CN1597614A - Manufacturing method of high thermoconductivity high trength silicon nitride ceramic - Google Patents
Manufacturing method of high thermoconductivity high trength silicon nitride ceramic Download PDFInfo
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- CN1597614A CN1597614A CN 200410037963 CN200410037963A CN1597614A CN 1597614 A CN1597614 A CN 1597614A CN 200410037963 CN200410037963 CN 200410037963 CN 200410037963 A CN200410037963 A CN 200410037963A CN 1597614 A CN1597614 A CN 1597614A
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- 239000000919 ceramic Substances 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 55
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 45
- 238000005245 sintering Methods 0.000 claims abstract description 43
- 238000010438 heat treatment Methods 0.000 claims abstract description 25
- 238000005516 engineering process Methods 0.000 claims abstract description 5
- 239000012299 nitrogen atmosphere Substances 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 20
- 239000000843 powder Substances 0.000 claims description 12
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 9
- -1 rare earth compound Chemical class 0.000 claims description 8
- 238000002791 soaking Methods 0.000 claims description 8
- 238000009766 low-temperature sintering Methods 0.000 claims description 7
- 239000012752 auxiliary agent Substances 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 238000000498 ball milling Methods 0.000 claims description 4
- 239000002131 composite material Substances 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 4
- 239000010439 graphite Substances 0.000 claims description 4
- 239000008187 granular material Substances 0.000 claims description 3
- 239000011812 mixed powder Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 2
- 238000007873 sieving Methods 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 abstract description 4
- FDNAPBUWERUEDA-UHFFFAOYSA-N silicon tetrachloride Chemical compound Cl[Si](Cl)(Cl)Cl FDNAPBUWERUEDA-UHFFFAOYSA-N 0.000 abstract 2
- 238000007599 discharging Methods 0.000 abstract 1
- 238000005452 bending Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 229910017083 AlN Inorganic materials 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 238000001513 hot isostatic pressing Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005065 mining Methods 0.000 description 1
- 238000000329 molecular dynamics simulation Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000010298 pulverizing process Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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Abstract
A process for preparing the silicon chloride ceramics with high heat conductivity and strength features that the RE compound is used as the sintering aid in its vacuum discharging plasma sintering technology and the high-temp heat treatment of silicon chloride ceramics is performed in N2 atmosphere.
Description
Technical field
The invention belongs to the ceramic preparing technical field, be specifically related to a kind of high heat conductance, high strength silicon nitride process for preparing ceramic.
Background technology
Silicon nitride ceramics has excellent mechanical property, has obtained common concern as structured material.The bending strength of general silicon nitride can surpass 1000MPa, yet its thermal conductivity has only 20-30W/mK, and is close with alumina-ceramic, well below high-heat conductivity aluminium nitride ceramics (180-260W/mK).The calculating of document " J.S.Haggerty; A.Lightfoot; Opportunities for Enhancing the Thermal Conductivities of SiCand Si3N4 Ceramics through Improved Processing; Ceram.Eng.Sci.Proc.; 1995; 16 (4): p475-487. " shows that the intrinsic thermal conductivity of silicon nitride is 320W/mK, identical with the intrinsic thermal conductivity (320W/mK) of aluminium nitride, and document " N.Hirosaki; S.Ogata; C.Kocer; H.Kitagawa; and Y.Nakamura, Molecular dynamics calculation of the idealthermal conductivity of single-crystal α-and β-Si
3N
4, Phys.Rev.B, 2002,65,134110 " calculating show the β-Si of silicon nitride
3N
4The a axle and the theoretical thermal conductivity of c axle be respectively 170 and 450W/mK, this provides theoretical foundation for development high heat conductivity silicon nitride pottery.
