CN1714416A - Solid electrolytic capacitor - Google Patents
Solid electrolytic capacitor Download PDFInfo
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- CN1714416A CN1714416A CN 200380103655 CN200380103655A CN1714416A CN 1714416 A CN1714416 A CN 1714416A CN 200380103655 CN200380103655 CN 200380103655 CN 200380103655 A CN200380103655 A CN 200380103655A CN 1714416 A CN1714416 A CN 1714416A
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- electrolytic capacitor
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- 239000003990 capacitor Substances 0.000 title claims abstract description 89
- 239000007787 solid Substances 0.000 title claims abstract description 47
- 239000011888 foil Substances 0.000 claims abstract description 41
- 239000010936 titanium Substances 0.000 claims abstract description 39
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 38
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 38
- 150000004767 nitrides Chemical class 0.000 claims abstract description 16
- 150000002736 metal compounds Chemical class 0.000 claims abstract description 10
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 7
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 22
- 229920000642 polymer Polymers 0.000 claims description 17
- 229910010037 TiAlN Inorganic materials 0.000 claims description 5
- ZVWKZXLXHLZXLS-UHFFFAOYSA-N zirconium nitride Chemical compound [Zr]#N ZVWKZXLXHLZXLS-UHFFFAOYSA-N 0.000 claims description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 claims 2
- YTPLMLYBLZKORZ-UHFFFAOYSA-N Thiophene Chemical compound C=1C=CSC=1 YTPLMLYBLZKORZ-UHFFFAOYSA-N 0.000 claims 2
- 239000003792 electrolyte Substances 0.000 claims 2
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims 1
- 239000002131 composite material Substances 0.000 abstract 2
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 abstract 1
- UMUXBDSQTCDPJZ-UHFFFAOYSA-N chromium titanium Chemical compound [Ti].[Cr] UMUXBDSQTCDPJZ-UHFFFAOYSA-N 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 229920001940 conductive polymer Polymers 0.000 abstract 1
- PMTRSEDNJGMXLN-UHFFFAOYSA-N titanium zirconium Chemical compound [Ti].[Zr] PMTRSEDNJGMXLN-UHFFFAOYSA-N 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 description 14
- 230000008020 evaporation Effects 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000002184 metal Substances 0.000 description 12
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- 239000005030 aluminium foil Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000007733 ion plating Methods 0.000 description 5
- LWLURCPMVVCCCR-UHFFFAOYSA-N iron;4-methylbenzenesulfonic acid Chemical compound [Fe].CC1=CC=C(S(O)(=O)=O)C=C1 LWLURCPMVVCCCR-UHFFFAOYSA-N 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- YMMGRPLNZPTZBS-UHFFFAOYSA-N 2,3-dihydrothieno[2,3-b][1,4]dioxine Chemical compound O1CCOC2=C1C=CS2 YMMGRPLNZPTZBS-UHFFFAOYSA-N 0.000 description 3
- NLZUEZXRPGMBCV-UHFFFAOYSA-N Butylhydroxytoluene Chemical compound CC1=CC(C(C)(C)C)=C(O)C(C(C)(C)C)=C1 NLZUEZXRPGMBCV-UHFFFAOYSA-N 0.000 description 3
- 238000005470 impregnation Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000011259 mixed solution Substances 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 238000005070 sampling Methods 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- AZQWKYJCGOJGHM-UHFFFAOYSA-N 1,4-benzoquinone Chemical compound O=C1C=CC(=O)C=C1 AZQWKYJCGOJGHM-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical class CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000003085 diluting agent Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910017464 nitrogen compound Inorganic materials 0.000 description 2
- 150000002830 nitrogen compounds Chemical class 0.000 description 2
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012719 thermal polymerization Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 238000006701 autoxidation reaction Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000001182 laser chemical vapour deposition Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229920000128 polypyrrole Polymers 0.000 description 1
- 230000007115 recruitment Effects 0.000 description 1
- 238000000518 rheometry Methods 0.000 description 1
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Abstract
A solid electrolytic capacitor (1) comprises a capacitor device (2) wherein an anode foil (4) and a cathode foil (5) are rolled while having a separator (6) interposed therebetween and a solid electrolyte layer or a conductive polymer layer is formed inside. A coating composed of a nitride of a composite metal compound containing titanium is formed on the cathode foil (5). The nitride of a composite metal compound is an aluminum titanium nitride, a chromium titanium nitride, a zirconium titanium nitride or a titanium carbonitride.
