CN1581458A - Grooved bar for base support and base board carrying tool using same - Google Patents
Grooved bar for base support and base board carrying tool using same Download PDFInfo
- Publication number
- CN1581458A CN1581458A CN 03140130 CN03140130A CN1581458A CN 1581458 A CN1581458 A CN 1581458A CN 03140130 CN03140130 CN 03140130 CN 03140130 A CN03140130 A CN 03140130A CN 1581458 A CN1581458 A CN 1581458A
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- China
- Prior art keywords
- groove rod
- substrate
- substrate supporting
- support plate
- protuberance
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
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Abstract
The slot bar includes a resin body and a metal bar. The resin body includes columnar body with an axial through hole and multiple parallel spatial support plates exserted on one side of the said body. a metal bar is inderted into the axial through hole of the columnar body in order to enhance supporting strength of the slot bar. There are nose parts on end parts of the support plates. the nose parts are utilized to support base plate.
Description
[technical field]
The invention relates to the used base board carrier of a kind of flat-panel screens processing procedure, particularly about a kind of substrate supporting with groove rod and use the base board carrier of this groove rod.
[background technology]
In the flat-panel screens processing procedure, the transporting and move of glass substrate needs special carrier.This carrier generally has a plurality of trough body structures, to support a plurality of glass substrates, it can be transported simultaneously.
A kind of base board carrier of prior art is exposed in Japanese special fair 08-021612 number of bulletin on March 4th, 1996, the base board carrier that it disclosed comprises that as Fig. 1 and frid 2 shown in Figure 2 this frid 2 comprises a plate body 21 and a plurality of support plates 22 that stretch out from this plate body 21.These a plurality of support plates 22 comprise the support plate 22Y of the support plate 22X of projection in this base board carrier and projection outside this base board carrier again.Wherein, the upper surface end of this support plate 22X has protuberance 23, and the high-order bit of this protuberance 23 is smooth surfaces.
This protuberance 23 is in order to holding glass substrate B, and can reduce the break flour that substrate B edge and 2 frictions of this frid are produced.But the design of this frid 2 can't solve the buildup of static electricity problem, and because this frid 2 is plate body structures, causes the waste of material on structural design.
The base board carrier of another kind of prior art is exposed in No. the 260822nd, the Taiwan patent of bulletin on October 21 nineteen ninety-five, the base board carrier that it disclosed comprises side plate 3 as shown in Figure 3, and this side plate 3 comprises a back wall portion 31 and a plurality of frame sheets of giving prominence to from this back wall portion 31 32.This side plate 3 with metallic object M as skeleton, the frame sheet 32 of this back wall portion 31 is to be formed by resinite with the part of contiguous frame sheet 32, wherein, the protuberance 3X of these back wall portion 31 central longitudinal directions is formed by the dust tightness resin, and remainder then is to be formed by the resin that cooperates conductive material.
This side plate 3 is difficult for because of friction produces break flour, the function of the buildup of static electricity of tool decay simultaneously.But its overall structure is comparatively complicated, increases manufacturing cost.
[summary of the invention]
For overcoming the more problem of base board carrier materials used of prior art, the invention provides a kind of substrate supporting of saving material use amount groove rod.
The present invention also provides a kind of base board carrier that uses the aforesaid substrate supporting with the groove rod.
The technical scheme that technical solution problem of the present invention is adopted is: a kind of substrate supporting groove rod is provided, it comprises a resinite and a metal bar, this resinite comprises that one has the cylindrical body and a plurality of support plates of giving prominence to spaced and parallel from this body one side of axial through hole, this metal bar is plugged in the through hole of this body, to increase the bearing strength of this groove rod, wherein, the end of this support plate has protuberance, and this protuberance is in order to the holding substrate.
Base board carrier of the present invention comprises at least two pairs of substrate supportings groove rod and two frameworks, each substrate supporting comprises a resinite and a metal bar with the groove rod, this resinite comprises that one has the cylindrical body and a plurality of support plates of giving prominence to spaced and parallel from this body one side of axial through hole, the end of this support plate has protuberance, this protuberance is in order to the holding substrate, this metal bar is plugged in the through hole of this body, to increase the bearing strength of this groove rod, this framework and this at least two pairs of substrate supportings groove bar construction box-shaped, and these at least two pairs of substrate supportings are attached on this framework with the groove rod, and make the corresponding mutually space of accommodating substrate that forms of its support plate.
