CN1583360A - Feeder of permanent magnetic linear synchronous motor - Google Patents

Feeder of permanent magnetic linear synchronous motor Download PDF

Info

Publication number
CN1583360A
CN1583360A CN 200410024803 CN200410024803A CN1583360A CN 1583360 A CN1583360 A CN 1583360A CN 200410024803 CN200410024803 CN 200410024803 CN 200410024803 A CN200410024803 A CN 200410024803A CN 1583360 A CN1583360 A CN 1583360A
Authority
CN
China
Prior art keywords
permanent magnet
synchronous motor
linear synchronous
magnet linear
mover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN 200410024803
Other languages
Chinese (zh)
Other versions
CN1243627C (en
Inventor
陈子辰
傅建中
徐月同
潘开林
余佩琼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang University ZJU
Original Assignee
Zhejiang University ZJU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University ZJU filed Critical Zhejiang University ZJU
Priority to CN 200410024803 priority Critical patent/CN1243627C/en
Publication of CN1583360A publication Critical patent/CN1583360A/en
Application granted granted Critical
Publication of CN1243627C publication Critical patent/CN1243627C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Linear Motors (AREA)

Abstract

An advancing unit of permanent-magnet synchronous linear motor features that the stator of motor is installed on stator baseplate, the rotor is installed under the rotor base plate, said both base plates are installed on striahgt guide track set to form an air gap between them, the slide raster rule, fixed rule, stroke switch and its brarrier block are respectively installed at both sides of both base plates, and PMLSM is used as the driver of linear movement.

