CN1614427A - Position regulator for pickup and non-contacted electric resistance rate determiner - Google Patents
Position regulator for pickup and non-contacted electric resistance rate determiner Download PDFInfo
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- CN1614427A CN1614427A CNA200410088575XA CN200410088575A CN1614427A CN 1614427 A CN1614427 A CN 1614427A CN A200410088575X A CNA200410088575X A CN A200410088575XA CN 200410088575 A CN200410088575 A CN 200410088575A CN 1614427 A CN1614427 A CN 1614427A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2617—Measuring dielectric properties, e.g. constants
- G01R27/2682—Measuring dielectric properties, e.g. constants using optical methods or electron beams
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- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Provided are position regulator for pickup and non-contacted electric resistance rate determiner. The system comprises a head positioning means 12 for controlling the interval between the test head 16 and the test sample 17; a transparent reference plate 13 provided in one body, with the test head 16 in parallel to the surface of the test sample 17 and indirectly indicating the interval between the test head 16 and the surface of the test sample 17; a head interval monitoring means 14 for monitoring the interval between the test head 16 and the surface of the test sample 17, by emitting a test light and introducing the reflected light of the reference plate 13 and the reflected light of the test sample 17 and comparing them; and a control means 15 for controlling the interval between the test head 16 and the surface of the test sample 17 to a set value, by driving the head positioning means 12 from the detected value of the head interval monitoring means 14. The head interval monitoring means 14 is provided with a linear image sensor for detecting the incident position of the reflected light.
Description
Technical field
The measuring head position regulator that the present invention relates to make measuring head correctly the surface of measuring sample to be scanned, and can be at contactless state, mensuration are arranged at the non-contact type determination of resistivity device of the resistivity of the circuit on the substrate surface etc.
Background technology
As non-contact type determination of resistivity device, people know patent documentation 1 described type.This non-contact type determination of resistivity device is as shown in Figure 2, by magnetic core 2, field coil 3, detect with coil 4, current feedback circuit 5 constitutes with arithmetical unit 6, and this core body 2 is the C font, and its both ends are provided with towards the two sides of semiconductor wafer 1,3 pairs of these magnetic cores 2 of this field coil carry out excitation, and this detection is arranged at a side end of magnetic core 2 with coil 4.By this scheme, semiconductor wafer 1 is passed through between the both ends of the magnetic core 2 of C font, measure resistivity.At this moment, the both ends of magnetic core 2 are correctly scanned along the surface of semiconductor wafer 1 keeping the state in slightly little gap with the surface of semiconductor wafer 1.
Patent documentation 1:JP spy opens flat 01-92666 document
Summary of the invention
But in the occasion of the non-contact type determination of resistivity device of above-mentioned prior art, having the size that is difficult to measuring sample increases corresponding problem.
Measuring sample is the occasion of the so small-sized sample of semiconductor wafer, because above-mentioned magnetic core 2 also is small-sized, inserts in this magnetic core 2 so will measure sample easily, correctly keeps the both ends of magnetic core 2 and the spacing between the measurement sample.But if the measurement sample is a large-size, then magnetic core 2 also must be bigger.In addition, this bigger magnetic core 2 is moved, the surface of measuring sample is scanned.In this occasion, follow the increase of the size of magnetic core 2, be difficult to correctly keep the spacing at both ends.In addition, in measuring sample, the part in the magnetic core 2 of insertion C font owing to can't directly support the measurement sample, increases so the spacing of sample is measured in supporting, has the problem of measurement sample deflection.
Like this, follow the size of measuring sample to increase, be difficult to correctly to keep the spacing at the both ends of magnetic core 2, measure also deflection easily of sample, thus, be difficult to keep the mode in slightly little gap to scan according to the both ends of magnetic core 2 and the surface of measuring sample.Consequently, have dislocation, deflection because of slightly, the both ends of magnetic core 2 contacts with the surface of measuring sample, make the problem of danger of the surface fracture of measurement sample.
The present invention be directed to above-mentioned problem and propose, the object of the present invention is to provide and correctly the spacing between the surface of measuring head and sample to be remained on setting value, the measuring head that scans position regulator and non-contact type determination of resistivity device.
In order to solve above-mentioned problem, a first aspect of the present invention provides a kind of measuring head position regulator, comprise, position adjusting mechanism, this position adjusting mechanism is adjusted the spacing between measuring head and the measurement sample, this measuring head scans the surface of measuring sample at the state of opening with slightly little intervals; Transparent datum plate, the datum plate that this is transparent and above-mentioned measuring head form one, and according to being provided with the surperficial parallel mode of above-mentioned measurement sample, represent the spacing between the surface of above-mentioned measuring head and above-mentioned measurement sample indirectly; Spacing MA monitoring agency, this spacing MA monitoring agency is by the said reference plate, surface to above-mentioned measurement sample, penetrate and check light, the reflected light of the reflected light of said reference plate and measurement sample is injected into this spacing MA monitoring agency, they are compared, the spacing between the outside of above-mentioned measuring head and above-mentioned measurement sample is monitored; Control gear, this control gear drive above-mentioned position adjusting mechanism according to the measured value of above-mentioned spacing MA monitoring agency, and the spacing between the surface of above-mentioned measuring head and above-mentioned measurement sample is adjusted into setting value.
