CN1530585A - Fluid transmission system with shaker - Google Patents
Fluid transmission system with shaker Download PDFInfo
- Publication number
- CN1530585A CN1530585A CNA031072119A CN03107211A CN1530585A CN 1530585 A CN1530585 A CN 1530585A CN A031072119 A CNA031072119 A CN A031072119A CN 03107211 A CN03107211 A CN 03107211A CN 1530585 A CN1530585 A CN 1530585A
- Authority
- CN
- China
- Prior art keywords
- transfer line
- lapping liquid
- transmission system
- high viscosity
- order
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 47
- 230000005540 biological transmission Effects 0.000 title claims description 35
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000000872 buffer Substances 0.000 claims abstract description 10
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 claims description 26
- 230000000694 effects Effects 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 238000002360 preparation method Methods 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000007921 spray Substances 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Cleaning In General (AREA)
Abstract
A fluid delivering system with additional vibration unit is composed of a delivering pipeline, a material inlet, a water inlet, at least one vibration unit and multiple buffers. Said vibration unit is used for preventing the high-viscosity fluid from being attached on the inner surface of delivering pipeline.
Description
Technical field
The present invention relates to a kind of fluid delivery system, particularly relate to a kind of high viscosity fluid transmission system that installs shaking device additional.
Background technique
In the industrial preparation process of modernization; often need to carry some mobile relatively poor high viscosity fluid charging or preparation process by products; as include the fluid of materials such as mud or silica; and this type of high viscosity fluid when transmission regular meeting cause transfer line to block because of itself high viscosity causes flowing velocity to cross the inwall that is attached to transfer line slowly; make the whole transmission system can't normal operation and must regularly be cleared up or change pipeline; not only increase unnecessary cost of production; the more important thing is when cleaning or replacing pipeline and the whole production preparation process must be suspended that this measure will have a strong impact on the running of whole production line.
Please refer to Fig. 1, Fig. 1 is the schematic representation of an existing fluid transmission system 10.As shown in Figure 1, fluid delivery system 10 includes a transfer line 12, be used for transmitting a high viscosity fluid, a plurality of pipeline base for supporting 14 are arranged at transfer line 12 bottoms, in order to support and constant transmissions pipeline 12, at least one material feeding mouth 16 is arranged on the transfer line 12, be fed to transfer line 12 in order to inject a high viscosity, at least one water intake 18 is arranged on the transfer line 12, in order to inject water to provide the high viscosity charging suitable flowability, and at least one pressurized nozzles 20, be arranged in the transfer line 12, utilize the pressurization water column to reduce adhering to of transfer line 12 inner high viscosity fluids.
The operation of existing fluid delivery system 10 is as follows, the high viscosity charging is via in the material feeding mouth 16 input transfer lines 12, and clear water injected transfer lines 12 via water intake 18, provide the suitable flowability of high viscosity charging with the transmission high viscosity fluid, while is in transmission course and utilize the 20 pairs of inner tube walls of pressurized nozzles that are arranged in the transfer line 12 to spray with the pressurization water column, to reduce the chance that the high viscosity charging is attached to transfer line 12 inwalls.
Yet because the setting of general transmission system is subject to the configuration of hardware facility and other manufacturing mechanisms of factory, the angle of inclination of transfer line setting is often not enough and cause the rate of flow of fluid in the pipe slow excessively, make the fluid level in the transfer line too high, even utilizing pressurized nozzles sprays with the pressurization water column the pipeline inwall, also can't solve the problem that the charging of pipeline inwall high viscosity is adhered to, and then influence overall transfer efficient because of the pressurization water column can't evenly wash away the pipeline inwall.Therefore existing fluid delivery system must regularly decommission and carry out the tube wall cleaning or change pipeline, makes the cost of production raising and has a strong impact on the production line normal operation.Therefore how to solve in the fluid delivery system, the high viscosity charging attachment phenomenon of transfer line inwall is a problem anxious to be solved in fact.
Summary of the invention
Main purpose of the present invention is to provide a kind of high viscosity fluid transmission system, to solve the problem that the charging of above-mentioned existing transmission system high viscosity is attached to the transfer line inwall.
