CN1604230A - Peripheral circuit balanced drive magnetic random access memory - Google Patents
Peripheral circuit balanced drive magnetic random access memory Download PDFInfo
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- CN1604230A CN1604230A CN 200410086219 CN200410086219A CN1604230A CN 1604230 A CN1604230 A CN 1604230A CN 200410086219 CN200410086219 CN 200410086219 CN 200410086219 A CN200410086219 A CN 200410086219A CN 1604230 A CN1604230 A CN 1604230A
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Abstract
This invention discloses an outer circuit balance magnetic random access memory, which comprises the following: memory control unit composed of outer circuit, hand or automatic information choosing and writing-in device; memory unit array composed of magnetic thin film memory units; the top electrode reading line is in cross with the bottom electrode writing line with a magnetic thin film memory unit between them; the top electrode reading line and bottom writing line common use one pair of electrodes to control the read flow and write flow through the read and write conversion switch.
Description
Technical field
The present invention relates to a kind of magnetoresistance effect multilayer film that get up by latest developments and can constitute random access memory (RAM, Random Access Memory) mnemon in, this RAM promptly is so-called electrodes of magnetoresistive random access memory (Magnetoresistive RAM), be called for short MRAM, the invention still further relates to the method for Card read/write among a kind of MRAM of realization.
Background technology
One, the magnetic memory cell among the MRAM
As the storage unit of MRAM, comprise a such membrane structure in the thin magnetic film at least: [F1/NF/F2].Wherein F1 and F2 represent two magnetic material layers, and NF represents layer of non-magnetic material, and the NF layer is between F1 layer and F2 layer.The direction of magnetization that has and only have one deck among F1 and the F2 is fixed (being called nailed layer) by the material of extraneous certain layer or several layers, thus can not be under little external magnetic field effect random variation; And one deck is a soft magnetosphere in addition, and its direction of magnetization can change (being called free layer) under little external magnetic field effect.The thickness of layer of non-magnetic material is very little, typical thickness asking at 0.5nm and 3.0nm.As storage unit, when the direction of magnetization of F1, F2 was identical, the thin magnetic film storage unit showed low resistance states with such thin magnetic film; And when the direction of magnetization of F1, F2 was opposite, the thin magnetic film storage unit then showed high resistance states.
Therefore, the thin magnetic film storage unit exists two stable resistance states, and free layer can make it recorded information with respect to the direction of magnetization of nailed layer in the thin magnetic film storage unit by changing; And, can obtain the information of its preservation by detecting the resistance states of thin magnetic film storage unit.
Two, typical mram cell structure
The structure of the thin magnetic film storage unit that adopts usually as shown in Figure 1 at present.This MRAM structural arrangements needs three metal wiring layer M1, M2, M3 and a transition metal layer TM altogether on Semiconductor substrate.Except readout word line RWL, ground wire GND, write word line WWL are in respectively in the different metal wiring layers with bit line BL.The thin magnetic film storage unit is connected with the drain region of transistor ATR by transition metal layer TM, metal wiring layer M2, M1 and relevant contact hole, and the source region of transistor ATR then is connected with ground wire GND, and the grid of transistor ATR is readout word line RWL.
Information writes to be worked in coordination with by bit line BL and write word line WWL and finishes in the thin magnetic film storage unit.When bit line BL and write word line WWL with the certain time sequence relation when writing working current, the resultant magnetic field in both magnetic field that electric current produced will make the direction of magnetization of free layer in the thin magnetic film storage unit be turned to specific direction, and this direction of magnetization can be stabilized in a state that is supposed in two steady state (SS) after the electric current of cancelling bit line BL, write word line WWL.Promptly realized writing and preserving of information in the thin magnetic film storage unit thus.
The information that reads in the thin magnetic film storage unit is then controlled by readout word line RWL.When allowing to read, readout word line RWL is on a suitable level in control, makes transistor ATR conducting.Exist this moment one by bit line BL (metal wiring layer M3) through thin magnetic film storage unit, transition metal layer TM, contact hole, metal wiring layer M2, contact hole, metal wiring layer M1, contact hole, transistor ATR drain region, transistor ATR source region and the electric path of the ground wire GND that arrives.Therefore, give a suitable read current, can extract the current resistance states of thin magnetic film storage unit by bit line BL.Promptly realized reading of information in the thin magnetic film storage unit thus.
