CN1526852A - Method and special apparatus for modifying inner surface of tubular workpiece - Google Patents
Method and special apparatus for modifying inner surface of tubular workpiece Download PDFInfo
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- CN1526852A CN1526852A CNA031050581A CN03105058A CN1526852A CN 1526852 A CN1526852 A CN 1526852A CN A031050581 A CNA031050581 A CN A031050581A CN 03105058 A CN03105058 A CN 03105058A CN 1526852 A CN1526852 A CN 1526852A
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- tubular workpiece
- electrode
- hollow edged
- tubular
- edged electrode
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32532—Electrodes
- H01J37/32541—Shape
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
- H05H1/4645—Radiofrequency discharges
- H05H1/466—Radiofrequency discharges using capacitive coupling means, e.g. electrodes
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- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Electromagnetism (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
The present invention is method and special apparatus for modifying inner surface of tubular workpiece. After the tubular workpiece is set inside one processing chamber and one inside columnar electrode and one outer tubular electrode of homogeneously distributed filaments are arranged inside the tubular workpiece, the two elextrodes are connected to a RF power supply so as to produce stable RF plasma flow inside the processing chamber. While one negative high voltage is applied between the tubular workpiece and the tubular electrode, the tubular electrode is made to rotate relatively to the tubular workpiece, so that ion is accelerated and implanted into the inner surface of the tubular workpiece. The present invention has no lattice shadow on the inner surface of the modified tubular workpiece and thus homogeneous inner surface modification, and is suitable for especially for modification of slender tubular workpiece.
Description
Technical field
The present invention relates to a kind of plasma source ion implantation technique of utilizing inner surface of tubular workpiece is carried out the method for modification, and the isolated plant of realizing this method.
Background technology
It is a kind of new material surface ion implantation technique that plasma source injects (PSII), as rolling up (1987) 4591-4596 page or leaf by J.R.Conrad at document J.Appl.Phys. (Applied Physics periodical) the 62nd, J.L.Radtke, R.A.Dodd, " Plasma source ion-implantation technique for surfacemodification of materials " literary composition that Frank J.Worzala and Ngoc C.Tran are write is introduced a kind of like this plasma source ion implantation technique.But at this moment the internal surface that directly injects tubular workpiece with the PSII technology still can not be used for handling the internal surface of fineness ratio less than 0.6 pipe fitting.For addressing this problem, (publication number is the applicant: proposed a kind of based on the method for PS II technology to modifying inner surface of tubular workpiece 1382829) in disclosed Chinese invention patent application on December 4th, 2002, in the method, tubular workpiece is placed Processing Room, and with a columnar electrode and a tubulose grid electrode from the inside to the outside coaxial arrangement in tubular workpiece, this two electrode and radio-frequency power supply are connected, thereby in Processing Room, produce an equally distributed vertically stable state radio-frequency plasma, between tubular workpiece and tubulose grid electrode, apply negative high voltage again, positive ion is quickened to be injected into inner surface of tubular workpiece; But exist the shade of untreated tubulose grid electrode at the internal surface of the tubular workpiece of modification, cause the inhomogeneous of modifying inner surface of tubular workpiece.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of plasma source ion implantation technique of utilizing to make tubular workpiece obtain the method for modifying inner surface relatively uniformly, and implements the isolated plant of this method.
Method for modifying inner surface of tubular workpiece, above-mentioned technical problem is to solve like this: this tubular workpiece is placed Processing Room, and a columnar electrode and can be allowed the hollow edged electrode of plasma diffusion, coaxial arrangement is in tubular workpiece from the inside to the outside, this two electrode and radio-frequency power supply are connected, thereby in Processing Room, produce an equally distributed vertically stable state radio-frequency plasma, described hollow edged electrode is made by circumferential equally distributed wire electrode, when between tubular workpiece and hollow edged electrode, applying negative high voltage, make between hollow edged electrode and the tubular workpiece to relatively rotate, thereby relatively equably acceleration of ions is injected into inner surface of tubular workpiece.
In aforesaid method, owing to adopt circumferential equally distributed wire electrode, like this, when hollow edged electrode and tubular workpiece relatively rotated, inner surface of tubular workpiece was with regard to the grid electrode shade that can not produce in the prior art to be occurred.