Description
Technical field
The solid electrolytic capacitor that the present invention relates to reel anode foils and Cathode Foil and form.
Background technology
Fig. 2 is the sectional front view of solid electrolytic capacitor 1 in the past, and Fig. 1 is the stereogram (with reference to Japan's patent announcement communique flat 4-19695 number) of capacitor element 2.
This solid electrolytic capacitor 1 is taken in capacitor element 2 in the case 3 of the aluminum of opening in the above, the opening of sealing gasket 30 stuffing boxs 3 of rubber system.The upper end and the fixing seal pad 30 of crooked case 3, the plastic seat board 31 of installation on case 3.Behind lead 21, the 21 perforation sealing gaskets 30 and seat board 31 of capacitor element 2 extensions, to horizontal bending.
As shown in Figure 1, capacitor element 2, to batch as the anode foils 4 of the aluminium foil that forms dielectric oxide film thereon with as the Cathode Foil 5 of aluminium foil by dividing plate (separator) 6 and to be tubular as the insulator of paper etc., end and constitute with belt 26, comprise the solid electrolyte of TCNQ (7,7,8,8-four cyanogen quinone bismethanes) complex salt etc. in inside, perhaps form the electroconductive polymer layer.Draw a pair of seeker 25,25 from anode foils 4 and Cathode Foil 5, above-mentioned lead 21,21 extends from this seeker 25,25.
Form the electroconductive polymer layer on 4,5 on two paper tinsels, with capacitor element 2 impregnated in as diluent comprise the n-butanols 3, in the mixed solution of 4-Ethylenedioxy Thiophene and p-toluenesulfonic acid iron, carry out thermal polymerization.
Though above-mentioned solid electrolytic capacitor 1 is widely used, from the angle big capacity of expectation and the small-sized capacitor in market.At this, the scheme that has proposed on Cathode Foil 5 to form the tunicle that constitutes by metal nitride as described below (with reference to Japan's patent disclosure communique 2000-114108 number).
Explanation forms the tunicle that is made of metal nitride on Cathode Foil 5, with the principle of capacitor high capacity.Though generally on Cathode Foil 5, be not intended to form dielectric oxide film thereon, in fact form oxide film thereon by autoxidation.Thereby the electrostatic capacitance C of capacitor becomes the electric capacity behind the electrostatic capacitance Cc of the electrostatic capacitance Ca of series connection anode foils 4 sides and Cathode Foil 5 sides, is expressed from the next.
C＝Ca×Cc/(Ca+Cc)＝Ca×1/(Ca/Cc+1)
If promptly Cathode Foil 5 has electrostatic capacitance Cc, then the electrostatic capacitance C of capacitor is littler than the electrostatic capacitance Ca of anode foils 4 sides.
But, as shown in Figure 4,, then infer the molecule breakthrough oxide film thereon 51 of metal nitride if on Cathode Foil 5, forms the tunicle 52 of the metal nitride of TiN etc. by sputtering method or evaporation, be connected with the aluminum substrate of Cathode Foil 5.Therefore, matrix and metal nitride conducting, Cathode Foil 5 does not have electric capacity.Thus, it is big that the profile of capacitor does not become, and make electrostatic capacitance become big.
But there is following problem in above-mentioned formation.
