CN1715983A - Actuator and its control method and lens device - Google Patents
Actuator and its control method and lens device Download PDFInfo
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- CN1715983A CN1715983A CN 200510076106 CN200510076106A CN1715983A CN 1715983 A CN1715983 A CN 1715983A CN 200510076106 CN200510076106 CN 200510076106 CN 200510076106 A CN200510076106 A CN 200510076106A CN 1715983 A CN1715983 A CN 1715983A
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Abstract
The present invention provides a driver which can accurately moves a driven component by arranging piezoelectricity elements and driving components at the two sides of the driven component and using the driving components to nipping the driven component, a driver manufacturing method and a lens device. The driver (30) which drives a lens frame (18) along the direction of an optical axis consists of the piezoelectricity elements (32A) and (32B), the driving components (34A) and (34B) and an impaction spring (36). The piezoelectricity elements (32A) and (32B) nip a driven board (26) and are arranged at the opposite sides, and the driving components (34A) and (34B) are fixed at each piezoelectricity element (32A) and (32B). The driving components (34A) and (34B) are impacted at the driven board (26) by the impaction spring (36) from the two sides.
Description
Technical field
The present invention relates to driver, driver manufacture method and lens devices, be specifically related to carry the driving zoom lens on miniature precision equipment such as digital camera or portable phone or the driver of amasthenic lens.
Background technology
Drive unit as the lens section of digital camera etc. has the driver that adopts piezoelectric element.The driver of patent documentation 1 for example, fixed drive rod on the end face of piezoelectric element is supported lens barrel sliding freely on this driving rod.At lens barrel upper mounting plate spring, the elastic force by this leaf spring and drive rod between act on friction force.In addition, piezoelectric element is added the roughly driving pulse of jagged waveform of formation, piezoelectric element is out of shape with different speed with compression direction at bearing of trend.For example, if piezoelectric element is out of shape lentamente, lens barrel just together moves with the driving rod.On the contrary, if piezoelectric element is out of shape fast, lens barrel just stops on the identical position because of the inertia of its weight.Therefore,, can make lens barrel, move off and on tiny spacing by piezoelectric element being added repeatedly the roughly driving pulse of jagged waveform of formation.
But the driver of record in patent documentation 1 is owing to via the excellent transmission of drive force of the driving of strip, therefore exist the vibration that drives rod absorption, decay piezoelectric element, the problem that lens barrel is accurately moved.Especially the vibration of high frequency is because it is big to drive the excellent attenuation rate that causes, so the bad response of lens barrel.Thereby, the driver of patent documentation 1, existence can only be controlled with low frequency drive pulse, the problem that the mobile number of times of the lens barrel in the unit interval reduces.Therefore, in the driver of patent documentation 1, increase the translational speed of lens barrel, just need to increase impressed voltage, strengthen the addendum modification of piezoelectric element, strengthen the amount of movement once of lens barrel.
In patent documentation 2, boost to 30V by supply voltage with 5V, increase amount of movement once, accelerate the translational speed of lens barrel.Therefore, in patent documentation 2, need increasing apparatus, exist device to maximize, need the problem of complicated control simultaneously.
In the driver of record, on the end face of the displacement direction of piezoelectric element component is installed in patent documentation 3, this component and movable plate frictional fit are installed lens barrel on movable plate.In addition, by piezoelectric element is added driving pulse, via the component transmitting vibrations, thus mobile movable plate and lens barrel.
Patent documentation 1: specially permit No. 2633066
Patent documentation 2: the spy opens the 2000-50660 communique
Patent documentation 3: the spy opens flat 10-232337 communique
; the driver of patent documentation 1～3 record; driver part (above-mentioned driver part or component etc.) and friction force that is driven plate (above-mentioned lens barrel or movable plate etc.) and the magnitude relationship that is driven the inertial force of plate; in the time of must set extending and the velocity contrast when shrinking, to do just when the extension of piezoelectric element and when contraction reverses.Thereby, exist and select and can enough suitable friction force make the very difficult problem of elastic force that is driven plate and driver part frictional fit.Especially in patent documentation 3,, therefore to be set in very difficulty of suitable elastic force owing to produce elastic force according to the shape of driver part (component).Therefore, patent documentation 3 exists friction force to increase, be driven that plate does not slide or be driven parts because of friction force reduces to move, maybe can not make and be driven the misgivings that plate accurately moves.
In addition, the driver of record in the patent documentation 3 makes the movable plate frictional fit with component from sandwich movable plate ground, but has the direction of edge and this clamping direction quadrature to produce the problem of rocking on movable plate.Therefore, existence can not accurately make the mobile problem of movable plate (being driven parts).
In addition, there is driver part (above-mentioned driving rod or component etc.) in the driver of record and is driven the easy problem of unstable of friction force between the plate (above-mentioned lens barrel or movable plate etc.) in the patent documentation 1～3.Especially, at driver part or be driven under the low situation of the machining precision of parts, described friction force exists according to the contact position that is driven parts and driver part and changes friction force, or changes the misgivings of friction force according to each driver.Therefore, driver in the past exists to be difficult to make the parts problem stable, that move exactly that is driven.
In addition, the driver of record is used under the situation of lens devices in patent documentation 1～3, needs to detect the position detecting mechanism of lens barrel position.As position detecting mechanism, for example adopt the optical chopper of transmission-type or the reflective optical system of reflection-type, based on the detected value of these position detecting mechanisms, the drive controlling driver.
Though optical chopper or reflective optical system itself are very small-sized, because occulter or reflecting plate are big, so the problem that exists lens devices to maximize.
Summary of the invention
The present invention proposes in view of the above fact, and its purpose is to provide a kind of can making to be driven parts driver and manufacture method thereof stable, that move exactly.
In addition, another object of the present invention provides a kind of driver, and it can prevent to shake being driven between parts and driver part, can make to be driven parts and to move exactly.
In addition, a further object of the present invention provides a kind of driver, its can driver part and be driven parts between apply certain friction force, can make be driven parts stable, move exactly.
In addition, other purposes of the present invention provide a kind of the have driver of employing piezoelectric element and the lens devices of position detecting mechanism, and it can miniaturization.
The 1st invention, for achieving the above object, a kind of driver is provided, have: piezoelectric element, integratedly be installed in driver part on this piezoelectric element, with this driver part frictional fit on driving direction, extend simultaneously be provided be driven parts, to described the recline mechanism that reclines of described driver part of parts that is driven, it is characterized in that: described piezoelectric element and described driver part are provided with a plurality of, be configured on the described both sides that are driven parts, described be driven parts by described driver part from sandwich, frictional fit.
According to the 1st invention, by being driven parts from sandwich, can stablize the friction force that obtains being driven parts and driver part with a plurality of driver parts, can make that to be driven parts stable, mobile exactly.
In addition, according to the 1st invention, extend and to be arranged on driving direction owing to be driven parts, the frictional fit face that is driven parts and driver part remains on certain position with respect to piezoelectric element, therefore described frictional fit face can be configured in all the time piezoelectric element near.Thereby, because the vibration of piezoelectric element can be delivered on driver part and be driven parts unattenuatedly, therefore under the situation of the driving pulse that piezoelectric element is added high frequency, also can make really to be driven parts and to move.Therefore, even low-voltage also can make to be driven the parts high-speed mobile.
The 2nd invention, as described in the 1st invention, it is characterized in that: described a plurality of driver parts are general leaf spring clamping by the described mechanism that reclines, and are driven on the parts described by frictional fit.According to the 2nd invention because with the general a plurality of driver parts of leaf spring clamping, so can to each driver part and be driven parts between give friction force equably.
The 3rd invention, as described in the 1st invention, it is characterized in that: the described mechanism that reclines, have two clamping parts, constitute in mode to the direction performance elastic force at the interval of these two clamping parts that narrow down, described two clamping parts, to push different driver parts, the mode of this driver part of clamping is installed respectively.According to the 3rd the invention, can to each driver part and be driven parts between give friction force equably.
The 4th invention as described in the 1st invention, is characterized in that: described driver is to make to be installed in the driver that lens that the described lens-mount that is driven on the parts moves along optical axis move usefulness integratedly.
The 5th invention, for achieving the above object, a kind of manufacture method of driver is provided, have: a plurality of piezoelectric elements, be installed in a plurality of driver parts on these a plurality of piezoelectric elements integratedly, on driving direction, extend the parts that are driven that are provided with simultaneously with these a plurality of driver part frictional fit, timing in accordance with regulations is to the control part of the voltage of described a plurality of piezoelectric element applying pulse waveforms, described piezoelectric element and described driver part are configured on the described both sides that are driven parts, the described parts that are driven, by described driver part from sandwich, frictional fit, it is characterized in that: described control part, the different mode of deformation velocity when extending with described piezoelectric element with contraction, and when deformation velocity is slow, regularly to equate at described a plurality of piezoelectric elements, when deformation velocity is fast at described a plurality of piezoelectric elements mode regularly inequality, impressed voltage.
According to the 5th invention, because the deformation velocity when extending with contraction of described piezoelectric element is different, therefore when deformation velocity is slow, is driven parts and driver part and together moves, when deformation velocity is fast, be driven parts and stop to slide with respect to driver part.Thereby, can make to be driven parts and to move to a direction.
