CN1699140A - Electro-thermal actuated and flexible hinged support lever type polysillicon microgripper - Google Patents
Electro-thermal actuated and flexible hinged support lever type polysillicon microgripper Download PDFInfo
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- CN1699140A CN1699140A CN 200510027270 CN200510027270A CN1699140A CN 1699140 A CN1699140 A CN 1699140A CN 200510027270 CN200510027270 CN 200510027270 CN 200510027270 A CN200510027270 A CN 200510027270A CN 1699140 A CN1699140 A CN 1699140A
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Abstract
This invention relates to a flexible hinged support lever-type micro-clamp of electric heating actuated polysilicon, comprising micro-actuating mechanism and micro-gripper mechanism which are two polysilicon accurate machine constructions formed by polysilicon construture layer accumulated on the vertical rectangular base; wherein, said micro-actuating mechanism is electric heating type. The invention can be compatible with manufacturing technique of integrated circuit; it has large driving force to maintain a lasting and steady clamping force of micro-clamp; it can be widely applied to the fields of medical appliance and biological scientific instruments.
Description
Technical field
The present invention relates to a kind of micro mechanism clamper, particularly a kind of electro-thermal actuated and flexible hinged support lever type polysillicon microgripper.
Background technology
Micromechanics clamper self size can be used under clamping micron, the submicron-scale object such as micro-scales such as biological cell, pathogen, big molecule and micro powder granules generally below the millimeter level.Chang-Jin Kim, Albert Pisano etc. has introduced a kind of electrostatic silicon micro-clamp in the literary composition of " Polysilicon Microgripper " (Solid-State Sensor and Actuator Workshop, Hilton HeadIsland, USA, 1990).This micro-clamp adopts static comb dentation electrode drive, owing to be to adopt static driven, thereby driving voltage is higher, electrostatic clamp power is big inadequately, the response speed of static driven is very fast, also is unfavorable for the buffering of micro-clamp holding action.Chris Keller etc. are at " Nickel-filled HEXSILthermally actuated tweezers " (The 8th International Conference on Solid-State Sensors andActuators, and Europe IX, Stockholm, Sweden, 1995) introduced a kind of thermal actuation HEXSIL micro-clamp in the literary composition, because this micro-clamp is to adopt nickel to make, overall volume is relatively large, and is difficult to and ic process compatibility.
Summary of the invention
The object of the present invention is to provide a kind of electro-thermal actuated and flexible hinged support lever type polysillicon microgripper, has relatively large actuating force, have lasting, stable chucking power in the time of can guaranteeing micro-clamp work, overall volume is less relatively, can be compatible mutually with ic manufacturing process.
For achieving the above object, design of the present invention is:
Task of the present invention be to set up a kind of can with ic manufacturing process polysilicon micro-mechanical device compatible mutually, that electric heating microactuator and little fixture can be combined as a whole.Employing electric heating activates, and can control the clamp holding action by input voltage on the one hand, and thermal actuator can have relatively large actuating force on the other hand, has lasting, stable chucking power in the time of can guaranteeing micro-clamp work.Can adopt manufacturing process with the IC compatibility to be expected to and control circuit is partly integrated is produced on the same chip, can realize production low-costly and in high volume this micromechanics mechanism.
Characteristics of the present invention are, actuating mechanism, fixture all adopt heavily doped polysilicon to make, the film-type micro-clamp thickness that wherein adopts the surface silicon sacrifice layer process to make is 0.5～5 micron, and the micro-clamp thickness that adopts bulk silicon technological to make is 5～80 microns.Be divided into driving mechanism and fixture on the micro-clamp structure, driving mechanism is a polysilicon electric heating microactuator, fixture is polysilicon beam leverage and polysilicon flexure hinge mechanism, two parts are combined as a whole, but have made full use of the resistance pyrogenicity characteristic of micromechanics flexure hinge mechanism and leverage and polysilicon beam self.This micro-clamp contour structures is simple, compact, thermal actuation mechanism is done heating arrangements from holding, can carry out the accurate operation of holding action by the control input voltage, be to be controlled by the control power supply in the external world by the fixed electrode on the chip at present, easy to use, flexible.In addition, this micro-clamp operating voltage low (5～25 volts), compatible substantially with the integrated circuit operating voltage, if can be produced on the same chip with control circuit is integrated, can become an independently chip system after the encapsulation, then in medical sanitary apparatus, biotechnology instrument, application prospect be arranged.
