CN1627120A - Microscope for Nano granules - Google Patents
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- CN1627120A CN1627120A CN 200410100963 CN200410100963A CN1627120A CN 1627120 A CN1627120 A CN 1627120A CN 200410100963 CN200410100963 CN 200410100963 CN 200410100963 A CN200410100963 A CN 200410100963A CN 1627120 A CN1627120 A CN 1627120A
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Abstract
A microscope for Nano granules comprises a mainframe, a main controller and probe. The mainframe emits control signal to the probe via the main controller; the probe start to detect, the measured granules information measured by the probe is transmitted to the mainframe via the main controller after being pre-processed. In the mainframe, not only the pattern image of the measured granules can be observed on display, but also more accuracy statistic data of the measured granules can be obtained after the pattern image process module, pattern image analysis module, granules statistic module and observation display module. The microscope of the invention has two main function of observing pattern image of the granules and statistic of the granules data. The resolution can be Nano-grade, the measurement accuracy is less than 0.5nm, and 16 bits accuracy of scanning can be achieved in different scope.
Description
Technical field
The present invention relates to a kind of mirror and show mirror, specifically, relate to a kind of microscope for Nano granules.
Background technology
Traditional microscope, having a kind of is the microscope that utilizes the optical diffraction statistical to constitute, it can only obtain the statistical nature of particle.The microscope that also has a kind of mode that is utilization is had an X-rayed to constitute, it also can only obtain the see-through feature of particle.Above-mentioned two kinds of microscopes are not reach the shape pattern that can observe nano particle can carry out the statistics of nano-scale particle, the purpose of classification again.
Summary of the invention
The present invention provides a kind of microscope for Nano granules in order to overcome the problem in the above-mentioned technology formerly, can observe the shape characteristic of nano particle, can obtain its statistics again.Resolution can reach observes DNA, and promptly resolution reaches nanoscale.Simultaneously can intervene a kind of instrument that is suitable for studying nano particle artificially again.
The technical solution adopted in the present invention is: in microscopical structure, comprise: inside is contained information Control acquisition module, shape appearance figure processing module, shape appearance figure analysis module, particle statistic module and is observed the main frame of display module; The master controller of scanning follower, Z sampling input unit, output input converter and analog to digital converter is contained in inside; The probe of the probe of pretreater, scanner and band oscillator is contained in inside.
Three parts in the said structure: main frame, master controller and probe.At first be that main frame sends control signal, be sent on the probe that probe begins to detect through master controller; Probe on probe is when the tested particle, because atomic absorption and repulsive interaction, probe bends, so luminous point on the receiving tube produces mobile in probe through penetrating after the probe reflection, receiving tube is with the mobile electric weight that is converted into of luminous point, and the pretreater in popping one's head in is delivered to master controller after handling.Through Z sampling input unit sampling in the master controller, sampled signal is sent in the main frame through the output input converter.Behind the processing of the shape appearance figure in the main frame and shape appearance figure analysis module and particle statistic and Observation Blocks, both can on display, observe the feature image of tested particle, can obtain the statistics of tested particle again.When the approaching more tested particle of probe, the repulsive force between tested particle and the probe tip is big more, and the angle of probe bending is big more.Then the electric weight of receiving tube output is also big more.Utilization changes the data of Z axle, makes the constant distance of maintenance between tested particle and the needle point, has just obtained the data of the pattern fluctuations of tested particle.Because the precision of Z axle control can reach high, so resolution can reach nanoscale.
The microscopical advantage of the present invention is significant.
1, microscope of the present invention has the feature image that both can observe tested particle, can obtain the statistics of tested particle again, can also obtain the functions such as area calculating of individual particle.
2, microscopical resolution of the present invention can reach nanoscale.Can make accuracy of observation reach the requirement of DNA nano particle.The microscopical measuring accuracy of the present invention has been less than 0.5 nanometer.
3, microscope of the present invention has the function of local human intervention.Main frame can pass through the main controller controls probe detection, so that controls the vibration of probe tip.All can reach 16 precision in the scanning of different range.
Description of drawings
Fig. 1 is the microscopical structural representation of the present invention.
Fig. 2 is the structural representation of probe 3 in the microscope of the present invention.
