CN1563881A - Phase difference amplifying device of combined interferometer - Google Patents
Phase difference amplifying device of combined interferometer Download PDFInfo
- Publication number
- CN1563881A CN1563881A CN 200410017385 CN200410017385A CN1563881A CN 1563881 A CN1563881 A CN 1563881A CN 200410017385 CN200410017385 CN 200410017385 CN 200410017385 A CN200410017385 A CN 200410017385A CN 1563881 A CN1563881 A CN 1563881A
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- beam splitter
- light
- light path
- phase difference
- hologram
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- 239000011248 coating agent Substances 0.000 claims description 13
- 238000000576 coating method Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 4
- 238000005286 illumination Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 claims description 3
- 238000000034 method Methods 0.000 description 6
- 230000003321 amplification Effects 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000001914 filtration Methods 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000001427 coherent effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- CPBQJMYROZQQJC-UHFFFAOYSA-N helium neon Chemical compound [He].[Ne] CPBQJMYROZQQJC-UHFFFAOYSA-N 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
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Abstract
A phase difference amplifying device for combined interferometer is composed of M-Z interferometer and T-G interferometer, and features that the phase factor of said phase difference amplifying device is 2(M + N) times greater than that of original phase factor, which is 2 times greater than that of original phase factor.
Description
Technical field:
The relevant holographic phase difference of the present invention amplifies particularly a kind of interferometer combined phase difference amplifying device.
Background technology:
Carry out phasic difference with holographic method and amplify, can be used to accurately measure the quality of optical element, also can be used to detect the phase change of the system that causes owing to stress, pressure etc.Main method has the high order diffraction item that utilizes non-linear hologram to realize the phasic difference amplification at present, but its enlargement factor is subjected to the inferior restriction of the order of diffraction; Utilize the certain coherent length of lighting source, allow light beam repeatedly realize the phasic difference amplification, but require very high the adjustment of light path by phase object.
Summary of the invention:
The technical problem to be solved in the present invention is to overcome the defective of above-mentioned prior art, and a kind of interferometer combined phase difference amplifying device is provided,
Design of the present invention is that these two kinds of method M-Z interferometers and T-G interferometer are combined, and in the hope of down inferior in the same order of diffraction, obtains higher enlargement factor.To requiring two-beam to incide at a certain angle under the situation of the same area, the bad adjusting of T-G interferometer, and the M-Z interferometer is easy to meet this requirement.Therefore, we combine M-Z interferometer and T-G interferometer, carry out phasic difference and amplify.
For the principle of work of M-Z interferometer and T-G interferometer, we here do not think to be described more, in any high optics books, can find detailed introduction.
Technical solution of the present invention is as follows:
Combination M-Z and T-G interferometer carry out phase difference amplifying device as shown in Figure 1.
Phase object places M
2With BS
2Between, be equivalent to place an arm of T-G interferometer.H is a holographic dry plate, thing light before arriving the dry plate face be twice by object, the thing light that arrives the H place is
0＝0exp[ik
0]
0＝2(x，y)+xsinθ
0+δ
0
Reference light is
R＝Rexp[ik
R]
R＝xsinθ
r+δ
r
K=2 π/λ wherein; λ is used optical source wavelength; θ
0, θ
rBe respectively thing light and reference light incident angle with respect to the dry plate normal direction; δ
0, δ
rSeparately light path when arriving H for two-beam; φ (x, y) path difference for causing by phase object.Light intensity on the dry plate
I＝|O+R|
2＝O
2+R
2+2ROcosk(
0-
R) (1)
The dry plate exposure is E=It, and t is the time shutter.Dry plate after treatment, its amplitude transmissivity are T=E
-γ/2If γ＞2 can be T by series expansion; If R
2/ O
2-1, then higher order term can not be ignored in the expansion, thereby T-E is nonlinear relationship, the high order diffraction item will occur during reproduction.Hologram is regarded as grating, all nonlinear terms are pressed sinusoidal grating launch, and do not consider constant term to be written as amplitude transmissivity at last
B wherein
mBe the absolute amplitude projection ratio of m rank diffracted wave, by thing light, reference light and the decision of hologram processing procedure.
