CN1630115A - Multilayer biaxial orienting insulation layer structure and high-temperature superconductive coating conductor and preparing method thereof - Google Patents
Multilayer biaxial orienting insulation layer structure and high-temperature superconductive coating conductor and preparing method thereof Download PDFInfo
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- CN1630115A CN1630115A CN200310121357.7A CN200310121357A CN1630115A CN 1630115 A CN1630115 A CN 1630115A CN 200310121357 A CN200310121357 A CN 200310121357A CN 1630115 A CN1630115 A CN 1630115A
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- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000011248 coating agent Substances 0.000 title claims abstract description 19
- 238000000576 coating method Methods 0.000 title claims abstract description 19
- 239000004020 conductor Substances 0.000 title claims description 38
- 238000009413 insulation Methods 0.000 title claims description 16
- 239000002887 superconductor Substances 0.000 claims abstract description 37
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 35
- 238000002360 preparation method Methods 0.000 claims abstract description 16
- 229910000480 nickel oxide Inorganic materials 0.000 claims abstract description 15
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 claims abstract description 15
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052751 metal Inorganic materials 0.000 claims abstract description 13
- 239000002184 metal Substances 0.000 claims abstract description 13
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 12
- 238000004140 cleaning Methods 0.000 claims abstract description 10
- 238000000137 annealing Methods 0.000 claims abstract description 9
- 238000001771 vacuum deposition Methods 0.000 claims abstract description 9
- CETPSERCERDGAM-UHFFFAOYSA-N ceric oxide Chemical compound O=[Ce]=O CETPSERCERDGAM-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910000422 cerium(IV) oxide Inorganic materials 0.000 claims abstract description 8
- 238000007254 oxidation reaction Methods 0.000 claims abstract description 7
- 230000004888 barrier function Effects 0.000 claims abstract description 6
- 230000003647 oxidation Effects 0.000 claims abstract description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 18
- 239000001301 oxygen Substances 0.000 claims description 18
- 229910052760 oxygen Inorganic materials 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 17
- 238000004549 pulsed laser deposition Methods 0.000 claims description 16
- 238000005498 polishing Methods 0.000 claims description 14
- 238000010792 warming Methods 0.000 claims description 10
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 239000000126 substance Substances 0.000 claims description 7
- 230000001590 oxidative effect Effects 0.000 claims description 2
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 claims 7
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 abstract description 45
- 238000002955 isolation Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 description 10
- BTGZYWWSOPEHMM-UHFFFAOYSA-N [O].[Cu].[Y].[Ba] Chemical compound [O].[Cu].[Y].[Ba] BTGZYWWSOPEHMM-UHFFFAOYSA-N 0.000 description 7
- 238000004506 ultrasonic cleaning Methods 0.000 description 7
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000008021 deposition Effects 0.000 description 5
- 239000000919 ceramic Substances 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 239000008367 deionised water Substances 0.000 description 4
- 229910021641 deionized water Inorganic materials 0.000 description 4
- 238000006213 oxygenation reaction Methods 0.000 description 4
- 238000010301 surface-oxidation reaction Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 238000006701 autoxidation reaction Methods 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical group [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
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- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
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Abstract
A multiplayer biaxial orientation isolation layer structure and high temperature coated superconductor and preparation process. Said isolation layer structure contains cube texture nickel oxide seed layer, YSZ barrier layer and CeO2 cap layer. Said biaxial orientation isolation layer structure can be used for high temperature coated superconductor capable of making the YBCO coating growing along biaxial orientation to obtain fine superconductivity and Jc greater than 4 X 105A/cm2 of super conductive critical current density. Said method contains cleaning the metal nickel piece with cube texture, constant temperature oxidation in high temperature furnace, growing zirconium dioxide by vacuum deposition method, growing CeO2, growing YBCO, and YBCO annealing.
Description
Technical field
The present invention relates to a kind of multi-layered biaxial orientation insulation layer structure and conductor of high-temperature superconductor coat and preparation method.The invention belongs to the preparing technical field of conductor of high-temperature superconductor coat with separator.