Compared to prior art,, can save a large amount of resin materials, reduce cost because of groove rod of the present invention is a column structure.And because the support plate end has protuberance, this substrate only contacts with this protuberance, and the edge of substrate does not contact with body with support plate, the break flour that can reduce friction and produce.
[description of drawings]
Fig. 1 is the front view of a kind of substrate supporting of prior art with frid.
Fig. 2 is the end view of frid shown in Figure 1.
Fig. 3 is the stereogram of the substrate supporting of another prior art with frid.
Fig. 4 is the three-dimensional exploded view of substrate supporting of the present invention with the groove rod.
Fig. 5 is the schematic diagram that substrate supporting of the present invention cooperates with substrate with the groove rod, and its support plate and body shaft are to vertical setting.
Fig. 6 is the schematic diagram that substrate supporting of the present invention cooperates with substrate with the groove rod, and its support plate and body shaft are to being obliquely installed.
Fig. 7 is the schematic perspective view of base board carrier of the present invention.
Fig. 8 is that the substrate supporting of base board carrier of the present invention cooperates schematic diagram with the groove rod with framework.
[embodiment]
As shown in Figure 4, substrate supporting of the present invention comprises a resinite 41 and a metal bar 43 with groove rod 4.This resinite 41 comprises that one has the cylindrical body 411 and a plurality of support plates 415 of giving prominence to from these body 411 1 side spaced and parallel of axial through hole 413.
This body 411 is tubular structures of tool longitudinal opening, and its cross section is c-shaped, to save material; This body 411 also can be designed to the cylindrical structure that cross section is an O shape.This metal bar 43 comprises both ends 431, and the parallel side (indicating) and a screw 433 of 431 tools two, each end.This metal bar 43 is plugged in the through hole 413 of this body 411, to increase the bearing strength of this groove rod 4.
With reference to Fig. 5, this support plate 415 is to have certain thickness square plate together, and its space forms a plurality of accepting grooves 417.And the end of this support plate 415 has protuberance 4151, and this protuberance 4151 is in order to holding substrate 45.This protuberance 4151 can be the cylinder of diameter greater than support plate 415 thickness, and certainly, also can only make the high-order bit of protuberance 4151 is smooth surface.This support plate 415 and body 411 axial vertical settings.Certainly, also can be as shown in Figure 6, with support plate 415 ' be obliquely installed.
This support plate 415 can reduce material in a large number, save cost only along body 411 1 side settings.When inserting accepting grooves 417 because of substrate 45 again, only there is protuberance 4151 to contact, the break flour that can reduce friction and produce with a bottom surface of substrate 45.
Pass through doping carbon fiber (Carbon Fiber) or carbon dust conductive materials such as (CarbonPowder) in this resinite 41 and tool conductivity, again because this metal bar 43 can be led static, therefore whole groove rod 4 in use can not accumulated static, prevents function thereby have static.
With reference to Fig. 7, base board carrier 5 of the present invention adopts pair of frames 51 that aforesaid at least two pairs of groove rods 4 are installed in its opposite flank and constitute box-shaped, and then forms the space of accommodating substrate 45 together.Wherein, these at least two pairs of substrate supportings are corresponding mutually with the support plate 415 of groove rod 4, and every group is positioned at 417 corresponding spaces that form of conplane accepting groove and can accommodates a substrate 45.
Again as shown in Figure 8, be the connection diagram of framework 51 with the groove rod 4 of base board carrier of the present invention.Wherein, framework 51 is provided with draw-in groove 511 and through hole 513 with groove rod 4 junctions.This draw-in groove 511 is to form by two parallel side, and the spacing of two parallel side of the spacing of these two sides and metal bar 4 ends 431 is suitable.The groove 511 of frameworks 51 is inserted in this end 431, passes through hole 513 by a screw (figure does not show) again and cooperates with screw 433 (scheming not show), and then lock this groove rod 4 on framework 51.This draw-in groove 511 can prevent the rotation of metal bar 43 with respect to framework 51.For preventing that further resinite 41 from rotating with respect to metal bar 43, also can be fixed by screw or pin.
Because the groove that base board carrier of the present invention adopted rod is column structure, but not the plate body structure of prior art frid can be saved a large amount of resin materials, reduces cost.Because the resinite of groove rod has conductivity, the whole base plate carrier in use also has electrostatic-proof function again.