As mentioned above, the MRAM of this kind structure need reach three metal wiring layer and a transition metal layer and form it and be electrically connected, and makes manufacturing process complexity, the cost height of MRAM.In addition, before making the thin magnetic film storage unit, technological operations such as deposition for several times, wiring, punching, insulating medium landfill have been passed through on the substrate, make that the profile pattern of thin magnetic film storage unit manufacturing face is relatively poor, must carry out special surface and throw flat PROCESS FOR TREATMENT (such as chemically mechanical polishing CMP, Chemical-Mechanical Polishing) could satisfy the specific (special) requirements of thin magnetic film memory films to its substrate surface planarization, this also is a problem that increases technology difficulty and manufacturing cost.
Summary of the invention
At problems of the prior art, the object of the present invention is to provide a kind of MAGNETIC RANDOM ACCESS MEMORY of peripheral circuit balanced driving, this access memory does not adopt method traditional and the semiconductor CMOS coupling, and directly takes simple conventional peripheral circuit to realize reading and writing of information.
For achieving the above object, the MAGNETIC RANDOM ACCESS MEMORY of a kind of peripheral circuit balanced driving provided by the invention it comprise:
A) memory control unit that is made of peripheral circuit, this control module are independent of the memory cell array that the thin magnetic film storage unit constitutes, the position that manually or automatically selection information reads and writes;
B) memory cell array that constitutes by thin magnetic film storage unit (MTJ);
C) top electrode readout word line (Read Line) and hearth electrode write word line (Write Line) are mutually orthogonal, and thin magnetic film storage unit (MTJ) is between top electrode readout word line and hearth electrode write word line;
D) top electrode readout word line and the shared pair of electrodes of hearth electrode write word line are by passing through of read-write switch control read current and write current.
Further, the basic structure of described thin magnetic film storage unit is made of two-layer magnetic material layer and the layer of non-magnetic material between two magnetospheres, and canned data is represented by the relative magnetized state of magnetic material layer and preserved.
Further, the direction of easy axis of at least one magnetic material layer of described thin magnetic film storage unit is along the longitudinal direction of described top electrode readout word line and hearth electrode write word line.
Further, described hearth electrode write word line be arranged in described thin magnetic film storage unit under.
Further, described top electrode readout word line is arranged in the top of described hearth electrode write word line, and directly over the promptly described thin magnetic film storage unit, and described top electrode readout word line and described hearth electrode write word line are buried media isolated by insulation.
Further, described write current is that two-way has the pulse current of certain sequential to constitute, and its pulse width and pulse strength are all adjustable continuously.
The present invention does not adopt method traditional and the semiconductor CMOS coupling, and directly takes simple conventional peripheral circuit to realize reading and writing of information, has simplified the structure of access memory greatly, thereby has reduced the production cost of access memory.The present invention also can use separately, mixes single-chip microcomputer and just can show English or Chinese content, carries out the less Information Access of capacity, but is suitable for very much having very application prospects such as open air edit advertisement board etc.
Description of drawings
The present invention is further detailed explanation below in conjunction with the drawings and specific embodiments.
Fig. 1 is the schematic three dimensional views of the MAGNETIC RANDOM ACCESS MEMORY mram cell structure of prior art.
Fig. 2 is the Information Access cell array synoptic diagram with crossed electrode.
Fig. 3 assists the synoptic diagram of realizing the array addressing by potential balance.
Fig. 4 is a write current sequential synoptic diagram.
Fig. 5 is the total principle schematic of peripheral circuit that the present invention adopts.
Fig. 6 is that information reads synoptic diagram.
Fig. 7 is that information writes synoptic diagram 1 (parallel direction).
Fig. 8 is that information writes synoptic diagram 2 (anti-parallel direction).