Description

The permanent magnet linear synchronous motor feed arrangement
Affiliated technical field
The present invention relates to feed arrangement, relate in particular to a kind of permanent magnet linear synchronous motor feed arrangement.
Background technology
The high-accuracy important development direction that is just becoming machining at a high speed.On the one hand, High-speed machining has not only greatly improved machining production efficiency, and can reduce cutting force more than 30%, especially radial cutting force reduces significantly, simultaneously, the heat in metal cutting of 95%-98% is taken away by smear metal, the thermal deformation of processing parts is little, frequency of oscillation height, stable working, help improving the fineness of processing parts, thereby greatly improved the quality and the interchangeability of processing parts; On the other hand, ultra tiny processing and scientific experiment have proposed more and more higher requirement to Precision Machining.Realize that one of high speed, precision machined most important condition are the lathes that function admirable will be arranged.In order to guarantee that the amount of feeding is constant, guarantee the machining accuracy of part, the also necessary corresponding raising of surface quality and tool life, the speed of feed system, precision; Simultaneously, the stroke of feed system is generally smaller, also requires drive system to have high adding (subtracting) speed, with the transit time that shortens startup, speed change, stops.
Traditional straight-line feed device great majority adopt electric rotating machine+ball-screw mode, this drive system needs intermediate link (as shaft coupling, ball-screw, nut etc.) transmission, the rigidity of its drive system is reduced, the energy consumption that starts and brake all is used on the strain that overcomes intermediate link, especially elongated ball-screw can make the order of system uprise, and robustness reduces.Simultaneously, the strain of ball-screw is the main root that Digit Control Machine Tool produces the machinery concussion, and the positive and negative gap between intermediate link, rub sassafras and strain increase the nonlinearity erron of drive system.In addition, the existence of intermediate link has increased the inertia of system, makes the response speed of system slack-off.Therefore, further improve feed arrangement response speed, precision, installing traditional feed arrangement itself has unsurmountable difficulty.
The direct feed system of linear electric motors directly provides thrust to load without any need for the intermediate mechanical transmission mechanism by linear electric motors, has eliminated the consumption that caused by these transmission mechanisms and the restriction of generation, has realized " zero transmission " from the motor to the workbench.Permanent magnet linear synchronous motor (PMLSM) has characteristics such as thrust is big, loss is low, electrical time constant is little, response speed is fast, can provide very high dynamic responding speed and acceleration (can reach 10g, g is an acceleration of gravity), high rigidity, high positioning accuracy, level and smooth indifference to move.Especially PMLSM has the dual characteristics of magneto and linear electric motors concurrently, has the energy index height, volume is little, in light weight and have the dynamic brake function, compares with other high speed and precision feed systems, and the PMLSM feed system has bigger superiority.
Yet high speed and precision PMLSM feed system still has limitation: (1) PMLSM open magnetic field causes the limit end effect, and it is improper to design, and can produce larger skirt end power; (2) the PMLSM number of poles is a lot, and pole span is less relatively, and every extremely every phase groove is counted q just can not be very big, otherwise total groove number is too much, makes manufacturing process that difficulty take place.If q gets than small integer, total groove number can be less, but can not make full use of the harmonic component that way that winding distributes weakens the magnetic field that is distributed by non-sinusoidal waveform, and in addition, q hour slot ripples number of times is lower and numerical value is bigger, produces to fluctuate than high thrust; (3) PMLSM can produce bigger normal direction suction when operation, thereby produces the extra friction resistance.These force oscillations are to produce feed system noise and vibration main cause, worsen its servo operation characteristic; Especially be applied in the occasion that requires precision positioning, the PMLSM feed system is in braking moment, and the existence of these perturbed forces can make the feed system position that departs from objectives, and reduces machining accuracy, even make feed system produce concussion and unstable, reduce the working life of motor driver electronic devices and components.Therefore, the operation of PMLSM feed system high speed and precision be realized, these disturbance factors must be on design and control method, overcome and suppress.
Summary of the invention
In order to realize high accuracy, high-speed linear feeding system and to optimize the permanent magnet linear synchronous motor structure, the invention provides a kind of permanent magnet linear synchronous motor feed arrangement.
Technical solution of the present invention is as follows: it comprises the secondary slide block of travel switch block, linear guides, line slideway, mover base plate, permanent magnet linear synchronous motor mover, permanent magnet linear synchronous motor stator, every magnetic aluminium sheet, grating chi slide rule, grating chi scale, stator plate, travel switch.The permanent magnet linear synchronous motor stator is by being installed in centre position above the stator plate every the magnetic aluminium sheet, with permanent magnet linear synchronous motor stator correspondence position the permanent magnet linear synchronous motor mover is housed below the permanent magnet linear synchronous motor mover base plate, the mover base plate is connected by the linear guides parafacies by secondary slide block of linear guides and the protruding track combination of straight line with the stator plate both sides, make between permanent magnet linear synchronous motor stator and permanent magnet linear synchronous motor mover and keep air gap, in a side of mover base plate and stator plate grating chi slide rule and grating chi scale are installed respectively, opposite side is installed travel switch block and travel switch respectively.