Claims (9)
1. substrate supporting groove rod, it is characterized in that: this groove rod comprises a resinite and a metal bar, this resinite comprises that one has the cylindrical body and a plurality of support plates of giving prominence to spaced and parallel from this body one side of axial through hole, this metal bar is plugged in the through hole of this body, the end of this support plate has protuberance, and this protuberance is in order to the holding substrate.
2. substrate supporting groove rod according to claim 1 is characterized in that: be doped with conductive material in this resinite.
3. substrate supporting groove rod according to claim 2 is characterized in that: this conductive material is carbon fiber or carbon dust.
4. substrate supporting groove rod according to claim 1 is characterized in that: this support plate is to have certain thickness square plate, and this protuberance is the cylinder of diameter greater than support plate thickness.
5. substrate supporting groove rod according to claim 1 is characterized in that: the high-order bit of this protuberance is a smooth surface.
6. substrate supporting groove rod according to claim 1 is characterized in that: this support plate and body shaft are to vertical setting or be obliquely installed.
7. substrate supporting groove rod according to claim 1 is characterized in that: this body is the tubular structure with longitudinal opening, and its cross section is a C shape.
8. substrate supporting groove rod according to claim 1, it is characterized in that: this body is a cylindrical structure, its cross section is an O shape.
9. base board carrier, it comprises at least two pairs of substrate supportings groove rod and pair of frames, it is characterized in that: each substrate supporting comprises a resinite and a metal bar with the groove rod, this resinite comprises that one has the cylindrical body and a plurality of support plates of giving prominence to spaced and parallel from this body one side of axial through hole, this metal bar is plugged in the through hole of this body, to increase the bearing strength of this groove rod, this framework and this substrate supporting are box-shaped with the groove bar construction, and these at least two pairs of substrate supportings are attached on this framework with the support plate of groove rod, and make the corresponding mutually formation of its support plate accommodate the space of substrate, the end of this support plate has protuberance, and this protuberance is in order to the holding substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031401309A CN100377330C (en) | 2003-08-06 | 2003-08-06 | Grooved bar for base support and base board carrying tool using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031401309A CN100377330C (en) | 2003-08-06 | 2003-08-06 | Grooved bar for base support and base board carrying tool using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1581458A true CN1581458A (en) | 2005-02-16 |
| CN100377330C CN100377330C (en) | 2008-03-26 |
Family
ID=34579247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031401309A Expired - Fee Related CN100377330C (en) | 2003-08-06 | 2003-08-06 | Grooved bar for base support and base board carrying tool using same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100377330C (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8123900B2 (en) | 2007-10-12 | 2012-02-28 | Semes Co. Ltd. | Substrate supporting unit and apparatus for treating substrate using the substrate supporting unit |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3145252B2 (en) * | 1994-07-29 | 2001-03-12 | 淀川化成株式会社 | Substrate supporting side plate and cassette using the same |
| JP3242281B2 (en) * | 1995-03-13 | 2001-12-25 | 東京エレクトロン株式会社 | Heat treatment equipment |
| TW323633U (en) * | 1995-09-07 | 1997-12-21 | Samsung Electronics Co Ltd | Cassette for loading glasses for liquid crystal display device |
| US5788304A (en) * | 1996-05-17 | 1998-08-04 | Micron Technology, Inc. | Wafer carrier having both a rigid structure and resistance to corrosive environments |
| US6171400B1 (en) * | 1998-10-02 | 2001-01-09 | Union Oil Company Of California | Vertical semiconductor wafer carrier |
-
2003
- 2003-08-06 CN CNB031401309A patent/CN100377330C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8123900B2 (en) | 2007-10-12 | 2012-02-28 | Semes Co. Ltd. | Substrate supporting unit and apparatus for treating substrate using the substrate supporting unit |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100377330C (en) | 2008-03-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Patentee after: Hongfujin Precise Industry (Shenzhen) Co., Ltd. Patentee after: Foxsemicon Integrated Technology Inc. Address before: 518109 Guangdong city of Shenzhen province Baoan District Longhua Town Industrial Zone tabulaeformis tenth East Ring Road No. 2 two Patentee before: Hongfujin Precise Industry (Shenzhen) Co., Ltd. Patentee before: Foxsemicon Integrated Technology Inc. |
|
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080326 Termination date: 20120806 |