Embodiment:
So-called peripheral circuit balanced driving refers to and only gets thin magnetic film as storage unit among the present invention, does not adopt method traditional and the semiconductor CMOS coupling, and directly takes simple conventional peripheral circuit to realize reading and writing of information.Do two mutually orthogonal metal wires respectively as readout word line and write word line on its top and bottom during the preparation thin magnetic film.We adopt 10 microns wide copper metal lines of 350 nanometer thickness as conductive layer, show by calculating the test that reaches subsequently, it can provide enough magnetic field to finish the upset of free layer in specified range of current, and its good thermal stability, within the scope of our permission, the heat of its generation does not obviously have influence on the resistance value of thin magnetic film.The hearth electrode write word line be positioned at the thin magnetic film storage unit under, and the top electrode readout word line be positioned at the thin magnetic film storage unit directly over.An array can be formed in such unit, can take line as readout word line, and alignment is as the method for write word line.Different like this storage unit is respectively between different readout word lines and write word line.Allow its direction of easy axis along the longitudinal direction of described top electrode readout word line and hearth electrode write word line during preparation thin magnetic film storage unit, can guarantee like this to finish upset free layer with as far as possible little magnetic field.Isolate by silicon dioxide insulator between top electrode readout word line and the hearth electrode write word line.Be provided with between readout word line and the write word line voltage follower with guarantee read current or write current can be all from the magnetic memory cell chosen by and do not shunted.Can realize controlling different storage unit by potential balance, promptly so-called addressing.When information read, electric current was crossed thin magnetic film by the readout word line vertical current on thin magnetic film top and since thin magnetic film the magnetic moment parastate during with antiparallel state the resistance height different, therefore can define high resistance state is 1, defining low resistance state is 0.Thereby reading of the information of realization.Read current 0.05～10mA is adjustable, a bypass is set adjusts its size in advance, and step-length is 0.05mA.Read current is too small can to increase noise, thereby can not detect good signal; Read current is excessive at first may to puncture the thin magnetic film storage unit, secondly can reduce the magnetic tunneling effect, thereby causes the difficulty of 1,0 state of distinguishing to increase.Therefore, should at first determine the size and the scope of read current according to the specific performance of thin magnetic film storage unit.Information is write fashionable, readout word line and write word line concern by writing working current with certain time sequence, both resultant magnetic fields that electric current produced will make the direction of magnetization of free layer in the thin magnetic film storage unit be turned to specific direction, and this direction of magnetization can be stabilized in a state that is supposed in two steady state (SS) after the electric current of cancelling readout word line, write word line.Promptly realized writing and preserving of information in the thin magnetic film storage unit thus.Write constant current source I
RAnd I
WBe pulse current, pulse strength 1～200mA is adjustable, and adjustable in pulse width 5～100 microseconds, 1 pulse of per second is provided with a bypass and adjusts its size in advance, writes I
BAnd I
WPulse current has the certain time sequence relation, and as shown in Figure 4, lap is adjustable between 0～t.Adjust the pulse strength of write current, free layer does not produce too much heat again so that write current can overturn on request at interval for pulse width and sequential.Keep good thermal stability.Fig. 5 is the total principle schematic of peripheral circuit that the present invention adopts.As shown in Figure 5, the first half constitutes a crossing current source by power supply, transformer, mu balanced circuit.The power supply of 5 volts and 12 volts is provided for entire circuit.The right is respectively a voltage table and a reometer, is used for showing the size of read current and the pressure drop of thin magnetic film storage unit (MTJ) both sides.Lower Half is made up of current source (read-write), selector switch, indicating circuit, driving circuit, buffer circuit and several parts of thin magnetic film storage unit (MTJ).Row choosing, column selection and 0/1 selector switch all adopt manual, automatic two kinds of patterns.Buffer circuit is used for writing down the state of each thin magnetic film storage unit (MTJ) and data is passed to indication mechanism when only adopting automatic mode in system.Be provided with short circuit protection system in order to protect in thin magnetic film storage unit (MTJ) circuit.The read current source provides the continuously adjustable weighing apparatus stream of 0.05～10mA source, step-length 0.05mA.Write current is a pulse current, and branch writes, is listed as and writes two.Pulse strength 1～200mA is adjustable, and adjustable in pulse width 5～100 microseconds, 1 pulse of per second is provided with a bypass and adjusts its size in advance, and row is write, the row write current has the certain time sequence relation, and adjustable.
Embodiment 1:
No matter be reading and write the first step and will at first determining position, promptly so-called addressing of information.As shown in Figure 2, thin magnetic film memory cell array in the mram memory is combined by a large amount of mram cells, in a mram cell, comprise a thin magnetic film storage unit MTJ, top electrode readout word line (Read Line), hearth electrode write word line (Write Line), thin magnetic film storage unit MTJ be positioned at top electrode readout word line (Read Line) under and directly over hearth electrode write word line (Write Line).Readout word line and write word line are mutually orthogonal.
