CN1603599A - Minisize chemical propeller with pressure sensor - Google Patents
Minisize chemical propeller with pressure sensor Download PDFInfo
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- CN1603599A CN1603599A CN 200410009790 CN200410009790A CN1603599A CN 1603599 A CN1603599 A CN 1603599A CN 200410009790 CN200410009790 CN 200410009790 CN 200410009790 A CN200410009790 A CN 200410009790A CN 1603599 A CN1603599 A CN 1603599A
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- igniter
- firing chamber
- jet pipe
- small chemical
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- 239000000126 substance Substances 0.000 title claims description 21
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 13
- 239000010703 silicon Substances 0.000 claims abstract description 13
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 5
- 239000010409 thin film Substances 0.000 claims abstract description 5
- 238000010304 firing Methods 0.000 claims description 35
- 239000000843 powder Substances 0.000 claims description 18
- 239000010408 film Substances 0.000 claims description 17
- 239000003380 propellant Substances 0.000 claims description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- 239000003795 chemical substances by application Substances 0.000 claims description 9
- 239000000567 combustion gas Substances 0.000 claims description 6
- 229910052697 platinum Inorganic materials 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- 125000004122 cyclic group Chemical group 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 239000011253 protective coating Substances 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 12
- 238000002485 combustion reaction Methods 0.000 abstract description 8
- 239000003721 gunpowder Substances 0.000 abstract description 3
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
- 239000004020 conductor Substances 0.000 description 7
- 238000002955 isolation Methods 0.000 description 7
- 239000010410 layer Substances 0.000 description 7
- 238000011160 research Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 108091092878 Microsatellite Proteins 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000004449 solid propellant Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 238000004861 thermometry Methods 0.000 description 3
- 230000009466 transformation Effects 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 238000009530 blood pressure measurement Methods 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 238000005485 electric heating Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical group N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 235000019504 cigarettes Nutrition 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000005474 detonation Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000007726 management method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000006855 networking Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000037452 priming Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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Abstract
The belt pressure transmitter miniature chemistry propeller, belongs to the micro advancement technology and the MEMS area of technology. In order to solve the existing MEMS chemistry propeller to be unable the reaction control question, this invention discloses a kind of belt pressure transmitter miniature chemistry propeller, he becomes by the upper formation silicon chip and the lower level silicon chip two parts of caking, and is a series of basic advancements unit periodic array; Each basic advancement unit upper formation partially integrated the combustion chamber, the bomb igniter cavity and the nozzle, the nozzle plate and the combustion chamber base initial point gunpowder cavity unites passes; Each basic advancement unit lower level partially integrated the pressure transmitter and the igniter, its base for in concave frustum structure, the crown for the pressure sensitive thin film, the pressure transmitter inlays in the pressure sensitive thin film, the igniter is located the pressure sensitive thin film the top.The invention causes in the combustion chamber to implement the pressure to survey into possibly, simultaneously has omitted the craft step which the combustion chamber and the nozzle healthily gathers, has avoided because healthily gathers causes aims at the error.
Description
Technical field
The invention belongs to little Push Technology (Micro Propulsion) and MEMS technology (Micro Electro-MechanicalSystem) field.
Background technique
Propulsion system is the key subsystem of most of astrovehicles, is mainly used in orbit maneuver, track maintenance and the special attitude control etc. of astrovehicle.Yet recent two decades comes, and Yan Zhi micro-satellite (quality is less than 20kg) is especially received and nearly all is not equipped with propulsion system in type/picosatellite (quality is less than 10kg) in the world, thereby has only extremely limited maneuverability.This mainly is because traditional propulsion system volume and quality all have very greatly, is not suitable for the use of micro-satellite.Along with the microminaturization of satellite, and many development of receiving type/picosatellite networking and formation flight, the demand of, light weight little to volume, precision height, micro-thruster low in energy consumption is more and more urgent.
Micro-thruster all is an emerging research field abroad still based on the microdriver (being called for short the MEMS propulsion device) of MEMS technology at home especially.Under American university Sputnik program and advanced space transport project support, all researchs aspect the microdriver of throwing oneself into of scientific research institution such as JPL laboratory, TRW Ltd. (US) One Space Park, Redondo Beach CA 90278 U.S.A., MIT, and obtained impressive progress.The university of states such as ESA, Surrey university and Japan in Europe and scientific research institution are also in the work of being engaged in aspect the micro-thruster.Domestic scientific research institutions are also obtaining certain achievement aspect micro-thruster that is suitable for the type of receiving/picosatellite application and the control system research thereof.
