently.In kind A and kind B, also can the time of getting duty B and then the cycle of being be decided to be different values, so that in kind A and kind B, make time that adsorbent contacts with process object gas about equally.Moreover, if in kind A and kind B, the difference that can not allow does not take place, then can decide power consumption and the processing time of kind A and kind B by any way about the processing of VOC.
For the efficient of the situation of the integral multiple of group number improves countermeasure, also can take the countermeasure shown in Fig. 8 as the sum of air processing unit 1.In Fig. 8, on the position that becomes duty B, surround with parantheses, write the number of the air processing unit 1 of getting duty B.If see Fig. 8, the number of then getting the air processing unit 1 of duty B is always constant, but gets the formation time to time change of group of the air processing unit 1 of duty B.At first, the air processing unit 1 of number 1～7 becomes duty B simultaneously, but secondly the air processing unit 1 of number 36,37,1～5 becomes duty B simultaneously.Even like this, also can in each air processing unit 1, likewise handle VOC efficiently.Utilization is carried out the division of the group of air processing unit 1 as the voltage switch controlling organization 3 of discharge controlling organization.
Do not stop among the B in working order under the situation of gas stream, not additional special pipeline just can easily be implemented such control.It is complicated that the pipeline of process object gas becomes, and in each air processing unit 1, valve 5A must be arranged, but when discharge, stop also can carrying out same control under the situation of gas stream.
In present embodiment 1; VOC treating apparatus with the structure shown in Fig. 2 and Fig. 3 is illustrated; But being clipped in therebetween, existing 1 pair of electrode, the discharge that between electrode, takes place and adsorbent contacting structure so long as will adsorb the adsorbent of VOC, then can be any structure.Around high-field electrode, disposed dielectric, but also can be in earth electrode one side's additional dielectric.Also can having the space between the two, between high-field electrode and earth electrode, dispose dielectric at high-field electrode and earth electrode.Moreover, can not have dielectric yet and apply and exchange or dc high voltage.
In present embodiment 1, when the suction side of air processing unit 1 is provided with in discharge, stop the valve 5A of gas stream, but also can be arranged on exhaust side.Owing in each group of air processing unit 1, be provided with valve 5A, so be favourable to realize aspect low-cost in the reduction part count.Also can in each air processing unit 1, valve 5A be set, in this case,, the situation that can carry out more senior control, can improve the treatment effeciency of VOC be arranged also though the cost of device has improved.
In present embodiment 1, in each air processing unit 1, be provided with voltage switch element 3A, but also can in each group of air processing unit 1, voltage switch element 3A be set.The way that voltage switch element 3A is set in each group of air processing unit 1 has reduced the number of voltage switch element 3A, aspect cost degradation, is favourable.
The time stopped gas stream fully in discharge, but also can make at the gas flow ratio that flows through adsorbent when contact with discharge not few with the flow that flows through adsorbent when contacting of discharging.Which kind of investigate now if degree to reduce the generation that gas flow just can reduce NOx with.At this, will with the gas flow of discharge contact the time with respect to not being decided to be X with the ratio of the gas flow when contacting that discharges.X is more than or equal to 0 real number less than 1.As had explained the front, if NOx concentration improves, then the reaction of NOx decomposition can not be ignored.Under the insignificant situation of reaction little in NOx concentration, that NOx decomposes, the generating capacity of NOx and gas flow are irrelevant, are identical.Thereby if gas flow is decided to be X doubly, then the NOx concentration in the gas is 1/X times.If the NOx concentration in the gas improves, then the decomposition reaction of NOx can not be ignored, and the NOx concentration ratio 1/X in the gas is doubly little.Under the doubly little situation of NOx concentration ratio 1/X in gas, can obtain to reduce the effect of the generation of NOx.
The mechanism of can be without valve 5A but adopting the member by opening and occlusion of openings to constitute, so long as can reduce the mechanism of flowing through with the flow of the gas of the adsorbent that contacts of discharging fully, the flow guiding mechanism just can be any mechanism.Also can in each air processing unit 1, possess the flow guiding mechanism.
In order to suppress the generation of NOx; Be employed in that discharge stops the time or the such countermeasure of supply that reduces the process object gas that comprises nitrogen just can obtain effect of sufficient; If but the air processing unit 1 in the discharge were supplied with the inert gas or the oxygen of argon, helium etc., the generation of NOx then could further be reduced.Particularly flowing through under the situation of oxygen, just more oxygen atom or ozone are taking place, can further improve the decomposition efficiency of VOC.To be called special preparation gas with the gas that the purpose that reduces NOx has been prepared the composition of the regulation that the air processing unit in the discharge 1 is supplied with by the concentration of regulation.Under the situation of a kind of composition such as oxygen, be also referred to as special preparation gas.Can reclaim special preparation gas, utilize again.
In present embodiment 1, used hydrophobic zeolite as adsorbent, but through making hydrophobic adsorbent, even in process object gas, under the washy situation, also have and can adsorb the such effect of VOC.So long as make the situation of the pre-treatment of process object gas drying etc. in advance, also can not hydrophobic adsorbent.Hydrophobic zeolite is made glomeration, but so long as can be through process object gas, can be configured in the shape between the electrode, adsorbent can be any shape.As adsorbent, except zeolite, also can be the high oxidation silicon adsorbent of hollow silicate, dealuminzation hydrochlorate faujasite, five zeolites of high oxidation silicon, silica gel etc.It also can be the adsorbent of other kind.As long as can adsorb and desorb VOC, adsorbent can be any kind.
Above situation also is applicable to other embodiment.
Changed the electrode structure of the inside of air processing unit 1 in the present embodiment 2.The figure of the structure of the air processing unit 1 in the present embodiment 2 of explanation shown in Fig. 9.At drawing in side sectional elevation shown in Fig. 9 (a), at profilograph shown in Fig. 9 (b).On the inner surface of earth electrode 1A, apply dielectric film 1J, spherical hydrophobic zeolite is configured to 1 row, disposed the high-field electrode 1D of metallic cylinder.Other structure is identical with embodiment 1.
In present embodiment 2, owing on earth electrode 1A, applied dielectric film 1J, so also can cool off dielectric through earth electrode 1A is carried out water-cooled.Therefore, compare, can increase the temperature that makes dielectric film 1J and be the discharge energy density of identical about 100 ℃ situation, can make air processing unit 1 miniaturization more with the situation of embodiment 1.Have again, not too change owing to apply voltage, so discharge energy density and discharge current density are proportional.
In present embodiment 2, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
Have again, metal is connected airtight in the outside of dielectric pipe constitute earth electrode 1A to replace on the inner surface of earth electrode 1A, applying dielectric film 1J.
Changed in the present embodiment 3 air processing unit 1 inside electrode structure and changed embodiment 1 so as the cooling high-field electrode.The figure of the structure of the air processing unit 1 in the present embodiment 3 of explanation shown in Figure 10.At drawing in side sectional elevation shown in Figure 10 (a), at profilograph shown in Figure 10 (b).Have, the BB section among Figure 10 (a) is Figure 10 (b) again, and the AA section among Figure 10 (b) is Figure 10 (a).
Made and to have made cooling water flow through the structure of the high-field electrode 1D of metallic cylinder system in inside.High-field electrode 1D is made the cylinder of 2 weight structures; The cooling water supply port 1N that on an end of the cylinder of inboard, has cooling water to flow into; The cooling water that flows into from cooling water supply port 1N flows out from the end of an opposite side, turn back to and the cylinder in the outside between the space, flow out from cooling water outlet 1P.On the outer surface of high-field electrode 1D, applied dielectric film 1J.That is, as with the dielectric adjacency the high-field electrode 1D of electrode possess the electrode cooling body.
Because the inner surface (face that contacts with cooling water) of high-field electrode 1D does not carry out any coating, so cooling water is that resistivity is more than or equal to 10
4(pure water of Ω * m) is in order to avoid high-field electrode 1D is through cooling water ground connection.
In the outside of dielectric film 1J, likewise dispose the spherical hydrophobic zeolite of 1 row with embodiment 2, disposed the earth electrode 1A of metallic cylinder.In the empty 7D in the outside of earth electrode 1A, do not flow through cooling water.
Other structure is identical with embodiment 1.
In present embodiment 3, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
In present embodiment 3, owing on high-field electrode 1D, applied dielectric film 1J, so also can cool off dielectric film 1J through high-field electrode 1D is carried out water-cooled.Therefore, be decided to be under about 100 ℃ situation identical, compare, can improve the temperature that is in the discharge space between earth electrode 1A and the high-field electrode 1D with the situation of the embodiment 1 that cools off earth electrode 1A with the situation of embodiment 1 in the temperature that makes dielectric film 1J.That is, uprise even improve the temperature of discharge energy density, discharge space, the temperature of dielectric film 1J also can be maintained about 100 ℃.Owing to can improve discharge energy density, under the situation of identical output, can make air processing unit 1 further realize miniaturization.Have, on earth electrode 1A, applying dielectric film 1J etc. has in abutting connection with ground under dielectric situation with earth electrode 1A again, and the way of cooling earth electrode 1A can improve discharge energy density.If cooling high-field electrode 1D and earth electrode 1A the two, then can further improve discharge energy density.
Have again,, there is no need to use pure water, can use common water channel water or water for industrial use to cool off through coating coating insulating film on the whole face that contacts with cooling water of high-field electrode 1D.
Above situation also is applicable to other embodiment of cooling electrode.
Replace the mode of the dielectric film among the embodiment 3 to change embodiment 3 with the use glass tube in the present embodiment 4.At the figure that the structure of the air processing unit 1 in present embodiment 4 is described shown in Figure 11.At drawing in side sectional elevation shown in Figure 11 (a), at profilograph shown in Figure 11 (b).Have, the BB section among Figure 11 (a) is Figure 11 (b) again, and the AA section among Figure 11 (b) is Figure 11 (a).
The situation of the structure of high-field electrode 1D and embodiment 3 roughly is same.But, on the outer surface of high-field electrode 1D, do not apply dielectric film.The configuration glass tube 1B in the outside of high-field electrode 1D, setting combines the power supply layer 1Q of glass tube 1B and high-field electrode 1D with electricity and mode heat between glass tube 1B and high-field electrode 1D.Have again, if the electricity between glass tube 1B and the high-field electrode 1D combine inadequate words, between glass tube 1B and high-field electrode 1D paradoxical discharge takes place then.If the heat between glass tube 1B and the high-field electrode 1D combine inadequate words, cooled glass pipe 1B fully then.Power supply layer 1Q is used for making such state of affairs not take place.
Other structure is identical with embodiment 3.
At several examples of representing the structure of power supply layer 1Q shown in Figure 12.In the situation of having used steel wool 1Q1 shown in Figure 12 (a); In the situation of having used rubber-like wire netting 1Q2 shown in Figure 12 (b); Having used the reeled situation of rubber-like wire netting 1Q2 shown in Figure 12 (c), in the situation of having used marmem 1Q3 shown in Figure 12 (d) from steel wool 1Q1.Under which kind of situation, the high-field electrode 1D that power supply layer 1Q will be installed after the power supply layer 1Q all has been installed on the outer surface of high-field electrode 1D has been inserted among the glass tube 1B.