When information reads, the read current of pre-set size wherein one tunnel (Na Yilu that flows through configures in advance according to wish) in the top electrode readout word line of flowing through.Na Yilu connects with ground in the hearth electrode readout word line, electric current is just by flowing through among the thin magnetic film storage unit MTJ between top electrode of choosing and the hearth electrode chosen, as shown in Figure 6, electric current is introduced by top electrode readout word line (RL), the thin magnetic film storage unit of flowing through (MTJ) is after hearth electrode write word line (WL) outflow.As previously mentioned, comprise a such membrane structure in the thin magnetic film at least: [F1/NF/F2].Wherein F1 and F2 represent two magnetic material layers, and NF represents layer of non-magnetic material, and the NF layer is between F1 layer and F2 layer.The direction of magnetization that has and only have one deck among F1 and the F2 is fixed (being called nailed layer) by the material of extraneous certain layer or several layers, thus can not be under little external magnetic field effect random variation; And one deck is a soft magnetosphere in addition, and its direction of magnetization can change (being called free layer) under little external magnetic field effect.Will form the capable or antiparallel state of magnetic anomaly between such two magnetic material layers.Under these two kinds of different states, electronics has very big difference from a magnetic material layer by the probability that layer of non-magnetic material is tunneling to another magnetic material layer, can show as has different resistance values under the two states, that is has different magnitudes of voltage in thin magnetic film storage unit both sides.If a voltage table is set in circuit detects its change in voltage, then can distinguish two states of MTJ according to the difference of magnitude of voltage, be defined as 1 and 0 respectively.If singly choose one road readout word line and one road write word line, can not guarantee that all electric currents flow through from the MTJ that chooses, have the part electric current and flow through from other MTJ, detect to such an extent that will be a synthetic pressure drop like this.In order to address this problem, as shown in Figure 3, voltage follower is set on readout word line, so just can guarantee read current can be all from the magnetic memory cell chosen by and do not shunted.
Information is write fashionable, as shown in Figure 5, at first the read-write switch is switched to the position of writing, and will only allow write current to pass through like this, and write current I is set
RAnd I
WPulse strength and pulse width and precedence, time interval t.Choosing the MTJ that will write, is 0 or 1 to determine sense of current according to what will write.As shown in Figure 7, when the top electrode readout word line flows through a pulse current, electric current will produce a magnetic field, and this action of a magnetic field will change the magnetic moment direction of free layer in the MTJ free layer.Pulse current disappears by magnetic field, back, and the magnetic moment direction of free layer will return to original direction; When same hearth electrode write word line flows through a pulse current, electric current also will produce a magnetic field, and this action of a magnetic field also can change the magnetic moment direction of free layer in the MTJ free layer.Pulse current disappears by magnetic field, back, and the magnetic moment direction of free layer will return to original direction.No matter this shows, be top electrode readout word line or hearth electrode write word line during separately by a pulse current, can thoroughly not change the magnetic moment direction of MTJ free layer, and after electric current passed through, magnetic field disappeared, and the MTJ free layer recovers original magnetic moment direction.When having only top electrode readout word line and hearth electrode write word line successively respectively to pass through a pulse current with certain time sequence, its resultant magnetic field could thoroughly change the magnetic moment direction of MTJ free layer, when electric current passes through, when magnetic field disappears, the MTJ free layer can not return to original magnetic moment direction, but has forwarded the direction opposite with original magnetic moment to.The magnetic moment direction of free layer can change direction under the driving of electric current like this, and the magnetic moment direction of pinning layer does not change, and has just formed parallel and antiparallel state, as shown in Figure 7 and Figure 8.No matter be top electrode readout word line or hearth electrode write word line, all getting in touch a lot of MTJ, as previously mentioned, though the influence that places under the top electrode readout word line separately or place the magnetic field that pulse current produced that the MTJ on the hearth electrode write word line can be subjected to passing through on it separately, after magnetic field disappears, all can return to original state; Have only under the top electrode readout word line that places the electric current process simultaneously and the hearth electrode write word line on its free layer magnetic moment direction of MTJ just can thoroughly change, magnetic field can not return to original state after disappearing.That is to say the state that at every turn only changes a MTJ.
Embodiment 2
The invention provides another control mode.In peripheral circuit, be provided with counter and buffer memory.All the other embodiments are with embodiment 1.When information reads like this, no longer with the equally manual addressing of embodiment 1, but regularly read each MTJ, remember the state of each MTJ by the buffer memory in the circuit, and on display, show, the circuit operation once just can be known the state of each MTJ by display like this.