Background technology
At present, conductor of high-temperature superconductor coat mainly refers to yttrium barium copper oxide (YBCO) coating conductor, the preparation characteristic of such material mainly is: (1) is base material with the flexible metal band, mainly is the nickel and nickel alloy strip material with high cubic texture degree that reaches again the acquisition of crystallization heat processing method with rolling; (2) one or more layers oxide-isolation layer of deposition on metal base band, this separator stops metal to spread in YBCO on the one hand, and requiring to have cubic texture on the other hand is biaxial orientation, can induce the YBCO on it to form texture.The selection of insolated layer materials requires lattice constant, thermal coefficient of expansion and metallic substrates close with YBCO, and Heat stability is good; (3) deposition has the YBCO coating of cubic texture on separator.
In above three steps, the second step most critical is also the most complicated.Usually insolated layer materials is an oxide material.In the oxide-isolation layer preparation, the deposition or the after-baking of separator are carried out at higher temperature usually, and substrate metal nickel is easily formed the nickel oxide layer of (111) orientation on the surface by random oxidation, and it is totally unfavorable to YBCO (OOL) growth.For preventing random oxidation, people have sought number of ways.For example containing reducing gas H
2Atmosphere in the deposition or heat treatment; At room temperature or the lower temperature noble metal that deposition one deck good stability, non-oxidizability are strong earlier such as Pd as ground floor.The use of reducing atmosphere has increased the difficulty of oxide-isolation layer preparation; The use of noble metal has increased preparation cost.
Summary of the invention
The purpose of this invention is to provide a kind of multi-layer isolation layer structure, to satisfy the needs of epitaxial growth YBCO coating thereon with single biaxial orientation.
A further object of the present invention provides a kind of conductor of high-temperature superconductor coat.
Another purpose of the present invention provides a kind of preparation method of conductor of high-temperature superconductor coat.
For achieving the above object, the present invention takes following technical scheme:
A kind of multi-layered biaxial orientation insulation layer structure, it is on the cubic-textured metal nickel surface, by oxidation epitaxial growth cubic texture nickel oxide Seed Layer, growth yttrium-stabile zirconium dioxide (YSZ) barrier layer and ceria (CeO on it
2) cap layer.
In multi-layered biaxial orientation insulation layer structure of the present invention, be by surface oxidation epitaxial growth cubic texture nickel oxide Seed Layer at the cubic-textured metal nickel surface, because the epitaxially grown cubic texture nickel oxide of surface oxidation Seed Layer surface is comparatively coarse, institute thinks and improves surface state, yttrium-stabile zirconium dioxide (YSZ) barrier layer of growing again thereon.Ceria (CeO
2) material has fluorite structure, chemical property is stable, and its lattice constant 5.41nm and YBCO material lattice match, so with CeO
2Be deposited on the YSZ as cap layer.This biaxial orientation insulation layer structure is used for conductor of high-temperature superconductor coat, can obtain superconducting critical current density Jc＞4 * 10
5A/cm
2
In above-mentioned multi-layered biaxial orientation insulation layer structure, the thickness of described zirconium dioxide is 100-300nm, CeO
2Thickness be 4-25nm.
In above-mentioned multi-layered biaxial orientation insulation layer structure, described CeO
2Thickness is preferably 4-10nm.
A kind of conductor of high-temperature superconductor coat is to adopt above-mentioned multi-layered biaxial orientation insulation layer structure, at ceria CeO
2Cap layer upper edge biaxial orientation growth yttrium barium copper oxide (YBCO) coating.
In above-mentioned conductor of high-temperature superconductor coat, the thickness of described yttrium barium copper oxide (YBCO) coating is 200-500nm.
A kind of method for preparing conductor of high-temperature superconductor coat, this method comprises the steps:
(1) the metallic nickel sheet that will have the height cubic texture carries out clean, and water mark, spot are not stayed in the surface;
(2) the metallic nickel sheet after the cleaning places 1100-1250 ℃ of high temperature furnace, air ambient constant temperature 2-30 minute;
(3) come out of the stove and be cooled to room temperature; Obtain cubic texture nickel oxide Seed Layer;
(4) the metallic nickel substrate that will have a cubic texture nickel oxide Seed Layer places vacuum cavity and makes back of the body end vacuum less than 10
-5It is temperature required that Torr, substrate are warming up to following step, and fill oxygen to the required air pressure of following step;
(5) adopt vacuum deposition method to carry out zirconium dioxide (YSZ) growth, control zirconium dioxide growth conditions is: oxygen is pressed 0.1-0.2mTorr, and underlayer temperature 550-780 ℃, the thickness 100-300nm of zirconium dioxide growth;
(6) adopt vacuum deposition method to carry out CeO
2Growth, control CeO
2Growth conditions is: oxygen is pressed 0.1-0.2mTorr, underlayer temperature 550-780 ℃, CeO
2The thickness 4-25nm of growth;
(7) adopt vacuum deposition method to carry out yttrium barium copper oxide (YBCO) and be coated with layer growth, control yttrium barium copper oxide (YBCO) is coated with growth conditions and is: oxygen is pressed 100-300mTorr, and underlayer temperature 750-810 ℃, the thickness 200-500nm of YBCO growth;
(8) carry out the annealing of yttrium barium copper oxide (YBCO) coating, control yttrium barium copper oxide (YBCO) coating annealing conditions is: oxygen is pressed 0.8-1atm, and annealing temperature 450-500 ℃, annealing time 20-30 minute, cool to room temperature with the furnace, promptly make conductor of high-temperature superconductor coat.