When forming capacity cell 2, if wrapped up in the Cathode Foil 5 of the tunicle 52 that forms metal nitride, then when reeling owing to put on the tension force or the distortion power of Cathode Foil 5, tunicle 52 is stripped from, crack in tunicle 52 simultaneously, its result produces the big problem of electric leakage rheology.Also have, form the electroconductive polymer layer on 4,5 on two paper tinsels, though with capacitor element 2 impregnated in 3, in the mixed solution of 4-Ethylenedioxy Thiophene and p-toluenesulfonic acid iron, but because the solution acidic degree of this p-toluenesulfonic acid iron is strong, therefore tunicle 52 is etched, and causes producing the problem that leakage current increases.
In addition, form the Cathode Foil 5 of the tunicle 52 of metal nitride from the teeth outwards, along with the time changes, the surface is oxidized.Therefore, Cathode Foil 5 has electrostatic capacitance, the possibility that exists the electrostatic capacitance of solid electrolytic capacitor 1 to diminish.
Summary of the invention
The object of the present invention is to provide a kind of leakage current that do not make to increase, keep the solid electrolytic capacitor of big electric capacity and low ESR (equivalent serial resistance).
Solid electrolytic capacitor 1 has capacitor element 2, and wherein, described capacitor element 2 is situated between and is batched anode foils 4 and Cathode Foil 5 and constituted by dividing plate 6, and forms solid electrolyte layer or electroconductive polymer layer in inside.On Yin Ji Be 5, form the tunicle that the nitride by the complex metal compound that comprises titanium constitutes.
In addition, on Yin Ji Be 5, form the tunicle that constitutes by titanium nitride, on described Yin Ji Be 5, form titanium layer in the inboard of titanium nitride layer.
Description of drawings
Fig. 1 is the stereogram of capacitor element in the past.
Fig. 2 is the sectional front view of solid electrolytic capacitor in the past.
Fig. 3 is the skeleton diagram of a part of section of expression capacitor element.
Fig. 4 is that the tunicle of expression metal nitride is broken through the cutaway view that oxide film thereon arrives matrix.
Fig. 5 is the stereogram of expression scratch test.
Embodiment
(the 1st embodiment)
Below, an example of the present invention is described with reference to the accompanying drawings.
The global shape of solid electrolytic capacitor 1 is identical with finished product in the past shown in Figure 2.As shown in Figure 1, capacitor element 2, be via as the dividing plate 6 of insulator will as formation change into tunicle aluminium foil anode foils 4 and batch as the Cathode Foil 5 of aluminium foil and to be tubular, end with belt 26 again and constitute.Solid electrolyte at the inside of capacitor 2 impregnation TCNQ complex salt etc. perhaps forms the electroconductive polymer layer.Couple of conductor 21,21 is extended from capacitor element 2.
On Cathode Foil 5, form tunicle as titanium Ti film and titanium nitride membrane, as mentioned above, Cathode Foil 5 does not have electrostatic capacitance thus.
In addition, on the surface of Cathode Foil 5, by evaporation titanium in a vacuum and stacked titanium, also have by evaporation titanium nitride in a vacuum and stacked titanium nitride.The evaporation of titanium nitride is undertaken by evaporation titanium in nitrogen or ammonia gas medium.In order to prevent to form oxide layer, at the titanium layer poststack, by then in vacuum tank, importing nitrogen, evaporation titanium, stacked titanium nitride at the titanium layer poststack.In titanium and titanium nitride stacked, can use the vapour deposition method of electron beam evaporation plating or arc plasma evaporation etc., also can not use vapour deposition method in addition, and use laminating methods such as sputtering method or CVD method.
Jie is by the dividing plate 6 as insulator, anode foils 4 and Cathode Foil 5 batched be tubular, ends with belt 26.As mentioned above, owing to anode foils 4 is to cut out from the aluminum thin plate to make, therefore on the end face of anode foils 4, do not form dielectric oxide film thereon.Thereby the otch that carries out capacitor element 2 changes into, and forms dielectric oxide film thereon on the end face of anode foils 4.After this, capacitor element 2 is heat-treated, make the stability of characteristics of dielectric oxide film thereon with 280 ℃.