The MEMS propulsion device has structurally carried out improving to traditional propulsion device and is microminiaturized, combines advanced micro-/ nano technology and micro-processing technology on technology.The MEMS propulsion device of research mainly contains two big classes according to the working principle branch: electric propulsion device and chemical propeller at present.The invention belongs to MEMS propulsion device field.
The MEMS electric propulsion has the following disadvantages:
1. electric heating type gas electric propulsion device, though relatively simple for structure, can produce continuous variable thrust, the propulsion device specific impulse is lower, and system need be equipped with propellant agent high pressure tank and supply line, has increased propulsion-system mass and volume greatly.Control for propellant gas is supplied with generally has two kinds of ways: 1) use solenoid valve, though it is reliable to work, and the electromagnetic valve structure complexity, volume and weight is all bigger, is difficult to the MEMS propulsion device integrated; 2) use is based on little valve control of MEMS technology, and this way has solved the problem of the system intergration, but the little valve functional reliability of MEMS is low, is easy to generate gas leakage, thereby has reduced the reliability of the work of whole propulsion system;
2. electric heating type phase transformation electric propulsion device utilizes propellant agent gasification or distillation to produce thrust, and specific impulse is lower.Make the propellant agent phase transformation by heating, power consumption is bigger.Equally also there is propellant leakage, the problem that functional reliability is low.And,, often cause propellant agent to condense in delivery line or the jet pipe because the propellant agent phase transformation is incomplete for distillation formula electric propulsion device, cause the reduction of mechanical efficiency, decreased performance.
3. electrostatic type and electromagnetic type electric propulsion, operating voltage high (generally will go up kilovolt) needs to adopt complicated power supply control and management system, has increased the volume and weight of system.Simultaneously, the voltage that the micro-satellite power-supply system can provide is generally 3～28V, and therefore, too high voltage also is not suitable for using on micro-satellite.And these two kinds of angle of rake plumes are charged particle, cause electromagnetic pollution easily, will add the plume neutralized system toward contact, cause the further microminiaturized and integrated difficulty of whole propulsion system.
The MEMS chemical propeller utilizes MEMS technology, and all parts of propulsion device are integrated in a slice chip, produces accurate small impulse force by solid or liquid propellant burning.Propulsion device generally adopts array structure, and each unit can work independently also can work in combination, and thrust is adjustable, and multi-disc is used in combination and can also realizes vector control, be applicable to the type of receiving/picosatellite track maintenance, attitude adjustment, become rail and directed accurate control.Itself does not have movable member propulsion device, the functional reliability height.Existing MEMS chemical propulsion system block diagram such as Fig. 1 comprise communication interface, control logic circuit, ignition drive circuit and propulsion device (containing igniter, firing chamber and jet pipe).
There is following problems in existing MEMS chemical propeller:
1. do not have the integrated pressure measuring cell in the propulsion device, can't measure internal pressure of combustion chamber.During the work of array-type propulsion device, the propulsion unit of some is lighted according to actual needs by system, thereby reaches the satellite momentum increment requirement of expection.Because the working procedure and the state of each unit all are not quite similar, and tend to produce the momentum error.If do not have real-time pressure to measure feedback during work, and adopt open loop control, just be unable to estimate the size of real work momentum, be difficult to the error momentum is compensated.
2. propulsion unit adopts the structure of bottom priming mode, and the firing chamber does not have the combustion gas release channel, causes propellant combustion insufficient, thereby the specific impulse reduction, and the uncertainty of minimum thrust and momentum is big; If solid propellant, fully jet pipe is not stopped up in burning easily.Propulsion unit adopts the structure of top firing mode, igniter carrier film on, carrier film is silicon nitride or silica, thermal conductivity is low, so postpones firing time greatly, igniting power is higher.
3. there is membrane structure in nozzle throat, after the film rupture, and throat's out-of-shape, thus cause exit area ratio uncertain, make each unit thrust and impulse lack of homogeneity.
Summary of the invention
The objective of the invention is to solve the problem that existing MEMS chemical propeller can't feedback control, and reduced the processing technology difficulty.
