CN1601344A - Sprayer,substrate of color optical filter and mfg.of electroluminescent display device - Google Patents
Sprayer,substrate of color optical filter and mfg.of electroluminescent display device Download PDFInfo
- Publication number
- CN1601344A CN1601344A CNA200410011984XA CN200410011984A CN1601344A CN 1601344 A CN1601344 A CN 1601344A CN A200410011984X A CNA200410011984X A CN A200410011984XA CN 200410011984 A CN200410011984 A CN 200410011984A CN 1601344 A CN1601344 A CN 1601344A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- shower nozzle
- nozzle
- coordinate
- length
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
- G02F1/13415—Drop filling process
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Mathematical Physics (AREA)
- Coating Apparatus (AREA)
- Optical Filters (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Nozzles (AREA)
- Gas-Filled Discharge Tubes (AREA)
- Cold Cathode And The Manufacture (AREA)
- Electroluminescent Light Sources (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Abstract
X coordinate of a reference nozzle of a second head is further deviated by 1/2 times of a first length relative to that deviated by a second length from X coordinate of the reference nozzle of a first head. X coordinate of a reference nozzle of a fourth head is further deviated by 1/2 times of the first length relative to X coordinate deviated by the second length from X coordinate of the reference nozzle of a third head. The X coordinate of the reference nozzle of the third head is deviated by 1/4 times or 3/4 times of the first length relative to the X coordinate deviated by the second length from the X coordinate of the reference nozzle of the second head. The first length is a nozzle pitch in an X axis direction of the head. The second length is the product of the first length and the number of nozzles/4 of the head.
Description
Technical field
The present invention relates to spray the blowoff and the jet method of liquid material, more particularly, relate to the blowoff and the jet method that are suitable for the operation of coating liquid material in the zone of configuration periodically such as colored filter substrate and array display device.
Background technology
As everyone knows, with ink discharge device can be in the pixelation zone coating material.For example, knownly can form the filter elements of colored filter substrate and the illuminating part of the rectangular configuration of array display device (for example, patent documentation 1) with ink discharge device.
[patent documentation 1] spy opens the 2003-127343 communique
In most cases, a plurality of spacings that are ejected portion of coating material and the injector spacing of ink discharge device are inconsistent.What is called is ejected portion, for example is meant the position that will establish filter elements.
Therefore, in the existing ink discharge device, 2 distance and distances between 2 spray nozzles that are ejected between the portion are consistent like that according to making, and the direction that shower nozzle (the perhaps direction of nozzle arrangement) is arranged with respect to the portion of being ejected tilts.But, during such formation, be ejected under distance between the portion situation different with each colored filter at 2, to spend the time of the setting angle of change shower nozzle to each colored filter.In order to change the setting angle of shower nozzle, spend according to the angle of shower nozzle and make the time of vehicle frame again and shower nozzle is reinstalled to time on its new vehicle frame.
In addition, when increasing, with respect to 1 ejection increased frequency that is ejected portion by 1 volume that is ejected the material that portion must spray.At this moment, the fluctuation of the spray volume between nozzle shows as crawling easily.
Summary of the invention
In view of above-mentioned problem, one of purpose of the present invention is, the crawling in the portion of being ejected is reduced.
The jet head sets that blowoff of the present invention possesses stand, relatively moves with respect to above-mentioned stand.In addition, above-mentioned jet head sets is made of the 1st shower nozzle, the 2nd shower nozzle, the 3rd shower nozzle and the 4th shower nozzle.Each of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle has P spray nozzle, it is such to become the 1st length according to each the injector spacing of X-direction of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle, disposes an above-mentioned P spray nozzle.Above-mentioned the 1st shower nozzle and above-mentioned the 2nd shower nozzle are adjacent to each other on Y direction, and above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle are adjacent to each other on above-mentioned Y direction.And the X coordinate of the benchmark nozzle of above-mentioned the 2nd shower nozzle only is offset the X coordinate of the 2nd length with respect to the X coordinate from the benchmark nozzle of above-mentioned the 1st shower nozzle, is offset 1/2 times of above-mentioned the 1st length again.The X coordinate of the benchmark nozzle of above-mentioned the 4th shower nozzle only is offset the X coordinate of above-mentioned the 2nd length with respect to the X coordinate from the benchmark nozzle of above-mentioned the 3rd shower nozzle, is offset 1/2 times of above-mentioned the 1st length again.And the above-mentioned X coordinate of the benchmark nozzle of above-mentioned the 3rd shower nozzle only is offset the X coordinate of above-mentioned the 2nd length with respect to the above-mentioned X coordinate from the benchmark nozzle of above-mentioned the 2nd shower nozzle, is offset 1/4 times or 3/4 times of above-mentioned the 1st length.In addition, the P/4 that above-mentioned the 2nd length is above-mentioned the 1st length times, P is the natural number more than 2, and above-mentioned X-direction and Y direction are orthogonal.
According to above-mentioned feature, even the position of each nozzle in the shower nozzle by the spray volume difference of the drop of nozzle, for the row of the drop that is sprayed by jet head sets, also is difficult to occur the difference of spray volume.Since the nozzle that belongs to various zones of shower nozzle in jet head sets along the X-direction adjacency, so become the reason of the difference of eliminating spray volume.
Preferably, in each of above-mentioned 4 shower nozzles, an above-mentioned P spray nozzle is arranged in above-mentioned X-direction.
According to above-mentioned feature, on falling the position, the bullet that X-direction is arranged to spray drop simultaneously.
According to above-mentioned feature, a plurality of nozzle arrangement on X-direction.Therefore, with respect to the target that on X-direction, prolongs (being ejected portion), can side by side spray liquid material substantially from above-mentioned a plurality of nozzles.Its result can sharedly be used to spray the drive signal of liquid material with respect to a plurality of nozzles.In addition and since from the time of a plurality of nozzles ejections of arranging in direction be simultaneously substantially, so can not be used for the circuit formation etc. of delay driving signal.Its result, it is few that inadequate essential factor takes place the waveform in the drive signal, therefore, can drive shower nozzle with accurate drive waveforms.
Preferably, the nozzle of above-mentioned P in each of above-mentioned 4 shower nozzles all forms the 1st row and the 2nd row that prolong on above-mentioned X-direction, in above-mentioned the 1st row and the above-mentioned the 2nd each that is listed as, above-mentioned a plurality of nozzle is with 2 times spacing arrangement of above-mentioned the 1st length, and above-mentioned the 1st row are listed in respect to the above-mentioned the 2nd and only are offset above-mentioned the 1st length on the above-mentioned X-direction.
According to above-mentioned feature, the injector spacing of the X-direction of shower nozzle is diminished.Therefore, the nozzle line density of the X-direction of shower nozzle can be big.
According to certain mode of the present invention, above-mentioned P spray nozzle in each of above-mentioned 4 shower nozzles is formed on M row that prolong on each X-direction, in above-mentioned M each that is listed as, an above-mentioned P spray nozzle is with the M spacing arrangement doubly of above-mentioned the 1st length, with respect to above-mentioned M of being listed as, the individual i length doubly that only is offset above-mentioned the 1st length on the unduplicated X-direction that is listed in of other (M-1).In addition, M is the natural number more than 2, and i is from 1 natural number to (M-1).
According to above-mentioned feature, can make the injector spacing of X-direction of shower nozzle littler.Therefore, the nozzle line density of the X-direction of shower nozzle can be bigger.
Preferably, above-mentioned stand keeps having the matrix of the portion of being ejected, relatively move along above-mentioned Y direction with respect to above-mentioned matrix by above-mentioned jet head sets, under at least 1 nozzle of above-mentioned a plurality of nozzles and situation that the above-mentioned portion of being ejected overlaps, from above-mentioned at least 1 nozzle to the above-mentioned portion of being ejected ejection liquid material.
According to above-mentioned feature, can be to the portion's of being ejected coating material selectively.
According to another kind of mode of the present invention, the above-mentioned image plane that is ejected portion is the rectangle by the cardinal principle of its long limit and minor face decision, above-mentioned stand is parallel with above-mentioned X-direction according to the direction on above-mentioned long limit, the parallel such above-mentioned matrix that keeps of direction of above-mentioned minor face of while with above-mentioned Y direction, relatively move along above-mentioned y direction of principal axis with respect to above-mentioned matrix by above-mentioned jet head sets, at least 2 spray nozzles of above-mentioned a plurality of nozzles substantially simultaneously with situation that the above-mentioned portion of being ejected overlaps under, the while sprays above-mentioned liquid material to the above-mentioned portion of being ejected substantially from above-mentioned at least 2 spray nozzles.
According to above-mentioned feature, jet head sets on Y direction, relatively move 1 time during in (in 1 time scan period), can spray the liquid material of necessary volume to 1 portion of being ejected.Its reason is that a plurality of nozzles are ejected portion with respect to 1 can spray liquid material simultaneously.
In addition, the present invention can accomplished in various ways, for example, can realize with the manufacturing installation of colored filter and the mode of the manufacturing installation of el display device and the manufacturing installation of plasma display system etc.
Jet method of the present invention comprises: the matrix that will have a portion of being ejected is positioned in the step (a) on the stand; With make injector spacing become the 1st length step (b) that the 1st shower nozzle, the 2nd shower nozzle, the 3rd shower nozzle and the 4th shower nozzle of P spray nozzle of configuration relatively move along Y direction with respect to above-mentioned matrix in separately like that according to separately X-direction.And, above-mentioned steps (b) comprises step (b1), and this step (b1) makes the X coordinate of the benchmark nozzle of above-mentioned the 2nd shower nozzle in 1 scan period, only be offset the X coordinate of the 2nd length with respect to X coordinate, be offset 1/2 times of above-mentioned the 1st length again from the benchmark nozzle of above-mentioned the 1st shower nozzle; Make the X coordinate of the benchmark nozzle of above-mentioned the 4th shower nozzle, only be offset the X coordinate of above-mentioned the 2nd length, be offset 1/2 times of above-mentioned the 1st length again with respect to X coordinate from the benchmark nozzle of above-mentioned the 3rd shower nozzle; Make the above-mentioned X coordinate of the benchmark nozzle of above-mentioned the 3rd shower nozzle, only be offset the X coordinate of above-mentioned the 2nd length with respect to above-mentioned X coordinate from the benchmark nozzle of above-mentioned the 2nd shower nozzle, be offset 1/4 times or 3/4 times of above-mentioned the 1st length, make above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle simultaneously, relatively move along Y direction with respect to above-mentioned matrix.Above-mentioned steps (b1) comprises that also a side who makes in above-mentioned the 1st shower nozzle and above-mentioned the 2nd shower nozzle relatively moves to the opposing party continuously, the step that the side in above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle is relatively moved to the opposing party continuously.In addition, above-mentioned P is the natural number more than 2, and the P/4 that above-mentioned the 2nd length is above-mentioned the 1st length doubly.
According to above-mentioned feature, even the position of each nozzle in the shower nozzle by the spray volume difference of the drop of nozzle, for the row of the drop that is sprayed by jet head sets, also is difficult to occur the difference of spray volume.Since the nozzle that belongs to various zones of shower nozzle in jet head sets along the X-direction adjacency, so become the reason of the difference of eliminating spray volume.
Preferably, above-mentioned steps (b) comprises makes above-mentioned 4 shower nozzles of nozzle that have the above-mentioned P of arrangement in above-mentioned X-direction separately, the step (b2) that relatively moves along above-mentioned Y direction with respect to above-mentioned matrix.
More preferably, above-mentioned jet method also is included in by above-mentioned steps (b), and at least 1 nozzle of above-mentioned a plurality of nozzles is invaded and the above-mentioned step (c) that sprays liquid material at least when being ejected in the corresponding zone of portion, from above-mentioned 1 nozzle to the above-mentioned portion of being ejected.
According to above-mentioned feature, for the portion's of being ejected coating material selectively.
According to another kind of mode of the present invention, the above-mentioned image plane that is ejected portion is the rectangle by the cardinal principle of long limit and minor face decision, and that above-mentioned steps (a) comprises is parallel with above-mentioned X-direction according to the direction on the above-mentioned long limit that is ejected portion, the step (a1) of the above-mentioned matrix of the parallel such mounting with above-mentioned Y direction of direction of above-mentioned minor face of while; At least 2 spray nozzles that above-mentioned steps (c) also is included in above-mentioned a plurality of nozzles are invaded substantially simultaneously with above-mentioned when being ejected in the corresponding zone of portion, and the while sprays the step (c1) of above-mentioned liquid material to the above-mentioned portion of being ejected substantially from above-mentioned at least 2 spray nozzles.
According to above-mentioned feature, in 1 time scan period, can spray the liquid material of necessary volume to 1 portion of being ejected.Its reason is that a plurality of nozzles are ejected portion with respect to 1 can spray liquid material simultaneously.
Description of drawings
Fig. 1 is the mode chart of the blowoff of expression embodiment 1.
Fig. 2 is the mode chart of the vehicle frame of expression embodiment 1.
Fig. 3 is the mode chart of the shower nozzle of expression embodiment 1.
Fig. 4 (a) and (b) be the mode chart of ejection portion of the shower nozzle of expression embodiment 1.
Fig. 5 is the mode chart of relative position relation of the shower nozzle in the jet head sets of expression embodiment 1.
Fig. 6 is the mode chart of the control part of expression embodiment 1.
Fig. 7 (a) is the mode chart of the shower nozzle drive division of expression embodiment 1, (b) is the time diagram of drive signal, selection signal and ejection signal in the expression shower nozzle drive division.
Fig. 8 (a) and (b) be the mode chart of expression embodiment 1 from the drop ejection of jet head sets order.
Fig. 9 is the mode chart of the matrix of expression embodiment 2.
Figure 10 is the mode chart of the manufacturing installation of expression embodiment 2.
Figure 11 is the mode chart of the blowoff of expression embodiment 2.
Figure 12 is the mode chart of the jet method of expression embodiment 2.
Figure 13 is the mode chart of the manufacture method of expression embodiment 2.
Figure 14 (a) and (b) be the mode chart of matrix of expression embodiment 3.
Figure 15 is the mode chart of the manufacturing installation of expression embodiment 3.
Figure 16 is the mode chart of the blowoff of expression embodiment 3.
Figure 17 is the mode chart of the manufacture method of expression embodiment 3.
Figure 18 (a) and (b) be the mode chart of matrix of expression embodiment 4.
Figure 19 is the mode chart of the manufacturing installation of expression embodiment 4.
Figure 20 is the mode chart of the blowoff of expression embodiment 4.
Figure 21 is the mode chart of the manufacture method of expression embodiment 4.
Figure 22 is the mode chart of the manufacture method of expression embodiment 4.
Figure 23 (a) and (b) be the mode chart of matrix of expression embodiment 5.
Figure 24 is the mode chart of the manufacturing installation of expression embodiment 5.
Figure 25 is the mode chart of the blowoff of expression embodiment 5.
Figure 26 is the mode chart of the manufacture method of expression embodiment 5.
Figure 27 is the mode chart of the manufacture method of expression embodiment 5.
Figure 28 is the mode chart of the manufacture method of expression embodiment 5.
Figure 29 is the mode chart of expression sweep limit.
Figure 30 is the curve map of distribution of the spray volume of pattern ground expression embodiment 1.
Among the figure,
The 1234-manufacturing installation
The 1A1B2A2B3A3B4A4B-nozzle rows
The 10A30A50A70A-matrix
The 100100R100G100B100C200R200G200B300R300G300B400-blowoff
102-sprays scanner section
The 103-vehicle frame
104-the 1st position control
The 106-stand
108-the 2nd position control
The 111-liquid material
111R111G111B-colorized optical filtering sheet material
The 1141141114211431144-shower nozzle
The 112-control part
The 114G-jet head sets
The 116A116B-nozzle rows
The 118-nozzle
118R-benchmark nozzle
The 124-Vib.