Every extremely every phase groove of permanent magnet linear synchronous motor is counted q and is not adopted integer, and adopts mark, i.e. L 1<L 2, the structure of employing fractional-slot, the minimum length l=nL of permanent magnet linear synchronous motor mover 2+ λ is as λ 〉=0.5L 2, then get L 3=(n+1.5) L 2As λ≤0.5L 2, then get L 3=(n+0.5) L 2In the formula, n is a positive integer, and λ is less than L 2Any real number, L 1-permanent magnet linear synchronous motor armature winding slot pitch, L 2-permanent magnet pole distance, L 3-permanent magnet linear synchronous motor mover length.
PMLSM is made up of mover (elementary), stator (NdFeB permanent magnet) for short primary planar type.The PMLSM mover is installed in mover base plate centre position, the PMLSM stator is by being installed in every the magnetic aluminium sheet on the stator plate and the mover opposite position, the mover base plate is connected with the linear guides parafacies of stator plate by the motor both sides, and makes and keep certain air gap between the stator of motor and mover; The slide rule and the scale of grating chi are installed, for the control system of feed arrangement provides position feedback respectively with a side of mover base plate on stator plate; At opposite side travel switch and block are installed respectively, are increased the fail safe of system.After feeding three-phase symmetrical sine electric current in three phase windings of PMLSM mover, with the generation air-gap field that moves along a straight line, the excitation field of this magnetic field and permanent magnet interacts and produces electromagnetic push, because permanent magnet maintains static, electric mover follows the rightabout moving linearly of ripple Movement in Magnetic Field by the linear guides pair, its movement velocity is a synchronous speed, realizes high speed, accurate linear feeding system.
The useful effect that the present invention has is:
In order to realize high accuracy, high-speed linear feeding system, the present invention adopts PMLSM as straight-line drive unit, the mechanical mechanism of feed system is greatly simplified, and the movement velocity and the precision of feed system have greatly been improved, the dynamic response characteristic of improvement system, and from the electromechanical integration design philosophy, taken all factors into consideration every technology such as the optimal design relevant, disturbance compensation, control strategy, online detection and error compensation, remedied or reduced the defective of PMLSM feed system with kinematic accuracy.Realized the micron order positioning accuracy, the submicron order repetitive positioning accuracy, maximum feed speed reaches 1m/s, and stroke can increase or the minimizing permanent magnet blocks according to design objective, and is unrestricted, for solution high speed, precision straight-line motion mechanism provide a kind of device.
Description of drawings
Fig. 1 is a structural principle schematic diagram of the present invention;
Fig. 2 is a permanent magnet linear synchronous motor structure A-A cutaway view.
Among the figure: 1-travel switch block, 2-line slideway auxiliary slide block, 3-line slideway, 4-mover base plate, 5-PMLSM mover (elementary), 6-PMLSM stator (NdFeB permanent magnet), 7-be every the magnetic aluminium sheet, 8-wedge shape briquetting, 9-grating chi slide rule, 10-grating chi scale, 11-stator plate, 12-travel switch, L 1-PMLSM armature winding slot pitch, L 2-permanent magnet pole distance, L 3-PMLSM mover length.
Embodiment
As shown in Figure 1, the present invention includes travel switch block 1, line slideway auxiliary slide block 2, line slideway 3, mover base plate 4, permanent magnet linear synchronous motor mover 5, permanent magnet linear synchronous motor stator 6, every magnetic aluminium sheet 7, grating chi slide rule 9, grating chi scale 10, stator plate 11, travel switch 12.Permanent magnet linear synchronous motor stator 6 is by centre position above magnetic aluminium sheet 7 is installed in stator plate 11, with permanent magnet linear synchronous motor stator 6 correspondence positions permanent magnet linear synchronous motor mover 5 is housed below the permanent magnet linear synchronous motor mover base plate 4, mover base plate 4 and stator plate 11 both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block 2 with line slideway 3 combinations, make 5 of permanent magnet linear synchronous motor stator 6 and permanent magnet linear synchronous motor movers keep air gap, line slideway 3 usefulness wedge shape briquettings 8 compress, in a mover base plate 4 and a side of stator plate 11 grating chi slide rule 9 and grating chi scale 10 are installed respectively, opposite side is installed travel switch block 1 and travel switch 12 respectively.
As shown in Figure 2, at first consider PMLSM limit end power optimal design, Bian Duanli is the thrust that the PMLSM mover of finite length is subjected in open magnetic field, thereby Bian Duanli is the function of mover length, and the length of optimizing motor makes limit end power minimum to improving kinematic accuracy positive effect be arranged.When PMLSM mover length is 2~3 times of pole span L 2When above, essentially no influencing each other between the two ends, thereby can regard the long single-ended stressed synthetic result of mover core of two semo-infinites as, two single-ended stressed character, condition, amplitude are just the same, but because limit end Distribution of Magnetic Field is inhomogeneous, both-end is subjected to force direction opposite, regulation right-hand member power is for just, then left end power is always negative, have phase difference simultaneously, phase difference depends on PMLSM mover length, simultaneously, the limit end power