The invention provides a kind of very small chemical propulsion device with pressure transducer, it is characterized in that: described propulsion device is by upper strata silicon chip and bonding the forming of lower floor's silicon chip two-part, and be the cyclic array of a series of basic propulsion units, the array scalable is mainly limited by technological level simultaneously by the actual demand decision.The top section of described each basic propulsion unit is integrated firing chamber, ignition powder chamber and jet pipe, described jet pipe bottom is connected by described ignition powder chamber with bottom, described firing chamber, the propellant agent formation combustion gas that takes fire from bottom, described firing chamber, combustion gas is discharged from described jet pipe top; The underclad portion of described each basic propulsion unit is integrated pressure transducer and igniter, its bottom is the terrace with edge structure of indent, the top is the presser sensor film, and pressure transducer is embedded in the described presser sensor film, and igniter is positioned at the end face of described presser sensor film.
In each basic propulsion unit, the coaxial aperture that described firing chamber and ignition powder chamber join for two-stage up and down, coaxial aperture can be cylindrical hole or prismatic hole.
In each basic propulsion unit, described jet pipe evenly distributes around described firing chamber, and becomes the rotation symmetry with respect to the axis of firing chamber.The number of jet pipe is at least 2.Nozzle shape can be cylindrical hole or prismatic hole.
In each basic propulsion unit, described jet pipe, firing chamber and ignition powder chamber sidewall all are covered with the silica thermal-protective coating.
Igniter resistance of the present invention adopts the metal platinum thin-film material, is snakelike folding structure.Igniter can be multiplexed with the thermometry sensor simultaneously.
Pressure transducer of the present invention is made of according to the wheatstone bridge layout form piezoresistance.
Characteristics of the present invention are: integrated pressure measurement device, and igniter can be simultaneously as temperature-measuring element with the platinum resistor manufacturing, and jet pipe and firing chamber are integrated.Compare with existing MEMS chemical propeller array, the present invention has following characteristics: the 1) pressure transducer of simultaneously integrated igniter and wheatstone bridge layout form on lower floor's silicon chip, make that the real-time pressure measurement becomes possibility in the firing chamber, and make the system can closed loop work; 2) igniter uses platinum resistor, and resistance directly contacts with ignition powder, and the centre does not have interlayer, so ignition delay time is short, and igniting power is low; 3) platinum resistor can be used as temperature-measuring element, thermometry and igniter multiplexing functions; 4) upside-down mounting jet pipe and firing chamber are integrated in the same silicon chip, have saved the process step of firing chamber and jet pipe bonding, have avoided because the alignment errors that bonding causes.5) nozzle throat does not have barrier film, has eliminated because of film breaks to cause that indefinite basic propulsion unit thrust and the momentum that causes of exit area ratio is inhomogeneous.
Description of drawings
Fig. 1 is the block diagram of existing very small chemical micro-thruster system.
Fig. 2 is the angle of rake overall structure schematic representation of very small chemical.
Fig. 3 is basic propulsion unit structure shaft side figure.
Fig. 4 is basic propulsion unit longitudinal section.
Fig. 5 is the underclad portion shaft side figure of basic propulsion unit.
Fig. 6 is the igniter schematic representation.
Fig. 7 is the piezoresistance schematic layout pattern.
Fig. 8 is the block diagram of the very small chemical micro-thruster system of band pressure transducer.
Embodiment
Specify the present invention below in conjunction with accompanying drawing.
1. integral body and basic cell structure
Shown in Figure 2 is angle of rake overall structure, by upper strata silicon chip 1 and bonding the forming of lower floor's silicon chip 2 two-part, is the cyclic array of a series of basic propulsion units 3, and the size of array is variable according to actual usage requirement, limited by technological level.Because the blast of a unit causes that the chain explosion of adjacent cells damages whole propulsion device, adopt propulsion unit grouping array layout in order to prevent.
As shown in Figure 3, the top section 4 of basic propulsion unit 3 is integrated firing chamber, ignition powder chamber and jet pipe.Jet pipe evenly distributes around the firing chamber, and becomes the rotation symmetry with respect to the axis of firing chamber.Jet pipe number and cross-section area require design according to the indoor pressure of Actual combustion, thrust and impulse, are at least 2, can be more.The underclad portion 5 of basic propulsion unit 3 is integrated igniter 7 and pressure transducer 6.Solid propellant is poured in the firing chamber, igniter point of ignition gunpowder during work, and propellant agent is lighted in the ignition powder detonation, and bottom-up cigarette burning produces high-pressure gas to propellant agent from the bottom, and combustion gas produces thrust from the ejection of jet pipe top.But each basic propulsion unit separated ignition work also can be made up ignition operation.
Fig. 4 has shown the vertical section structure of basic propulsion unit in detail, and therefore top section adopts ICP processing owing to will obtain darker hole and the bigger structure of depth-to-width ratio.The surface silicon technology of the processing and utilization of igniter and pressure sensor and CMOS process compatible in the underclad portion forms the presser sensor film thereby the silicon chip back side etches indent terrace with edge structure with each diversity wet etching or RIE on top.The solid propellant of annotating after top section firing chamber and the jet pipe completion of processing, then and the underclad portion that processes finish bonding.Bonding chip, the igniter in each basic propulsion unit all be positioned at respective combustion chamber under.
2. the top section structure of basic propulsion unit describes in detail
As Fig. 4, the top section of basic propulsion unit comprises firing chamber 8, ignition powder chamber 11 and jet pipe 9.Solid propellant is filled in firing chamber 8, and low ignition energy threshold, low-energy explosive ignition powder are filled in ignition powder chamber 11.The coaxial aperture that described firing chamber and ignition powder chamber join for two-stage up and down, coaxial aperture can be cylindrical hole or prismatic hole.Upside-down mounting jet pipe 9 evenly distributes around firing chamber 8, and becomes the rotation symmetry with respect to the axis of firing chamber 8, and the jet pipe bottom links to each other with the firing chamber by the ignition powder chamber.The number of jet pipe is at least 2.Nozzle shape can be cylindrical hole or prismatic hole.Firing chamber and nozzle wall form silica thermal-protective coating 10 by the method for thermal oxidation, purpose is in order to improve the adiabaticity of firing chamber and nozzle wall, reduce heat transmission between the adjacent propulsion unit, thereby improve the efficient and the specific impulse of propulsion device acting, increase the reliability of propulsion device work.
3. the underclad portion structure of basic propulsion unit describes in detail
As Fig. 4, the underclad portion of basic propulsion unit is made up of six major components, is followed successively by igniter 7 and row address conductors 16, first isolation layer 12, row address conductors 13, second isolation layer 14, pressure transducer 6, bottom isolation layer 15 from top to bottom.Fig. 5 is the shaft side figure of the underclad portion of basic propulsion unit, the bottom of the underclad portion of basic propulsion unit is the terrace with edge structure of indent, the top is the presser sensor film, and pressure transducer 6 is embedded in the described presser sensor film, and igniter 7 is positioned at the end face of described presser sensor film.
Capable address conductors in the underclad portion and igniter are on same aspect, and the lighting outlet of row address conductors links to each other with an end of igniter.First isolation layer is a silica, and its effect is the insulation between the ranks address conductors, and the row address conductors links to each other with the other end of igniter by the through hole on the isolation layer.Second isolation layer also is a silica, and its effect is the insulation between row address conductors and the pressure transducer.The bottom isolation layer is a silicon nitride, and effect is the insulation between upper strata pressure transducer and lead and the silicon base, and it also is the part of pressure sensitive film simultaneously, and the piezoresistance position thereon.
Figure 6 shows that the shape of the igniter of amplification, igniter is the metal platinum film resistor, adopts snakelike folded form, the one, and in order to increase resistance, the 2nd, in order to increase effective area of contact of resistance and ignition powder, increase the reliability of igniting.Resistance length and folding times according to actual require variable.Igniter can be multiplexed with the thermometry sensor simultaneously.
Pressure transducer is made of according to the wheatstone bridge layout form piezoresistance, the distribution form of piezoresistance 17 as shown in Figure 7, can compensation temperature to the influence of resistance, can improve measuring accuracy and sensitivity again.
The very small chemical propulsion device of band pressure transducer of the present invention can constitute the micro-thruster system of closed loop control, as shown in Figure 8.Because the integrated Wheatstone bridge of measuring pressure makes propulsion system can form the closed loop control of pressure feedback in the very small chemical propulsion device of band pressure transducer of the present invention.Simultaneous temperature sensitive resistance and igniter are multiplexing, and temperature sensing device directly contacts with ignition powder, but the initial temperature of measuring point gunpowder, for IGNITION CONTROL provides parameter.