By such scheme, the inspection light of spacing MA monitoring agency ejaculation right overhead, in the surface reflection of datum plate and measurement sample, this reflected light is injected spacing MA monitoring agency to the end.If penetrate to check light obliquely, because the reflected light of datum plate departs from the reflected light of measuring sample, so by monitoring the variation of its spacing, but the variation of the spacing between the surface of control survey head and measurement sample.Control gear drives a position adjusting mechanism according to the reflected light of datum plate and the variation of measuring the spacing between the reflected light of sample, and the spacing between the surface of measuring head and measurement sample is adjusted to setting value.
A second aspect of the present invention provides a kind of non-contact type determination of resistivity device, wherein, measuring head with the surface of a side of measuring sample, the state that keeps slightly little spacing, sweep measuring resistivity is carried out on this surface, and this device comprises supporting base portion, and sample is measured in this supporting base portion supporting; The measuring head scanning mechanism, this measuring head scanning mechanism according to not be supported on above-mentioned supporting base portion on the mode that contacts of the surface of a side of measurement sample be provided with striding across, with the surface of above-mentioned measurement sample, the state that keeps slightly little spacing, support above-mentioned measuring head, this measuring head is moved, and above-mentioned measuring head scanning mechanism comprises above-mentioned measuring head position regulator.By such scheme, the measuring head scanning mechanism makes measuring head move along the surface of measuring sample, measures resistivity under contactless state.At this moment, measuring head is by above-mentioned measuring head position regulator, supports according to the mode with the correct spacing of the surface maintenance of measuring sample.In addition, producing unusual occasion, making measuring head leave the surface of measuring sample, the breakage that prevents to measure sample.
If as foregoing description, adopt thin plate of the present invention to admit container, then have following such effect.
(1) because by datum plate and the surface of measuring sample, the inspection light that reflection is penetrated by a spacing MA monitoring agency, by a spacing MA monitoring agency detection of reflected light, thus can be according to each catoptrical difference, the variation of the spacing between the surface of control survey head and measurement sample.Can by control gear driving head position adjusting mechanism, the spacing between the surface of measuring head and measurement sample be adjusted to setting value according to the variation of the spacing between the surface of this measuring head and measurement sample.Consequently,, make measuring head, correctly scan along the surface of measuring sample even, still the spacing between the surface of measuring head and measurement sample can be adjusted to setting value in the occasion of measuring situations such as sample generation deflection.
(2) because by this linear image sensor, spacing between the catoptrical incoming position of detection said reference plate and the catoptrical incoming position of above-mentioned measurement sample, by control gear driving head position adjusting mechanism, spacing between the surface of adjustment measuring head and measurement sample, eliminate departing between this measured value and the setting value, make measuring head along the surface of measuring sample, correctly scan.
(3) unusual occasion takes place in the reflected light at datum plate, because control gear driving head position adjusting mechanism makes measuring head leave the surface of measuring sample, so can prevent to measure the breakage of sample.
(4) at the reflected light on the surface of datum plate and the reflected light of inner face unusual occasion takes place, because the driving head position adjusting mechanism makes measuring head leave the surface of measuring sample, so can prevent to measure the breakage of sample.
(5) because in non-contact type determination of resistivity device, measuring head position regulator of the present invention is set, so can scan according to the state of the spacing between the surface of maintenance correctly and measurement sample, and unusual occasion is taking place, measuring head and the surface of measuring sample are left, prevented to measure the breakage of sample really.
Description of drawings
Fig. 1 is the enlarged drawing of expression measuring head of the present invention with the key component of position regulator;
Fig. 2 is the schematic diagram of expression non-contact type determination of resistivity device in the past;
Fig. 3 is the circuit diagram of the principle of explanation non-contact type determination of resistivity device;
Fig. 4 is the sheet resistance of expression non-contact type determination of resistivity device of the present invention and the curve map of the relation between the high-frequency current;
Fig. 5 is the front elevation of expression non-contact type determination of resistivity device of the present invention;
Fig. 6 is the side view of expression non-contact type determination of resistivity device of the present invention;
Fig. 7 is the side view of the open and-shut mode of the shutter door of expression non-contact type determination of resistivity device of the present invention;
Fig. 8 is the side view of the measuring head scanning mechanism of expression non-contact type determination of resistivity device of the present invention;
Fig. 9 is the oblique view of the measuring head scanning mechanism of expression non-contact type determination of resistivity device of the present invention;
Figure 10 is the schematic diagram of expression distortion example of the present invention.
The explanation of label
Sample is measured in label 17 expressions;
Label 37 expression shutter door;
Label 58 expression guide rails;
Embodiment
Below with reference to the accompanying drawings, the measuring head to embodiments of the invention is described with position regulator and non-contact type determination of resistivity device.The measuring head position regulator
Measuring head position regulator of the present invention is for being used for measuring head, and desired location is adjusted on the surface of relative measurement sample.This device at the tabular surface that makes measuring head relative measurement sample, when the state in maintenance gap slightly scans, is adjusted at setting value with the spacing between tabular surface and the measuring head, the device that keeps its spacing to use in order to carry out determination of resistivity etc.According to Fig. 1, this measuring head is described with position regulator below.