that the PMLSM mover is subjected in different positions is different, is the periodic function of pole span.Therefore, the main component of synthetic limit end power is a fundametal compoment, eliminates fundametal compoment and can greatly reduce PMLSM limit end power.According to the above, work as L 3=(n+0.5) L 2, wherein n is a positive integer, can eliminate fundametal compoment fully, greatly reduces PMLSM limit end power.The concrete optimizing process of the present invention: the minimum length l=nL that calculates the PMLSM mover according to energy index 2+ λ is as λ 〉=0.5L 2, then get L 3=(n+15) L 2As λ≤0.5L 2, then get L 3=(n+0.5) L 2Like this, design objective can be guaranteed, limit end power can be greatly reduced again.Simultaneously, adopt finite element that the PMLSM prototype after optimizing is carried out limit end force modeling and analysis, find the solution electromagnetic field after, adopt maxwell's tensor method to obtain limit end power, obtain the Fourier series fitting formula of PMLSM limit end power, and carry out online compensation, improved the exercise performance of feed system.
Next has considered the force oscillation that caused by the PMLSM high order harmonic component.As shown in Figure 2, the PMLSM number of poles is a lot, pole span L 2Less relatively, if q gets than small integer, the way that can not make full use of the winding distribution weakens the harmonic component in the magnetic field that is distributed by non-sinusoidal waveform, and makes motor make difficulty.Every extremely every phase groove of the PMLSM of the present invention's design is counted q and is not adopted integer, and adopts mark, i.e. L 1<L 2Adopt the mechanism of fractional-slot, not only solved the difficulty of making, and reduced the force oscillation that causes by high order harmonic component significantly.For example, a L is arranged 1=14.67mm, L 2=16mm, the PMLSM that the total groove number of winding is 24 grooves adopts its electromagnetic field of analysis of finite element method, the utilization principle of virtual work is calculated the thrust that is caused by high order harmonic component, and result of calculation shows, adopt this structure after, the force oscillation amplitude that is caused by high order harmonic component is 0.22N, and adopts L 1=L 2The force oscillation amplitude of the PMLSM of=16mm structure reaches 20.5N.As seen, adopt this fractional-slot structure to reduce force oscillation effectively.And, adopting the analysis of finite element method electromagnetic field by PMLSM mover core periodic extension, the utilization principle of virtual work can be calculated the thrust that is caused by high order harmonic component, utilizes the thrust formula of match to carry out online compensation, improves the kinematic accuracy of PMLSM feed arrangement.
The 3rd has adopted the force of sliding friction indemnifying measure.The force of sliding friction of PMLSM feed system comprises two parts: after the frictional force and energising by PMLSM mover and workpiece quality generation, and the frictional force that the normal direction suction between PMLSM mover, stator causes.Big many of the electromagnetic push that the normal direction suction of PMLSM produces than motor if do not compensate, will cause that the feed system exercise performance descends, and increases degradation under the positioning accuracy as velocity perturbation.The present invention adopts finite element that the magnetic vector potential of PMLSM is carried out analytical calculation, use post processor then and calculate its electromagnetic field distribution and normal force, obtain normal force and the corresponding relation of handing over shaft current, and in control procedure, force of sliding friction is carried out online compensation, basically eliminate the velocity perturbation that causes by force of sliding friction, improved the tracking accuracy of PMLSM feed system.
The 4th has considered the compensation problem of all the other perturbed forces.PMLSM feed system horizontal force also is subjected to load disturbance (as cutting force etc.), workpiece quality changes the disturbance that causes, the influences such as disturbance that electric elements cause because of variations in temperature except the intrinsic force oscillation of electromagnetic push, frictional force, PMLSM.In order to suppress the influence of these disturbances, the present invention adopts the perturbed force viewer to compensate measure, eliminates or reduce the exercise performance variation that these disturbances cause in real time, improves the mechanical feed quality.
In order to satisfy working site complex environment and various application scenario, the present invention has designed different control strategies, existing traditional pid control strategy, robust pole assignment have designed H ∞ control strategy and the accurate non-linear control strategy of robust that model is perturbed and has robust stability and disturbance rejection again.According to different working conditions, various control strategies can switch mutually, and therefore, the present invention is easy to use, and the application scenario is wide.
In addition, for control system needs and accurate control displacement, installed the insensitive grating chi of electromagnetic field at the PMLSM feed arrangement.Control system utilizes the position quantity of grating chi to control in real time, guarantees that the tracking error and the speed of feed system is steady, improves the machining accuracy and the quality of workpiece.Simultaneously, for improving the positioning accuracy of PMLSM feed system, satisfy microfabrication and precision positioning requirement, adopt nano level laser interferometer to carry out the pointwise measurement of comparison, and carry out self adaptation match and software compensation, realized the micron order positioning accuracy, the submicron order repetitive positioning accuracy.Simultaneously,, the position limit switch is set on software not only, and on the PMLSM feed arrangement, the physics travel switch is installed, guarantee staff and property safety in order to improve the fail safe of feed system.

