CN1599114A - Microfuel cell for microelectronic mechanical systemy and manufacturing method thereof - Google Patents
Microfuel cell for microelectronic mechanical systemy and manufacturing method thereof Download PDFInfo
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- CN1599114A CN1599114A CNA031600050A CN03160005A CN1599114A CN 1599114 A CN1599114 A CN 1599114A CN A031600050 A CNA031600050 A CN A031600050A CN 03160005 A CN03160005 A CN 03160005A CN 1599114 A CN1599114 A CN 1599114A
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The invention relates to a micro fuel cell used in micro-electronics mechanical system. It includes external cast (4, 6), fuel delivery port (7), air delivery port (8), proton exchange film (5), cathode stephanoporate catalyst film (3) and anode stephanoporate catalyst film (1). The surface of the proton exchange film (5) is covered with the anode stephanoporate catalyst film (1) to form the anode. The other surface of the proton exchange film (5) is covered with the cathode stephanoporate catalyst film (3) to form the cathode. On the external surface areas of the two stephanoporate catalyst film (1, 3), there is an external cast (4) with the fuel delivery port (7) and an external cast (4) with the air delivery port (8) respectively. The cell of the invention is featured by small size, relatively high energy density and long useful life and can be used as the rechargeable micro energy sources in the micro-electronics mechanical system. It can be used as the micro energy sources in the micro-electronics mechanical system after being assembled with micro lithium cell. It also can be used as the mini portable power supply of the mobile phones and notebook PCs.
Description
Technical field
The present invention relates to the micro fuel cell technology, particularly a kind of microelectromechanical systems (Micro ElectroMechanical System is hereinafter to be referred as MEMS) micro fuel cell and preparation method thereof.
Background technology
1839, Ge Luofu (W.R.Grove) delivered the report of piece relevant fuel cell studies that beats the world.He makes electrode with the platinum that is coated with by the monocell of development, is fuel with hydrogen, and oxygen is oxidant.He points out that the interaction of strengthening between gas, electrolyte and electrode three is the key that improves battery performance.Through the development of nearly two a century, fuel cell has been developed many kinds, but to still in recent years thing of the research of micro fuel cell, is becoming one of hot research direction at present.
There is how tame U.S. mechanism studying micro fuel cell, is used for military affairs, and be reported on the MEMS minute vehicle and use.This battery operated be in Passive Mode, no temperature, humidity, pressure and flow control.U.S. Pat 5,759 in 1998, and 712 have announced a kind of direct ethanol micro fuel cell systems of copying surface that adopts novel composite electrode material to make, and it adopts porous plastic film is the fuel cell base material, can be integrated with little rechargable battery.Calendar year 2001, U.S. Pat 6,326,097 disclosed a kind of micro fuel cell array of using to mobile phone, employing be the most basic a kind of series circuit mode, its size is bigger, the little energy of uncomfortable cooperation MEMS.People such as the micro-system laboratory scholar Woo Young Sim of calendar year 2001 Korea S Ajou university have studied the direct methyl alcohol micro fuel cell that a kind of MEMS respiratory medical is used, size 16mm * 16mm * 1.2mm, and output voltage is 100mV when using for 25 ℃.Because it adopts Cr/Au is catalyst, partly contacts with PEM, the micro fuel cell performance is reduced.People such as the Canadian Stanford rapid shaping laboratory S.J.Lee of university in 2002 design and have made the micro fuel cell array of a kind of " Flip-Flop " intraconnected, a plurality of micro fuel cells of can connecting, employing hydrogen is fuel, output voltage is more than the 3V, is 40mW/cm for 4 series connection micro fuel cell array energy densities
2Disclose in Chinese patent application 00123627.X that a kind of what contain a plurality of membrane electrodes is the micro fuel cell of fuel with hydrogen, but its size is bigger, is 77mm * 34mm * 8mm, is not suitable for the little energy of MEMS.So far yet there are no report in the research aspect the MEMS micro fuel cell.The deficiencies in the prior art place is that the size of battery is big, energy density is not high, and the life-span is shorter.Along with the continuous development of science and technology, the microminiaturization of an urgent demand MEMS battery, high-energy-density and have lasting charge function.Carry out research, fill up the blank of this respect, will help the development of China aspect MEMS and little energy design, preparation and the application facet of MEMS micro fuel cell.
Summary of the invention
The purpose of this invention is to provide a kind of microelectromechanical systems (MEMS) micro fuel cell and preparation method thereof, the size that has micro fuel cell now is big, energy density is lower to solve, the problem that life-span is short, and can be used as power supply among the MEMS, little energy of continuing charging uses.