Fig. 2-the 1st, Fig. 2 pop one's head in 3, the structural representation of pretreater 309.
Fig. 2-2a is the pop one's head in outside drawing of scanner 307 in 3 of Fig. 2.
Fig. 2-2b is the A-A cut-open view of Fig. 2-2a.
Fig. 3 is the structural representation of master controller 2 in the microscope of the present invention.
Fig. 3-the 1st, the structural representation of scanning follower 201 among Fig. 3.
Fig. 3-the 2nd, the structural representation of Z sampling input unit 202 among Fig. 3.
Fig. 3-the 3rd, Fig. 3 export the structural representation of divider 2031 in the input converter 203.
Fig. 3-the 4th, Fig. 3 export the structural representation of digital signal processor 2032 in the input converter 203.
Fig. 3-the 5th, Fig. 3 export the structural representation of conversion interface circuit 2033 in the input converter 203.
Fig. 3-the 6th, Fig. 3 export the structural representation of vibration control module 2036 in the input converter 203.
Fig. 4-the 1st, the structural representation of main frame 1 in the microscope of the present invention.
Fig. 4-the 2nd, the structural representation of information Control acquisition module 101 among Fig. 4-1.
Embodiment
Further specify the microscopical structure of the present invention below in conjunction with accompanying drawing.
Fig. 1 is the microscopical one-piece construction of the present invention.Comprise main frame 1, the master controller 2 that is connected with main frame 1, the probe 3 that links to each other with master controller.Be connected the display 5 on the main frame 1.The primary power 4 of main frame 1, master controller 2 and display 5 is given in power supply.
Main frame 1 sends probe instructions, reaches probe 3 through master controller 2.Probe 3 data and the feature image that will survey tested particle are sent to main frame 1 through master controller 2.1 pair of data of main frame and feature image are handled, are analyzed and add up.Finally on display 5, demonstrate the feature image of tested particle, and the statistics that provides tested particle.
Fig. 2 is the concrete structure of probe 3 in the microscope of the present invention.By shown in Figure 2, probe 3 of the present invention comprises: receiving tube 301 has probe 303, LASER Light Source 305, scanner 307 and the pretreater 309 of oscillator 306.Wherein, pretreater 309 links to each other with receiving tube 301, LASER Light Source 305, oscillator 306 and master controller 2 respectively.LASER Light Source 305 emitted laser beams are on the back side of probe 303 needle points.Probe tip 303 beam reflected are penetrated on the receiving plane of receiving tube 301.In order to shorten light path, add two catoptrons 302,304 among Fig. 2.The needle point of probe 303 points to the table top of scanner 307.Tested particle 308 just is seated on the table top of scanner 307.
Scanner 307 links to each other with master controller 2, by the scanning of master controller 2 gated sweep devices 307.
When tested particle 308 is seated on the table top of scanner 307, main frame 1 makes scanner 307 be with tested particle 308 to begin scanning by the scanning follower 201 in the master controller 2.Meanwhile, main frame 1 ceaselessly vibrates oscillator 306 drive probes 303 by the vibration control module 2036 and the pretreater 309 of master controller 2; And LASER Light Source 305 emission of lasering beam are penetrated on the back side of probe 303 needle points.The variation of the tested particle 308 that probe 303 detects on X, Y, Z direction, the variation by folded light beam on the probe 303 needle point back sides reflects.The reflected light beam is on the receiving plane of receiving tube 301, after being received pipe 301 receptions, change light signal into electric signal and be input in the pretreater 309, after pretreater 309 pre-service (seeing Fig. 2-1), send in the main frame 1 by the sampling of the Z in the master controller 2 input unit 202 and to handle.
Fig. 2-the 1st, the structure of said pretreater 309.Contain adding of linking to each other with receiving tube 301 respectively, subtraction device 3091,3092.With the effective value arithmetical unit 3093 that adds, subtraction device 3091,3092 links to each other.The multiplicative operator 3094 that links to each other with oscillator 306.The sinusoidal signal generator 3095 that links to each other with multiplying method 3094.