In the above-mentioned method for preparing conductor of high-temperature superconductor coat, the cleaning method of metallic nickel sheet comprises oil removing cleaning and polishing in described step (1).
In the above-mentioned method for preparing conductor of high-temperature superconductor coat, in described step (2), oxidizing temperature is preferably 1130-1200 ℃.
In the above-mentioned method for preparing conductor of high-temperature superconductor coat, in the described step (2), constant temperature time is preferably 3-20 minute.
In the above-mentioned method for preparing conductor of high-temperature superconductor coat, in the described step (1), polishing is mechanical polishing or chemical polishing.
In the above-mentioned method for preparing conductor of high-temperature superconductor coat, in described step (5), (6), in (7), used vacuum deposition method is a pulsed laser deposition.
In the above-mentioned method for preparing conductor of high-temperature superconductor coat, in described step (5), (6), in (7), the laser energy of used pulsed laser deposition is 100-300mJ.
In the above-mentioned method for preparing conductor of high-temperature superconductor coat, in described step (5), in (6), underlayer temperature is preferably 600-700 ℃.
The invention provides the conductor of high-temperature superconductor coat that a kind of biaxial orientation insulation layer structure and this insulation layer structure are used for.Wherein, separator comprises Seed Layer, barrier layer and cap layer.It mainly is to be substrate with cubic-textured metal nickel sheet (thick 0.05-0.15mm), and by oxidation epitaxial growth cubic texture nickel oxide Seed Layer, yttrium-stabile zirconium dioxide (YSZ) barrier layer and ceria CeO more thereon grow
2Cap layer.This biaxial orientation insulation layer structure is used for conductor of high-temperature superconductor coat, and the YBCO coating is grown along biaxial orientation, has good superconductivity, obtains superconducting critical current density Jc＞4 * 10
5A/cm
2
The advantage of method of the present invention is: 1. Seed Layer is the backing material autoxidation, need not other material, reduces cost.2. nickel oxide and metallic nickel are better compatible.3. owing to be by surface oxidation treatment, suitable extensive long band is produced the easy serialization of preparation means.4.YSZ and CeO
2Further strengthen the separator effect, improve surface quality, improve chemical stability and structure matching with YBCO.Improve the electrical property of YBCO.
Process of the present invention has several places that note:
(1) adopts the inventive method growing height cubic texture nickel oxide separator, at first require the substrate nickel-base strip to have the height cubic texture.Because utilization of the present invention is the principle of surface oxidation extension, the texture of Seed Layer and substrate texture are closely related.
(2) in described step (1), surfacing, light cleaning are accomplished in the cleaning requirement of nickel substrate, and this point is also extremely important.If substrate surface is coarse, then nickel oxide layer is not fine and close, can't play the effect of separator.The process of cleaning is according to the self-condition of metallic nickel sheet.
(3) in the technology of the present invention, shorter at the used oxidization time of high temperature, in case nickel oxide layer is blocked up, strengthen fragility.Being not suitable for Y is coating conductor.
(4) between described step (3) to (4), keep clean environment, avoid polluting.
Between described step (4) to (8), be preferably in the same cavity and carry out continuously.Process can be shortened greatly, surface contamination can be avoided again.
Description of drawings
YBCO θ-2 θ the scintigram of Fig. 1 for adopting method of the present invention on multi-layered biaxial orientation separator, to grow.
YBCO and each layer scintigram of Fig. 2 for adopting method of the present invention on multi-layered biaxial orientation separator, to grow.