The objective of the invention is to realize by following technical scheme.MEMS of the present invention with the feature of micro fuel cell is:
It comprises adventitia, fuel delivery port, atmosphere communicating port, proton exchange membrane, negative electrode porous catalytic agent film, anode porous catalytic agent film, is covered with described anode porous catalytic agent film on a surface of described proton exchange membrane, forms anode; On its another surface, be covered with described negative electrode porous catalytic agent film, form negative electrode; Outer surface at described two porous catalytic agent films respectively is covered with the adventitia that an adventitia and that has the fuel delivery port has atmosphere communicating port,
On described two adventitia inner surfaces, be covered with micro channel array and electric current collection circuit; In described micro channel array, be " linking end to end " that to form described micro channel array, the head end of described micro channel array links to each other with described two fuel delivery ports respectively with end between each microchannel; The head end of another micro channel array links to each other with described two atmosphere communicating ports respectively with end.
Described two adventitias are silicon chip;
Described microchannel wide is 10～250 microns, is the 50-300 micron deeply;
The work area of described micro fuel cell is 2-3cm
2
The present invention also provides a kind of MEMS manufacture method with micro fuel cell, and it is characterized in that: it may further comprise the steps:
1) preparation of fuel delivery port and atmosphere communicating port
1-1, two monocrystalline silicon pieces of selection are as adventitia;
1-2, thermal oxidation generate SiO on the surface of adventitia
2Sacrifice layer;
1-3, by photoetching, corrosion, on adventitia, make fuel delivery port and atmosphere communicating port respectively;
2) preparation of electric current collection circuit
2-1 is to having prepared the adventitia of delivery port, at an one SiO
2On the sacrifice layer, the gold-plated layer of magnetron sputtering;
2-2 carries out wiring by photoetching, corrosion;
3) fuel and air are carried the preparation of microchannel
3-1 optionally corrodes having carried out two adventitias of wiring design, prepares the microchannel of fuel microchannel and air respectively thereon;
3-2 is in order to isolate silicon base, and after above-mentioned corrosion process was finished, by thermal oxidation, preparation generated SiO
2Separator;
4) preparation of electrode
On two surfaces of proton exchange membrane, sputter thin layer electrode, described thin layer electrode are the perforated electrode catalyst film, and its material is CrAu/C or Pt/C or PtRu/C;
5) encapsulation
Proton exchange membrane that is coated with the perforated electrode catalyst film and adventitia packaging by hot pressing, make micro fuel cell; A plurality of micro fuel cells and or series connection, prepare micro fuel cell heap.
The present invention is made of a proton exchange membrane and two adventitias that are covered with micro channel array and electric current collection circuit, adopts two silicon chips as adventitia.In order to reduce the size with the attenuate goods, increase its energy density and prolong its service time, adopt precision machining methods such as sputter, chemistry to process, adopt airborne oxygen, utilize capillarity transfer the fuel, the air of microchannel to prolong its service time.On the silicon chip of finishing wiring, optionally corrode, to make the microchannel; Therefore, it is microminiaturized that the microchannel of fuel and air can reach, and it is dark that for example the microchannel can reach 10～250 microns wide and 50～300 microns, and can become a plurality of microchannels by cloth on the area of very little silicon chip; The microchannel is adopted end to end, to guarantee fuel and the smooth delivery of power of air and the even distribution in the microchannel.For the thickness of attenuate goods, upward adopt sputter gold-plated in proton exchange membrane (Proton Exchange Membrane is hereinafter to be referred as PEM), use in the layer in other technology, also adopt chemical method to make.Make the size of goods can reach 15mm * 15mm * 1.35mm.A plurality of goods and or the series connection, can prepare battery pile, to increase its power output or to prolong its useful life.
In sum, micro cell of the present invention has that size is less, energy density is higher, the advantage that the life-span is long, and can be used as the little energy that continues charging among the MEMS and use.The present invention is suitable for being used among the MEMS, as driving on microsensor, the little transmission mechanism as little energy, also can with little lithium battery assembling back as the little energy of MEMS.Also can be used as the small portable power supply of power supplies such as mobile phone, notebook computer.
Description of drawings
Fig. 1 is a structural representation of the present invention,
Fig. 2 is the preparation schematic diagram of fuel and air ports,
Fig. 3 is the A-A profile among Fig. 2,
Fig. 4 prepares schematic diagram for the electric current collection circuit,
Fig. 5 is the B-B profile among Fig. 4,
Fig. 6 is an air duct preparation technology schematic diagram,
Fig. 7 is a perforated electrode catalyst thin film preparation process schematic diagram,
Fig. 8 is the encapsulation schematic diagram of battery,
Fig. 9 is a C-C profile among Fig. 8.