Claims (2)

1, a kind of permanent magnet linear synchronous motor feed arrangement is characterized in that: comprise travel switch block (1), line slideway auxiliary slide block (2), line slideway (3), mover base plate (4), permanent magnet linear synchronous motor mover (5), permanent magnet linear synchronous motor stator (6), every magnetic aluminium sheet (7), grating chi slide rule (9), grating chi scale (10), stator plate (11), travel switch (12); Permanent magnet linear synchronous motor stator (6) is by centre position above magnetic aluminium sheet (7) is installed in stator plate (11), with permanent magnet linear synchronous motor stator (6) correspondence position permanent magnet linear synchronous motor mover (5) is housed below the permanent magnet linear synchronous motor mover base plate (4), mover base plate (4) and stator plate (11) both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block (2) with line slideway (3) combination, make between permanent magnet linear synchronous motor stator (6) and permanent magnet linear synchronous motor mover (5) and keep air gap, in a mover base plate (4) and a side of stator plate (11) grating chi slide rule (9) and grating chi scale (10) are installed respectively, opposite side is installed travel switch block (1) and travel switch (12) respectively.
2, a kind of permanent magnet linear synchronous motor feed arrangement according to claim 1 is characterized in that: every extremely every phase groove of permanent magnet linear synchronous motor is counted q and is not adopted integer, and adopts mark, i.e. L 1<L 2, the structure of employing fractional-slot, the minimum length l=nL of permanent magnet linear synchronous motor mover 2+ λ is as λ 〉=0.5L 2, then get L 3=(n+1.5) L 2As λ≤0.5L 2, then get L 3=(n+0.5) L 2In the formula, n is a positive integer, and λ is less than L 2Any real number, L 1-permanent magnet linear synchronous motor armature winding slot pitch, L 2-permanent magnet pole distance, L 3-permanent magnet linear synchronous motor mover length.
CN 200410024803 2004-05-26 2004-05-26 Feeder of permanent magnetic linear synchronous motor Expired - Fee Related CN1243627C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200410024803 CN1243627C (en) 2004-05-26 2004-05-26 Feeder of permanent magnetic linear synchronous motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200410024803 CN1243627C (en) 2004-05-26 2004-05-26 Feeder of permanent magnetic linear synchronous motor

Publications (2)

Publication Number Publication Date
CN1583360A true CN1583360A (en) 2005-02-23
CN1243627C CN1243627C (en) 2006-03-01

Family

ID=34600987

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200410024803 Expired - Fee Related CN1243627C (en) 2004-05-26 2004-05-26 Feeder of permanent magnetic linear synchronous motor

Country Status (1)

Country Link
CN (1) CN1243627C (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101728053A (en) * 2008-10-21 2010-06-09 杨晟 Bistable electromagnetic driver and product with the same
CN101951114A (en) * 2010-10-08 2011-01-19 中南大学 Permanent-magnetic suspension supporting cylindrical linear motor
CN101997386A (en) * 2009-08-18 2011-03-30 株式会社安川电机 Linear and curvilinear motor system
CN102259280A (en) * 2010-05-27 2011-11-30 刘玉民 Grinding wheel stroke transmission device on linear motor driven numerical-control relieved tooth grinding machine y axis
CN104871101A (en) * 2012-12-19 2015-08-26 通快机床两合公司 Method for material-removing machining of a workpiece
CN107842567A (en) * 2017-09-18 2018-03-27 河南理工大学 Linear electric motors brake apparatus
CN108023460A (en) * 2018-02-02 2018-05-11 上海莫戈纳机电科技有限公司 Linear electric machine
CN110034655A (en) * 2019-03-28 2019-07-19 深圳市赫瑞科技有限公司 Ball-type linear motor built in a kind of high-precision
CN114337185A (en) * 2021-12-30 2022-04-12 亚龙智能装备集团股份有限公司 Linear motor module