Obtaining the high heat conductivity silicon nitride pottery at present will lean on the high temperature long-time heating to handle, document " N.Hirosaki; Y.Okamoto; M.Ando, F.Munakata, Y.Akimune; ThermalConductivity of Gas-Pressure-Sintered Silicon Nitride; J.Am.Ceram.Soc.1996,79 (11): p2878-82 " report for example, to obtain thermal conductivity in 4 hours be the silicon nitride ceramics of 120W/mK to 2000 ℃ of sintering in the nitrogen of 100MPa; Document " Watari K; Hirao K; Brito ME; ToriyamaM; Kanzaki S, Hot isostatic pressing to increase thermal conductivity ofSi
3N
4Ceramics, J.Mat.Res.1999,14 (4): p1538-1541 " middle report, add β-Si in raw material
3N
4Kind brilliant also make it to align, behind 1800 ℃ of hot pressed sinterings 2500 ℃ of hip treatment 2 hours with β-Si
3N
4The direction of planting Jinping's row has obtained the highest thermal conductivity 155W/mK at present.These studies have shown that the practical feasibility of high heat conductivity silicon nitride pottery, but the high temperature long-time heating of being taked processing causes ceramic crystalline grain to grow up unusually, and mechanical property sharply reduces, can't practical application.The thermal conductivity of high heat conductivity silicon nitride pottery that at present can practical application is lower than about 60W/mK, and intensity is lower than 700MPa.For the mechanism of production of high heat conductance, it is generally acknowledged high-temperature heating treatment or add the thick β-Si that in silicon nitride ceramics, forms behind the crystal seed sintering
3N
4Itself has high thermal column crystal, is the reason that the silicon nitride ceramics thermal conductivity raises, and this means that thermal conductivity and mechanical property can not get both.This is the major cause that causes the applied research of high heat conductivity silicon nitride pottery to fluctuate.
Summary of the invention
Purpose of the present invention aims to provide a kind of high heat conductance, high strength silicon nitride process for preparing ceramic.It is characterized in that: the manufacture method of described high heat conductance, high strength ceramic material is to add the rare earth compound sintering aid in beta-silicon nitride powder; Adopt discharge plasma sintering process to sinter silicon nitride ceramics in a vacuum into; Carry out at high temperature again that operation manufacturings such as heat treated form.Concrete technology is: the rare earth compound and the 0-6wt% low-temperature sintering auxiliary agent that add 2-10wt% in beta-silicon nitride powder, through ball milling, oven dry, pulverize, the operation of sieving, behind the composite granule that obtains mixing, this mixed powder is packed among the graphite jig of discharge plasma sintering device, carry out discharge plasma sintering after vacuumizing, rate of heating is 1-10K/s, Heating temperature is 1500-1800 ℃, soaking time is 0-10 minute, obtain fine and close silicon nitride ceramics, then, should be heated to 1500-2000 ℃ at nitrogen atmosphere by pottery again, soaking time is to carry out high-temperature heating treatment in 30 minutes to 5 hours, obtains high heat conductance, the high strength silicon nitride pottery.
The invention has the beneficial effects as follows and in beta-silicon nitride powder, add rare earth compound sintering aid and low-temperature sintering auxiliary agent, adopt plasma sintering process to sinter silicon nitride ceramics in a vacuum into earlier, at high temperature carry out heat treated again, have that heat-up rate is fast, sintering time is short, the uniform characteristics of sintering structure, can purify silicon nitride grain, improve thermal conductivity.
Embodiment
The present invention is a kind of high heat conductance, high strength silicon nitride process for preparing ceramic.Concrete technology is: add the rare earth compound of 2-10wt% and the low-temperature sintering auxiliary agent of 0-6wt% in beta-silicon nitride powder, through ball milling, oven dry, the operation of pulverizing, sieve, behind the composite granule that obtains mixing, this mixed powder is packed among the graphite jig of discharge plasma sintering device, carry out discharge plasma sintering after vacuumizing, rate of heating is 1-10K/s, and Heating temperature is 1500-1800 ℃, soaking time is 2-10 minute, obtains fine and close silicon nitride ceramics; Then, should be heated to 1500-2000 ℃ by pottery in nitrogen atmosphere again, soaking time is to carry out high-temperature heating treatment in 30 minutes to 5 hours, obtains high heat conductance, high strength silicon nitride pottery.