Code name among the figure
1 anode porous catalytic agent film, 2 micro channel array 2A electric current collection circuit
3 negative electrode porous catalytic agent film 4 adventitias, 5 proton exchange membrane (PEM)
6 adventitias, 7 fuel delivery ports, 8 atmosphere communicating ports
9 sacrifice layers, 11 Gold plated Layer, 12 separators
Embodiment
Present embodiment is illustrated for example with micro-proton exchange membrane fuel cell (Micro Proton Exchange Fuel Cell is hereinafter to be referred as μ PEMFC):
As Fig. 1,9, μ PEMFC comprises adventitia 4,6, fuel delivery port 7, atmosphere communicating port 8, proton exchange membrane 5, negative electrode porous catalytic agent film 3, anode porous catalytic agent film 1, on a surface of proton exchange membrane 5, be covered with anode porous catalytic agent film 1, form anode; On its another surface, be covered with negative electrode porous catalytic agent film 3, form negative electrode; Outer surface at two porous catalytic agent films 1,3 respectively is covered with the adventitia 6 that an adventitia 4 and that has fuel delivery port 7 has atmosphere communicating port 8,
Described two adventitias 4,6 are two silicon chips.
As Fig. 4,6, described two adventitias 4,6 are for being covered with two silicon chips of micro channel array 2 and electric current collection circuit 2A on inner surface; The microchannel that present embodiment adopted wide is 50 microns, is 80 microns deeply; In the described micro channel array 2, be between each microchannel " linking end to end " that to form described micro channel array 2, the head end of described micro channel array 2 links to each other with described two fuel delivery ports 7 respectively with end; Another micro channel array 2 is positioned on the adventitia 6, and its head end links to each other with described two atmosphere communicating ports 8 respectively with end, with reference to Fig. 9.
The work area of described micro fuel cell is 1.5 * 1.5cm
2, thickness is 2.7mm.
The manufacture method of this μ PEMFC may further comprise the steps:
1) preparation of fuel and atmosphere communicating port 7,8 as Fig. 2,3, is example explanation (manufacture method of adventitia 6 is identical with it) with adventitia 4:
1-1, select two 15mm * 15mm * 1.35mm sizes＜100〉monocrystalline silicon piece as adventitia 4,6;
1-2, thermal oxidation, the SiO of generation 0.7 micron thickness on the surface of adventitia 4
2Sacrifice layer 9;
1-3, as Fig. 3, by photoetching, corrosion, on adventitia 4, make two fuel delivery ports 7;
2) preparation of electric current collection circuit 2A, as Fig. 4,5,
2-1 is to having prepared the adventitia 4 of delivery port 7, at the SiO of its thermal oxidation generation
2On the layer 9, the gold-plated layer 11 of magnetron sputtering;
2-2 carries out the wiring of electric current collection circuit 2A by photoetching, corrosion;
3) fuel and air are carried the preparation of microchannel 2, as Fig. 6
3-1 optionally corrodes having finished the adventitia 4 of electric current collection circuit 2A wiring, prepares the micro channel array 2 of fuel and air;
3-2 after above-mentioned corrosion process is finished, generates the SiO of 1.5 micron thickness in order to isolate silicon base by the thermal oxidation preparation
2Separator 12;
4) the preparation negative electrode porous catalytic agent film of electrode
As Fig. 7, on two surfaces of proton exchange membrane 5, magnetron sputtering anode porous catalytic agent film 1, negative electrode porous catalytic agent film 3 form anode and negative electrode respectively, and the material of described perforated electrode catalyst film 1,3 is elected CrAu/C as;
5) encapsulation
As Fig. 8,9, the proton exchange membrane 5 and the adventitia 4,6 that are coated with anode porous catalytic agent film 1, negative electrode porous catalytic agent film 3 are carried out packaging by hot pressing, make μ PEMFC.A plurality of μ PEMFC parallel connection, make μ PEMFC battery pile, and can make up (not shown) work with miniature lithium battery.
When this operation of fuel cells, as Fig. 8,9, fuel methanol enters from the inlet of fuel delivery port 7, discharges from the outlet of fuel delivery port 7; The air of opposite side enters from the inlet of atmosphere communicating port 8, discharges from the outlet of atmosphere communicating port 8.The fuel that enters from the inlet of fuel delivery port 7, through microchannel 2 time, diffusion and by anode-catalyzed agent film 1 absorption and electrocatalytic reaction takes place; Electronics in that anode reaction generates is delivered to offside in solid electrolyte proton exchange membrane 5, electronics arrives negative electrode through external circuit, after electrochemical reaction, produces electric current.