The pretreater 309 of said structure obtains upper and lower two energy signal A, B from receiving tube 301.Do the A+B additive operation through adder calculator 3091, do the B-A subtraction through subtraction device 3092, two operation result A+B and B-A all send into and do [(B-A)/(A+B)] computing in the effective value arithmetical unit 3093, obtain effective value at last and send in the Z sampling follower 202 in the master controller 2.Wherein obtaining A+B through adder calculator 3091 is gross energy E, becomes digital signal to send among the control bus XBUS analog signal conversion through the analog-to-digital conversion module (A/D) in the master controller 2.The amplitude signal (being Oscillation Amplitude) that vibration control module 2036 is sent here in sine wave signal (being the vibration frequency signal) that sinusoidal signal generator 3095 produces and the master controller 2 obtains voltage signal by multiplicative operator 3094 and delivers to oscillator 306 (in the present embodiment, oscillator 306 is a piezoelectric ceramic tube) on, thereby the Oscillation Amplitude and the frequency of control probe 303.
Fig. 2-2a, Fig. 2-2b are the structures of scanner 307 in the probe 3.In the present embodiment, scanner 307 is selected piezoelectric ceramic tube (PZT) for use.Utilize the piezoelectric effect of piezoelectric ceramic tube, under alive effect, produce deformation regularly, drive the tested particle 308 that is placed on above it and do three-dimensional motion.Piezoelectric ceramic tube (PZT) can be selected the PZT-5A type for use, or the piezoelectric ceramic tube of PZT-8 type or models such as PZT-4 or PZT-4D or PZT-5B or PZT-5J or PZT-5H or PZT-5.Piezoelectric ceramic tube has the distortion of 5 directions, be 5 direction+X ,-X ,+Y ,-Y ,-motion of Z direction.
As above-mentioned structure, because pretreater 309 control generators 306 make the needle point of probe 303 be in vertical tremor state constantly.So the present invention not only can obtain very high resolution, and probe 303 can not make tested particle stressed excessive, can test the tested particle that rigidity is relatively poor yet.
In the present embodiment, receiving tube 301 is selected the four-quadrant receiving tube for use.
Fig. 3 is the structure of the microscopical master controller 2 of the present invention.As shown in Figure 3, master controller 2 comprises the output input converter 203 that two ends are connected respectively to main frame 1 and overhead control line XBUS.Input end links to each other with control bus XBUS, and output terminal is connected to the scanning follower (comprising X, Y, three directions of Z) 201 on the scanner 307 on the probe 1.Input end links to each other with pretreater 309 on the probe 1 respectively, and output terminal is connected to Z sampling input unit 202 and the analog to digital converter (A/D) 204 of control bus XBUS.Wherein said output input converter 203 contains the conversion interface circuit (I/O) 2033 that is connected with main frame 1.The digital signal processor 2032 that links to each other with conversion interface circuit 2033.The divider 2031 that links to each other with digital signal processor 2032.Input end links to each other with power supply, output terminal be output as low-tension supply 2034 (+5V ,-5V ,+15V ,-15V) and high-voltage power supply 2035 (+200V ,-200V) low-pass filter 2037.Input end links to each other with control bus XBUS, and output terminal is connected to the vibration control module 2036 on the pretreater 309 on the probe 1 through low-pass filter 2037.
Said control bus XBUS contains control signal transmission line, address assignment transmission line, digital data transmission line and transmission line analog signal etc.
Fig. 3-the 1st, the structure of said scanning follower 201 among Fig. 3.Scanning follower 201 comprises scanning element 201X, 201Y, the 201Z on X, Y, three directions of Z.Each scanning element all comprises bus transceiver and the controller that links to each other with control bus XBUS.In the present embodiment, a shared bus transceiver 2017XY of scanning element 201X, 201Y and the shared controller 2018XY on X, Y two directions.Independent bus transceiver 2017Z and the controller 2018Z of using on the Z direction; All export digital to analog converter (D/A) 2015X, 2015Y, 2015Z, side-play amount digital to analog converter (D/A) 2012X, 2012Y, 2012Z and precision spreading number weighted-voltage D/A converter (D/A) 2011X, 2011Y, 2011Z respectively with the scanning voltage that bus transceiver links to each other with controller.The input end of precision spreading number weighted-voltage D/A converter (D/A) 2011X, 2011Y, 2011Z links to each other with the output terminal of scanning voltage output digital to analog converter 2015X, 2015Y, 2015Z respectively.Respectively with the output terminal of side-play amount digital to analog converter 2012X, 2012Y, 2012Z and totalizer 2013X, 2013Y, the 2013Z that links to each other with the output terminal of precision spreading number weighted-voltage D/A converter 2011X, 2011Y, 2011Z.Amplifier 2014X, 2014Y, the 2014Z that links to each other with the output terminal of totalizer 2013X, 2013Y, 2013Z respectively.