This measuring head uses position regulator 11 by a position adjusting mechanism 12, datum plate 13, and a spacing MA monitoring agency 14 constitutes with control gear 15.
On a position adjusting mechanism 12, be integral and be provided with measuring head 16, a datum plate 13 and a spacing MA monitoring agency 14.Thus, this position adjusting mechanism 12 at measuring head 16 when the state of opening with clearance gap slightly scans the surface of measuring sample 17, make measuring head 16, move, the spacing between the surface of adjustment measuring head 16 and measurement sample 17 with a datum plate 13 and a spacing MA monitoring agency 14.
Datum plate 13 is the parts of the spacing between the surface that is used for representing measuring head 16 indirectly and measuring sample 17.Datum plate 13 is integral and is arranged on the measuring head 16, and according to being provided with the surperficial parallel mode of measuring sample 17.Be installed on the occasion of the bottom positions aligning of its bottom side and measuring head 16 at datum plate 13, datum plate 13 and measure spacing between the surface of sample 17, consistent with measuring head 16 and the spacing measured between the surface of sample 17.Be installed on the occasion that depart from the bottom of its bottom side and measuring head 16 at datum plate 13, by from datum plate 13 with measure this bias of deduction the spacing on surface of sample 17, can calculate measuring head 16 and measure the spacing on the surface of sample 17.Even consistent in the spacing between the surface of the installation site of measuring head datum plate 13 and the measurement sample 17 of measuring head 16 and under the situation about departing from, measuring head 16 and measure spacing between the surface of sample 17 and still can represent measuring head 16 indirectly and measure spacing between the surface of sample 17.Datum plate 13 is made of transparent sheet material, and from the part reflection of the inspection light of a spacing MA monitoring agency 14, remaining light is realized transmission.The thickness of this datum plate 13 is set corresponding to the size of measuring head 16 grades, still, but at least according to the thickness setting of the degree of the thermal expansion of detection reference plate 13, contraction.That is, a spacing MA monitoring agency 14 is according to the thickness setting of the degree that can discern bias from two catoptrical incoming position spacings of the outside of datum plate 13 and inner face (thermal expansion, shrink the bias that causes).
Spacing MA monitoring agency 14 is for being used for measuring head 16 and measuring the device of the bias of the spacing between the surface of sample 17.This spacing MA monitoring agency 14 is to be installed on the position adjusting mechanism 12 towards reference field 13 and measurement sample 17 modes.This spacing MA monitoring agency 14 comprises the light source (not shown) that produces coherent light, with the linear image sensor (not shown).Light source is provided with in the mode towards reference field 13 and measurement sample 17, sets according to the mode that the coherent light from this light source penetrates obliquely.The coherent light of this inclination is by datum plate 13 and measure sample 17 and reflect obliquely, and thus, 4 reflected light that reflected respectively by the interior outside of the interior outside of datum plate 13 and measurement sample 17 are injected linear image sensor respectively in the position of departing from.The angle of inclination of this coherent light is according to corresponding to pairing catoptrical amplitude of variation, and considered that the mode of the size of a spacing MA monitoring agency 14 sets.That is, in the occasion of the variation of checking slightly little size, because catoptrical amplitude of variation is less, so the angle of inclination of coherent light within the bounds of possibility near level, increases catoptrical amplitude of variation.
Linear image sensor is paid in the catoptrical OBL smooth detecting sensor of injecting the position for pasting.This light detecting sensor has the catoptrical position that will inject and detects as the point of having specified coordinate position, can discern the function of spacing of the incoming position of a plurality of incident lights according to micron order.Linear image sensor is provided with in the mode towards datum plate 13 and measurement sample 17.
Linear image sensor compares the incoming position of a plurality of incident lights, detects its spacing, monitors the bias of this spacing, learns the bias of each reflection of light position thus.Be respectively reflected light at two-beam in the reflection of the inner face of datum plate 13, catoptrical occasion with the surface reflection of measuring sample 17, directly learn the inner face of datum plate 13 and measure departing from of spacing between the surface of sample 17, learn measuring head 16 indirectly and measure departing from of spacing between the sample 17.In addition, if this spacing and setting value (are being placed measuring head 16 with the spacing that forms benchmark and are being measured the occasion of sample 17, the spacing of each catoptrical incoming position) compares, monitor simultaneously, then learn measuring head 16 that the deflection of measuring sample 17 etc. causes and the variation of measuring the spacing between the sample 17.If this amplitude of variation surpasses allowed band near the time, then by control gear 15, judge to be in abnormality.In addition, do not change in spacing, but the state that keeps a determining deviation at two-beam, incoming position waves such occasion, thinks between intrusion spacing MA monitoring agencies 14 such as being in gas and datum plate 13 and the measurement sample 17 state of the variations in refractive index in this space, thus, same in this occasion of waving, by control gear 15, judge to be in abnormality.In addition,, think because of the fault of light source etc., check that light does not penetrate, so by control gear 15, judgement is in abnormality in the occasion that the reflected light of datum plate 13 is not injected.In addition, will have by various inspection states produciblely, measuring head 16 is an abnormality with the condition judgement of measuring the possibility that sample 17 contacts.
