CN1630010A - Coaxial energy delivery window for electric vacuum device and sealing method thereof - Google Patents
Coaxial energy delivery window for electric vacuum device and sealing method thereof Download PDFInfo
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- CN1630010A CN1630010A CN 200310122329 CN200310122329A CN1630010A CN 1630010 A CN1630010 A CN 1630010A CN 200310122329 CN200310122329 CN 200310122329 CN 200310122329 A CN200310122329 A CN 200310122329A CN 1630010 A CN1630010 A CN 1630010A
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- window
- porcelain
- solder ring
- inner wire
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Abstract
This invention refers to electric vacuum device, especially a coaxial energy transmission window and sealing method for vacuum device. Said method contains preparing external conductor, internal conductor and relative process to be welded into blank piece without metallization to inner wall of central hole of window ceramic, which contains preparing oxide solder ring, setting solder ring between external circumference of internal conductor and central hole inner wall of window ceramic, positioning, heating the unfinished product in high temperature furnace until the oxide solder ring melting down to make good infiltration and sealing of window ceramic and internal conductor, cooling to obtain coaxial energy transmission window. In said invention, the dielectric material is composed of window ceramic layer and oxide solder ring which makes little standing wave ratio and adaptive to higher frequency band.
Description
Technical field
The present invention relates to electron tube, particularly a kind of electron tube is with coaxial delivery of energy window and method for sealing thereof.
Technical background
Electron tube mainly is microwave or millimetric wave device, and its used coaxial delivery of energy window is exactly the broadband delivery of energy device of Transmission Microwave or millimeter wave energy.Electron tube mainly contains the requirement of this delivery of energy device: (1) is air tight; (2) standing-wave ratio in required frequency band less than 2.
Fig. 1 shows the structural representation of coaxial delivery of energy window in the past.Number in the figure 1 expression outer conductor, label 2 expression inner wires, label 3 expression window porcelain.The manufacture method of the coaxial delivery of energy window of this tradition roughly comprises step: (1) carries out chemical cleaning with cutting down or metal material car system or punching out outer conductor 1 such as molybdenum, electroplates nickel plating; (2) with metal material cars such as molybdenum, Monel, mill or drawing inner wire 2, carry out chemical cleaning, and then electroplate nickel plating; (3) with 95% purity Al
2O
3Pottery, 99% purity Al
2O
3Pottery or 99% purity beryllium oxide ceramics prepare window porcelain 3, and the inside and outside circle of polishing window porcelain 3, and then in the enterprising row metalization of the inside and outside circle of window porcelain 3; (4) outer conductor 1, inner wire 2 and window porcelain 3 are assembled into as shown in Figure 1 structure, and brazing metal is placed at 4 places in the position, scolder can be fine silver scolder, silver-copper brazing alloy, fine copper scolder etc.; (5) fix relative position between each part with suitable mold, insert appropriate high temperature furnace then and carry out sealing-in.After sealing-in is finished,, just obtained the coaxial delivery of energy window of growing up to be a useful person through leak detection.
Above-mentioned coaxial delivery of energy window is the coaxial delivery of energy window of main flow that is used for electron tube at present.Along with the raising of operating frequency, the electromagnetic wave higher mode appears in the coaxial window in order not make, must dwindle the inside radius of outer conductor 1.Simultaneously, for the characteristic impedance that keeps coaxial delivery of energy window is 50 Ω, the diameter of its inner wire 2 also must corresponding dwindling.Using 95% purity Al
2O
3Porcelain or 99% purity Al
2O
3Under the situation of porcelain, if a delivery of energy window of seeking common ground can be worked more than the k μ wave band, the diameter that then requires inner wire 2 is about 0.6mm.At this moment, the diameter of bore of window 3 is also about 0.6mm.And with regard to coaxial delivery of energy window of above-mentioned tradition and method thereof, must the endoporus of window porcelain 3 be metallized.And little endoporus like this is metallized, method realizes very difficult.