In scanning element 201X and 201Y, also comprise the phase inverter 2016X, the 2016Y that link to each other with amplifier 2014X, 2014Y respectively.On the scanner 307 on the probe 3 that the output terminal of said amplifier 2014X, 2014Y, 2014Z and phase inverter 2016X, 2016Y all connects.Wherein the output gated sweep device 307 of amplifier 2014X is in the negative direction-X motion of X-axis.After phase inverter 2016X paraphase, increase the motion of X-axis positive dirction+X.Equally, output gated sweep device 307 motions at Y-axis negative direction-Y of amplifier 2014Y after phase inverter 2016Y paraphase, increase the motion of Y-axis positive dirction+Y.Therefore, phase inverter has played the effect that enlarges X, Y-axis sweep limit.
In the present embodiment:
Said bus transceiver 2017XY and 2017Z select bus transmitting-receiving BUFFER chip for use, play protected data and do not lose loyal effect;
Said controller (GAL) 2018XY, 2018Z select control chip GAL16V8D for use.Play and guarantee that main frame 1 correctly transmits by the control information that control bus XBUS carries;
Said scanning voltage output digital to analog converter 2015X, 2015Y, 2015Z and side-play amount digital to analog converter 2012X, 2012Y, 2012Z all select the AD669 chip for use.By this chip mainly is digital signal to be converted to 8 simulating signal;
Said precision spreading number weighted-voltage D/A converter 2011X, 2011Y, 2011Z all select the AD7846 chip for use.This chip removes and converts data-signal to 8 simulating signal, can also make the signal figure place stack of input.Promptly after 8 signals of scanning voltage output digital to analog converter 2015X, 2015Y, 2015Z output were input to precision spreading number weighted-voltage D/A converter 2011X, 2011Y, 2011Z, two 8 signals were that figure place is superposed to 16.
As the structure of above-mentioned scanning follower 201,, send enabling signal to each scanning element 201X, 201Y, 201Z respectively by control bus XBUS and controller 2018XY, 2018Z when main frame 1 sends enabled instruction; Data are sent scanning voltage output digital to analog converter 2015X, 2015Y, 2015Z respectively to by bus transceiver 2017XY, 2017Z, among side-play amount digital to analog converter 2012X, 2012Y, 2012Z and precision spreading number weighted-voltage D/A converter 2011X, 2011Y, the 2011Z, data-signal converted to 8 simulating signal; 8 signals that scanning voltage output digital to analog converter 2015X, 2015Y, 2015Z incite somebody to action are separately distinguished on input precision spreading number weighted-voltage D/A converter 2011X, 2011Y, the 2011Z, after 8 signals are superposed to 16 signals, after being input into the numerical value addition of totalizer 2013X, 2013Y, 2013Z among input summer 2013X, 2013Y, the 2013Z and with side-play amount digital to analog converter 2012X, 2012Y, 2012Z respectively, after amplifying through amplifier 2014X, 2014Y, 2014Z respectively, respectively the scanner 307 work-X on the control probe 3 ,-Y ,-motion of Z direction.In scanning element 201X, 201Y, in order to enlarge the sweep limit of X, Y direction, the output of amplifier 2014X, 2014Y through phase inverter 2016X, 2016Y after, increase gated sweep pipe 307+X ,+motion of Y direction.This shows that scanning accuracy of the present invention all reaches 16 precision.
Fig. 3-the 2nd, the structure of Z sampling input unit 202 in the master controller 2, comprise the low-pass filter (SS) 2022 that links to each other with pretreater 309 output terminals on the probe 3, the analog to digital converter (A/D) 2021 that links to each other with low-pass filter 2022 output terminals, the sampling bus transceiver 2023 that links to each other with analog to digital converter 2021 output terminals.The output of sampling bus transceiver 2023 is connected on the control bus XBUS.
In the present embodiment, analog to digital converter (A/D) 2021 is selected the ADS926 chip for use, and sampling bus transceiver 2023 is selected the BUFFER chip for use.
Structure as above-mentioned Z sampling input unit 202, when the Z sampled signal of pretreater 309 output is input in the primary controller 2 in the Z sampling input unit 202, after process low-pass filter 2022 filters high-frequency signal, send in the analog to digital converter 2021, after the simulating signal transformation of variables is digital signal, send on the control bus XBUS by sampling bus transceiver 2023 (guarantee that data do not lose chastity).Subsequently, output input converter 203 can obtain this digital signal by control bus XBUS, and the process divider is sent in the main frame 1 by conversion interface circuit (I/O) 2033 after sending into and handling in the digital signal processor 2032.
Fig. 3-the 3rd, the structure of the divider 203 1 in the output input converter 203.Contain three or eight code translators 20314, distribution chip 20311,20312,20313 in interconnective first, second, third minute.The output of three or eight code translators 20314 is connected on second fen distribution chip 20312; Distribution chip 20311 linked to each other with digital signal processor 2032 in first minute.Distribution chip 20313 was connected on the control bus XBUS in the 3rd minute.
In the present embodiment, three or eight code translators 20314 are selected the 74LS138 chip for use.Distribution chip 20311,20312,20313 was all selected the BUFFER chip for use in first, second, third minute.Three or eight code translators 20314 cooperate controller to play the address assignment effect.
Fig. 3-the 4th, the structure of the digital signal processor 2032 in the output input converter 203.Comprise digital signal processing chip 20322, be connected in the control chip 20321,20323 between digital signal processing chip 20322 and main frame 1 interface.The dual-port static random access memory 20324 that is connected with digital signal processing chip 20322.
In the present embodiment, digital signal processing chip 20322 adopts dsp chip.
Structure as Fig. 3-4, on the one hand, digital signal processing chip 20322 is received the command information of main frame 1, send address signal and control signal to dual-port static random access memory 20324, and from command information reading of data, after treatment, in control bus XBUS, send data-signal, address signal and control signal, with equipment such as this gated sweep device, probes by the bus transceiver in the conversion interface circuit 2031; On the other hand, receive the command information of main frame 1 for digital signal processing chip 20322, in control bus SBUS, send address signal and control signal, and reading of data, send data-signal, address signal and control signal to dual-port static random access memory 20324 again after the processing, the storage data.Send a signal to main frame 1 then, the notice main frame is taken data away.
Fig. 3-the 5th, the structure of the conversion interface circuit (I/O) 2033 in the output input converter 203.Comprise two dual-port static random access memory 20332,20333 and be connected in dual-port static random access memory 20332,20333 and main frame 1 interface between control chip 20331.
In the present embodiment, dual-port static random access memory 20332,20333 (comprise above-mentioned 20324) is all selected the IDT77134 storage chip for use.Control chip 20331 is selected the GAL chip for use.
Conversion interface circuit shown in Fig. 3-5 (I/O) 2033.After main frame 1 sends command information, by the enabled instruction of control chip two dual-port static random access memory 20332 of 20331 controls and 20333.
Fig. 3-the 6th, the structure of the vibration control module 2036 in the output input converter 203.
Comprise digital to analog converter 20362, the vibration bus transceiver 20361 that links to each other with digital to analog converter 20362 input ends, the piezoelectricity follower 20363 that links to each other with digital to analog converter 203625 output terminals.The input end of vibration bus transceiver 20361 is connected on the control bus XBUS; The output terminal of piezoelectricity follower 20363 is connected on the pretreater 309 of probe on 3.
The structure of the vibration control module 2036 shown in Fig. 3-6, pass the data come by control bus XBUS by vibration bus transceiver 20361 (the maintenance data are not lost chastity), send in the digital to analog converter 20362, digital signal is converted to simulating signal, the simulating signal of sending through a voltage follower 20363 after, obtain amplitude signal and send in the pretreater 309, the amplitude of control probe 303 vibrations.
Fig. 4-the 1st, microscopical main frame 1 structure of the present invention.
The carrier of microscope main frame 1 of the present invention is a computing machine.
Main frame 1 of the present invention is to be based upon on the platform of computer operating system.Shown in Fig. 4-1.Main frame 1 of the present invention contains information Control acquisition module 101, the shape appearance figure processing module 102 that links with information Control acquisition module 101 output terminals, the shape appearance figure analysis module 103 that links with shape appearance figure processing module 102 output terminals, the particle statistic module 104 that links with shape appearance figure analysis module 103 output terminals, and the observation display module 105 that links with particle statistic module 104 output terminals.
Fig. 4-the 2nd, the structure of said information Control acquisition module 101 among Fig. 4-1.Comprise two module groups, one is the control information input module group, and another is the information acquisition module group.The control information input module group comprises: at first be control information receiver module 1011, then module 1013, control data computing module 1014, control data sending module 1015 are transmitted in the control information analysis and processing module 1012 that connects successively, control information, and control data sending module 1015 is connected to the output interface of main frame 1 (computing machine); The information acquisition module group comprises: what be connected with main frame 1 input interface (serial ports of computers) at first is probe data acquisition module 1016, and then the probe data that connects is successively compiled module 1017, image data is transmitted module 1018, sampled data rough handling module 1019, view data demonstration and preserved module 1010.View data shows and the output terminal of preservation module 1010 is connected on the shape appearance figure processing module 102.The output of probe data acquisition module 1016 is also connected on the control data computing module 1014.
Structure as above-mentioned Fig. 4-2 information Control acquisition module 101.
At first read the controlled variable of man-machine interface by control information receiver module 1011, these parameters exchange for the convenience of the user and have unit more, and these parameters pass to control information analysis and processing module 1012 and handle;
Control information analysis and processing module 1012 will be analyzed from the control information that control information receiver module 1011 is sent here, the unit of the data of analysis user input and scope etc., and after controlled variable is converted to the intrinsic BINARY code, sends into control information and transmit in the module 1013;
Control information is transmitted module 1013 and is realized the output information of control information analysis and processing module 1012 is passed to control data computing module 1014 according to the form that requires of data computation module 1014;
Control data computing module 1014 transmits the control information of module 1013 and the data computation control data that probe data obtains according to control information, gives control data sending module 1015;
Control data sending module 1015 sends to actuator (A/D converter, scanner etc.) with control data.
Above-mentioned 1011-1015 module has realized the control information that the user is formulated by man-machine interface, and passes to hardware.
Probe data acquisition module 1016 obtains raw informations such as facula position from hardware (probe etc.), passes to control data computing module 1014, passes to probe data simultaneously and compiles module 1017 processing;
Probe data is compiled module 1017 and will be divided into groups to wait processing by the data that probe data acquisition module 1016 obtains, and sends into image data then and transmits module 1018;
Image data is transmitted output data that module 1018 compiles probe data module 1017 and is passed to sampled data rough handling module 1019 according to the data format standard of sampled data rough handling 1019;
Sampled data rough handling module 1019 is compiled probe data the output data of module 1017 according to specifying real-time correcting mode rough handling, internal data is converted into user oriented tape unit data, passes to view data and show and preservation module 1010;
View data shows with preserving module 1010 scan-data is shown to the user by the mode of image, preserves into file simultaneously, handles for shape appearance figure processing module 102.
The 1016-1010 module has been finished the sampled data analysis and arrangement, and preserves, and is shown to user's process at last.
Above-mentioned control information receiver module 1011, view data show and preserve module 1010, are user oriented, belong to the contact bed a of On-line Control;
Control information analysis and processing module 1012, sampled data rough handling module 1019 are finished and are accepted user data and data are offered the user, belong to interface data processing layer b;
Module 1013 is transmitted in control information, sampled data is transmitted module 1018, can regard an interface layer c as;
Control data computing module 1014, probe data are compiled module 1017, belong to one deck d, realize actuator control and gather algorithm;
Control data sending module 1015, probe data acquisition module 1016 belong to control and the lowermost layer e that gathers, and finish and the getting in touch of actuator.