Be under the situation of catoptrical occasion etc. of interior outside of datum plate 13 at two-beam, learn datum plate 13 thickness and its thermal expansion, shrink the variation that causes.Because of overheated unusually, the flame of various machines etc., thermal expansion, the contraction of datum plate 13 take place in the occasion that temperature on every side changes terrifically etc.If the thermal expansion of this datum plate 13, the amplitude of variation of contraction surpass allowed band,, judge to be in abnormality then by control gear 15.In addition, though there be not spacing, but keep the state of a determining deviation at two-beam, the occasion that the incoming position swing is such is as above-mentioned, think intrusions such as gas, the state of the variations in refractive index of this part, thus, same in this occasion of waving, then, judge to be in abnormality by control gear 15.In addition,,, think that its reason is the fault of light source etc.,, judge to be in abnormality by control gear 15 then as above-mentioned in the occasion that the reflected light of datum plate 13 is not injected.In other occasion, also be same.
Control gear comprises storer, arithmetic processing section etc. (all not shown in the drawings).In this storer, the position of the linear image sensor of spacing MA monitoring agency 14 (normal condition from the catoptrical incoming position of the interior outside of datum plate 13 with from the catoptrical incoming position of the interior outside of measuring sample 17) is as setting value and storage in advance.
Arithmetic processing section is to being stored in each the catoptrical incoming position in the storer in advance, compares with the catoptrical incoming position of reality, judges the state that departs from etc.Promptly, arithmetic processing section is to the reflected light incoming position of the linear image sensor of the measured value of a conduct spacing MA monitoring agency 14, compare with each the catoptrical incoming position that is stored in advance in the storer, the occasion that is departing from, according to this mode that departs from of elimination, driving head position adjusting mechanism 12.Specifically, spacing between the surface of measuring head 16 and measurement sample 17 is greater than the occasion of setting value, according to driving head position adjusting mechanism 12, the mode that this spacing narrows down is controlled, in the occasion of this spacing less than this setting value, according to driving this position adjusting mechanism 12, the mode that this spacing broadens is controlled.At this moment, the amount of movement of measuring head 16 grades that once drive of position adjusting mechanism 12 is set according to slightly little amount, repeatedly carrying out new measured value and setting value repeatedly compares, with the driving of a position adjusting mechanism 12, the spacing between the surface of measuring head 16 and measurement sample 17 is adjusted to setting value.
In addition, arithmetic processing section is also carried out the supervision of above-mentioned abnormality.That is, also monitor unusual variable quantity simultaneously, catoptrical having or not, or the abnormality of swing etc.If the amplitude of variation of the spacing between measuring head 16 and the measurement sample 17 surpasses predetermined allowed band, then be judged to be abnormality, correct position adjusting mechanism 12 is controlled, and measuring head 16 leaves the surface of measuring sample 17, prevents situation about being in contact with one another.Do not having the occasion of catoptrical incident, same during the abnormality of the occasion of swing etc., driving head position adjusting mechanism 12 makes measuring head 16 leave the surface of measuring sample 17, prevents situation about being in contact with one another.
In addition, measuring head 16 includes all kinds.The inspection for scanning smooth planar check surface at the state with slightly spacing is not limited to measure the occasion of the resistivity that is formed at the circuit on the tabular surface, if then can be adopted measuring head 16.
Resemble the measuring head that constitutes above-mentioned and resemble following such action with position regulator 11.
When measuring head scans with the surface of 16 pairs of measurements of measuring head sample 17 of position regulator 11, check the from the beginning light source of spacing MA monitoring agency 14 of light, shine on datum plate 13 and the measurement sample 17.In addition, check that light is the 1st reflected light at the light of the surface reflection of datum plate 13, face reflection within it be the 2nd reflected light, be the 3rd reflected light at the light of the surface reflection of measuring sample 17, the light of face reflection within it is the 4th reflected light, injects linear image sensor.
According in this reflected light, the 1st～the 4th reflected light mainly is discussed, above-mentioned various abnormality monitored.The variation of 15 pairs the 2nd reflected light of control gear and the 3rd catoptrical spacing monitors, this spacing and reference value are compared, and approaching occasion is controlled this position adjusting mechanism 12 surpassing allowed band, and measuring head 16 leaves measures sample 17.At this moment, control gear 15 leaves measuring head 16 and measures sample 17.Spacing and reference value between the 2nd reflected light and the 3rd reflected light are compared, thus,, then finish operation, in addition,, then carry out above-mentioned action repeatedly, until in allowed band if surpass allowed band if in allowed band.The occasion that spacing between the 2nd reflected light and the 3rd reflected light is left above allowed band also is identical.In addition, the 4th reflected light is used for the occasion of the thickness of check measurement sample 17.
Thus, measuring head 16 can correctly scan measuring sample 17 according to set the mode that intervals is opened.
Also have, be judged to be the occasion of abnormality at control gear 15, correct position adjusting mechanism 12 is controlled, and measuring head 16 leaves measures sample 17.In this occasion, measuring head 16 leaves at once measures sample 17, until reaching predetermined sufficient spacing, promptly is in waiting status.Thus, measuring head 16 contacts with measuring sample 17, prevents to measure the situation of sample 17 breakages.Non-contact type determination of resistivity device
Below the measuring head that the adopts such scheme non-contact type determination of resistivity device with position regulator 11 is described.