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101431285B (en) * 2008-12-12 2011-12-21 东风活塞轴瓦有限公司 Novel linear servo motor for piston external circular surface process

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101728053A (en) * 2008-10-21 2010-06-09 杨晟 Bistable electromagnetic driver and product with the same
CN101997386A (en) * 2009-08-18 2011-03-30 株式会社安川电机 Linear and curvilinear motor system
CN101997386B (en) * 2009-08-18 2013-06-12 株式会社安川电机 Linear and curvilinear motor system
CN102259280A (en) * 2010-05-27 2011-11-30 刘玉民 Grinding wheel stroke transmission device on linear motor driven numerical-control relieved tooth grinding machine y axis
CN101951114A (en) * 2010-10-08 2011-01-19 中南大学 Permanent-magnetic suspension supporting cylindrical linear motor
CN101951114B (en) * 2010-10-08 2012-07-25 中南大学 Permanent-magnetic suspension supporting cylindrical linear motor
CN104871101A (en) * 2012-12-19 2015-08-26 通快机床两合公司 Method for material-removing machining of a workpiece
CN104871101B (en) * 2012-12-19 2017-10-24 通快机床两合公司 The method that workpiece is processed for material removal
CN107842567A (en) * 2017-09-18 2018-03-27 河南理工大学 Linear electric motors brake apparatus
CN108023460A (en) * 2018-02-02 2018-05-11 上海莫戈纳机电科技有限公司 Linear electric machine
CN110034655A (en) * 2019-03-28 2019-07-19 深圳市赫瑞科技有限公司 Ball-type linear motor built in a kind of high-precision
CN114337185A (en) * 2021-12-30 2022-04-12 亚龙智能装备集团股份有限公司 Linear motor module

Also Published As

Publication number Publication date
CN1243627C (en) 2006-03-01

Similar Documents

Publication Publication Date Title
CN108021039B (en) Electromechanical integration modeling method for linear motor feeding system
CN106891306B (en) Magnetic auxiliary excitation precision actuation workbench based on variation rigidity flexible structure
CN1243627C (en) Feeder of permanent magnetic linear synchronous motor
CN101826786B (en) Linear motor
CN101024270A (en) Numerical-control machine tool magnetic suspension linear feeding system
CN103226342B (en) High Stiffness is two drives mobile decoupling servo control platform
Liu et al. A practical precision control method base on linear extended state observer and friction feedforward of permanent magnet linear synchronous motor
CN204262872U (en) Linear electric motors are the grand micro-integration high speed precise motion one-dimensional platform of stator Dual Drive altogether
CN102476310A (en) Novel magnetic suspension linear feeding system for numerical control machine tool
CN1244432C (en) Industrial-application type active magnetic suspension machine tool guide linear motor feeding platform
Zhen et al. Force ripple modeling and minimizing of an ironless permanent-magnet linear synchronous motor
CN2705260Y (en) Permanent magnet straight synchronous motor feeder
Tomita et al. High-response XY stage system driven by in-parallel linear motors
CN108173408B (en) Three-degree-of-freedom positioning platform
Hsue et al. Comparison on linear synchronous motors and conventional rotary motors driven Wire-EDM processes
CN102120254A (en) Direct-drive crystallizer vibration generating device and non-sinusoidal vibration method
CN102445659B (en) Energy feedback type linear electric motor testing and loading device
CN1553556A (en) Plate permanetic linear synchronous machine for machine tool feeding system
CN208316549U (en) Straight driving transmission mechanism
Lu et al. Double position servo synchronous drive system based on cross-coupling integrated feedforward control for broacher
CN214693103U (en) Self-balancing linear motor lifting platform
CN201156440Y (en) Self-propelled three-dimensional working table applicable to large length
Yamamoto et al. A high‐power electrostatic motor using skewed electrodes
Sun et al. Design and simulation of a magnetic levitated switched reluctance linear actuator system for high precision application
Li et al. Continuous sliding mode control and simulation of SRM

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee