CN1563518A - Crucible for lithium atmosphere gas phase transmission balancing method - Google Patents
Crucible for lithium atmosphere gas phase transmission balancing method Download PDFInfo
- Publication number
- CN1563518A CN1563518A CN 200410017312 CN200410017312A CN1563518A CN 1563518 A CN1563518 A CN 1563518A CN 200410017312 CN200410017312 CN 200410017312 CN 200410017312 A CN200410017312 A CN 200410017312A CN 1563518 A CN1563518 A CN 1563518A
- Authority
- CN
- China
- Prior art keywords
- crucible
- dividing plate
- lithium
- central dividing
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 17
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims description 20
- 229910052744 lithium Inorganic materials 0.000 title claims description 20
- 230000005540 biological transmission Effects 0.000 title abstract 2
- 239000000919 ceramic Substances 0.000 claims abstract description 6
- 238000011067 equilibration Methods 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 238000012545 processing Methods 0.000 abstract description 3
- 238000005192 partition Methods 0.000 abstract 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 25
- 229910052697 platinum Inorganic materials 0.000 description 12
- 238000002474 experimental method Methods 0.000 description 9
- 229910010093 LiAlO Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 2
- -1 LiTaO 3 Inorganic materials 0.000 description 2
- 241000272525 Anas platyrhynchos Species 0.000 description 1
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 229910001416 lithium ion Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000010186 staining Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000009941 weaving Methods 0.000 description 1
Images
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
A crucible for the gas-phase transmission balance method in Li atmosphere is Al2O3The ceramic crucible consists of a crucible, a frame corner, a middle partition plate and a crucible cover, wherein the frame corner is arranged in the crucible, the middle partition plate is arranged on the frame corner, a plurality of vent holes and fine grooves for placing samples are formed in the middle partition plate, and an annular groove matched with the periphery of the crucible is formed in the edge of the crucible cover. The crucible has the characteristics of simple and convenient processing, low manufacturing cost, good air tightness and no pollution to a processed sample.
Description
Technical field
The present invention relates to the method (Vapor TransportEquilibration is called for short the VTE technology) of the vapor transport equilibration of crystal growth, particularly a kind of crucible that is used for lithium atmosphere vapor transport equilibration method.
Technical background
Lithium atmosphere VTE technology is to utilize vapor transport equilibration, at high temperature, form rich lithium atmosphere, by the diffusion of lithium ion, the wafer top layer and the subsurface defect that are caused because of the non-stoichiometric volatilization are repaired, or generate the technology of cenotype at substrate surface generation chemical reaction.At present, the VTE technology mainly is to be used to improve LiNbO
3, LiTaO
3, LiAlO
2, LiGaO
2(Mater.Sci.Eng.B33 (1995) 91 Deng crystal mass and correlative study thereof; Optical Materials 23 (2003) 295; Appl.Phys.Lett.82 (2003) 2248).This technology also has been used to carry out LiAlO in addition
2Preparation Deng film.
In lithium atmosphere VTE experiment and production process, typically use platinum crucible at present and carry out work, so following problem in experimentation, occurred:
(1), cause experiment and production cost too high because the value of platinum is higher and the demand in experimentation is also bigger;
(2) find in the experiment that lithium can react with platinum under high temperature oxygen atmosphere.As through after the experiment of VTE several times, the crucible bottom duck eye that will be corroded out, in addition, the net of the placement sample of weaving into platinum wire in the experiment, through also becoming black powder after the experiment several times, these all cause the severe attrition of platinum, have improved experiment and production cost greatly;
(3) when the platinum consumption after a little while, with the container that platinum is made, resistance to air loss is relatively poor, is difficult to keep balanced atmosphere preferably in the experiment.
Owing to these reasons have improved the cost of lithium atmosphere VTE technology and restricted the development of lithium atmosphere VTE technology.
Summary of the invention
The technical problem to be solved in the present invention is the problems that overcome platinum crucible in the above-mentioned VTE technology, a kind of crucible that is used for lithium atmosphere vapor transport equilibration method is proposed, it should have easy, the low cost of manufacture of processing, crucible resistance to air loss good, to handling the non-staining characteristics of sample.
Basic thought of the present invention is to utilize Al
2O
3Ceramic crucible replaces platinum crucible to carry out the VTE processing.
Technical solution of the present invention is as follows:
A kind of crucible that is used for lithium atmosphere vapor transport equilibration method, this crucible is Al
2O
3Ceramic crucible, constitute by crucible, frame angle, central dividing plate and crucible cover, in this crucible, settle this angle, on this angle, place this central dividing plate, the stria that offers some ventilating pits on this central dividing plate and place for sample, the edge of crucible cover is provided with the annular recess that matches with the periphery of crucible.
Described crucible can be round shape or square box shaped, and described crucible cover matches with crucible.