Then, as diluent comprise the n-butanols 3, in the mixed solution of 4-Ethylenedioxy Thiophene and p-toluenesulfonic acid iron, behind the dipping capacitor element 2, carry out thermal polymerization, 4,5 of Zai Liang Be form electroconductive polymer layer 50, finish capacitor element 2.With identical in the past, capacitor element 2 is enclosed in the above-mentioned chest 3, finish solid electrolytic capacitor 1.
In this example, though the electroconductive polymer that is by poly-thiophene phenol forms electroconductive polymer layer 50, also can use the electroconductive polymer of polypyrrole system or polyphenylamine series.In addition, the solid electrolyte layer that also can form TCNQ complex salt etc. replaces the electroconductive polymer layer.
Fig. 3 is a part of profile of the capacitor element 2 after the impregnation operation.On the surface of Yin Ji Be 5, by evaporation titanium in a vacuum and stacked titanium, also have by evaporation titanium nitride in a vacuum and stacked titanium nitride.If analyze the section of Yin Ji Be 5, then as shown in Figure 3, be formed at Yin Ji Be 5 upper films and change continuously to titanium layer 54 from titanium nitride layer 53 towards Yin Ji Be 5, the border of these layers is not conclusivelyed show.This is because paying the nitrogen of the titanium nitride on titanium layer, is diffused into the cause in the titanium layer when the titanium nitride evaporation or in the manufacturing process of solid electrolytic capacitor thereafter.
Below, reality is made solid electrolytic capacitor of the present invention and the solid electrolytic capacitor of structure and the result who tests described in the past.
The solid electrolytic capacitor that table 1 expression is made is in the electrical characteristics value in initial stage (the making afterwards soon) state.Example 1 was the solid electrolytic capacitor that etched Lv Be is used in Yin Ji Be in the past, example 2 was to have formed the solid electrolytic capacitor that titanium film De Lv Be uses as Yin Ji Be in the past, and example 3 was to have formed the solid electrolytic capacitor that titanium nitride membrane De Lv Be uses as Yin Ji Be in the past.Embodiment is the top solid electrolytic capacitor of the present invention that has illustrated.Any all has diameter 6.3mm, height 6.0mm, rated voltage 4V, rated capacity 150 μ F solid electrolytic capacitor 1.
μ F), tan δ represents dielectric loss (unit: %), ESR represents equivalent serial resistance (unit: m Ω), LC represents leakage current (unit: μ A) in table 1, Cap represents the electrostatic capacitance (unit: of capacitor.Each measured value of record is the mean value that 40 samplings are calculated in table 1.Electrostatic capacitance and dielectric loss are with the frequency measurement of 120Hz.Equivalent serial resistance is with the frequency measurement of 100kHz.Leakage current is applied to specified direct voltage on the solid electrolytic capacitor 1 and measures through the value after two minutes.
Table 1
| Yin Ji Be | ??Cap ??(μF) | ??Tanδ ??(％) | ??ESR ??(mΩ) | ??LC ??(μA) | ??ΔC/C ??(％) | |
| Example 1 in the past | De Lv Be after the etch processes | ??151.4 | ??2.8 | ??33.7 | ??25 | ??-5.2 |
| Example 2 in the past | De Lv Be behind the evaporation titanium | ??219.9 | ??2.0 | ??33.2 | ??19 | ??-4.2 |
| Example 3 in the past | De Lv Be behind the evaporation titanium nitride | ??227.3 | ??1.9 | ??34.0 | ??30 | ??-3.4 |
| Embodiment | Aluminium film behind evaporation titanium and the titanium nitride | ??253.7 | ??1.7 | ??34.2 | ??20 | ??-2.1 |
According to table 1, the electrostatic capacitance of embodiment and example 2 and example 3 comparisons in the past in the past are big by about 10% as can be known.The dielectric loss of embodiment is compared with example in the past, reduces.The equivalent serial resistance of embodiment is with relatively routine in the past, though increased, recruitment is very small.The leakage current of embodiment and only the titanium film is formed 2 one-tenth same degree of example in the past of Lv Be, with example 1 in the past and in the past example 3 compare and become smaller value.As mentioned above,, the electrical characteristics of dielectric loss etc. are worsened, can make the initial electrostatic electric capacity of solid electrolytic capacitor 1 become big according to the present invention.
After the mensuration shown in the table 1, example is in the past carried out long duration test with the capacitor of embodiment.Long duration test is carried out under the condition that with 1000 hours rated voltage 4V is applied under 125 ℃ the temperature on the capacitor.Electrostatic capacitance, the value of equivalent serial resistance and the rate of change Δ C/C of electrostatic capacitance before and after the table 2 expression test.Identical with table 1, each measured value is the mean value that 40 samplings are calculated.As known from Table 2, in solid electrolytic capacitor of the present invention, the absolute value of the rate of change of electrostatic capacitance is littler than solid electrolytic capacitor in the past, after endurance test, also keeps big electrostatic capacitance value.In addition, equivalent serial resistance after the long duration test all is the value with degree in example and embodiment in the past, according to the present invention, do not make equivalent serial resistance relatively in the past example become poorer, the change degree that changes through the time of the electrostatic capacitance of solid electrolytic capacitor 1 is diminished.
Table 2
| Initial stage | After the test | ||||
| ??Cap ??(μF) | ??ESR ??(mΩ) | ??Cap ??(μF) | ??ΔC/C ??(％) | ??ESR ??(mΩ) | |
| Example 1 in the past | ??151.4 | ??33.7 | ??143.5 | ??-5.2 | ??35.6 |
| Example 2 in the past | ??219.9 | ??33.2 | ??210.7 | ??-4.2 | ??35.2 |
| Example 3 in the past | ??227.3 | ??34.0 | ??219.6 | ??-3.4 | ??35.9 |
| Embodiment | ??253.7 | ??34.2 | ??248.4 | ??-2.1 | ??35.7 |
(the 2nd embodiment)
In this example, has following characteristics: constitute in the following manner as Yin Ji Be 5, that is, form on the surface of Zai Lv Be by ion plating and forms tunicle by the nitride formation of the complex metal compound of the titanium that comprises TiAlN (TiAlN), nitrogenize network titanium (TiCrN) etc.Lv Be can carry out etch processes in advance, also can not carry out.In the capacitor element 2 that forms batching Yang Ji Be 4 and Yin Ji Be 5, the operation of impregnation electroconductive polymer and oxidant is identical with embodiment 1, and the ethanolic solution of the p-toluenesulfonic acid iron of use 40-60 percentage by weight is as oxidizing agent solution.
In addition, the formation method of tunicle is the evaporation of ion plating, and this ion plating is any in direct current method, high-frequency method, cluster ion beam vapour deposition method, the hot cathode method also.In addition, also can adopt vacuum vapour deposition, sputtering method, hot CVD, plasma CVD, optical cvd, laser CVD, replace ion plating, form tunicle.But, infer that the comparable sputtering method of ion plating more can strengthen the intensity of tunicle driving fit on aluminum substrate.
The applicant with following content as embodiment 1: adopt the Yin Ji Be 5 that forms the tunicle that constitutes by TiAlN (TiAlN), make capacitor element 2, finish the making of solid electrolytic capacitor.
In addition, the applicant with following content as embodiment 2: adopt the Yin Ji Be 5 that forms the tunicle that constitutes by nitrogenize network titanium (TiCrN), make capacitor element 2, finish the making of solid electrolytic capacitor.In addition, according to the mode of in the example in the past 3 of above-mentioned the 1st embodiment, using, with form titanium nitride membrane De Lv Be as the solid electrolytic capacitor 1 of Yin Ji Be 5 as routine in the past.
Any overall dimension that all has rated voltage 6.3V, electrostatic capacitance 180 μ F, a case 3 of solid electrolytic capacitor 1 is the capacitor of diameter 6.3mm, height 6.0mm.
Embodiment and in the past in the capacitor of example with the frequency measurement electrostatic capacitance of 120Hz (Cap, unit: μ F), with the frequency measurement equivalent serial resistance (ESR, the m Ω of unit) of 100kHz.In addition, after dc rated voltage is applied 2 minutes, measure leakage current (LC, unit: μ A).In table 3, represent measurement result.The electrical characteristics value is the mean value of 20 samplings.
Table 3
| ??Cap ??(μF) | ??ESR ??(mΩ) | ??LC ??(μA) | Scratch test critical load (N) | |
| Routine in the past embodiment 1 | ??185 ??220 ??221 | ??11.8 ??10.7 ??10.6 | ??27 ??0.7 ??0.8 | ??60.3 ??80.3 ??82.5 |
In this table, as shown in Figure 5, so-called scratch test is a drill lip 9 of pushing wedge shape on Yin Ji Be 5, and draws with constant speed (about 2mm/sec), applies load from this drill lip 9, the load when the mensuration tunicle is peeled off.
According to above-mentioned comparative result as can be known, if increase to the dhering strength of the tunicle of aluminum substrate, then can increase the electric capacity of solid electrolytic capacitor 1, reduce equivalent serial resistance and leakage current.Also have, the capacitor element 2 of the solid electrolytic capacitor 1 that in above-mentioned mensuration, is adopted, though form by the Yin Ji Be 5 that has formed the tunicle that constitutes by nitrogenize network titanium, even but can infer the tunicle that on Yin Ji Be 5, forms by zirconium nitride titanium (TiZrN), titanium carbonitride (TiCN) formation, also can obtain same result.
Promptly, in the tunicle that the nitride by the complex metal compound that comprises titanium constitutes is formed at solid electrolytic capacitor 1 on the Yin Ji Be 5, by non-stoichiometric (can not represent merely with chemical formula) nitrogen compound is formed on the Yin Ji Be 5, can improve adaptation aluminum substrate, tunicle of Dui Yin Ji Be 5.In addition, contact with air and oxidation, carry out the passive state membranization, make the bonding force grow between the metallic molecule in the composition metal by the metal that makes a part that in complex metal compound, comprises.Its result has improved the corrosion stability of tunicle.
Therefore, when coiling Yin Ji Be 5, reduce producing the possibility of breaking when tunicle is peeled off.In addition, when forming the electroconductive polymer layer, also reduced the possibility that tunicle is etched.Thus, the leakage current of solid electrolytic capacitor 1 is increased, can reach big electric capacityization, low ESRization.
The explanation of the foregoing description is not limited to the invention of being put down in writing in the scope of patent request.For example, the top opening of case 3 also can be stopped up by epoxy resin.Also have, the shape of capacitor is radial lead type also.
(industrial utilizability)
1, in the tunicle that the nitride by the complex metal compound that comprises titanium consists of is formed at solid electrolytic capacitor 1 on the Yin Ji Be 5, by non-stoichiometric (can not represent merely with chemical formula) nitrogen compound is formed on the Yin Ji Be 5, can improve adaptation aluminum substrate, tunicle of Dui Yin Ji Be 5. In addition, by metal and contact with air and the oxidation that makes a part that in complex metal compound, comprises, carry out the passive state membranization, make the bonding force grow between the metallic molecule in the composition metal. Its result has improved the corrosion stability of tunicle.
Therefore, when coiling Yin Ji Be 5, reduce producing the possibility of breaking when tunicle is peeled off. In addition, when forming the electroconductive polymer layer, also reduced the possibility that tunicle is etched. Thus, the leakage current of solid electrolytic capacitor 1 is increased, can reach large electric capacity, low ESRization.