The purpose of adding rare earth compound is in order to react with the oxygen element that contained in the beta-silicon nitride powder in sintering or heat-treatment process, to purify silicon nitride grain, to improve thermal conductivity.The cheap Y of many employings in the embodiments of the invention
2O
3Rare earth compound.Rare earth compound that other chemical property is close such as CeO
2, Yb
2O
3, Dy
2O
3, YF etc. also can reach same purpose, can be used as silicon nitride ceramics sintering aid of the present invention equally and use.Addition is very few to be difficult to give full play to its effect, and addition too much can form too much crystal boundary phase, influences thermal conductivity.According to the oxygen level of silicon nitride raw material powder, can select to add 2-10wt%.
The purpose of adding low-temperature sintering auxiliary agent MgO in addition is in order to form liquid, acceleration of sintering at low thermophase in sintering process.Other can be in the low-temperature sintering process and beta-silicon nitride powder in oxide compound form the compound such as the MgSiN of low-melting-point liquid
2, Li
2O etc. also can reach same purpose.In addition, because discharge plasma sintering process of the present invention has very high sintering activity, do not add the low-temperature sintering auxiliary agent and also can carry out sintering at low temperature, this second sintering aid also can omit need not.
The discharge plasma sintering process that developed recently gets up has that heat-up rate is fast, sintering time is short, the uniform characteristics of sintering structure.For silicon nitride ceramics, can also be by suitable control process parameters, control β-Si
3N
4The form of column crystal is optimized tissue, improves the fracture toughness property of silicon nitride ceramics.The applicant discovers, by rate of heating, sintering temperature and the soaking time of control in the sintering process, can obtain that crystal grain is tiny, the silicon nitride ceramics of dense structure.Rate of heating is 1-10K/s, and Heating temperature is 1500-1800 ℃, and soaking time is can obtain good sintered compact in 2-10 minute.
Crystal grain is tiny, the pottery of dense structure though the employing discharge plasma sintering process can provide, and can not obtain high heat conductance, high strength silicon nitride pottery.Through deep research, the applicant finds that the silicon nitride ceramics that discharge plasma sintering is obtained carries out high-temperature heating treatment, can improve thermal conductivity and mechanical property simultaneously, obtains required high heat conductance, high strength silicon nitride pottery.Heating temperature is low excessively, and heat-up time is too short, do not have required effect, and too high Heating temperature and long heat-up time will cause manufacturing cost sharply to increase.The suitable Heating temperature of the selected composition of the embodiment of the invention is 1700 ℃-2000 ℃, and be 30 to assign to 5 hours suitable heat-up time.
The thermal conductivity of silicon nitride ceramics (k) is to adopt the pulse laser method to measure the thermal diffusivity of sample, with the density of Archimedes's drainage mensuration sample, then, tries to achieve with following listed formula calculating.
k＝α·p·Cp
Wherein α is the thermal diffusivity of sample, and p is the density of sample, and Cp is heat capacity at constant pressure (0.7J/Kg).
The bending strength of sample is to adopt 3 bending methods to measure.It is 10Kg that the Vickers' hardness of sample is measured loading, and be 15 seconds clamping time.
Give an actual example again below the present invention is further specified.
Embodiment 1
In beta-silicon nitride powder, add the Y of 5wt%
2O
3Make sintering aid with the MgO of 3wt%, add the alcohol ball milling and mix after 24 hours, 80 mesh sieves are crossed in drying, grinding back, obtain the composite powder that mixes.