Directly reproduce gold breath figure (also available former shooting light path is directly reproduced), as shown in Figure 2 with the M-Z interferometer.L, F are a spatial filtering system, regulate M
1, BS
2, make that light beam 1 produces behind the H diffraction+μ rank diffraction light wave produces behind diffraction with light beam 2-and ν rank diffraction light wave overlaps, and select by the spatial filtering system, just can obtain the interferogram of this two-beam at the C place.
Light beam 1 is behind the H diffraction, and+μ rank diffraction light wave is
U
μ＝C
1b
μexpik[2μ(x，y)+x(sinθ
μ+μsinθ
0-μsinθ
R)+μ(δ
0-δ
R)+δ
1]
Light beam 2 is behind the H diffraction, and-ν rank diffraction light wave is
U
-ν＝C
2b
-νexpik[-2ν(x，y)-x(νsinθ
0-νsinθ
R-sinθ
-ν)-ν(δ
0-δ
R)+δ
2]
If all on the direction perpendicular to H, promptly angle of diffraction is 0 to this two diffraction light, and is so above-mentioned
Angle item in two formulas disappears, so the light intensity at C place is
I＝C
1 2b
μ 2+C
2 2b
-ν 2+2C
1C
2b
μb
-νcosk[2(μ+ν)(x，y)+(μ+ν)(δ
0-δ
R)+(δ
1-δ
2)] (3)
If make C
1b
μ=C
2b
-ν=b, and the ((δ of μ+ν)
0-δ
R)+(δ
1-δ
2) be the integral multiple of 2 π, then (3) formula is
I＝2b
2{1+cosk[2(μ+ν)(x，y)]}
If μ=ν=N, then
I＝2b
2{1+cosk[4N(x，y)]} (4)
As seen, (x y) has been exaggerated 4 times to the phasic difference of object.
Technical solution of the present invention is as follows:
A kind of interferometer combined phase difference amplifying device comprises hologram apparatus for converting and hologram reconstruction device two parts, it is characterized in that:
Constituting of described hologram apparatus for converting: a He-Ne Lasers light source also is provided with beam expanding telescope successively and is 45 ° of first beam splitter with light path on this LASER Light Source laser output light path, on the reflected light path of first beam splitter, be provided with and be 45 ° second beam splitter, the reflected light path of this second beam splitter is established the sample and second completely reflecting mirror successively, folded light beam working direction at second completely reflecting mirror is followed successively by sample, second beam splitter, be 135 ° of the 3rd beam splitter and dry plate with light path, have to be 45 ° first completely reflecting mirror with light path on the transmitted light path of this first beam splitter, its reflected light arrives dry plate through the 3rd beam splitter reflection again;
The formation of described hologram reconstruction device is: a He-Ne Lasers light source is also established second beam expanding telescope and is 45 ° the 4th beam splitter with light path on the light path of helium-neon laser light source laser output, and the 4th beam splitter is divided into reflection and transmission two light beam A with incident beam
1, B
2, in light beam A
1Light path on establish the 4th total reflective mirror, the 5th beam splitter and illumination dry plate; At light beam B
1Light path on the 3rd total reflective mirror and the 5th beam splitter are arranged, light beam A
1, B
2By the hologram on the dry plate that throws light on simultaneously behind the 5th beam splitter, be provided with lens, diaphragm and receiver after this dry plate coaxially.
Described laser instrument is that a single transverse mode, output power are the He-Ne laser instrument of 10mW.
Described beam expanding telescope is that an energy amplifies the output beam of He-Ne laser instrument 50 times optical system.
Described first, second, third, fourth 5th beam splitters be one under 45 ° of incident angle situations, see through 50%, the deielectric-coating mirror of reflection 50%.
