CN1564911A - Oscillating-piston drive for a vacuum pump and an operating method for said drive - Google Patents

Oscillating-piston drive for a vacuum pump and an operating method for said drive Download PDF

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Publication number
CN1564911A
CN1564911A CN02819814.XA CN02819814A CN1564911A CN 1564911 A CN1564911 A CN 1564911A CN 02819814 A CN02819814 A CN 02819814A CN 1564911 A CN1564911 A CN 1564911A
Authority
CN
China
Prior art keywords
piston
drive unit
coil
drive
yoke
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN02819814.XA
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Chinese (zh)
Inventor
鲁道夫·巴内恩
约瑟夫·霍达普
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
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Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vacuum GmbH filed Critical Leybold Vacuum GmbH
Publication of CN1564911A publication Critical patent/CN1564911A/en
Pending legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F04B35/045Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric using solenoids
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00Pump parameters
    • F04B2201/02Piston parameters
    • F04B2201/0201Position of the piston
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2203/00Motor parameters
    • F04B2203/04Motor parameters of linear electric motors
    • F04B2203/0401Current

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating, Oscillating Or Vibrating Motors (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

An oscillating-piston drive for a vacuum pump (1) with a piston (2), which presents has two piston sections (3,4) and an intermediate zone provided with a drive magnet (11). Cylinder sections (8, 9) slidingly receive the piston sections (3, 4). An annular recess (12) is defined between the cylinder sections (8, 9) at a central yoke (19). The recess (12) provides space for movement of the drive magnet (11). An electromagnetic drive which surrounds the piston (2) includes yoke components (17, 18, 19) and coils (15, 16) situated to the sides of said central yoke. Negative influences on the delivery rate of the pump are reduced by a can (34) which delimits the recess (12) peripherally or by controlling the current supply to the coils, such that only one coil conducts current at a time.