Described angle both can constitute with crucible inwall one, also can be independent parts.
Technique effect of the present invention:
After placing this central dividing plate on this angle, crucible bottom is reserved certain space and is convenient to put into a certain amount of Li
2CO
3Or Li
2O or contain Li
2The mixing raw material of O.On central dividing plate, open stria, be used to lay pending wafer or substrate slice.Pending samples vertical is placed in central dividing plate, and two faces of sample fully are exposed in the atmosphere.On dividing plate, open some apertures, make things convenient for the atmosphere convection current to enter top.
Li at high temperature
2O meeting and Al
2O
3React, at Al
2O
3The inwall of ceramic crucible generates LiAlO
2Polycrystal layer, this layer LiAlO
2Polycrystal layer fine and close and highly stable in the VTE of lithium atmosphere environment, can not produce and pollute the VTE process, play the effect identical with platinum crucible.In addition, use Al
2O
3Pottery do lithium atmosphere VTE crucible process in addition easy, advantage such as interior shape is controlled easily, and the crucible resistance to air loss is good, and is with low cost.
Description of drawings
Fig. 1 is the structural representation that the present invention is used for the crucible specific embodiment of lithium atmosphere vapor transport equilibration method.
Among the figure: the 1-crucible; 2-frame angle; The 3-central dividing plate; The 4-crucible cover; Ventilating pit on the 5-dividing plate; 6-VTE raw material (Li
2CO
3Deng); The pending sample of 7-.
The specific design mode
See also Fig. 1 earlier, Fig. 1 is the structural representation that the present invention is used for the crucible specific embodiment of lithium atmosphere vapor transport equilibration method.1,2,3,4 parts are Al among the figure
2O
3Pottery is made.As seen from the figure, the present invention is used for the crucible of lithium atmosphere vapor transport equilibration method, and this crucible is Al
2O
3Ceramic crucible, constitute by crucible 1, frame angle 2, central dividing plate 3 and crucible cover 4, in this crucible 1, settle this angle 2, on this angle 2, place this central dividing plate 3, the stria that offers some ventilating pits 5 on this central dividing plate 3 and place for sample 7, the edge of crucible cover 4 is provided with the annular recess that matches with the periphery of crucible 1.After placing this central dividing plate 3 on this angle 2, reserved certain space in crucible bottom, be convenient to put into a certain amount of Li
2CO
3Or Li
2O or contain Li
2The mixing raw material 6 of O.On central dividing plate 3, open stria, be used to lay pending wafer or substrate slice 7.In the VTE process, pending sample 7 is placed perpendicular to central dividing plate 3, and two faces of sample 7 fully are exposed in the atmosphere.Several angles 2 are done in crucible 1 bottom, are used for laying and fixing central dividing plate 3.On dividing plate, open the aperture 5 of certain number, make things convenient for the atmosphere convection current to enter top.This crucible wants to put in the bottom earlier a certain amount of Li before use
2CO
3Or Li
2O, build crucible cover 4 after, the sky that under 800 ℃～1100 ℃ of high temperature crucible is carried out for some time (3～4 days) burns, and makes crucible 1 inwall generate stable LiAlO
2Layer.
Utilize this crucible, carried out in rich lithium atmosphere, improving LiNbO
3, LiTaO
3, LiAlO
2And LiGaO
2The VTE experiment of crystal mass, its effect of evidence is identical with the effect of using platinum crucible, also is better than the platinum crucible result under partial condition.In addition, also attempted carrying out VTE growth LiAlO on Sapphire Substrate with this crucible
2The test of thin film layer, test-results also come to the same thing with using platinum crucible.
Claims (3)
1, a kind of crucible that is used for lithium atmosphere vapor transport equilibration method is characterized in that this crucible is Al
2O
3Ceramic crucible, constitute by crucible (1), frame angle (2), central dividing plate (3) and crucible cover (4), in this crucible (1), settle this angle (2), go up placement this central dividing plate (3) in this angle (2), the stria that offers some ventilating pits (5) on this central dividing plate (3) and place for sample (7), the edge of crucible cover (4) is provided with the annular recess that matches with the periphery of crucible (1).
2, the crucible that is used for lithium atmosphere vapor transport equilibration method according to claim 1 is characterized in that described crucible (1) can be round shape or square box shaped, and described crucible cover (4) matches with crucible (1).