The 124C-piezoelectric element
The 124A124B-electrode
127-ejection portion
208-shower nozzle drive division
203-drive signal generating unit
The AS-analog switch
The DS-drive signal
The 204-handling part
SC-selects signal
ES-sprays signal
The 10A30A50A70A-matrix
The 10-colored filter substrate
18R18G18B38R38G38B58R58G58B78-is ejected portion
The 111FR111FG111FB-color filter layers
The 134-sweep limit
The 30-el display device
The back substrate of 50B-plasma display system
The 50-plasma display system
Embodiment
[embodiment 1]
Below, according to the blowoff and the jet method of following narrative order explanation present embodiment.
A. all formations of blowoff
B. vehicle frame
C. shower nozzle
D. jet head sets
E. control part
F. an example of jet method
(all formations of A. blowoff)
As shown in Figure 1, blowoff 100 possesses container 101, pipeline 110 that keeps liquid material 111 and the ejection scanner section 102 of supplying with liquid material 111 by means of pipeline 110 from container 101.Ejection scanner section 102 possesses the 2nd position control 108 and the control part 112 of the position of vehicle frame 103, the 1st position control 104 of controlling the position of vehicle frame 103 that keeps a plurality of shower nozzles 114 (Fig. 2), the stand 106 that keeps matrix 10A described later, control stand 106.Container 101 is connected by pipeline 110 with a plurality of shower nozzles 114 in the vehicle frame 103, with pressurized air liquid material 111 is supplied with each a plurality of shower nozzle 114 from container 101.
The 1st control device 104 moves vehicle frame 103 along X-direction with the Z-direction vertical with X-direction according to the signal from control part 112.In addition, the 1st control device 104 also has the function of turning round vehicle frame 103 in the rotating mode of axle parallel with the Z axle.In the present embodiment, Z-direction is and the parallel direction of vertical direction (being the direction of acceleration of gravity).The 2nd position control 108 moves stand 106 according to the signal from control part 112 along the Y direction vertical with the both sides of X-direction and Z-direction.In addition, the 2nd position control 108 also has the function with the axle rotating mode rotary stand 106 parallel with the Z axle.In addition, in this manual, be " scanner section " with the 1st position control 104 and the 2nd position control 108 souvenirs.
Stand 106 has the parallel plane of both sides with X-direction and Z-direction.In addition, stand 106 is according to fixing or remain on its plane and constitute like that having the matrix that must be coated with the portion that is ejected of prescribed material.In addition, the matrix souvenir that will have the portion of being ejected in this manual is " accepting substrate ".
X-direction in this instructions, Y direction and Z-direction are consistent with respect to the direction that the opposing party relatively moves with the either party of vehicle frame 103 and stand 106.In addition, the imaginary initial point of the XYZ coordinate of regulation X-direction, Y direction and Z-direction system is fixed on the reference part of blowoff 100.In this instructions, the coordinate in the XYZ coordinate system that X coordinate, Y coordinate and Z coordinate come to this.In addition, above-mentioned imaginary initial point not only can be reference part, and both can be fixed in stand 106, also can be fixed in vehicle frame 103.
As mentioned above, vehicle frame 103 moves along X-direction by the 1st position control 104.On the other hand, stand 106 moves along Y direction by the 2nd position control 108.That is, can change relative position with respect to the shower nozzle 114 of stand 106 by the 1st position control 104 and the 2nd position control 108.More particularly, by their action, vehicle frame 103, jet head sets 114G (Fig. 2), shower nozzle 114 or nozzle 118 (Fig. 3), with respect to the portion that is ejected by stand 106 decision positions, the distance that on Z-direction, keeps regulation, relatively move in X-direction and Y direction simultaneously, i.e. scanning relatively.Here, with respect to the static portion that is ejected, vehicle frame 103 also can move along Y direction.
And, also can vehicle frame 103 move along Y direction regulation 2 dot spacings during in, with respect to the static portion that is ejected from nozzle 118 ejection materials 111.So-called " relatively moving " or " relative scanning " comprises the side that makes ejection liquid material 111 and at least one side moving with respect to the opposing party of the side (being ejected portion's side) that fallen by the ejecta bullet of this side.
In addition, so-called vehicle frame 103, jet head sets 114G (Fig. 2), shower nozzle 114 or nozzle 118 (Fig. 3) relatively move and are meant with respect to stand 106, matrix or are ejected their variation of relative position of portion.Therefore, in this manual, even vehicle frame 103, jet head sets 114G, shower nozzle 114 or nozzle 118 be with respect under blowoff 100 situations static, that only stand 106 moves, vehicle frame 103, jet head sets 114G, shower nozzle 114 or nozzle 118 also souvenir for to relatively move with respect to stand 106, matrix or the portion of being ejected.In addition, sometimes also with relative scanning or relatively move and the combination table of the ejection of material is designated as " coating scanning ".
(B. vehicle frame)
Fig. 2 is the figure that observes vehicle frame 103 from stand 106 sides, and the direction vertical with the paper of Fig. 2 is Z-direction.In addition, the left and right directions of the paper of Fig. 2 is an X-direction, and the above-below direction of paper is a Y direction.
As shown in Figure 2, vehicle frame 103 keeps having respectively a plurality of shower nozzles 114 of same configuration substantially.In the present embodiment, the quantity of the shower nozzle 114 of vehicle frame 103 maintenances is 24.Shower nozzle 114 separately has the bottom surface that is provided with a plurality of nozzle 118 described later.The shape of this bottom surface of shower nozzle 114 separately is the polygons with 2 long limits and 2 minor faces.As shown in Figure 2, the bottom surface of shower nozzle 114 is towards stand 106 sides, and in addition, the long side direction of shower nozzle 114 is parallel with Y direction with X-direction respectively with short side direction.In addition, the details of shower nozzle 114 the relative position of each other relation will be in aftermentioned.
In this manual, will on Y direction, 4 shower nozzle 114 souvenirs of adjacency be " jet head sets 114G " sometimes.According to this souvenir, the vehicle frame 103 of Fig. 2 can show as and keep 6 jet head sets 114G.
(C. shower nozzle)
Fig. 3 is the bottom surface of expression shower nozzle 114.Shower nozzle 114 has a plurality of nozzles 118 of arranging on X-direction.These a plurality of nozzles 118 become about 70 μ m according to the injector spacing HXP of the X-direction of shower nozzle 114 and dispose like that.Here, " the injector spacing HXP of the X-direction of shower nozzle 114 " and make whole nozzles 118 in the shower nozzle 114 spacing between a plurality of nozzle pictures of obtaining is suitable penetrating picture on the X-axis along Y direction.
In the present embodiment, a plurality of nozzles 118 in the shower nozzle 114 all form nozzle rows 116A and the nozzle rows 116B that prolongs on X-direction.Nozzle rows 116A and nozzle rows 116B arrange on Y direction.And in each of nozzle rows 116A and nozzle rows 116B, 90 nozzles 118 are arranged in row at certain intervals on X-direction.In the present embodiment, this certain intervals is about 140 μ m.That is, the injector spacing LNP of the injector spacing LNP of nozzle rows 116A and nozzle rows 116B is about 140 μ m.
The position of nozzle rows 116B is with respect to the position of nozzle rows 116A half the length (about 70 μ m) at positive direction (right of Fig. 3) the skew injector spacing LNP of X-direction.Therefore, the injector spacing HXP of the X-direction of shower nozzle 114 is half the length (about 70 μ m) of the injector spacing LNP of nozzle rows 116A (perhaps nozzle rows 116B).
Therefore, the nozzle line density of the X-direction of shower nozzle 114 is 2 times of nozzle line density of nozzle rows 116A (or nozzle rows 116B).In addition, in this manual, " the nozzle line density of X-direction " is with to make a plurality of nozzles penetrate the number of average unit length of a plurality of nozzle pictures of obtaining of picture along Y direction on X-axis suitable.
Much less, the number of the nozzle rows that contains of shower nozzle 114 not only is defined in 2.Shower nozzle 114 also can contain M nozzle rows.Here, M is the natural number more than 1.Under this situation, a plurality of nozzles 118 in each of M nozzle rows are with the spacing arrangement of the M length doubly of injector spacing HXP.In addition, M is under the natural situation more than 2, and with respect to one of M nozzle rows, other (M-1) individual nozzle rows only is offset the i length doubly of injector spacing HXP on unduplicated X-direction.Here, i is from 1 natural number to (M-1).
So, because free 90 nozzles formation of each of nozzle rows 116A and nozzle rows 116B, so 1 shower nozzle 114 just has 180 nozzles.But, set as " idle nozzle " at 5 nozzles of difference at the two ends of nozzle rows 116A.Equally, also set at 5 nozzles of difference at the two ends of nozzle rows 116B as " idle nozzle ".And, from these 20 " idle nozzles ", do not spray liquid material 111.Therefore, in 180 of shower nozzle 114 mouths 118 only 160 nozzles 118 have as the function that can spray the nozzle of liquid material 111.In this manual, be " spray nozzle " with these 160 nozzle 118 souvenirs.
In addition, the quantity of the nozzle 118 in 1 shower nozzle 114 is not limited to 180.Also can establish 360 nozzles on 1 shower nozzle 114.Under this situation, nozzle rows 116A and nozzle rows 116B are separately as long as be made of 180 nozzles 118.In addition, the nozzle number among the present invention is not limited to 160.P spray nozzle also can be arranged on 1 shower nozzle 114.Here, P is the natural number more than 2, as long as just passable below the whole nozzle number in shower nozzle 114.
In this manual, closing with explanation shower nozzle 114 the relative position of each other is purpose, in 90 nozzles 118 that contain among the nozzle rows 116A, will be from a left side the 6th " the benchmark nozzle 118R " that nozzle 118 souvenirs are shower nozzle 114.That is, in 80 nozzles among the nozzle rows 116A, the nozzle of the leftmost side is shower nozzle 114 " benchmark nozzle 118R ".In addition, owing to the designation method that needs only " benchmark nozzle 118R " with respect to all shower nozzles 114 is identical, so the position of " benchmark nozzle 118R " also can not be above-mentioned position.
As Fig. 4 (a) with (b), the shower nozzle 114 of each is ink guns.More particularly, the shower nozzle 114 of each possesses oscillating plate 126, nozzle plate 128.Often fill the hydrops groove 129 of the liquid material of supplying with 111 by means of hole 131 between oscillating plate 126 and nozzle plate 128 from container 101.
In addition, a plurality of next doors 122 are between oscillating plate 126 and nozzle plate 128.And the part that is surrounded by oscillating plate 126, nozzle plate 128 and 1 counter septum 122 is a cavity 120.Owing to cavity 120 and nozzle 118 corresponding establishing, so the quantity of cavity 120 is identical with the quantity of nozzle 118.By means of the supply port 130 between 1 counter septum 122, liquid material 111 is supplied with cavity 120 from hydrops groove 129.
On oscillating plate 126, with cavity 120 corresponding location Vib.s 124 separately.Vib. 124 comprises pair of electrodes 124A, the 124B of piezoelectric element 124C and clamping piezoelectric element 124C.When giving between this pair of electrodes 124A, 124B, by respective nozzles 118 ejection liquid materials 111 with driving voltage.In addition, according to the shape of on Z-direction, adjusting nozzle 118 like that from nozzle 118 ejection liquid materials.
Here, " liquid material " in this manual is meant the material with viscosity that can spray from nozzle.Under this situation, tube material is not water-based or oiliness.As long as possessing the flowability that can spray from nozzle is fully, even sneak into solid matter, as long as conduct is that liquid is just passable all.
Control part 112 (Fig. 1) also can constitute like that according to independently of each other signal being given each a plurality of Vib. 124.That is, also can be according to signal, to the volume of each nozzle 118 control from the material 111 of nozzle 118 ejections from control part 112.Under these circumstances down, the volume by the material 111 of each nozzle 118 ejection can change between 0p1～42p1 (micromicro liter).In addition, as described later, control part 112 also can be set in the nozzle 118 that sprays the nozzle 118 of action between the coating scanning and do not spray action.
In this manual, also will comprise 1 nozzle 118, the cavity 120 corresponding and be " ejection portion 127 " sometimes with the part souvenir of the corresponding Vib. 124 of cavity 120 with nozzle 118.According to this souvenir, 1 shower nozzle 114 has the ejection portion 127 with the number of nozzle 118.Ejection portion 127 also can have electrothermal conversioning element and replace piezoelectric element.That is, ejection portion 127 also can have the material heat expansion that utilization produces by electrothermal conversioning element and spray constituting of material.
(D. jet head sets)
Below, the relative position relation of 4 shower nozzles 114 among the jet head sets 114G is described.Fig. 5 has represented 2 jet head sets 114G of vehicle frame 103 adjacency on Y direction of Fig. 2.
As shown in Figure 5, each jet head sets 114G is made of 4 shower nozzles 114.And 1/4 times the length of injector spacing HXP that becomes the X-direction of shower nozzle 114 according to the injector spacing GXP of the X-direction of jet head sets 114G disposes 4 ink guns 114 like that in jet head sets 114G.In the present embodiment, because the injector spacing HXP of the X-direction of shower nozzle 114 is about 70 μ m, so the injector spacing GXP of the X-direction of jet head sets 114G is its about 17.5 μ m of 1/4 times.Here, " the injector spacing GXP of the X-direction of jet head sets 114G " and make whole nozzles 118 among the jet head sets 114G along Y direction in that to penetrate the spacing of picture between a plurality of nozzle pictures that obtain on the X-direction suitable.
Certainly, the quantity of the shower nozzle 114 that contains of jet head sets 114G is not limited to 4.Jet head sets 114G also can be made of N shower nozzle 114.Here, N is the natural number more than 2.Under this situation, if the 1/N length doubly that becomes injector spacing HXP according to injector spacing GXP like that in jet head sets 114G N shower nozzle 114 of configuration just passable.
Below, be described more specifically the relative position relation of the shower nozzle 114 of present embodiment.
At first, being illustrated as purpose simple and easyly, 4 shower nozzles 114 that contain among the upper left jet head sets 114G with Fig. 5 from last respectively souvenir be shower nozzle 1141, shower nozzle 1142, shower nozzle 1143 and shower nozzle 1144.Equally, 4 shower nozzles 114 that contain among the jet head sets 114G with the bottom right of Fig. 5 from last respectively souvenir be shower nozzle 1145, shower nozzle 1146, shower nozzle 1147 and shower nozzle 1148.
And, with the nozzle rows 116A in the shower nozzle 1141,116B souvenir is nozzle rows 1A, 1B, with the nozzle rows 116A in the shower nozzle 1142,116B souvenir is nozzle rows 2A, 2B, with the nozzle rows 116A in the shower nozzle 1143,116B souvenir is nozzle rows 3A, 3B, is nozzle rows 4A, 4B with the nozzle rows 116A in the shower nozzle 1144,116B souvenir.Equally, with the nozzle rows 116A in the shower nozzle 1145,116B souvenir is nozzle rows 5A, 5B, with the nozzle rows 116A in the shower nozzle 1146,116B souvenir is nozzle rows 6A, 6B, with the nozzle rows 116A in the shower nozzle 1147,116B souvenir is nozzle rows 7A, 7B, is nozzle rows 8A, 8B with the nozzle rows 116A in the shower nozzle 1148,116B souvenir.