Non-contact type determination of resistivity device is by the electromagnetic induction effect, utilizes the vortex flow that produces at the circuit surface of measuring sample, measures the device of resistivity.Provide the principle of mensuration of the resistivity of this non-contact type determination of resistivity device below.
If coil is applied HF voltage, then produce the magnetic field that high frequency period changes.If sample is positioned in this magnetic field, then on the surface of this sample, produces vortex flow.Vortex flow is the inside of conductor in the magnetic field of companion's time to time change, the vortex-like electric current that produces because of electromagnetic induction.Electric current be vortex-like with the perpendicular face of magnetic line of force direction in flow, produce Joule heat, the thermal loss of electromagnetic energy takes place.By adopting this electromagnetic induction effect, can measure the resistivity/sheet resistance of the measurement sample of semiconductor material, metallic film etc. according to the noncontact mode.Utilize this principle, constitute this non-contact type determination of resistivity device.
This non-contact type determination of resistivity device mainly comprises measuring head 22,23 as shown in Figure 3, and this measuring head 22,23 relatively is provided with according to the mode of the sample 21 that clamping is checked, has coil in inside; High frequency oscillator 24,24 pairs of these measuring heads 22,23 of this high frequency oscillator apply the voltage that changes according to high frequency; Capacitor 25, this capacitor 25 is arranged between the measuring head 22,23.
By such scheme, if,, apply the voltage of high frequency,,, produce vortex flow on the surface of sample 21 then as above-mentioned to measuring head 22,23 by high frequency oscillator 24, produce Joule heat, the thermal loss of electromagnetic energy takes place.
By high frequency oscillator 24, measuring head 22,23 is applied the high frequency of several MHz, thus, in the gap of each measuring head 22,23, produce the magnetic field of following high frequency and changing.So,,, in the sample 21 of electric conductivity, produce vortex flow then because of the high-frequency induction coupling if the sample of electric conductivity 21 enters the gap of these two measuring heads 22,23.The vortex flow that has produced forms Joule heat and disappears.That is because the shape (thickness) of the absorption of the high frequency power in the sample 21 and conductance (inverse of resistivity) and test has proportional relation, so pass through employing it, can with sample 21 discontiguous situations under, mensuration resistivity/sheet resistance.
The high frequency power that foregoing circuit consumed:
P＝E×I＝E(Ie+Io) ……(1)
Wherein,
P represents high frequency power;
E represents HF voltage;
I represents high-frequency current;
High-frequency current when Io represents not have sample;
Ie represents because of putting into the high-frequency current that sample increases;
Sample is put into the gap and the high frequency power of increase:
Pe＝E×Ie ……(2)
If the conductance of test is represented that by σ the thickness of sample represented by t, the coupling coefficient of coil represented by K, then
Pe＝E×Ie＝K×E
2×σ×t ……(3)
According to following formula,
Ie＝K×E×σ×t＝K×E×(t/ρ) ……(4)
So resistivity is:
ρ＝K×(E/Ie)×t(Ω-cm) ……(5)
Pass between resistivity (ρ) and the sheet resistance (ρ s) is:
ρs＝ρ/t＝K×(E/Ie)(Ω/sq) ……(6)
Keep certain state according to the high-frequency coupling coefficient between sample and coil, HF voltage keeps certain mode to control, and thus, sheet resistance ρ s and high-frequency current Ie are in inverse relation.So sheet resistance is according to adopting known standard sample in advance, the relation between sheet resistance and the high-frequency current resembles the mode of the curve map of Fig. 4 and makes.
With reference to this curve map, measure because of sample 21 and put into the high-frequency current that the gap of measuring head 22,23 increases, thus, can obtain the sheet resistance of the sample of the unknown.
In addition, multiply each other by the sheet resistance that will obtain and the thickness (cm unit) of sample, but the calculated resistance rate.
ρ＝ρs×t(Ω-cm) ……(7)
According to above-mentioned principle, constitute non-contact type determination of resistivity device.In addition,, adopt following scheme here, wherein, each measuring head 22,23 is concentrated into one, measuring head is according to the state of preserving slightly little gap, only the surface of a side of sample 21 scanned, and measures resistivity.
The non-contact type determination of resistivity device 31 of present embodiment resemble Fig. 5～shown in Figure 7 constitute.This non-contact type determination of resistivity device 31 is mainly by supporting base portion 32, and measuring head scanning mechanism 33 constitutes.
Supporting base portion 32 is for being used for supporting the device of the measurement sample 35 that is formed by the large-size glass substrate as 2m * 2m.This supporting base portion 32 is mainly by housing 36, shutter door 37, and bottom side roller 38, top side roller 39, rear support roller 40 constitutes.
About housing 36, be respectively arranged with measure sample 35 send into device (not shown) and delivery device (not shown).Measure sample 35 and be sent between bottom side roller 38 and the top side roller 39, after the mensuration of resistivity finishes, pass out to the outside by delivery device by sending into device.