Fig. 3 is for adopting the YBCO surface topography map of method growth of the present invention.
Fig. 4 is for adopting the YBCO superconductivity figure of method growth of the present invention.
Embodiment
Embodiment 1
To have height cubic-textured metal nickel sheet and carry out the ultrasonic cleaning oil removing with acetone, chemical polishing makes it expose unsalted surface.The polishing fluid of remained on surface is removed in the deionized water ultrasonic cleaning.Water mark, spot are not stayed in the surface.Be placed on the clean high temperature resistant container, put into 1200 ℃ of high temperature furnaces.Constant temperature 10 minutes takes out, and is cooled to room temperature.
This sample is put into the pulsed laser deposition cavity, be evacuated to back of the body end vacuum less than 5 * 10
-5Torr.Substrate is warming up to 650 ℃, fills oxygen to 0.12mTorr; With ceramic YSZ, CeO
2Disk is a target, adopts pulsed laser deposition technique.Laser energy 200mJ, growth YSZ rete is thick to be 200nm.Growth CeO
2Rete is thick to be 5nm.
YSZ, CeO
2After finishing, back of the body end vacuum is less than 5 * 10
-5Torr is warming up to 780 ℃, and oxygen is pressed 200mTorr; With the YBCO disk is target, adopts pulsed laser deposition technique.Laser energy 200mJ, growth YBCO rete is thick to be 380nm.Be cooled to 480 ℃, oxygenation keeps cooling to room temperature with the furnace after 30 minutes to 0.8atm, promptly makes conductor of high-temperature superconductor coat.
In embodiment 1, the YBCO θ-2 θ scintigram of growing on the made multi-layered biaxial orientation separator is seen Fig. 1, can see that from Fig. 1 each tunic is all pure C axle orientation; YBCO and each layer scintigram of growing on the made multi-layered biaxial orientation separator are seen Fig. 2, are cube to a cube coupling between each layer, substrate Ni among Fig. 2, separator NiO, YSZ and CeO
2, the scanning halfwidth of superconducting coating YBCO is respectively 6.8 °, and 6.6 °, 8.4 °, 8.3 ° and 9.6 °; Adopt the YBCO surface topography map of the method growth of present embodiment to see Fig. 3, though some thrusts are arranged among Fig. 3, crystallinity is good.Adopt the YBCO superconductivity figure of the method growth of embodiment to see Fig. 4, critical transition temperature Tc is 88.4K, critical current Ic be 14A (7.5mm is wide, OT, 77K).
To have height cubic-textured metal nickel sheet and carry out the ultrasonic cleaning oil removing with acetone, chemical polishing makes it expose unsalted surface.The polishing fluid of remained on surface is removed in the deionized water ultrasonic cleaning.Water mark, spot are not stayed in the surface.Be placed on the clean high temperature resistant container, put into 1130 ℃ of high temperature furnaces.Constant temperature 5 minutes takes out, and is cooled to room temperature.
This sample is put into the pulsed laser deposition cavity, be evacuated to back of the body end vacuum less than 5 * 10
-5Torr.Substrate is warming up to 600 ℃, fills oxygen to 0.2mTorr; With ceramic YSZ, CeO
2Disk is a target, adopts pulsed laser deposition technique.Laser energy 200mJ, growth YSZ rete is thick to be 150nm.Growth CeO
2Rete is thick to be 8nm.
YSZ, CeO
2After finishing, back of the body end vacuum is less than 5 * 10
-5Torr is warming up to 770 ℃, and oxygen is pressed 150mTorr; With the YBCO disk is target, adopts pulsed laser deposition technique.Laser energy 150mJ, growth YBCO rete is thick to be 250nm.Be cooled to 500 ℃, oxygenation keeps cooling to room temperature with the furnace after 20 minutes to 1atm, promptly makes conductor of high-temperature superconductor coat.
Embodiment 3
To have height cubic-textured metal nickel sheet and carry out the ultrasonic cleaning oil removing with acetone, chemical polishing makes it expose unsalted surface.The polishing fluid of remained on surface is removed in the deionized water ultrasonic cleaning.Water mark, spot are not stayed in the surface.Be placed on the clean high temperature resistant container, put into 1180 ℃ of high temperature furnaces.Constant temperature 6 minutes takes out, and is cooled to room temperature.