In addition, according to the 5th invention, owing to when deformation velocity is slow, on a plurality of piezoelectric elements, regularly equate, so the driving force increase, can move really and be driven parts.In addition, since regularly different on a plurality of piezoelectric elements when deformation velocity is fast, therefore can prevent to be driven parts and driver part really and together move, can prevent to be driven parts really and stop.Therefore, can make and be driven parts and move exactly.In addition, because the difference of the driving force when extending and shrink of piezoelectric element increases the therefore easy friction force that is driven parts and driver part of setting.
The 6th invention, for achieving the above object, a kind of manufacture method of driver is provided, this driver has: a plurality of piezoelectric elements, be installed in a plurality of driver parts on these a plurality of piezoelectric elements integratedly, on driving direction, extend the parts that are driven that are provided with simultaneously with these a plurality of driver part frictional fit, timing in accordance with regulations is to the control part of the voltage of described a plurality of piezoelectric element applying pulse waveforms, it is characterized in that: described control part, the different mode of deformation velocity when extending with described piezoelectric element with contraction, and when deformation velocity is slow, regularly to equate at described a plurality of piezoelectric elements, when deformation velocity is fast at described a plurality of piezoelectric elements mode regularly inequality, impressed voltage.
According to the 6th invention, owing to when extending and shrink, therefore the deformation velocity difference of piezoelectric element is driven parts and driver part and together moves when deformation velocity is slow, be driven parts and stop with respect to the driver part slip when deformation velocity is fast.Thereby, can make to be driven parts and to move to a direction.
In addition,,, therefore can enough a plurality of driver parts drivings be driven parts, can certain the moving of enough big driving forces be driven parts owing to regularly equal on a plurality of piezoelectric elements when deformation velocity is slow according to the 6th invention.In addition, because regularly different on a plurality of piezoelectric elements when deformation velocity is fast, so driver part can singlely move, and can suppress to be driven parts and move with driver part, can stop to be driven parts really.Therefore, according to the 6th invention, can make to be driven parts and to move exactly.In addition, because the difference of the driving force when extending and shrink of piezoelectric element increases the therefore easy friction force that is driven parts and driver part of setting.
In addition,, be arranged on driving direction,, remain on certain position with respect to piezoelectric element so be driven the frictional fit face of parts and driver part owing to be driven the parts extension according to the 6th invention.Thereby, the frictional fit face can be configured in all the time piezoelectric element near.Thus, because can being delivered to unattenuatedly, the vibration of piezoelectric element is driven parts on driver part, so under the situation of the driving pulse that piezoelectric element is added high frequency, also can move really and be driven parts.Therefore, even low-voltage also can high-speed mobile be driven parts.
The 7th invention as described in the 6th invention, is characterized in that: described driver is to make to be installed in the driver that lens that the described lens-mount that is driven on the parts moves along optical axis move usefulness integratedly.
The 8th invention, for achieving the above object, a kind of driver is provided, have: piezoelectric element, integratedly be installed in driver part on this piezoelectric element, on driving direction, extend the parts that are driven that are provided with simultaneously with this driver part frictional fit, it is characterized in that: described piezoelectric element and described driver part, be provided with a plurality of, be configured on the described both sides that are driven parts, with these a plurality of driver parts, from the described parts that are driven of sandwich, be non-parallel simultaneously with the frictional fit face that is formed on the described driver part on the described both sides that are driven parts.
According to the 8th invention,,, can prevent to be driven rocking of parts and driver part therefore by being driven parts from sandwich with driver part because the frictional fit face that is formed on the both sides that are driven parts is not parallel position relation.In addition, so-called " being non-parallel " refers between the face or the position that intersects between the face that prolongs relation.
In addition, according to the 8th invention, be arranged on driving direction owing to be driven the parts extension, so the frictional fit face of parts and driver part that is driven remains on certain position with respect to piezoelectric element.Thereby, the frictional fit face can be configured in all the time piezoelectric element near.Thus, because can being delivered to unattenuatedly, the vibration of piezoelectric element is driven parts on driver part, so under the situation of the driving pulse that piezoelectric element is added high frequency, also can move really and be driven parts.Therefore, even low-voltage also can high-speed mobile be driven parts.
In addition,,, therefore can access high output, also can move it being driven under the heavy situation of parts because a plurality of piezoelectric elements and driver part be set according to the 8th invention.
The 9th invention as described in the 8th invention, is characterized in that: the described parts that are driven form the triangular column, and described frictional fit face is the two side faces of described triangular prism.
The 10th invention, as described in the 8th invention, it is characterized in that: described driver is to make to be installed in the described lens-mount that is driven on the parts integratedly, the lens that move along optical axis move the driver of usefulness.
The 11st invention, for achieving the above object, a kind of driver is provided, have: piezoelectric element, integratedly be installed in driver part on this piezoelectric element, on driving direction, extend the parts that are driven that are provided with simultaneously with this driver part frictional fit, it is characterized in that: on described driver part, form jut, by this jut, described driver part is contacted with the described parts that are driven.
According to the 11st invention, because driver part and be driven parts and contact, so driver part and be driven parts formation and put and contact can access roughly certain friction force all the time via jut.Thereby, according to the 11st invention, can accurately control all the time and be driven moving of parts.
The 13rd invention, for achieving the above object, a kind of driver is provided, have: piezoelectric element, integratedly be installed in driver part on this piezoelectric element, on driving direction, extend the parts that are driven that are provided with simultaneously with this driver part frictional fit, it is characterized in that: on the frictional fit face of described driver part, along the outstanding projecting strip part that forms of driving direction,, described driver part is contacted with the described parts that are driven by this projecting strip part.
According to the 13rd invention and since driver part be driven the projecting strip part of parts and contact via driving direction, so driver part be driven parts and can form line and contact.Therefore, be driven parts when driving direction moves, can accessing roughly certain friction force all the time.Thus, generally can accurately control and be driven moving of parts.
The 15th invention, for achieving the above object, a kind of driver is provided, have: piezoelectric element, integratedly be installed in driver part on this piezoelectric element, on driving direction, extend the parts that are driven that are provided with simultaneously with this driver part frictional fit, it is characterized in that: on the frictional fit face of described driver part, along the outstanding projecting strip part that forms of driving direction,, the described parts that are driven are contacted with described driver part by this projecting strip part.
According to the 15th invention and since driver part be driven the projecting strip part of parts and contact via driving direction, so driver part be driven parts and can form line and contact.Therefore, be driven parts when driving direction moves, can accessing roughly certain friction force all the time.Thus, generally can accurately control and be driven moving of parts.
The 17th invention, for achieving the above object, a kind of driver is provided, have: piezoelectric element, integratedly be installed in driver part on this piezoelectric element, on driving direction, extend the parts that are driven that are provided with simultaneously with this driver part frictional fit, it is characterized in that: the described parts that are driven form cylindric, simultaneously on the frictional fit face of described driver part, to described driving direction, with than the described little curvature of curvature that is driven parts, form the circular-arc groove in cross section, the described parts that are driven of frictional fit in this groove.
According to the 17th invention since in the circular-arc groove of driver part the columned parts that are driven of frictional fit, so driver part and be driven parts formation line and contact generally can access certain friction force.Therefore, can accurately control all the time and be driven parts.In addition, according to invention 17, can prevent to be driven rocking of parts and driver part.
12nd, 14,16,18 inventions is characterized in that: described piezoelectric element and described driver part are located on the described both sides that are driven parts, the described parts that are driven, by described driver part from sandwich.Therefore, according to the present invention, owing to be driven parts from sandwich with driver part, so can access more stable friction force.
The 19th invention, for achieving the above object, a kind of lens devices is provided, have: piezoelectric element, integratedly be installed in driver part on this piezoelectric element, extending being driven parts, being installed in this integratedly and being driven on the parts simultaneously the lens-mount that the power by described piezoelectric element moves to optical axis direction of being provided with on the driving direction simultaneously with this driver part frictional fit, it is characterized in that: adopt the described parts that are driven, form the position detecting mechanism of the position of detecting described lens-mount.
According to the 19th invention, on driving direction, extend the parts that are driven that are provided with owing to adopt, position detecting mechanism is set, so can reduce the space that is provided with of position detecting mechanism, can make the lens devices miniaturization.In addition, according to the 19th invention, owing to position detecting mechanism is set being driven on the parts, so can accurately measure the addendum modification of lens-mount.
The 20th invention, as described in the 19th invention, it is characterized in that: described position detecting mechanism is the optical chopper that is driven parts as the transmission-type of occulter with described.Optical chopper can carry out high-precision test with high-output power, on the contrary, exists to increase the problem that the space is set, but according to the 20th invention, owing to be driven the occulter of parts dual-purpose optical chopper, so can make the lens devices miniaturization.
The 21st invention as described in the 19th invention, is characterized in that: described position detecting mechanism is at the described reflective optical system that forms the reflection-type of reflecting surface on the parts that is driven.According to the 21st invention owing to be driven on the parts reflecting surface that forms reflective optical system, so can punctured position testing agency the space is set, can make the lens devices miniaturization.