Measuring head scanning mechanism 33 is for being used to make the device of measuring head 45 described later in the surperficial enterprising line scanning of measuring sample 35.Spacing between the surface of measuring head 45 and measurement sample 35 maintains in the scope of 200～300 μ m.This measuring head scanning mechanism 33 longitudinally is provided with, and is supported on supporting base portion 32.Thus, measuring head scanning mechanism 33 is provided with according to the surperficial discontiguous mode with a side of measuring sample 35 with striding across, and measuring head 35 can move in the lip-deep mode of measuring sample 35 according to the state support in the slightly little gap of maintenance.
Specifically, measuring head scanning mechanism 33 resembles Fig. 8, shown in Figure 9 constitutes like that.In addition, in Fig. 9,, describe according to the mode that the total length size is dwindled for the ease of understanding.In fact, housing 46 and ball-screw 47 form with long size, as Fig. 5.
Measuring head scanning mechanism 33 is by longitudinal scanning portion 43, and measuring head constitutes with position regulator 44 and measuring head 45.
CD-ROM drive motor 48 is installed on an end of housing 46, is connected with ball-screw 47.By this CD-ROM drive motor 48, according to set angle, or set rotational speed, rotation drives ball-screw 47.In the inside of housing 46, the mode according to arranged side by side with ball-screw 47 is provided with guide rail 50, supporting sliding part 49.Sliding part 49 by 50 supportings of this guide rail is by guide rail 50, suppresses to follow the rotation of ball-screw 47 and the rotation that produces, can axially successfully sliding along ball-screw 47.
In the inside of sliding part 49, be provided with spiral helicine groove (not shown), between the groove of the periphery of this groove and ball-screw 47, be provided with a plurality of ball (not shown)s.Thus, the rotation of ball-screw 47 can be exchanged into axial correct the moving of sliding part 49 by a plurality of balls.On sliding part 49, be integral measuring head position regulator 44 is installed.
With position regulator 44, adopt above-mentioned measuring head position regulator 11 as measuring head.In addition,, concrete scheme is not carried out meticulous description, and improved concrete scheme is specifically described with in the position regulator 11 at measuring head.
Measuring head uses position regulator 44 by a position adjusting mechanism 52, datum plate 53, and a spacing MA monitoring agency 54, control gear 55 constitutes.In addition, these functions are as above-mentioned.
Guide rail 58 is for being used for slidably supporting the parts of sliding panel 59.These guide rail 58 edges and the surperficial perpendicular direction setting of measuring sample 35, sliding panel 59 is according to supporting along the mode with the surperficial perpendicular direction slip of measuring sample 35.
Sliding panel 59 is for being used to support measuring head 45 etc., along with the parts of the surperficial perpendicular direction slip of measuring sample 35.Nut portions 60 is placed on the ball-screw 61, and ball-screw 61 rotations thus, can vertically be slided.Ball-screw 61 rotatably is supported on rotation on the support plate 57, thus, by nut portions 60, vertically makes measuring head 45 slips such as grade.CD-ROM drive motor 62 is installed on the support plate 57, is connected with ball-screw 61, makes this ball-screw 61 rotations.
Measuring head 45 constitutes according to the mode that above-mentioned measuring head 22,23 is integral combination.
Resembling the non-contact type determination of resistivity device that constitutes above-mentioned resembles and moves following.
At first, the inside that sample 35 is sent to supporting base portion 32 will be measured.The measurement sample of having sent into 35 transports by bottom side roller 38 and top side roller 39 and 40 supportings of rear support portion.
Be transported to desired location if will measure sample 35, then measuring head scanning mechanism 33 moves, and carries out the mensuration of resistivity.
In measuring head scanning mechanism 33, in longitudinal scanning portion 43, measuring head longitudinally scans measuring sample 35 with position regulator 44 to-and-fro movement longitudinally, measuring head 45.Longitudinal scanning portion 43 is along making measuring head position regulator 44 to-and-fro movements up and down, by measuring head 45, measure the appointed area, then, bottom side roller 38 by supporting base portion 32, measure sample 35 only along laterally moving, longitudinal scanning portion along making measuring head with position regulator 44 to-and-fro movements up and down, measures next zone once more.Carry out this operation repeatedly, measure the resistivity of the front of measuring sample 35.
At this moment, at measuring head with in the position regulator 44, according to above-mentioned measuring head with the identical mode effect of position regulator 11, support according to the mode that correctly keeps measuring head 45 and measure the spacing between the surface of sample 35.In addition, unusual occasion taking place, measuring head 45 and the surface of measuring sample 35 are left, is preventing the situation that measuring head 45 contacts with the surface of measuring sample 35.Thus, prevent to measure the breakage of sample.