In fact each of these nozzle rows 1A～8B be made of 90 nozzles 118.And as mentioned above, in each of nozzle rows 1A～8B, these 90 nozzles are arranged on X-direction.But in Fig. 5, for convenience of explanation, each of nozzle rows 1A～8B is described like that according to being made of 4 nozzles (nozzle 118).In addition, the most left nozzle 118 of nozzle rows 1A is benchmark nozzle 118R of shower nozzle 1141 among Fig. 5, the most left nozzle 118 of nozzle rows 2A is benchmark nozzle 118R of shower nozzle 1142, the most left nozzle 118 of nozzle rows 3A is benchmark nozzle 118R of shower nozzle 1143, the most left nozzle 118 of nozzle rows 4A is benchmark nozzle 118R of shower nozzle 1144, and the most left nozzle 118 of nozzle rows 5A is benchmark nozzle 118R of shower nozzle 1145.
In the present embodiment, be " the effective length HL of shower nozzle " also sometimes with the long-pending souvenir of the nozzle number of the injector spacing HXP of the X-direction of shower nozzle 114 and shower nozzle 114.Under the situation of Fig. 5 example, because injector spacing HXP is 70 μ m, the quantity of nozzle is 8 simultaneously, so the effective length HL of shower nozzle is 560 μ m.In addition, in the present embodiment, 1 shower nozzle 114 is made of 4 continuous sub regions SR.The length DL of the X-direction of all subregion SR is 1/4 times of shower nozzle effective length HL.Below, for convenience of explanation, be subregion SR1, SR2, SR3, SR4 towards positive direction (figure right side) souvenir of X-direction with 4 sub regions SR of shower nozzle 114.
If according to above souvenir, the X coordinate of the benchmark nozzle 118R of each shower nozzle 114 is according to following performance.
The X coordinate of the benchmark nozzle 118R of shower nozzle 1142 with respect to from the X coordinate of the benchmark nozzle 118R of the shower nozzle 1141 X coordinate of deflected length DL only, is offset 1/2 times of injector spacing HXP again.In the example of Fig. 5, the X coordinate of the benchmark nozzle 118R of shower nozzle 1142, with respect to the X coordinate of the benchmark nozzle 118R of shower nozzle 1141, on the positive direction (right of Fig. 5) of X-direction, only be offset 1/2 times the length that increases injector spacing HXP with respect to length DL.
The X coordinate of the benchmark nozzle 118R of shower nozzle 1144 with respect to from the X coordinate of the benchmark nozzle 118R of the shower nozzle 1143 X coordinate of deflected length DL only, is offset 1/2 times of injector spacing HXP again.In the example of Fig. 5, the X coordinate of the benchmark nozzle 118R of shower nozzle 1144, with respect to the X coordinate of the benchmark nozzle 118R of shower nozzle 1143, on the positive direction (right of Fig. 5) of X-direction, only be offset 1/2 times the length that increases injector spacing HXP with respect to length DL.
The X coordinate of the benchmark nozzle 118R of shower nozzle 1143 with respect to by the X coordinate of the benchmark nozzle 118R of the shower nozzle 1142 X coordinate of deflected length DL only, is offset 1/4 times or 3/4 times of injector spacing HXP again.In the example of Fig. 5, the position of the benchmark nozzle 118R of shower nozzle 1143 with respect to the X coordinate of the benchmark nozzle 118R of shower nozzle 1142, only is offset 1/2 times the length that is prolonged injector spacing HXP by length DL on the positive direction (right of Fig. 5) of X-direction.In addition, the record of so-called " being offset on the X-direction " not only is included on the positive direction of X-direction and is offset, and is also included within on the negative direction of X-direction to be offset.
In addition, in the present embodiment, towards the negative direction (the following direction of figure) of Y direction, shower nozzle 1141,1142,1143,1144 is with this series arrangement.But the order of 4 shower nozzles 114 of this that arrange on Y direction also can not be the order of present embodiment.Specifically, so long as shower nozzle 1141 and shower nozzle 1142 are adjacent to each other on Y direction, shower nozzle 1143 and shower nozzle 1144 are adjacent to each other on Y direction simultaneously, also can be arrangements in any case.
The configuration of the shower nozzle 1145,1146,1147,1148 among the jet head sets 114G of the bottom right of Fig. 5, i.e. combination also are same with the configuration of shower nozzle 1141,1142,1143,1144.
According to the relative position relation of the explanation of the relative position relation between shower nozzle 1145 and the shower nozzle 1141 between 2 jet head sets 114G adjacent to each other on the X-direction.
The X coordinate of the benchmark nozzle 118R of shower nozzle 1145 only is offset the long-pending length of the quantity of the injector spacing HXP of X-direction of shower nozzle 114 and the nozzle in the shower nozzle 114 by the X coordinate of the benchmark nozzle 118R of shower nozzle 1141 on the positive direction of X-direction.In the present embodiment, because injector spacing HXP is about 70 μ m, simultaneously the quantity of the nozzle in 1 shower nozzle 114 is 160, so the X coordinate of the benchmark nozzle 118R of shower nozzle 1145 only is offset 11.2mm (70 μ m * 160) by the X coordinate of the benchmark nozzle 118R of shower nozzle 1141 on the positive direction of X-direction.But, in Fig. 5, for convenience of explanation,, describe like that so the X coordinate of the benchmark nozzle 118R of shower nozzle 1145 only is offset 560 μ m (70 μ m * 8) according to the X coordinate by the benchmark nozzle 118R of shower nozzle 1141 because the quantity of nozzle is 8 in the shower nozzle 1141.
Because shower nozzle 1141 and shower nozzle 1145 be according to above-mentioned such configuration, so the X coordinate of the left nozzle of the X coordinate of the rightest nozzle of nozzle rows 1A and nozzle rows 5A only is offset injector spacing LNP.Therefore, the injector spacing of all X-direction of 2 jet head sets 114G is 1/4 times of injector spacing HXP of the X-direction of shower nozzle 114.
According to the injector spacing as all X-directions of vehicle frame 103 all become 17.5 μ m, 1/4 times the length of injector spacing HXP that promptly becomes the X-direction of shower nozzle 114 disposes 6 jet head sets 114G like that.
In addition, in this manual, be " benchmark shower nozzle " with shower nozzle 114 souvenirs at the two ends among 1 jet head sets 114G of shower nozzle 1141, shower nozzle 1144, shower nozzle 1145 etc.
In the present embodiment, will be overlapping G (G1 among Fig. 5～G7) along the part souvenir of in the scope of the length of injector spacing HXP, taking in the X coordinate of 4 nozzles 118 of X-direction.For example, the most left nozzle 118 of the 3rd nozzle 118 that in Fig. 5, overlapping G1 comprise the rightest nozzle 118 of nozzle rows 1A, risen by the left side of nozzle rows 2A, the 2nd spray nozzle 118 that rises by the left side of nozzle rows 3A and nozzle rows 4A.Equally, overlapping G2 comprise the rightest nozzle 118 of nozzle rows 1B, the most left nozzle 118 of the 2nd spray nozzle 118 rising by the right side of nozzle rows 2B, the 2nd spray nozzle 118 that rises by the left side of nozzle rows 3B and nozzle rows 4B.In addition, overlapping G3 comprises the 2nd nozzle 118 that the right side of the rightest nozzle 118, the nozzle rows 3A of nozzle rows 2A rises, the most left nozzle 118 of the 2nd spray nozzle 118 and nozzle rows 5A is played on the left side of nozzle rows 4A.
According to the configuration of the shower nozzle of present embodiment, the nozzle 118 that any of overlapping G1～G7 all comprises the nozzle 118 that belongs to subregion SR1, the nozzle 118 that belongs to subregion SR2, the nozzle 118 that belongs to subregion SR3, belongs to subregion SR4.And the nozzle number of the subregion SR1 that contains in 1 overlapping (a for example overlapping G1), the nozzle number of subregion SR2, the nozzle number of subregion SR3 and the nozzle number of subregion SR4 are identical.For example, under the situation of Fig. 5, in overlapping G1, belong to the nozzle 118 of subregion SR4, the nozzle 118 that belongs to subregion SR3, the nozzle 118 that belongs to subregion SR2, the nozzle 118 that belongs to subregion SR1 and respectively contain 1.
In addition, according to the configuration of the shower nozzle of present embodiment, the centre of the X coordinate of the X coordinate of the X coordinate of the rightest nozzle 118 of nozzle rows 1B and the rightest nozzle 118 of nozzle rows 1A and the most left nozzle 118 of nozzle rows 5A is unanimous on the whole.And, unanimous on the whole by the centre of the X coordinate of the rightest nozzle 118 of the X coordinate of the rightest nozzle 118 of the X coordinate of the 2nd spray nozzle 118 on the right side of nozzle rows 2A and nozzle rows 1A and nozzle rows 1B.The centre of the X coordinate of the 2nd spray nozzle 118 that rise on the X coordinate of the X coordinate of the 2nd spray nozzle 118 that is risen by the left side of nozzle rows 3A and the rightest nozzle 118 of nozzle rows 1A and the right side of nozzle rows 2A is unanimous on the whole.The centre of the X coordinate of the X coordinate of the X coordinate of the most left nozzle 118 of nozzle rows 4A and the 2nd spray nozzle 118 that is risen by the right side of nozzle rows 2A and the rightest nozzle 118 of nozzle rows 1B is unanimous on the whole.
(E. control part)
Below, the formation of control part 112 is described.As shown in Figure 6, control part 112 possesses input buffer storage 200, memory storage 202, handling part 204, scanning driving part 206 and shower nozzle drive division 208.Input buffer storage 200 can be connected mutually communicatedly with handling part 204.Handling part 204 can be connected mutually communicatedly with memory storage 202.Handling part 204 can be connected mutually communicatedly with scanning driving part 206.Handling part 204 can be connected mutually communicatedly with shower nozzle drive division 208.In addition, scanning driving part 206 can be connected with the 2nd position control 108 mutually communicatedly with the 1st position control 104.Equally, shower nozzle drive division 208 with a plurality of shower nozzles 114 each can be connected communicatedly mutually.
Handling part 204 is given scanning driving part 206 with expression with respect to the data of the relative position of the nozzle 118 that is ejected portion according to the ejection data in the memory storage 202.Scanning driving part 206 will be given the 1st position control 104 and the 2nd position control 108 according to the drive signal of these data and ejection described later cycle EP (Fig. 7).Its result, shower nozzle 114 carries out relative scanning with respect to the portion of being ejected.On the other hand, handling part 204 will specify the selection signal SC that closes that opens of the nozzle 118 of every ejection time to give shower nozzle drive division 208 according to the ejection data and the ejection cycle EP of storage in the memory storage 202.Shower nozzle drive division 208 is according to selecting signal SC to give shower nozzle 114 with the necessary ejection signal of the ejection of liquid material 111 ES.Its result is in the nozzle 118 of the correspondence from shower nozzle 114, as drop ejection liquid material 111.
Below, the formation and the function of the shower nozzle drive division 208 in the control part 112 are described.
Shown in Fig. 7 (a), shower nozzle drive division 208 has 1 drive signal generating unit 203 and a plurality of analog switch AS.Shown in Fig. 7 (b), drive signal generating unit 203 generates drive signal DS.The current potential of drive signal DS changes in time with respect to reference potential L.Specifically, drive signal DS contains a plurality of ejection waveform P repeatedly with ejection cycle EP.Here, to drip the waveform of the driving voltage between the pair of electrodes that will be applied to Vib. 124 corresponding with being used for spraying 1 dropping liquid from nozzle 118 for ejection waveform P.
Drive signal DS is supplied with the input terminal of each analog switch AS.Each analog switch AS and each ejection portion 127 are corresponding and be provided with.That is, the quantity of the quantity of analog switch AS and ejection portion 127 (that is the quantity of nozzle 118) is identical.
Handling part 204 will be represented selection signal SC (SC1 among Fig. 7, the SC2 that opening of nozzle 118 closed ...) give each analog switch AS.Here, each selects signal SC can get high level and low level any state independently.
On the other hand, analog switch AS is according to drive signal DS and select signal SC, will spray signal ES (ES1 among Fig. 7, ES2 ...) supply with the electrode 124A of Vib. 124.Specifically, selecting signal SC is under the situation of high level, and analog switch AS will pass to electrode 124A as the drive signal DS of ejection signal ES.On the other hand, selecting signal SC is under the low level situation, and the current potential of the ejection signal ES of analog switch AS output becomes reference potential L.The electrode 124A that gives Vib. 124 is during with drive signal DS, liquid material 111 ejection from the nozzle 118 corresponding with this Vib. 124.In addition, on the electrode 124B of each Vib. 124, give reference potential L.
In the example shown in Fig. 7 (b), according in each of 2 ejection signal ES1, ES2, setting like that between 2 high period of selecting in each of signal SC1, SC2 and between low period with 2 times the cycle 2EP performance ejection waveform P of ejection cycle EP.By this, liquid material 111 will be with cycle 2EP each ejection from 2 spray nozzles 118 of correspondence.In addition, the common drive signal DS from common drive signal generating unit 203 can be given each Vib. 124 corresponding with this 2 spray nozzles 118.Therefore, can in the identical substantially time, from 2 spray nozzles 118, spray liquid material 111.
By above constituting, blowoff 100 can carry out the coating scanning of liquid material 111 according to the ejection data of giving control part 112.
(example of F. jet method)
With reference to Fig. 8 (a) and (b), illustrate simultaneously for X-direction parallel ribbon target, promptly be ejected the 18L of portion, the method for blowoff 100 ejection liquid materials 111.In addition, in the example shown in Fig. 8 (a), to the relatively moving of Y direction, shower nozzle illustrated in fig. 5 1141,1142,1143,1144,1145,1146,1147 overlaps with the portion 18L of being ejected with this order by vehicle frame 103.In addition, Fig. 8 has also represented overlapping G1～G7 among Fig. 5.
Shown in Fig. 8 (a), at first, vehicle frame 103 begins to relatively move on Y direction with respect to stand 106.And, when nozzle rows 1A overlaps with the portion 18L of being ejected, spray material 111 with respect to being ejected the 18L of portion in the nozzle 118 that overlapping G1 from the nozzle 118 of nozzle rows 1A contains.On the right side of the mark " 1A " of Fig. 8 (b), the bullet that is formed by the ejection of the nozzle rows 1A position that falls is described with black circle.Shown in Fig. 8 (b), by the ejection of nozzle rows 1A, liquid material 111 falls to being ejected the 18L of portion with the spacing bullet of cardinal principle 140 μ m on the X-direction.
After the nozzle rows 1A, nozzle rows 1B overlaps with the portion 18L of being ejected.When nozzle rows 1B overlaps with the portion 18L of being ejected, spray liquid material 111 with respect to being ejected the 18L of portion in the nozzle 118 that overlapping G1 from the nozzle 118 of nozzle rows 1B contains.On the right side of the mark " 1B " of Fig. 8 (b), the bullet that is formed by the ejection of the nozzle rows 1B position that falls is described with black circle.In addition, the bullet that is formed by the ejection of the nozzle rows of the leading over nozzle rows 1B position that falls is described with white circle.
After the nozzle rows 1B, nozzle rows 2A overlaps with the portion 18L of being ejected.When nozzle rows 2A overlaps with the portion 18L of being ejected, in the nozzle 118 that the nozzle 118 that the nozzle 118 that overlapping G1 from the nozzle 118 of nozzle rows 2A contains, overlapping G2 contain, overlapping G3 contain and overlapping 4 nozzle that contains 118, spray liquid material 111 simultaneously with respect to the portion 18L of being ejected.On the right side of the mark " 2A " of Fig. 8 (b), the bullet that is formed by the ejection of the nozzle rows 2A position that falls is described with black circle, and in addition, the bullet that is formed by the nozzle rows of the leading over nozzle rows 2A position that falls is described with justifying in vain.