2, arrange in the solid electrolytic capacitor 1 of titanium layer and titanium nitride layer at Yin Ji Be 5, the electrostatic capacitance of solid electrolytic capacitor is compared with the solid electrolytic capacitor 1 that uses the Yin Ji Be 5 that titanium layer or titanium nitride layer only are set and have been reduced over time. In addition, by at Yin Ji Be 5 titanium layer and titanium nitride layer being set, compare with solid electrolytic capacitor 1 in the past, it is large that the initial electrostatic electric capacity of solid electrolytic capacitor 1 becomes.
Claims (5)
1, a kind of solid electrolytic capacitor has capacitor element (2), and described capacitor element (2) is situated between and is batched anode foils (4) and Cathode Foil (5) and constituted by dividing plate (6), and its inside is formed with solid electrolyte layer or electroconductive polymer layer, it is characterized in that,
On Yin Ji Be (5), form the tunicle that the nitride by the complex metal compound that comprises titanium constitutes.
2, according to the solid electrolytic capacitor described in the claim 1, it is characterized in that,
The nitride that comprises the complex metal compound of titanium is any in TiAlN, chromium nitride titanium, zirconium nitride titanium, the titanium carbonitride.
3, a kind of solid electrolytic capacitor, has capacitor element (2), described capacitor element (2) is situated between and is batched anode foils (4) and Cathode Foil (5) and constituted by dividing plate (6), and its inside is formed with solid electrolyte layer or electroconductive polymer layer, in addition, on Yin Ji Be (5), be formed with the tunicle that constitutes by titanium nitride
On described Yin Ji Be (5), be formed with titanium layer in the inboard of titanium nitride layer.
4, according to the solid electrolytic capacitor described in the claim 1, it is characterized in that,
It is electroconductive polymer that electrolyte in the capacitor element (2) uses poly-thiophene phenol.
5, according to the solid electrolytic capacitor described in the claim 3, it is characterized in that,
It is electroconductive polymer that electrolyte in the capacitor element (2) uses poly-thiophene phenol.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002334662 | 2002-11-19 | ||
| JP334662/2002 | 2002-11-19 | ||
| JP67501/2003 | 2003-03-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1714416A true CN1714416A (en) | 2005-12-28 |
| CN100521012C CN100521012C (en) | 2009-07-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003801036551A Expired - Lifetime CN100521012C (en) | 2002-11-19 | 2003-11-17 | Solid electrolytic capacitor |
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| Country | Link |
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| CN (1) | CN100521012C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1862729B (en) * | 2006-06-12 | 2010-09-15 | 万裕三信电子(东莞)有限公司 | High-specific volume cathode foil solid electrolytic capacitor and preparing method thereof |
| CN101752091B (en) * | 2008-12-08 | 2012-03-14 | 财团法人工业技术研究院 | Compound cathode foil and solid electrolytic capacitor comprising same |
| US8644006B2 (en) | 2008-11-26 | 2014-02-04 | Industrial Technology Research Institute | Composite cathode foils and solid electrolytic capacitors comprising the same |
| CN110785826A (en) * | 2017-08-17 | 2020-02-11 | 日本贵弥功株式会社 | Capacitor and method for manufacturing the same |
-
2003
- 2003-11-17 CN CNB2003801036551A patent/CN100521012C/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1862729B (en) * | 2006-06-12 | 2010-09-15 | 万裕三信电子(东莞)有限公司 | High-specific volume cathode foil solid electrolytic capacitor and preparing method thereof |
| US8644006B2 (en) | 2008-11-26 | 2014-02-04 | Industrial Technology Research Institute | Composite cathode foils and solid electrolytic capacitors comprising the same |
| CN101752091B (en) * | 2008-12-08 | 2012-03-14 | 财团法人工业技术研究院 | Compound cathode foil and solid electrolytic capacitor comprising same |
| CN110785826A (en) * | 2017-08-17 | 2020-02-11 | 日本贵弥功株式会社 | Capacitor and method for manufacturing the same |
| CN110785826B (en) * | 2017-08-17 | 2022-06-21 | 日本贵弥功株式会社 | Capacitor and method for manufacturing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100521012C (en) | 2009-07-29 |
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