In addition, in the above-described embodiments, measuring head adopts nut portions 60 and ball-screw 61 with the driving mechanism of position regulator 44, but also can adopt piezoelectric element.Such as, also can adopt linkage assembly as shown in Figure 10, the slightly little variation of piezoelectric element is amplified, the surface of measuring head 45 relative measurement samples 35 is moved.In Figure 10, pillar 74 is fixing, on this pillar 74, two connecting links 72,73 are installed rotatably.On an end of this connecting link 72,73, be integral and be supported with measuring head 45 etc.The other end at connecting link 72,73 is equipped with counterbalance weight 71.In addition, (measuring head 45 sides of pillar 74) are equipped with piezoelectric element 75 near the centre position of this connecting link 72,73.In addition, connecting link 72,73 is installed in the mode that can rotate fully.Thus, if piezoelectric element 75 changes,, measuring head 45 grades are moved then by being supported on the connecting link 72,73 on the pillar 74.Because the rate of change of piezoelectric element 75 is less, so adjust bearing position, to the distance between the bearing position of piezoelectric element 75, with bearing position from pillar 74 from pillar 74, ratio to the distance between the bearing position of measuring head 45 grades makes its variable quantity with measuring head 45 corresponding.Same by this mode, still realize effect same as described above and effect.
In addition, in the above-described embodiments, with flat glass substrate is example, is described measuring sample 35, still, if measuring head is smooth planar part with position regulator 11,44, owing to can correctly adjust the position of measuring head 16,45, be not limited to tabular so measure sample, if check surface is smooth planar, even be tabular in whole shapes, still can adopt the present invention.
In measuring head 45, be formed with the sensor of measuring resistivity, still, this measuring head also can be used for the measurement of other purposes.Must in the slightly little gap of maintenance,, then can adopt the present invention if be to the inspection of checking that the object face scans.
Spacing MA monitoring agency 14 comprises the linear image sensor of the incoming position of detection of reflected light, still, also can comprise the photo-sensitive cell of other scheme.In addition, in the occasion of adopt interfering etc., can check that also light vertically penetrates.
In addition, in the above-described embodiments, measuring head scanning mechanism 33 has along the function that up and down measuring head 45 is scanned, and still, also can have the function that makes these measuring head scanning mechanism 33 move left and right own.Thus, can be when the edge be scanned measuring head 45 up and down, measuring head scanning mechanism 33 can scan the front of measuring sample 35 along move left and right.
Claims (5)
1. measuring head position regulator is characterized in that: comprises,
Position adjusting mechanism, this position adjusting mechanism are adjusted measuring head and the spacing of measuring between the sample, and this measuring head scans the surface of measurement sample at the state of opening with slightly little intervals;
Transparent datum plate, the datum plate that this is transparent and above-mentioned measuring head form one, and according to being provided with the surperficial parallel mode of above-mentioned measurement sample, represent the spacing between the surface of above-mentioned measuring head and above-mentioned measurement sample indirectly;
Spacing MA monitoring agency, this spacing MA monitoring agency is by the said reference plate, penetrate inspection light to the surface of above-mentioned measurement sample, relatively at the reflected light of said reference plate reflection with at the reflected light of the surface reflection of measuring sample, monitor the spacing between the surface of above-mentioned measuring head and above-mentioned measurement sample thus;
Control gear, this control gear drive above-mentioned position adjusting mechanism according to the measured value of above-mentioned spacing MA monitoring agency, and the spacing between the surface of above-mentioned measuring head and above-mentioned measurement sample is adjusted into setting value.
2. measuring head position regulator according to claim 1 is characterized in that:
Above-mentioned spacing MA monitoring agency comprises the linear image sensor that detects above-mentioned catoptrical incoming position;
By this linear image sensor, detect catoptrical incoming position in the reflection of said reference plate, and the spacing between the catoptrical incoming position of above-mentioned measurement sample reflection.
3. measuring head position regulator according to claim 1, it is characterized in that: above-mentioned control gear is by above-mentioned spacing MA monitoring agency, monitor the reflected light that reflects at the said reference plate at ordinary times, reflected light in the reflection of said reference plate produces unusual occasion, drive above-mentioned position adjusting mechanism, make above-mentioned measuring head leave the surface of above-mentioned measurement sample.
4. measuring head position regulator according to claim 1, it is characterized in that: above-mentioned control gear is by above-mentioned spacing MA monitoring agency, at ordinary times the reflected light of the outside of said reference plate and the reflecting surface of inner face are being monitored, unusual occasions take place in two reflected light in the interior outside of said reference plate, drive above-mentioned position adjusting mechanism, make above-mentioned measuring head leave the surface of above-mentioned measurement sample.