After the nozzle rows 2A, nozzle rows 2B overlaps with the portion 18L of being ejected.When nozzle rows 2B overlaps with the portion 18L of being ejected, in the nozzle 118 that the nozzle 118 that the nozzle 118 that overlapping G1 from the nozzle 118 of nozzle rows 2B contains, overlapping G2 contain, overlapping G3 contain and overlapping 4 nozzle that contains 118, spray liquid material 111 simultaneously with respect to the portion 18L of being ejected.On the right side of the mark " 2B " of Fig. 8 (b), the bullet that is formed by the ejection of the nozzle rows 2B position that falls is described with black circle, and in addition, the bullet that is formed by the ejection of the nozzle rows of the leading over nozzle rows 2B position that falls is described with justifying in vain.
Thereafter, nozzle rows 3A, 3B, 4A, 4B, 5A, 5B, 6A, 6B, 7A, 7B overlap with the portion 18L of being ejected with this order, from each nozzle rows 3A, 3B, 4A, 4B, 5A, 5B, 6A, 6B, 7A, 7B with respect to be ejected the 18L of portion and nozzle rows 1A, 1B, 2A, 2B spray liquid material 111 equally.Its result, jet head sets 114G with respect to be ejected the 18L of portion only relatively move along Y direction 1 time during in, liquid material 111 is with 1/4 times the length of the injector spacing HXP of the X-direction of shower nozzle 114, promptly the spacing bullet of 17.5 μ m falls.
The example of the 18L of the portion that is ejected of above-mentioned band shape one of be the part that is used to form metal wiring.Thereby the blowoff 100 of present embodiment goes for making in the mode that sprays aqueous wiring material the distribution manufacturing installation of metal wiring.For example, go for the distribution manufacturing installation of calculated address electrode 54 on the support substrate 52 in plasma display system 50 described later (Figure 20～22).
Figure 30 (a) is the curve map of pattern ground expression along the distribution of shower nozzle 114 spray volumes of X-direction.On the other hand, Figure 30 (b) is the curve map of pattern ground expression along the distribution of the spray volume of overlapping G1～G7 among the jet head sets 114G of X-direction.The transverse axis of 2 curve maps of Figure 30 (a) and (b) is parallel with X-direction axles, and is corresponding with the position of nozzle 118 in the shower nozzle 114 simultaneously.On the other hand, the longitudinal axis of Figure 30 (a) and 2 curve maps (b) is represented from the spray volume of nozzle 118.In addition, the distribution of spray volume is used in the scope of effective length HL of shower nozzle of Fig. 5 explanation the interpolation measured value and describes.
Shown in Figure 30 (a), maximum by the spray volume of the nozzle 118 at the two ends of shower nozzle 114, minimum by the spray volume of the nozzle 118 of the cardinal principle central authorities of shower nozzle 114.And, along the distribution shape of the spray volume of the nozzle 118 of X-direction be and the relevant and symmetrical substantially shape of shower nozzle central authorities.The reason that the distribution of Figure 30 is taken as such shape is the reason according to the manufacturing process aspect of shower nozzle 114, but omits being described in detail of this reason here.
On the other hand, as described in Figure 30 (b), along the shape that has substantially in the cycle of 1/4 times (being length DL) of the length of the effective length HL that is distributed in shower nozzle of the spray volume of overlapping G1～G7 of X-direction repeatedly.It the reasons are as follows described.
As shown in Figure 5 with explanation like that, with respect to the X coordinate of the benchmark nozzle 118R among 1 of 4 shower nozzles 114 arranging in Y direction, the X coordinate of the benchmark nozzle 118R of other 3 shower nozzles 114 repeatedly is not offset mutually on X-direction with the degree of the integral multiple of big body length DL on one side on one side.
And, according to the showerhead configurations of present embodiment, overlapping G (nozzle 118 that all comprise the nozzle 118 that belongs to subregion SR1, the nozzle 118 that belongs to subregion SR2, the nozzle 118 that belongs to subregion SR3 in any of the G1 among Fig. 5～G7), belongs to subregion SR4.Therefore, the nozzle that belongs to each seed region SR 118 adjacency on X-direction of shower nozzle 114.In addition, the quantity of the nozzle 118 of the quantity of the nozzle 118 of the quantity of the nozzle 118 of the quantity of the nozzle 118 of the subregion SR1 that contains among 1 overlapping G, subregion SR2, subregion SR3 and subregion SR4 is identical.Therefore, the line parallel with X-direction, for example with respect to the 18L of the portion that is ejected of 1 band shape, by the cumulative volume of the drop of overlapping G1～G7 ejection, any is all identical substantially.
Thereby, the distribution along the spray volume of X-direction along the distribution of the spray volume of X-direction and overlapping G7G8 of the distribution along the spray volume of X-direction of the distribution along the spray volume of X-direction of overlapping G1G2, overlapping G3G4, overlapping G5G6, any also is identical substantially shape.In addition, the length of the X-direction corresponding with 2 overlapping G adjacent to each other equals DL.
Like this, according to present embodiment, shown in Figure 30 (b), even the spray volume difference of the drop from nozzle 118 on each position of the nozzle 118 in shower nozzle 114, but, but be difficult to show the difference of spray volume for the row of the drop that sprays by jet head sets 114G.Its reason is, the nozzle 118 that belongs to each seed region SR along the X-direction adjacency, has therefore been eliminated the difference of spray volume in jet head sets 114G.In addition, in the scope of the effective length HL of shower nozzle, above-mentioned overlapping G arranges 8.Thereby the difference along the spray volume of X-direction in the scope of the effective length HL of shower nozzle 114 also just further reduces.
Here, the direction with respect to jet head sets 114G relatively moves is arranged in top overlapping G at benchmark shower nozzle 114, and the bullet of the drop of liquid material 111 falls and carries out according to following in proper order.At first, drop bullet on 2 positions of predetermined distance on the X-direction falls.And fall the centre position of these 2 positions of covering with drop of the drop bullet of back.And the fall figure of position of so repeatedly bullet.For example, by overlapping G1 and the G2 of Fig. 8, drop fall on the X-direction only P1 and the P2 of offset nozzle spacing HXP of bullet respectively at first.The drop bullet falls to being positioned at the P3 of the centre of P1 and P2 then, and follows the P4 that the drop bullet falls to being positioned at the centre of P1 and P3.And the drop bullet falls to being positioned at the P5 of the centre of P3 and P2.
Like this, according to the showerhead configurations of present embodiment, drop can be connected with 2 drops that first bullet falls on the bullet with respect to oneself falls 2 positions of position symmetry.Therefore, in the back in the drop that bullet falls, opposite power action to 2 directions, its result, the drop that back bullet falls is expanded with the shape of symmetry by its bullet position that falls.From this reason,, just be difficult to take place the crawling of liquid material according to the jet method of present embodiment.
In addition, do not distribute, can be suitable for the present invention yet even shower nozzle 114 does not have the ejection of shape as shown in Figure 30.Specifically, even be not and the relevant and symmetrical shape in center of the effective length HL of shower nozzle, also can be suitable for the present invention.Its reason is, as long as according to any all identically contains subregion SR like that in each overlapping G by the total amount of the spray volume of overlapping G, just can obtain above-mentioned effect.
In addition, according to present embodiment, on the vertical direction (X-direction) of the direction (Y direction) that relatively moves with vehicle frame 103, a plurality of nozzles 118 are arranged in the blowoff 100.Therefore, with respect to the 18L of the portion that is ejected that prolongs along X-direction, can side by side spray liquid material 111 substantially by a plurality of nozzles 118.Its result, the drive signal generating unit 203 that generates drive signal DS can be 1 with respect to a plurality of nozzles 118.In addition and since from the time of a plurality of nozzles of arranging in 1 direction 118 ejections be simultaneously substantially, so do not need to be used to postpone to constitute from the circuit of the drive signal DS of drive signal generating unit 203.Its result, it is few that inadequate essential factor takes place the waveform among the drive signal DS, therefore, the ejection waveform P of precision can be applied on the Vib. 124.Thereby, can be more stable by the ejection of the liquid material 111 of nozzle 118.
In addition, according to present embodiment, the injector spacing of the X-direction of jet head sets 114G is the 1/N length doubly of injector spacing of the X-direction of shower nozzle in the blowoff 100.Here, N is the quantity of the shower nozzle 114 that contains among the jet head sets 114G.Therefore, the nozzle line density of the X-direction of blowoff 100 is higher than the nozzle line density of the X-direction of common ink discharge device.Its result, during No. 1 vehicle frame 103 that only relatively moves along Y direction in, can form the finer and closely woven bullet figure that falls along X-direction.
[embodiment 2]
Explanation is applicable to the present invention the example in the manufacturing installation of colored filter substrate.
As Fig. 9 (a) and the matrix 10A (b) be through by the substrate that is treated as colored filter substrate 10 of manufacturing installation 1 described later (Figure 10).Matrix 10A has a plurality of 18R of portion, 18G, 18B of being ejected of rectangular configuration.
Specifically, matrix 10A comprise have photopermeability support substrate 12, in black matrix (black matrix) 14 that forms on the support substrate 12 and the storage lattice cofferdam 16 that on black matrix 14, forms.Black matrix 14 is formed by the material with light-proofness.And the storage lattice cofferdam 16 on black matrix 14 and the black matrix 14 is according to stipulating rectangular a plurality of light transmission parts on support substrate 12, being that rectangular a plurality of pixel regions are located like that.
In each pixel region, with the recess of support substrate 12, black matrix 14 and storage lattice cofferdam 16 regulations be ejected the 18R of portion, be ejected the 18G of portion, to be ejected the 18B of portion corresponding.The portion 18R of being ejected is the zone that will form the color filter layers 111FR of the light that only sees through the red wavelength zone, the portion 18G of being ejected is the zone that will form the color filter layers 111FG of the light that only sees through green wavelength region, and the portion 18B of being ejected is the zone that will form the color filter layers 111FB of the light that only sees through blue wavelength region.
Each other certain interval LRY of the portion 18R of being ejected, be that spacing is 560 μ m substantially along Y direction.This interval is identical with the portion 18G of the being ejected interval LGY along Y direction each other, and is also identical with the portion 18B of the being ejected interval LBY along Y direction each other.In addition, the image plane that is ejected the 18R of portion is the rectangle by long limit and minor face decision.Specifically, the length that is ejected the Y direction of the 18R of portion is 100 μ m substantially, and the length of X-direction is 300 μ m substantially.Be ejected the 18G of portion and also have the shape size identical with being ejected the 18R of portion with the portion 18B of being ejected.Interval and size corresponding to whole-colored pixel region in the high-definition television of the portion 18R of being ejected above-mentioned interval each other and the above-mentioned size that is ejected the 18R of portion and size about 40 inches are corresponding.
Manufacturing installation 1 shown in Figure 10 is the 18R of the portion that respectively is ejected with respect to the matrix 10A of Fig. 9, the device that 18G, 18B spray corresponding colorized optical filtering sheet material.Specifically, manufacturing installation 1 has: to the blowoff 100R of the whole coating chromatic filter material 111R that are ejected the 18R of portion; drying is ejected the drying device 150R of the colorized optical filtering sheet material 111R on the 18R of portion; blowoff 100G to the whole coating chromatic filter material 111 that are ejected the 18G of portion; drying is ejected the drying device 150G of the colorized optical filtering sheet material 111G on the 18G of portion; blowoff 100B to the whole coating chromatic filter material 111B that are ejected the 18B of portion; drying is ejected the drying device 150B of the colorized optical filtering sheet material 111B on the 18B of portion; heat (secondary baking) colorized optical filtering sheet material 111R once more; 111G; the drying oven 160 of 111B; at the colorized optical filtering sheet material 111R of secondary baking; 111G; establish the blowoff 100C of diaphragm 20 on the layer of 111B; the drying device 150C of dry-run protection film 20 and the solidification equipment 165 that is cured of the dry diaphragm 20 of heating once more.In addition, manufacturing installation 1 also has the conveyer 170 according to the order transfer matrix 10A of blowoff 100R, drying device 150R, blowoff 100G, drying device 150G, blowoff 100B, drying device 150B, blowoff 100C, drying device 150C and solidification equipment 165.
As shown in figure 11, the formation of blowoff 100R is identical with the formation of the blowoff 100 of embodiment 1 basically.But, possessing aqueous colorized optical filtering sheet material 111R at blowoff 100R and replace on container 101 and pipeline 110 these aspects with container 101R and pipeline 110R, the formation of blowoff 100R is different with the formation of blowoff 100.In addition, in the inscape of blowoff 100R, give the reference marks identical, omit the explanation of its repetition with embodiment 1 with the same part of the inscape of blowoff 100.
The formation of the formation of the formation of blowoff 100G, blowoff 100B, blowoff 100C, its any be identical with the structure of blowoff 100R basically also.But, blowoff 100G possess colorized optical filtering sheet material 111G with container 101R and this aspect of pipeline 110R among container and pipeline, the replacement blowoff 100R on, the formation of blowoff 100G is different with the formation of blowoff 100R.Equally, possess colorized optical filtering sheet material 111B at blowoff 100B and use on container and this aspect of pipeline, replacement container 101R and pipeline 110R, the formation of blowoff 100B is different with the formation of blowoff 100R.In addition, possess the diaphragm material at blowoff 100C and use on container and this aspect of pipeline, replacement container 101R and pipeline 110R, the formation of blowoff 100C is different with the formation of blowoff 100R.In addition, the aqueous colorized optical filtering sheet material 111R in the present embodiment, a example that 111G, 111B are liquid material of the present invention.
Below, the action of blowoff 100R is described.Blowoff 100R goes up a plurality of 18R of portion ejection identical materials that are ejected of rectangular configuration to matrix 10A.In addition, as embodiment 3～5 explanations, matrix 10A both can be replaced as the substrate that el display device is used, and also can be replaced as the back substrate that plasma display system is used, and can also be replaced as the substrate of the image display device that possesses electronic emission element.
Consistent with X-direction and Y direction respectively like that according to the long side direction that is ejected the 18R of portion and short side direction, the matrix 10A of Figure 12 is remained on the stand 106.
At first, before beginning for the 1st scan period, control part 112 is according to the ejection data, according to overlapping G (G1 among Figure 12, G2 ...) in the X coordinate of several nozzles 118 of containing be accommodated in the X coordinate range that is ejected the 18R of portion like that, with respect to matrix 10A on X-direction, relatively move vehicle frame 103, i.e. jet head sets 114G.The X coordinate range that is ejected the 18R of portion is the scope by the X coordinate decision at the two ends on the long limit that is ejected the 18R of portion.In the present embodiment, the length that is ejected the long limit of the 18R of portion is about 300 μ m, and the injector spacing HXP of the X-direction of jet head sets 114G is 17.5 μ m.Therefore, among the jet head sets 114G 16 or 17 nozzles 118 enter in 1 X coordinate range that is ejected the 18R of portion, and in scan period, the nozzle 118 outside the X coordinate range does not spray colorized optical filtering sheet material 111R at all.
Here, as shown in figure 29, in the present embodiment so-called " scan period " be meant, an edge Y direction of vehicle frame 103 is relatively moved to other end E2 (a perhaps end E1) from the end E1 (perhaps other end E2) of sweep limit 134 carries out time of 1 time.So-called " sweep limit 134 " is meant the scope that the vehicle frame 103 that is used for the whole 18R of the portion that the is ejected coating material on matrix material A relatively moves, and can cover by sweep limit 134 and all be ejected the 18R of portion.In addition, according to circumstances, term " sweep limit " also refer to sometimes the to relatively move scope of 1 nozzle 118, the scope of 1 nozzle rows 116 that also refers to sometimes to relatively move, the scope of 1 shower nozzle 114 that also refers to sometimes to relatively move.