3, the crucible that is used for lithium atmosphere vapor transport equilibration method according to claim 1 is characterized in that described angle (2) and crucible (1) inwall one constitute.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410017312XA CN1308503C (en) | 2004-03-30 | 2004-03-30 | Crucible for lithium atmosphere gas phase transmission balancing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB200410017312XA CN1308503C (en) | 2004-03-30 | 2004-03-30 | Crucible for lithium atmosphere gas phase transmission balancing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1563518A true CN1563518A (en) | 2005-01-12 |
| CN1308503C CN1308503C (en) | 2007-04-04 |
Family
ID=34478908
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200410017312XA Expired - Fee Related CN1308503C (en) | 2004-03-30 | 2004-03-30 | Crucible for lithium atmosphere gas phase transmission balancing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1308503C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103420345A (en) * | 2012-05-22 | 2013-12-04 | 广东先导稀材股份有限公司 | Graphite crucible, heating furnace and preparation method for cadmium telluride |
| CN111979515A (en) * | 2019-05-24 | 2020-11-24 | 南开大学 | Sapphire crucible and method for preparing thallium-based high-temperature superconducting thin film |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1253125A (en) * | 1999-11-08 | 2000-05-17 | 苏君道 | Non-expansion lithium ceramics and process for preparing its crucible |
| CN1386894A (en) * | 2001-05-17 | 2002-12-25 | 杜家庆 | Crucible for vapor plating |
| CN1362546A (en) * | 2001-12-17 | 2002-08-07 | 南开大学 | Lithium niobate crystal chip with near stoichiometric ratio and its prepn process |
-
2004
- 2004-03-30 CN CNB200410017312XA patent/CN1308503C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103420345A (en) * | 2012-05-22 | 2013-12-04 | 广东先导稀材股份有限公司 | Graphite crucible, heating furnace and preparation method for cadmium telluride |
| CN103420345B (en) * | 2012-05-22 | 2015-04-22 | 广东先导稀材股份有限公司 | Graphite crucible, heating furnace and preparation method for cadmium telluride |
| CN111979515A (en) * | 2019-05-24 | 2020-11-24 | 南开大学 | Sapphire crucible and method for preparing thallium-based high-temperature superconducting thin film |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1308503C (en) | 2007-04-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR102115301B1 (en) | Method of Preparing Heterogeneous Zeolite Membranes | |
| Schnepf et al. | Utilizing site disorder in the development of new energy-relevant semiconductors | |
| Sobac et al. | Structural and evaporative evolutions in desiccating sessile drops of blood | |
| Rau et al. | C-13/C-12 and N-15/N-14 variations among size-fractionated marine particles-Implications For their origin and trophic relationships | |
| JP4864705B2 (en) | Quaternary or higher I-III-VI alloy semiconductor film | |
| Hiraki et al. | Development of an automated large-scale protein-crystallization and monitoring system for high-throughput protein-structure analyses | |
| Gao et al. | Atomic-scale tracking of a phase transition from spinel to rocksalt in lithium manganese oxide | |
| US8298849B2 (en) | Nitrogen reactive sputtering of Cu-In-Ga-N for solar cells | |
| Kasuga et al. | Orientation relationships of zinc oxide on sapphire in heteroepitaxial chemical vapor deposition | |
| CN1308503C (en) | Crucible for lithium atmosphere gas phase transmission balancing method | |
| Kiely et al. | A TEM study of the crystallography and defect structures of single crystal and polycrystalline copper indium diselenide | |
| Suchikova et al. | Study of the structural and morphological characteristics of the Cd x Te y O z nanocomposite obtained on the surface of the CdS/ZnO heterostructure by the SILAR method | |
| EP3469085B1 (en) | Frustules extracted from benthic pennate diatoms harvested from an industrial biofilm process | |
| CN1026823C (en) | M-nxtiasi-apao5 waveguides grown by liquid phase epitaxy | |
| John | MBE-growth and characterization of Zn3N2 and Mg3N2: from epitaxy to materials science | |
| Yan et al. | Nucleation‐Supersaturation Dual‐Drive Crystallization Strategy Enables Efficient Protein Crystallization | |
| Dai et al. | Stepwise− Process− Controlled Ligand Management Strategy for Efficient and Stable Perovskite Quantum Dot Solar Cells | |
| Geyer et al. | A new approach to the manufacture of chalcogenide thin film solar cells | |
| Sugahara et al. | Autolabo: an automated system for ligand-soaking experiments with protein crystals | |
| Mukul et al. | Unleashing methylammonium–guanidinium lead iodide hybrid perovskite spherulitic microstructures: A structural and morphological investigation | |
| CN1308499C (en) | Method for preparing titanium-doped lithium aluminate wafer | |
| Theelen et al. | The influence of atmospheric species on the degradation of aluminum doped zinc oxide and Cu (In, Ga) Se2 solar cells | |
| Schulz et al. | Cation self and impurity diffusion in polycrystalline La0. 9Sr0. 1Ga0. 9Mg0. 1O2. 9 | |
| KR20230063328A (en) | CHA-DDR type zeolite membranes and method of preparing the same | |
| Bertin et al. | Evidence of cationic antiphase disorder in epitaxial Cu (In, Ga) S2 grown on GaP/Si (001) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070404 Termination date: 20120330 |