Improving on the basis of electricity and combination heat, hope that power supply layer 1Q is thin.For the high-field electrode 1D that power supply layer 1Q will be installed is inserted among the glass tube 1B, the thickness that power supply layer 1Q must have the flexibility of regulation and have regulation.Though this is to be decided by material of power supply layer 1Q etc., the thickness of hoping power supply layer 1Q is more than or equal to about 0.5mm.
Under the situation of using steel wool 1Q1, make the linear diameter that can obtain necessary flexibility, make the plot ratio that can obtain necessary hot conductivity.Under the situation of using wire netting 1Q2, its linear diameter is also decided by the flexibility of necessity.In addition, conduct the density that decides net according to heat.Under the situation of using marmem 1Q3, decide all characteristics according to same viewpoint.
Electric conductivity and thermal conduction characteristic that power supply layer 1Q has regulation get final product, and can be waited by electric conductivity lubricating grease, conductive adhesive, conducting putty, electric conductivity clay, electroconductive polymer, metallic plate to replace using.Can not use steel wool and make and weave the higher copper of pyroconductivity or the power supply layer 1Q of aluminium.Moreover in order to increase electric conductivity, plating that also can on the inner surface of glass tube 1B, utilize nickel, aluminium, chromium, gold etc. etc. is provided with conductive layer.
In the present embodiment, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
Through using glass tube 1B as dielectric, can be omitted in high-field electrode 1D and go up the time that applies dielectric film 1J, can reduce cost.
Through possessing power supply layer 1Q, compare with the situation of embodiment 1, can increase temperature with glass tube 1B and be decided to be the discharge energy density for about 100 ℃ situation identical with embodiment 1, can realize the further miniaturization of air processing unit 1.
Have again, also can the pipe rather than the glass tube of pottery etc. be used as dielectric.The dielectric that uses the such solid of glass tube, and electrode between exist under the situation of the possibility that the gap takes place; Combine dielectric and electrode to avoid the power supply layer in gap through possessing with mode heat with electricity; Can stably discharge, can keep cooling effectiveness.
Electrode structure in the present embodiment be high-field electrode be in inboard, earth electrode be in the outside, in dielectric situation of the very near outside configuration solid of high-field electrode; Even but with earth electrode in ground connection dispose dielectric situation, changed in the electrode structure of high-field electrode and earth electrode and disposed under dielectric situation in the inboard of high-field electrode or the outside of earth electrode, between dielectric and electrode, possess in the structure of power supply layer and also have same effect.And then, even under the situation of corner post shape or plane electrode, be utilized in the structure that possesses power supply layer between dielectric and the electrode, also can obtain same effect.
Figure 13 shows the figure of the profilograph of high-field electrode 1D.Through inlet portion the insulating barrier 1R of carborundum (SiC) or silicon (Si) type rubber etc. is set, can prevents the insulation breakdown that causes because of creeping discharge from can improve reliability in the glass cross section.
Above situation also is applicable to other the embodiment with power supply layer.
Changed the structure of the adsorbent of the inside that is in air processing unit 1 in the present embodiment 5.The figure of the structure of the air processing unit 1 in the present embodiment 5 of explanation shown in Figure 14.At drawing in side sectional elevation shown in Figure 14 (a), at profilograph shown in Figure 14 (b).Adsorbent 1C has certain flexible dull and stereotyped structure that becomes circle with the cylindric convexity that makes.For adsorbent 1C, on flat board or raised surface, added the composition of absorption VOC.Can know the member of the protruding double as support glass pipe 1B of adsorbent 1C from Figure 14 (a).Other structure is identical with embodiment 1.
In present embodiment 5, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
For the adsorbent 1C of such shape, with cylindric the hydrophobic zeolite back that is shaped is being left the hole and is being shaped in core, or reeling and overlapping hydrophobic zeolite with sheet of thin gas passage is shaped.The big multipotency of the method for coiling sheet is shaped at an easy rate.
In present embodiment 6, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
If 1C is decided to be dielectric with adsorbent, then owing to the wall with respect to the gas passage vertically discharges, so, brought into play the effect that adsorbent 1C makes discharge become stable with same as dielectric glass tube 1B.Have again, because the insulation endurance of adsorbent 1C is less big, so the dielectric of glass tube 1B etc. is in the reliability that interelectrode way can improve device.
Pellet electrode and between electrode, discharging on the direction vertical with adsorbent 1C but that intersect with adsorbent 1C then has adsorbent 1C and helps the stable effect of discharging.Adsorbent 1C can not be ring-type but four jiaos or other shape.Equally, electrode can not be cylindric but tabular.If apply high voltage on the direction that electrode is configured to intersect at the wall with the gas passage of adsorbent 1C, then can be any structure.
Above situation also is applicable to other the embodiment with power supply layer.
Also carried out being in the change of structure of adsorbent 1C of the inside of air processing unit 1 in the present embodiment 7 with respect to embodiment 1.The figure of the structure of the air processing unit 1 in the present embodiment 7 of explanation shown in Figure 16.
At drawing in side sectional elevation shown in Figure 16 (a), at profilograph shown in Figure 16 (b).As shown in Figure 16, the adsorbent 1C hydrophobic zeolite that has been sintering in case constitute a plurality of pores disappearance the about 5～100mm cylinder of height (ring-type) of core.Between earth electrode 1A and glass tube 1B, disposed the adsorbent 1C that has constituted the gas passage on the longitudinal direction at cylinder overlappingly.The internal diameter and the external diameter of ring-type are decided to be the size that can as far as possible seamlessly insert between glass tube 1B and the earth electrode 1A.If the height of adsorbent 1C is low, then to make easily, yield rate is high, but is operating on this point easily, and the height of adsorbent 1C is preferably higher.
Decide the diameter and the porosity in the hole of adsorbent 1C like this, make pressure loss be smaller or equal to setting and have the adsorption capacity of necessary VOC.For example,, the diameter in hole is decided to be about 0.01～1mm, the porosity is decided to be about 5～80%, hope to be about 10～40% for the thickness that makes adsorbent 1C is 5mm, the pressure loss of wind speed 1m/ under second for smaller or equal to 50Pa (=about 0.0005 air pressure).Have, on the basis of reducing pressure loss, hope that the diameter in hole is little, the porosity is low.If it is big that the diameter in hole becomes, the decreased number in hole then, the total surface area in hole also reduces.On the basis of absorption VOC, the total surface area in hole is greatly favourable.If it is big that the porosity becomes, then the amount of the adsorbent 1C of per unit volume reduces, and the quantitative change of adsorbable VOC is few in per unit volume.
Other structure is identical with embodiment 1.
The goods and materials of urethane etc. are mixed into the material that forms in the powder of hydrophobic zeolite to be put into stove and makes its sintering make adsorbent 1C.Burning such as urethane constitutes the hole thereafter with the stove sintering time.The size of the goods and materials of the mixing through adjustment urethane etc. and the ratio of mixing can easily be made the adsorbent 1C of the porosity of diameter with regulation, regulation at an easy rate.
In present embodiment 7, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
Because adsorbent 1C has been made dielectric, so if discharge with the mode of intersecting with adsorbent 1C, then with same as dielectric glass tube 1B, adsorbent 1C brings into play the effect that makes discharge stability.
Because sintering adsorbent 1C makes, so also have the effect that can make at an easy rate.
Above situation also is applicable to other embodiment.
Likewise the adsorbent 1C of such shape is formed with embodiment 6.
In present embodiment 8, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.Because of there not being the dielectric members of glass tube 1B etc., with embodiment 6 structure compared be simple, can make more at an easy rate.Because adsorbent 1C is a dielectric, so in present embodiment 8, also have the effect that stable discharge can take place.Have, because the insulation endurance of adsorbent 1C is so not high, so compare with the dielectric situation beyond the configuration adsorbent 1C between electrode, the reliability of device is low again.Under the reliability of the device of the little situation of current density etc. can so not high situation, use present embodiment 8.
In present embodiment 9, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.Under the situation of using granular adsorbent, the way of vertically placing has the characteristic of easy inclosure adsorbent.
Vertically place air processing unit 1 in the present embodiment 10, changed embodiment 3 with the mode of utilizing heat pipe cooling high-field electrode 1D.So-called vertically place, mean that being configured to high-field electrode 1D etc. is vertical direction with respect to ground.The figure of the structure of this air processing unit 1 of explanation shown in Figure 19.Drawing in side sectional elevation in the plane of level shown in Figure 19 (a), the profilograph in plane vertical shown in Figure 19 (b).Have, Figure 19 (a) is corresponding with the AA section of Figure 19 (b) again, and Figure 19 (b) is corresponding with the BB section of Figure 19 (a).
At this, the heat pipe 14 as the electrode cooling body that in high-field electrode 1D, uses is described.In heat pipe 14, close lower end as the pipe made of copper of high-field electrode 1D, enclose cold-producing medium 14A in the inside of pipe, possess the heat sink 14B of heat transmission on top.As cold-producing medium 14A, mainly make water.The reason that makes water is that the greenhouse effects of the earth coefficient is zero and is cheap.
In the present embodiment, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
Cool off high-field electrode 1D and dielectric film 1J efficiently, realize the increase of discharge energy density and then can realize that the effect of further miniaturization of air processing unit 1 is identical with embodiment 3.Moreover through using heat pipe 14, owing to do not need the management of pure water, maintenance becomes easy.In addition, owing to need not make the cooling water circulation,, can reduce operating cost so need not make the pump of cooling water circulation usefulness.
Using under the situation of heat pipe 14 as high-field electrode 1D, heat sink 14B has also been applied high voltage, so there is the possibility that paradoxical discharge takes place from heat sink 14B.For fear of this point, can reduce a little under the situation of cooling effectiveness, use insulant as heat sink 14B.Perhaps, apply insulating barrier.Perhaps, as shown in Figure 20, carry out being connected of top of high-field electrode 1D and heat pipe 14 through insulant 1S, can carry out the design of safe air processing unit with glass, pottery, epoxy resin etc.Be exposed under the situation in the corrosive gas at high-field electrode 1D, cover on copper pipe, prevent the corrosion of copper pipe with stainless steel.Have, so long as conductance and pyroconductivity are high to necessary degree, high-field electrode 1D is not made of copper yet again.
About being sealing into the cold-producing medium in the heat pipe, except water, so long as cooling effectiveness cold-producing medium high, that the greenhouse effects of the earth coefficient is little gets final product.
Even, also can obtain same effect using dielectric to replace under the situation of dielectric film 1J at the solid of the glass tube shown in the embodiment 4 etc.
Heat pipe is applied to high-field electrode cools off, cool off but also can heat pipe be applied to earth electrode.Heat pipe also capable of using cooling high-field electrode and earth electrode the two.
Above situation also is applicable to other the embodiment that uses heat pipe.