The 1st scan period is when beginning, and jet head sets 114G begins to relatively move in the positive direction (the last direction of the paper of Figure 12) of Y direction from an end E1 of sweep limit 134.Like this, with the order of nozzle rows 1A, 1B, 2A, 2B, 3A, 3B, 4A, 4B, 5A, 5B, 6A, 6B, 7A, 7B, these nozzle rows are invaded and are ejected the corresponding zone of the 18R of portion.In addition, in the centre of the 1st scan period, the X coordinate of jet head sets 114G does not change.
In the example shown in Figure 12, on the position that falls by the 1st to the 4th bullet of rising on the left side of the 18R of the portion that is ejected of lower-left, by the nozzle 118 ejection colorized optical filtering sheet material 111R that belong to overlapping G1.Rise towards a left side by the 5th to the 8th the bullet position that falls, by the nozzle 118 ejection colorized optical filtering sheet material 111R that belong to overlapping G2.Rise towards a left side by the 9th to the 12nd the bullet position that falls, by the nozzle 118 ejection colorized optical filtering sheet material 111R that belong to overlapping G3.Rise towards a left side by the 13rd to the 16th the bullet position that falls, by the nozzle 118 ejection colorized optical filtering sheet material 111R that belong to overlapping G4.
Be ejected in the 18R of portion at 1, by the drop of a plurality of overlapping G ejection colorized optical filtering sheet material 111R.Any all is identical by the cumulative volume of the drop of each overlapping G ejection (that is, by the cumulative volume of the drop of whole nozzles 118 ejections that contain among 1 overlapping G), thereby, be ejected in the 18R of portion and covered equably by colorized optical filtering sheet material 111R.And, as explanation among the embodiment 1 like that and since the nozzle 118 that belongs to each seed region SR in jet head sets 114G along the X-direction adjacency, just be eliminated easily so exist with ... the difference of the spray volume of nozzle 118 positions.Its result, the portion 18R of being ejected crawling to each other is just not remarkable yet.
In addition, according to present embodiment, in 1 scan period, can spray the colorized optical filtering sheet material 111R that is ejected the necessary volume of the 18R of portion at 1.This be because, the injector spacing GXP of the X-direction of jet head sets 114G be substantially 1 shower nozzle 114 X-direction injector spacing HXP 1/4, therefore, in 1 scan period, more nozzle 118 can overlap with 1 portion of being ejected.
On the other hand, as shown in figure 12, in the 1st scan period, the nozzle 118 of the leftmost side among the nozzle rows 1A, the right side among the nozzle rows 2A are played the right side among the 2nd spray nozzle 118, the nozzle rows 3A and are played the right side among the 2nd spray nozzle 118, the nozzle rows 4A and play the 2nd spray nozzle 118 and once do not overlap with the portion 18R of being ejected.Thereby, do not carry out the ejection of colorized optical filtering sheet material 111R by these nozzles at all.
The 1st scan period, control part 112 began next scan period by the jet head sets 114G that relatively moves when finishing on X-direction, to the also uncoated 18R of the portion that is ejected ejection colorized optical filtering sheet material 111R.
Below only illustrated to the operation that is ejected the 18R of portion coating chromatic filter material.Below illustrate by manufacturing installation 1 until the series of processes that obtains colored filter substrate.
At first, make the matrix 10A of Fig. 9 according to following order.At first, on support substrate 12, form metallic film by sputtering method or Vacuum Coating method.By photoetching process operation by this metallic film form clathrate black matrix 14 thereafter.The examples of material of black matrix 14 can be crome metal or chromium oxide.In addition, support substrate 12 is the substrates that visible light had photopermeability, for example is glass substrate.Then, be coated with the resist layer that the photosensitive resin composition by negative type constitutes like that according to covering support substrate 12 and black matrix 14.And the mask film of bonding formation matrix graphics shape on this resist layer makes this resist layer exposure simultaneously.Remove the unexposed portion of resist layer then with etch processes, obtain storing lattice cofferdam 16.By above operation, obtain matrix 10A.
In addition, also can replace storing lattice cofferdam 16 with the storage lattice cofferdam that resin black pigment constitutes.Under this situation, do not want metallic film (black matrix 14), storage lattice cofferdam layer only becomes 1 layer.
Then, make matrix 10A lyophilyization by the oxygen plasma treatment under the atmospheric pressure.Handle by this, on the surface of the support substrate 12 on support substrate 12, black matrix 14 and storage lattice cofferdam 16 in the recess separately (part of pixel region) of regulation, just be lyophily on the surface on the surface of black matrix 14 and storage lattice cofferdam 16.In addition, thereafter, matrix 10A is carried out with tetrafluoromethane as the plasma treatment of handling gas.By the plasma treatment with tetrafluoromethane, the surface in the storage lattice cofferdam 16 in the recess separately is by fluorination treatment (lyophobicity processing), and the surface of storing lattice cofferdam 16 so just is lyophobicity.In addition, by with the Cement Composite Treated by Plasma of tetrafluoromethane, give the surface of support substrate 12 of lyophily and the surface of black matrix 14 earlier and lost some lyophilies, even but like this, lyophily also can be kept in its surface.Like this, by to being implemented the surface treatment of regulation by the surface of the recess of support substrate 12, black matrix 14 and storage lattice cofferdam 16 regulations, the surface of recess just becomes and is ejected the 18R of portion, 18G, 18B.
In addition, according to the material of support substrate 12, the material of black matrix 14 and the material in storage lattice cofferdam 16,, also can obtain being the lyophily of hope and the surface of lyophobicity even do not carry out surface treatment as described above.Even do not implement above-mentioned surface treatment, also can be to be ejected the 18R of portion, 18G, 18B by the surface of the recess of support substrate 12, black matrix 14 and storage lattice cofferdam 16 regulations under these circumstances down.
Formation is ejected the matrix 10A of the 18R of portion, 18G, 18B, is transported to by conveyer 170 on the stand 106 of blowoff 100R.And shown in Figure 13 (a), blowoff 100R is according to forming colorized optical filtering sheet material 111R layer like that by shower nozzle 114 ejection colorized optical filtering sheet material 111R all being ejected on the 18R of portion.Specifically, blowoff 100R with the limit with reference to Figure 12 limit by the explanation jet method to being ejected the 18R of portion coating chromatic filter material 111R.Be ejected matrix 10A whole under the situation of the layer that forms colorized optical filtering sheet material 111R on the 18R of portion, conveyer 170 makes matrix 10A be positioned at drying device 150R.And bone dry is ejected the colorized optical filtering sheet material 111R on the 18R of portion, obtains color filter layers 111FR on the 18R of portion being ejected.
Then, conveyer 170 is positioned on the stand 106 of blowoff 100G matrix 10A.And shown in Figure 13 (b), blowoff 100G is according to forming colorized optical filtering sheet material 111G layer like that by shower nozzle 114 ejection colorized optical filtering sheet material 111G all being ejected on the 18G of portion.Specifically, blowoff 100G with the limit with reference to Figure 12 limit by the explanation jet method to being ejected the 18G of portion coating chromatic filter material 111G.Be ejected matrix 10A whole under the situation of the layer that forms colorized optical filtering sheet material 111G on the 18G of portion, conveyer 170 makes matrix 10A be positioned at drying device 150G.And bone dry is ejected the colorized optical filtering sheet material 111G on the 18G of portion, obtains color filter layers 111FG on the 18G of portion being ejected.
Then, conveyer 170 is positioned on the stand 106 of blowoff 100B matrix 10A.And shown in Figure 13 (c), blowoff 100B is according to forming colorized optical filtering sheet material 111B layer like that by shower nozzle 114 ejection colorized optical filtering sheet material 111B all being ejected on the 18B of portion.Specifically, blowoff 100B with the limit with reference to Figure 12 limit by the explanation jet method to being ejected the 18B of portion coating chromatic filter material 111B.Be ejected matrix 10A whole under the situation of the layer that forms colorized optical filtering sheet material 111B on the 18B of portion, conveyer 170 makes matrix 10A be positioned at drying device 150B.And bone dry is ejected the colorized optical filtering sheet material 111B on the 18B of portion, obtains color filter layers 111FB on the 18B of portion being ejected.
Then, conveyer 170 makes matrix 10A be positioned at drying oven 160.Thereafter, drying oven 160 heats color filter layers 111FR, 111FG, 111FB again.
Then, conveyer 170 is positioned on the stand of blowoff 100C matrix 10A.And blowoff 100C forms diaphragm 20 according to covering color filter layers 111FR, 111FG, 111FB and storage lattice cofferdam 16 and sprays aqueous diaphragm material like that.After forming the diaphragm 20 that covers color filter layers 111FR, 111FG, 111FB and storage lattice cofferdam 16, conveyer 170 makes matrix 10A be positioned at drying oven 150C.And, behind the drying oven 150 bone dry diaphragms 20, solidification equipment 165 heated protective films 20 and full solidification, thus matrix 10A becomes colored filter substrate 10.
According to present embodiment, in each blowoff 100R, 100G, 100B, the injector spacing of the X-direction of jet head sets 114G is the 1/N length doubly of injector spacing of the X-direction of shower nozzle 114.Here, N is the quantity of the shower nozzle 114 that contains among the jet head sets 114G.Therefore, the nozzle line density of the X-direction of blowoff 100R, 100G, 100B is higher than the nozzle line density of the X-direction of common ink discharge device.Thereby manufacturing installation 1 is as long as change ejection data just can be to the portion that the is ejected coating chromatic filter material of all size.In addition, manufacturing installation 1 is as long as change ejection data just can be made the colored filter substrate of various spacings.
In addition, according to present embodiment, by a plurality of overlapping G to the drop that respectively is ejected the 18R of portion, 18G, 18B ejection colorized optical filtering sheet material 111R.By the cumulative volume of the drop of each overlapping G ejection (promptly, cumulative volume by the drop of whole nozzle of containing among 1 overlapping G 118 ejections) any all is identical, thereby, be ejected in the 18R of portion, 18G, the 18B and covered equably by colorized optical filtering sheet material 111R.And, as explanation among the embodiment 1 like that and since the nozzle 118 that belongs to each seed region SR in jet head sets 114G along the X-direction adjacency, just be eliminated easily so exist with ... the difference of the spray volume of nozzle 118 positions.Its result, the portion 18R of being ejected crawling, the portion 18G of being ejected crawling and the portion 18B of being ejected crawling to each other to each other to each other is just not remarkable yet.
In addition, according to present embodiment, the drop of colorized optical filtering sheet material 111R, 111G, 111B bullet on the centre position of 2 positions that covered with drop falls.Therefore, the drop that falls of back bullet can be connected with 2 drops that first bullet falls on the bullet with respect to oneself falls 2 positions of position symmetry.Therefore, in the drop that falls of bullet of back, opposite power action to 2 directions, its result, the drop that back bullet falls is expanded with the shape of symmetry by its bullet position that falls.From this reason,, just be difficult to take place the crawling of colorized optical filtering sheet material 111R, 111G, 111B according to the jet method of present embodiment.
[embodiment 3]
Below, illustrate the present invention is applicable to example in the manufacturing installation of el display device.
Figure 14 (a) and (b) shown in matrix 30A be by be treated as the substrate of el display device 30 by manufacturing installation 2 described later (Figure 15).Matrix 30A has a plurality of 38R of portion, 38G, 38B of being ejected of rectangular configuration.
Specifically, matrix 30A has: support substrate 32, in the circuit element layer 34 that forms on the support substrate 32, in a plurality of pixel electrodes 36 that form on the circuit element layer 34 and the storage lattice cofferdam 40 that forms between a plurality of pixel electrodes 36.Support substrate is the substrate that has permeability for visible light, for example can be glass substrate.Each a plurality of pixel electrode 36 is the electrodes that have permeability for visible light, for example can be ITO (tin indium oxide) electrode.In addition, a plurality of pixel electrodes 36 are configured on the circuit element layer 34 rectangularly, separately the determined pixel zone.And storage lattice cofferdam 40 has lattice shape, surrounds a plurality of pixel electrodes 36 respectively.In addition, storage lattice cofferdam 40 is by constituting at inorganics storage lattice cofferdam 40A that forms on the circuit element layer 34 and the organism storage lattice cofferdam 40B that is positioned on the inorganics storage lattice cofferdam 40A.
Circuit element layer 34 has following each layer: on the support substrate 32 with a plurality of scan electrodes of prolonging of fixed direction, cover a plurality of scan electrodes and the dielectric film 42 that forms, be positioned on the dielectric film 42 simultaneously a plurality of signal electrodes that prolong on the vertical direction of the direction that prolongs with a plurality of scan electrodes, be positioned at scan electrode and signal electrode intersection point near a plurality of on-off elements 44 and cover a plurality of on-off elements 44 and the interlayer dielectric 45 of the polyimide that forms etc.The gate electrode 44G of each on-off element 44 and source electrode 44S respectively with corresponding scan electrode and corresponding signal electrode electrical connection.A plurality of pixel electrodes 36 are positioned on the interlayer dielectric 45.On interlayer dielectric 45, on the position corresponding, establish through hole 44V, by means of the electrical connection between the pixel electrode 36 of these through hole 44 formation on-off elements 44 and correspondence with the address electrode 44D of each on-off element 44.In addition, each on-off element 44 is positioned on the position corresponding with storage lattice cofferdam 40.That is, when the direction vertical with the paper of Figure 14 (b) observed, each of a plurality of on-off elements 44 located like that according to being covered by storage lattice cofferdam 40.
On the pixel electrode 36 of matrix 30A and storage lattice cofferdam 40 recess (part of pixel region) of regulation be ejected the 38R of portion, be ejected the 38G of portion, to be ejected the 38B of portion corresponding.The portion 38R of being ejected is the zone that will form the luminous luminescent layer 211FR of the light that makes the red wavelength zone, the portion 38G of being ejected is the zone that will form the luminous luminescent layer 211FG of the light that makes green wavelength region, and the portion 38B of being ejected is the zone that will form the luminous luminescent layer 211FB of the light that makes blue wavelength region.
Each other certain interval LRY of the portion 38R of being ejected, be that spacing is 560 μ m substantially along Y direction.This interval is identical with the portion 38G of the being ejected interval LGY along Y direction each other, and is also identical with the portion 38B of the being ejected interval LBY along Y direction each other.In addition, the image plane that is ejected the 38R of portion is the rectangle by long limit and minor face decision.Specifically, the length that is ejected the Y direction of the 38R of portion is 100 μ m substantially, and the length of X-direction is 300 μ m substantially.Be ejected the 38G of portion and also have the shape size identical with being ejected the 38R of portion with the portion 38B of being ejected.Interval and size corresponding to whole-colored pixel region in the high-definition television of the portion 38R of being ejected above-mentioned interval each other and the above-mentioned size that is ejected the 38R of portion and size about 40 inches are corresponding.
Manufacturing installation 2 shown in Figure 15 is the 38R of the portion that respectively is ejected with respect to the matrix 30A of Figure 14, the device that 38G, 38B spray corresponding luminescent material.Manufacturing installation 2 possesses: to the blowoff 200R that all is ejected the 38R of portion coating luminescent material 211R, drying is ejected the drying device 250R of the luminescent material 211R on the 38R of portion, to the blowoff 200G that all is ejected the 38G of portion coating luminescent material 211G, drying is ejected the drying device 250G of the luminescent material 211G on the 38G of portion, to the blowoff 200B that all is ejected the 38B of portion coating luminescent material 211B, drying is ejected the drying device 250B of the luminescent material 211B on the 38B of portion.In addition, manufacturing installation 2 also possesses the conveyer 270 according to the order transfer matrix 30A of blowoff 200R, drying device 250R, blowoff 200G, drying device 250G, blowoff 200B, drying device 250B.