This sample is put into the pulsed laser deposition cavity, be evacuated to back of the body end vacuum less than 5 * 10
-5Torr.Substrate is warming up to 780 ℃, fills oxygen to 0.1mTorr; With ceramic YSZ, CeO
2Disk is a target, adopts pulsed laser deposition technique.Laser energy 200mJ, growth YSZ rete is thick to be 200nm.Growth CeO
2Rete is thick to be 10nm.
YSZ, CeO
2After finishing, back of the body end vacuum is less than 5 * 10
-5Torr is warming up to 800 ℃, and oxygen is pressed 200mTorr; With the YBCO disk is target, adopts pulsed laser deposition technique.Laser energy 300mJ, growth YBCO rete is thick to be 400nm.Be cooled to 500 ℃, oxygenation keeps cooling to room temperature with the furnace after 20 minutes to 1atm, promptly makes conductor of high-temperature superconductor coat.
To have height cubic-textured metal nickel sheet and use the surface.The deionized water ultrasonic cleaning.The surface does not stay water mark, spot to be placed on the clean high temperature resistant container, puts into 1150 ℃ of high temperature furnaces.Constant temperature 3 minutes takes out, and is cooled to room temperature.
This sample is put into the pulsed laser deposition cavity, be evacuated to back of the body end vacuum less than 5 * 10
-5Torr.Substrate is warming up to 700 ℃, fills oxygen to 0.12mTorr; With ceramic YSZ, CeO
2Disk is a target, adopts pulsed laser deposition technique.Laser energy 200mJ, growth YSZ rete is thick to be 150nm.Growth CeO
2Rete is thick to be 4nm.
YSZ, CeO
2After finishing, back of the body end vacuum is less than 5 * 10
-5Torr is warming up to 760 ℃, and oxygen is pressed 300mTorr; With the YBCO disk is target, adopts pulsed laser deposition technique.Laser energy 200mJ, growth YBCO rete is thick to be 350nm.Be cooled to 480 ℃, oxygenation keeps cooling to room temperature with the furnace after 30 minutes to 0.8atm, promptly makes conductor of high-temperature superconductor coat.
Claims (13)
1, a kind of multi-layered biaxial orientation insulation layer structure, it is characterized in that: it is on the cubic-textured metal nickel surface, by oxidation epitaxial growth cubic texture nickel oxide Seed Layer, growth yttrium-stabile zirconium dioxide barrier layer and ceria CeO on it
2Cap layer.
2, multi-layered biaxial orientation insulation layer structure according to claim 1, it is characterized in that: the thickness of described zirconium dioxide is 100-300nm, CeO
2Thickness be 4-25nm.
3, multi-layered biaxial orientation insulation layer structure according to claim 2 is characterized in that: described CeO
2Thickness is preferably 4-10nm.
4, a kind of conductor of high-temperature superconductor coat is characterized in that: be to adopt any described multi-layered biaxial orientation insulation layer structure of claim 1-3, at ceria CeO
2Cap layer upper edge biaxial orientation growth Y-Ba-Cu-O coating.
5, conductor of high-temperature superconductor coat according to claim 4 is characterized in that: the thickness of described Y-Ba-Cu-O coating is 200-500nm.
6, a kind of method for preparing claim 4 or 5 described conductor of high-temperature superconductor coat, it is characterized in that: this method comprises the steps:
(1) the metallic nickel sheet that will have the height cubic texture carries out clean, and water mark, spot are not stayed in the surface;
(2) the metallic nickel sheet after the cleaning places 1100-1250 ℃ of high temperature furnace, air ambient constant temperature 2-30 minute;
(3) come out of the stove and be cooled to room temperature; Obtain cubic texture nickel oxide Seed Layer;
(4) the metallic nickel substrate that will have a cubic texture nickel oxide Seed Layer places vacuum cavity and makes back of the body end vacuum less than 10
-5It is temperature required that Torr, substrate are warming up to following step, and fill oxygen to the required air pressure of following step;
(5) adopt vacuum deposition method to carry out the zirconium dioxide growth, control zirconium dioxide growth conditions is: oxygen is pressed 0.1-0.2mTorr, and underlayer temperature 550-780 ℃, the thickness 100-300nm of zirconium dioxide growth;
(6) adopt vacuum deposition method to carry out CeO
2Growth, control CeO
2Growth conditions is: oxygen is pressed 0.1-0.2mTorr, underlayer temperature 550-780 ℃, CeO
2The thickness 4-25nm of growth;
(7) adopt vacuum deposition method to carry out the Y-Ba-Cu-O coating growth, control Y-Ba-Cu-O coating growth conditions is: oxygen is pressed 100-300mTorr, and underlayer temperature 750-810 ℃, the thickness 200-500nm of Y-Ba-Cu-O coating growth;
(8) carry out Y-Ba-Cu-O coating annealing, control Y-Ba-Cu-O coating annealing conditions is: oxygen is pressed 0.8-1atm, and annealing temperature 450-500 ℃, annealing time 20-30 minute, cool to room temperature with the furnace, promptly make conductor of high-temperature superconductor coat.