Description

The vibration type piston formula drive unit of vacuum pump and the operation method of this drive unit
Technical field
The present invention relates to a kind of vibration type piston formula drive unit that is used for vacuum pump, it have one have two piston sections and one dispose the piston of the zone line of a drive magnet, cylindrical sections that some are equipped with for described piston section, one be arranged between the described cylindrical section, be in one in the middle of annular groove on the yoke height, this groove has constituted the space of drive magnet, and the electromagnetic actuator device around piston, it has the yoke member and is positioned at the coil of middle yoke side direction.In addition, the invention still further relates to the operation method that is used for this drive unit.
On the whole, target in this development that relates to and structural design is exactly to improve a kind of pump efficiency or pump efficiency energy (suction capactity of vacuum pump, compression property), and as best one can keeping identical, be preferably under the condition of littler structural volume and/or minimizing energy consumption.The meaning of this target is that also in the process of the pump of developing or design a described type, the requisite measure of being taked should not reduce the efficient of pump.
Summary of the invention
Task of the present invention is to propose a kind of vibration type piston formula drive unit, and this vibration type piston formula drive unit has reduced the reduction of pump efficiency.
According to the present invention, this task realizes by the described feature of claim.
The known vibration type piston formula drive unit that a kind of type mentioned above is arranged from WO 00,/63 556, Fig. 8.It has a series of members (coil, polar element, cylindrical body etc.), the space of they and drive unit magnet in abutting connection with and have influence on the efficient of pump.Therefore have following danger, promptly space links to each other with external environment by the slit between each member or current feed.Air can be invaded space through such slit and improved during pump operation in the formed low pressure of space.The measure (such as binder or sealed material layer) that seals these slits may reduce the working efficiency of electromagnetic actuator device, because they have increased the phase mutual edge distance between each member.
In one first solution of task of the present invention, advise, form the border of described groove with a slit pipe in the periphery.The slit quantity that the pipeline section of placing the border that forms drive unit magnet movement space has outside reduced to import in this space has so just further been eradicated the danger that undesirable pressure rising takes place in this space.The wall thickness of pipe can be very little, below 1mm, so just can ignore the harmful effect to electromagnetic actuator device efficient.
The appropriate materials of slit pipe has the material of good sliding properties for those, for example plastics, aluminium, high-quality steel etc. (non-ferromagnetic-or only weak ferromagnetism).Slit pipe is also made by a kind of strong ferromagnetic material to substitute property, and its wall thickness selects in each segment limit outside middle yoke at least like this, make drive magnet work as each section to be magnetized into when it mediates in the scope outside the yoke saturated till.The mode of structure of this slit pipe has following effect, and promptly it becomes a part of drive unit.Each the satisfied section magnetic field for affiliated coil in fact no longer exists.Its action effect plays air gap expansion of this coil and causes minimizing to this coil inductance.So when drive magnet is positioned at this coil scope, can in a coil, form electric current, that is affiliated slit pipeline section is by saturated.Therefore less inductance means when given voltage and can form electric current fast.With the magnetic field that this electric current produces, drive magnet now just by from this coil towards axially relative coil repulsion.Drive magnet has just disappeared to the saturation of this slit pipe.Because electric current has required value now, the increase of inductance just can not produce interference.
The precondition of this action principle is that the magnetic field of drive magnet is stronger than the magnetic field of coil.When being not this situation, so coil magnetic field in fact just " transfer " given the magnetic field (two magnetic directions are opposite) of drive magnet in the pipe of slit, and saturated situation just is eliminated at once.But for the required power of this drive unit only is to adopt enough strong realizing such as the such magnet of rare-earth magnet.In these magnet, can satisfy above-mentioned precondition all the time.
Embodiments of the invention are seen us, and suitable way is that the power supply to coil is controlled like this, and making only has a coil stream that electric current is arranged separately.When drive magnet is arranged in a coil scope, just can accurately set up the electric current in this coil thus.
A kind of method that adopts semiconductor switch to come accessory drive can be avoided further loss.For the situation of this improvement is described, talk about from the linear actuating device shown in Figure 8 of WO 00,/63 556 again.In this linear actuating device, the magnetic field of one of two coils only produces a power on piston, and condition is in affiliated piston section is in this coil scope the time.Another one-stream has electric current-coil inoperative this moment.Under common electric current is flowed through the situation of two coils simultaneously, can in coil, produce and more lose than the required loss of the generation of power.In addition, electric current two coils of flowing through simultaneously mean that also control circuit must be in such situation, and promptly two of electric current utmost points are switched on or cut off.So not only increase power loss, also increased the cost of control circuit.
Advise in of the present invention second solution: each coil only is equipped with a kind of current polarity, that is a coil is equipped with positive polarity, and another is equipped with negative polarity.Such as, can give two coils with two polarity " distribution " of 50Hz grid alternating current stream.This situation can adopt a simple thyristor regulator to realize.The current amplitude of each half-wave can be regulated by the phase angle controller of a simple cheap, such as situation known in drilling machine.