Blowoff 200R shown in Figure 16 possesses: keep container 201R, the pipeline 210R of aqueous luminescent material 211R and supply with the ejection scanner section 102 of luminescent material 211R by means of pipeline 210R from container 201R.Because the formation of ejection scanner section 102 is identical with the formation of the ejection scanner section 102 (Fig. 1) of embodiment 1, so give identical reference marks to same inscape, omits the explanation of its repetition simultaneously.In addition, the formation of the formation of blowoff 200G and blowoff 200B, any is all basic identical with blowoff 200R.But, possessing luminescent material 211G at blowoff 200G and replace on container 201R and this aspect of pipeline 210R with container and pipeline, the formation of blowoff 200G is different with the formation of blowoff 200R.Equally, possess luminescent material 211B at blowoff 200B and replace on container 201R and this aspect of pipeline 210R with container and pipeline, the formation of blowoff 200B is different with the formation of blowoff 200R.In addition, aqueous luminescent material 211R, 211B, the 211G in the present embodiment is an example of liquid material of the present invention.
Manufacture method with the el display device 30 of manufacturing installation 2 is described.At first, make matrix 30A shown in Figure 14 with known masking technique and making wiring graph technology.
Then, make matrix 30A lyophilyization by the oxygen plasma treatment under the atmospheric pressure.Handle by this, the surface of the surface of the pixel electrode 36 on pixel electrode 36 and storage lattice cofferdam 40 in the recess separately (part of pixel region) of regulation, inorganics storage lattice cofferdam 40A and the surface of organism storage lattice cofferdam 40B just are lyophily.In addition, thereafter, matrix 30A is carried out with tetrafluoromethane as the Cement Composite Treated by Plasma of handling gas.By the Cement Composite Treated by Plasma with tetrafluoromethane, the surface of the organism storage lattice cofferdam 40B in the recess separately is by fluorination treatment (lyophobicity processing), and like this, the surface of organism storage lattice cofferdam 40B just is lyophobicity.In addition, by with the Cement Composite Treated by Plasma of tetrafluoromethane, give the surface of pixel electrode 36 of lyophily and the surface of inorganics storage lattice cofferdam 40A earlier and lost some lyophilies, even but like this, also can keep lyophily.Like this, by to being implemented the surface treatment of regulation by the surface of the recess of pixel electrode 36 and storage lattice cofferdam 40 regulations, the surface of recess just becomes and is ejected the 38R of portion, 38G, 38B.
In addition, according to the material of pixel electrode 36, the material in inorganics storage lattice cofferdam 40 and the material in organism storage lattice cofferdam 40,, also can obtain being the lyophily of hope and the surface of lyophobicity even do not carry out surface treatment as described above.Even do not implement above-mentioned surface treatment, also can be to be ejected the 38R of portion, 38G, 38B with the surface of storing the recess of stipulating in lattice cofferdam 40 by pixel electrode 36 under these circumstances down.
Here, also can form with implement each a plurality of pixel electrode 36 of surface-treated on corresponding hole transporting layer 37R, 37G, 37B.If hole transporting layer 37R, 37G, 37B are between pixel electrode 36 and luminescent layer 211RF described later, 211GF, 211BF, the luminescence efficiency of el display device increases.On each of a plurality of pixel electrodes 36, establish under the situation of hole transporting layer, by the recess of hole transporting layer and storage lattice cofferdam 40 regulations be ejected the 38R of portion, 38G, 38B is corresponding.
In addition, also can form hole transporting layer 37R, 37G, 37B by ink-jet method.Under this situation, will contain be used to form hole transporting layer 37R, 37G, 37B material with each pixel region of quantitatively be coated on, then,, can form hole transporting layer by drying.
Formation is ejected the matrix 30A of the 38R of portion, 38G, 38B, is transported to by conveyer 270 on the stand 106 of blowoff 200R.And shown in Figure 17 (a), blowoff 200R is according to forming luminescent material 211R layer like that by shower nozzle 114 ejection luminescent material 211R all being ejected on the 38R of portion.Specifically, blowoff 200R is coated with luminescent material 211R by the jet method that illustrates to being ejected the 38R of portion with reference to Figure 12 limit with the limit.The situation that is ejected the layer that forms luminescent material 211R on the 38R of portion matrix 30A whole is following, and conveyer 270 makes matrix 30A be positioned at drying device 250R.And, be ejected luminescent material 211R on the 38R of portion by bone dry, obtain luminescent layer 211FR on the 38R of portion being ejected.
Then, conveyer 270 is positioned on the stand 106 of blowoff 200G matrix 30A.And shown in Figure 17 (b), blowoff 200G is according to forming luminescent material 211G layer like that by shower nozzle 114 ejection luminescent material 211G all being ejected on the 38G of portion.Specifically, blowoff 200G is coated with luminescent material 211G by the jet method that illustrates to being ejected the 38G of portion with reference to Figure 12 limit with the limit.Be ejected matrix 30A whole under the situation of the layer that forms luminescent material 211G on the 38G of portion, conveyer 270 makes matrix 30A be positioned at drying device 250G.And, be ejected luminescent material 111G on the 38G of portion by bone dry, obtain luminescent layer 211FG on the 38G of portion being ejected.
Then, conveyer 270 is positioned on the stand 106 of blowoff 200B matrix 30A.And shown in Figure 17 (c), blowoff 200B is according to forming luminescent material 211B layer like that by shower nozzle 114 ejection luminescent material 211B all being ejected on the 38B of portion.Specifically, blowoff 200B is coated with luminescent material 211B by the jet method that illustrates to being ejected the 38B of portion with reference to Figure 12 limit with the limit.Be ejected matrix 30A whole under the situation of the layer that forms luminescent material 211B on the 38B of portion, conveyer 270 makes matrix 30A be positioned at drying device 250B.And, be ejected luminescent material 211B on the 38B of portion by bone dry, obtain luminescent layer 211FB on the 38B of portion being ejected.
Shown in Figure 17 (d), then, establish counter electrode 46 like that according to covering luminescent layer 211FR, 211FG, 211FB and storage lattice cofferdam 40.Counter electrode 46 has the function as negative electrode.
Then, periphery adhering and sealing substrate 48 and matrix 30A by mutual obtain the el display device 30 shown in Figure 17 (d).In addition, inclosure has inert gas 49 between hermetic sealing substrate 48 and matrix 30A.
In el display device 30, penetrate by means of pixel electrode 36, circuit element layer 34 and support substrate 32 by luminescent layer 211FR, 211FG, the luminous light of 211FB.The el display device that light is penetrated by means of circuit element layer 34 like this is called the bottom emissive type display device.
According to present embodiment, in each blowoff 200R, 200G, 200B3, the injector spacing of the X-direction of jet head sets 114G is the 1/N length doubly of injector spacing of the X-direction of shower nozzle 114.Here, N is the quantity of the shower nozzle 114 that contains among the jet head sets 114G.Therefore, the nozzle line density of the X-direction of blowoff 200R, 200G, 200B is higher than the nozzle line density of the X-direction of common ink discharge device.Thereby manufacturing installation 2 is as long as change ejection data just can be to the portion's of being ejected coating luminescent material of all size.In addition, manufacturing installation 2 is as long as change ejection data just can be made the el display device of various spacings.
In addition, according to present embodiment, by a plurality of overlapping G to 1 drop that is ejected ejection luminescent material 211R, 211G, 211B in each of the 38R of portion, 38G, 38B.By the cumulative volume of the drop of each overlapping G ejection (promptly, cumulative volume by the drop of whole nozzle of containing among 1 overlapping G 118 ejections) any all is identical, thereby, be ejected in the 38R of portion, 38G, the 38B and covered equably by luminescent material 211R, 211B, 211G.And, as explanation among the embodiment 1 like that and since the nozzle 118 that belongs to each seed region SR in jet head sets 114G along the X-direction adjacency, just be eliminated easily so exist with ... the difference of the spray volume of nozzle 118 positions.Its result, the portion 38R of being ejected crawling, the portion 38G of being ejected crawling and the portion 38B of being ejected crawling to each other to each other to each other is just not remarkable yet.
In addition, according to present embodiment, the drop of luminescent material 211R, 211G, 211B bullet on the centre position of 2 positions that covered with drop falls.Therefore, 2 drops that the drop that falls of back bullet can fall at the bullet with respect to oneself on 2 positions of position symmetry with first bullet falls are connected.Therefore, in the drop that falls of bullet of back, opposite power action to 2 directions, its result, the drop that back bullet falls is expanded with the shape of symmetry by its bullet position that falls.From this reason,, just be difficult to take place the crawling of luminescent material 211R, 211G, 211B according to the jet method of present embodiment.
[embodiment 4]
Explanation is applicable to the present invention the manufacturing installation of the back substrate of plasma display system.
Figure 18 (a) and (b) shown in matrix 50A be by substrate by the back substrate 50B that is treated as plasma display system of manufacturing installation 3 described later (Figure 19).Matrix 50A has a plurality of 58R of portion, 58G, 58B of being ejected of rectangular configuration.
Specifically, matrix 50A contain support substrate 52, the banded a plurality of address electrodes 54 that form, overlay address electrode 54 and the dielectric glass layer that forms and have the next door 60 that clathrate is stipulated a plurality of pixel regions simultaneously on support substrate 52.A plurality of pixel regions are with rectangular location, and each matrix column that forms a plurality of pixel regions is corresponding with each a plurality of address electrode 54.Such matrix 50A forms with known screen printing technology.
In the pixel region separately of matrix 50A, by the recess of dielectric glass layer 56 and next door 60 regulations be ejected the 58R of portion, be ejected the 58G of portion, to be ejected the 58B of portion corresponding.The portion 58R of being ejected is the zone that will form the luminous fluorescent layer 311FR of the light that makes the red wavelength zone, the portion 58G of being ejected is the zone that will form the luminous fluorescent layer 311FG of the light that makes green wavelength region, and the portion 58B of being ejected is the zone that will form the luminous fluorescent layer 311FB of the light that makes blue wavelength region.
Each other certain interval LRY of the portion 58R of being ejected, be that spacing is 560 μ m substantially along Y direction.This interval is identical with the portion 58G of the being ejected interval LGY along Y direction each other, and is also identical with the portion 58B of the being ejected interval LBY along Y direction each other.In addition, the image plane that is ejected the 58R of portion is the rectangle by long limit and minor face decision.Specifically, the length that is ejected the Y direction of the 58R of portion is 100 μ m substantially, and the length of X-direction is 300 μ m substantially.Be ejected the 58G of portion and also have the shape size identical with being ejected the 58R of portion with the portion 58B of being ejected.Interval and size corresponding to whole-colored pixel region in the high-definition television of the portion 58R of being ejected above-mentioned interval each other and the above-mentioned size that is ejected the 58R of portion and size about 40 inches are corresponding.
The formation of the formation of blowoff 300G and blowoff 300B, any is all basic identical with blowoff 300R.But, possessing fluorescent material 311G at blowoff 300G and replace on container 301R and this aspect of pipeline 310R with container and pipeline, the formation of blowoff 300G is different with the formation of blowoff 300R.Equally, possess fluorescent material 311B at blowoff 300B and replace on container 301R and this aspect of pipeline 310R with container and pipeline, the formation of blowoff 300B is different with the formation of blowoff 300R.In addition, aqueous fluorescent material 311R, 311B, the 311G in the present embodiment is an example of liquid material of the present invention.
Manufacture method with the plasma display system of manufacturing installation 3 is described.At first, on support substrate 52, form a plurality of address electrodes 54, dielectric glass layer 56 and next door 60, obtain matrix 50A shown in Figure 180 with known screen printing technology.
Then, make matrix 50A lyophilyization by the oxygen plasma treatment under the atmospheric pressure.Handle by this, just be lyophily by the surface in the next door 60 of the recess separately (part of pixel region) of next door 60 and dielectric glass layer 56 regulations, the surface of dielectric glass layer 56.These surfaces become and are ejected the 58R of portion, 58G, 58B.In addition, according to material,, also can obtain being the surface of the lyophily of hope even do not carry out surface treatment as described above.Even do not implement above-mentioned surface treatment, also can be to be ejected the 58R of portion, 58G, 58B by the surface of the recess of next door 60 and dielectric glass layer 56 regulations under these circumstances down.
Formation is ejected the matrix 50A of the 58R of portion, 58G, 58B, is transported to by conveyer 370 on the stand 106 of blowoff 300R.And shown in Figure 21 (a), blowoff 300R is according to forming fluorescent material 311R layer like that by shower nozzle 114 ejection fluorescent material 311R all being ejected on the 58R of portion.Specifically, blowoff 300R is coated with fluorescent material 311R by the jet method that illustrates to being ejected the 58R of portion with reference to Figure 12 limit with the limit.Be ejected matrix 50A whole under the situation of the layer that forms luminescent material 311R on the 58R of portion, conveyer 370 makes matrix 50A be positioned at drying device 350R.And bone dry is ejected the luminescent material 311R on the 58R of portion, obtains fluorescent layer 311FR on the 58R of portion being ejected.
Then, conveyer 370 is positioned on the stand 106 of blowoff 300G matrix 50A.And shown in Figure 21 (b), blowoff 300G is according to forming fluorescent material 311G layer like that by shower nozzle 114 ejection luminescent material 311G all being ejected on the 58G of portion.Specifically, blowoff 300G is coated with fluorescent material 311G by the jet method that illustrates to being ejected the 58G of portion with reference to Figure 12 limit with the limit.The situation that is ejected the layer that forms fluorescent material 311G on the 58G of portion matrix 50A whole is following, and conveyer 370 makes matrix 50A be positioned at drying device 350G.And bone dry is ejected the fluorescent material 311G on the 58G of portion, obtains fluorescent layer 311FG on the 58G of portion being ejected.
Then, conveyer 370 is positioned on the stand 106 of blowoff 300B matrix 50A.And shown in Figure 21 (c), blowoff 300B is according to forming fluorescent material 311B layer like that by shower nozzle 114 ejection fluorescent material 311B all being ejected on the 58B of portion.Specifically, blowoff 300B is coated with fluorescent material 311B by the jet method that illustrates to being ejected the 58B of portion with reference to Figure 12 limit with the limit.The situation that is ejected the layer that forms fluorescent material 311B on the 58B of portion matrix 50A whole is following, and conveyer 370 makes matrix 50A be positioned at drying device 350B.And bone dry is ejected the fluorescent material 311B on the 58B of portion, obtains fluorescent layer 311FB on the 58B of portion being ejected.
By above operation, matrix 50A forms the back substrate 50B of plasma display system.
Then, as shown in figure 22,, obtain plasma display system 50 with bonding back substrate 50B of known method and front substrate 50C.Front substrate 50C has: glass substrate 68, on glass substrate 68 the show electrode 66A of making wiring graph parallel to each other and reading scan electrode 66B, cover show electrode 66A and reading scan electrode 66B and dielectric glass layer 64 that forms and the MgO protective seam 62 that on dielectric glass layer 64, forms.Back substrate 50B and front substrate 50C are according to show electrode 66A reading scan orthogonal such location of electrode 66B of the address electrode 54 of back substrate 50B and front substrate 50C and lump together.In the unit (pixel region) that surrounds with each next door 60, enclose discharge gas with the pressure of regulation.
According to present embodiment, in each blowoff 300R, 300G, 300B, the injector spacing of the X-direction of jet head sets 114G is the 1/N length doubly of injector spacing of the X-direction of shower nozzle 114.Here, N is the quantity of the shower nozzle 114 that contains among the jet head sets 114G.Therefore, the nozzle line density of the X-direction of blowoff 300R, 300G, 300B is higher than the nozzle line density of the X-direction of common ink discharge device.Thereby manufacturing installation 3 is as long as change ejection data just can be to the portion's of being ejected coating fluorescent material of all size.In addition, manufacturing installation 3 is as long as change ejection data just can be made the plasma display system of various spacings.