Get a certain amount of powder and put into circular graphite jig, heat insulation carbon felt on the mould external parcel, in the discharge plasma sintering device of packing into (SPS-1050, SUMITOMO COAL MINING CO.LTD.JAPAN), two ends fix with electrode.Be evacuated to energising heating behind the 6Pa, rise to 1500 ℃ with the heat-up rate of 100K/min and carry out discharge plasma sintering, keep-up pressure and be 25MPa by regulating rise fall of electrodes in the sintering process.Then, the silicon nitride ceramics that sintering is obtained is heated to 1900 ℃ of insulations and carried out heat treated in one hour in nitrogen atmosphere.
The thermal conductivity of the silicon nitride ceramics of gained is 58W/mK, and bending strength is 1058MPa, and Vickers' hardness is 16.7GPa.
Embodiment 2
Sintering and heating treatment process are substantially the same manner as Example 1, and just the heat treated temperature is 1800 ℃.The thermal conductivity of the silicon nitride ceramics that obtains like this is 55W/mK, and bending strength is 813MPa, and Vickers' hardness is 15.9GPa.
Embodiment 3
Sintering and heating treatment process are substantially the same manner as Example 1, and just the heat treated temperature is 1700 ℃.The thermal conductivity of the silicon nitride ceramics that obtains like this is 42W/mK, and bending strength is 892MPa, and Vickers' hardness is 16.4GPa.
Comparative example 1 sintering process is identical with embodiment 1, but does not carry out heat treated.The thermal conductivity of the silicon nitride ceramics that obtains like this is 22W/mK, and bending strength is 344MPa, and Vickers' hardness is 14.6GPa.
Comparative example 2 sintering and heating treatment process are substantially the same manner as Example 1, and just the heat treated temperature is 1600 ℃.The thermal conductivity of the silicon nitride ceramics that obtains like this is 32W/mK, and bending strength is 788MPa, and Vickers' hardness is 15.9GPa.
Claims (1)
1. a high heat conductance, high strength silicon nitride process for preparing ceramic, it is characterized in that: the manufacture method of described high heat conductance, high strength ceramic material is to add the rare earth compound sintering aid in beta-silicon nitride powder; Adopt discharge plasma sintering process to sinter silicon nitride ceramics in a vacuum into; Carry out at high temperature again that operation manufacturings such as heat treated form; Concrete technology is: the rare earth compound and the 0-6wt% low-temperature sintering auxiliary agent that add 2-10wt% in beta-silicon nitride powder, through ball milling, oven dry, pulverize, the operation of sieving, behind the composite granule that obtains mixing, this mixed powder is packed among the graphite jig of discharge plasma sintering device, carry out discharge plasma sintering after vacuumizing, rate of heating is 1-10K/s, Heating temperature is 1500-1800 ℃, soaking time is 2-10 minute, obtain fine and close silicon nitride ceramics, then, should be heated to 1500-2000 ℃ at nitrogen atmosphere by pottery again, soaking time is to carry out high-temperature heating treatment in 30 minutes to 5 hours, obtains high heat conductance, the high strength silicon nitride pottery.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410037963 CN1246253C (en) | 2004-05-17 | 2004-05-17 | Manufacturing method of high thermoconductivity high trength silicon nitride ceramic |
| JP2005143490A JP4955936B2 (en) | 2004-05-17 | 2005-05-17 | High thermal conductivity and high strength silicon nitride ceramics and method for producing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410037963 CN1246253C (en) | 2004-05-17 | 2004-05-17 | Manufacturing method of high thermoconductivity high trength silicon nitride ceramic |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1597614A true CN1597614A (en) | 2005-03-23 |
| CN1246253C CN1246253C (en) | 2006-03-22 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410037963 Expired - Fee Related CN1246253C (en) | 2004-05-17 | 2004-05-17 | Manufacturing method of high thermoconductivity high trength silicon nitride ceramic |
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|---|---|
| JP (1) | JP4955936B2 (en) |
| CN (1) | CN1246253C (en) |
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2005
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| JP2005330178A (en) | 2005-12-02 |
| JP4955936B2 (en) | 2012-06-20 |
| CN1246253C (en) | 2006-03-22 |
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