Embodiment 11.
Present embodiment 11 constitutes and uses flat electrode.The figure of the structure of the VOC treating apparatus in the present embodiment 11 of explanation shown in Figure 21.At profilograph shown in Figure 21 (a), at drawing in side sectional elevation shown in Figure 21 (b), at another locational drawing in side sectional elevation shown in Figure 21 (c).Have, the AA section among Figure 21 (b) is corresponding with Figure 21 (a) again, and the BB section among Figure 21 (a) is corresponding with Figure 21 (b), and the CC section among Figure 21 (b) is corresponding with Figure 21 (c).
In Figure 21, have 4 air processing units 1.The height of 1 air processing unit 1 is lower than 2cm, width and the degree of depth and is about tens cm.In Figure 21, for the purpose of description architecture, on short transverse, show with amplifying.
The process object gas that has passed through filter 4 gets into the inside of container 7 from the air entry 7A that is in right flank, through the inside of air processing unit 1, is discharged from from the exhaust outlet 7B of left surface.Very near front at exhaust outlet 7B has exhaust fan 6.
High-field electrode 1D is connected on the voltage switch element 3A through high-voltage conducting wires 1E and fuse 1F; Be connected to high-voltage conducting wires 1H on the other end of voltage switch element 3A from the outside that the high-voltage line introducing port 7C on the top of the exhaust side that is in container 7 is drawn out to container 7, be connected on the high-voltage generating device 2.
At the exhaust side of air processing unit 1, shown in Figure 21 (c), have the rectangular exhaust outlet 1K of specified number or amount (being 8 in present embodiment 11), the interval of exhaust outlet 1K is wideer slightly than the width of exhaust outlet 1K.Exhaust outlet 1K exhaust side have the shield 1L that exhaust outlet 1K is opened and closed.Shield 1L is the plate that size is identical with exhaust outlet 1K, have the opening of the number that lacks 1, and through shield 1L move left and right, the whole exhaust outlet 1K to air processing unit 1 opens and closes simultaneously.In Figure 21 (c), the exhaust outlet 1K of uppermost air processing unit 1 has been closed, and the exhaust outlet 1K of air processing unit 1 has in addition opened.In Figure 21, not shown flow guiding mechanism 5 control shield 1L move.
Duty A in the present embodiment 11 is decided to be exhaust outlet 1K and opens, high-field electrode 1D is not applied high-tension state.Then, duty B is decided to be exhaust outlet 1K and is closed, high-field electrode 1D is applied high voltage and the state that discharges.
Secondly, its work is described.Utilize 4 air processing units 1 of voltage switch controlling organization 3 and 5 controls of flow guiding mechanism, make it sequentially get duty B seriatim, other air processing unit 1 is duty A.In Figure 21, uppermost air processing unit 1 is shown is the situation of duty B.
In present embodiment 11, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
In present embodiment 11,, can make the device of practicality more at an easy rate owing in 1 container 7, held a plurality of air processing units 1 range upon range of.Have again, also can in per 1 air processing unit 1, possess the pipeline of container 7 and process object gas and cooling water.
Above situation also is applicable to other the embodiment that uses heat pipe.
Embodiment 12.
Present embodiment 12 constitutes and uses flat electrode and honey comb like adsorbent.The figure of the structure of the VOC treating apparatus in the present embodiment 12 of explanation shown in Figure 22.At profilograph shown in Figure 22 (a), at drawing in side sectional elevation shown in Figure 22 (b), at another locational drawing in side sectional elevation shown in Figure 22 (c).Have, the AA section among Figure 22 (b) is corresponding with Figure 22 (a) again, and the BB section among Figure 22 (a) is corresponding with Figure 22 (b), and the CC section among Figure 22 (b) is corresponding with Figure 22 (c).
In present embodiment 12, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.Owing to used honey comb like adsorbent, so the pressure loss when having reduced to flow through gas stream becomes the more VOC treating apparatus of practicality.
Embodiment 13.
In embodiment up to now, with the gas flow path direction discharge has taken place with meeting at right angles, but present embodiment 13 is to constitute the situation of discharging abreast with the gas flow path direction.The figure of the structure of the VOC treating apparatus in the present embodiment 13 of explanation shown in Figure 23.At drawing in side sectional elevation shown in Figure 23 (a), at profilograph shown in Figure 23 (b).Have, the AA section among Figure 23 (b) is corresponding with Figure 23 (a) again, and the BB section among Figure 23 (a) is corresponding with Figure 23 (b).But an inside with container 7 is decided to be profile in Figure 23 (b).
4 containers 7 of overlapping 4 air processing units 1 that held to have the rectangular section of growing crosswise are disposing on longitudinal direction.The service 8 and discharge duct 9 that on each container 7, have connected process object gas respectively.Has valve 5A in the front of discharge duct 9.Gas is flowing from figure from right to left.Service 8 is 1 at the suction inlet place of process object gas, but towards air processing unit 1 branch, with discharge duct 9 interflow from each air processing unit 1 be 1.At the front of exhaust outlet 7B configuration exhaust fan 6.
In air processing unit 1, have netted earth electrode 1A at exhaust side, honey comb like adsorbent 1C is clipped in disposes wire or bar-shaped high-field electrode 1D therebetween.Earth electrode 1A has covered the dielectric film 1J of pottery etc.The thickness of adsorbent 1C is decided to be at suitable thickness aspect the high voltage generation discharge that applies.High-field electrode 1D is connected with the voltage generation circuit 2 that ac high voltage takes place through high-voltage conducting wires 1E, fuse 1F, voltage switch element 3A and high-voltage conducting wires 1H from suction side.Width with regulation on the side of the inboard of container 7 has added insulator 7K, to avoid unwanted discharge.
The switching of flow guiding mechanism 5 control valve 5A, voltage switch controlling organization 3 control voltage switch element 3A, 1 air processing unit 1 is sequentially got duty B, and other air processing unit 1 is got duty A.
In present embodiment 13, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.
Owing on the gas flow path direction, discharge, thus made netted electrode or wire or bar-shaped, so that can flow through gas.Even be not netted, also can be plate or devices spaced apart a plurality of wire or the bar-shaped electrode side by side etc. that is provided with the hole of necessary size, as long as can flow through gas stream and discharge, the shape of electrode just can be any shape.
Owing on earth electrode 1A, covered dielectric film 1J to apply alternating voltage,, can make compact VOC treating apparatus so the high discharge of power density can stably take place.Also available dielectric covers high-field electrode 1D one side.If between high-field electrode and earth electrode, suitably dispose dielectric, then can the VOC treating apparatus be made compact device.
Power density in discharge does not need under the so high situation, can between high-field electrode and earth electrode, not dispose dielectric yet.In this case, earth electrode is made net etc. planar, high-field electrode made wire, high-field electrode applied under the negative high-tension situation, obtain stable discharge easily.
Above situation also is applicable to other the embodiment with same structure.
In Figure 24, use the air processing unit 1 of 4 towers to constitute 1 VOC treating apparatus with sealable compartment.The VOC treating apparatus sucks process object gas with exhaust with fan 6, removes dust or coating gas etc. with filter 4.Count the air processing unit 1 of 3 towers for the top from figure, open inlet side valve 5A and outlet side valve 11D, the process object gas absorption in adsorbent, has been carried out gas cleaning.In addition, for the air processing unit 1 of 1 tower of hypomere, close inlet side valve 5A and outlet side valve 11D and carry out airtightly, apply high voltage from high voltage source 2 through voltage switch element 3A, the desorb of having carried out being caused by discharge is handled.
Profilograph in 1 inside of air processing unit shown in Figure 25.Air processing unit 1 shown in Figure 25 is to close inlet side valve 5A and 11D to have carried out the electric discharge reactivating pattern of discharging.For the temperature that does not make glass tube 1B turns round near too rising, remain on 100 ℃, use the heat pipe 14 with high-field electrode 1D dual-purpose to cool off.Heat pipe 14, as shown in Figure 27, the situation of its structure and embodiment 10 is same.
At the upper surface of structural elements 1T and the inboard of lower surface insulant 1V is set, between structural elements 1T and high-field electrode 1D, discharge is not taken place.Hole through glass tube 1B also is set in insulant 1V, has bubble-tight structure but between insulant 1V and glass tube 1B, make, so that process object gas is no-leak.
Moreover, make wind by the strong hand to heat sink 14B with cooling fan 15A, cooled off heat pipe 14.With the air-supply guide plate 15B of tubular surround cold-producing medium 14A around so that form the ventilation road of the steady air current of the air that produces by cooling fan 15A.Entrance and exit place on the ventilation road is provided with filter 15C, in order to avoid suck outside dust because of cooling fan 15A.On structural elements 1T, be provided with the air-supply guide plate 15B of the tubular that becomes the ventilation road.Have again, if, then do not need cooling fan 15A, air-supply guide plate 15B and filter 15C with the heat exchange of the nature of heat sink 14B and outside atmosphere cooled glass pipe 1B suitably.
Electrode configuration at 1 air processing unit 1 shown in Figure 26 in inside.In Figure 26, has the high-field electrode 1D of 4 row by 7 of each row.The position configuration of the longitudinal direction among the figure of high-field electrode 1D becomes to be in the centre of the position in the row of adjacency.The reason of configuration is by this way, because process object gas does not pass through the part of high-field electrode 1D, so make process object gas the same flows in discharge space as far as possible.Have, the number of the high-field electrode 1D of 1 row and the number of row can be arbitrarily again.
Profilograph in explanation high-field electrode 1D and structure on every side thereof shown in Figure 27.High-field electrode 1D has enclosed the cylinder of water as cold-producing medium in inside.The outside at high-field electrode 1D is provided with glass tube 1B with concentric circles, between high-field electrode 1D and glass tube 1B, is provided with the power supply layer 1Q that is made up of with conductibility heat metal good, that have flexibility electricity.Be provided with the heat sink 14B of specified number or amount on the top of high-field electrode 1D.Be cooled 14 of the heat pipes of high-field electrode 1D of 4 shown in Figure 26 row of heat sink 14B are shared.At this, in order in the profilograph of Figure 27 etc., to avoid complexity, not shown air-supply guide plate 15B etc.Because high-field electrode 1D and heat sink 14B are applied high voltage, thus dispose suitable member so as not to and blow and discharge between the guide plate 15B, but these parts are all not shown.Have again, if that kind does not apply high voltage to heat sink 14B as shown in Figure 20, then not need and air-supply guide plate 15B between make it the member that do not take place to discharge.