In order to overcome this difficulty, the beryllia ceramic that people attempt adopting 99% less purity of dielectric constant is as window porcelain 3, and at this moment the diameter of inner wire 2 can be big a little, but still need the endoporus of window porcelain 3 is metallized.Yet,,, therefore limited the application of beryllia ceramic in coaxial delivery of energy window so method implements to depend on the equipment with environmental practice because beryllium oxide evaporant at high temperature is poisonous.
Summary of the invention
The objective of the invention is the above-mentioned shortcoming that exists in traditional coaxial delivery of energy window in order to overcome.
For achieving the above object, technical scheme of the present invention provides a kind of electron tube with novel coaxial delivery of energy window, form by outer conductor, inner wire and window porcelain, the window porcelain places on the step of outer conductor endoporus, solid welding, inner wire places on the centre bore axis of window porcelain, and it has the oxide solder ring seal to connect between the center bore inner wall of inner wire outer peripheral edges and window porcelain.
Described coaxial delivery of energy window, its described window porcelain is by the low-loss ceramic making that is suitable for electron tube.
Described coaxial delivery of energy window, its described low-loss pottery is alumina ceramic or beryllia ceramic.
Described coaxial delivery of energy window, its described alumina ceramic is for containing 95% purity alumina ceramic or 99% purity alumina ceramic.
Described coaxial delivery of energy window, its described oxide solder ring is the devitrified glass ring.
Described coaxial delivery of energy window, dielectric materials layer wherein is made up of window porcelain layer and oxide solder circular layer, and two-layer effective dielectric constant depends on the dielectric constant of oxide solder ring, and it is than 95% purity Al
2O
3Or 99% purity Al
2O
3Dielectric constant low, the standing-wave ratio of the coaxial delivery of energy window that is therefore obtained can be accomplished littler, and is suitable for using higher frequency range.
A kind of electron tube comprises preparation outer conductor, inner wire and window porcelain with the method for sealing of novel coaxial delivery of energy window, and the line correlation of going forward side by side is handled, and is welded as blank, and it does not metallize to the center bore inner wall of window porcelain; And comprise:
(1) preparation oxide solder ring;
(2) the oxide solder ring with preparation places between the center bore inner wall of inner wire outer peripheral edges and window porcelain, the location;
(3) place high temperature furnace to heat (2) semi-finished product that obtain of step,, make window porcelain and inner wire well soak into and seal up through metal oxide to the fusing of oxide solder ring;
(4) after the high temperature furnace cooling, take out, get the coaxial delivery of energy window of finished product.
Described method for sealing, its not at the inner wire outer surface to electroplate nickel plating.
Described method for sealing, the step of its existing method for sealing step and the inventive method can be upset and carry out.
Coaxial delivery of energy window of the present invention is applicable to any electron tube.
Description of drawings
Fig. 1 existing microwave and millimeter wave delivery of energy window construction and method schematic diagram;
Fig. 2 microwave and millimeter wave delivery of energy of the present invention window construction and method schematic diagram;
Fig. 3 microwave and millimeter wave delivery of energy of the present invention method schematic diagram.
Embodiment
Fig. 2 is structure and the method schematic diagram of an embodiment of the coaxial delivery of energy window that proposes of the present invention.
A kind of microwave or coaxial delivery of energy window of millimeter wave that is used for electron tube of the present invention comprises outer conductor 1, inner wire 2, window porcelain 3 and oxide solder ring 4.