In addition, according to present embodiment, be ejected each ejection fluorescent material 311R of the 58R of portion, 58G, 58B, the drop of 311G, 311B to 1 by a plurality of overlapping G.By the cumulative volume of the drop of each overlapping G ejection (promptly, cumulative volume by the drop of whole nozzle of containing among 1 overlapping G 118 ejections) any all is identical, thereby, be ejected in the 58R of portion, 58G, the 58B and covered equably by fluorescent material 311R, 311B, 311G.And, as explanation among the embodiment 1 like that and since the nozzle 118 that belongs to each seed region SR in jet head sets 114G along the X-direction adjacency, just be eliminated easily so exist with ... the difference of the spray volume of nozzle 118 positions.Its result, the portion 58R of being ejected crawling, the portion 58G of being ejected crawling and the portion 58B of being ejected crawling to each other to each other to each other is just not remarkable yet.
In addition, according to present embodiment, the drop of fluorescent material 311R, 311G, 311B bullet on the centre position of 2 positions that covered with drop falls.Therefore, 2 drops that the drop that falls of back bullet can fall at the bullet with respect to oneself on 2 positions of position symmetry with first bullet falls are connected.Therefore, in the drop that falls of bullet of back, opposite power action to 2 directions, its result, the drop that back bullet falls is expanded with the shape of symmetry by its bullet position that falls.From this reason,, just be difficult to take place the crawling of fluorescent material 311R, 311G, 311B according to the jet method of present embodiment.
[embodiment 5]
Below, the example that the present invention is applicable to the manufacturing installation of the image display device that possesses electronic emission element is described.
Figure 23 (a) and (b) shown in matrix 70A be by substrate by the electron source base board 70B that is treated as image display device of manufacturing installation 4 described later (Figure 24).Matrix 70A has a plurality of portions 78 that are ejected of rectangular configuration.
Specifically, matrix 70A have matrix 72, be positioned at sodium diffusion on the matrix 72 prevent layer 74, be positioned at the sodium diffusion prevent on the layer 74 a plurality of element electrode 76A, 76B, be positioned at a plurality of metal wiring 79A on a plurality of element electrode 76A and be positioned at a plurality of metal wiring 79B on a plurality of element electrode 76B.Each a plurality of metal wiring 79A has the shape that prolongs along X-direction.On the other hand, each a plurality of metal wiring 79B has the shape that prolongs along Y direction.Owing between metal wiring 79A and metal wiring 79B, form dielectric film 75, so metal wiring 79A and metal wiring 79B can electrical isolations.
The part that contains 1 couple of element electrode 76A and element electrode 76B is corresponding with 1 pixel region.The 1 couple of element electrode 76A and element electrode 76B be the interval of regulation disconnected from each other only, prevents on the layer 74 opposed in the sodium diffusion.Be electrically connected with corresponding metal wiring 79A with certain pixel region corresponding elements electrode 76A.In addition, be electrically connected with corresponding metal wiring 79B with this pixel region corresponding elements electrode 76B.In addition, in this manual, matrix 72 and sodium diffusion are prevented that layer 74 part souvenir altogether from being support substrate.
In each pixel region of matrix 70A, the part of the part of element electrode 76A, element electrode 76B and the diffusion of the sodium that exposes between element electrode 76A and element electrode 76B prevent layer 74 and to be ejected portion 78 corresponding.More particularly, being ejected portion 78 is the zones that will form conductive membrane 411F (Figure 27), and conductive membrane 411F forms like that according to the part of cladding element electrode 76A, the part of element electrode 76B and the gap between element electrode 76A, the 76B.As dotting among Figure 23 (b), the flat shape of the portion that is ejected 78 in the present embodiment is circular.According to like this, the flat shape that is ejected portion of the present invention also can be the circle by X coordinate range and the decision of Y coordinate range.
Be ejected each other certain interval L of portion 78, be that spacing is 190 μ m substantially along Y direction.In addition, the length (length of X coordinate range) that is ejected the X-direction of portion 78 is 100 μ m substantially, and the length of Y direction (length of Y coordinate range) also is 100 μ m substantially.The interval and the size that are ejected the pixel region in the high-definition television of portion 78 above-mentioned interval each other and the above-mentioned size that is ejected portion and size about 40 inches are corresponding.
Blowoff 400 shown in Figure 25 possesses: keep container 401, the pipeline 410 of aqueous conductive membrane material 41 1 and supply with the ejection scanner section 102 of conductive membrane materials 411 by means of pipeline 410 from container 401.The explanation of ejection scanner section 102 is omitted because of embodiment 1 has illustrated.In addition, the aqueous conductive membrane material 411 in the present embodiment is an organic palladium solution.In addition, the aqueous conductive membrane material 411 in the present embodiment is examples of liquid material of the present invention.
Manufacturing method of anm image displaying apparatus with manufacturing installation 4 is described.At first, on the matrix 72 that forms by soda-lime glass etc., form with SiO
2Sodium diffusion as major component prevents layer 74.Specifically, by on matrix 72, form the SiO of thickness 1 μ m with sputtering method
2Film and obtain sodium diffusion and prevent layer 74.Then, prevent to form with sputtering method or vacuum-deposited coating on the layer 74 titanium layer of thickness 5nm in the sodium diffusion.And, with lithography technology or etching technique, how to form the distance of regulation disconnected from each other only over the ground and the 1 couple of element electrode 76A and the element electrode 76B that locate by this titanium layer.
Then, prevent that in the sodium diffusion coating Ag sticks with paste and burns till on layer 74 and a plurality of element electrode 76A, form a plurality of metal wiring 79A that prolong along X-direction with screen printing technology.Then, stick with paste and burn till, form dielectric film 75 with screen printing technology coated glass on the part of each metal wiring 79A.And, prevent that in the sodium diffusion coating Ag sticks with paste and burns till on layer 74 and a plurality of element electrode 76B with screen printing technology, form a plurality of metal wiring 79B that prolong along Y direction.In addition, make under the situation of metal wiring 79B, metal wiring 79B is coated with the Ag paste by means of dielectric film 75 like that according to intersecting with metal wiring 79A.Obtain matrix 70A shown in Figure 23 by above operation.
Then, make matrix 70A lyophilyization by the oxygen plasma treatment under the atmospheric pressure.Handle by this, the surface of the surface part of the part on the surface of element electrode 76A, element electrode 76B and the support substrate that exposes between element electrode 76A and element electrode 76B is by lyophilyization.And these surfaces become the portion of being ejected 78.In addition, according to material,, also can obtain being the surface of desirable lyophily even do not carry out surface treatment as described above.Under these circumstances down, even do not implement above-mentioned surface treatment, the surface part of the part on the surface of element electrode 76A, element electrode 76B and the sodium diffusion of exposing between element electrode 76A and element electrode 76B prevent that the surface of layer 74 from also can be to be ejected portion 78.
Formation is ejected the matrix 70A of portion 78, is transported to by conveyer 470 on the stand 106 of blowoff 400.And as shown in figure 26, blowoff 400 is according to forming 411 layers of conductive membrane materials like that by shower nozzle 114 ejection conductive membrane materials 411 all being ejected in the portion 78.Specifically, blowoff 400 usefulness limits are coated with conductive membrane materials 411 by the jet method that illustrates to being ejected portion 78 with reference to Figure 12 limit.In the present embodiment, the diameter of the drop of the conductive membrane material 411 that falls according to bullet on being ejected portion 78 becomes in the scope of 60 μ m～80 μ m like that, and control part 112 is given shower nozzle 114 with signal.Be ejected matrix 70A whole under the situation of the layer that forms conductive membrane material 411 in the portion 78, conveyer 470 makes matrix 70A be positioned at drying device 450R.And bone dry is ejected the conductive membrane material 411 in the portion 78, obtains in the portion 78 with the conductive membrane 411F of palladium oxide as major component being ejected.Like this, in each pixel region, form the part of cladding element electrode 76A, the part of element electrode 76B and the sodium that between element electrode 76A and element electrode 76B, exposes and spread the conductive membrane 411F that prevents layer 74.
Then, apply the voltage of the regulation of pulse type between element electrode 76A and element electrode 76B, the part of conductive membrane 411F forms electron emission part 411D.In addition, preferably under the organism atmosphere gas or the voltage that carries out respectively between element electrode 76A and the element electrode 76B under the vacuum condition apply.Its reason is, and is if like this, higher by the electronic transmitting efficiency of electron emission part 411D.Element electrode 76A, corresponding elements electrode 76B and the conductive membrane 411F that establishes electron emission part 411D are electronic emission elements.In addition, each electronic emission element is corresponding with each pixel region.
By above operation, as shown in figure 27, matrix 70A becomes electron source base board 70B.
Then, as shown in figure 28,, obtain image display device 70 with bonding electron source base board 70B of known method and front substrate 70C.Front substrate 70C has: glass substrate 82, on glass substrate 82 rectangular location a plurality of fluorescent portion 84, cover the sheet metal 86 of a plurality of fluorescent portion 84.Sheet metal 86 has the function of the electrode that quickens as the electron beam that is used to make from electron emission part 411D.Electron source base board 70B and front substrate 70C locate like that and lump together according to a plurality of fluorescent of each a plurality of electronic emission element and each portion 84 subtends.In addition, remain vacuum state between electron source base board 70B and the front substrate 70C.
In addition, the image display device 70 that also will possess above-mentioned electronic emission element sometimes is called SED (surface-conduction-electron emission display) or FED (Field Emission Display).
According to present embodiment, in blowoff 400, the injector spacing of the X-direction of jet head sets 114G is the 1/N length doubly of injector spacing of the X-direction of shower nozzle 114.Here, N is the quantity of the shower nozzle 114 that contains among the jet head sets 114G.Therefore, the nozzle line density of the X-direction of blowoff 400 is higher than the nozzle line density of the X-direction of common ink discharge device.Thereby manufacturing installation 4 is as long as change ejection data just can be to the portion's of being ejected coating conductive membrane material 411 of all size.In addition, manufacturing installation 4 is as long as change ejection data just can be made the electron source base board of various spacings.
In addition, according to present embodiment, by a plurality of overlapping G to the drop that is ejected portion 78 ejection conductive membrane materials 411.Any all is identical by the cumulative volume of the drop of each overlapping G ejection (that is, by the cumulative volume of the drop of whole nozzles 118 ejections that contain among 1 overlapping G), thereby, be ejected in the portion 78 and covered equably by conductive membrane material 411.And, as explanation among the embodiment 1 like that and since the nozzle 118 that belongs to each seed region SR in jet head sets 114G along the X-direction adjacency, just be eliminated easily so exist with ... the difference of the spray volume of nozzle 118 positions.Its result, it is just not remarkable to be ejected portion 78 crawling to each other yet.
In addition, according to present embodiment, the drop of conductive membrane material 411 bullet on the centre position of 2 positions that covered with drop falls.Therefore, 2 drops that the drop that falls of back bullet can fall at the bullet with respect to oneself on 2 positions of position symmetry with first bullet falls are connected.Therefore, in the drop that falls of bullet of back, opposite power action to 2 directions, its result, the drop that back bullet falls is expanded with the shape of symmetry by its bullet position that falls.From this reason,, just be difficult to take place the crawling of conductive membrane material 411 according to the jet method of present embodiment.
Claims (13)
1. blowoff possesses:
Stand and
Jet head sets with respect to above-mentioned stand relatively moves is characterized in that,
Above-mentioned jet head sets is made of the 1st shower nozzle, the 2nd shower nozzle, the 3rd shower nozzle and the 4th shower nozzle,
Each of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle has P spray nozzle,
The mode that becomes the 1st length according to each the injector spacing of X-direction of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle disposes an above-mentioned P spray nozzle,
Above-mentioned the 1st shower nozzle and above-mentioned the 2nd shower nozzle are adjacent to each other on Y direction,
Above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle are adjacent to each other on above-mentioned Y direction, the X coordinate of the benchmark nozzle of above-mentioned the 2nd shower nozzle, only be offset the X coordinate of the 2nd length with respect to X coordinate from the benchmark nozzle of above-mentioned the 1st shower nozzle, be offset 1/2 times of above-mentioned the 1st length again, the X coordinate of the benchmark nozzle of above-mentioned the 4th shower nozzle, only be offset the X coordinate of above-mentioned the 2nd length with respect to X coordinate, be offset 1/2 times of above-mentioned the 1st length again from the benchmark nozzle of above-mentioned the 3rd shower nozzle
The above-mentioned X coordinate of the benchmark nozzle of above-mentioned the 3rd shower nozzle only is offset the X coordinate of above-mentioned the 2nd length with respect to the above-mentioned X coordinate from the benchmark nozzle of above-mentioned the 2nd shower nozzle, is offset 1/4 times or 3/4 times of above-mentioned the 1st length,
The P/4 that above-mentioned the 2nd length is above-mentioned the 1st length times,
P is the natural number more than 2,
Above-mentioned X-direction and Y direction are orthogonal.
2. blowoff according to claim 1 is characterized in that, in each of above-mentioned 4 shower nozzles, an above-mentioned P spray nozzle is arranged in above-mentioned X-direction.
3. blowoff according to claim 1 is characterized in that,
The nozzle of above-mentioned P in each of above-mentioned 4 shower nozzles all forms the 1st row and the 2nd row that prolong on above-mentioned X-direction,
In above-mentioned the 1st row and the above-mentioned the 2nd each that is listed as, above-mentioned a plurality of nozzles are with 2 times spacing arrangement of above-mentioned the 1st length,
Above-mentioned the 1st row are listed in respect to the above-mentioned the 2nd and only are offset above-mentioned the 1st length on the above-mentioned X-direction.
4. blowoff according to claim 1 is characterized in that,
Above-mentioned P spray nozzle in each of above-mentioned 4 shower nozzles forms each M that prolongs row on X-direction,
In each of above-mentioned M row, an above-mentioned P spray nozzle is with the M of above-mentioned the 1st length times spacing arrangement,
With respect to above-mentioned M of being listed as, the individual i length doubly that only is offset above-mentioned the 1st length on the unduplicated X-direction that is listed in of other (M-1),
M is the natural number more than 2,
I is from 1 natural number to (M-1).
5. according to each described blowoff of claim 1～4, it is characterized in that,
Above-mentioned stand keeps having the matrix of the portion of being ejected,
Relatively move along above-mentioned Y direction with respect to above-mentioned matrix by above-mentioned jet head sets, at least 1 spray nozzle of an above-mentioned P spray nozzle invade with the above-mentioned situation that is ejected the corresponding zone of portion under, spray liquid material from above-mentioned at least 1 spray nozzle to the above-mentioned portion of being ejected.
6. blowoff according to claim 5 is characterized in that,
The above-mentioned image plane that is ejected portion is the rectangle by the cardinal principle of its long limit and minor face decision,
The above-mentioned stand direction mode parallel with above-mentioned Y direction parallel with above-mentioned X-direction according to the direction on above-mentioned long limit, above-mentioned minor face simultaneously keeps above-mentioned matrix,
Relatively move along above-mentioned y direction of principal axis with respect to above-mentioned matrix by above-mentioned jet head sets, at least 2 spray nozzles of an above-mentioned P spray nozzle invade simultaneously substantially with the above-mentioned situation that is ejected the corresponding zone of portion under, the while sprays above-mentioned liquid material to the above-mentioned portion of being ejected substantially from above-mentioned at least 2 spray nozzles.