Because also there is the part of the direction of intersecting with the process object gas flow in earth electrode 1A, thus constitute earth electrode 1A with wire netting or perforated metal, so that flow through process object gas easily.Among the earth electrode 1A beyond the outermost, the size and the perforated metal aperture in the hole of the net in the wire netting is decided to be the size that adsorbent 1C passes easily.For example, be decided to be granular adsorbent 1C diameter more than or equal to about 1.5 times.In order to discharge efficiently, the aperture is decided to be smaller or equal to about 6mm.Its reason is to take place because of the column of discharge with the about 1～4mm of diameter, and the column of the about 3mm of known diameter is maximum.If the about 6mm in aperture then can suppress the minimizing because of the porose discharge column that causes for about 10%.According to the above, under the situation of the spherical adsorbent that uses particle diameter 2mm, the aperture of earth electrode 1A is decided to be more than or equal to about 3mm, comparatively it is desirable to be decided to be about 3～6mm.In the ball type of particle diameter 3mm, the aperture of earth electrode 1A is decided to be more than or equal to about 4.5mm, comparatively it is desirable to be decided to be about 4.5～6mm.Have again, in the outermost earth electrode 1A of the direction of intersecting with the process object gas flow, the size and the perforated metal aperture in the hole of the net in the wire netting is decided to be the diameter less than adsorbent 1C, in order to avoid granular adsorbent 1C sews out.Outermost earth electrode 1A for the direction parallel with the process object gas flow is not provided with the hole, in order to avoid adsorbent 1C sews.
About other structure, with embodiment 13 be same.
About work, with embodiment 13 be same.Because the section of the earth electrode 1A in the face of level is dimetric; The section of high-field electrode 1D is circular; So the power-discharging density in the face of level is not the same; But adjust discharge time in the following manner, make the angle of approaching dimetric earth electrode 1A that interelectrode gap is elongated part also with the degree desorb of necessity.
In the present embodiment, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.Aperture through making earth electrode 1A is enough bigger than the diameter of adsorbent 1C; When filling up adsorbent 1C; Even adsorbent is put at 1 position from top; Adsorbent 1C also can expand in the integral body of the discharge space that is surrounded by the outermost earth electrode 1A of the inside of air processing unit 1, and therefore, assembling becomes easy.
Have, the inner earth electrode 1A of discharge space there is no need to have the hole in all identical aperture again.For example, among the earth electrode 1A of the horizontal direction in being in Figure 26, can reduce the number in hole, or reduce the diameter in hole, and then also can not have the hole.Its reason is, because this earth electrode 1A is parallel with the direction of process object gas flow, so even without the hole, also can flow through process object gas.
If make earth electrode 1A become regular hexagon, then the variation of the distance between high-field electrode 1D and the earth electrode 1A is littler than dimetric situation, and dead band (dead space) (not part between high-field electrode 1D and earth electrode 1A) also tails off.If allow the dead band take place, then also can make polygon-octagonal.
Have again, high-field electrode 1D is made cylindric, make the bight have the quadrangular prism shape of the circular arc of regulation but also can make.If high-field electrode 1D is made the quadrangular prism shape, then can reduce the change of the distance between high-field electrode 1D and the earth electrode 1A.The reason that makes the bight of quadrangular prism have circular arc is to make discharge not concentrate on the bight.Also can not necessarily make the bight have circular arc.
Moreover the amount of the VOC through Considering Adsorption agent 1C absorption also can be practiced thrift discharge power.Explanation shown in Figure 28 fully the VOC in the adsorption treatment object gas, at figure from the VOC adsorbance of the adsorbent 1C in moment of for example 10% the VOC of the VOC concentration of handling the porch that remains in air processing unit 1 gas of air processing unit 1 outflow.
Leave the concept map of the distance of the inlet of process object gas in explanation shown in Figure 28 (a).The variation of the VOC adsorbance of the adsorbent 1C that causes because of distance shown in Figure 28 (b) from the inlet of air processing unit 1.The ratio relative distance that is used as for the total length of adsorbent shows the distance here.In Figure 28 (b), the longitudinal axis illustrates and means the amount of in fact adsorbing with respect to the amount of the adsorbable VOC of the adsorbent 1C absorption completion rate for how many %.
The situation that discharge vertically takes place with gas stream has been shown in Figure 28 (a), even but as the situation of discharging with the generation abreast of gas stream present embodiment under the variation of absorption completion rate of the adsorbent 1C that causes because of distance from the inlet of air processing unit 1 also as shown in Figure 28 (b).
Shown in Figure 28 (b), roughly about half the adsorbent 1C from the part that approaches to enter the mouth to total length in air processing unit 1 has adsorbed 100% VOC.With total length roughly about half compare and be in dirty place, the absorption completion rate little by little reduces, and approaching the exit, is about 10%.
At this, will compare with the central authorities of the total length of adsorbent 1C be in roughly adsorbing of upstream side the part of 100% VOC be called wind top, the part that also can adsorb VOC fully of downstream side is called the wind bottom.In Figure 28 (b), the absorption completion rate average on wind top approaches 100%, and on average is about 50% in the absorption completion rate of wind bottom.Because for proportional with the amount of the VOC that adsorbed from the necessary energy of adsorbent 1C desorb VOC, thus take place in the wind bottom pact that the time of discharge is decided to be wind top half.If so, then, can practice thrift the energy that consumes in the wind bottom in that wind top and discharge time in the wind bottom are decided to be under the identical situation with being disabled.
Have again, also can make discharge time identical and discharge energy is changed.In addition, in Figure 25, in wind top and wind bottom, the number of high-field electrode 1D is decided to be identically, but also can be configured to reduce the number of the high-field electrode 1D in the area identical in the wind bottom.Have again; If the number of the high-field electrode 1D in the area identical is changed; Then owing to the minimum range between high-field electrode 1D and the earth electrode 1A, be that discharging gap also changes, discharge voltage also changes, so in wind top and wind bottom, high-voltage power apparatus must be set dividually.Make under the situation of discharge energy variation on wind top and wind bottom, must in wind top and wind bottom, high-voltage power apparatus be set dividually.Have again,, then install manufacturing cost and rise, judge synthetically that cost and performance decide number and the voltage thereof of high-voltage power apparatus etc. if a plurality of high-voltage power apparatus are set.
At this, distinguish wind top and wind bottom in the substantial middle of the total length of adsorbent 1C, but according to the total length of adsorbent 1C, the position difference of differentiation.If the total length of lengthening adsorbent 1C, then the ratio on wind top increases.Its reason be because; If there is the VOC treating apparatus of the characteristic with Figure 28 (b) in supposition; Then handle in the gas residual VOC whether only by the amount that also can adsorb the adsorbent 1C of VOC fully, be that the length of wind bottom decides; If the total length of lengthening adsorbent 1C, then the part of lengthening gets into wind top.
The flow of the time per unit of the process object gas that consideration synthetically should be handled; VOC concentration in the process object gas; The degree of passing through easily of the gas in the space that keeps adsorbent; Structural strength; The cycle of the circulation of absorption and desorb; Manufacturing cost and operating cost wait the sectional area on the direction of the process object gas flow that designs the space that keeps adsorbent; The total length of the adsorbent on the direction of process object gas flow; The size and the number of the high-field electrode of configuration; And the minimum range between high-field electrode and the earth electrode.For example, some below the consideration.Must the total amount of adsorbent be decided to be the value with cycle and VOC concentration balance, in order to avoid adsorbent changes and imitates in the cycle of handling.Flow according to process object gas decides the sectional area in the space that keeps adsorbent and the flow velocity of gas.Decide the total length of adsorbent like this, even so that in the scope that the pressure loss of VOC that does not also take place before the beginning desorb not adsorb and gas is being stipulated.If there is decision to keep the shape in the space of absorption, determine the size of discharging gap and high-field electrode and the situation of number again, the situation of the shape in the space that after initial decision discharging gap decision keeps adsorbing is arranged also then.
Through arranged outside post 1U, reduced outermost earth electrode 1A and be out of shape or damaged possibility because of the weight of the adsorbent 1C that has been filled with at the outermost earth electrode 1A of the direction of intersecting with the process object gas flow.In addition, because upper surface and the lower surface of connecting structure member 1T, so the intensity of structural elements 1T has increased.Have, post 1U also can make crossbeam or cant beam again.
Decide diameter, number, position of post 1U etc. with the mode that does not hinder the process object gas flow.Can obtain under the situation of full intensity with the structural elements of small-sized device, also can structural elements be set sometimes in the outside of the outermost earth electrode 1A of the direction of intersecting with the process object gas flow with tubular.Under the inadequate situation of structural elements intensity with the outside in the space that keeps adsorbent 1C only, the structural elements that also can surround with earth electrode in the internal configurations in the space that keeps adsorbent 1C is in order to avoid influence discharge generation.
The space of the adsorbent that keeps air processing unit 1 has been made the Nogata body, but also can be the shape that has made up beyond the Nogata body of shape etc. of polygonal column or cylindric or Nogata body.
Above situation also is applicable to other embodiment.
The figure of the structure of the VOC treating apparatus in present embodiment shown in Figure 29～Figure 31 15.Figure 29 is a drawing in side sectional elevation, and the profilograph in the BB section of Figure 29 is Figure 30, and the profilograph in the CC section of Figure 29 is Figure 31.
Only explanation with as Figure 26 of the situation of embodiment 14, the difference of Figure 27.High-field electrode 1D is configured in the row of adjacency, be on the identical position with the glass tube 1B that surrounds this high-field electrode 1D, the section of the earth electrode 1A that surrounds high-field electrode 1D is decided to be polygon-octagonal.So, because the dimetric part by earth electrode 1A encirclement takes place, thus in this dimetric part, make the surface play the function of earth electrode 1A, and be provided with as the post 1U that structurally strengthens the reinforcement of air processing unit 1.Post 1U links upper surface and the lower surface of the structural elements 1T of tubular.Post 1U is the metal system with high conductivity and high thermoconductivity.Inboard in the side of structural elements 1T; Be installed in the earth electrode 1A of the groove of the section that utilizes punch process to be provided with right angle two equilateral triangles on the position of regulation of the sheet material that does not have the hole; The section that makes earth electrode 1A is a polygon-octagonal towards inside at the end that makes groove.The reason that in this earth electrode 1A, is not provided with is because adsorbent 1C does not get in the space at earth electrode 1A and structural elements 1T right angle.Have again, because the adsorbent 1C that enters in this space can not utilize discharge to come desorb, so become useless adsorbent 1C.
Other structure is identical with embodiment 14.
Because high-field electrode 1D is configured on the position identical in the row of adjacency with the glass tube 1B that surrounds this high-field electrode 1D, the high-field electrode 1D and the glass tube 1B of 4 row are on the section in Figure 30.In Figure 31 of section as the earth electrode 1A that is in close proximity to the direction parallel with the process object gas flow, can know in earth electrode 1A to be provided with the hole, in the relative side in this hole also filling adsorbent 1C.
With post 1U and earth electrode 1A dual-purpose, but, also can earth electrode 1A be set dividually with post 1U down with the situation of the so not high material post 1U of conductance etc.
The earth electrode that also can the inboard in the side of structural elements 1T be provided with is installed on the structural elements seriatim.In addition, earth electrode 1A can not be a sheet material, but section is the post material of right angle two equilateral triangles.This point also is applicable to other the embodiment with same earth electrode.