The manufacture method of coaxial delivery of energy window of the present invention comprises step:
(1) with cutting down or metal material car system or punching out outer conductor 1 such as molybdenum, outer conductor 1 is hollow annular loading body, and a step 5 is arranged on the inner hole wall, carries out chemical cleaning then, and then then carries out nickel plating;
(2) make window porcelain 3 with 95% purity alumina ceramic or 99% purity alumina ceramic, window porcelain 3 has a centre bore 6, and to its cylindrical metallize (noting needing not metallize to its centre bore 6 inwalls);
(3) outer conductor 1 and window porcelain 3 are dressed up the structure of Fig. 3, being about to window porcelain 3 places on the step 5 of outer conductor 1 endoporus, and (31 positions that indicate in as Fig. 3) place suitable brazing metals such as fine silver, fine copper or silver-bearing copper between window porcelain 3 cylindrical walls and outer conductor 1 inner hole wall, insert appropriate high temperature furnace baking, outer conductor 1 and window porcelain 3 are sealed;
(4) with metal material car systems such as molybdenum maybe can cut down or draw inner wire 2, in the present embodiment and then at inner wire 2 outer surfaces to electroplate nickel plating;
(5) owing to experimental results show that whether little to the realization influence of follow-up method inner wire 2 nickel plating are, so, can save the nickel plating process in the above-mentioned steps (4) as another embodiment of the present invention;
(6) preparation oxide solder ring 4, oxide solder ring 4 can use any appropriate oxide material, also can use any preparation method who works as that faces; As the special case of present embodiment, the material of oxide solder ring 4 is a devitrified glass;
(7) insert inner wire 2 in the centre bore 6 (as shown in Figure 3) of window porcelain 3, and place oxide solder ring 4 between centre bore 6 inwalls of inner wire 2 outer peripheral edges and window porcelain 3, the location forms structure shown in Figure 2;
(8) structure shown in Figure 2 is inserted in the high temperature furnace with appropriate atmosphere, be heated to appropriate temperature, at this moment oxide solder ring fusing, one side is well soaked into window porcelain 3 and is sealed up, simultaneously, the oxide of fusing also well soaks into the metal oxide that forms on inner wire 2 and seals up;
(9) after the high temperature furnace cooling, can take out the coaxial delivery of energy window of finished product as shown in Figure 2.
Should regard Fig. 2 as the structural representation of delivery of energy window of the present invention,, all still belong to protection category of the present invention in any case change material, size or the shape of each part shown in Figure 2.In addition, realize that the said method of delivery of energy window of the present invention also is interpreted as an embodiment, for the personage who is proficient in this area, said method can have many variations.Such as, can seal up inner wire 2 and window porcelain 3 with the oxide solder ring earlier, and then the inner wire 2 of sealing-in and window porcelain 3 be sealed up with outer conductor 1 with brazing metal.Again such as, can be assembled into as shown in Figure 2 structure to each part, and the seaming position between outer conductor 1 and window porcelain 3 places brazing metal, carry out sealing-in in appropriate temperature then next time.In any case but revise the said method step, all belong to protection category of the present invention.
Claims (9)
1, a kind of electron tube is with coaxial delivery of energy window, form by outer conductor, inner wire and window porcelain, the window porcelain places on the step of outer conductor endoporus, solid welding, inner wire places on the centre bore axis of window porcelain, it is characterized in that between the center bore inner wall of inner wire outer peripheral edges and window porcelain, having the oxide solder ring seal to connect.
2, coaxial delivery of energy window as claimed in claim 1 is characterized in that, described window porcelain is by the low-loss ceramic making that is suitable for electron tube.
3, coaxial delivery of energy window as claimed in claim 2 is characterized in that, described low-loss pottery is alumina ceramic or beryllia ceramic.
4, coaxial delivery of energy window as claimed in claim 3 is characterized in that, described alumina ceramic is for containing 95% purity alumina ceramic or 99% purity alumina ceramic.
5, coaxial delivery of energy window as claimed in claim 1 is characterized in that, described oxide solder ring is the devitrified glass ring.
6, coaxial delivery of energy window as claimed in claim 1 is characterized in that, dielectric materials layer wherein is made up of window porcelain layer and oxide solder circular layer, and two-layer effective dielectric constant depends on the dielectric constant of oxide solder ring, and it is than 95% purity Al
2O
3Or 99% purity Al
2O
3Dielectric constant low, the standing-wave ratio of the coaxial delivery of energy window that is therefore obtained can be accomplished littler, and is suitable for using higher frequency range.
7, a kind of electron tube comprises preparation outer conductor, inner wire and window porcelain with the method for sealing of coaxial delivery of energy window, and the line correlation of going forward side by side is handled, and is welded as blank, it is characterized in that the center bore inner wall to the window porcelain does not metallize; And comprise:
(1) preparation oxide solder ring;
(2) the oxide solder ring with preparation places between the center bore inner wall of inner wire outer peripheral edges and window porcelain, the location;
(3) place high temperature furnace to heat (2) semi-finished product that obtain of step,, make window porcelain and inner wire through the metal oxide infiltration and seal up to the fusing of oxide solder ring;
(4) after the high temperature furnace cooling, take out, get the coaxial delivery of energy window of finished product.