Described the first, the 3rd, the 4th completely reflecting mirror is under 45 ° of condition of incidence, the deielectric-coating mirror of 100% reflection, and second completely reflecting mirror is under the vertical incidence situation, the deielectric-coating mirror of 100% reflection.
Described sample be one to 6328 phase objects, the optical system that pending phasic difference is amplified.
Described dry plate is to be used for writing down the recording medium that the He-Ne laser instrument forms hologram, and it has higher spectrum sensitivity to 6328 .
Technique effect of the present invention is as follows:
Interferometer combined phase difference amplifying device of the present invention is compared with employing phasic difference amplification system under the same order of diffraction is inferior, and higher enlargement factor is arranged.Phase factor is amplified to 2 original (M+N) doubly.Compare with technology formerly, phase factor is amplified to original 2 times.
Description of drawings:
Fig. 1 is the interferometer combined phase difference amplifying device hologram of a present invention apparatus for converting structural representation
Fig. 2 is the interferometer combined phase difference amplifying device hologram of a present invention phase difference amplifying restructuring device structural representation.
Embodiment
See also Fig. 1, Fig. 2 earlier, as seen from the figure, the interferometer combined phase difference amplifying device of the present invention comprises hologram apparatus for converting and hologram reconstruction device two parts:
Constituting of described hologram apparatus for converting: a He-Ne Lasers light source 1 also is provided with beam expanding telescope 2 successively and is 45 ° of first beam splitter 3 with light path on this LASER Light Source 1 laser output light path, on the reflected light path of first beam splitter 3, be provided with and be 45 ° second beam splitter 5, the reflected light path of this second beam splitter 5 is established the sample 8 and second completely reflecting mirror 6 successively, folded light beam working direction at second completely reflecting mirror 6 is followed successively by sample 8, second beam splitter 5, be 135 ° of the 3rd beam splitter 7 and dry plate 9 with light path, have to be 45 ° first completely reflecting mirror 4 with light path on the transmitted light path of this first beam splitter 3, its reflected light arrives dry plates 9 through 7 reflections of the 3rd beam splitter again;
The formation of described hologram phase difference amplifying restructuring device is: a He-Ne Lasers light source 11 is also established second beam expanding telescope 12 and is 45 ° the 4th beam splitter 13, the four beam splitters 13 with light path incident beam is divided into reflection and transmission two light beam A on the light path of helium one Ne laser light source 11 laser output
1, B
2, in light beam A
1Light path on establish the 4th total reflective mirror 16, the 5th beam splitter 15 and illumination dry plate 9; At light beam B
1Light path on the 3rd total reflective mirror 14 and the 5th beam splitter 15 are arranged, light beam A
1, B
2By the hologram on the dry plate 9 that throws light on simultaneously behind the 5th beam splitter 15, be provided with lens 17, diaphragm 18 and receiver 19 after the dry plate 9 coaxially.
Described laser instrument 1,11 is that a single transverse mode, output power are the He-Ne laser instrument of 10mW.Have higher spatial coherence and temporal coherence.
Described beam expanding telescope 2,12 is that an energy amplifies the output beam of He-Ne laser instrument 50 times optical system.
Described first, second, third, fourth 5th beam splitters 3,5,7,13,15 be one under 45 ° of incident angle situations, see through 50%, the deielectric-coating mirror of reflection 50%.
Described the first, the 3rd, the 4th completely reflecting mirror 4,14,16 is under 45 ° of condition of incidence, the deielectric-coating mirror of 100% reflection, and second completely reflecting mirror 6 is under the vertical incidence situation, the deielectric-coating mirror of 100% reflection.
Described sample 8 be one to 6328 phase objects, the optical system that pending phasic difference is amplified.
Described dry plate 9 is to be used for writing down the recording medium that the He-Ne laser instrument forms hologram, and it has higher spectrum sensitivity to 6328 .
Principle of work of the present invention and basic process are:
After He-Ne laser instrument 1 is amplified 50 times by beam expanding telescope 2, be divided into A, B two-beam by semi-transparent semi-reflecting deielectric-coating mirror 3, wherein A bundle light is entered into sample 8, by completely reflecting mirror 6 total reflections by semi-transparent semi-reflecting deielectric-coating mirror 5 reflections, return by former road, enter sample 8 once more, pass semi-transparent semi-reflecting deielectric-coating mirror 5 and 7, arrive on the dry plate 9, and B bundle light is through completely reflecting mirror 4 reflections, arrived dry plates 9 and the A bundle light formation hologram that meets by semi-transparent semi-reflecting deielectric-coating mirror 7 reflections.Hologram is after handle in the darkroom, and the hologram phase difference amplifying restructuring device that is put into as shown in Figure 2 carries out phasic difference amplification and reconstruct.
By output wavelength is helium one Ne laser light source 11 emitted light beams of 632.8nm, after beam expanding telescope 12 expands bundle, behind the 4th semi-transparent semi-reflecting lens 13, is divided into A
1, B
1Two-beam.Light beam B
1Behind the 3rd total reflective mirror 6 and the 5th semi-transparent semi-reflecting lens 14, the hologram on the illumination dry plate 9; Light beam A
1Behind the 4th total reflective mirror 16 and the 5th semi-transparent semi-reflecting lens 15, the hologram on the dry plate 9 that also throws light on.A
1, B
1Bundle produces 0 grade separately respectively by the hologram diffraction, and ± 1, ± M, ± N...... order diffraction is adjusted completely reflecting mirror 14,16 respectively, allows A
1Bundle produces on hologram 9+the M level (or-the N level) diffracted wave and B
1Bundle produces on hologram 9-N order diffraction ripple, and is overlapping on the focal plane of lens 17, uses the non-overlapped part of diaphragm 18 eliminations again, received by receiver 19 again.Because from the object wave of reconstruct on the hologram 9 and its ripple of gripping altogether is that the position is mutually opposite, therefore, A
1Bundle produces+M order diffraction ripple and B
1Bundle produces-wave interference of N order diffraction after, phase factor is amplified to 2 original (M+N) doubly.Compare with technology formerly, phase factor is amplified to original 2 times.
Claims (7)
1, a kind of interferometer combined phase difference amplifying device comprises hologram apparatus for converting and hologram reconstruction device two parts, it is characterized in that:
Constituting of described hologram apparatus for converting: a He-Ne Lasers light source (1) also is provided with beam expanding telescope (2) successively and is 45 ° of first beam splitter (3) with light path on this LASER Light Source (1) laser output light path, on the reflected light path of first beam splitter (3), be provided with second beam splitter (5) that is 45 °, the reflected light path of this second beam splitter (5) is established sample (8) and second completely reflecting mirror (6) successively, folded light beam working direction at second completely reflecting mirror (6) is followed successively by sample (8), second beam splitter (5), be 135 ° of the 3rd beam splitter (7) and dry plate (9) with light path, have to be 45 ° first completely reflecting mirror (4) with light path on the transmitted light path of this first beam splitter (3), its reflected light arrives dry plate (9) through the 3rd beam splitter (7) reflection again;
The formation of described hologram phase difference amplifying restructuring device is: a He-Ne Lasers light source (11) is also established second beam expanding telescope (12) and is 45 ° the 4th beam splitter (13) with light path on the light path of helium-Ne laser light source (11) laser output, and the 4th beam splitter (13) is divided into reflection and transmission two light beam A with incident beam
1, B
2, in light beam A
1Light path on establish the 4th total reflective mirror (16), the 5th beam splitter (15) and illumination dry plate (9); At light beam B
1Light path on the 3rd total reflective mirror (14) and the 5th beam splitter (15) are arranged, light beam A
1, B
2By the hologram on the dry plate (9) that throws light on simultaneously behind the 5th beam splitter (15), dry plate (9) is provided with lens (17), diaphragm (18) and receiver (19) afterwards coaxially.
2, interferometer combined phase difference amplifying device according to claim 1 is characterized in that described laser instrument (1,11), is that a single transverse mode, output power are the He-Ne laser instrument of 10mW.
3, interferometer combined phase difference amplifying device according to claim 1 is characterized in that described beam expanding telescope (2,12), is that an energy amplifies the output beam of He-Ne laser instrument 50 times optical system.
4, interferometer combined phase difference amplifying device according to claim 1 is characterized in that described first, second, third, fourth 5th beam splitters (3,5,7,13,15) be one under 45 ° of incident angle situations, see through 50%, the deielectric-coating mirror of reflection 50%.
5, interferometer combined phase difference amplifying device according to claim 1, it is characterized in that described the first, the 3rd, the 4th completely reflecting mirror (4,14,16) be under 45 ° of condition of incidence, the deielectric-coating mirror of 100% reflection, second completely reflecting mirror (6) is under the vertical incidence situation, the deielectric-coating mirror of 100% reflection.
6, interferometer combined phase difference amplifying device according to claim 1, it is characterized in that described sample (8) be one to 6328 phase objects, the optical system that pending phasic difference is amplified.
7, interferometer combined phase difference amplifying device according to claim 1 is characterized in that described dry plate (9) is to be used for writing down the recording medium that the He-Ne laser instrument forms hologram, and it has higher spectrum sensitivity to 6328 .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410017385 CN1243952C (en) | 2004-04-01 | 2004-04-01 | Phase difference amplifying device of combined interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200410017385 CN1243952C (en) | 2004-04-01 | 2004-04-01 | Phase difference amplifying device of combined interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1563881A true CN1563881A (en) | 2005-01-12 |
| CN1243952C CN1243952C (en) | 2006-03-01 |
Family
ID=34478949
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200410017385 Expired - Fee Related CN1243952C (en) | 2004-04-01 | 2004-04-01 | Phase difference amplifying device of combined interferometer |
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| Country | Link |
|---|---|
| CN (1) | CN1243952C (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100375885C (en) * | 2006-04-28 | 2008-03-19 | 上海大学 | High-resolution real-time non-destructive detection system and method |
| CN100464172C (en) * | 2005-04-08 | 2009-02-25 | 中国科学院上海光学精密机械研究所 | Digital interference phase difference amplifying method |
| CN102841506A (en) * | 2011-06-22 | 2012-12-26 | 上海微电子装备有限公司 | Laser interferometer measuring system and measuring method |
| CN104280801A (en) * | 2014-09-27 | 2015-01-14 | 郑敏 | Manufacturing method for diffraction optical element of any structure |
| CN109357636A (en) * | 2018-12-10 | 2019-02-19 | 电子科技大学 | A kind of phase amplification calculation method based on black part structure light scan |
-
2004
- 2004-04-01 CN CN 200410017385 patent/CN1243952C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100464172C (en) * | 2005-04-08 | 2009-02-25 | 中国科学院上海光学精密机械研究所 | Digital interference phase difference amplifying method |
| CN100375885C (en) * | 2006-04-28 | 2008-03-19 | 上海大学 | High-resolution real-time non-destructive detection system and method |
| CN102841506A (en) * | 2011-06-22 | 2012-12-26 | 上海微电子装备有限公司 | Laser interferometer measuring system and measuring method |
| CN102841506B (en) * | 2011-06-22 | 2014-11-12 | 上海微电子装备有限公司 | Laser interferometer measuring system and measuring method |
| CN104280801A (en) * | 2014-09-27 | 2015-01-14 | 郑敏 | Manufacturing method for diffraction optical element of any structure |
| CN109357636A (en) * | 2018-12-10 | 2019-02-19 | 电子科技大学 | A kind of phase amplification calculation method based on black part structure light scan |
| CN109357636B (en) * | 2018-12-10 | 2019-12-17 | 电子科技大学 | phase amplification calculation method based on black piece structured light scanning |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1243952C (en) | 2006-03-01 |
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Granted publication date: 20060301 Termination date: 20110401 |