Drawing in side sectional elevation in the structure of the VOC treating apparatus in present embodiment 16 shown in Figure 32.Only explanation and difference as Figure 29 of the situation of embodiment 15.Be not to use post 1U and be to use sheet material 1W to be in the reinforcement that the intensity of the direction parallel with the process object gas flow is used as increase.Earth electrode 1A with the same shape of the medial surface of structural elements 1T is installed on the two sides of sheet material 1W.Through such earth electrode 1A is set, the section that surrounds the earth electrode 1A of high-field electrode 1D becomes polygon-octagonal, and it is the same that power-discharging density is approached.The thickness of sheet material 1W is decided to be the thickness of the structural strength that can obtain stipulating.
Other structure is identical with embodiment 15.
Make the section of the earth electrode 1A that surrounds high-field electrode 1D become the earth electrode 1A that polygon-octagonal is used owing to installed, approach the same effect so have the discharge of making.Have again, also can earth electrode 1A be installed on the sheet material 1W.In this case, the different degree of discharging worsens, but has the effect of the cost of manufacture that can reduce air processing unit 1.
About, structurally strengthen the structural elements of air processing unit 1, so long as the member of the intensity that can obtain stipulating just can be any member.
Embodiment 17.
Present embodiment 17 is to have changed embodiment 14 so that handled the situation that gas is used in the cooling of heat pipe.
The plane of the structure of the VOC treating apparatus in the present embodiment 17 of explanation shown in Figure 33.The profilograph of the structure of the VOC treating apparatus in the present embodiment 17 of explanation shown in Figure 34.Only explanation and difference as Figure 24 of the situation of embodiment 14.In order to handle the cooling that gas is used in heat pipe 14, between the air-supply guide plate 15B on the top of each air processing unit 1 and discharge duct 9, be provided with cooling air supply pipe 16.Owing to utilize exhaust fan 6 through 14 air-supplies of cooling air supply pipe 16 opposite heat tubes, so there is not cooling fan 15A.
Other structure and embodiment 14 are same.
Present embodiment 17 is likewise worked with embodiment 14, has same effect.The gas of handling with the VOC treating apparatus clean, in the situation of having handled indoor gas etc. down, and the gas of processing of the about room temperature of discharge.In the present embodiment, owing to will handle the cooling that gas is used in heat pipe, because of special under the situation in summer etc. in the VOC of outdoor setting treating apparatus, the air that has passed through air-conditioning in the used chamber cools off heat pipe, so have the high advantage of cooling effectiveness.
Owing to wait the temperature of extraneous gas lower than room temperature in the winter time, externally the temperature of gas also can possess the structure that can utilize extraneous gas cooling heat pipe than under the low situation of room temperature.
Embodiment 18.
Present embodiment 18 be changed embodiment 13 in case in a plurality of air processing units 1 situation of dual-purpose earth electrode 1A and adsorbent 1C.The figure of the structure of the VOC treating apparatus in the present embodiment 18 of explanation shown in Figure 35.At drawing in side sectional elevation shown in Figure 35 (a), at profilograph shown in Figure 35 (b).Have, the AA section among Figure 35 (b) is corresponding with Figure 35 (a) again, and the BB section among Figure 35 (a) is corresponding with Figure 35 (b).
The different point of explanation and embodiment 13 only.In present embodiment 18, in 1 container 7, hold a plurality of air processing units 1, do not need service 8.Dual-purpose earth electrode 1A and adsorbent 1C in whole air processing unit 1.
In present embodiment 18, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.Since in air processing unit 1 dual-purpose earth electrode 1A and adsorbent 1C, so but the miniaturization of implement device or cost degradation.Have again, can a dual-purpose earth electrode 1A or adsorbent 1C some, but also dual-purpose except that earth electrode 1A or the part the adsorbent 1C.Dual-purpose parts this point also is applicable to other embodiment, if use, then has same effect.
Embodiment 19.
Present embodiment 19 is the situation that make the earth electrode rotation.The figure of the structure of the VOC treating apparatus in the present embodiment 19 of explanation shown in Figure 36.At drawing in side sectional elevation shown in Figure 36 (a), at profilograph shown in Figure 36 (b).Have, the AA section among Figure 36 (b) is corresponding with Figure 36 (a) again, and the BB section among Figure 36 (a) is corresponding with Figure 36 (b).
Honey comb like adsorbent 1C with circle in container 7 cylindraceous is clipped in therebetween, with circular configuration netted high-field electrode 1D and fan-shaped rotatable earth electrode 1A.On the medial surface of container 7,, prevent unwanted discharge with the width further insulator 7K of regulation.Further insulator 7K why, be have high-field electrode 1D in order to make, adsorbent 1C and the part of earth electrode 1A and the part that both sides become the surplus with regulation thereof.Earth electrode 1A and high-field electrode 1D are the material of the metal of high metal such as the electric conductivity of molybdenum, tungsten, stainless steel etc. or the platinum that on these metallic surfaces, has covered the catalyst action with oxidation Decomposition, gold, titanium dioxide, manganese dioxide etc.
The section of adsorbent 1C and high-field electrode 1D is full of the inboard of container 7.The radius of the radius ratio adsorbent 1C of earth electrode 1A is slightly little, in container 7, can rotate.The fan-shaped angle [alpha] that makes earth electrode 1A is the value (being not integer) of removing 360 degree with the α size for the regulation of the group number that is equivalent to the air processing unit 1 in embodiment 1 grade.Having, can be a plurality of with the fan-segmentation of earth electrode 1A also again.Be divided under a plurality of situation, considering that same aspect decides fan-shaped angle.
Flow to right in the left side of process object gas from figure, high-field electrode 1D is in suction side, and earth electrode 1A is at exhaust side.Exhaust side at earth electrode 1A has the rotating mechanism 10 that makes earth electrode 1A rotation.Rotating mechanism 10 is made up of following part: rotating shaft 10A; Rotating shaft 10A is fixed on the fixed frame 10B on the container 7; Be in rotating shaft 10A under the driving shaft 10C parallel with rotating shaft 10A; Driving shaft 10C is rotated the motor 10D on the container 7 that is fixed on of driving; And the belt 10E that the rotation of driving shaft 10C is passed to rotating shaft 10A.
Rotating mechanism 10 is discharge controlling organizations, and is the flow guiding mechanism.
The interval unit of earth electrode 1A and high-field electrode 1D can be taken place with the high voltage that is applied the proper spacing of discharge.Shorten the interval of earth electrode 1A and adsorbent 1C, make that flowing through gas that earth electrode 1A is in the adsorbent 1C in the dirty part flows and lack than other part.Specifically, for smaller or equal to 5mm, comparatively it is desirable to smaller or equal to 1mm.Have, the adsorbent 1C that earth electrode 1A is in the dirty part is the part that contacts with discharge again.
Secondly, explanation work.The VOC treating apparatus applies the positive high voltage of direct current to high-field electrode 1D at work always.Every official hour at a distance from about a few minutes makes earth electrode 1A move angle α.If so, then between the part of the high-field electrode 1D relative with earth electrode 1A, discharge, in the adsorbent 1C of the part that contacts with discharge, VOC is broken down into water and carbon dioxide by the VOC of desorb because of discharge by desorb.A part that this means adsorbent 1C becomes sequentially and the discharge state of contact.Have again; The time interval that earth electrode 1A is moved is to use adequate time aspect the adsorbent 1C of the part that contacts of discharging decomposes desorb VOC, and this time is to decide than the mode of the adsorbent 1C that changes the time length of imitating not occur to the time interval of discharging till contact.
In present embodiment 19, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.Moreover, also have the characteristic that need not flow through pipeline that gas uses or valve etc.
Shorten the interval of earth electrode 1A and adsorbent 1C, in the part of the adsorbent 1C that discharge takes place, reduce gas stream, also can reduce the generation of NOx.Moreover, high-field electrode 1D, adsorbent 1C, container 7 respectively have one just passable owing to need not adopt the valve etc. of cooling device or the gas stream adjustment usefulness of water, so have the advantage that can make at an easy rate.
The rotation of earth electrode 1A is decided to be makes the angle rotation identical with the fan-shaped angle [alpha] of earth electrode 1A intermittently in 1 time, but also rotation serially.Make it intermittently under the situation of rotating, 1 time anglec of rotation β is not α yet.Become the angle littler than α and can shorten the interval that makes it to move, the also available angle bigger than α makes it mobile with the interval of stipulating.Because the part of the adsorbent that the way desorb of using the angle bigger than α to make it to move separates with the part of last time desorb is so desorb more efficiently.
Make earth electrode 1A rotation like this, so that the desorb sequentially of the part of adsorbent, the part of adsorbent that can not desorb does not take place or do not take place also to have the part of not desorb and go to the position of desorb desorb.At this, the situation of the part of the adsorbent that generation can not desorb for example is the situation of α=30 degree, β=120 degree.In this case, the adsorbent at a desorb 0 degree～30 degree, 120 degree～150 degree, 240 degree～270 these 3 positions of degree, can not desorb other the adsorbent of part.Also having the part of not desorb and going the situation at the position of desorb desorb for example is the situation of α=30 degree, β=125 degree.In this case, the scope of desorb 0 degree～30 degree, 125 degree～155 degree, 250 degree～280 degree, 15 degree～45 degree, the scope of the angle of 240 degree be also by desorb, and 15 degree～30 degree the 2nd time are by desorb.Under the situation that a plurality of earth electrode 1A are arranged, also to note same aspect, make earth electrode 1A rotation.
Though decrease in efficiency, though also the part of adsorbent that can not desorb takes place or also has the part of not desorb and go to the position of desorb desorb in tolerable.
The shape of electrode is not fan-shaped, but rectangle or fan-shaped and rectangular combination etc.Under the fan-shaped and rectangular situation of combination, preferably that radius is big part makes the part fan-shaped, that radius is little and makes rectangularity.And then, about the shape of electrode,, then can be shape arbitrarily as long as can cover the part of adsorbent 1C, if electrode rotates and 1 week can cover most adsorbent.
High-field electrode 1D is applied positive high voltage, but also can apply negative dc high voltage.Also can on a certain at least side's of earth electrode 1A or high-field electrode 1D discharge face, place dielectric and apply alternating voltage.The way that applies alternating voltage can easily obtain stable discharge with higher power.Using under dielectric situation, the earth electrode 1A among Figure 36 is made the structure that in glass tube, disposed metal electrode, is that the structure of the high-field electrode 1D among the embodiment 1 is effective.Perhaps, also can the high-field electrode 1D among Figure 36 be made the structure that is configured in a plurality of glass tubes of wherein having put into metal electrode.Have, glass is dielectric example again, also can be other dielectric.Also can be on metal electrode covering dielectric.
Can the little electrode of rotation be decided to be earth electrode 1A but be decided to be high-field electrode 1D yet.Under the high-field electrode 1D situation littler, increase the stability of discharge and become more practical device than earth electrode 1A.But, be applied under the situation that high-tension electrode moves making, owing to must consider insulation etc., it is complicated that structure becomes, so the electrode that rotates is decided to be earth electrode 1A and the some of high-field electrode 1D gets final product according to purposes.