8, method for sealing as claimed in claim 7 is characterized in that, not at the inner wire outer surface to electroplate nickel plating.
9, method for sealing as claimed in claim 7 is characterized in that, the step of existing method for sealing step and the inventive method can be upset and carry out.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101223297A CN100411083C (en) | 2003-12-16 | 2003-12-16 | Coaxial energy delivery window for electric vacuum device and sealing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101223297A CN100411083C (en) | 2003-12-16 | 2003-12-16 | Coaxial energy delivery window for electric vacuum device and sealing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1630010A true CN1630010A (en) | 2005-06-22 |
| CN100411083C CN100411083C (en) | 2008-08-13 |
Family
ID=34844471
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2003101223297A Expired - Fee Related CN100411083C (en) | 2003-12-16 | 2003-12-16 | Coaxial energy delivery window for electric vacuum device and sealing method thereof |
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|---|---|
| CN (1) | CN100411083C (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105149722A (en) * | 2015-09-02 | 2015-12-16 | 成都凯赛尔电子有限公司 | Die for stem sealing and use method thereof |
| CN105304439A (en) * | 2015-09-25 | 2016-02-03 | 电子科技大学 | Design method for broadband coaxial window |
| CN109742005A (en) * | 2019-02-27 | 2019-05-10 | 电子科技大学 | A kind of coaxial delivery of energy window suitable for wideband high-power |
| CN112886158A (en) * | 2020-11-16 | 2021-06-01 | 中国科学院合肥物质科学研究院 | High-power coaxial ceramic window cooling device |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2478869A1 (en) * | 1980-03-18 | 1981-09-25 | Thomson Csf | SHF tube coaxial window - uses centre conductor and crossbeam support of same thermal expansion coefficient at its sealing temp. |
| JPS57103401A (en) * | 1980-12-18 | 1982-06-28 | Nec Corp | Coaxial window |
| JPH05242819A (en) * | 1992-02-28 | 1993-09-21 | Nec Corp | Microwave vacuum gastight coaxial window |
| CN2185474Y (en) * | 1994-01-19 | 1994-12-14 | 东南大学 | High-frequency window for millimeter wave tube |
| DE19542525C2 (en) * | 1995-11-15 | 1997-12-11 | Krohne Messtechnik Kg | Microwave window |
-
2003
- 2003-12-16 CN CNB2003101223297A patent/CN100411083C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105149722A (en) * | 2015-09-02 | 2015-12-16 | 成都凯赛尔电子有限公司 | Die for stem sealing and use method thereof |
| CN105149722B (en) * | 2015-09-02 | 2017-11-07 | 成都凯赛尔电子有限公司 | Stem sealing-in mould and its application method |
| CN105304439A (en) * | 2015-09-25 | 2016-02-03 | 电子科技大学 | Design method for broadband coaxial window |
| CN105304439B (en) * | 2015-09-25 | 2018-08-21 | 电子科技大学 | A kind of design method of broadband coaxial window |
| CN109742005A (en) * | 2019-02-27 | 2019-05-10 | 电子科技大学 | A kind of coaxial delivery of energy window suitable for wideband high-power |
| CN109742005B (en) * | 2019-02-27 | 2020-06-12 | 电子科技大学 | Coaxial energy transmission window suitable for broadband high power |
| CN112886158A (en) * | 2020-11-16 | 2021-06-01 | 中国科学院合肥物质科学研究院 | High-power coaxial ceramic window cooling device |
| CN112886158B (en) * | 2020-11-16 | 2022-04-26 | 中国科学院合肥物质科学研究院 | High-power coaxial ceramic window cooling device |
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| Publication number | Publication date |
|---|---|
| CN100411083C (en) | 2008-08-13 |
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Granted publication date: 20080813 Termination date: 20111216 |