Claims (7)
1. the very small chemical propulsion device of band pressure transducer, it is characterized in that: described propulsion device is by upper strata silicon chip and bonding the forming of lower floor's silicon chip two-part, and is the cyclic array of a series of basic propulsion units; The top section of described each basic propulsion unit is integrated firing chamber, ignition powder chamber and jet pipe, described jet pipe bottom is connected by described ignition powder chamber with bottom, described firing chamber, the propellant agent formation combustion gas that takes fire from bottom, described firing chamber, combustion gas is discharged from described jet pipe top; The underclad portion of described each basic propulsion unit is integrated pressure transducer and igniter, its bottom is the terrace with edge structure of indent, the top is the presser sensor film, and pressure transducer is embedded in the described presser sensor film, and igniter is positioned at the end face of described presser sensor film.
2. very small chemical propulsion device according to claim 1 is characterized in that: in each basic propulsion unit, and the coaxial aperture that described firing chamber and ignition powder chamber join for two-stage up and down.
3. very small chemical propulsion device according to claim 1 is characterized in that: in each basic propulsion unit, described jet pipe evenly distributes around described firing chamber, and becomes the rotation symmetry with respect to the axis of firing chamber.
4. according to claim 1,2 or 3 described very small chemical propulsion devices, it is characterized in that: in each basic propulsion unit, the number of described jet pipe is at least 2.
5. according to claim 1,2 or 3 described very small chemical propulsion devices, it is characterized in that: in each basic propulsion unit, described jet pipe, firing chamber and ignition powder chamber sidewall all are covered with the silica thermal-protective coating.
6. very small chemical propulsion device according to claim 1 is characterized in that: described igniter resistance adopts the metal platinum thin-film material, is snakelike folding structure.
7. very small chemical propulsion device according to claim 1 is characterized in that: described pressure transducer is made of according to the wheatstone bridge layout form piezoresistance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410009790 CN1282823C (en) | 2004-11-12 | 2004-11-12 | Minisize chemical propeller with pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410009790 CN1282823C (en) | 2004-11-12 | 2004-11-12 | Minisize chemical propeller with pressure sensor |
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| Publication Number | Publication Date |
|---|---|
| CN1603599A true CN1603599A (en) | 2005-04-06 |
| CN1282823C CN1282823C (en) | 2006-11-01 |
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| CN 200410009790 Expired - Fee Related CN1282823C (en) | 2004-11-12 | 2004-11-12 | Minisize chemical propeller with pressure sensor |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100391824C (en) * | 2005-06-09 | 2008-06-04 | 江苏大学 | Quantum minitype propeller using vacuum |
| CN101907040A (en) * | 2010-07-23 | 2010-12-08 | 北京航空航天大学 | Nitrogen cold gas micro propulsion device adopting ring storage tank |
| CN102086022A (en) * | 2010-12-16 | 2011-06-08 | 西北工业大学 | Forming device of extruded type micro explosive column |
| CN102434316A (en) * | 2011-10-09 | 2012-05-02 | 北京理工大学 | Bipropellant micro chemical propulsion array device |
| CN107740734A (en) * | 2017-09-28 | 2018-02-27 | 江苏大学 | A kind of self energizing igniting propeller based on micro-scale gas flow |
| CN110425056A (en) * | 2019-07-16 | 2019-11-08 | 西北工业大学 | One kind promoting array structure based on 3D printing technique miniature solid |
-
2004
- 2004-11-12 CN CN 200410009790 patent/CN1282823C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100391824C (en) * | 2005-06-09 | 2008-06-04 | 江苏大学 | Quantum minitype propeller using vacuum |
| CN101907040A (en) * | 2010-07-23 | 2010-12-08 | 北京航空航天大学 | Nitrogen cold gas micro propulsion device adopting ring storage tank |
| CN101907040B (en) * | 2010-07-23 | 2013-04-24 | 北京航空航天大学 | Nitrogen cold gas micro propulsion device adopting ring storage tank |
| CN102086022A (en) * | 2010-12-16 | 2011-06-08 | 西北工业大学 | Forming device of extruded type micro explosive column |
| CN102434316A (en) * | 2011-10-09 | 2012-05-02 | 北京理工大学 | Bipropellant micro chemical propulsion array device |
| CN102434316B (en) * | 2011-10-09 | 2014-02-12 | 北京理工大学 | Bipropellant micro chemical propulsion array device |
| CN107740734A (en) * | 2017-09-28 | 2018-02-27 | 江苏大学 | A kind of self energizing igniting propeller based on micro-scale gas flow |
| CN110425056A (en) * | 2019-07-16 | 2019-11-08 | 西北工业大学 | One kind promoting array structure based on 3D printing technique miniature solid |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1282823C (en) | 2006-11-01 |
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Granted publication date: 20061101 Termination date: 20131112 |