In present embodiment 19, omitted cooling device, but also can synthetically judge cost and performance and possess the device of cooling electrode.Have again, the way of cooling electrode with high power stability to make it aspect the discharge be effective.
Under the situation of honey comb like adsorbent,, gas flow is descended because gas with the gas inside path of linearity through adsorbent, only through inlet or exit in the gas passage some pressure losses takes place.That is, for honey comb like situation, under the earth electrode 1A situation identical with the interval of adsorbent 1C, the effect that the effect of minimizing gas flow promptly reduces the NOx generating capacity is bigger.Even be not honeycomb, also can obtain reducing the effect of necessary NOx generating capacity at interval if reduce fully.Have again, do not reduce the NOx generating capacity or take to make under the situation of the other countermeasure that the NOx generating capacity reduces the interval that also can increase earth electrode 1A and adsorbent 1C allowing.
In present embodiment 19, make earth electrode 1A rotation, but also can make its parallel moving.High-field electrode 1D reticulated do not move it, but also can high-field electrode 1D be made the shape identical with earth electrode 1A, earth electrode 1A and high-field electrode 1D are moved.But also fixed electrode and adsorbent is moved.Under the situation that adsorbent is moved, if adsorbent is done circular and made its rotation, then the waste in the space configuration is less.Mode to contact with the adsorbent of a part is discharged between electrode pair; If a certain at least side through electrode or adsorbent moves most adsorbent and can contact with discharge, then the shape of electrode and adsorbent and moving method can be shape and moving method arbitrarily.
Above situation also is applicable to other the embodiment with same structure.
With as Figure 36 of the situation of embodiment 19 relatively, differentiated aspect only is described.1A makes wire with earth electrode, has baffle plate 1M at the downstream side of the gas of earth electrode 1A stream.With the width of baffle plate 1M be decided to be shelves live the scope that contact with discharge honeycomb the gas passage aspect the sufficient length of necessity.Angle intervals with mutual 120 degree has the group of 3 earth electrode 1A and baffle plate 1M.Other structure is identical with embodiment 19.
In present embodiment 20, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx, can reduce part count, can make with low cost.Moreover, because earth electrode 1A is a wire,, discharge easily so increase near the electric-field intensity the electrode.
The width of baffle plate 1M is decided to be and covers the part of not covering with the part of the adsorbent that contact of discharge not with the adsorbent that contacts of discharging.If baffle plate 1M covers the part of the adsorbent that does not contact with discharge and stops gas stream, then adsorbent neither adsorbs also not desorb VOC of VOC in this part, and the treatment effeciency of VOC treating apparatus descends.If the sectional area of 1 gas passage of honey comb like adsorbent is little, so,, in this gas passage, can not flow through gas even then do not cover the outside of gas passage if can all cover 1 gas passage.Therefore, under honey comb like situation, neither adsorbing also, the adsorbent of not desorb VOC is necessary Min..So, the efficient of VOC treating apparatus is not descended, can reduce the generation of NOx.At adsorbent is not under the honey comb like situation, takes further to increase baffle plate 1M or shortens the countermeasure at the interval etc. of baffle plate 1M and adsorbent.Have, baffle plate 1M is not tabular yet again.Even under any situation, all baffle plate 1M is made and reducing towards necessary sufficient shape and size aspect the gas stream of the adsorbent that contacts with discharge.Have again, do not reduce the NOx generating capacity or take to make under the situation of the other countermeasure that the NOx generating capacity reduces allowing, also shouldn't baffle plate 1M.
If because earth electrode 1A were made the ratio minimizing of wire and the part of the adsorbent that contacts of discharge, so would make earth electrode 1A a plurality of.Consider that synthetically the adsorbent that contacts with discharge decides shape, size, the number of mobile electrode and baffle plate 1M for which kind of whole degree, the scope that makes the gas flow minimizing and degree thereof etc.
VOC treating apparatus in the present embodiment 21 is in the VOC of embodiment 1 treating apparatus, to have added to handle the following part that special preparation gas is used.(1) as supplying with the special special preparation gas supply mechanism 11A for preparing the gas supply mechanism of gas.(2) the pipeline 11B between special preparation gas supply mechanism 11A and air processing unit 1.(3) the valve 11C of flow of the special preparation gas of pipeline 11B is flow through in adjustment.(4) whether the exhaust of adjustments of gas processing unit 1 flows to exhaust fan 6 one sides' valve 11D.(5) recovery and regeneration are from the special preparation recuperation of gas 11E of mechanism of the special preparation gas of air processing unit 1.(6) link air processing unit 1 and the special pipeline 11F for preparing the recuperation of gas 11E of mechanism.(7) the valve 11G of the flow of adjustment pipeline 11F.(8) be in the exhaust fan 11H of the front of exhaust outlet in the inside of pipeline 11F.(9) link the special pipeline 11J for preparing recuperation of gas 11E of mechanism and special preparation gas supply mechanism 11A.
Ratio with regulation has been prepared inert gas and oxygen, so that reduce the part of the nitrogen of special preparation gas as far as possible.Judge that synthetically performance raising effect and cost decide the composition of special preparation gas.Special preparation gas supply mechanism 11A supplies with the mechanism of having prepared the special preparation gas of oxygen and inert gas with the ratio of regulation.The special preparation recuperation of gas 11E of mechanism is from mechanism that the special preparation gas that reclaims removes deoxidation and the composition the inert gas, regenerates with the mode that can be used as special preparation gas use once more.The preparation that the additional oxygen of special preparation gas that will regenerate with special preparation gas supply mechanism 11A or inert gas make it to become regulation is supply gas processing unit 1 afterwards.
1 air processing unit 1 possesses the airtight compartment of ability, has valve 5A and valve 11C in suction side, has valve 11D and valve 11G at exhaust side.According to the open and-shut mode of these valves with whether high-tension applying is arranged, air processing unit 1 is got 4 kinds of following duties.Duty A is the state of the VOC in the adsorbents adsorb process object gas.Duty B is the VOC of desorb absorption and the state that decomposes VOC.Different therewith, duty C and duty D be state transitions transition midway midway.Get duty C midway what transfer to duty B from duty A, get duty D midway what turn back to duty A from duty B.
Figure in each duty of explanation shown in Figure 39.Have again, with the light special preparation of half-light pool shape performance gas.Duty A shown in Figure 39 (a), is that valve 5A and valve 11D open, valve 11C and valve 11G closes, process object gas flows through the state in the air processing unit 1.High-field electrode 1D is not applied high voltage, do not discharge.Duty C shown in Figure 39 (b), is the state that changes from duty A with the mode that valve 5A closes, valve 11C opens, valve 11D closes, valve 11G opens.Among the A, in air processing unit 1, be full of process object gas in working order, but transposing is duty C for the special state midway of preparing gas.If with the inside of special preparation gas gassy processing unit 1, then valve 11C and valve 11G close, 1D applies high voltage to high-field electrode, discharges.Like this, the state shown in Figure 39 (c) is duty B.Among the B, valve 11C and the some of valve 11G are opened in working order.And then, increasing though prepare the consumption of gas especially, the two is all opened can to make valve 11C and valve 11G among the B in working order.
If high-field electrode 1D is not applied high voltage from duty B, open valve 5A and valve 11G, then become the duty D of Figure 39 (d).Among the D, the special preparation gas transposing that is full of in the inside of air processing unit 1 among the B in working order is process object gas in working order.If eliminated special preparation gas from the inside of air processing unit 1, then shut off valve 11G, open valve 11D, turn back to duty A.Utilize flow guiding mechanism 5 to carry out the control of these valves.Have again, also can control valve from special preparation gas supply mechanism 11A or other the mechanism of preparing 11E of recuperation of gas mechanism etc. especially about special preparation gas.
Sequence in the duty that the group of air processing unit 1 is got in the VOC treating apparatus shown in Figure 40.Have again, in Figure 40, arrange from following order with duty A, duty B, duty C and duty D.Has duty from phase 1A to phase 6B.Repeat following process: with phase 1A, phase 1B, phase 2A, phase 2B, phase 3A ..., the order of phase 6A, phase 6B changes, and turns back to phase 1A from phase 6B.In phase nB, the in running order B of group n, the in running order A of remaining group.In phase nA, group n-1 is duty D, and group n is duty C, and remaining group is duty A.Because making group make group n when n-1 is duty D is duty C, thus can shorten to make group n-1 be duty A, make group n be aspect the duty B need time.
Though need the time, can be duty C also group n-1 is made after being duty A organizing n.In addition, can after making group n-1 be duty D, make group n is duty C, and also can after making group n be duty C, make group n-1 is duty D.Have, in these cases, strictly speaking, it is more that the number of phase becomes again.Below, do not mention phase especially, but under the situation of the sequence of the duty of in each group of change, getting, suppose with this sequence consistently to make number of variations mutually yet.
In present embodiment 21, also available little power supply capacity is handled VOC efficiently, owing in not comprising the special preparation gas of nitrogen, discharge, so NOx takes place hardly.Moreover if improve the oxygen concentration in the special preparation gas, then the probability of happening of the active material of oxygen atom or ozone etc. improves, and the decomposition efficiency of VOC also improves.Special preparation gas comprises oxygen, so long as have the special preparation gas of the characteristic that its oxygen concentration is higher than the oxygen concentration in the atmosphere or its nitrogen concentration is lower than the nitrogen concentration in the atmosphere, and certain effect of the generation minimizing that just have the decomposition efficiency that improves VOC, makes NOx.Prepare inert gas and replaced nitrogen, even but be not inert gas, even so long as the gas of harmful substance does not take place with oxygen reaction or reaction yet, just can be any gas.
Serves as that change with the mode of using special preparation gas on the basis at present embodiment 21 with embodiment 1, but can other embodiment be basic also.
In present embodiment 21, valve is opened and closed, so that gas is not prepared in external leakage especially as far as possible.Do not sneak under the situation of special preparation gas of recovery paying attention to process object gas,, do not carry out the opening and closing operations of valve 11D and valve 11G when duty A is changed to duty C, when duty C is changed to duty B, a shut off valve 11D.And, make from moment that duty D turns back to duty A in advance, the special preparation gas air processing unit 1 in is discharged from fully and turns back to before duty A.Have, the order of operating these valves also can be an order in addition again.Operate a plurality of valves 3 simultaneously, but also can only operate 1 valve for 1 time.In addition, the beginning of discharge and the moment of end are changed.Have, through the control and the beginning of discharge and the moment variation of end that make each valve, the duty of the transition between A and the duty B changes in working order, gets the duty beyond duty C and the duty D again.But under the situation of getting the duty that makes it simultaneously in a plurality of groups to discharge, the countermeasure of taking to make the power that consumes because of discharge be no more than power supply capacity is necessary.Under the situation of the countermeasure that can not implement to make the power that consumes because of discharge be no more than power supply capacity, can not in a plurality of groups, make it discharge simultaneously.
Make the time that becomes duty C identical, but also can make its difference with the time that becomes duty D.Make under its condition of different, can make duty C identical, also can make the moment of end identical with the moment of the beginning of duty D.And then, also can make duty C beginning and end the moment and duty D beginning and end the moment all different.
In present embodiment 21, the special preparation gas that has reclaimed is regenerated, utilize once more as special preparation gas, but also can only reclaim and not utilization once more.In addition, also can not reclaim special preparation gas.With the composition of special preparation gas consistently consider to prepare because of the degree of using performance that special preparation gas causes to improve, especially gas cost, reclaim and regeneration in cost, the shortcoming etc. of recovering state not of device etc. of needs, synthetically judge and determine whether to reclaim or regenerate and prepare gas especially.
Utilize in the present embodiment 22 and handled that gas will residual gas (gas after being called desorb) turns back to suction side in the inside of air processing unit 1 behind the VOC having stopped process object gas flow utilization discharge desorb.Figure 41 is the system block diagram of the VOC treating apparatus in present embodiment 22.
Part below VOC treating apparatus in present embodiment 22 has added in the device of embodiment 1 turns back to the gas gigback that suction side is used as gas after with desorb.(1) will handle gas turns back to aspirating air pipe 8 usefulness through the inside of air processing unit 1 exhaust fan 11H.(2) the pipeline 11F of binding air processing unit 1 and exhaust fan 11H.(3) the valve 11G of the flow of adjustment pipeline 11F.(4) whether the exhaust of adjustments of gas processing unit 1 flows to exhaust fan 6 one sides' valve 11D.
1 air processing unit 1 is sealable compartment, has valve 5A in suction side, has at exhaust side at exhaust side and has valve 11D and valve 11G.According to the open and-shut mode of these valves with whether high-tension applying is arranged, air processing unit 1 is got 3 kinds of following duties.Duty A is the state of the VOC in the adsorbents adsorb process object gas.Duty B is the state that utilizes the VOC of discharge desorb absorption and decompose VOC.Duty D be utilize handle gas with desorb after gas turn back to the state of suction side.Duty D is the state that turns back to the transition of temporarily getting of duty A from duty B midway.
Figure in each duty of explanation shown in Figure 42.Have again, with gas after the light half-light pool shape performance desorb.Duty A shown in Figure 42 (a), is that valve 5A and valve 11D open, valve 11G closes, process object gas flows through the state in the air processing unit 1.High-field electrode 1D is not applied high voltage, do not discharge.Duty B shown in Figure 42 (b), is that valve 5A, valve 11G, valve 11D close, high-field electrode 1D is applied high voltage, and the state of discharge takes place.Valve 5A is opened.If high-field electrode 1D is not applied high voltage from duty B, open valve 5A and valve 11G, then become the duty D of Figure 42 (c).If open valve 11D from duty D, shut off valve 11G then turns back to duty A.Utilize flow guiding mechanism 5 to carry out the control of these valves.Also can control the valve that turns back to suction side about gas after the desorb by newly-installed other mechanism.
In working order among the D; Utilize handled the desorb that comprises the secondary product that discharge of inside that gas is filled in air processing unit 1 in working order among the D after gas give service 8, adsorb secondary product with the air processing unit that is in other duty A 1.The direction of gas flow and process object gas flow in the opposite direction in the duty A that has adsorbed VOC among the D in working order.Get duty D during be decided to be can with gas after the desorb all turn back to aspirating air pipe 8 regulation during.Having, return that the destination of gas can not be an aspirating air pipe 8 after the desorb, so long as be not discharged to outside position in suction side, just can be position arbitrarily.
At the figure that the sequence of the duty that the group of air processing unit 1 is got in the VOC treating apparatus is described shown in Figure 43.Have again, in Figure 43, arrange from following order with duty A, duty D, duty B.Has duty from phase 1A to phase 6B.Repeat following process: with phase 1A, phase 1B, phase 2A, phase 2B, phase 3A ..., the order of phase 6A, phase 6B changes, and turns back to phase 1A from phase 6B.In phase nB, the in running order B of group n, the in running order A of remaining group.In phase nA, group n-1 is duty D, and remaining group is duty A.The pattern of the variation of the duty that each group that will as above, explain is got is called pattern A.
At this, in phase nA, also can make group n-1 is duty D, and group n is duty B, and remaining group is duty A.The pattern of such each being organized the variation of the duty of getting is called pattern B.Have again, in pattern B, 1 in running order always B of group, the number of the group of getting duty A in phase nA lacks 1 than the situation of pattern A.If the number of group is fully big, it is no problem that the number of then getting the group of duty A lacks 1 this point than the situation of pattern A, do not take place can not adsorption-desorption after secondary product or the state of affairs of the VOC in the process object gas in the gas.
In present embodiment 22, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx.Moreover owing to after gas returns to service after the desorb of the secondary product that will comprise the NOx that generates because of discharge etc., remove the secondary product of NOx etc. with adsorbent 1C absorption, the secondary product of pretending to the NOx that handles the gas discharge etc. is considerably less.
Serves as that the basis changes to and possesses handling the gas gigback that gas returns to service at present embodiment 22 with embodiment 1, but can other embodiment be basic also.
Even be not that air processing unit 1 is divided into a plurality of groups and in each group, carry out the VOC treating apparatus that the desorb of adsorbent is handled,, also has the effect of the discharge rate of the secondary product that can reduce NOx etc. if possess the gas gigback.Be not in each group, to carry out being full of the inside of the air processing unit 1 of gas after the desorb among the duty D of situation of the VOC treating apparatus that the desorb of adsorbent handles, 11D sends into extraneous gas from valve, make desorb after gas turn back to suction side.Have again; In each group, carry out under the situation of the VOC treating apparatus that the desorb of adsorbent handles; Can be used in gas after the desorb is turned back to suction side handling gas, have available other air processing unit 1 carries out adsorption treatment immediately to the gas that turns back to suction side advantage.
Through when discharge takes place, also gas being turned back to suction side, can prevent to discharge the secondary product of the NOx that generates by discharge etc.But, the flow of the gas that when discharge takes place, oppositely flows through be not that flow during discharge takes place the time is identical or than it under the big situation, not have to reduce effect by the amount of the NOx of the generation of discharging.Have, the flow-rate ratio of the gas that when discharge takes place, oppositely flows through is not that little degree is big more under the little situation of the flow during discharge takes place the time again, and the reduction of the NOx that is taken place by discharge is big more.
Because when discharge takes place, also gas is turned back under the situation of suction side, the amount of residual secondary product is few in air processing unit 1, so can shorten after the discharge generation official hour that gas is turned back to suction side.
Above situation also is applicable to other embodiment.
Embodiment 23.
VOC treating apparatus in the present embodiment 23 is to be the basis, to detect VOC concentration in the process object gas, to adjust the device of the amount of power consumption of discharge according to VOC concentration with embodiment 1.Figure 44 is the system block diagram of the VOC treating apparatus in present embodiment 23.Fig. 1 with respect to the situation of embodiment 1 has difference aspect following.After filter 4, added the VOC concentration sensor 12 that detects the VOC concentration in the process object gas.Have discharge power controlling organization 13, replace voltage switch controlling organization 3 and flow guiding mechanism 5 as the discharge controlling organization.From calculate the amount (being called the VOC adsorbance) of the VOC of adsorbent 1C absorption with VOC concentration sensor 12 detected VOC concentration; VOC adsorbance during according to the discharge beginning; Control voltage switch element 3A and valve 5A are so that become the amount of power consumption of minimal discharge necessary aspect decomposition VOC.Other structure is identical with embodiment 1.
Secondly, its work is described.In present embodiment 23, air processing unit 1 is got following duty E except the same duty A and duty B of embodiment 1.Duty E is that valve 5A closes, high-field electrode 1D do not applied high-tension state.Duty E be under the few situation of VOC adsorbance in working order the desorb of the adsorbent 1C among the B be through with the air processing unit 1 of the next group in back till becoming duty B and consisting of duty A to this during in the duty of getting.
Explain that duty E is a causa sine qua non.Under the low situation of VOC concentration, the time of resolution process VOC shortens among the B in working order.Under the situation of not getting duty E, if duty B will get in the moment place that duty B finishes in certain group in next one group, the cycle of the work of VOC treating apparatus changes with VOC concentration.Under the low situation of VOC concentration, the cycle of processing shortens, and before adsorbent adsorbs VOC fully, carries out resolution process with discharge, and the decomposition efficiency of VOC descends.For the cycle of handling is decided to be the length more than or equal to regulation, duty E is necessary, in order to avoid decomposition efficiency is descended.
The figure of the relation of the VOC adsorbance of the adsorbent 1C in the VOC concentration in the process object of explanation shown in Figure 45 gas and each group of air processing unit 1.VOC concentration in process object gas shown in Figure 45 (a) organizes 1～the VOC adsorbance of adsorbent 1C in the air processing unit 1 of group 6 shown in Figure 45 (b-g).VOC concentration in the process object gas uses the % for the Cmax of imagination to show.The VOC adsorbance of adsorbent 1C uses the % for the amount of the VOC that in 1 cycle, adsorbs to show under the continuous situation of the process object gas of Cmax of imagination.At this, suppose at adsorbent 1C and do not change the VOC in the process object gas that adsorbent 1C in the zone of effect can all adsorb contact.This point means the VOC adsorbance that the time integral with the gas flow of time per unit and VOC concentration multiplies each other and can calculate adsorbent 1C.Amount and the power consumption of supposing decomposable VOC are proportional.Have, in fact the absorption of VOC also depends on other condition such as VOC adsorbance again.The speed of decomposing VOC also depends on the VOC adsorbance.
In Figure 45 (a), VOC concentration is maximum about 100% of initial imagination, but supposition is 50% situation from change midway.The VOC treating apparatus is zero constantly to start working from the time, supposes that when the work beginning adsorbent does not adsorb VOC in whole air processing unit 1.The amount of adsorbent VOC, according to the prerequisite that has explained the front, become with the gas flow of time per unit with finish the amount that the time integral of back from the VOC concentration of the process object gas in moment of contacting with process object gas multiplies each other and obtain in desorb.Therefore, discharge power controlling organization 13 locates to calculate the VOC adsorbance in working order the zero hour of B in each group of air processing unit 1.Moreover discharge power controlling organization 13 is according to the continuation time of VOC adsorbance decision duty B, and the connection of control voltage switch element 3A is turn-offed, so that the continuation time of duty B is the determined time.After B finishes in working order, become duty E.
The time of getting duty B or duty E is controlled to official hour T (in Figure 45, being 10 minutes).If the number of the group of air processing unit 1 is decided to be N; Then under the VOC concentration situation that to be 100% process object gas continue with the time of T * (N-1); Official hour T is the time of the VOC of absorption 100%, and this time must be more than or equal to the time that in the resolution process of VOC, needs.
In group 1,,,, become duty E so do not get duty B because the VOC adsorbance is zero at time 0 place.If VOC absorption quantitative change is many, can know that then the time of getting duty B is elongated.In addition, after the VOC adsorbance becomes zero, can know and get duty E rather than duty B.
In present embodiment 23, also available little power supply capacity is handled VOC efficiently, can reduce the generation of NOx, and then can the amount of power consumption that need in the decomposition of VOC be reduced to necessary Min..Have again,, also can make the necessary minimal time of the time ratio of getting duty B longer a little etc. in order reliably VOC to be carried out resolution process.Even under these circumstances,, also has the effect that can reduce amount of power consumption through not discharge ineffectually after being through with in the VOC resolution process.
In present embodiment 23; Make and apply voltage and discharge current and then be that power consumption is constant; The time of discharge is changed; But the time that also can make discharge is constant, according to the amount of the VOC of control high-voltage generating device 2 absorption, changes a certain side that applies voltage or discharge current and two sides and then is the power consumption of discharging.And then, also can be changed the time of discharge with a certain side who applies voltage or discharge current and two sides.As long as can reduce VOC being carried out the amount of power consumption that usefulness is handled in desorb, can be any method.Have again, reliably VOC is being carried out in the scope of resolution process, hope to make amount of power consumption to approach necessary Min. as far as possible.
In present embodiment 23, suppose that speed and the VOC concentration of adsorbent 1C absorption VOC is proportional, speed and the power consumption of adsorbent 1C desorb VOC are proportional, but have also availablely considered that the more method of strictness of other key element calculates.Use with the corresponding to appropriate calculating formula of purpose and get final product.
The time of getting duty B or duty E is decided to be setting, but also can is variable.As the example that is decided to be variable situation, the VOC adsorbance of air processing unit 1 that can consider secondly to become the group of duty B is decided to be more than or equal to situation till the setting (for example, 75%) etc.Be decided to be under the variable situation, under the situation that the high situation of VOC concentration continues, also do not getting duty E after the B in working order, but making the air processing unit 1 of next group be duty B.
Be decided to be through the time that will get duty B or duty E variable, even owing under the low situation of VOC concentration, also can after adsorbent adsorbs VOC fully, carry out resolution process, so can carry out resolution process to VOC efficiently.But, adsorb fully on the basis of VOC in wait, even the state that VOC concentration uprises sharp and this concentration is high continues, effect is not changeed in the Considering Adsorption agent yet.More particularly; Even VOC concentration rises to 100% sharp, has continued 100% after this; Before duty B in the air processing unit 1 of next one group finishes; Also the time started of the duty B in the air processing unit 1 of the next group of control,, the air processing unit 1 of group after this imitates in order to avoid changeing.
Also can make to apply voltage, discharge current, discharge continuation time for fixing among the duty B, the time that only makes duty E is variable.
Also can not get duty E after the B in working order and get duty A.In this case, phase 0 and 1 group that whole groups is got duty A get duty B or duty E mutually in, the number of group of getting duty A is different.If get the number difference of the group of duty A, if the flow of process object gas is identical, the gas flow of then per 1 air processing unit 1 changes.Under the situation that gas flow changes, VOC concentration is carried out integration to gas flow calculate the VOC adsorbance.Have again, change, also can be controlled to the total amount that makes gas flow and change, in order to avoid the gas flow of each air processing unit 1 changes even get the number of the group of duty A.
Be the basis at present embodiment 23 with embodiment 1, but can other embodiment be the basis also.
Above situation also is applicable to other the embodiment that uses the VOC concentration sensor.
Claims (22)
1. volatile organic compound treatment apparatus is characterized in that possessing:
Contact adsorbent with process object gas with the adsorb volatile organic compound;
The electrode pair of the generation discharge of disposing with the mode that accompanies this adsorbent betwixt; And
The flow guiding mechanism, the flow the when flow-rate ratio that flows to the process object gas of said adsorbent when discharge takes place is not discharged is few.
2. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that:
Have a plurality of said electrode pairs, said a plurality of electrode pairs discharge with the mode that contacts with the part of said adsorbent, and have through said electrode pair being applied the discharge controlling organization that voltage is controlled at generation discharge in which said electrode pair, wherein
Said electrode pair is divided into a plurality of groups, and said discharge controlling organization applies voltage to each group of said electrode pair, so that the different piece of said adsorbent sequentially contacts with discharge.
3. volatile organic compound treatment apparatus as claimed in claim 2 is characterized in that:
Has said electrode by a plurality of said electrode pair dual-purposes.
4. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that:
Said electrode pair discharges with the mode that contacts with the part of said adsorbent, and has:
The discharge controlling organization makes the said electrode of at least one side or some at least the moving in the said adsorbent, and said electrode pair is applied voltage, so that the different piece of said adsorbent sequentially contacts with discharge.
5. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that possessing:
A plurality of air processing units have said adsorbent and said electrode pair are contained in sealable compartment wherein and are divided into a plurality of groups; And
The discharge controlling organization applies voltage to said electrode pair, so that in the group of this air processing unit, sequentially discharge.
6. volatile organic compound treatment apparatus as claimed in claim 5 is characterized in that:
In said compartment, have the part with the said electrodes surrounding that is grounded, the reinforcement of said air processing unit is structurally strengthened in configuration in this part.
7. volatile organic compound treatment apparatus as claimed in claim 6 is characterized in that:
The said reinforcement of configuration on the direction parallel with said process object gas flow.
8. volatile organic compound treatment apparatus as claimed in claim 5 is characterized in that:
To in said electrode pair, make the structure that to pass through process object gas by the earth electrode of a side of ground connection; Possess a plurality of dielectric high-field electrodes that apply a side of voltage that disposed in the outside; Said earth electrode is configured to surround said high-field electrode, on the direction of intersecting with said earth electrode, flows through process object gas.
9. volatile organic compound treatment apparatus as claimed in claim 8 is characterized in that:
In whole group of the said high-field electrode of adjacency and said earth electrode, said high-field electrode is decided to be identical setting with minimum range between the said earth electrode.
10. like any described volatile organic compound treatment apparatus in the claim 2,4,5, it is characterized in that possessing:
Detect the VOC concentration sensor of the concentration of the VOC in the process object gas, and
From obtain the amount of the VOC of said adsorbent absorption with the concentration of the detected VOC of this VOC concentration sensor; After the amount of the VOC of this absorption is more than or equal to setting; Said discharge controlling organization applies voltage to said electrode pair, discharges.
11., it is characterized in that possessing like any described volatile organic compound treatment apparatus in the claim 2,4,5:
Detect the VOC concentration sensor of the concentration of the VOC in the process object gas, and
From obtain the amount of the VOC of said adsorbent absorption with the concentration of the detected VOC of this VOC concentration sensor; Said discharge controlling organization makes to apply voltage, discharge current, the some at least variations in the discharge continuation time according to the amount of the VOC of the said adsorbent absorption of the zero hour of discharging.
12. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that, possesses:
The gas gigback makes the gas court direction opposite with the process object gas flow flow through said adsorbent when discharge takes place and in specified time limit thereafter.
13. volatile organic compound treatment apparatus as claimed in claim 5 is characterized in that:
Possess the gas gigback, make the gas court direction of being handled by other said air processing unit opposite of handling flow through said compartment airtight when discharging generation in during the regulation after discharge takes place with the process object gas flow.
14. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that:
Possess gas supply mechanism, the said adsorbent supply oxygen that this mechanism pair contact with discharge is than the gas of Duoing in the atmosphere or contain oxygen and nitrogen a certain than in the gas that lacks in the atmosphere.
15. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that:
Said adsorbent is the hole of the diameter that forms the regulation that process object gas flows through of the porosity with regulation and the dielectric that constitutes applies alternating voltage to said electrode pair.
16. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that:
Said adsorbent has the gas passage through process object gas, and the wall of this gas passage is made dielectric, disposes said electrode pair with the mode that discharge takes place on the direction of intersecting at the wall with the gas passage, and said electrode pair is applied alternating voltage.
17. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that:
Between said electrode pair, dispose dielectric, said electrode pair is applied alternating voltage.
18. volatile organic compound treatment apparatus as claimed in claim 17 is characterized in that:
Said dielectric is a solid, and the power supply layer that combines said dielectric and said electrode with the mode of heat and the mode of electricity is set between said dielectric and said electrode.
19. volatile organic compound treatment apparatus as claimed in claim 17 is characterized in that:
The electrode cooling body that possesses the said electrode of cooling and said dielectric adjacency.
20. volatile organic compound treatment apparatus as claimed in claim 1 is characterized in that:
At least one side's among said electrode pair said electrode has the airtight space of portion within it, possesses the cold-producing medium enclosed in the space that has in said electrode and captures the electrode cooling body of the heat sink of heat from the steam of this cold-producing medium.
21. volatile organic compound treatment apparatus as claimed in claim 20 is characterized in that:
Said electrode to the said heat sink cooling of said heat sink and this insulate.
22. volatile organic compound treatment apparatus as claimed in claim 20 is characterized in that:
Utilization has been adsorbed the said heat sink of the processing gas cooled behind the VOC by said adsorbent.
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004191949 | 2004-06-29 | ||
| JP2004-191949 | 2004-06-29 | ||
| JP2004191949 | 2004-06-29 | ||
| JP2004344084 | 2004-11-29 | ||
| JP2004-344084 | 2004-11-29 | ||
| JP2004344084 | 2004-11-29 | ||
| JP2005084189A JP4466422B2 (en) | 2004-06-29 | 2005-03-23 | Volatile organic compound processing equipment |
| JP2005084189 | 2005-03-23 | ||
| JP2005-084189 | 2005-03-23 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101399771A Division CN100531866C (en) | 2004-06-29 | 2005-06-29 | Volatile organic compound treatment apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1724117A CN1724117A (en) | 2006-01-25 |
| CN1724117B true CN1724117B (en) | 2012-10-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2005100811820A Expired - Fee Related CN1724117B (en) | 2004-06-29 | 2005-06-29 | Volatile organic compound treatment apparatus |
| CNB2007101399771A Expired - Fee Related CN100531866C (en) | 2004-06-29 | 2005-06-29 | Volatile organic compound treatment apparatus |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2007101399771A Expired - Fee Related CN100531866C (en) | 2004-06-29 | 2005-06-29 | Volatile organic compound treatment apparatus |
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| CN (2) | CN1724117B (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101230513B1 (en) * | 2010-12-27 | 2013-02-06 | (주)엘오티베큠 | Treatment apparatus for discharging fluid |
| CN104785097B (en) * | 2015-01-28 | 2016-09-28 | 上海理工大学 | VOC eliminates detection device and detection method thereof |
| CN106512676B (en) * | 2016-12-02 | 2019-11-15 | 重庆耕爵科技有限公司 | The Modular electrical field assembly of VOC processing unit |
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| CN1277888A (en) * | 2000-06-02 | 2000-12-27 | 黄立维 | Method for purifying organic waste gas |
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- 2005-06-29 CN CNB2007101399771A patent/CN100531866C/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN100531866C (en) | 2009-08-26 |
| CN101108298A (en) | 2008-01-23 |
| CN1724117A (en) | 2006-01-25 |
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