The input signal of phase angle controller such as
-given in advance at a kind of pump applicable cases (pressure, line voltage, pump stage number),
-determine by line voltage,
-be used for determining that by one the sensor of piston position is given in advance, or
-given in advance by a sensor that is used for the inspecting valve motion.
The lifting frequency of piston is all determined by the frequency of the alternating current (a.c.) of importing in all cases.
The advantage of this kind measure is that on the one hand the loss in the coil is lowered, because only have a coil to have electric current to flow through this moment.In addition, the structure of control circuit is simpler, because no longer need electric current to flow through two coils jointly.
Description of drawings
Below by other advantage and details of the present invention being illustrated by the embodiment shown in Fig. 1-3.
In the accompanying drawing:
Fig. 1 is a kind of sectional view with piston vacuum pump of drive unit of the present invention;
Fig. 2 is a partial sectional view on the pipe height of slit;
Fig. 3 is a kind of schematic representation of a kind of pump of the present invention, wherein has the device to the drive unit coil power supply.
Embodiment
Each figure shows a piston vacuum pump 1 with a piston 2 respectively.This piston 2 has piston section 3 and 4, and their free end face is furnished with cylindrical chamber 5 or 6 of drawing respectively.Piston 2 and draw chamber 5,6 and be arranged in a housing 7, this housing 7 has the cylindrical section 8,9 that is used for piston section 3,4.The mode that the material of cylinder slidingsurface and affiliated piston face is known with itself is selected like this, makes that pump can be in the mode of drying, that is need not oiling agent and be driven.
Piston 2 is furnished with a linear actuating device.It comprises a permanent magnet ring 11 in piston one side, this permanent magnet ring 11 with piston 2 in zone therebetween.Permanent magnet ring 11 moves in an annular space around piston 2 (groove 12).In stator one side, the permanent magnet 12 of piston side also is furnished with other permanent magnet ring 13,14, and they have constituted the axial boundary of annular groove 12 respectively.Also termination has cylindrical section 8,9 on the height of these permanent magnet rings.
The constituent elements of stator one side of linear actuating device also has coil 15,16.They partly are 17,18 encirclements of yoke member, and with the yoke member around cylindrical section 8 or 9.Have a middle yoke 19 of annular between the coil 15,16 and between the yoke 17,18, its internal surface is towards doughnut 12.The mode that electric current flows through in the coil 15,16 is, realizes alternating current function in a desired manner by they produced and produced by yoke member 17-19 the magnetic field and the magnetic field of permanent magnet ring 11,13 and 14.Piston 2 should be around position vibration in the middle of it, and piston end surface can be realized its pumping function during this oscillating movement like this.
For realizing required pump-absorb action, pressing chamber 5,6 is furnished with an inlet valve and an outlet valve (only shown in Figure 1) respectively.Each inlet valve has an inlet opening 21 or 22, and they lay respectively at an outer inlet 23 or 24 and the drawing between chamber 5 or 6 of each correspondence.Inlet opening 21,22 is designed to the plane-of-weakness joint type on cylindrical wall 8 or 9 separately, the through hole of circumferentially extending.Piston section 3 and 4 discharges inlet opening separately when taking one of two dead center position (position that each comfortable cylindrical section is pulled) when them.Outlet valve 26,27 is configured in the end face side respectively.Its blocking element 28,29 separates separately pressing chamber 5 or 6 and room of outlet 31,32, till they are opened by piston section 3 or 4 (under the high pressure reduction and also by the pressure that is produced) separately.Blocking element 28,29 is formed in that stretch on the cross section of whole cylindrical section 3,4, flexible disk, and they are fixed on the housing 7 and handle by the pressure that is produced or by the end face of piston 2 in the periphery in central authorities.Piston end surface is made into spill for this reason.The end face that constitutes the member of cylindrical section 8,9 has the function of valve seat.
Always have two compression stages.They can in series or in parallel move.The details of this respect is not described herein.
In all figure, all represent the slit pipe with numeral 34.It is around doughnut or groove 12, and stretching, extension is in the zone of stator magnet iron hoop 13,14.
Fig. 2 illustrates, and slit pipe 34 has the intermediate section of 35, the 36 and relatively thicks of section that have less wall thickness of two side direction.The wall thickness of lateral sections 35,36 is preferably 0.7mm below 1mm.Under this wall thickness, when near drive magnet 11 sections of being positioned at 35,36, produced required saturated by this drive magnet.Bigger wall thickness in the neutral zone have only when the slit pipe must have an enough mechanical strength, be only necessary.
Fig. 3 only schematically shows the vacuum pump 1 of band linear actuating device.A kind of being used for according to the form of implementation to coil 15,16 power supplies of the present invention also is shown in addition., be preferably the 50Hz power network current and input to two thyristor regulators 42,43 Ac through wiring 41, each of these two thyristor regulators all is connected with a coil 15 or 16.Regulator 42 only allows the positive half cycle of Ac pass through, and 43 in regulator only allows its negative half period pass through.Therefore the power supply of two coils no longer is simultaneously, but alternately only has one of two current polarities separately.From the electric current/time Figure 44,45,46 that the electric current input area and between regulator 42,43 and coil 15,16, describes respectively as can be seen according to the power supply mode to coil of the present invention.Coil 15,16 is linked in separately the current supply circuit aptly in the following manner, makes them be applied to repulsive force on the drive magnet 11.Therefore piston vibrates around its middle position with the frequency of input AC electric current.
Permanent magnet 13,14 is so polarized aptly, makes them apply a repulsion effect on drive magnet.The advantage of this solution is to dispense the mechanical spring that piston is returned to its mid point.

