CN1676201A - Waste gas washing apparatus and cleaning method of its packing material - Google Patents
Waste gas washing apparatus and cleaning method of its packing material Download PDFInfo
- Publication number
- CN1676201A CN1676201A CN 200410033252 CN200410033252A CN1676201A CN 1676201 A CN1676201 A CN 1676201A CN 200410033252 CN200410033252 CN 200410033252 CN 200410033252 A CN200410033252 A CN 200410033252A CN 1676201 A CN1676201 A CN 1676201A
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- China
- Prior art keywords
- scrubbing tower
- cleaning
- packing material
- exhaust air
- solution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 title claims abstract description 86
- 238000005406 washing Methods 0.000 title claims abstract description 56
- 239000002912 waste gas Substances 0.000 title claims abstract description 47
- 238000004140 cleaning Methods 0.000 title claims description 87
- 238000012856 packing Methods 0.000 title claims description 74
- 238000000034 method Methods 0.000 title claims description 42
- 239000012459 cleaning agent Substances 0.000 claims abstract description 62
- 238000005201 scrubbing Methods 0.000 claims description 111
- 239000000243 solution Substances 0.000 claims description 65
- 239000003599 detergent Substances 0.000 claims description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 17
- QWPPOHNGKGFGJK-UHFFFAOYSA-N hypochlorous acid Chemical compound ClO QWPPOHNGKGFGJK-UHFFFAOYSA-N 0.000 claims description 16
- 239000011259 mixed solution Substances 0.000 claims description 14
- 239000007921 spray Substances 0.000 claims description 5
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 claims 2
- 239000000203 mixture Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 16
- 230000006378 damage Effects 0.000 description 8
- 230000002378 acidificating effect Effects 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 241000282326 Felis catus Species 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000284 extract Substances 0.000 description 4
- 230000001473 noxious effect Effects 0.000 description 4
- 238000003915 air pollution Methods 0.000 description 3
- 238000004061 bleaching Methods 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000000809 air pollutant Substances 0.000 description 1
- 231100001243 air pollutant Toxicity 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Images
Landscapes
- Gas Separation By Absorption (AREA)
- Treating Waste Gases (AREA)
Abstract
The present invention relates to a waste gas washing equipment. Said equipment is formed from at least washing tower, washing liquor supply device, exhaust pipe, waste gas inlet pipe, washing liquor circulating pump and cleaning agent supply device, in which the interior of washing tower is filled up with filling material. Besides, said invention also provides the connection mode of the above-mentioned all the components.
Description
Technical field
The present invention relates to a kind of waste gas treatment equipment, the cleaning method of particularly a kind of exhaust air-washing facility and packing material thereof.
Background technology
The technology waste gas that the general industry process is produced generally includes noxious material and has stink, if waste gas will cause air pollution not through dealing carefully with.And, if the noxious material concentration in the waste gas surpasses the limit value of rules and regulations, just may endanger Plant personnel and grass-roots healthy.In order to control air pollutants, must utilize prevention and cure of air pollution device processes waste gas, so that the noxious material concentration in the waste gas is lower than the limit value of rules and regulations, the prevention and cure of air pollution equipment commonly used of a kind of industry wherein is the scrubbing tower exhaust treatment system.
General exhaust-gas treatment is with the method purifying exhaust air of liquid scrubbing.At first, cleaning solution injected scrubbing tower after, be delivered to cat head with detergent circulator, and enter in the scrubbing tower by cat head.Then, at the bottom of cleaning solution evenly spills down through flusher and gets back to tower, and then be delivered to cat head by detergent circulator and form a circulation.On the other hand, waste gas is then by importing at the bottom of the tower in the scrubbing tower, upwards flows then and contact with cleaning solution, makes the pollutant (as particulate, acid gas etc.) in the waste gas dissolve in cleaning solution, then discharged by cat head through the gas of purification.
In general, because cleaning solution and waste gas contact area are big more, the waste gas clean result of scrubbing tower can be good more, so scrubbing tower need be designed to have big liquid level area and minimum gas pressure loss usually.In order to achieve the above object, in scrubbing tower, can load packing material usually,, use the detersive efficiency that improves waste gas to increase the exchange area of liquid gas.But since waste gas in acidic materials regular meeting on packing material, form dope, and on the packing material if the accumulation too many dope, can make that just waste gas is difficult for passing through, and then influence the washing process of waste gas.Therefore, must regularly do cleaning to packing material.
The cleaning way of the packing material of prior art be with it by disassembling in the exhaust gas washing tower, utilize in the hydrochloric acid and clean attached dope thereon again.Yet, in the process of cleaning, hydrochloric acid is not spilt in case do not note, just might damage the cleaning personnel.And, also easily it is caused damage in the process of dismounting packing material.The cleaning process of whole packing material need expend many times.
Summary of the invention
Therefore, purpose of the present invention just provides the cleaning method of a kind of exhaust air-washing facility and packing material thereof, can carry out the washing of waste gas and the cleaning of packing material synchronously.
A further object of the present invention provides the cleaning method of a kind of exhaust air-washing facility and packing material thereof, can avoid making cleaning agent damage the staff because of misoperation in cleaning process.
The present invention proposes a kind of exhaust air-washing facility, comprises scrubbing tower, cleaning solution feedway, blast pipe, waste gas ingress pipe, detergent circulator and cleaning agent feedway.Wherein, be filled with packing material in the scrubbing tower.Blast pipe is connected to the top of scrubbing tower, discharging scrubbing tower through the gas that purifies.And waste gas ingress pipe also is connected to scrubbing tower, in order to waste gas is imported scrubbing tower.
The cleaning solution feedway is connected in scrubbing tower, in order to supply with cleaning solution to scrubbing tower.And cleaning solution promptly is the detergent circulator at bottom by connecting scrubbing tower and top and circulating in scrubbing tower.In addition, the cleaning agent feedway is connected with scrubbing tower, and more disposes control valve between cleaning agent feedway and the scrubbing tower.And the cleaning agent feedway is loaded with in order to clean the cleaning agent of packing material.
Because exhaust air-washing facility of the present invention can carry out the cleaning process of packing material synchronously in the process of scrubbing exhaust gas, therefore can save and clean the required consumed time of packing material.Also can avoid packing material in unloading process, to damage, and then increase the service life of packing material.
The present invention also proposes a kind of cleaning method of packing material of exhaust air-washing facility, and the method makes cleaning agent spray into scrubbing tower inside by the scrubbing tower top, so that packing material is cleaned.Wherein, cleaning agent extracts it to the scrubbing tower top by detergent circulator, utilizes flusher to spray in the scrubbing tower again, to clean packing material.
Because the cleaning method of the packing material of exhaust air-washing facility of the present invention can utilize itself original equipment to finish the cleaning of packing material, more can clean packing material synchronously in the washing process of waste gas, and not need additionally to use other device.Therefore, the present invention not only can avoid because of misoperation makes cleaning agent damage the staff, more can save time with reduction technology cost, and increase work efficiency.
For above and other objects of the present invention, feature and advantage can be become apparent, a preferred embodiment cited below particularly, and conjunction with figs. are described in detail below.
Description of drawings
Fig. 1 illustrates the schematic diagram of configuration of equipment of a kind of scrubbing exhaust gas of one embodiment of the present invention.
Fig. 2 illustrates the configuration schematic diagram of equipment of a kind of scrubbing exhaust gas of another preferred embodiment of the present invention.
Description of reference numerals:
100: scrubbing tower
102: the cleaning solution feedway
104: packing material
106: the cleaning agent feedway
108: water filling port
112: blast pipe
114: waste gas ingress pipe
116: tube connector
118,218; Control valve
120: detergent circulator
122: flusher
The specific embodiment
Fig. 1 illustrates the configuration schematic diagram of a kind of exhaust air-washing facility of the present invention's one preferred embodiment.Please refer to Fig. 1, exhaust air-washing facility comprises scrubbing tower 100, cleaning solution feedway 102, blast pipe 112, waste gas ingress pipe 114, detergent circulator 120 and cleaning agent feedway 106 at least.Wherein, be filled with packing material 104 in the scrubbing tower 100, and scrubbing tower 100 tops and dispose a flusher 122.
Waste gas ingress pipe 114 is connected to scrubbing tower 100 1 sides, in order to waste gas is directed in the scrubbing tower 100 so that it is washed.And blast pipe 112 is connected to the top of this scrubbing tower 100, and waste gas is through promptly discharging scrubbing tower 100 by blast pipe 112 after purifying.
In addition, be loaded with in the cleaning agent feedway 106 in order to clean the cleaning agent of packing material 104.And detergent circulator 120 more is connected to cleaning agent feedway 106, and and dispose control valve 118, whether can extract cleaning solution and cleaning agent simultaneously in order to control detergent circulator 120 between the two.
And, exhaust air-washing facility of the present invention except can scrubbing exhaust gas with the dissolving noxious material wherein, can also clean packing material 104 simultaneously, with the sticky thing on the removal packing material 104.And cleaning packing material 104 required cleaning agents utilizes detergent circulator 120 to be injected in the scrubbing tower 100, therefore that not only can save prior art manually pours the required consumed time of cleaning agent into, more can avoid cleaning agent to spill and the staff is damaged.Below will describe the method for utilizing above-mentioned exhaust air-washing facility to come scrubbing exhaust gas in detail.
Referring again to Fig. 1, at first, cleaning solution is injected scrubbing tower 100 by water filling port 108, and be stored in the bottom of scrubbing tower 100 by cleaning solution feedway 102.To contain waste gas importing scrubbing tower 100 inside of alkalescence or acidic materials when waste gas ingress pipe 114 after, waste gas can pass packing material 104 and diffuse to scrubbing tower 100 tops, and part alkalescence or acidic materials in the waste gas then can residue on the packing material 104.On the other hand, detergent circulator 120 can extract the cleaning solution of scrubbing tower 100 bottoms to its top, so that cleaning solution sprays scrubbing tower 100 inside by flusher 122.Wherein, cleaning solution for example is clear water or condensed water.
At this moment,, can open control valve 118, make detergent circulator 120 simultaneously by drawing cleaning agent in the cleaning agent feedway 106, so that cleaning agent and cleaning solution are pumped simultaneously to scrubbing tower 100 tops if need to clean synchronously packing material 104.And then utilize flusher 122 that it is sprayed into scrubbing tower 100 inside.Then cleaning solution be solubilized be present in the waste gas and packing material 104 on alkalescence and acidic materials, and cleaning agent also can be removed acidic materials formed dope on packing material simultaneously.
It should be noted that cleaning agent used in the present invention for example is hypochlorous acid (HClO) solution, the bleaching water that promptly is commonly called as, its extent of injury to human body is low than the employed hydrochloric acid of prior art, and can not corrode washing Tata wall.
Afterwards, used cleaning agent and cleaning solution can together flow to scrubbing tower 100 bottoms, via detergent circulator 120 it are pumped to scrubbing tower 100 tops again, and cleaning agent and cleaning solution are recycled in scrubbing tower 100.The gas that is produced behind the purifying exhaust air is then discharged scrubbing tower 100 by blast pipe 112.
Specifically, the present invention can also be applied to the independent packing material that cleans at the exhaust air-washing facility shown in Fig. 1.Its step as described below.
Please continue with reference to Fig. 1, at first, control valve 118 opened so that detergent circulator 120 with cleaning agent by pumping in the cleaning agent feedway 106 to scrubbing tower 100 tops, and utilize flusher 122 that it is sprayed into scrubbing tower 100 inside, so that packing material is cleaned.
It should be noted that, in the exhaust air-washing facility of the present invention, cleaning agent feedway 106 can also other method of attachment can be pumped to the cleaning solution flusher 122 at scrubbing tower 100 tops cleaning agent by detergent circulator 120 except can being connected directly to detergent circulator 120.Below will lift another preferred embodiment of the present invention to explain.
Fig. 2 illustrates the configuration schematic diagram of a kind of exhaust air-washing facility of another preferred embodiment of the present invention.In the accompanying drawing of present embodiment, the accompanying drawing note is remembered identical person with the accompanying drawing of the accompanying drawing of the foregoing description, and the mode and the function thereof of its running are described as the foregoing description, below will repeat no more.
Please refer to Fig. 2, exhaust air-washing facility comprises scrubbing tower 100, cleaning solution feedway 102, blast pipe 112, waste gas ingress pipe 114, detergent circulator 120 and cleaning agent feedway 106.Wherein, scrubbing tower 100 inside are filled with packing material 104, and scrubbing tower 100 tops more dispose a flusher 122.
Waste gas ingress pipe 114 is connected to a side of scrubbing tower 100, and blast pipe 112 then is connected to the top of this scrubbing tower 100.Cleaning solution feedway 102 is connected in the water filling port 108 on scrubbing tower 100 sidewalls, and detergent circulator 120 then has pump mouth 110 and delivery port 124, and connects the bottom and the flusher 122 of scrubbing tower 100 respectively.
In addition, cleaning agent feedway 106 and cleaning solution feedway together are connected to the water filling port 108 on scrubbing tower 100 sidewalls, and 100 of cleaning agent feedway 106 and scrubbing towers also dispose control valve 218, whether cleaning agent are injected scrubbing tower 100 in order to control.Wherein, cleaning agent for example is a hypochlorous acid solution, the bleaching water that promptly is commonly called as.
Though the configuration of the exhaust air-washing facility of present embodiment is different from the configuration of first embodiment, its effect that can reach also is same as the effect that first embodiment can reach.And the using method of the exhaust air-washing facility of present embodiment and first embodiment are described roughly the same, below will be described in detail at present embodiment and the different part of first embodiment.Other details then as described in first embodiment, below will repeat no more.
Referring again to Fig. 2, in scrubbing exhaust gas,, then need earlier control valve 218 to be opened if desire to clean simultaneously packing material 104, make cleaning agent inject scrubbing tower 100 bottoms and form mixed solution with cleaning solution by cleaning agent feedway 106.By detergent circulator 120 this mixed solution is pumped to flusher 122 then, it is sprayed into scrubbing tower 100 inside.Wherein, cleaning agent for example is a hypochlorous acid solution, promptly is the bleaching water that is commonly called as.
After mixed solution sprayed into scrubbing tower inside, the cleaning solution in the mixed solution was in the solubilized waste gas and alkalescence on the packing material and acidic materials.Cleaning agent then can be removed acidic materials formed dope on packing material 104, and together flow to scrubbing tower 100 bottoms with used cleaning solution, via detergent circulator 120 it is pumped to scrubbing tower 100 tops again, cleaning agent and cleaning solution are recycled in scrubbing tower 100.Then discharge scrubbing tower 100 through the waste gas after purifying by blast pipe 112.
Certainly, described as first embodiment, the waste gas wash mill of present embodiment can also be applied to the independent cleaning process of packing material except the cleaning of the washing that can carry out waste gas simultaneously and packing material.
Please continue with reference to Fig. 2, at first, control valve 218 is opened so that cleaning agent injects scrubbing tower 100 bottoms by cleaning agent feedway 106, utilize detergent circulator 120 to extract cleaning agent again by scrubbing tower 100 bottoms, and utilize flusher 122 that it is sprayed into scrubbing tower 100 inside, so that packing material is cleaned.
The second embodiment of the present invention is directly injected scrubbing tower 100 bottoms with cleaning agent and is formed mixed solution with cleaning solution, by detergent circulator 120 it is recycled in scrubbing tower 100 again.Yet in addition, the present invention can also be connected to cleaning agent feedway 106 cleaning solution feedway 102 or flusher 122, also can reach scrubbing exhaust gas and the effect of cleaning packing material simultaneously.Therefore, as long as cleaning agent can be recycled by detergent circulator 120, all can reach the effect of in the waste gas washing process, cleaning packing material synchronously in scrubbing tower 100.
In sum, because the present invention uses the cleaning agent of safer solvent as packing material, and can in the process of scrubbing exhaust gas, carry out the cleaning process of packing material, the security that can improve working environment synchronously.Therefore, the present invention compares with the technology of prior art, can save the required consumed time of many cleaning packing materials, more can avoid packing material to damage in unloading process, and then increases the service life of packing material.Whole sight, the present invention can save the technology cost, and avoids causing because of misoperation in the process personnel's injury.
Though the present invention with preferred embodiment openly as above; right its is not in order to limit the present invention; those skilled in the art; without departing from the spirit and scope of the present invention; change and retouching when doing some, so protection scope of the present invention is when being as the criterion with the scope that appended claims was defined.
Claims (20)
1. exhaust air-washing facility comprises at least:
One scrubbing tower, described scrubbing tower inside is filled with a packing material;
One blast pipe is connected to the top of described scrubbing tower;
One waste gas ingress pipe is connected to a side of described scrubbing tower;
One cleaning solution feedway is connected in described scrubbing tower to supply with a cleaning solution in described scrubbing tower;
One detergent circulator has a pump mouth and a delivery port, and described pump mouth and described delivery port are connected to the bottom and the top of described scrubbing tower respectively; And
One cleaning agent feedway is connected in described scrubbing tower, and described cleaning agent feedway is loaded with a cleaning agent, and described cleaning agent is in order to clean described packing material.
2. exhaust air-washing facility as claimed in claim 1, wherein said cleaning agent feedway is connected to the described pump mouth of described detergent circulator, is connected to described scrubbing tower by described detergent circulator again.
3. exhaust air-washing facility as claimed in claim 2 comprises between wherein said cleaning agent feedway and described detergent circulator and disposes a control valve.
4. exhaust air-washing facility as claimed in claim 1 wherein more comprises a cleaning solution flusher, is disposed at described scrubbing tower top and is connected to described detergent circulator.
5. exhaust air-washing facility as claimed in claim 4, wherein said cleaning agent feedway are connected to the described cleaning solution flusher at described scrubbing tower top.
6. exhaust air-washing facility as claimed in claim 1, wherein said cleaning agent comprises hypochlorous acid solution.
7. exhaust air-washing facility as claimed in claim 1, wherein said cleaning solution comprise clear water and condensed water one of them.
8. the cleaning method of the packing material of an exhaust air-washing facility comprises:
Spray a cleaning agent on a packing material of described scrubbing tower inside in a scrubbing tower top, in order to clean described packing material.
9. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 8 also comprises:
In the washing process of a waste gas, described cleaning agent mixed and form a mixed solution in the cleaning solution; And
Described mixed solution is sprayed into described scrubbing tower inside, respectively in order to wash described waste gas and described packing material.
10. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 8, the method that wherein forms described mixed solution in the washing process of described waste gas comprises utilizes a detergent circulator to extract described cleaning agent and described cleaning solution simultaneously, makes described cleaning agent and described cleaning solution blend together described mixed solution in described detergent circulator.
11. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 9, the method that wherein forms described mixed solution in the washing process of described waste gas comprises:
Inject described cleaning solution in described scrubbing tower; And
Inject described cleaning agent in described scrubbing tower, make described cleaning agent and described cleaning solution in described scrubbing tower, form described mixed solution.
12. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 9, wherein this cleaning agent comprises hypochlorous acid solution.
13. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 9, wherein said cleaning solution comprise clear water and condensed water one of them.
14. the cleaning method of the packing material of an exhaust air-washing facility comprises:
Supply in solution chlorate's to a scrubbing tower; And
Clean a packing material of described scrubbing tower inside when participating in the cintest with described hypochlorous acid solution.
15. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 14, wherein supply the step of described hypochlorous acid solution to the described scrubbing tower and comprise and utilize a detergent circulator to extract described hypochlorous acid solution, make described hypochlorous acid solution enter described scrubbing tower.
16. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 15, wherein the described packing material step of cleaning described scrubbing tower inside when participating in the cintest with described hypochlorous acid solution comprises and utilizes described detergent circulator that described hypochlorous acid solution is circulated in described scrubbing tower.
17. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 14 is wherein supplied described hypochlorous acid solution to the step in the described scrubbing tower and is comprised:
When carrying out a waste gas washing process, described hypochlorous acid solution is mixed form a mixed solution in the cleaning solution.
18. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 17, wherein the step of cleaning the described packing material of described scrubbing tower inside when participating in the cintest with described hypochlorous acid solution comprises described mixed solution is sprayed into described scrubbing tower inside, respectively in order to wash described waste gas and described packing material.
19. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 17, the method that wherein forms described mixed solution in described waste gas washing process comprises utilizes a detergent circulator to extract described hypochlorous acid solution and described cleaning solution simultaneously.
20. the cleaning method of the packing material of exhaust air-washing facility as claimed in claim 17, wherein said cleaning solution comprise clear water and condensed water one of them.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100332520A CN1302836C (en) | 2004-03-29 | 2004-03-29 | Waste gas washing apparatus and cleaning method of its packing material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100332520A CN1302836C (en) | 2004-03-29 | 2004-03-29 | Waste gas washing apparatus and cleaning method of its packing material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1676201A true CN1676201A (en) | 2005-10-05 |
| CN1302836C CN1302836C (en) | 2007-03-07 |
Family
ID=35049039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004100332520A Expired - Fee Related CN1302836C (en) | 2004-03-29 | 2004-03-29 | Waste gas washing apparatus and cleaning method of its packing material |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1302836C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101890280B (en) * | 2009-05-22 | 2012-07-18 | 东服企业股份有限公司 | Acid and base neutralizing device for semiconductor waste gas treatment |
| CN104030266A (en) * | 2014-05-12 | 2014-09-10 | 中机国宏（北京）高分子裂解技术研究院 | Technology and apparatus for capturing carbon black in process of processing waste and old tires |
| CN105013754A (en) * | 2015-06-24 | 2015-11-04 | 山东华光光电子有限公司 | Online chemical cleaning method for exhaust treatment system of MOCVD device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4708855A (en) * | 1985-11-07 | 1987-11-24 | Passanaquoddy Tribe | Method and system for exhaust gas stream scrubbing |
| US5512072A (en) * | 1994-12-05 | 1996-04-30 | General Electric Environmental Services, Inc. | Flue gas scrubbing apparatus |
-
2004
- 2004-03-29 CN CNB2004100332520A patent/CN1302836C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101890280B (en) * | 2009-05-22 | 2012-07-18 | 东服企业股份有限公司 | Acid and base neutralizing device for semiconductor waste gas treatment |
| CN104030266A (en) * | 2014-05-12 | 2014-09-10 | 中机国宏（北京）高分子裂解技术研究院 | Technology and apparatus for capturing carbon black in process of processing waste and old tires |
| CN105013754A (en) * | 2015-06-24 | 2015-11-04 | 山东华光光电子有限公司 | Online chemical cleaning method for exhaust treatment system of MOCVD device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1302836C (en) | 2007-03-07 |
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Granted publication date: 20070307 Termination date: 20100329 |