7. the manufacturing installation of a colored filter substrate, its blowoff possesses:
Keep matrix stand and
Jet head sets with respect to above-mentioned stand relatively moves is characterized in that,
Above-mentioned jet head sets is made of the 1st shower nozzle, the 2nd shower nozzle, the 3rd shower nozzle and the 4th shower nozzle,
Each of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle has P the spray nozzle that can spray aqueous colorized optical filtering sheet material to above-mentioned matrix,
The mode that becomes the 1st length according to each the injector spacing of X-direction of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle disposes an above-mentioned P spray nozzle,
Above-mentioned the 1st shower nozzle and above-mentioned the 2nd shower nozzle are adjacent to each other on Y direction,
Above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle are adjacent to each other on above-mentioned Y direction, the X coordinate of the benchmark nozzle of above-mentioned the 2nd shower nozzle, only be offset the X coordinate of the 2nd length with respect to X coordinate from the benchmark nozzle of above-mentioned the 1st shower nozzle, be offset 1/2 times of above-mentioned the 1st length again, the X coordinate of the benchmark nozzle of above-mentioned the 4th shower nozzle, only be offset the X coordinate of above-mentioned the 2nd length with respect to X coordinate, be offset 1/2 times of above-mentioned the 1st length again from the benchmark nozzle of above-mentioned the 3rd shower nozzle
The above-mentioned X coordinate of the benchmark nozzle of above-mentioned the 3rd shower nozzle only is offset the X coordinate of above-mentioned the 2nd length with respect to the above-mentioned X coordinate from the benchmark nozzle of above-mentioned the 2nd shower nozzle, is offset 1/4 times or 3/4 times of above-mentioned the 1st length,
The P/4 that above-mentioned the 2nd length is above-mentioned the 1st length times,
P is the natural number more than 2,
Above-mentioned X-direction and Y direction are orthogonal.
8. the manufacturing installation of an el display device, its blowoff possesses:
Keep matrix stand and
Jet head sets with respect to above-mentioned stand relatively moves is characterized in that,
Above-mentioned jet head sets is made of the 1st shower nozzle, the 2nd shower nozzle, the 3rd shower nozzle and the 4th shower nozzle,
Each of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle has P the spray nozzle that can spray aqueous luminescent material to above-mentioned matrix,
The mode that becomes the 1st length according to each the injector spacing of X-direction of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle disposes an above-mentioned P spray nozzle,
Above-mentioned the 1st shower nozzle and above-mentioned the 2nd shower nozzle are adjacent to each other on Y direction,
Above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle are adjacent to each other on above-mentioned Y direction, the X coordinate of the benchmark nozzle of above-mentioned the 2nd shower nozzle, only be offset the X coordinate of the 2nd length with respect to X coordinate from the benchmark nozzle of above-mentioned the 1st shower nozzle, be offset 1/2 times of above-mentioned the 1st length again, the X coordinate of the benchmark nozzle of above-mentioned the 4th shower nozzle, only be offset the X coordinate of above-mentioned the 2nd length with respect to X coordinate, be offset 1/2 times of above-mentioned the 1st length again from the benchmark nozzle of above-mentioned the 3rd shower nozzle
The above-mentioned X coordinate of the benchmark nozzle of above-mentioned the 3rd shower nozzle only is offset the X coordinate of above-mentioned the 2nd length with respect to the above-mentioned X coordinate from the benchmark nozzle of above-mentioned the 2nd shower nozzle, is offset 1/4 times or 3/4 times of above-mentioned the 1st length,
The P/4 that above-mentioned the 2nd length is above-mentioned the 1st length times,
P is the natural number more than 2,
Above-mentioned X-direction and Y direction are orthogonal.
9. the manufacturing installation of a plasma display system, its blowoff possesses:
Keep matrix stand and
Jet head sets with respect to above-mentioned stand relatively moves is characterized in that,
Above-mentioned jet head sets is made of the 1st shower nozzle, the 2nd shower nozzle, the 3rd shower nozzle and the 4th shower nozzle,
Each of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle has P the spray nozzle that can spray aqueous fluorescent material to above-mentioned matrix,
The mode that becomes the 1st length according to each the injector spacing of X-direction of above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle disposes an above-mentioned P spray nozzle,
Above-mentioned the 1st shower nozzle and above-mentioned the 2nd shower nozzle are adjacent to each other on Y direction,
Above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle are adjacent to each other on above-mentioned Y direction, the X coordinate of the benchmark nozzle of above-mentioned the 2nd shower nozzle, only be offset the X coordinate of the 2nd length with respect to X coordinate from the benchmark nozzle of above-mentioned the 1st shower nozzle, be offset 1/2 times of above-mentioned the 1st length again, the X coordinate of the benchmark nozzle of above-mentioned the 4th shower nozzle, only be offset the X coordinate of above-mentioned the 2nd length with respect to X coordinate, be offset 1/2 times of above-mentioned the 1st length again from the benchmark nozzle of above-mentioned the 3rd shower nozzle
The above-mentioned X coordinate of the benchmark nozzle of above-mentioned the 3rd shower nozzle only is offset the X coordinate of above-mentioned the 2nd length with respect to the above-mentioned X coordinate from the benchmark nozzle of above-mentioned the 2nd shower nozzle, is offset 1/4 times or 3/4 times of above-mentioned the 1st length,
The P/4 that above-mentioned the 2nd length is above-mentioned the 1st length times,
P is the natural number more than 2,
Above-mentioned X-direction and Y direction are orthogonal.
10. jet method comprises:
The matrix that will have a portion of being ejected is positioned in the step (a) on the stand; With
The mode that makes injector spacing according to separately X-direction become the 1st length disposes the step (b) that the 1st shower nozzle, the 2nd shower nozzle, the 3rd shower nozzle and the 4th shower nozzle of P spray nozzle relatively move along Y direction with respect to above-mentioned matrix in separately, it is characterized in that,
Above-mentioned steps (b) comprises step (b1), this step (b1) is in 1 scan period, make the X coordinate of the benchmark nozzle of above-mentioned the 2nd shower nozzle, only be offset the X coordinate of the 2nd length, be offset 1/2 times of above-mentioned the 1st length again with respect to X coordinate from the benchmark nozzle of above-mentioned the 1st shower nozzle; Make the X coordinate of the benchmark nozzle of above-mentioned the 4th shower nozzle, only be offset the X coordinate of above-mentioned the 2nd length, be offset 1/2 times of above-mentioned the 1st length again with respect to X coordinate from the benchmark nozzle of above-mentioned the 3rd shower nozzle; Make the above-mentioned X coordinate of the benchmark nozzle of above-mentioned the 3rd shower nozzle, only be offset the X coordinate of above-mentioned the 2nd length with respect to above-mentioned X coordinate from the benchmark nozzle of above-mentioned the 2nd shower nozzle, be offset 1/4 times or 3/4 times of above-mentioned the 1st length, make above-mentioned the 1st shower nozzle, above-mentioned the 2nd shower nozzle, above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle simultaneously, relatively move along Y direction with respect to above-mentioned matrix
Above-mentioned steps (b1) comprises that a side who makes in above-mentioned the 1st shower nozzle and above-mentioned the 2nd shower nozzle relatively moves to the opposing party continuously, the step that the side in above-mentioned the 3rd shower nozzle and above-mentioned the 4th shower nozzle is relatively moved to the opposing party continuously,
Above-mentioned P is the natural number more than 2,
The P/4 that above-mentioned the 2nd length is above-mentioned the 1st length doubly.
11. jet method according to claim 10, it is characterized in that above-mentioned steps (b) comprises the step (b2) that above-mentioned 4 shower nozzles of the nozzle that makes on above-mentioned X-direction each above-mentioned P with arrangement relatively move along above-mentioned Y direction with respect to above-mentioned matrix.
12. according to claim 10 or 11 described jet methods, it is characterized in that, also be included in by above-mentioned steps (b) at least 1 spray nozzle of an above-mentioned P spray nozzle is invaded and the above-mentioned step (c) that sprays liquid material at least when being ejected in the corresponding zone of portion, from above-mentioned 1 nozzle to the above-mentioned portion of being ejected.
13. jet method according to claim 12 is characterized in that,
The above-mentioned image plane that is ejected portion is the rectangle by the cardinal principle of its long limit and minor face decision,
The step (a1) of the above-mentioned matrix of mode mounting that direction parallel with above-mentioned X-direction according to the direction on the above-mentioned long limit that is ejected portion, above-mentioned minor face simultaneously that above-mentioned steps (a) comprises is parallel with above-mentioned Y direction,
At least 2 spray nozzles that above-mentioned steps (c) also is included in an above-mentioned P spray nozzle are invaded substantially simultaneously with above-mentioned when being ejected in the corresponding zone of portion, and the while sprays the step (c1) of above-mentioned liquid material to the above-mentioned portion of being ejected substantially from above-mentioned at least 2 spray nozzles.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003335546 | 2003-09-26 | ||
| JP2003335546A JP2005095835A (en) | 2003-09-26 | 2003-09-26 | Delivery device, manufacturing device for color filter substrate, manufacturing device for electroluminescence display device, manufacturing device for plasma display device and delivery method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1601344A true CN1601344A (en) | 2005-03-30 |
| CN100359377C CN100359377C (en) | 2008-01-02 |
Family
ID=34462901
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410011984XA Active CN100359377C (en) | 2003-09-26 | 2004-09-27 | Sprayer,substrate of color optical filter and mfg.of electroluminescent display device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2005095835A (en) |
| KR (1) | KR100690529B1 (en) |
| CN (1) | CN100359377C (en) |
| TW (1) | TWI269073B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1955000B (en) * | 2005-09-29 | 2010-05-19 | 应用材料公司 | Methods, apparatus and system for inkjet printing on non-planar substrates |
| CN101927599A (en) * | 2009-06-18 | 2010-12-29 | 株式会社爱发科 | The jet method of blowoff and use blowoff |
| CN103403609A (en) * | 2010-07-26 | 2013-11-20 | 伊英克公司 | Method, apparatus, and system for forming filter elements on display substrates |
| CN103403609B (en) * | 2010-07-26 | 2016-11-30 | 伊英克公司 | For forming the method, apparatus and system of filter element on display base plate |
| CN110355019A (en) * | 2018-04-09 | 2019-10-22 | 细美事有限公司 | Utilize the medical fluid Supply Method of ink gun |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4345716B2 (en) | 2005-06-10 | 2009-10-14 | セイコーエプソン株式会社 | Droplet ejection method |
| JP4600363B2 (en) * | 2006-07-31 | 2010-12-15 | セイコーエプソン株式会社 | Liquid drawing method |
| JP4306730B2 (en) | 2007-01-15 | 2009-08-05 | セイコーエプソン株式会社 | Pattern formation method |
| KR101485980B1 (en) * | 2014-03-03 | 2015-01-27 | 주식회사 기가레인 | Coating Apparatus |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000071482A (en) * | 1998-08-28 | 2000-03-07 | Toshiba Tec Corp | Color ink jet printer |
| JP2002221616A (en) * | 2000-11-21 | 2002-08-09 | Seiko Epson Corp | Method and device for manufacturing color filter, method and device for manufacturing liquid crystal device, method and device for manufacturing el device, device for controlling inkjet head, method and device for discharging material and electronic instrument |
| JP3997747B2 (en) * | 2001-10-19 | 2007-10-24 | セイコーエプソン株式会社 | Head unit, setting method thereof, and electronic apparatus |
-
2003
- 2003-09-26 JP JP2003335546A patent/JP2005095835A/en active Pending
-
2004
- 2004-09-24 KR KR1020040076869A patent/KR100690529B1/en active IP Right Grant
- 2004-09-24 TW TW093129091A patent/TWI269073B/en not_active IP Right Cessation
- 2004-09-27 CN CNB200410011984XA patent/CN100359377C/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1955000B (en) * | 2005-09-29 | 2010-05-19 | 应用材料公司 | Methods, apparatus and system for inkjet printing on non-planar substrates |
| CN101927599A (en) * | 2009-06-18 | 2010-12-29 | 株式会社爱发科 | The jet method of blowoff and use blowoff |
| CN101927599B (en) * | 2009-06-18 | 2012-06-20 | 株式会社爱发科 | Ejection device and ejection method using same |
| CN103403609A (en) * | 2010-07-26 | 2013-11-20 | 伊英克公司 | Method, apparatus, and system for forming filter elements on display substrates |
| CN103403609B (en) * | 2010-07-26 | 2016-11-30 | 伊英克公司 | For forming the method, apparatus and system of filter element on display base plate |
| CN110355019A (en) * | 2018-04-09 | 2019-10-22 | 细美事有限公司 | Utilize the medical fluid Supply Method of ink gun |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100690529B1 (en) | 2007-03-09 |
| TWI269073B (en) | 2006-12-21 |
| TW200525193A (en) | 2005-08-01 |
| KR20050030868A (en) | 2005-03-31 |
| CN100359377C (en) | 2008-01-02 |
| JP2005095835A (en) | 2005-04-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1644372A (en) | Discharge apparatus, material application method, manufacturing method for color filter substrate | |
| CN1250986C (en) | Method and device for manufacturing colour filter, liquid crystal display device and electroluminescence plate | |
| CN1236918C (en) | Apparatus and method for spraying material and manufacturing equipment and method of colour filter | |
| CN1228651C (en) | Display manufacturing apparatus and display manufacturing method | |
| CN1248030C (en) | Film forming method and apparatus, method and apparatus for producing base plate and electronic equipment | |
| CN1218838C (en) | Jetting-out method and apparatus | |
| CN1074164C (en) | Gas discharge display apparatus and method for driving the same | |
| CN1215341C (en) | Color filter, method for manufacturing the same, display device and electronic equipment | |
| CN1311281C (en) | Manufacturing method and apparatus of colored filter, liquid crystal device, EL device | |
| CN2719415Y (en) | Liquid material ejecting apparatus | |
| CN1260579A (en) | Flat-type plasma discharging display device and driving method | |
| CN1320377C (en) | Colour filter, substrate, electrooptical device, electronic apparatus, film forming method and apparatus | |
| CN1422746A (en) | Jetting out method and apparatus | |
| CN1358626A (en) | Color filtering piece, liquid crystal deivce, and EL device making method and device | |
| CN1279564C (en) | Display panel and manufacturing method for the same including bonding agent application method | |
| CN1770355A (en) | Method for producing electron beam apparatus | |
| CN1618606A (en) | Liquid droplet ejection method, liquid droplet ejection device, nozzle abnormality determination method | |
| CN1657289A (en) | Method for coating material, color filter substrate and method of manufacturing device | |
| CN1503011A (en) | Color filter and mfg method, display device and electronic apparatus | |
| CN1477667A (en) | Image display device and its mfg. method | |
| CN1601344A (en) | Sprayer,substrate of color optical filter and mfg.of electroluminescent display device | |
| CN1611356A (en) | Jetting device, coating method and method for making substrate of colour filter | |
| CN1657287A (en) | Ejection device, material coating method, method of manufacturing color filter substrate | |
| CN1541399A (en) | Plasma display panel, plasma display displaying device and prodn. method of plasma display panel | |
| CN100343702C (en) | Method and device for forming film photoelectric device and its making method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20180622 Address after: California, USA Patentee after: KATEEVA, Inc. Address before: Tokyo, Japan Patentee before: Seiko Epson Corp. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20220727 Address after: Room 402, 4th floor, building 1, No. 326, Yinqiao Road, Gaobu street, Yuecheng District, Shaoxing City, Zhejiang Province Patentee after: Kedihua display technology (Shaoxing) Co.,Ltd. Address before: California, USA Patentee before: KATEEVA, Inc. |
|
| TR01 | Transfer of patent right |