Among Fig. 1, said shape appearance figure processing module 102 contains least squares fitting module 1021, shape appearance figure leveling and plane fitting module 1022 and various filters module 1023.Wherein various filters module 1023 contains the fast two-dimensional fourier transformation (FFT) and the contrary two-dimension fourier transform of frequency domain filtering, the frequency domain filter of band passband resistance, the linear filter of the various resistances on the spatial domain, logical spatial domain template type, as Hi-pass filter, low-pass filter, Gaussian filter and convolution etc., also has nonlinear median filter based on order statistic.This wave filter works to the interference that filters pulsed or spiced salt formula noise very much.But do not lose the detail section of shape appearance figure.
Said shape appearance figure analysis module 103 contains autocorrelation analysis module 1031, than clever (Bearing) analysis module 1032, granularity analysis module 1033, roughness analysis module 1034, rule analysis of spectrum module 1035 and cross-sectional analysis module 1036.Behind above-mentioned analysis module, can obtain the data of many surface characteristics of tested particle.
For the relation between power spectrum density (PSD), fast Fourier transform (FFT), auto-correlation (ACF) and the roughness (RMS):
PSD＝|FFT|
2＝FFT{ACF}＝RSM
2
Convolution: given convolution kernel is as 3 * 3 nuclear
Data b ij in the shape appearance figure square formation is carried out convolutional filtering, to get with bij be 3 of center * 3 points
Use a
Ji=x
11b
I-1, j-1+ x
12b
I-1, j+ x
13b
I-1, j+1
+x
21b
i、j-1+x
22b
i、j+x
23b
i、j+1
+ x
31b
I+1, j-1+ x
32b
I+1, j+ x
33b
I+1, j+1Replace b
IjPromptly be.
Said Hi-pass filter, low-pass filter are exactly with different convolution.But, general in order to keep the phase invariant in close relations with graphics shape, require convolution kernel to have symmetry.
The nuclear of gaussian filtering is:
The value of low pass gaussian filtering is:
The value of Gauss's high-pass filtering is:
Medium filtering: 9 adjacent point values are arranged in order, replaced the value of wanting filtering with the value of centre, this is based on the nonlinear filtering of order statistic.
The result who utilizes above-mentioned each analysis module to analyze is by the edge of the tested particle of particle statistic module 104 establishments.Utilize the analysis of granularity again, obtain the area of shape appearance figure particle, information such as the distribution of equivalent diameter and variance.Can also carry out separation and reparation to particle.And undistorted real property.
Said observation display module 105 contains shape appearance figure top view display module 1051 and shape appearance figure 3-D display module 1052.Can utilize different illumination and viewing angle.Show three-dimensional shape appearance figure.
Claims (10)
1, a kind of microscope for Nano granules, comprise the main frame that has display, master controller that is connected with main frame and the probe that is connected with master controller is characterized in that: said main frame contains information Control acquisition module, shape appearance figure processing module, shape appearance figure analysis module, particle statistic module and observes display module; Said master controller contains scanning follower, Z sampling input unit, output input converter and analog to digital converter; Said probe contains the probe of pretreater, scanner and band oscillator.
2, microscope for Nano granules according to claim 1 is characterized in that said probe also comprises receiving tube and LASER Light Source; Said pretreater links to each other with receiving tube, LASER Light Source, oscillator and master controller respectively; The beam of LASER Light Source emitted laser is on the back side of probe tip, and the luminous point of probe tip reflection drops on the receiving plane of receiving tube; The needle point of probe points to the table top of scanner, and tested particle is seated on the table top of scanner.
3, microscope for Nano granules according to claim 1 and 2, it is characterized in that: comprise adding of linking to each other with receiving tube respectively, subtraction device in the pretreater in the said probe, with the effective value arithmetical unit that adds, the subtraction device links to each other, the sinusoidal signal generator that links to each other with multiplicative operator.