5. non-contact type determination of resistivity device, in this non-contact type determination of resistivity device, measuring head with the surface of a side of measuring sample, keep the state of slightly little spacing, this surface is scanned, measure resistivity, it is characterized in that: this device comprises
Supporting base portion, sample is measured in this supporting base portion supporting;
The measuring head scanning mechanism, this measuring head scanning mechanism according to not be supported on above-mentioned supporting base portion on the mode that contacts of the surface of a side of measurement sample be provided with striding across, with the surface of above-mentioned measurement sample, keep the state of slightly little spacing, support above-mentioned measuring head, this measuring head is moved;
Above-mentioned measuring head scanning mechanism comprises,
Position adjusting mechanism, this position adjusting mechanism are adjusted the spacing between the surface of above-mentioned measuring head and above-mentioned measurement sample;
Transparent datum plate, the datum plate that this is transparent and above-mentioned measuring head form one, and according to being provided with the surperficial parallel mode of above-mentioned measurement sample, represent the spacing between the surface of above-mentioned measuring head and measurement sample indirectly;
Spacing MA monitoring agency, this spacing MA monitoring agency is by the said reference plate, surface to above-mentioned measurement sample, penetrate and check light, inject the reflected light of said reference plate and the reflected light of measurement sample, they are compared, monitor the spacing between the surface of above-mentioned measuring head and above-mentioned measurement sample;
Control gear, this control gear drive above-mentioned position adjusting mechanism according to the measured value of above-mentioned spacing MA monitoring agency, and the spacing between the surface of above-mentioned measuring head and measurement sample is adjusted into setting value.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003-375208 | 2003-11-05 | ||
| JP2003375208A JP4117353B2 (en) | 2003-11-05 | 2003-11-05 | Inspection head position adjusting device and non-contact type resistivity measuring device |
| JP2003375208 | 2003-11-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1614427A true CN1614427A (en) | 2005-05-11 |
| CN100424510C CN100424510C (en) | 2008-10-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410088575XA Active CN100424510C (en) | 2003-11-05 | 2004-11-05 | Position regulator for pickup and non-contacted electric resistance rate determiner |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4117353B2 (en) |
| KR (1) | KR101116984B1 (en) |
| CN (1) | CN100424510C (en) |
| TW (1) | TWI327647B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101981431B (en) * | 2008-08-11 | 2012-10-03 | 三菱重工业株式会社 | Resistivity checking method and device therefor |
| CN107768265A (en) * | 2017-10-16 | 2018-03-06 | 德淮半导体有限公司 | Wafer test system and method |
| CN111413546A (en) * | 2020-04-07 | 2020-07-14 | 宁波市重强电器有限公司 | Contact resistance analysis method of electric connector |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| EP1957965B1 (en) | 2005-11-14 | 2012-01-11 | Lehighton Electronics Inc. | Sheet conductance/resistance measurement system |
| CN103513111B (en) * | 2013-09-06 | 2016-08-17 | 国家电网公司 | The conductivity test system of a kind of plain conductor and method of testing |
| JP6378899B2 (en) * | 2014-02-28 | 2018-08-22 | 住友化学株式会社 | Substrate evaluation apparatus and substrate evaluation method |
| CN105044463B (en) * | 2015-06-29 | 2018-01-02 | 上海大学 | online resistivity test system |
| CN110562953B (en) * | 2019-10-15 | 2021-05-14 | 浙江卡波恩新材料有限公司 | Production and manufacturing technology of high-density carbon |
| CN113252992B (en) * | 2021-07-05 | 2021-11-05 | 山东国瓷功能材料股份有限公司 | Material dielectric property test equipment |
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| JPS63128211A (en) | 1986-11-19 | 1988-05-31 | Hitachi Ltd | Spacing measuring method |
| JPH0252205A (en) * | 1988-08-17 | 1990-02-21 | Dainippon Screen Mfg Co Ltd | Film thickness measuring method |
| JP2533664B2 (en) * | 1990-01-17 | 1996-09-11 | 株式会社日立製作所 | Magnetic recording device |
| US5473431A (en) * | 1993-04-29 | 1995-12-05 | Conner Peripherals, Inc. | Interferometric flying height measuring device including an addition of a spacer layer |
| JPH09298175A (en) * | 1996-05-09 | 1997-11-18 | Canon Inc | Polishing method and device therefor |
| DE19752576A1 (en) * | 1997-11-27 | 1999-06-02 | Terolab Services Management S | Testing with hand-held unit for e.g. thickness, porosity and adhesion properties of protective coatings hard and soft |
| US6166819A (en) * | 1998-06-26 | 2000-12-26 | Siemens Aktiengesellschaft | System and methods for optically measuring dielectric thickness in semiconductor devices |
| US6582619B1 (en) * | 1999-09-30 | 2003-06-24 | Lam Research Corporation | Methods and apparatuses for trench depth detection and control |
| JP2001319846A (en) * | 2000-05-02 | 2001-11-16 | Sanee Giken Kk | Aligner |
-
2003
- 2003-11-05 JP JP2003375208A patent/JP4117353B2/en not_active Expired - Lifetime
-
2004
- 2004-11-03 KR KR1020040088924A patent/KR101116984B1/en active IP Right Grant
- 2004-11-05 CN CNB200410088575XA patent/CN100424510C/en active Active
- 2004-11-05 TW TW093133796A patent/TWI327647B/en active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101981431B (en) * | 2008-08-11 | 2012-10-03 | 三菱重工业株式会社 | Resistivity checking method and device therefor |
| CN107768265A (en) * | 2017-10-16 | 2018-03-06 | 德淮半导体有限公司 | Wafer test system and method |
| CN111413546A (en) * | 2020-04-07 | 2020-07-14 | 宁波市重强电器有限公司 | Contact resistance analysis method of electric connector |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20050043650A (en) | 2005-05-11 |
| JP2005140564A (en) | 2005-06-02 |
| TWI327647B (en) | 2010-07-21 |
| TW200521453A (en) | 2005-07-01 |
| JP4117353B2 (en) | 2008-07-16 |
| CN100424510C (en) | 2008-10-08 |
| KR101116984B1 (en) | 2012-03-14 |
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