7, the preparation method of conductor of high-temperature superconductor coat according to claim 6 is characterized in that: the cleaning method of metallic nickel sheet comprises oil removing cleaning and polishing in described step (1).
8, the preparation method of conductor of high-temperature superconductor coat according to claim 6 is characterized in that: in described step (2), preferred oxidizing temperature is 1130-1200 ℃.
9, the preparation method of conductor of high-temperature superconductor coat according to claim 6 is characterized in that: in the described step (2), preferred constant temperature time is 3-20 minute.
10, the preparation method of conductor of high-temperature superconductor coat according to claim 7 is characterized in that: in the described step (1), polishing is mechanical polishing or chemical polishing.
11, the preparation method of conductor of high-temperature superconductor coat according to claim 6 is characterized in that: in described step (5), (6), in (7), used vacuum deposition method is a pulsed laser deposition.
12, the preparation method of conductor of high-temperature superconductor coat according to claim 11 is characterized in that: in described step (5), (6), in (7), the laser energy of used pulsed laser deposition is 100-300mJ.
13, the preparation method of conductor of high-temperature superconductor coat according to claim 6 is characterized in that: in described step (5), in (6), the preferred temperature of substrate is 600-700 ℃.
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|---|---|---|---|
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|---|---|---|---|
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101295560B (en) * | 2007-04-23 | 2010-06-30 | 北京有色金属研究总院 | Method for preparing multi-layer isolation layer and YBCO coating conductor on metal base band |
| CN101978435B (en) * | 2008-02-19 | 2013-07-31 | 美国超能公司 | Method of forming an HTS article |
| CN103993277A (en) * | 2014-05-22 | 2014-08-20 | 赵遵成 | Preparation method of template suitable for growing REBCO superconducting layer on metal baseband |
| EP3091105A1 (en) * | 2015-05-07 | 2016-11-09 | Honeywell International Inc. | High temperature corrosion resistant coating |
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|---|---|---|---|---|
| US5741377A (en) * | 1995-04-10 | 1998-04-21 | Martin Marietta Energy Systems, Inc. | Structures having enhanced biaxial texture and method of fabricating same |
| US6270908B1 (en) * | 1997-09-02 | 2001-08-07 | Ut-Battelle, Llc | Rare earth zirconium oxide buffer layers on metal substrates |
| JP4041672B2 (en) * | 1999-07-23 | 2008-01-30 | アメリカン スーパーコンダクター コーポレイション | Bonding high temperature superconducting coated tape |
| CN1346904A (en) * | 2000-10-11 | 2002-05-01 | 郭汉生 | Composite Ni/NiO texture base belt of high-temp superconductor coating and its preparing process |
| US6617283B2 (en) * | 2001-06-22 | 2003-09-09 | Ut-Battelle, Llc | Method of depositing an electrically conductive oxide buffer layer on a textured substrate and articles formed therefrom |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101295560B (en) * | 2007-04-23 | 2010-06-30 | 北京有色金属研究总院 | Method for preparing multi-layer isolation layer and YBCO coating conductor on metal base band |
| CN101978435B (en) * | 2008-02-19 | 2013-07-31 | 美国超能公司 | Method of forming an HTS article |
| CN103993277A (en) * | 2014-05-22 | 2014-08-20 | 赵遵成 | Preparation method of template suitable for growing REBCO superconducting layer on metal baseband |
| EP3091105A1 (en) * | 2015-05-07 | 2016-11-09 | Honeywell International Inc. | High temperature corrosion resistant coating |
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| Publication number | Publication date |
|---|---|
| CN100365839C (en) | 2008-01-30 |
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