4, microscope for Nano granules according to claim 1, it is characterized in that said scanning follower contains X, Y, the scanning element of three directions of Z, each scanning element all comprises bus transceiver and the controller that links to each other with control bus, export digital to analog converter with the scanning voltage that bus transceiver links to each other with controller respectively, side-play amount digital to analog converter and the precision spreading number weighted-voltage D/A converter that links to each other with scanning voltage output digital to analog converter output terminal, set the totalizer that the weighted-voltage D/A converter output terminal links to each other with the output terminal and the precision expansion of side-play amount digital to analog converter respectively, the amplifier that links to each other with adder output, and at X, in the scanning element on the Y direction, also contain the phase inverter that links to each other with amplifier out.
5, microscope for Nano granules according to claim 1, it is characterized in that Z sampling input unit comprises the low-pass filter that links to each other with the last pretreater output terminal of probe, the digital to analog converter that links to each other with the low-pass filter output terminal, the sampling bus transceiver that links to each other with the digital to analog converter output terminal, the output of sampling bus transceiver is connected on the control bus.
6, microscope for Nano granules according to claim 1, it is characterized in that comprising the conversion interface circuit that is connected with main frame in the said output input converter, the digital signal processor that links to each other with conversion interface circuit, the divider that links to each other with digital signal processor, input end links to each other with power supply, output terminal is connected with the low-pass filter of low-tension supply and high-voltage power supply, and input end links to each other with control bus, and output terminal is connected to the vibration control module on the last pretreater of probe.
7, microscope for Nano granules according to claim 6 is characterized in that said divider contains three or eight code translators, interconnective first, second, third minute distribution chip; The output of three or eight code translators is connected on second fen distribution chip, and distribution chip linked to each other with digital signal processor in first minute.
8, microscope for Nano granules according to claim 6 is characterized in that comprising two dual-port static random access memory in the said conversion interface circuit and is connected in control chip between dual-port static random access memory and the host interface.
9, microscope for Nano granules according to claim 1 is characterized in that said main frame is to be based upon on the platform of computer operating system; Contain the information Control acquisition module, the shape appearance figure processing module that links with information Control acquisition module output terminal, the morphology analysis module that links with shape appearance figure processing module output terminal, particle statistic module that links with morphology analysis module output terminal and the observation display module that links with particle statistic module output terminal.
10, microscope for Nano granules according to claim 9 is characterized in that said information Control acquisition module comprises two module groups, and one is the control information input module group, and another is the information acquisition module group; The control information input module group comprises: at first be the control information receiver module, then module, control data computing module, control data sending module are transmitted in the control information analysis and processing module that connects successively, control information, and the control data sending module is connected to the output interface of main frame; The information acquisition module group comprises: what be connected with the main frame input interface at first is the probe data acquisition module, and then the probe data that connects is successively compiled module, image data is transmitted module, sampled data rough handling module, view data demonstration and preserved module.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410100963 CN1627120A (en) | 2003-12-12 | 2004-12-11 | Microscope for Nano granules |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200310109328.9 | 2003-12-12 | ||
| CNA2003101093289A CN1546984A (en) | 2003-12-12 | 2003-12-12 | Nanometer-particle microscope |
| CN 200410100963 CN1627120A (en) | 2003-12-12 | 2004-12-11 | Microscope for Nano granules |
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| Publication Number | Publication Date |
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| CN1627120A true CN1627120A (en) | 2005-06-15 |
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| CN 200410100963 Pending CN1627120A (en) | 2003-12-12 | 2004-12-11 | Microscope for Nano granules |
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| CN (1) | CN1627120A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100456076C (en) * | 2007-09-19 | 2009-01-28 | 哈尔滨工业大学 | Automatic collecting device for ceramic sphere surface image |
| CN103443290A (en) * | 2010-10-20 | 2013-12-11 | 生物纳米基因公司 | Systems and methods for assessing biomolecule characteristics |
-
2004
- 2004-12-11 CN CN 200410100963 patent/CN1627120A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100456076C (en) * | 2007-09-19 | 2009-01-28 | 哈尔滨工业大学 | Automatic collecting device for ceramic sphere surface image |
| CN103443290A (en) * | 2010-10-20 | 2013-12-11 | 生物纳米基因公司 | Systems and methods for assessing biomolecule characteristics |
| CN103443290B (en) * | 2010-10-20 | 2016-06-08 | 生物纳米基因公司 | For assessing the system and method for biomolecule characteristic |
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