Equally, write fashionablely in information, can determine in advance the state of each MTJ, can determine the direction of write current in view of the above according to definition.Write current is successively by each MTJ, the state that can obtain wanting just, and circuit moves the state that once just can determine all MTJ in the MTJ array like this.
The present invention can help to solve among the MRAM and the relevant difficult problem of magnetic memory cell (MTJ) preferably, because it can be independent of outside the semiconductor CMOS, so required fund input is less.The present invention also can use separately, mixes single-chip microcomputer and just can show English or Chinese content, carries out the less Information Access of capacity, but is suitable for very much having very application prospects such as open air edit advertisement board etc.
Claims (6)
1, a kind of MAGNETIC RANDOM ACCESS MEMORY of peripheral circuit balanced driving is characterized in that, comprising:
A) memory control unit that is made of peripheral circuit, this control module are independent of the memory cell array that the thin magnetic film storage unit constitutes, the position that manually or automatically selection information reads and writes;
B) memory cell array that constitutes by the thin magnetic film storage unit;
C) top electrode readout word line and hearth electrode write word line are mutually orthogonal, and the thin magnetic film storage unit is between top electrode readout word line and hearth electrode write word line;
D) the shared pair of electrodes of top electrode readout word line and hearth electrode write word line is by passing through of read-write switch control read current and write current.
2, the MAGNETIC RANDOM ACCESS MEMORY of peripheral circuit balanced driving as claimed in claim 1, it is characterized in that, the basic structure of described thin magnetic film storage unit is made of two-layer magnetic material layer and the layer of non-magnetic material between two magnetospheres, and canned data is represented and preserved by the relative magnetized state of magnetic material layer wherein.
3, the MAGNETIC RANDOM ACCESS MEMORY of peripheral circuit balanced driving as claimed in claim 1 or 2, it is characterized in that the direction of easy axis of at least one magnetic material layer of described thin magnetic film storage unit is along the longitudinal direction of described top electrode readout word line and hearth electrode write word line.
4, the MAGNETIC RANDOM ACCESS MEMORY of peripheral circuit balanced driving as claimed in claim 3 is characterized in that, described hearth electrode write word line be arranged in described thin magnetic film storage unit under.
5, the MAGNETIC RANDOM ACCESS MEMORY of peripheral circuit balanced driving as claimed in claim 4, it is characterized in that, described top electrode readout word line is arranged in the top of described hearth electrode write word line, be described thin magnetic film storage unit directly over, and described top electrode readout word line and described hearth electrode write word line are buried media isolated by insulation.
As the MAGNETIC RANDOM ACCESS MEMORY of the arbitrary described peripheral circuit balanced driving of claim 1 to 5, it is characterized in that 6, described write current is that two-way has the pulse current of certain sequential to constitute, its pulse width and pulse strength are all adjustable continuously.
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2004100862194A CN100495567C (en) | 2004-10-28 | 2004-10-28 | Peripheral circuit balanced drive magnetic random access memory |
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|---|---|---|---|
| CNB2004100862194A CN100495567C (en) | 2004-10-28 | 2004-10-28 | Peripheral circuit balanced drive magnetic random access memory |
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| CN1604230A true CN1604230A (en) | 2005-04-06 |
| CN100495567C CN100495567C (en) | 2009-06-03 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107004442A (en) * | 2014-12-24 | 2017-08-01 | 英特尔公司 | Magnetic memory write circuit system with the bit-line drive intensity based on memory cell line resistance |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE19836567C2 (en) * | 1998-08-12 | 2000-12-07 | Siemens Ag | Memory cell arrangement with memory elements with a magnetoresistive effect and method for their production |
| TW544677B (en) * | 2000-12-26 | 2003-08-01 | Matsushita Electric Ind Co Ltd | Magneto-resistance memory device |
| US6404674B1 (en) * | 2001-04-02 | 2002-06-11 | Hewlett Packard Company Intellectual Property Administrator | Cladded read-write conductor for a pinned-on-the-fly soft reference layer |
| JP2002358775A (en) * | 2001-05-31 | 2002-12-13 | Sony Corp | Magnetic memory device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107004442A (en) * | 2014-12-24 | 2017-08-01 | 英特尔公司 | Magnetic memory write circuit system with the bit-line drive intensity based on memory cell line resistance |
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