In most preferred embodiment of the present invention, this high viscosity fluid transmission system includes a transfer line, in order to transmit a high viscosity charging, at least one material feeding mouth, in order to a high viscosity charging is flow in the transfer line, at least one water intake, in order to provide this high viscosity charging suitable flowability, at least one shaking device, in order to the vibrating effect of the suitable degree of transfer line to be provided, preventing adhering to of transfer line inwall high viscosity charging, and a plurality of buffer, in order to support transfer line, make not induced attenuation and avoid the running of other equipment of vibration influence of transfer line of vibration energy.
Because the disclosed fluid delivery system that installs shaking device additional of the present invention, can avoid adhering to of transfer line inwall high viscosity charging, effectively improve the shortcoming of prior art, therefore can improve the efficient of fluid transmission, save tube wall and clean or change relevant costs such as pipeline.
Description of drawings
Fig. 1 is the schematic representation of an existing fluid transmission system;
Fig. 2 is the schematic representation of the present invention's one fluid transmission system.
Embodiment
The invention provides a kind of fluid delivery system that installs shaking device additional.Please refer to Fig. 2, Fig. 2 is the schematic representation of the present invention's one fluid transmission system 30.In the present embodiment, fluid delivery system 30 is applied to cmp preparation process (the chemical mechanical polishing of semiconductor industry, CMP) in, be used for transmitting lapping liquid etc. and have full-bodied fluid, yet fluid delivery system 30 of the present invention is not limited thereto, and also can be applicable to the transmission with high viscosity fluid of other industrial preparation processs.As shown in Figure 2, fluid delivery system 30 includes a transfer line 32, in order to transmit a silica containing high viscosity lapping liquid charging, at least one material feeding mouth 34, be arranged on the transfer line 32, in order to the lapping liquid charging is flow in the transfer line 32, at least one water intake 36 is arranged on the transfer line 32, in order to provide this lapping liquid charging suitable flowability, at least one shaking device 38, be installed on the outer wall of transfer line 32, in order to the vibrating effect of transfer line 32 suitable degree to be provided, to prevent that the lapping liquid charging is attached to the inwall of transfer line 32, and a plurality of buffers 40, be arranged at appropriate location, transfer line 32 bottom in order to support transfer line 32, transfer line 32 is arranged on the ground with an appropriate tilt angle, make not induced attenuation of vibration energy simultaneously, and can avoid the running of other equipment of vibration influence of transfer line 32.
In preferred embodiment of the present invention, shaking device 38 is one to be attached at the pneumatic type electromagnetic shaker on transfer line 32 outer walls, and on transfer line 32, can install an observation window (not shown) in addition, grind the adhere to sight of charging in order to observation, so that the staff is easy to control the fluid status transmission in transfer line 32 inside.
Fluid delivery system 30 operation are as follows: the silica containing high viscosity lapping liquid that the cmp preparation process is produced inputs in the transfer line 32 via material feeding mouth 34, this moment, clear water also was injected in the transfer line 32 via water intake 36, to provide the lapping liquid charging suitable flowability.In addition, be attached to the inwall of transfer line 32 for fear of the contained silica of lapping liquid charging, therefore shaking device 38 can provide the vibrating effect of suitable degree in transmission course, make the lapping liquid charging can't be attached on the inwall because of the vibrating effect of transfer line 32, and the function of buffer 40 is except supporting transfer line 32, and has the effect that vibration energy and the vibrating effect of avoiding transfer line 32 influence other equipment of keeping.
Compare with existing fluid delivery system; the present invention discloses a kind of fluid delivery system that installs shaking device additional; when fluid delivery system carries out the transmission of high viscosity fluid; provide transfer line suitable vibrating effect; can avoid the contained solid of high viscosity fluid to be attached to the inwall of transfer line with viscosity; and then reduce because of shutting down cleaning tube wall and the cost of production of changing the required burden of transfer line, effectively solve the shortcoming of existing fluid delivery system.
The above only is preferred embodiment of the present invention, and all equalizations of doing according to claim of the present invention change and modify, and all should belong to the covering scope of patent of the present invention.
Claims (13)
1. lapping liquid transmission system that installs movement means additional includes:
One transfer line is in order to receive and to carry a lapping liquid charging;
At least one material feeding mouth is arranged on this transfer line, in order to inject this lapping liquid charging;
At least one water intake is arranged on this transfer line, in order to provide this lapping liquid charging suitable flowability;
At least one shaking device is installed on this transfer line, in order to provide this transfer line suitable degree vibrating effect; And
A plurality of buffers (cushion) are positioned at this transfer line bottom, in order to support this transfer line;
Wherein in this lapping liquid transmission course, this shaking device provides the vibrating effect of the suitable degree of this transfer line, so that the unlikely inwall that is attached to this transfer line of this lapping liquid charging, this each buffer is with so that the unlikely decay of vibration energy simultaneously, and avoids the running of other equipment of vibration influence of this transfer line.
2. lapping liquid transmission system as claimed in claim 1, wherein this lapping liquid is the lapping liquid that a cmp (CMP) preparation process is used.
3. lapping liquid transmission system as claimed in claim 1, wherein this lapping liquid is a full-bodied fluid.
4. lapping liquid transmission system as claimed in claim 1, wherein this lapping liquid includes silica (SiO
2).
5. lapping liquid transmission system as claimed in claim 1, wherein this shaking device is a pneumatic type electromagnetic shaker.
6. lapping liquid transmission system as claimed in claim 1, wherein this shaking device is attached on this transfer line.
7. lapping liquid transmission system as claimed in claim 1, wherein this transfer line utilizes this each buffer to support and be suspended on the ground.
8. lapping liquid transmission system as claimed in claim 1 wherein can be installed an observation window on this transfer line, adheres to situation in order to observe this grinding charging in this transfer line inside.
9. high viscosity fluid transmission system that installs shaking device additional includes:
One transfer line is in order to receive and to carry a high viscosity charging;
At least one material feeding mouth is arranged on this transfer line, in order to inject this high viscosity charging;
At least one water intake is arranged on this transfer line, in order to provide this high viscosity charging suitable flowability;
At least one shaking device is installed on this transfer line, in order to provide this transfer line suitable degree vibrating effect; And
A plurality of buffers are positioned at this transfer line bottom, in order to support this transfer line;
Wherein in this high viscosity fluid transmission course, this shaking device provides the vibrating effect of the suitable degree of this transfer line, so that the unlikely inwall that is attached to this transfer line of this high viscosity charging, this each buffer is with so that the unlikely decay of vibration energy simultaneously, and avoids the running of other equipment of vibration influence of this transfer line.
10. high viscosity fluid transmission system as claimed in claim 9, wherein this shaking device is a pneumatic type electromagnetic shaker.
11. high viscosity fluid transmission system as claimed in claim 9, wherein this shaking device is attached on this transfer line.
12. high viscosity fluid transmission system as claimed in claim 9, wherein this transfer line utilizes this each buffer to support and be suspended on the ground.
13. high viscosity fluid transmission system as claimed in claim 9 wherein can be installed an observation window on this transfer line, adheres to situation in order to observe this high viscosity charging in this transfer line inside.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA031072119A CN1530585A (en) | 2003-03-17 | 2003-03-17 | Fluid transmission system with shaker |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA031072119A CN1530585A (en) | 2003-03-17 | 2003-03-17 | Fluid transmission system with shaker |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1530585A true CN1530585A (en) | 2004-09-22 |
Family
ID=34282918
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA031072119A Pending CN1530585A (en) | 2003-03-17 | 2003-03-17 | Fluid transmission system with shaker |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1530585A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104370064A (en) * | 2014-11-10 | 2015-02-25 | 广东宏工物料自动化系统有限公司 | Viscosity material conveying device |
| CN109340568A (en) * | 2018-08-28 | 2019-02-15 | 昆明理工大学 | A kind of sediment transport through pipeline device |
-
2003
- 2003-03-17 CN CNA031072119A patent/CN1530585A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104370064A (en) * | 2014-11-10 | 2015-02-25 | 广东宏工物料自动化系统有限公司 | Viscosity material conveying device |
| CN109340568A (en) * | 2018-08-28 | 2019-02-15 | 昆明理工大学 | A kind of sediment transport through pipeline device |
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| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |