CN1657982A - Broadband grating polarizer - Google Patents

Broadband grating polarizer Download PDF

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Publication number
CN1657982A
CN1657982A CN 200410015413 CN200410015413A CN1657982A CN 1657982 A CN1657982 A CN 1657982A CN 200410015413 CN200410015413 CN 200410015413 CN 200410015413 A CN200410015413 A CN 200410015413A CN 1657982 A CN1657982 A CN 1657982A
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China
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gengon
polarization spectro
liquid crystal
crystal panel
grid polarizer
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CN 200410015413
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Chinese (zh)
Inventor
李屹
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Omt Network Technology (shenzhen) Co Ltd
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Omt Network Technology (shenzhen) Co Ltd
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Priority to CN 200410015413 priority Critical patent/CN1657982A/en
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Abstract

This invention is a broad band polarizer that includes: the first polygon body and the second polygon body and the polarizing light splitter between the first and the second polygon bodies. The second face of the first polygon body and the first face of the second polygon body are paralleled, and the optical path is: the first polarizing light beam vertically rips into the first face of the first polygon, and reflects at the polarizing light splitter, and goes into the LCD screen board, and the LCD screen board adjusts the first polarizing light beam into the second polarizing light beam; the second polarizing beam returns to the first polygon, and passes through the third side of the first polygon body and the polarizing light splitter and arrives at the second polygon body and rips out vertically. This broad band polarizer can be easily produced, and it is without distortion and discrepancy and is not influenced by the environment.

Description

A kind of broadband wire-grid polarizer
Technical field
The present invention relates to a kind of optical element, particularly the effective polarizer of beam split.
Background technology
The existing all polarization splitting prisms of optical system, comprising MacNeille prism (US2403731) in the reflection of place, diagonal angle, Fig. 1 is used for the synoptic diagram of beam splitting system for the MacNeille prism, as shown in Figure 1, this system 10 comprises a reflection type liquid crystal panel 11, MacNeille prism 12, when the s of light emitted light beam 13 is injected in this MacNeille prism 12, diagonal line 121 reflections by MacNeille prism 12 enter reflection type liquid crystal panel 11, this reflection type liquid crystal panel 11 is modulated into p light beam image 14 with s light beam 13, and this p light beam image 14 passes diagonal line 121 and forms required image in the optical projection system (not shown).And wherein exist the unmodulated light beam of part (s light beam) via diagonal line 121 back light origin systems, utilize the MacNeille prism to be as the problem of the image projection system existence of Amici prism: crooked light beam causes depolarizing of transmitted light beam, this light beam that depolarizes has reduced the contrast of pattern system, yet eliminate depolarizing of crooked light beam, this just needs an additional quarter wave plate (wave plate 15 as shown in Figure 1), will increase cost like this, also require the accurate array of components and parts and processing temperature to be subjected to certain restriction simultaneously.
The wire grid polarizer of another type.As U.S. Pat 6,122,103, described wire grid polarizer can not produce depolarizing of crooked light beam and have very high extinction ratio.In addition, this wire grid polarizer can also be in normal operation under the high-temperature situation.Yet as shown in Figure 2, this wire grid polarizer 21 all needs the perk certain angle in imaging optical path.This wire grid polarizer 21 normally supports its wire grid construction with substrate of glass (thickness is greater than 0.5mm), because the wire-grid polarizer 21 of this spline structure converges or produce aberration (spherical aberration during dispersed light beam, coma and scattering), therefore, this structure will be brought spherical aberration in imaging process, coma and scattering, and prior art processes is difficult to accomplish setting up this wire grid construction of establishment in the thin substrate, as this substrate of glass thickness is 0.5mm, the angle of perk is 45 degree, astigmatism with formation-0.135mm, Fig. 3 is the graph of a relation of this flat board wire grid polarizer thickness and aberration, as shown in Figure 3, along with the increase of dull and stereotyped wire grid polarizer thickness, spherical aberration, coma and scattering increase considerably with it.In order to eliminate similar aberration, U.S. Pat 6,792,740 propose a kind of way of eliminating or reducing aberration, come aberration for compensation but this settling mode requires to add parallel plate, like this light path complexity, elongated, and the glass plate angle needs accurately control and has increased manufacturing cost, and the light path that prolongs increases the rear cut-off distance of projection lens simultaneously, and causes the corresponding increase of camera lens cost.
Moreover this wire grid construction is exposed in the environment, its dust, and humidity, factors such as machinery scuffing all are to reduce the performance of this wire grid polarizer.
Summary of the invention
The purpose of this invention is to provide a kind of being easy to and produce the broadband wire-grid polarizer of eliminating distortion and aberration and isolating with environment.
Broadband wire-grid polarizer of the present invention comprises: first gengon and second gengon and be sandwiched in first gengon and the polarization spectro body of second gengon, and wherein, first gengon comprises: first incident beam in order to vertical reception light emitted; Second in order to provide the light of incident beam to polarization spectro body and the reflection of reception polarization spectro body; And the 3rd, light beam is from its outgoing first gengon;
This second gengon comprises: first, this face is parallel to second of first gengon; And second, in order to provide light beam to optical projection system.
And placing polarization spectro body between second of first gengon and second gengon first, this polarization spectro body can comprise a parallel elements array, reflects first polarizing beam and transmits second polarizing beam.
Wherein, first optical path of this polarizing beam comprises: first and second of the first polarizing beam vertical incidence, first gengon; Parallel elements array by the polarization spectro body advances reflection; The 3rd face that passes this first gengon enters in the liquid crystal panel, and this liquid crystal panel is modulated into second polarizing beam with first polarizing beam; Second polarizing beam is returned first gengon, passes the 3rd limit and the polarization spectro body of first gengon, reaches second gengon, vertical outgoing.
Wherein, second optical path of this polarizing beam comprises: first of the first polarizing beam vertical incidence, first gengon; Pass first gengon second, by the parallel elements array reflection of polarization spectro body; Pass second of first gengon and the 3rd face of first gengon once more and enter in the liquid crystal panel, this liquid crystal panel is modulated into second polarizing beam with first polarizing beam; Second polarizing beam is returned first gengon, passes the 3rd limit and the polarization spectro body of first gengon, reaches second gengon, vertical outgoing.
In order to satisfy the as above ways for education footpath of polarizing beam, and this optics utilization factor, angle α between second of first gengon and the liquid crystal panel is lower than 40 degree, angle β between first of first gengon and the liquid crystal panel guarantees first vertical incidence of first light beam from first gengon, then first light beam reflects at the parallel elements array place of polarization spectro body, through the 3rd with the first parallel gengon of liquid crystal panel, then vertically enter liquid crystal panel, relation between angle α and the angle β is calculated to such an extent that β equals the twice of angle α like this, because can designing substantially, the incident angle (theoretical value equals α) of first this light beam separation prism of light beam incident spending less than 40, the incident angle of s light beam L1 is more little, the light beam utilization factor is higher, simultaneously, can also change the α angle as required and improve the light beam utilization factor.
The invention is characterized in:
As above-mentioned broadband wire-grid polarizer for the reflectivity of s polarization state near 100%, simultaneously for the reflectivity of p polarization almost near 0% ideal value.Thereby provide High Extinction Ratio for transmitted light.
2. the two ends of above-mentioned broadband wire-grid polarizer all are closed state, avoid the interior element arrays of polarization spectro body not to be subjected to the influence of external environment like this.
3. be not subjected to the constraint of thickness owing to above-mentioned broadband wire-grid polarizer, so can increase thickness, and reduce the potential distortion under the high-temperature situation.
4. because the clearance of the element arrays of above-mentioned broadband wire-grid polarizer and glass crack is minimum,, make the aberration minimization so to a certain extent less than 150um.
Description of drawings
The present invention is further described below in conjunction with drawings and Examples.
Fig. 1 is used for the synoptic diagram of beam splitting system for the MacNeille prism.
Fig. 2 is the plate polarizer fundamental diagram.
Fig. 3 is the thickness and the aberration graph of a relation of existing wire grid polarizer.
Fig. 4 is the synoptic diagram of first embodiment of broadband wire-grid polarizer of the present invention.
Fig. 5 utilizes light beam wavelength that light beam among first embodiment records at second face of transmission first gengon and the graph of a relation between the transmissivity.
Fig. 6 is the synoptic diagram of second embodiment of broadband wire-grid polarizer of the present invention.
Fig. 7 utilizes light beam wavelength that light beam among second embodiment records at first face of transmission second gengon and the graph of a relation between the reflectivity.
Embodiment
Fig. 4 is the synoptic diagram of first embodiment of broadband wire-grid polarizer of the present invention, as shown in Figure 4, these broadband wire-grid polarizer 40 first gengons 41 and second gengon 42 and be sandwiched in first gengon and the polarization spectro body 45 of second gengon, wherein, first gengon 41 comprises: first 411 incident beam in order to vertical reception light emitted; Second 412 in order to provide the light of incident beam to polarization spectro body 45 and 45 reflections of reception polarization spectro body; And the 3rd 413, light beam is from its outgoing to liquid crystal panel 44 and receive the modulated beam of light of liquid crystal panel 44 reflections;
This second gengon 42 comprises: first 421, this face is parallel to second 412 of first gengon 41; And second 422, in order to provide light beam to the optical projection system (not shown).
And place polarization spectro body 45 between second 412 of first gengon 41 and second gengon 42 first 421; this polarization spectro body 45 comprises parallel, elongated element arrays 451; this element arrays 451 places on first 421 of second gengon 42; polarization spectro body 45 reflects first polarizing beam and transmits second polarizing beam; in order to protect this element arrays 451; the closed at both ends of this polarization spectro body 45; in order further to increase the utilization factor of light beam, second 412 of first gengon 41 of present embodiment is coated with an anti-reflection film.
Wherein can to adopt refractive index be 1.5~1.7 transparent material for first gengon 41 and second gengon 42.
Wherein can to adopt refractive index be 1.5~1.7 transparent material to element arrays 451.
Wherein, comprise an air layer 452 between second 412 of first gengon 41 and the element arrays 451, this air layer 452 is less than 150um.
The optical path of present embodiment comprises: first 411 of s polarizing beam L1 vertical incidence first gengon 41; Pass first gengon 41 second 412, arrive the element arrays 451 of polarization spectro body 45, by these element arrays 451 reflections; Pass second 412 of first gengon 41 and the 3rd 413 of first gengon 41 once more and vertically enter in the liquid crystal panel 44, this liquid crystal panel 44 is modulated into p polarizing beam L2 with s polarizing beam L1; P polarizing beam L2 returns first gengon 41, passes polarization spectro body 45, reaches second gengon 42, by second 422 vertical outgoing of second gengon 42.
In order to satisfy the as above optical path of polarizing beam, and this optics utilization factor, angle α between second 412 of first gengon 41 and the liquid crystal panel 44 is lower than 40 degree, angle β between first 411 of first gengon 41 and the liquid crystal panel 44 guarantees first 411 vertical incidence of s light beam from first gengon 41, then the s light beam reflects at first 421 place of second gengon 42, through the 3rd 413 with the first parallel gengon 41 of liquid crystal panel 44, then vertically enter liquid crystal panel 44, the relation between angle α and the angle β is calculated to such an extent that β equals the twice of angle α like this.
Utilize the foregoing description to be coated with the AR anti-reflection film second 412 of first gengon 41, light beam wavelength that Fig. 5 records at second face of transmission first gengon for light beam and the graph of a relation between the transmissivity, wherein, this AR film design is as follows:
With glass is base material,
ZrO 2 16.25nm
MgF 2 37.18nm
ZrO 2 145.66nm
MgF2 111.50nm
As shown in Figure 5, for the transmissivity average out between s light beam 400nm~700nm more than 98%, and for the transmissivity average out between p light beam 400nm~700nm more than 99%.
Fig. 6 is the synoptic diagram of second embodiment of broadband wire-grid polarizer of the present invention.As shown in Figure 6, this broadband wire-grid polarizer 60 comprises first gengon 61 and second gengon 62 and is sandwiched in first gengon 61 and the polarization spectro body 65 of second gengon 62, wherein, first gengon 61 comprises: first 611 incident beam in order to vertical reception light emitted; The 3rd 613 in order to the modulation image light after providing incident beam to liquid crystal panel 64 and 64 modulation of reception liquid crystal panel; And second 612, light beam is from its outgoing first gengon 61;
This second gengon 62 comprises: first 621, this face is parallel to second 612 of first gengon 61; And second 622, in order to provide light beam to the optical projection system (not shown).
And place polarization spectro body 65 between second 612 of first gengon 61 and second gengon 62 first 621; this polarization spectro body 65 comprises parallel, elongated element arrays 651; this element arrays 651 places on second 612 of first gengon 61; polarization spectro body 65 reflection s polarizing beam and transmission p polarizing beam; in order to protect this element arrays 651, the closed at both ends of this polarization spectro body 65.
The optical path of present embodiment comprises: first 611 of s polarizing beam L1 vertical incidence first gengon 61; Element arrays 651 reflections by polarization spectro body 65; The 3rd 613 that vertically passes first gengon 61 enters in the liquid crystal panel 64, and this liquid crystal panel 64 is modulated into p polarizing beam L2 with s polarizing beam L1; P polarizing beam L2 returns first gengon 61, passes the 3rd limit 613 and the polarization spectro body 65 of first gengon 61, reaches second gengon 62, by second 622 vertical outgoing of second gengon 62.
Wherein can to adopt refractive index be 1.5~1.7 transparent material for first gengon 61 and second gengon 62.
Wherein can to adopt refractive index be 1.5~1.7 transparent material to element arrays 651.
Wherein, comprise an air layer 652 between second 612 of first gengon 61 and the element arrays 651, this air layer 652 is less than 150um.
In order to satisfy the as above optical path of polarizing beam, and this optics utilization factor, angle α between second 612 of first gengon 61 and the liquid crystal panel 64 is lower than 40 degree, angle β between first 611 of first gengon 61 and the liquid crystal panel 64 guarantees first 611 vertical incidence of s light beam from first gengon 61, then the s light beam reflects at second 612 place of first gengon 62, through the 3rd 613 with the first parallel gengon 61 of liquid crystal panel 64, then vertically enter liquid crystal panel 64, the relation between angle α and the angle β is calculated to such an extent that β equals the twice of angle α like this.
Light beam wavelength and reflectivity that Fig. 7 utilizes this embodiment to record, concern synoptic diagram between the transmissivity, as shown in Figure 7, present embodiment is without any need for coating film treatment, and for the reflectivity average out between s light beam 400nm~700nm more than 88%, more than 99%, the reflectivity of the transmissivity of s polarizing beam and p polarizing beam differs about 12% for the reflectivity average out between p light beam 400nm~700nm, to improve the contrast of this system like this, be about 12%.
The advantage that the present invention has is:
As above-mentioned broadband wire-grid polarizer for the reflectivity of s polarization state near 100%, simultaneously will be near 0% ideal value for the reflectivity of p polarization.Thereby,, provide High Extinction Ratio for transmitted light.
6. the two ends of polarization spectro body (45,65) all are closed state, avoid the interior element arrays of polarization spectro body (45,65) (441,641) not to be subjected to the influence of environment like this.
7. there is not the constraint of thickness owing to above-mentioned polarization spectro body (45,65), so can increase thickness, thereby reduce the potential distortion under high-temperature situation.
8. because the clearance between first gengon (41,61) and second gengon (42,62) is little, thereby make the aberration minimization to a certain extent.
The above person only is this explanation most preferred embodiment, is not the scope that is used to limit this explanation, and the equivalence that Fan Yiben explanation claim is done changes or modifies, and is all this explanation and contains.

Claims (12)

1. broadband wire-grid polarizer is characterized in that comprising first gengon and second polygon
Body and be sandwiched in first gengon and the polarization spectro body of second gengon,
Wherein, first gengon comprises: first incident beam in order to vertical reception light emitted; Second in order to provide the light of incident beam to polarization spectro body and the reflection of reception polarization spectro body; And the 3rd, provide incident beam to liquid crystal panel and the modulation image light after receiving the liquid crystal panel modulation;
This second gengon comprises: first, this face is parallel to second of first gengon; And second, in order to provide light beam to optical projection system;
And place polarization spectro body between second of first gengon and second gengon first, reflect first polarizing beam and transmit second polarizing beam;
Wherein, this polarization spectro body comprises that one is arranged at parallel, the elongated element arrays on first of second gengon;
Second face of this first gengon comprises an anti-reflection film;
Wherein, the angle between first of first gengon and the corresponding liquid crystal panel is the twice of angle between this liquid crystal panel and first gengon second, makes light beam from first vertical incidence.
2. broadband wire-grid polarizer as claimed in claim 1 is characterized in that, the refractive index of first gengon and second gengon is 1.5~1.7.
3. broadband wire-grid polarizer as claimed in claim 1 is characterized in that, the refractive index of element arrays is 1.5~1.7.
4. broadband wire-grid polarizer as claimed in claim 1 is characterized in that, this polarization spectro body comprises an air layer, and this air layer is between the element arrays and second gengon first.
5. broadband wire-grid polarizer as claimed in claim 4 is characterized in that this air layer is less than 150um.
6. an optical path that comprises described this broadband wire-grid polarizer of claim 1 comprises:
First of the first polarizing beam vertical incidence, first gengon; Pass first gengon second, arrive the polarization spectro body, by this polarization spectro body reflection; Pass second of first gengon and the 3rd face of first gengon once more and enter in the liquid crystal panel, this liquid crystal panel is modulated into second polarizing beam with first polarizing beam; Second polarizing beam is returned first gengon, passes the 3rd limit and the polarization spectro body of first gengon, reaches second gengon, by second vertical outgoing of second gengon.
7. this broadband wire-grid polarizer is characterized in that comprising more than first gengon and second
Limit body and be sandwiched in first gengon and the polarization spectro body of second gengon,
Wherein, first gengon comprises: first incident beam in order to vertical reception light emitted; Second, in order to the light of incident beam to polarization spectro body and the reflection of reception polarization spectro body to be provided; And the 3rd, in order to the modulation image light after providing incident beam to liquid crystal panel and the modulation of reception liquid crystal panel;
This second gengon comprises: first, this face is parallel to second of first gengon; And second, in order to provide light beam to optical projection system;
And place polarization spectro body between second of first gengon and second gengon first, reflect first polarizing beam and transmit second polarizing beam;
Wherein, this polarization spectro body comprises that one is arranged at parallel, the elongated element arrays on second of first gengon;
Wherein, the angle between first of first gengon and the corresponding liquid crystal panel is the twice of angle between this reflection type liquid crystal panel and first gengon second, makes light beam from first vertical incidence.
8. broadband wire-grid polarizer as claimed in claim 7 is characterized in that, the refractive index of first gengon and second gengon is 1.5~1.7.
9. broadband wire-grid polarizer as claimed in claim 7 is characterized in that, the refractive index of element arrays is 1.5~1.7.
10. one comprises the described broadband wire-grid polarizer of claim 7, it is characterized in that this polarization spectro body comprises an air layer, and this air layer is between the element arrays and second gengon first.
11. broadband wire-grid polarizer as claimed in claim 10 is characterized in that this air layer is less than 150um.
12. an optical path that comprises the described broadband wire-grid polarizer of claim 7 comprises:
First of the first polarizing beam vertical incidence, first gengon;
Arrive the polarization spectro body, reflect by the polarization spectro body;
The 3rd that passes first gengon vertically enters in the liquid crystal panel, and this liquid crystal panel is modulated into second polarizing beam with first polarizing beam;
Second polarizing beam is returned first gengon, passes the 3rd limit and the polarization spectro body of first gengon, reaches second gengon, by second vertical outgoing of second gengon.
CN 200410015413 2004-02-20 2004-02-20 Broadband grating polarizer Pending CN1657982A (en)

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CN 200410015413 CN1657982A (en) 2004-02-20 2004-02-20 Broadband grating polarizer

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CN 200410015413 CN1657982A (en) 2004-02-20 2004-02-20 Broadband grating polarizer

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102749670A (en) * 2012-07-02 2012-10-24 杭州科汀光学技术有限公司 Broadband prism multilayer film polarizing beam splitter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102749670A (en) * 2012-07-02 2012-10-24 杭州科汀光学技术有限公司 Broadband prism multilayer film polarizing beam splitter

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