Claims (8)
1, a kind of microelectromechanical systems micro fuel cell is characterized in that:
It comprises adventitia (4,6), fuel delivery port (7), atmosphere communicating port (8), proton exchange membrane (5), negative electrode porous catalytic agent film (3), anode porous catalytic agent film (1), on a surface of described proton exchange membrane (5), be covered with described anode porous catalytic agent film (1), form anode; On its another surface, be covered with described negative electrode porous catalytic agent film (3), form negative electrode; Respectively be covered with an adventitia 4 that has a fuel delivery port (7) at the outer surface of described two porous catalytic agent films (1,3)) and an adventitia (6) that has atmosphere communicating port (8),
On the inner surface of described two adventitias (4,6), be covered with micro channel array (2) and electric current collection circuit (2A); In the described micro channel array (2), be between each microchannel " linking end to end " that to form described micro channel array, the head end of described micro channel array (2) links to each other with described two fuel delivery ports (7) respectively with end; The head end of another micro channel array (2) links to each other with described two atmosphere communicating ports (8) respectively with end.
2, microelectromechanical systems micro fuel cell according to claim 1 is characterized in that: described two adventitias (4,6) are two silicon chips.
3, microelectromechanical systems micro fuel cell according to claim 1 is characterized in that: described microchannel wide is 10～250 microns, is the 50-300 micron deeply
4, microelectromechanical systems micro fuel cell according to claim 1 is characterized in that: the work area of described micro fuel cell is 2-3cm
2
5, a kind of microelectromechanical systems manufacture method of micro fuel cell is characterized in that it may further comprise the steps:
1) preparation of fuel delivery port and atmosphere communicating port
1-1, two materials that monocrystalline silicon is adventitia (4,6) of selection;
1-2, thermal oxidation are gone up generation SiO on two surfaces of adventitia (4,6)
2Sacrifice layer (9);
1-3, by photoetching, corrosion, on adventitia (4,6), make fuel delivery port (7) and atmosphere communicating port (8) respectively;
2) preparation of electric current collection circuit 2A
The adventitia (4,6) of 2-1 to having prepared delivery port is at the SiO of its thermal oxidation generation
2On the layer (9), the gold-plated layer of magnetron sputtering (11);
2-2 carries out the wiring of electric current collection circuit (2A) by photoetching, corrosion;
3) fuel and air are carried the preparation of microchannel
3-1 optionally corrodes the microchannel (2) of preparation fuel and air to the adventitia (4,6) that has carried out electric current collection circuit (2A) wiring;
3-2 prepares SiO by thermal oxidation after above-mentioned corrosion process is finished
2Separator (12);
4) preparation of electrode
On two surfaces of proton exchange membrane (5), plate with perforated electrode catalyst film (1,3) with sputtering method;
5) encapsulation
Proton exchange membrane (5) that is coated with perforated electrode catalyst film (1,3) and adventitia (4,6) are carried out packaging by hot pressing, make micro fuel cell; A plurality of micro fuel cells and or series connection, prepare micro fuel cell heap.
6, a kind of microelectromechanical systems according to claim 5 manufacture method of micro fuel cell is characterized in that:
In step 1), described adventitia (4,6) be 15mm * 15mm * 1.35mm size＜100〉monocrystalline silicon; Described SiO
2The thickness of sacrifice layer (9) is the 0.5-2 micron;
7, a kind of microelectromechanical systems according to claim 5 manufacture method of micro fuel cell is characterized in that:
In step 3), described SiO
2The thickness of separator (12) is the 1-2 micron.
8, a kind of microelectromechanical systems according to claim 5 manufacture method of micro fuel cell is characterized in that:
In step 4), the material of described porous membrane catalyst film (1,3) is CrAu/C or Pt/C or PtRu/C.
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| Application Number | Priority Date | Filing Date | Title |
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| CNA031600050A CN1599114A (en) | 2003-09-19 | 2003-09-19 | Microfuel cell for microelectronic mechanical systemy and manufacturing method thereof |
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| CNA031600050A CN1599114A (en) | 2003-09-19 | 2003-09-19 | Microfuel cell for microelectronic mechanical systemy and manufacturing method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103943873A (en) * | 2014-05-19 | 2014-07-23 | 哈尔滨工业大学 | MEMS (Micro-Electromechanical Systems) methanol reforming fuel cell system |
-
2003
- 2003-09-19 CN CNA031600050A patent/CN1599114A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103943873A (en) * | 2014-05-19 | 2014-07-23 | 哈尔滨工业大学 | MEMS (Micro-Electromechanical Systems) methanol reforming fuel cell system |
| CN103943873B (en) * | 2014-05-19 | 2015-11-18 | 哈尔滨工业大学 | MEMS methanol recapitalization fuel cell system |
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