According to driver of the present invention,,, can accurately move and be driven parts so can stably obtain being driven the friction force of parts and driver part owing to be driven parts from both sides with the driver part clamping.In addition, manufacture method according to driver of the present invention, owing to when the deformation velocity of piezoelectric element is slow, on a plurality of piezoelectric elements, regularly equate, it is regularly inequality on a plurality of piezoelectric elements when deformation velocity is fast, so can be driven moving and stopping of parts really, can accurately move and be driven parts.
In addition, manufacture method according to driver of the present invention, because in the different mode of deformation velocity when the extension of piezoelectric element and during contraction, and when deformation velocity is slow, on a plurality of piezoelectric elements, regularly to equate, when deformation velocity is fast on a plurality of piezoelectric elements mode regularly inequality, impressed voltage is driven parts so can accurately move.
In addition, according to driver of the present invention, be non-parallel owing to be formed on the frictional fit face of the driver part of the both sides that are driven parts, therefore by being driven parts from sandwich, can prevent to be driven rocking of parts and driver part with driver part.
In addition, according to driver of the present invention owing to make driver part and be driven that parts point contacts or line contacts, thus all the time can driver part and be driven parts between apply roughly certain friction force, can accurately move all the time and be driven parts.
And,,,, can make the lens devices miniaturization simultaneously so can accurately measure the addendum modification of lens devices owing to utilize the parts that are driven that are located at driving direction that position detecting mechanism is set according to lens devices of the present invention.
Description of drawings
Fig. 1 is the exploded perspective view of formation of the lens devices of the expression driver that adopts the 1st embodiment.
Fig. 2 is the stereographic map of the basic structure of explanation driver.
Fig. 3 is the outer oscillogram that adds to the driving pulse of piezoelectric element.
Fig. 4 is the oscillogram of the driving pulse different with Fig. 3.
Fig. 5 is the stereographic map of the main composition of the expression lens devices different with Fig. 1.
Fig. 6 is the stereographic map of the main composition of the expression lens devices different with Fig. 1.
Fig. 7 is the stereographic map of the main composition of the expression lens devices different with Fig. 1.
Fig. 8 is the calcspar of formation of the control part in the driver of expression the 2nd embodiment.
Fig. 9 is the stereographic map that the ultimate principle of the driver that four piezoelectric elements are set is described.
Figure 10 is the oscillogram of the driving pulse of the outer piezoelectric element that adds to Fig. 9.
Figure 11 is the stereographic map of formation of the lens devices of the expression driver that adopts the 3rd embodiment.
Figure 12 is the exploded perspective view of the driver of explanation Figure 11.
Figure 13 is the exploded perspective view that expression is driven the shape of the parts comparative example different with Figure 12.
Figure 14 is the diagram of example that expression is driven the shape of parts.
Figure 15 is the stereographic map of formation of the driver of expression the 4th embodiment.
Figure 16 is the stereographic map that expression constitutes the driver different with Figure 15.
Figure 17 is the stereographic map of formation of the driver of expression the 5th embodiment.
Figure 18 is the stereographic map of formation of the driver of expression the 6th embodiment.
Figure 19 is the stereographic map of formation of the driver of expression the 7th embodiment.
Figure 20 is the stereographic map of formation of the driver of expression the 8th embodiment.
Figure 21 is the front view of the lens devices of Figure 20.
Figure 22 is the front view of the lens devices of expression comparative example.
Among the figure: 18,20-lens-mount, 32A, 32B-piezoelectric element, 34A, 34B-driver part, 36-holddown spring.
Embodiment
Below, with reference to description of drawings driver of the present invention, driver manufacture method and lens devices preferred embodiment.
Fig. 1 is the exploded perspective view of formation of the lens devices of the expression driver that adopts the 1st embodiment.Lens devices shown in this figure has the shell by shell body 12 and lid 14 boxes that constitute, and installs and fixes lens 16 in the side of shell body 12.
Two lens- mounts 18,20 are set in the inside of shell body 12, on these two lens- mounts 18,20, keep zoom lens or the first-class mobile lens of focus lamp.In addition, two lens- mounts 18,20 by with two guide rods 22,24 of the optical axis configured in parallel of fixed lens 16, sliding freely along the optical axis direction support.Promptly, at the outstanding guide part 23 that forms of the outer peripheral face of lens-mount 18, by in the through hole of this guide part 23, inserting guiding guide rod 24, in the U shape groove of giving prominence to the auxiliary section (not shown) that is formed on guide part 23 opposite sides, cooperate guide rod 22 simultaneously, lens-mount 18 is supported in optical axis direction sliding freely.Equally, at the outstanding guide part 25 that forms of the outer peripheral face of lens-mount 20, by in the through hole of this guide part 25, inserting guiding guide rod 22, in the U shape groove of giving prominence to the auxiliary section 27 that is formed on guide part 25 opposite sides, cooperate guide rod 24 simultaneously, lens-mount 20 is supported in optical axis direction sliding freely.
On lens- mount 18,20, form respectively and be driven plate (being equivalent to be driven parts) 26,26.Be driven plate 26 and form elongated rectangular-shapedly, the mode parallel with optical axis with its length direction disposes.The material etc. that is driven plate 26 does not limit especially, can select the strong material of light weight and rigidity, for example pottery etc.
Set driver 30,30 on the plate 26,26 respectively being driven.Each driver 30,30 is fixed by the peristome of insert cover 14.
Fig. 2 is the stereographic map of the basic structure of explanation driver 30.Below, with the example explanation of the driver 30 that drives lens-mount 18, but the driver 30 that drives lens-mount 20 constitutes too.
As shown in Figure 2, driver 30 mainly is made of piezoelectric element 32A, 32B, driver part 34A, 34B, holddown spring (being equivalent to the mechanism that reclines) 36 and pressing plate 38A, 38B.Piezoelectric element 32A, 32B clip and are driven plate 26 and are configured in both sides.In addition, piezoelectric element 32A, 32B, the mode that becomes the length direction (being driving direction) that is driven plate 26 with its displacement direction disposes.One side's of the displacement direction of each piezoelectric element 32A, 32B end face is mounted on pressing plate 38A, the 38B on the lid 14 (with reference to Fig. 1) of shell, and driver part 34A, 34B are installed on the opposing party's end face integratedly.Driver part 34A, 34B form the square shape of essentially rectangular, with above-mentioned to be driven plate 26 same, by the strong material of light weight and rigidity for example pottery constitute.On driver part 34A, the 34B, with the side of opposition side that is driven plate 26 opposed sides on form recess 35A, 35B, holddown spring 36 is engaged in this recess 35A, the 35B.Holddown spring 36 is the driver part 34A of two of clampings, the leaf spring of 34B, by the elastic force of this holddown spring 36, driver part 34A, 34B be pressed against be driven on the plate 26.Thus, with driver part 34A, 34B frictional fit in being driven plate 26.
In addition, in Fig. 2, as to being driven the recline mechanism that reclines of driver part 34A, 34B of plate 26, the example that adopts holddown spring 36 is shown, but also can be by other mechanism that reclines, elastic body such as compression spring or rubber for example, driver part 34A, 34B recline separately.
Fig. 3 (A), the outer example that adds to the driving pulse of piezoelectric element 32A, 32B of (B) expression.Fig. 3 (A) is the driving pulse when direction moves the lens-mount 18 of Fig. 2 left, and Fig. 3 (B) is the driving pulse when right moves the lens-mount 18 of Fig. 2.
Under the situation of Fig. 3 (A), piezoelectric element 32A added from moment α 1 to moment α 2 the roughly jagged driving pulses that gently erect, sharply descend at moment α 3.In addition, piezoelectric element 32B is added from moment α 1 to moment α 2 the roughly jagged driving pulses that gently erect, sharply descend at moment α 4.Thereby, from moment α 1 to moment α 2 because piezoelectric element 32A, 32B elongation simultaneously slowly, thus driver part 34A, the 34B of Fig. 2 left direction move.At this moment,, therefore be driven plate 26 and kept by friction force with driver part 34A, 34B because driver part 34A, 34B move lentamente, with driver part 34A, 34B together left direction move.In addition,, have only piezoelectric element 32A sharply to shrink, have only piezoelectric element 32B sharply to shrink at moment α 4 at moment α 3.Therefore, at moment α 3, moment α 4, driver part 34A, the 34B of Fig. 2 sharply moves to right separately respectively.If so driver part 34A, 34B sharply move, and be driven plate 26 between just produce and slide, be driven plate 26 and stop, driver part 34A, a 34B move.Therefore, at moment α 3, moment α 4, be driven plate 26 and stop, systolic pressure electric device 32A, 32B turn back to original state.More than show, if add the driving pulse of Fig. 3 (A) repeatedly since Fig. 2 be driven plate 26 the moving and stop of direction left repeatedly, so can make lens-mount 18 left direction move.
Under the situation of Fig. 3 (B), piezoelectric element 32A added from moment α 5 to moment α 6 the roughly jagged driving pulses that gently erect, sharply rise at moment α 7.In addition, piezoelectric element 32B is added from moment α 5 to moment α 6 the roughly jagged driving pulses that gently erect, sharply rise at moment α 8.Thereby,, shrink because piezoelectric element 32A, 32B are slow simultaneously, to moment α 6 from moment α 5 so driver part 34A, the 34B of Fig. 2 slowly move to right.At this moment,, therefore be driven plate 26 and kept, together move to right with driver part 34A, 34B by friction force with driver part 34A, 34B because driver part 34A, 34B move lentamente.In addition,, have only piezoelectric element 32A sharply to extend, have only piezoelectric element 32B sharply to extend at moment α 8 at moment α 7.Therefore, at moment α 7, moment α 8, direction is sharply mobile left separately respectively for driver part 34A, the 34B of Fig. 2.If so driver part 34A, 34B sharply move, and be driven plate 26 between just produce and slide, be driven plate 26 and stop, driver part 34A, a 34B move.Therefore, at moment α 7, moment α 8, can stop to be driven plate 26, elongation piezoelectric element 32A, 32B turn back to original state.More than show, if add the driving pulse of Fig. 3 (B) repeatedly since Fig. 2 be driven plate 26 repeatedly to the moving and stop of right, so lens-mount 18 is moved to right.
, controlling as mentioned above under the voltage condition, the piezoelectric element 32A sharply timing and the rapid timing of being out of shape of piezoelectric element 32B of distortion staggers.That is, under the situation of Fig. 3 (A), sharply shrink, slightly late at moment α 4 rapid systolic pressure electric device 32B at moment α 3 piezoelectric element 32A.Equally, under the situation of Fig. 3 (B), at moment α 7, piezoelectric element 32A sharply extends, and extends at moment α 8 piezoelectric element 32B slightly late.Thereby rapid when mobile at piezoelectric element 32A, piezoelectric element 32B stops, and rapid when mobile at piezoelectric element 32B, piezoelectric element 32A stops.Therefore, be driven plate 26 difficulties, can stop to be driven plate 26 really along with driver part 34A, 34B move.Therefore,, can control really and be driven moving and stopping of plate 26, can accurately be driven the drive controlling of plate 26 by adding voltage as above-mentioned driving pulse.
In addition, under situation about as above controlling, owing to strengthen when being driven plate 26 mobile and the driving force when stopping poor, so the labile factor in the drive controlling reduces, and can be driven the setting of the friction force of plate 26 and driver part 34A, 34B easily.Thereby, can stably be driven the control of plate 26 really.
In addition, according to above-mentioned embodiment, since move with driver part 34A, 34B be driven plate 26 in, simultaneously to piezoelectric element 32A, 32B impressed voltage, mobile simultaneously driver part 34A, 34B, so can be driven the state of parts 34A, 34B clamping with both sides, be driven plate 26 with big drive force.Therefore, even under the situation of the Heavy Weight that is installed in the lens-mount 18 that is driven on the plate 26, it is moved really.
In addition, according to present embodiment, owing to, be driven plate 26 with driver part 34A, 34B clamping, so can stably obtain being driven the friction force of plate 26 and driver part 34A, 34B being driven both sides configuration piezoelectric element 32A, 32B and driver part 34A, the 34B of plate 26.That is, owing to be driven plate 26 from sandwich, so even when being driven plate 26 and moving, the friction force that is driven plate 26 and driver part 34A, 34B can not change yet, and can stablize to move exactly to be driven plate 26 by driver part 34A, 34B.
And, according to present embodiment, extend setting owing to be driven plate 26 at driving direction, so driver part 34A, 34B and the frictional fit face that is driven plate 26 are to remain at certain locational structure with respect to piezoelectric element 32A, 32B, therefore the frictional fit face can be configured in all the time piezoelectric element 32A, 32B near.Thus, the vibration of piezoelectric element 32A, 32B can be delivered to really and be driven plate 26, can utilize the control of the driving pulse of high frequency.Therefore, even low-voltage also can high-speed mobile be driven plate 26.
In addition, add to the shape of waveform of the driving pulse of piezoelectric element 32A, 32B outward, be not limited to above-mentioned rectangular-shaped example.For example, shown in Fig. 4 (A), (B), also can add identical shaped driving pulse simultaneously to piezoelectric element 32A, 32B.In Fig. 4 (A), electric device 32A, 32B added from moment β 1 to moment β 2 the roughly jagged driving pulses that gently erect, sharply descend at moment β 3.In addition, in Fig. 4 (B), piezoelectric element 32A, 32B added from moment β 4 to moment β 5 the roughly jagged driving pulse that descends lentamente, sharply erects at moment β 6.So, piezoelectric element 32A, 32B also can sharply be out of shape by identical timing.
In addition, as the purposes of driver of the present invention, for example can be used in miniature precision equipment such as digital camera or portable phone.Especially portable phone needs the following low voltage drive with 3V, but by adopting driver of the present invention, even the high frequency about 20kHz also can drive, can be with the high-speed mobile lens framework 18,20 more than the 2mm/s.Therefore, even need the zoom lens that moves about 10mm, also can move rapidly.
In addition, above-mentioned embodiment is driven examples of members and is illustrated to drive to optical axis direction, but the driving direction that is driven parts is not limited thereto.For example, lens devices shown in Figure 5 is the example that drives to the direction with light shaft positive cross.This lens devices has maintenance and comprises the lens-mount 52 of the lens combination of mobile lens 50, the lens-mount 56 that maintenance comprises the lens combination of mobile lens 54.Each lens-mount 52,56 is supported sliding freely by two guide rods 58,60 that are configured in optical axis direction.In addition, on each lens-mount 52,56 cam pin 62,64 is set, this cam pin 62,64 is engaged in the cam path 68,70 that forms on the movable plate 66.Movable plate 66 is supported in the above-below direction direction of light shaft positive cross (promptly with) of Fig. 5, installation of driver 30 on this movable plate 66 sliding freely.Piezoelectric element 32A, the 32B of driver 30 clips movable plate 66 ground and is located at both sides, disposes in the mode that can stretch up and down.Downside at each piezoelectric element 32A, 32B is installed driver part 34A, 34B.Holddown spring 36 is installed on driver part 34A, 34B, the elastic force by this holddown spring 36 with driver part 34A, 34B frictional fit on movable plate 66.Therefore, if add the voltage of above-mentioned driving pulse to piezoelectric element 32A, 32B, just direction drives movable plate 66 up and down, and lens devices 52,56 moves forward and backward to optical axis direction.By in the lens devices of above-mentioned formation, because from both sides frictional fit driver part 34A, the 34B of movable plate 66, so also can stablize, mobile movable plate 66 exactly.
Lens devices shown in Figure 6, the cam pin 62,64 that is formed on the lens-mount 52,56 cooperates with cam path 74,76 on being formed on oscillating deck 72.Form hole 78 on oscillating deck 72, by inserting the spindle unit (not shown) in this hole 78, oscillating deck 72 is supported in swing freely.Driver part 34A, the 34B of driver 30 clips oscillating deck 72 ground and is provided in both sides, by holddown spring 36, from the both sides frictional fit on oscillating deck 72.Thus, can stablize, mobile oscillating deck 72 exactly.
Lens devices shown in Figure 7 has stationary magazine creel 80, in the inside of this stationary magazine creel 80, supports the lens-mount 84 of mobile lens 82 sliding freely along optical axis direction.Support to drive tube 86 freely in the external rotating of stationary magazine creel 80, should drive tube 86, constitute lens-mount 84 in the mode that moves forward and backward at optical axis direction by rotating operation.Driving formation flange 88 on the tube 86, installation of driver 30 on this flange 88.Driver part 34A, the 34B of driver 30 clips flange 88 ground and is provided in both sides, simultaneously by holddown spring 36, from the both sides frictional fit on flange 88.Thus, can stablize, rotate exactly driving tube 86.
Below, the 2nd embodiment of driver of the present invention is described.The 2nd embodiment and the 1st embodiment are same, constitute lens devices as shown in Figure 1, form basic structure as shown in Figure 2.In addition, constitute control part as shown in Figure 8.
Fig. 8 is the calcspar of expression to the formation of the control part of piezoelectric element 32A, 32B timing impressed voltage in accordance with regulations.As shown in the drawing, on each piezoelectric element 32A, 32B, connect amplifier 31A, 31B, and then be connected on the CPU29 by D/A converter 33A, 33B.CPU29, timing output control signal in accordance with regulations, this signal is amplified by amplifier 31A, 31B after being changed by D/A converter 33A, 33B D/A, generates the drive pulse signal of square wave.The drive pulse signal of the drive pulse signal of piezoelectric element 32A and piezoelectric element 32B equates as a side's who erects edge or drop edge timing, and the different square wave of timing that erects the opposing party of edge or drop edge generates.For example, generate above-mentioned Fig. 3 (A), the drive pulse signal shown in (B), add to piezoelectric element 32A, 32B outward.
Below, the effect of the driver of the 2nd embodiment is described.
Below, illustrate that piezoelectric element 32A, 32B to the driver 30 of Figure 1 and Figure 2 press the comparative example of the roughly zigzag impressed voltage shown in Fig. 4 (A), (B).
Under the situation of Fig. 4 (A), piezoelectric element 32A, 32B are added identical shaped driving pulse, the roughly jagged driving pulses that promptly gently erect, sharply descend at moment β 3 from moment β 1 to moment β 2.Therefore, at moment β 3, piezoelectric element 32A, 32B sharply shrink by identical timing.
Equally, under the situation of Fig. 4 (B), piezoelectric element 32A, 32B are added identical shaped driving pulse, the roughly jagged driving pulse that promptly gently descends, sharply erects at moment β 6 from moment β 4 to moment β 5.Therefore, at moment β 6, piezoelectric element 32A, 32B sharply extend by identical timing.
So, by identical timing sharply under the situation of distortion, because driver part 34A, 34B move simultaneously with the state that clamping is driven plate 26, it is together mobile with driver part 34A, 34B easily therefore to be driven plate 26 at piezoelectric element 32A, 32B.Therefore, be driven plate 26 and stop really in order to make, in the time of must strictly setting the elongation of piezoelectric element 32A, 32B and the deformation velocity in when contraction, or the strict friction force that is driven plate 26 and driver part 34A, 34B of setting.Therefore, the selected very difficulty of the elastic constant of the selected or holddown spring 36 of pulse shape.In addition, under the selected situation of the elastic constant of the selected or holddown spring 36 that can not accurately carry out pulse shape, can both move during both sides when the elongation of piezoelectric element 32A, 32B and when shrinking and be driven plate 26, therefore can not make to be driven plate 26 and accurately to move.
Otherwise, the 2nd embodiment, as the moment α 3 of Fig. 3 (A), constantly α 4 or Fig. 3 (B) moment α 7, constantly shown in the α 8, the sharply timing of distortion of in two piezoelectric element 32A, 32B, staggering.Thereby driver part 34B stops when driver part 34A moves, and driver part 34A stops when driver part 34B moves.Therefore, be driven plate 26 difficulties, can stop to be driven plate 26 really along with driver part 34A, 34B move.Thereby, be driven moving and stopping of plate 26 by piezoelectric element 32A, 32B being added the voltage of the pulse shape of Fig. 3 (A), (B), can controlling really, can be driven the drive controlling of plate 26 exactly.
In addition, under situation about as above controlling, owing to strengthen when being driven plate 26 mobile and the driving force when stopping poor, so the labile factor in the drive controlling reduces, and can be driven the setting of the friction force of plate 26 and driver part 34A, 34B easily.Thereby, can stably be driven the control of plate 26 really.
In addition, according to present embodiment, because being driven plate 26 extends setting on driving direction, so driver part 34A, 34B and the frictional fit face that is driven plate 26 are to remain at certain locational structure with respect to piezoelectric element 32A, 32B, therefore described frictional fit face can be configured in all the time piezoelectric element 32A, 32B near.Thus, the vibration of piezoelectric element 32A, 32B can be delivered to really and be driven plate 26, can utilize the control of the driving pulse of high frequency.Therefore, even low-voltage also can high-speed mobile be driven plate 26.
In addition, in the above-described 2nd embodiment, also can form formation shown in Figure 5.In this case, the voltage of pulse shape that also can be by adding Fig. 3 (A), (B), stable, positively move and be driven plate 26.
In addition, in the above-described 2nd embodiment, also can form formation shown in Figure 6.In this case, the voltage of pulse shape that also can be by adding Fig. 3 (A), (B), stable, positively move oscillating deck 72 to swaying direction.
And then, also can form formation shown in Figure 7.In this case, also can stablize, positively move driving tube 86 by adding the voltage of the pulse shape shown in Fig. 3 (A), (B) to sense of rotation.
In addition, in the above-described 2nd embodiment, the example that two piezoelectric element 32A, 32B are set is shown, but also the piezoelectric element more than three can be set.For example in Fig. 9, the example that four piezoelectric element 32A～32D are set is shown.Piezoelectric element 32A, 32C are respectively with respect to being driven the opposition side that plate 26 is configured in piezoelectric element 32B, 32D.Driver part 34A～34D is installed respectively on four piezoelectric element 32A～32D integratedly, and with holddown spring 36,36 this driver part 34A～34D that reclines, frictional fit is being driven on the plate 26.To four piezoelectric element 32A～32D, add the driving pulse shown in Figure 10 (A), (B).That is, under the situation of Figure 10 (A), to piezoelectric element 32A～32D, add from moment γ 1 to moment γ 2 gently erect simultaneously, to moment γ 3～moment γ 6, the sharply roughly jagged driving pulse of decline staggers regularly.Equally, under the situation of Figure 10 (B), piezoelectric element 32A～32D added from moment γ 7 to moment γ 8 gently descend simultaneously, at moment γ 9～moment γ 12 roughly jagged driving pulse that timing sharply erects that staggers.By so sharply timing of distortion piezoelectric element 32A～32D, when adopting four piezoelectric element 32A～32D, also can carry out drive controlling accurately.
Below, the driver of the 3rd embodiment is described.
Figure 11 is the stereographic map of formation of the lens devices of the expression driver that adopts the 3rd embodiment.Lens devices shown in this figure, the shell 112 with box is provided with the lens-mount 118 that keeps mobile lens (for example zoom lens or amasthenic lens) 116 in this inside of 112.
Outstanding auxiliary section 122 and the guide part 124 of forming on the outer peripheral face of lens-mount 118.On auxiliary section 122, form the groove 123 of U shape, in this groove 123, cooperate guide rod 128.In addition, on guide part 124, form through hole 125, in this through hole 125, insert guide rod 129.Guide rod 128,129 is provided in optical axis direction, is fixed on the shell 112.Thus, lens-mount 118 is supported sliding freely along optical axis direction.
In addition, installation integratedly is driven plate 126 on lens-mount 118.Be driven plate 126, form the triangular column as shown in figure 12, the mode parallel with optical axis with its length direction disposes.The material etc. that is driven plate 126 does not limit especially, can select the strong material of light weight and rigidity, for example pottery etc.
The driver of present embodiment mainly is made of piezoelectric element 132A, 132B, driver part 134A, 134B, holddown spring 136.Piezoelectric element 132A, 132B clip and are driven parts 126 ground and are configured in both sides.In addition, piezoelectric element 132A, 132B, the mode that becomes the length direction (being driving direction) that is driven parts 126 with its displacement direction disposes.One side's of the displacement direction of each piezoelectric element 132A, 132B end face is installed in shell 112 (with reference to Fig. 1) and goes up on fixing pressing plate 138A, the 138B.In addition, on the opposing party's of displacement direction end face, driver part 134A, 134B are installed integratedly.Driver part 134A, 134B form roughly trapezoidal bulk, with above-mentioned to be driven parts 126 same, by light weight and the strong material example of rigidity, constitute as pottery.On driver part 134A, 134B, with the side of the opposition side that is driven parts 126 opposed sides on, form recess 135A, 135B, holddown spring 136 is engaged in this recess 135A, the 135B.Holddown spring 136 is the driver part 134A of two of clampings, the leaf spring of 134B, by the elastic force of this holddown spring 136, driver part 134A, 134B be pressed against be driven on the parts 126.Thus, with driver part 134A, 134B frictional fit in being driven parts 126.In addition, in Figure 12, as to being driven the recline mechanism that reclines of driver part 134A, 134B of parts 126, the example that adopts holddown spring 136 is shown, but also can be by other mechanism that reclines, elastic body such as compression spring or rubber for example, driver part 134A, 134B recline separately.
In addition, to piezoelectric element 132A, 132B, for example, add the voltage of driving pulse shown in Figure 3.
Below, the effect of the driver that as above constitutes is described.
Figure 13 represent to replace Figure 12 the triangular column be driven parts 126, adopt the tabular comparative example that is driven parts.In comparative example shown in Figure 13, be driven parts 140 and form the tabular of rectangle.Piezoelectric element 132A, 132B and driver part 134A, 134B are formed on the both sides that are driven parts 140 respectively one by one.In addition, by holddown spring 136, driver part 134A, 134B relied on be driven parts 140 sides, driver part 134A, 134B are being driven on the parts 140 by frictional fit.
Under the situation of driver shown in Figure 13, driver part 134A and the frictional fit face that is driven parts 140, be parallel position relation with the frictional fit face that is driven parts 140 with driver part 134B.Therefore, be driven parts 140 sides, also have to be driven the misgivings that parts 140 rock to the direction of arrow of Figure 13 (that is, with by the direction quadrature of driver part 134A, 134B clamping direction) even driver part 134A, 134B are relied on by holddown spring 136.Be driven under the situation that parts 140 (being lens-mount 118) rock, the problem that optical property reduces can occur.
Otherwise the driver of present embodiment as shown in figure 12, is driven parts 126 and forms the triangular column, and driver part 134A, 134B extruding is driven two sides of parts 126.That is, be formed on the frictional fit face on the both sides that are driven parts 126, be nonparallel position relation.Therefore, be driven parts 126, with the face of light shaft positive cross on, by from two directions extruding location.Thus, can prevent to rock and reduce optical property because of being driven parts 126.
In addition, the driver of present embodiment, because being driven parts 126 extends setting on driving direction,, remain at certain position relation with respect to piezoelectric element 132A, 132B so be driven the frictional fit face of parts 126 and driver part 134A, 134B.Therefore the frictional fit face can be configured in all the time piezoelectric element 132A, 132B near.Thus, because can be with the vibration of piezoelectric element 132A, 132B, be not delivered to damply and be driven parts 126, so, can move really yet and be driven parts 126 even under the situation of the driving pulse that piezoelectric element 132A, 132B is added high frequency by piezoelectric element 132A, 132B.Therefore, even low-voltage also can high-speed mobile be driven plate 126.
In addition, according to present embodiment,,, it is moved really even be driven under the heavy situation of parts 126 (lens-mount 118) because a plurality of piezoelectric element 132A, 132B and driver part 134A, 134B are set.
In addition, in the above-described embodiment, will be driven parts 126 and form the triangular columns, but the shape that is driven parts 126 being not limited thereto, also can be the uneven position of the frictional fit face relation of both sides.Figure 14 (A)～(D) is the example that expression is driven the multiple shape of parts, and expression respectively is driven the cross section of parts and driving direction quadrature.The cross section that is driven parts 126 of Figure 14 (A) expression Figure 12.This cross section that is driven parts 126 forms triangle as mentioned above, is that the summit is configured with the right side (outside of lens-mount 118) of scheming.In this case, face 126A, the 126B of frictional fit are the position relation of not parallel (promptly intersect) respectively for driver part 134A, 134B.Figure 14 (B) be change Figure 14 (A) be driven parts 126 towards diagram, it is the triangle on summit that this cross sectional shape that is driven parts 126 is formed with the left side of scheming (inboard of lens-mount 118).In this case, side 126A, the 126B that is driven parts 126 also is uneven position relation.Be driven parts 142 shown in Figure 14 (C), its cross sectional shape forms trapezoidal, and driver part 134A, 134B frictional fit are on the two sides 142A, the 142B that tilt.In this case, two sides 142A, 142B also are uneven position relation.The cross sectional shape that is driven parts 144 shown in Figure 14 (D) forms trapezoidal that a side 142B making rectangle tilts.In this case, two sides 144A, 144B also are uneven position relation.As mentioned above, for multiple cross sectional shape be driven parts 126,142,144, can both prevent and rock.
In addition, in the above-described 3rd embodiment, the example by the order impressed voltage of piezoelectric element 132A, 132B has been described, but also can be by the order impressed voltage of piezoelectric element 132B, 132A.
In addition, in the 3rd embodiment, add to the shape of waveform of the driving pulse of piezoelectric element 132A, 132B outward, be not limited to above-mentioned rectangular-shaped example.For example, shown in Fig. 4 (A), (B), also can add identical shaped driving pulse to piezoelectric element 132A, 132B simultaneously.
Below, the driver of the 4th～the 7th embodiment is described.The the 4th～the 7th embodiment and the 1st embodiment shown in Figure 1 constitute lens devices in the same manner.Below, about the additional prosign explanation of the component parts identical with the 1st embodiment.
Figure 15 is the stereographic map of the driver 30 of expression the 4th embodiment, the stereographic map that expression is observed from the direction different with Fig. 1.Below, be the example explanation with the driver 30 that drives lens-mount 18, but also can similarly constitute the driver 30 that drives lens-mount 20.
As shown in figure 15, driver 30 mainly is made of piezoelectric element 32A, 32B, driver part 34A, 34B and holddown spring 36. Piezoelectric element 32A, 32B clip and are driven plate 26 ground and are configured in both sides, and the mode that becomes the length direction (being driving direction) that is driven plate 26 with its displacement direction disposes simultaneously.On a side's of the displacement direction of each piezoelectric element 32A, 32B end face, driver part 34A, 34B are installed integratedly, on the opposing party's end face, dispose fixed part 238 integratedly.Fixed part 238 is fixed on the shell body 12 by screw 240,240.
Go up the outstanding roughly hemispheric jut 242 that forms at the frictional fit face (promptly being driven the face of plate 26 sides) of each driver part 34A, 34B.Each driver part 34A, 34B are connected to via this jut 242 and are driven on the plate 26, and driver part 34A, 34B and be driven plate 26 are with a state of contact frictional fit.
In addition, in Figure 15, as to being driven the recline mechanism that reclines of driver part 34A, 34B of plate 26, the example that adopts holddown spring 36 is shown, but also can be by other mechanism that reclines, elastic body such as compression spring or rubber for example, driver part 34A, 34B recline separately.
To above-mentioned piezoelectric element 32A, 32B, for example, add the voltage of driving pulse shown in Figure 3.
Below, the effect of the driver 30 that as above constitutes is described.
So in the present embodiment, be driven plate 26 and contact with driver part 34A, 34B point owing to make, roughly maintenance is necessarily all the time for the friction force that therefore is driven plate 26 and driver part 34A, 34B.Thereby, by piezoelectric element 32A, 32B are added certain voltage, generally can move and be driven plate 26, thereby can High Accuracy Control be driven the amount of movement of plate 26 with certain speed.
In addition, present embodiment, owing to recline with general holddown spring 36 driver part 34A, 34B, the friction force that therefore respectively is driven plate 26 and driver part 34A, 34B is roughly even.Thereby each piezoelectric element 32A, 32B equate the amount of movement that is driven plate 26, thereby more High Accuracy Control is driven the amount of movement of plate 26.
In addition, in the present embodiment, because being driven plate 26 extends setting on driving direction, driver part 34A, 34B and the frictional fit face that is driven plate 26 are to remain at certain locational structure with respect to piezoelectric element 32A, 32B, therefore described frictional fit face can be remained on piezoelectric element 32A, 32B near.Thereby, since can be on driver part unattenuatedly with the vibration transfer of piezoelectric element to being driven plate, so, can make also that to be driven plate 26 mobile really even piezoelectric element 32A, 32B are added the driving pulse of high frequency.Therefore, even low-voltage also can high-speed mobile be driven plate 26.
In addition, in the above-described 4th embodiment, the shape of jut 242 is formed hemispherical, but the shape of jut 242 also is not limited to this, so long as can make driver part 34A, 34B and to be driven 26 shapes that contact of plate just passable.Therefore, for example also can form jut 242 conical.
In addition, in above-mentioned the 4th embodiment, on the frictional fit face of each driver part 34A, 34B, only form a jut 242, but also can form two or three.Under the situation that forms three juts 242, preferably dispose three juts 242 in the mode that is out of line.In these cases, because driver part 34A, 34B and to be driven the friction force of plate 26 roughly certain, so can accurately be driven moving of plate 26.
In addition, the 4th above-mentioned embodiment forms the frictional fit face that is driven plate 26 plane, but also is not limited to this.For example, on the frictional fit face that is driven plate 26 shown in Figure 16, form groove 244 along the length direction (being driving direction) that is driven plate 26.Groove 244 and the cross sectional shape driving direction quadrature form little circular-arc of the curvature of ratio of curvature jut 242, but at the inside of this groove 244 butt jut 242.Thereby, because hemispheric jut 242 is connected on the little circular-arc groove 244 of curvature, thus driver part 34A, 34B be driven 26 of plates and contact.In addition, by at the inside of groove 244 butt jut 242, can prevent driver part 34A, 34B and be driven rocking of plate 26.
Figure 17 is the stereographic map of formation of the driver of expression the 5th embodiment.
As shown in the drawing, the 5th embodiment forms projecting strip part 246 on the frictional fit face of each driver part 34A, 34B.Projecting strip part 246 forms towards the length direction (being driving direction) that is driven plate 26, with the cross sectional shape formation semicircle shape of driving direction quadrature.Thereby, form and to be driven plate 26 and driver part 34A, 34B in driving direction line state of contact.Therefore, be driven plate 26 even move to driving direction, the friction force that is driven plate 26 and driver part 34A, 34B also can keep roughly certain all the time.In addition, driver part 34A and be driven friction force, the driver part 34 of plate 26 and be driven the friction force of plate 26 can be roughly even.Thereby, according to the 5th embodiment, can accurately be driven moving of plate 26.
In addition, in the 5th embodiment, also can face driving direction and form circular-arc groove 244 (with reference to Figure 16), make projecting strip part 246 frictional fit in this groove 244 in the frictional fit that is driven plate 26.In this case, the curvature of the cross sectional shape of preferred groove 244 thus, is driven plate 26 and can contacts by line with driver part 34A, 34B less than the curvature of the cross sectional shape of projecting strip part 246, and it is roughly certain that friction force keeps.In addition, owing to projecting strip part 246 is connected on the circular-arc groove in cross section 244, so can prevent to be driven rocking of plate 26 and driver part 34A, 34B.
Figure 18 is the stereographic map of formation of the driver of expression the 6th embodiment.
As shown in the drawing, the 6th embodiment is being driven formation projecting strip part 252 on the frictional fit face of plate 26.Projecting strip part 252 forms towards the length direction (being driving direction) that is driven plate 26, with the cross sectional shape formation semicircle shape of driving direction quadrature.In addition, via this projecting strip part 252, butt is driven plate 26 and driver part 34A, 34B.Thereby, form and to be driven plate 26 and driver part 34A, 34B in driving direction line state of contact.Therefore, be driven plate 26 even move to driving direction, the friction force that is driven plate 26 and driver part 34A, 34B also can keep roughly certain all the time.In addition, driver part 34A and be driven friction force, the driver part 34 of plate 26 and be driven the friction force of plate 26 can be roughly even.Thereby, according to the 6th embodiment, can accurately be driven moving of plate 26.
In addition, in above-mentioned the 6th embodiment, also can form circular-arc groove, make to be driven plate 26 and to be connected in this groove at the frictional fit face of driver part 34A, 34B.In this case, preferred, form groove along driving direction, its cross sectional shape forms curvature circular-arc less than the curvature of the cross sectional shape of projecting strip part 252.Thus, be driven plate 26 and can contact by line, can roughly keep friction force definitely, can prevent to be driven simultaneously rocking of plate 26 and driver part 34A, 34B with driver part 34A, 34B.
In addition, in the 4th～the 6th above-mentioned embodiment, illustrate with optical axis and drive the example that is driven parts (being driven plate 26) abreast, but the driving direction that is driven parts also is not limited to this, for example, also can drive to direction with light shaft positive cross.In addition, also can drive in the mode that is driven the parts rotation.As long as above-mentioned groove 244, projecting strip part 246,252 form just passable along driving direction.
Figure 19 is the stereographic map of formation of the driver of expression the 7th embodiment.
As shown in the drawing, the 7th embodiment is driven parts 254 and forms cylindric.Be driven parts 254, the mode parallel with optical axis with its direction of principal axis disposes, and is fixed on the lens-mount 18.In addition, driver part 34A, 34B form circular-arc curved surface with the frictional fit face 256A, the 256B that are driven parts 254, and its curvature is less than the curvature of the cross sectional shape that is driven parts 254.Therefore, be driven parts 254 and driver part 34A, 34B, with line state of contact frictional fit.
According to the 7th embodiment that as above constitutes, contact with driver part 34A, 34B line owing to be driven parts 254, so friction force can roughly keep necessarily, can accurately be driven moving of parts 254.In addition, because columned circular-arc curved surface 256A, the 256B butt that is driven parts 254 and driver part 34A, 34B, so can prevent to be driven rocking of parts 254 and driver part 34A, 34B.
In addition, in the 4th～the 7th above-mentioned embodiment, add to the shape of waveform of the driving pulse of piezoelectric element 32A, 32B outward, be not limited to above-mentioned rectangular-shaped example.For example also can add the driving pulse of shape shown in Fig. 4 (A), (B).
Below, the 8th embodiment of driver of the present invention is described.The 8th embodiment, same with the 1st embodiment, by formation lens devices shown in Figure 1, by formation basic comprising shown in Figure 2.In addition, piezoelectric element 32A, 32B are added the voltage of the driving pulse of shape shown in Figure 4.
In the lens devices of the 8th embodiment, as shown in figure 20, the position detecting mechanism of the position of detecting lens- mount 18,20 is set.As the position detecting mechanism of the position of detecting lens-mount 18, adopt the reflective optical system 340 of reflection-type, as the position detecting mechanism of the position of detecting lens-mount 20, adopt the optical chopper 342 of transmission-type.Figure 21 represents the front view of the lens devices of Figure 20.
The as above position detecting mechanism of Gou Chenging, owing to be driven the occulter of plate 26 double as optical choppers 342 usefulness, so do not need to be provided with in addition occulter.In addition, owing to directly detect the position that is driven plate 26 that drives by driver 30 with optical chopper 342, so can accurately carry out position probing.
In addition, reflective optical system 340, along with lens-mount 20 one be driven plate 26, dispose abreast with driver 30.Reflective optical system 340 has light-projecting portion and light accepting part, from the reflection of light light that light-projecting portion sends, detects its light quantity in light accepting part acceptance, so constitutes.In addition, reflective optical system 340 is supported on the holding components 344 that cap 14 (with reference to Fig. 1) go up to install, and is driven the configuration of plate 26 subtends.
Reflecting plate 346 is installed on the side of the reflective optical system 340 that is driven plate 26.The length direction that is driven plate 26 in reflecting plate 346 upper edges sets a plurality of reflecting bodys 348 at certain intervals.Thereby the reflecting body 348 by with reflective optical system 340 detection of reflected plates 346 can detect the amount of movement that is driven plate 26.
The as above position detecting mechanism of Gou Chenging owing to reflecting plate 346 is set being driven on the plate 26, does not therefore need to be provided with in addition the reflection part of reflective optical system 340 usefulness.In addition, owing to directly detect the position that is driven plate 26 that drives by driver 30 with reflective optical system 340, so can accurately carry out position probing.
Below, the effect of the lens devices that as above constitutes is described.
Figure 22 represents lens devices as a comparative example, with the front view of the lens devices of general method installation site testing agency.Lens devices shown in this figure, position detecting mechanism are that reflective optical system 340 and optical chopper 342 are configured in the vacant space, below.Reflective optical system 340 is fixed on the shell body 12 (with reference to Fig. 1) by the holding components 352 of L shape, and optical chopper 342 directly is fixed on the shell body 12 (with reference to Fig. 1).In optical chopper 342, insert the occulter of extracting 350 and be integrally formed on the lens-mount 20, on optical axis direction, extend setting.In addition, the reflecting plate 346 of reflective optical system 340 usefulness is supported on the holding components 354 that is integrally formed on the lens-mount 18, and this holding components 354 and reflecting plate 346 extensions are arranged on optical axis direction.
Therefore, the occulter 350 of the lens devices of Figure 22 and the holding components 354 of reflecting plate 346 extend setting at optical axis direction, need big space.In addition,, move along optical axis direction, therefore also need to guarantee its space with lens- mount 18,20 because occulter 350 and holding components 354 be integrally formed on the lens-mount 18,20.So the lens devices of Figure 22 has below lens- mount 18,20 needs big space, the problem that lens devices is maximized.
To this, the lens devices of Figure 20 and present embodiment shown in Figure 21, utilize along optical axis direction extend be provided be driven plate 26, constitute position detecting mechanism.That is, in the position detecting mechanism of lens-mount 18 sides, be driven the occulter of plate 26 double as optical choppers 342 usefulness, in the position detecting mechanism of lens-mount 20 sides, be driven the reflecting plate 346 that reflective optical system 340 usefulness are set on the plate 26.Therefore, do not need the holding components 354 of occulter shown in Figure 22 350 or reflecting plate 346, thereby can make the lens devices miniaturization.
So according to the lens devices of present embodiment be driven plate 26 and constitute position detecting mechanisms owing to utilize, therefore can contracted position testing agency the space is set, thereby can make the lens devices miniaturization.In addition, in the present embodiment, owing in the adjacent vacant space of driver 30, dispose optical chopper 342 or reflective optical system 340, thus can make lens devices miniaturization more.
In addition, in the present embodiment, owing to directly detect the position that is driven plate 26 of moving by driver 30 with optical chopper 342 or reflective optical system 340, so can accurately measure the amount of movement that is driven plate 26.Thereby, can by Control Driver 30, carry out the drive controlling of lens- mount 18,20 accurately based on the detected value of optical chopper 342 or reflective optical system 340.
In addition, above-mentioned the 8th embodiment is as the position detecting mechanism employing reflective optical system 340 of lens-mount 18, position detecting mechanism as lens-mount 20 adopts optical chopper 342, but also be not limited to this, also can both sides all adopt reflective optical system 340, or all adopt optical chopper 342.
In addition, above-mentioned the 8th embodiment adds roughly jagged driving pulse to piezoelectric element 32A, 32B, but the shape of the driving pulse that adds also is not limited to this.For example, also can add the driving pulse shown in Fig. 3 (A), (B).
Claims (21)
1. driver, have: piezoelectric element, one be installed in driver part on this piezoelectric element, extend being driven parts and being driven the mechanism that reclines that parts push away described driver part to described of being provided with this driver part frictional fit the time on driving direction, it is characterized in that:
Described piezoelectric element and described driver part are set up a plurality of, and are configured in the described both sides that are driven parts, and this is driven parts and is carried out frictional fit by described driver part from sandwich.
2. driver as claimed in claim 1 is characterized in that: described a plurality of driver parts are general leaf spring clamping by the described mechanism that reclines, and with the described parts frictional fit that is driven.
3. driver as claimed in claim 1, it is characterized in that: the described mechanism that reclines has two clamping parts, the mode that applies elastic force with the direction to the interval that subtracts narrow these two clamping parts constitutes, described two clamping parts push different driver parts respectively and install in the mode of this driver part of clamping.
4. driver as claimed in claim 1 is characterized in that: described driver is to make one be installed in the driver that lens that the described lens-mount that is driven on the parts moves along optical axis move usefulness.
5. the manufacture method of a driver, this driver has: a plurality of piezoelectric elements, one be installed in a plurality of driver parts on these a plurality of piezoelectric elements, with should be a plurality of on driving direction, extend setting the driver part frictional fit time be driven parts and timing in accordance with regulations control part to the voltage of described a plurality of piezoelectric element applying pulse waveforms, described piezoelectric element and described driver part are configured in the described both sides that are driven parts, this is driven parts and is carried out frictional fit by described driver part from sandwich, it is characterized in that:
Described control part is to described piezoelectric element impressed voltage, so that the deformation velocity of the elongation of described piezoelectric element when shrinking is different, and when deformation velocity is slow, on described a plurality of piezoelectric elements, regularly equate, regularly inequality on described a plurality of piezoelectric elements when deformation velocity is fast.
6. the manufacture method of a driver, have: a plurality of piezoelectric elements, one be installed in a plurality of driver parts on these a plurality of piezoelectric elements, with should be a plurality of on driving direction, extend setting the driver part frictional fit time be driven parts and timing in accordance with regulations to the control part of the voltage of described a plurality of piezoelectric element applying pulse waveforms, it is characterized in that:
Described control part is to described piezoelectric element impressed voltage, so that the deformation velocity of the elongation of described piezoelectric element when shrinking is different, and when deformation velocity is slow, on described a plurality of piezoelectric elements, regularly equate, regularly inequality on described a plurality of piezoelectric elements when deformation velocity is fast.
7. the manufacture method of driver as claimed in claim 6 is characterized in that: described driver is to make one be installed in the driver that lens that the described lens-mount that is driven on the parts moves along optical axis move usefulness.
8. driver has: piezoelectric element, one are installed in the driver part on this piezoelectric element and extend the parts that are driven that are provided with this driver part frictional fit the time on driving direction, it is characterized in that:
Described piezoelectric element and described driver part are set up a plurality of, and be configured in the described both sides that are driven parts, from the described parts that are driven of sandwich, is non-parallel be formed on the described frictional fit face that be driven the described driver part of parts both sides simultaneously with these a plurality of driver parts.
9. driver as claimed in claim 8 is characterized in that: the described parts that are driven form the triangular column, and described frictional fit face is the two side faces of described triangular prism.
10 drivers as claimed in claim 8 is characterized in that: described driver is to make one be installed in the driver that lens that the described lens-mount that is driven on the parts moves along optical axis move usefulness.
11. a driver has: piezoelectric element, one be installed in driver part on this piezoelectric element, extend the parts that are driven that are provided with this driver part frictional fit the time on driving direction, it is characterized in that:
On the friction fit face of described driver part, form jut, described driver part is contacted with the described parts that are driven via this jut.
12. driver as claimed in claim 11 is characterized in that: described piezoelectric element and described driver part are located at the described both sides that are driven parts, described be driven parts by described driver part from sandwich.
13. a driver has: piezoelectric element, one be installed in driver part on this piezoelectric element, extend the parts that are driven that are provided with this driver part frictional fit the time on driving direction, it is characterized in that:
On the frictional fit face of described driver part,, described driver part is contacted with the described parts that are driven via this projecting strip part along the outstanding projecting strip part that forms of driving direction.
14. driver as claimed in claim 13 is characterized in that: described piezoelectric element and described driver part are located at the described both sides that are driven parts, described be driven parts by described driver part from sandwich.
15. a driver has: piezoelectric element, one are installed in the driver part on this piezoelectric element and extend the parts that are driven that are provided with this driver part frictional fit the time on driving directions, it is characterized in that:
On the frictional fit face of described driver part,, the described parts that are driven are contacted with described driver part via this projecting strip part along the outstanding projecting strip part that forms of driving direction.
16. driver as claimed in claim 15 is characterized in that: described piezoelectric element and described driver part are located at the described both sides that are driven parts, described be driven parts by described driver part from sandwich.
17. a driver has: piezoelectric element, one be installed in driver part on this piezoelectric element, extend the parts that are driven that are provided with this driver part frictional fit the time on driving direction, it is characterized in that:
Described be driven parts form cylindric, simultaneously at the described driving direction in the frictional fit face upper edge of described driver part to form the circular-arc groove in cross section, the described parts that are driven of frictional fit in this groove than the described little curvature of curvature that is driven parts.
18. driver as claimed in claim 17 is characterized in that: described piezoelectric element and described driver part are located at the described both sides that are driven parts, described be driven parts by described driver part from sandwich.
19. lens devices, have: piezoelectric element, one be installed in driver part on this piezoelectric element, the power by described piezoelectric element when extending being driven parts and one and being installed in this and being driven on the parts of being provided with along driving direction with this driver part frictional fit the time is along the lens-mount that optical axis direction moves, and it is characterized in that:
Adopt the described position detecting mechanism that parts form the position of detecting described lens-mount that is driven.
20. lens devices as claimed in claim 19 is characterized in that: described position detecting mechanism is the optical chopper that is driven parts as the transmission-type of occulter with described.
21. lens devices as claimed in claim 19 is characterized in that: described position detecting mechanism is at the described reflective optical system that forms the reflection-type of reflecting surface on the parts that is driven.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004174184 | 2004-06-11 | ||
| JP2004174183 | 2004-06-11 | ||
| JP2004174185 | 2004-06-11 | ||
| JP2004174183A JP2005354829A (en) | 2004-06-11 | 2004-06-11 | Actuator and its control method |
| JP2004175649 | 2004-06-14 | ||
| JP2004175651 | 2004-06-14 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1715983A true CN1715983A (en) | 2006-01-04 |
| CN100485433C CN100485433C (en) | 2009-05-06 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2005100761060A Expired - Fee Related CN100485433C (en) | 2004-06-11 | 2005-06-08 | Actuator and its control method for same |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP2005354829A (en) |
| CN (1) | CN100485433C (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101620309B (en) * | 2008-06-30 | 2011-03-23 | 鸿富锦精密工业（深圳）有限公司 | Clamping device and zooming device with same |
| CN101354470B (en) * | 2007-07-26 | 2011-06-15 | 三美电机株式会社 | Drive apparatus and position detecting device used by drive apparatus |
| CN101047346B (en) * | 2006-03-30 | 2011-09-21 | 富士能株式会社 | Driving apparatus |
| CN102445739A (en) * | 2010-10-12 | 2012-05-09 | 亚洲光学股份有限公司 | Clamping jaw module |
| CN102455475A (en) * | 2010-10-20 | 2012-05-16 | 亚洲光学股份有限公司 | Clamping jaw module |
| CN102460935A (en) * | 2009-06-05 | 2012-05-16 | 株式会社尼康 | Piezoelectric actuator, lens barrel, and camera |
| CN101291121B (en) * | 2007-04-20 | 2012-12-19 | 三美电机株式会社 | Method for driving a driving device |
| CN101995632B (en) * | 2009-08-18 | 2013-02-27 | 三星电机株式会社 | Camera module |
| CN114942505A (en) * | 2021-02-08 | 2022-08-26 | 宁波舜宇光电信息有限公司 | Zoom camera module |
| CN115561874A (en) * | 2018-08-13 | 2023-01-03 | 米尼斯怀斯股份公司 | Ultrasonic motor, lens driving device, camera module, and camera mounting device |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100649756B1 (en) | 2005-11-09 | 2006-11-27 | 삼성전기주식회사 | Device for lens transfer |
| CN105444694A (en) * | 2015-12-21 | 2016-03-30 | 中国科学院长春光学精密机械与物理研究所 | Nanoscale optical element surface shape detection supporting tool of deep UV projection photoetching objective lens |
-
2004
- 2004-06-11 JP JP2004174183A patent/JP2005354829A/en active Pending
-
2005
- 2005-06-08 CN CNB2005100761060A patent/CN100485433C/en not_active Expired - Fee Related
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101047346B (en) * | 2006-03-30 | 2011-09-21 | 富士能株式会社 | Driving apparatus |
| CN101291121B (en) * | 2007-04-20 | 2012-12-19 | 三美电机株式会社 | Method for driving a driving device |
| CN101354470B (en) * | 2007-07-26 | 2011-06-15 | 三美电机株式会社 | Drive apparatus and position detecting device used by drive apparatus |
| CN101620309B (en) * | 2008-06-30 | 2011-03-23 | 鸿富锦精密工业（深圳）有限公司 | Clamping device and zooming device with same |
| CN102460935B (en) * | 2009-06-05 | 2015-01-07 | 株式会社尼康 | Piezoelectric actuator, lens barrel, and camera |
| CN102460935A (en) * | 2009-06-05 | 2012-05-16 | 株式会社尼康 | Piezoelectric actuator, lens barrel, and camera |
| CN101995632B (en) * | 2009-08-18 | 2013-02-27 | 三星电机株式会社 | Camera module |
| CN102445739A (en) * | 2010-10-12 | 2012-05-09 | 亚洲光学股份有限公司 | Clamping jaw module |
| CN102445739B (en) * | 2010-10-12 | 2013-04-24 | 亚洲光学股份有限公司 | Clamping jaw module |
| CN102455475B (en) * | 2010-10-20 | 2013-10-23 | 亚洲光学股份有限公司 | Clamping jaw module |
| CN102455475A (en) * | 2010-10-20 | 2012-05-16 | 亚洲光学股份有限公司 | Clamping jaw module |
| CN115561874A (en) * | 2018-08-13 | 2023-01-03 | 米尼斯怀斯股份公司 | Ultrasonic motor, lens driving device, camera module, and camera mounting device |
| CN114942505A (en) * | 2021-02-08 | 2022-08-26 | 宁波舜宇光电信息有限公司 | Zoom camera module |
| CN114942505B (en) * | 2021-02-08 | 2023-10-27 | 宁波舜宇光电信息有限公司 | Variable-focus camera module |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2005354829A (en) | 2005-12-22 |
| CN100485433C (en) | 2009-05-06 |
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