Claims (15)

1. vibration type piston formula drive unit that is used for vacuum pump (1), it has:
-one piston (2), this piston have two piston sections (3,4) and a zone line that is equipped with a drive magnet (11),
-some are the cylindrical section (8,9) that described piston section (3,4) is equipped with,
-one be arranged between the described cylindrical section (8,9), be in the annular groove (12) on yoke (19) height in the middle of, this annular groove (12) has constituted the space of drive magnet (11),
-one electromagnetic actuator device around piston (2), it has yoke member (17,18,19) and is positioned at the coil (15,16) of middle yoke side direction,
It is characterized by: a slit pipe (34) forms the border of described groove (12) in the periphery.
2. drive unit as claimed in claim 1 is characterized by: slit pipe (34) is made such as plastics, aluminium, high-quality steel etc. by a kind of material with good sliding properties.
3. drive unit as claimed in claim 1 is characterized by: slit pipe (34) is made by ferromagnetic material.
4. drive unit as claimed in claim 3, it is characterized by: stator permanent magnet (13,14) is arranged axially and outside middle yoke zone, form the border of groove (12), and slit pipe (34) extends to always in the zone of described stator permanent magnet (13,14).
5. drive unit as claimed in claim 4 is characterized by: stator permanent magnet (13,14) is so magnetized, and makes them apply a repulsive force on drive magnet (11).
6. as the described drive unit of one of claim 3 to 5, it is characterized by: the wall thickness of slit pipe (34) is selected outside middle yoke zone at least like this, when making in the middle of drive magnet (11) is arranged in the zone outside the yoke (19), till slit pipeline section (35, the 36) magnetization that it will be at that time is extremely saturated.
7. drive unit as claimed in claim 6 is characterized by: slit pipe (34) has a bigger wall thickness in middle yoke (19) zone.
8. as one of above-mentioned claim described drive unit, it is characterized by: drive magnet (11) is a kind of rare-earth magnet.
9. be used to move the method for the vibration type piston formula drive unit of the feature with claim 1, it is characterized by: the power supply to coil (15,16) is controlled, and makes to have only a coil to have electric current to flow through respectively.
10. be used to move the method for the vibration type piston formula drive unit of vacuum pump (1), this vacuum pump (1) has:
-one piston (2), this piston have two piston sections (3,4) and a zone line that is equipped with a drive magnet (11),
-some are the cylindrical section (8,9) that described piston section (3,4) is equipped with,
-one be arranged between the described cylindrical section (8,9), be in the annular groove (12) on yoke (19) height in the middle of, this annular groove (12) has formed the space of drive magnet (11),
-one electromagnetic actuator device around piston (2), the coil (15,16) that it has yoke member (17,18,19) and is positioned at middle yoke side direction,
It is characterized by: to two coils (15,16) supplied alternating electricity, and each coil is only imported a kind of current polarity.
11. method as claimed in claim 10 is characterized by: so coil (15,16) is provided with electric current, makes them on drive magnet, apply repulsive force.
12., it is characterized by: adopt thyristor regulator (42,43) to regulate required current amplitude as claim 10 or 11 described methods.
13. method as claimed in claim 12 is characterized by: regulate current amplitude by a phase angle controller.
14. method as claimed in claim 13 is characterized by: the input signal of phase angle controller
-given in advance at a kind of pump applicable cases (pressure, line voltage, pump stage number),
-determine by line voltage,
-be used for determining that by one the sensor of piston position is given in advance, or
-given in advance by a sensor that is used for the inspecting valve motion.
15. the vibration type piston formula drive unit by claim 13 or 14 described method operations is characterized by: be provided with thyristor regulator (42,43), to regulate required current amplitude.
CN02819814.XA 2001-10-06 2002-09-28 Oscillating-piston drive for a vacuum pump and an operating method for said drive Pending CN1564911A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10149506.4 2001-10-06
DE10149506A DE10149506A1 (en) 2001-10-06 2001-10-06 Oscillatory piston drive for vacuum pump uses electromagnetic coils cooperating with drive magnet between two sections of vacuum pump piston

Publications (1)

Publication Number Publication Date
CN1564911A true CN1564911A (en) 2005-01-12

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN02819814.XA Pending CN1564911A (en) 2001-10-06 2002-09-28 Oscillating-piston drive for a vacuum pump and an operating method for said drive

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US (1) US20050053490A1 (en)
EP (1) EP1432912A1 (en)
JP (1) JP2005504928A (en)
CN (1) CN1564911A (en)
DE (1) DE10149506A1 (en)
WO (1) WO2003031818A1 (en)

Cited By (1)

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CN102852759A (en) * 2011-06-18 2013-01-02 马格纳斯泰尔汽车技术两合公司 Pump for conveying cryogenic fluid

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EP1936193A1 (en) * 2006-12-19 2008-06-25 Dresser Wayne Ab Vapour recovery pump and fuel dispenser
EP1936188B1 (en) * 2006-12-19 2018-09-26 Wayne Fueling Systems Sweden AB Vapour recovery pump and fuel dispenser
EP1936189B1 (en) * 2006-12-19 2011-02-23 Dresser Wayne Aktiebolag Fluid pump and fuel dispenser
JP5277554B2 (en) * 2006-12-27 2013-08-28 シンフォニアテクノロジー株式会社 Linear actuator
ES2530416B1 (en) * 2013-08-31 2015-12-15 Diego PARRA GIMÉNEZ Linear gas compressor
CA2942037C (en) * 2014-03-11 2022-08-09 Obotics Inc. Methods and devices to hydraulic consumer devices
CN104033354B (en) * 2014-03-21 2019-11-01 湛江古力高新科技有限公司 Electromagnetism external compressor
WO2019060736A1 (en) * 2017-09-21 2019-03-28 Dayco Ip Holdings, Llc Solenoid activated vacuum pump for an engine system andsystem having same

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CN102852759A (en) * 2011-06-18 2013-01-02 马格纳斯泰尔汽车技术两合公司 Pump for conveying cryogenic fluid

Also Published As

Publication number Publication date
JP2005504928A (en) 2005-02-17
WO2003031818A1 (en) 2003-04-17
EP1432912A1 (en) 2004-06-30
DE10149506A1 (en) 2003-04-10
US20050053490A1 (en) 2005-03-10

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