CN1722400A - Method and apparatus for measuring the size of free air balls on a wire bonder - Google Patents
Method and apparatus for measuring the size of free air balls on a wire bonder Download PDFInfo
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- CN1722400A CN1722400A CNA2005100786867A CN200510078686A CN1722400A CN 1722400 A CN1722400 A CN 1722400A CN A2005100786867 A CNA2005100786867 A CN A2005100786867A CN 200510078686 A CN200510078686 A CN 200510078686A CN 1722400 A CN1722400 A CN 1722400A
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/85009—Pre-treatment of the connector or the bonding area
- H01L2224/8503—Reshaping, e.g. forming the ball or the wedge of the wire connector
- H01L2224/85035—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball"
- H01L2224/85045—Reshaping, e.g. forming the ball or the wedge of the wire connector by heating means, e.g. "free-air-ball" using a corona discharge, e.g. electronic flame off [EFO]
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/859—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector involving monitoring, e.g. feedback loop
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Abstract
A system for measuring the size of free air balls for use with a wire bonder having a wire bonding tool and an Electric Flame Off (EFO) device is provided. The system includes an imager disposed above a first image plane, a prism disposed below the imager, and at least one lens positioned between the first image plane and the prism in a first optical path. The at least one lens is positioned between the prism and the imager in a second optical path, where the second optical path is different from the first optical path. An image of the free air ball disposed at a lower portion of the wire bonding tool is provided to the imager via the prism and the at least one lens.
Description
The application requires the U.S. Provisional Patent Application No.60/581 of submission on June 21st, 2004, and 575 priority is incorporated into the application by reference paper with its content.The application is the U.S. Patent application No.10/458 that submitted on June 10th, 2003, the continuity of 535 part, U.S. Patent application No.10/458,535 be submitted on April 25th, 2002 and on May 4th, 2004 as patent 6,729, the 530 U.S. Patent application No.10/131 that announce, 873 divide an application, patent 6,729,530th, submit to July 24 calendar year 2001 and on July 2nd, 2002 as patent 6,412, the 683 U.S. Patent application No.09/912 that announce, the continuity of 024 part.
Technical field
The present invention relates generally to be used for the method and apparatus of the size of the free air balls on the measuring lead wire connector.More specifically, the present invention relates to use prism (for example corner prism) to produce the image on the capillary tool top (capillary tip) of the free air balls that has existence.Use the present invention in conjunction with Vision Builder for Automated Inspection, with analysis image before welding and measure the diameter of described ball.
Background technology
Typically, the manufacturing of electronic building brick (for example integrated circuit (IC) chip) relates in the inspection to device of the different phase of manufacture process.This checking process usually utilizes vision system or image processing system (for example, catch image, with image digitazation and the system that uses a computer carries out image to analyze) to instruct to make that machine is correct to be placed or aligning parts.
In making the process of these electronic building bricks, typically, terminal conjunction method is used to interconnect and has an integrated circuit (IC) chip of lead frame.Other interconnection well known is handled and is comprised, for example, (ball-bumping) handled in ball bonding and (stud-bumping) handled in the binding post ball bonding.As the part of these joining process, when using electronic flame well known to extinguish the end of (EFO) technology bonding wire, form engage ball.The size (diameter) of engage ball (free air balls) depends on electric current and the duration of EFO.Because wire bonder is used to encapsulate the device of ultra dense spacing, so, need to measure and to control the diameter of ball in order to be the size of the application adjustment ball of ultra dense spacing.
Traditional vision system (shown in Figure 11) comprises two image devices: first image device 1104, and it is placed under the working face 1112 and up observes object; And second image device 1102, it is placed on the working face 1112 and down observes object.The shortcoming of these legacy systems is, except needs more than the image device, they can not be easy to the variation in the bucking-out system, for example, the variation that causes owing to the change of heat.
In addition, in traditional system, typically, the diameter of engage ball is by off-line measurement.That is to say, interrupt joining process so that can measure the diameter of ball or synthetic post ball (resultant stud) (in the situation that the binding post ball bonding is handled).Then, change the size of the engage ball of EFO system, carry out off-line measurement again, so that proofread and correct the size of engage ball.Therefore, measure and adjust the size of engage ball, and the size of engage ball is enrolled wire bonder via the off-line calibration operation.
Yet the defective that these legacy systems have is that if do not carry out off-line measurement again, they just can't determine the effect of these settings.Therefore, be open loop to the determining dimensions and the control of ball, and need to interrupt joining process, thereby can the output of device be had a negative impact.
Therefore, need provide a kind of system and method, be used to make wire bonder can periodically measure the diameter of ball, go to produce continuously to have the ball of desired size, handle and carry out off-line measurement and adjustment and need not to interrupt ball bond so that can control the EFO system.
Summary of the invention
According to an exemplary embodiments of the present invention, a kind of system that is used to measure the size of free air balls is provided, described system together uses with the wire bonder that has wire bonding tool and electronic flame extinguishes (EFO) device.Described system comprises: place imager on first plane of delineation, place under the imager prism and at described first plane of delineation of first light path and at least one lens between the described prism.Between the described prism and described imager of described at least one lens in second light path, described second light path is different from described first light path.Via prism and described at least one lens, the image that places the free air balls under the wire bonding tool is offered described imager.
According to another exemplary embodiments of the present invention, a kind of method that is used to measure the size of free air balls is provided, described method is together used with the wire bonder that has wire bonding tool and electronic flame extinguishes (EFO) device.Described method comprises: via prism, receive the indirect image of free air balls, handle the image of the free air balls that is received, to measure at least one size of free air balls, and, provide control signal to the EFO device based at least one size of described free air balls.
According to another exemplary embodiments of the present invention, a kind of method that is used to analyze the image of free air balls is provided, described method with have the wire bonder that electronic flame extinguishes (EFO) device and together use.Described method bag: during wire-bonded is handled, provide the image of free air balls to image processor, the characteristic of determining free air balls whether in predetermined tolerance, and based on determining step, at least one setting of control EFO system.
With reference to accompanying drawing with to the description of exemplary embodiments of the present invention, these aspects of the present invention and others have been elucidated later herein below.
Description of drawings
After reading in conjunction with the accompanying drawings, can well understand the present invention by ensuing detailed description.Be stressed that according to convention, the various features of accompanying drawing are out-of-proportion.On the contrary, for cheer and bright, the size of various features can at random be expanded or be reduced.Accompanying drawing comprises following diagram:
Fig. 1 is the perspective view of exemplary embodiments of the present invention;
Fig. 2 A is the end view of the image light trace of first exemplary embodiments according to the present invention;
Fig. 2 B is the end view of the image light trace of second exemplary embodiments according to the present invention;
Fig. 3 is the perspective view of the image light trace of the exemplary embodiments according to the present invention;
Fig. 4 A and Fig. 4 B are respectively the perspective view and the end views of exemplary embodiments of the present invention;
Fig. 5 has illustrated the focusing of the exemplary embodiments of the present invention heart far away;
Fig. 6 is the detailed view according to typical retroeflection corner prism offset tool of the present invention;
Fig. 7 A to 7C has illustrated the effect about the inclination on the top of the corner prism instrument of typical vision system;
Fig. 8 A to 8C has illustrated the effect about the inclination of the X-axis of typical vision system and Y-axis;
Fig. 9 is the end view of the image light trace of the 3rd exemplary embodiments according to the present invention;
Figure 10 A to 10D is the various views of the present invention's the 4th exemplary embodiments;
Figure 11 is the vision system according to prior art;
Figure 12 A to 12F is the view of the present invention's the 5th exemplary embodiments;
Figure 13 A to 13D is the various views of the present invention's the 6th exemplary embodiments;
Figure 14 has illustrated that the wire bonder optical system of using the exemplary embodiments according to the present invention measures the end view of the equipment of free air balls; And
Figure 15 is to use the wire bonder optical system to measure and adjust the schematic block diagram of the exemplary apparatus of free air balls.
Embodiment
Form by reference paper, will on June 6th, 2003 submit ground U.S. Patent application No.10/458 to, 535 complete open, and the U.S. Patent application No.09/912 that submits to July 24 calendar year 2001,024 complete disclosing clearly is included in this, as all being illustrated.
According to certain typical embodiment, the present invention relates to a kind of method and apparatus, be used for measuring the size of the free air balls on the optical system together with the technology that imaging is carried out on the capillary tool top based on the optics corner prism.
The certain typical embodiment according to the present invention, the present invention use the optical system of wire bonder and based on the offset tool of corner prism, be opposite near the wire bonder capillary tool or place the free air balls among the capillary tool to carry out imaging.Analyze described image then, to measure the size of ball.In order to improve the accuracy that ball is measured, utilized the illuminator that is suitable for producing desired image (image that for example, has high amplification coefficient).Can (for example comprise based on many factors, the size of free air balls and other are handled constraints) select optical system, produce desired images (for example: the image of low amplification coefficient, the image of high amplification coefficient or any appropriate resolution or the like).The diameter of ball is measured by described system during the normal operations of wire bonder.Form mechanism via the EFO ball that can on wire bonder, find usually, described information is used to control the size of ball.The purpose of described system is to measure the diameter of free air balls, so that adjust the size of ball for ultra dense pitch applications.Then, wire bonder uses these values to determine and adjust the setting of EFO system.
According to another typical aspect of the present invention, be closed-loop process to the determining dimensions and the control of ball.Wire bonder is periodically measured the diameter of ball, and this information is offered wire bonder, so that the EFO system can produce the size of the ball of expectation continuously.This makes during bonding operation, can control the size of free air balls, thereby, in wire-bonded operating period, can proofread and correct any interference, described interference will cause that free air balls exceeds its desired diameter tolerance.
At present, there be not equipment or the method that is used to measure free air balls in wire bonder.Heat according to the present invention is decided exemplary embodiments, the present invention allows to control in the mode of closed loop the size of free air balls, and thereby can proofread and correct any interference in wire-bonded operating period, described interference will cause that free air balls exceeds its desired diameter tolerance.
The present invention allows wire bonder periodically to measure the diameter of ball, and this information is offered wire bonder, so that the ball that the EFO system can continuously production desired size.Can use Vision Builder for Automated Inspection to come analysis image and measure the diameter of ball.The present invention uses this information, forms the size that mechanical device is controlled ball by the EFO ball that can find in wire bonder usually.
With reference to Fig. 1, show the perspective view of exemplary embodiments of the present invention.Described system is included in the wire-bonded machine 100, and used corner prism 106 (promptly, corner prism 106), corner prism 106 has a plurality of internal reflection surfaces (well being illustrated) in Fig. 6, described reflecting surface is positioned at the objective plane 112A (the objective plane 112A shown in Fig. 2 A is the part on plane 112 illustrated in fig. 1) of joining tool 104, or is positioned at it down.
In an exemplary embodiments, corner prism offset alignment instrument 109 (comprising corner prism 106 and lens element 108,110) has three internal reflection surfaces altogether: 218,220 and 221 (well illustrated in Fig. 6, and be described below).In another exemplary embodiments, corner prism 106 can have a plurality of internal reflection surfaces altogether.For example, corner prism 106 can by vitreous silica, corundum, diamond, fluorite and other optical glass forms or can comprise these materials.Note, the glass of optical property, for example by Duryea, the BK7 that the Schott Glass Technologies of PA makes also can be used.Be also noted that, can select the material of corner prism 106 for maximum propagation at the operative wavelength of expecting.
In an exemplary embodiments, the focus of vision system (is to overlap with the imaginary plane 211 shown in Fig. 2 A) is positioned on the lower surface 223 (shown in Fig. 2 A) of corner prism 106.In addition, described exemplary embodiments comprises two preferred identical lens elements 108,110, and they are positioned at objective plane 112A and plane of delineation 112B, perhaps be positioned at they below.Another exemplary embodiments shown in Fig. 2 B comprises independent lens element 205, and it is positioned under the plane 112, and with optical axis 114,116 (shown in Figure 1) on a line.Hereinafter, the combination of corner prism 106 (that is, corner prism) and lens element 108,110 (perhaps lens element 205) will be called as assembly 109, corner prism offset tool 109 and/or corner prism offset alignment instrument 109.
The plane of delineation that comprises the corner prism offset tool 109 of lens element 108,110 overlaps with the objective plane 112B of optical imagery unit 102.In other words, the plane of delineation of corner prism 106 and lens element 108,110 are aimed at the joining tool 104 that is positioned at objective plane 112A equally.In an exemplary embodiments, lens element 108,110 (perhaps 205) preferably has single amplification coefficient.In first optic axis 114 of first lens element 108 between joining tool 104 and corner prism 106.Second lens element 110 is in the same plane with first lens element 108 basically, and (see figure 1) in second optical axis 116 between photoimaging unit 102 and corner prism 106.In an exemplary embodiments, first and second optical axises 114 and 116 are parallel to each other basically, and are flat and consider that based on the special design that engages machine 100 they are spaced from each other.In an exemplary embodiments, depend on the design consideration that engages machine, the distance 118 between the primary optic axis 114 and second optical axis 116 approximately is 0.400in. (10.160mm.), although distance 118 can be imitated to about 0.100in. (2.54mm)
Fig. 2 A is the detailed side view of image light trace, and the general image-forming principle of exemplary embodiments of the present invention has been described.In Fig. 2 A, for the sake of clarity, typical light trace 210,214 is separated, so that the relevant anti-interference of the composograph that causes owing to change in location is described.Also imaging point is separated with same distance, since lens element the 108, the 110th, single amplification relaying.Fig. 2 A has also illustrated the change in location that how to compensate joining tool 104.For example, in case traditional method is used to correctly measure the distance between image-generating unit 102 and the joining tool 104 (shown in Figure 1), the present invention can compensate the variation of joining tool 104 deviation posts 222 that caused by the variation in the system.The position of joining tool 104 can correctly be measured, because corner prism offset tool 109 is imaged onto joining tool 104 on the plane of delineation 112B of optical system (not shown in this Figure).
The light that the reference position of joining tool 104 is used as reflection illustrates, described reflection ray is propagated along primary optic axis 114 (shown in Figure 1) from primary importance 202 beginnings, begins to pass first lens element 108 as through image light beam 210 from primary importance 202.Through image light beam 210 continues to propagate along primary optic axis 114, passes the top surface 226 of corner prism 106 then, shines on first internal reflection surface 218.Then, through image light beam 210 is reflected on second internal reflection surface 220, and second internal reflection surface is then with described beam reflection to the three internal reflection surfaces 221 (illustrating well in Fig. 3).Next, through image light beam 210 is back propagated along second optical axis 116 (shown in Figure 1) as reflected image light beam 212, passes the top surface 226 of corner prism 106, and passes second lens element 110, reaches imaging plane 112B.Reflected image light beam 212 is detected by image-generating unit 102, forms image 204.
Consider now, because for example variation of system temperature, and cause the position of joining tool 104 to be moved distance 222.Shown in Fig. 2 A, the image that is moved of joining tool 104 is used as position 206 and illustrates, and by the path imaging along second place light trace 214.Shown in Fig. 2 A, through image light beam 214 begins along the path similar to through image light beam 210 from primary importance 202 to propagate.The second place 206 images are propagated as through image light beam 214, pass first lens element 108.Then, through image light beam 214 passes the top surface 226 of corner prism 106, shines on first internal reflection surface 218.Then, through image light beam 214 is reflected on second internal reflection surface 220, and second internal reflection surface is then with described beam reflection to the three internal reflection surfaces 221 (illustrating well in Fig. 3).Next, through image light beam 214 is propagated as reflected image light beam 216, passes the top surface 226 of corner prism 106, and passes second lens element 110, arrives plane of delineation 112B.In the second place 208, reflected image light beam 216 is considered as reflected image by image-generating unit 102.Although above-mentioned example is based on along the variation of the position of X-axis and is described, also be same being suitable for for variation along Y-axis.
As illustrated, the original displacement of joining tool 104 shown in deviation post 222, has been in difference 224 proofs in the measuring position of joining tool 104, measures difference 224 in the second place 208 with respect to reference position 204.By the proof of above explanation, when observing by image-generating unit 102, the offset of assembly 109 can not influence reflected image.In other words, assembly 109 of the present invention can be along one of X-axis and Y-axis or is shifted along two axles simultaneously, to such an extent as to the image of joining tool 104 and image-generating unit 102 relative static appearance.Yet, because the distortion in the lens combination, will cause existing in the measuring position of joining tool 104 some minimal errors (below go through).
Referring again to Fig. 2 A, the top 228 (shown in broken lines) of corner prism offset alignment instrument 109 almost is being centre position between the primary optic axis 114 and second optical axis 116.For the ease of the placement of corner prism 106, the part than low side of corner prism 106 can be removed, thereby lower surface 223 is provided, and this surface can be parallel fully with top surface 226.Than the reflection that can not influence image light of removing of lower portion 235, owing to can not shine on the lower surface 223 from the image light of objective plane 112A emission.
The present invention can use with light, for example, the light in visible, UV and IR frequency spectrum, and preferred scheme is, uses with the light with certain wavelength, and this wavelength is showed the whole interior reflection based on the manufactured materials of corner prism 106.The material that is selected to make corner prism offset alignment instrument 109 based on expectation will be by the light wavelength of described instrument.Consider can make corner prism offset alignment instrument 109 deal with predetermined, at UV (1nm) near the light wavelength scope between the IR (3000nm).In a preferred embodiment, the light wavelength scope can be between (i) about 1 and the 400nm, (ii) about 630 and 690nm between, and (iii) about 750 and 3000nm between among select.Can be by the light of environment with by using artificial light sources that the illumination (not shown) is provided.In an exemplary embodiments, the typical optical glass with 1.5 to 1.7 refractive indexes can be used to make corner prism 106.Notice that refractive index is based on material, described material is in the maximum transmitted of desired operative wavelength and selected.In one embodiment, corner prism offset alignment instrument 109 has about 1.517 refractive index.
Fig. 3 is the perspective view of the image light trace of the exemplary embodiments according to the present invention, and described image light trace is transferred with the direction perpendicular to the separation of lens element 108,110.Identical image attributes shown in Fig. 2 A also is tangible in Fig. 3.For example, represent the reference position of joining tool 104 by primary importance 302, and its image 304 is regarded as the first through image light beam 310, it passes first lens element 108, propagates along primary optic axis 114; Pass the top surface 226 of corner prism 106; Shine first reflecting surface 218 of corner prism 106; Pass corner prism 106, in the path that is parallel to top surface 226, propagate; Shine second reflecting surface 220; Passing before top surface 226 leaves corner prism 106, shine the 3rd reflecting surface 221; And pass second lens element 110, propagate, shine on the plane of delineation 112B, and 304 observed by image-generating unit 102 in the position as light trace 312 along second optical axis 116.The offset of joining tool 104 also is illustrated in Fig. 3, and by light trace 314 and 316 explanations from the second place 306 to second observation places 308.
Fig. 4 A to 4B is respectively the perspective view and the end view of an exemplary embodiments of the present invention, and lens element 108,110 and corner prism 106 have been described.Two lens elements the 108, the 110th, preferred doublet, based on they from objective plane 112A and imaging plane 112B, and the focal length on imaginary plane 211 is positioned on the corner prism 106.Doublet is preferred based on their high optics characteristic quilt.Illustrated as Fig. 4 A to 4B, the exemplary embodiments of corner prism 106 has three internal reflection surfaces 218,220 and 221.Shown in Fig. 4 B, the external margin of lens element 108,110 and corner prism 106 is to overlap.
Fig. 5 has illustrated the focusing heart far away of the exemplary embodiments of picture system of the present invention.As shown in Figure 5, lens element 108,110 produces single amplification, and is placed with respect to corner prism 106, so that the focusing of Vision Builder for Automated Inspection gains in depth of comprehension far away are to keep.Notice that the front focus length 502 on 106 top 228 equals the back focus length from lens element 110 to plane of delineation 112B from lens element 108 to corner prism.
Fig. 6 is the detailed view of typical corner prism 106 of the present invention.Notice that internal reflection plane 218 and crown line 225 allow the image of joining tool 104 to be converted in the direction of X-axis and Y-axis.Be also noted that the surface of corner prism 106 is ground preferably, so that folded light beam is parallel with incident beam in 5 seconds radian.
As shown in Figure 6, surface 220 and 221 is mutually orthogonal along crown line 225.In addition, the angle between crown line 225 and the surface 218 approximately is 90 degree.In addition, surface 218 and crown line form the angle of 45 degree with respect to top surface 226 and lower surface 223.Be also noted that the leg-of-mutton lower surface 223 of formation is intersected on surface 218,220 and 221, this surface can be used to make the placement of corner prism 106 to become convenient.
Fig. 7 A to 7C has illustrated the influence about the inclination of the normal axis of the corner prism offset alignment instrument 109 in a typical vision system.Fig. 7 A is the vertical view of lens element 108,110 and corner prism 106.Typical image origin 702,703,704,706,707 and 708 positions corresponding to image light trace 210,214 (shown in Fig. 2 A).Notice that if corner prism 106 does not tilt along the Z axle, optical axis position 710 is corresponding to the residing position of image of joining tool 104 (shown in Figure 1) so.
Fig. 7 B to 7C is the diagram around the gap tilt effect of Z axle, they be according to tilt with error to expression recently, its medium dip represents that in order to the radian that is divided into unit the unit of error is a micron.Fig. 7 B shows with respect to the effect around the inclination of Z axle of sum of errors along the picture position of Y-axis.Fig. 7 C shows with respect to the effect around the inclination of Z axle of sum of errors along the picture position of X-axis.
Fig. 8 A to 8C has illustrated the effect of the inclination of the X-axis of relevant typical vision system and Y-axis.Fig. 8 A is the additional side view of typical image light trace 210,212,214,216.In Fig. 8 A, arrow 804 and round dot 802 are used to describe X-axis and Y-axis respectively, and arrow 806 is described.
Fig. 8 B to 8C is the curve chart around the gap tilt effect of X-axis and Y-axis, they be according to tilt with error to expression recently, its medium dip represents that in order to the radian that is divided into unit the unit of error is a micron.Fig. 8 B shows with respect to sum of errors along the picture position of Y-axis, around the effect of the inclination of X-axis.Fig. 8 C shows with respect to the effect around the inclination of Y-axis of sum of errors along the picture position of X-axis.
Fig. 9 is the detailed side view of the image light trace of the 3rd exemplary embodiments according to the present invention.In Fig. 9, the reference position of joining tool 104 is used as reflection ray and illustrates, described reflection ray is from primary importance 914 (on the objective plane 112A as the part on the plane 112 that has been illustrated), propagate along first optic axis 114 (shown in Figure 1), from primary importance 914, pass lens element 902 as through image light beam 922.Notice that in this exemplary embodiments, lens element 902 has the upper surface 904 and the crooked lower surface 906 of relatively flat.Through image light beam 922 continues to propagate along primary optic axis 114, passes the upper surface 904 of lens element 902 then, and then passes curved surface 906.Then, through image light beam 922 is reflected on the total reflection surface 908.In a preferred embodiment, total reflection surface 908 is minute surfaces.Next, through image light beam 922 passes lens element 902, as reflected image light beam 920, back propagates along second optical axis 116 (shown in Figure 1), and shines on the plane of delineation 112B.The reflected image light beam is detected by image-generating unit 102, and forms image 912.Similarly, moving of the position of joining tool 104 also is illustrated in Fig. 9, and illustrated by the path from the through image light beam 918 of the second place 910 to second observed positions 916.
Figure 14 has illustrated equipment 1400, and this equipment is used to measure free air balls 1415, and this equipment together uses with the wire bonder (not shown at this figure) of the exemplary embodiments according to the present invention.As shown in figure 14, equipment 1400 comprises optical image former 1402, and for example above-mentioned imager about other exemplary embodiments also comprises lens 108,110, corner prism offset tool 106 and luminaire 1220, for example ring lighting.
As shown in figure 14, lens 108 are between objective plane 1412 and offset tool 106, and lens 110 are between imager 1402 and offset tool 106.In a non-limiting exemplary embodiments, lens 110 and lens 108 are at same horizontal plane.Can expect that equipment 1400 not only comprises low magnification ratio but also comprises high power.
In use, free air balls 1415 is by EFO system (not shown) forming than lower part at capillary tool 1404.Because via lens 108, corner prism offset tool 106 and lens 110, form image at the plane of delineation 1410, imager 1402 can be observed free air balls 1415 (from objective plane 1412).
By optical image former 1402 image of free air balls 1415 is offered image processing system (not shown in this Figure),, determine the size of free air balls 1415, for example diameter at described image processing system.Determine based on this, can adjust the parameter of EFO system, when being necessary, can go to control the diameter of following free air balls so that guarantee correct joint in the mode of closed loop feedback.Therefore, the closed-loop system of the present invention control can be corrected unusually, otherwise the described free air balls 1415 that will cause unusually exceeds its expectation parameter tolerances, perhaps causes in wire-bonded operating period to have very little diameter.
Figure 15 has illustrated the typical schematic block diagram of closed-loop system 1500.As shown in figure 15, receive the image 1501 of free air balls 1405 by picture system 1400.By picture system 1400 image is offered processor 1502, determine the diameter of free air balls 1415 at processor 1502.Determine that based on this signal 1503 is provided for EFO system 1504,,, thereby influence the diameter of follow-up free air balls 1415 so that adjust the output 1506 of EFO system 1504 to adjust the parameter of EFO system 1504.
With reference to Figure 10 A, the end view of another exemplary embodiments of the present invention has been described.In Figure 10 A, vision system 1000 comprises a plurality of corner prisms 1014,1020,1026, and set of lenses separately 1016/1018,1022/1024,1028/1030, this vision system is used as alignment device, so that improve the correctness that the punch die (die) of assembly adheres to and picks up/place, for example punch die 1008,1010,1012.When carrying out, this will be substituted in most of traditional middle-ends paramount rectify really to place look camera (that is, punch die camera, not shown) on can find in (for example, die-attachment and pick up/place) equipment traditional.In exemplary embodiments, a plurality of corner prisms 1014,1020,1026 that have the interlock of different lens separating distance 1017,1023,1029 respectively provide the indirect image of the position of punch die 1008,1010,1012 respectively.Those skilled in the art understand: once only observe a punch die.The use of a plurality of corner prism/combination of lensess allows together to use with the punch die of various different sizes.For other consideration, for example use of material, method for reflection or the like, this exemplary embodiments and first exemplary embodiments are similar.
As above mentioned, this variation of first exemplary embodiments is adapted to the various die size that the equipment of these types is accepted and placed.In this exemplary embodiments, following optometry detector 1002, camera (for example, film camera) for example, the feature to next side of observing assembly to be placed (for example punch die 1008,1010 or 1012).Then, can be via these features of vision system (not shown) identification punch die 1008,1010,1012, so that use pick tool 1004, be based in part on and pick up/preset distance 1006 between place tool 1004 and the fluorescence detector 1002, come correctly punch die to be placed on the base plate (not shown).One skilled in the art will appreciate that pick tool 1004 can be rotation or non-rotating pick tool.This exemplary embodiments has further kept the optical benefits of the accuracy of aiming at about the corner prism of describing in first exemplary embodiments.
Figure 10 B is the vertical view of the exemplary embodiments that illustrates in Figure 10 A.In Figure 10 B, corner prism 1014,1020,1026 placements that adjoined each other is with formation assembly 1015.If traditional adhesive means is used in expectation, corner prism 1014,1020,1026 can be bonded with each other, and perhaps can use mechanical device (for example clip or container assemblies) that they are aimed at mutually.As expectation, allow the new method of the simple shift of single corner prism/lens can allow the punch die of different size.Though the exemplary embodiments that illustrates has three corner prism offset tool, will be appreciated that and minimumly can use two corner prism offset tool.
If desired, lens 1016,1018,1022,1024,1028,1030 can be formed by single optics member rather than independent lens so, so that the assembling of simplified system.This method is shown in Figure 10 C to 10D.Shown in Figure 10 C, lens board (lens sheet) 1040 has been embedded among optical component 1016a, 1018a, 1022a, 1024a, 1028a, the 1030a, and they are being equal to independent prism 1016,1018,1022,1024,1028,1030 basically.
Figure 12 A to 12F has illustrated another embodiment of the present invention.In these exemplary embodiments, corner prism is used to improve the accuracy of optical fiber align.As in a last exemplary embodiments, the use of corner prism makes can use single fluorescence detector to replace traditional multiple detector system.
With reference to Figure 12 A, described exemplary embodiments comprises corner prism 1014, lens 1016,1018, dark field illumination system 1220,1221 (these are known by those skilled in the art), described illuminator is respectively applied for the fiber cladding edge 1210,1211 that illuminates optical fiber nuclear 1212,1213, and (they produce reflection 1224,1225 successively, so that draw covering edge 1210,1211 profile), also comprise fluorescence detector 1002.In this exemplary embodiments, the optical fiber 1208 that faces down is by optometry detector 1002 (for example camera (that is film camera)) observation down.Following optometry detector 1002 is surveyed the emission from the light 1222 of optical fiber nuclear 1212, then, can determine the suitable skew 1027 between the central ray 1229 of fiber optic hub line 1223 and following optometry detector 1002.Shown in Figure 12 A, face down optical fiber 1208 and fluorescence detector 1002 are offset each other according to predetermined distance 1006 as further.Also illustrated face up optical fiber 1209 with related, be placed in abutting connection with near the dark field illumination system 1221 the corner prism 1014.
Figure 12 B is the vertical view of the illustrated exemplary embodiments of Figure 12 A, and Figure 12 B has illustrated the relative position of set of lenses 1016/1018 and corner prism 1014.
Then, in Figure 12 C, the following optometry detector 1002 and the optical fiber 1208 that faces down are reapposed, and therefore, look the central ray 1229 of optic fibre detector 1002 down and aim at the fiber optic hub line 1231 of the optical fiber 1209 that faces up.Again, in order to be discerned by vision system, dark field illumination system 1221 is used to illuminate the optical fiber 1209 that faces up, and aims at the accurate of fluorescence detector 1002 so that guarantee.
Next, and shown in Figure 12 D, the fluorescence detector 1002 and the optical fiber 1208 that faces down are reset again based on skew 1027, and skew 1027 is to be determined during the processing of being discussed about Figure 12 A in the above.Thereby the face down optical fiber 1208 and the optical fiber 1209 that faces up are aimed at mutually.
Then, shown in Figure 12 E, use traditional technology (for example, use the thermal radiation (not shown), perhaps use mechanical means with optical fiber fusion to together), optical fiber 1,208 1226 is connected together in the crosspoint with 1209.
Figure 12 F has illustrated another embodiments of the invention.In this exemplary embodiments, corner prism offset alignment instrument 1014 is used to simple optical fiber (sub-optical fibre) 1202a of fiber optics separator 1200 is aimed at each independent optical fiber 1208 or the like.As in a last exemplary embodiments, use corner prism offset alignment instrument to make and to use single fluorescence detector to replace traditional multiple detector system.Because described causing optical fiber 1208 and sub-optical fibre 1202a, b or the like aims at and paired step and above-mentioned exemplary embodiments similar, so be not repeated in this description them at this.
In case first sub-optical fibre has been aimed at independent optical fiber 1208, just repeat to handle at next sub-optical fibre (for example 1202b) and another independent optical fiber (not shown).
Certainly, exemplary embodiments is not limited to be positioned at the fiber bundle of the fiber optics separator under the fluorescence detector 1002.Embodiment has considered that also the relative position of fiber bundle 1200 and optical fiber 1208 is situations about putting upside down, so that fiber bundle 1200 is placed on the corner prism 1014.
Figure 13 A to 13D has illustrated another embodiment of the present invention.In this exemplary embodiments, use corner prism offset alignment instrument to improve the accuracy that optical fiber 1208 is aimed at circuit element (for example detector 1302).In Figure 13 A, typical detector 1302 is parts of 1300 arrays, although not so restriction of the present invention.Considered that also detector 1302 can be a diode, for example photodiode or optical radiation reflector.As in a last exemplary embodiments, use corner prism offset alignment instrument to make and to use single fluorescence detector to replace traditional multiple detector system.
With reference to Figure 13 A, exemplary embodiments comprises corner prism 1014, lens 1016,1018, dark field illumination system 1220 (this system is well known to those skilled in the art), described illuminator 1220 is used to illuminate the fiber cladding edge 1210 of optical fiber nuclear 1212, and (it produces reflection 1024 successively, profile with the covering edge 1010 that draws), also comprise fluorescence detector 1002.In this exemplary embodiments, the optical fiber 1208 that faces down is by optometry detector 1002 (for example camera (that is film camera)) observation down.The emission that following optometry detector 1002 is surveyed from the light 1222 of fiber optic core 1212 then, can be determined the suitable skew 1027 between the central ray 1229 of optical fiber center line 1223 and following optometry detector 1002.Shown in Figure 13 A, face down optical fiber 1208 and fluorescence detector 1002 are offset mutually according to predetermined distance 1006 as further.
In Figure 13 B, then, the following optometry detector 1002 and the optical fiber 1208 that faces down are reapposed, and aim at the optical centreline 1304 of detector 1302 so that look the central ray 1229 of optic fibre detector 1002 down.Be appreciated that optical centreline 1304 needn't be consistent with the physical centre of detector 1302, but depend on the layout of special detector 1302.In this case, determining and to realize by the residing position, the center of enlivening the sensitizing range of detector optical centreline 1304.
Next, and shown in Figure 13 C, the fluorescence detector 1002 and the optical fiber 1208 that faces down are reset again based on skew 1027, and skew 1027 is (skew 1027 is illustrated in Figure 13 A) that are determined during the processing of being discussed about Figure 13 A in the above.So face down optical fiber 1208 and detector 1302 are aimed at mutually.Then, shown in Figure 13 D, use conventional art (for example optical resin, UV epoxy resin) optical fiber 1208 and detector 1302 to be remained on the position of aligning.
Though (for example: corner prism) illustrate and described the present invention, the present invention is not limited to this to have related generally to the corner prism device.Can use other prism apparatus, particularly other reflecting prism.In a certain configuration of the present invention, need have parallel image light.In this configuration, reflecting prism (for example corner prism) can be provided in the light beam that enters and be parallel to each other when leaving prism; Yet, in a certain configuration, can need nonparallel light beam/image light, and can utilize the prism of other type.
Though related generally to be used to measure the equipment and the method for the size of free air balls, invention has been described, the present invention is not limited to this.Any can to use the character of the free air balls that public technology determines be useful for the size of measuring free air balls, structure and other for disclosed here equipment and technology.For example, the shape of free air balls and the threshold value of structure and shape or structure can be compared, so that further control the information processing (for example, closed-loop process) of free air balls.
Though described the present invention with reference to exemplary embodiments, the present invention is not limited to this.Yet additional claim will be founded so that comprise other variation of the present invention and embodiment, under the situation that does not break away from true spirit of the present invention and scope, can draw described variation and embodiment by those skilled in the art.
Claims (16)
1, a kind of system that is used to measure the size of free air balls, this system together uses with the wire bonder that has wire bonding tool and electronic flame extinguishes (EFO) device, and described system comprises:
Imager places on first plane of delineation;
Prism places under the described imager; And
At least one lens, between described first plane of delineation and described prism of described at least one lens in first light path, described at least one lens are between described prism and described imager and be in second light path, and described second light path is different from described first light path
Wherein, via described prism and described at least one lens, will place the image of free air balls of the bottom of described wire bonding tool to offer this imager.
2, the system as claimed in claim 1, wherein, this prism is a corner prism.
3, the system as claimed in claim 1, wherein, described at least one lens comprise first lens and second lens, between described first plane of delineation and described prism of described first lens in described first light path, and between the described prism and described imager of described second lens in described second light path.
4, the system as claimed in claim 1, wherein, described first light path and second light path are parallel to each other basically.
5, the system as claimed in claim 1 also comprises the processor of communicating by letter with described imager, and described processor is determined the size of described free air balls, and provides at least one control signal to described EFO device, with the size of control free air balls subsequently.
6, the system as claimed in claim 1 also comprises a plurality of amplifying stages.
7, the system as claimed in claim 1 also comprises luminaire, and it is close to the described bottom of described wire bonding tool and places.
8, a kind of method that is used to measure the size of free air balls, described method is together used with the wire bonder that has wire bonding tool and electronic flame extinguishes (EFO) device, and described method comprises:
Via prism, receive the indirect image of described free air balls;
Handle the image of the described free air balls that receives, to measure at least one size of described free air balls; And
Described at least one size based on described free air balls provides control signal to described EFO device.
9, method as claimed in claim 8, wherein, described receiving step comprises, via corner prism, receives the indirect image of described free air balls.
10, method as claimed in claim 8, wherein, described receiving step comprises, via corner prism and place described corner prism and described wire bonding tool between at least one lens, receive the indirect image of described free air balls.
11, method as claimed in claim 8 wherein, is carried out described receiving step, treatment step and step is provided, and does not handle and interrupt wire-bonded.
12, a kind of method that is used to analyze the image of free air balls, described method is together used with having the wire bonder that electronic flame extinguishes (EFO) device, and described method comprises:
During wire-bonded is handled, provide the image of described free air balls to image processor;
Whether the characteristic of determining described free air balls is in predetermined tolerance; And
Based on described determining step, control at least one setting of described EFO device.
13, method as claimed in claim 11, wherein, described determining step comprises: the size that determines whether described free air balls is in predetermined tolerance.
14, method as claimed in claim 11, wherein, described determining step comprises: at least one that determines whether the shape of described free air balls or structure is in predetermined tolerance.
15, method as claimed in claim 11 also comprises: utilize the described setting of EFO device, produce the size of the ball of expectation continuously.
16, method as claimed in claim 11 also comprises: utilize illuminator to illuminate described free air balls.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US58157504P | 2004-06-21 | 2004-06-21 | |
| US60/581,575 | 2004-06-21 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1722400A true CN1722400A (en) | 2006-01-18 |
| CN100472744C CN100472744C (en) | 2009-03-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100786867A Expired - Fee Related CN100472744C (en) | 2004-06-21 | 2005-06-21 | Method and apparatus for measuring the size of free air balls on a wire bonder |
Country Status (3)
| Country | Link |
|---|---|
| CN (1) | CN100472744C (en) |
| SG (1) | SG118358A1 (en) |
| TW (1) | TWI350225B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103107111B (en) * | 2011-11-11 | 2017-03-01 | 飞思卡尔半导体公司 | For monitoring free air balls in wire bonding（FAB）The method and apparatus being formed |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2044649A1 (en) * | 1990-06-19 | 1991-12-20 | Masanori Nishiguchi | Method and apparatus for packaging a semiconductor device |
| US6729530B2 (en) * | 2001-07-24 | 2004-05-04 | Kulicke & Soffa Investments, Inc. | Fiber alignment apparatus and process using cornercube offset tool |
| US6412683B1 (en) * | 2001-07-24 | 2002-07-02 | Kulicke & Soffa Investments, Inc. | Cornercube offset tool |
| KR100903458B1 (en) * | 2002-02-28 | 2009-06-18 | 외르리콘 어셈블리 이큅먼트 아게, 슈타인하우젠 | Method and device for measuring the amplitude of a freely oscillating capillary of a wire bonder |
-
2005
- 2005-06-08 SG SG200503642A patent/SG118358A1/en unknown
- 2005-06-20 TW TW094120397A patent/TWI350225B/en not_active IP Right Cessation
- 2005-06-21 CN CNB2005100786867A patent/CN100472744C/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
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| CN100472744C (en) | 2009-03-25 |
| SG118358A1 (en) | 2006-01-27 |
| TWI350225B (en) | 2011-10-11 |
| TW200613084A (en) | 2006-05-01 |
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