According to above-mentioned design, the present invention adopts following technical proposals:
A kind of electro-thermal actuated and flexible hinged support lever type polysillicon microgripper, comprise microactuator and little fixture, its feature is two polysilicon micromechanics mechanisms that deposit polysilicon structure layer is constituted in the vertical rectangle substrate by at described microactuator and little fixture; Described microactuator is the electric heating actuating mechanism.
The structure of above-mentioned microactuator is: in the bottom of substrate the polysilicon fixed electrode is arranged, at the middle part of substrate the polycrystal fixed electrode is arranged; Two symmetrical polysilicon walking beams are arranged, and its lower end is connected with the polysilicon fixed electrode of bottom, and its upper end is hinged with the both ends of middle part polycrystal fixed electrode, thereby constitutes the electric heating driving element.
The structure of above-mentioned little fixture is: two symmetrical polysilicon beams, its lower end is connected with described two the symmetrical polysilicon walking beams of difference, constitute the sinking support leverage, and its upper end bending makes two ends approaching, constitute micro-clamp mechanism.
Above-mentioned substrate is a monocrystal silicon substrate, and one deck base insulating layer is arranged on this monocrystal silicon substrate, and each fixedlys connected with substrate through described base insulating layer behind one deck conductor layer bottom polysilicon fixed electrode more respectively with middle part polysilicon fixed electrode; Described two polysilicon walking beams are two polysilicon combination beams, the polysilicon combination beam is that two parallel polysilicon inner beam and Wai Liang combine, its lower end is all hinged with lower end polycrystal fixed electrode, and the upper end of its outer beam is connected with the polysilicon beam of little fixture and is hinged with middle part polysilicon fixed electrode, and the upper end of its inner beam connects and middle part polysilicon fixed electrode is hinged; Upper surface at described base insulating layer conductor layer and two polysilicon fixed electrodes has silicon nitride dielectric layer.
Above-mentioned substrate is a substrate of glass, and bottom polysilicon fixed electrode directly is fixed on the substrate of glass, and middle part polysilicon fixed electrode is fixedlyed connected with substrate of glass through conductor layer; Article two, fixedly connected with bottom polycrystal fixed electrode in the lower end of symmetrical polycrystal walking beam, and fixedly connected with the polysilicon beam of little fixture and be hinged with middle part polysilicon fixed electrode in the upper end.
Above-mentioned articulated structure is: connect with the polysilicon structure layer, have in its cross section to constitute flexible hinge with the narrow thin segment of arc transition.
The present invention compared with prior art, have following conspicuous outstanding substantive distinguishing features and remarkable advantage: microactuator of the present invention and little fixture are designed to an integral body, and be the polysilicon micromechanics mechanism of deposit in substrate, overall volume is less, can be compatible mutually with ic manufacturing process.Its microactuator is the electric heating actuating mechanism, has bigger actuating force, has lasting, stable chucking power in the time of can guaranteeing micro-clamp work, in medical sanitary apparatus, biotechnology instrument field bigger application prospect is arranged.
Description of drawings
Fig. 1 is the structural representation of one embodiment of the invention.
Fig. 2 is the cutaway view at C-C place among Fig. 1.
Fig. 3 is the partial enlarged drawing at A place and B place among Fig. 1, and the flexible, hinged structure is shown, and figure a is an A place partial enlarged drawing, and scheming b is B place partial enlarged drawing.
Fig. 4 is the structural representation of another embodiment of the present invention.
Fig. 5 is the cutaway view at D-D place among Fig. 4.
Embodiment
A preferred embodiment of the present invention is: referring to Fig. 1, Fig. 2 and Fig. 3, this electro-thermal actuated and flexible hinged support lever type polysillicon microgripper includes microactuator 2 and little fixture 1, and this microactuator 2 and little fixture 1 are two polysilicon micromechanics mechanisms that are made of deposit polysilicon structure layer in the vertical rectangle substrate 7; Described microactuator 2 is the electric heating actuating mechanism.The structure of above-mentioned microactuator 2 is: in the bottom of substrate 7 polysilicon fixed electrode 3 is arranged, at the middle part of substrate 7 polycrystal fixed electrode 5 is arranged; Two symmetrical polysilicon walking beams 4 are arranged, and its lower end is connected with the polysilicon fixed electrode 3 of bottom, and its upper end is hinged with the both ends of middle part polysilicon fixed electrode 5, thereby constitutes the electric heating driving element.The structure of above-mentioned little fixture 1 is: two symmetrical polysilicon beams, its lower end be connected with described two symmetrical polysilicon walking beams 4 respectively, constitute the sinking support leverage, and its upper end bending makes two ends approaching, constitute micro-clamp mechanism.Above-mentioned substrate 7 is a monocrystal silicon substrate, and one deck base insulating layer 9 is arranged on this monocrystal silicon substrate, and each fixedlys connected with substrate 7 through described base insulating layer 9 behind one deck conductor layer 8 bottom polysilicon fixed electrode 3 more respectively with middle part polysilicon fixed electrode 5; Described two polysilicon walking beams 4 are two polysilicon combination beams, the polysilicon combination beam is that two parallel polysilicon inner beam and Wai Liang combine, its lower end is all hinged with lower end polysilicon fixed electrode 3, and the upper end of its outer beam is connected with the polysilicon beam 6 of little fixture 1 and is hinged with middle part polysilicon fixed electrode 5, and the upper end of its inner beam is connected with middle part polysilicon fixed electrode 5; Upper surface at described base insulating layer 9, conductor layer 8 and two polysilicon fixed electrodes 3,5 has silicon nitride dielectric layer 10.Above-mentioned substrate 7 is a monocrystal silicon substrate, and bottom polysilicon fixed electrode 3 directly is fixed on the monocrystal silicon substrate, and middle part polysilicon fixed electrode 5 is fixedlyed connected with monocrystal silicon substrate through conductor layer 8; Article two, fixedly connected with bottom polysilicon fixed electrode 3 in the lower end of symmetrical polycrystal walking beam 4, and fixedly connected with the polysilicon beam 6 of little fixture 1 and be hinged with middle part polysilicon fixed electrode 5 in the upper end.Above-mentioned electro-thermal actuated and flexible hinged support lever type polysillicon microgripper is characterized in that described hinged structure is: connect with the polysilicon structure layer, have in its cross section to constitute flexible hinge with the narrow thin segment of arc transition.
This electro-thermal actuated and flexible hinged support lever type polysillicon microgripper is the film-type electro-thermal actuated and flexible hinged support lever type polysillicon microgripper, length overall is 960 microns, beam overall is 320 microns, the width of polysilicon beam is 14 microns, polysilicon layer by deposit forms through processing steps such as photoetching, doping, etchings, as anchor point movable part partly is suspended on the substrate with fixed electrode.Entire mechanism is to be substrate with monocrystalline silicon, adopts the surface silicon sacrifice layer process to make.Driving mechanism is the electric heating microactuator that two groups of polysilicon combination beams constitute, its as heating element again as driving element, form the lever enlarger with the little beam of clamping part again simultaneously, entire device is combined into electric heating micro-actuator, polysilicon beam leverage, micromechanics flexure hinge mechanism together, and mechanism is simplified.When applying control during voltage by the external world by fixed electrode, the thermal actuator action, the displacement of generation drives the closed action that clamping part is realized micro-clamp through polysilicon beam leverage, after voltage is removed, by the elastic return effect of beam clamp is opened.Can design different chucking powers and clamping displacement by adjustment, indicate among the figure that it is the polysilicon flexure hinge mechanism that the position of A, B is arranged the leverage size.
See Fig. 2 and Fig. 3, this micro-clamp that the surface silicon sacrifice layer process is made is at first to produce the ground floor polysilicon conducting layers to be used for being electrically connected on monocrystal silicon substrate, and then deposit second layer polysilicon formation fixed electrode and movable part part, make polysilicon components layer and bottom surface realize insulation with silicon nitride layer therebetween.Fig. 3 is the partial enlarged drawing of polysilicon flexible hinge, because polycrystalline silicon material has higher modulus of elasticity, therefore leverage adopts this flexible hinge to be easier to realize the amplification of displacement and the transmission of power, and the microparticle that has produced owing to friction, wearing and tearing when having avoided motion simultaneously is to the pollution of clean environment and clamping object.
Referring to Fig. 3 and Fig. 4, an alternative embodiment of the invention and the foregoing description are basic identical, institute's difference is: described substrate 7 is substrate of glass, and bottom polysilicon fixed electrode 3 directly is fixed on the substrate of glass, and middle part polysilicon fixed electrode 5 is fixedlyed connected with substrate of glass through conductor layer 8; Article two, fixedly connected with bottom polysilicon fixed electrode 3 in the lower end of symmetrical polysilicon walking beam 4, and fixedly connected with the polysilicon beam 6 of little fixture 1 and be hinged with middle part polysilicon fixed electrode 5 in the upper end.
Present embodiment is the electro-thermal actuated and flexible hinged support lever type polysillicon microgripper that adopts bulk silicon technological to make, be as substrate with glass, the polysilicon of 80 micron thickness is as construction material, its manufacturing process be in advance at sputter conductive layer on the substrate of glass as the electrical connection between the member, finish element manufacturing by bonding between polysilicon member and the substrate of glass at last.The micro-clamp that the micromechanics clamp that bulk silicon technological is made is made with respect to the face silicon technology has bigger chucking power.
Claims (6)
1. electro-thermal actuated and flexible hinged support lever type polysillicon microgripper, comprise microactuator (2) and little fixture (1), its feature is to go up two polysilicon micromechanics mechanisms that deposit polysilicon structure layer is constituted by a vertical rectangle substrate (7) at described microactuator (2) and little fixture (1); Described microactuator (2) is the electric heating actuating mechanism.
2. electro-thermal actuated and flexible hinged support lever type polysillicon microgripper according to claim 1, the structure that it is characterized in that described microactuator (2) is: in the bottom of substrate (7) polysilicon fixed electrode (3) is arranged, at the middle part of substrate (7) polycrystal fixed electrode (5) is arranged; Two symmetrical polysilicon walking beams (4) are arranged, and its lower end is connected with the polysilicon fixed electrode (3) of bottom, and its upper end is hinged with the both ends of middle part polycrystal fixed electrode (5), thereby constitutes the electric heating driving element.
3. electro-thermal actuated and flexible hinged support lever type polysillicon microgripper according to claim 2, the structure that it is characterized in that described little fixture (1) is: two symmetrical polysilicon beams, its lower end is connected with described two the symmetrical polysilicon walking beams of difference (4), constitute the sinking support leverage, and its upper end bending makes two ends approaching, constitutes micro-clamp mechanism.
4. according to claim 1 or 2 or 3 described electro-thermal actuated and flexible hinged support lever type polysillicon microgrippers, it is characterized in that described substrate (7) is monocrystal silicon substrate, one deck base insulating layer (9) is arranged on this monocrystal silicon substrate, and each fixedlys connected with substrate (7) through described base insulating layer (9) behind one deck conductor layer (8) bottom polysilicon fixed electrode (3) more respectively with middle part polysilicon fixed electrode (5); Described two polysilicon walking beams (4) are two polysilicon combination beams, the polysilicon combination beam is that two parallel polysilicon inner beam and Wai Liang combine, its lower end is all hinged with lower end polysilicon fixed electrode (3), and the upper end of its outer beam is connected with the polysilicon beam (6) of little fixture (1) and is hinged with middle part polysilicon fixed electrode (5), and the upper end of its inner beam and middle part polysilicon fixed electrode (5) are hinged; Upper surface in described base insulating layer (9), conductor layer (8) and two polysilicon fixed electrodes (3), (5) has silicon nitride dielectric layer (10).
5. according to claim 1 or 2 or 3 described electro-thermal actuated and flexible hinged support lever type polysillicon microgrippers, it is characterized in that described substrate (7) is at the bottom of the glass, bottom polysilicon fixed electrode (3) directly is fixed on the substrate of glass, and middle part polysilicon fixed electrode (5) is fixedlyed connected with substrate of glass through conductor layer (8); Article two, fixedlying connected with bottom polysilicon fixed electrode (3) in the lower end of symmetrical polycrystal walking beam (4), and fixedlys connected with the polysilicon beam (6) of little fixture (1) and be hinged with middle part polysilicon fixed electrode (5) in the upper end.
6. according to claim 2 or 3 described electro-thermal actuated and flexible hinged support lever type polysillicon microgrippers, it is characterized in that described articulated structure is: connect with the polysilicon structure layer, have in its cross section to constitute flexible hinge with the narrow thin segment of arc transition.
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| CN 200510027270 CN1699140A (en) | 2005-06-29 | 2005-06-29 | Electro-thermal actuated and flexible hinged support lever type polysillicon microgripper |
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| CN 200510027270 CN1699140A (en) | 2005-06-29 | 2005-06-29 | Electro-thermal actuated and flexible hinged support lever type polysillicon microgripper |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103288041A (en) * | 2013-05-14 | 2013-09-11 | 西安交通大学 | V-shaped-structure MEMS (micro-electromechanical system) actuator for detonating sequence |
| CN103288041B (en) * | 2013-05-14 | 2015-11-25 | 西安交通大学 | One is detonated sequence V-structure MEMS actuator |
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