As a kind of improvement of aforesaid method, modifying inner surface of tubular workpiece is that segmentation is carried out, thereby for fineness ratio longer pipe shape workpiece, can carry out modification to second section internal surface again to behind one section modifying inner surface.
As another improvement of aforesaid method, relatively rotating by rotating tubular workpiece or hollow edged electrode between hollow edged electrode and the tubular workpiece realizes, especially when adopting the rotation tubular workpiece, can guarantee that the modification of inner surface of tubular workpiece is more even.
As another improvement of aforesaid method, the negative high voltage between tubular workpiece and the hollow edged electrode is pulse or negative direct current high voltage, or alternately applies pulse negative high voltage and negative direct current high voltage between tubular workpiece and hollow edged electrode.
For the isolated plant of realizing aforesaid method, above-mentioned technical problem is to solve like this: this device comprises a Processing Room, place columnar electrode and hollow edged electrode in this Processing Room, coaxial setting, connect the radio-frequency power supply of this two electrode and put on hollow edged electrode and tubular workpiece between negative high voltage power source, this hollow edged electrode is that circumferential equally distributed wire electrode constitutes, and this isolated plant also comprises a drive unit that tubular workpiece and hollow edged electrode are produced relative rotation.
Just as noted earlier, owing to adopted circumferential equally distributed wire electrode, set drive unit can make tubular workpiece and hollow edged electrode relatively rotate, thereby can make inner surface of tubular workpiece just the grid electrode shade can not occur.
As a kind of improvement of said apparatus, Processing Room is made of tubular workpiece itself, and columnar electrode and by hollow edged electrode and the coaxial setting of tubular workpiece that wire electrode constitutes like this, can make this device save Processing Room, thereby simplify this device.
As the further improvement of said apparatus, drive unit can be placed in the Processing Room, drive unit can also be connected with hollow edged electrode or tubular workpiece certainly.
In sum, the invention has the advantages that: the method for modifying inner surface of tubular workpiece of the present invention, by the hollow edged electrode of making by circumferential equally distributed wire electrode, with by a drive unit hollow edged electrode and tubular workpiece are relatively rotated, eliminated the aperture plate shade of the inner surface of tubular workpiece that is modified, make that the inner surface of tubular workpiece of modification is more even, improve inner surface of tubular workpiece corrosion-resisting wear-proof performance.
As long as process corresponding hollow edged electrode and columnar electrode, process the internal surface of tubular workpiece for the mode of long tube available segment processing, its separation surface can overlappingly be processed.
Description of drawings
Below in conjunction with the drawings and specific embodiments the present invention is described in further detail:
Fig. 1 is the schematic diagram of prior art to the modifying inner surface of tubular workpiece method
Fig. 2 is the synoptic diagram of expression modifying inner surface of tubular workpiece method of the present invention and isolated plant thereof
Fig. 3 is the x-ray photoelectron spectroscopy figure of N1s
Fig. 4 is the x-ray photoelectron spectroscopy figure of Ti2p
The surface topography that Fig. 5 is arrived by the atomic force microscope observation of growth TiN on the Si base at the aperture plate shade place of blocking
Fig. 6 is the surface topography that is not arrived by the atomic force microscope observation of growth TiN on the Si base at the aperture plate place of blocking
The accompanying drawing sign
1, plasma body 2, the negative high voltage pulse power 3,
4, tubular workpiece 5, radio-frequency power supply 6, stopping condenser
7, fine setting needle-valve 8, columnar electrode 9, hollow edged electrode
10, Processing Room 11, vacuum extractor 12, motor
14, argon bottle 15, nitrogengas cylinder
Embodiment
In order better to understand the improvement that the present invention does with respect to prior art, (publication number is: the plasma source ion implantation technique of utilizing 1382829) is done an explanation to the method for modifying inner surface of tubular workpiece to the Chinese invention patent application mentioned in the background technology of front earlier.Fig. 1 is the former reason of above-mentioned prior art to the modifying inner surface of tubular workpiece method.At first tubular workpiece to be processed 4 is placed in the Processing Room 10, and a columnar electrode 8 is placed the center of tubular workpiece 4, columnar electrode 8 and 4 of tubular workpieces be provided with a tubulose grid electrode 9 that constitutes by metal grid mesh ', thereby columnar electrode 8, tubulose grid electrode 9 ' and tubular workpiece 4 coaxial arrangement from inside to outside.This tubulose grid electrode 9 ' be connected with a radio-frequency power supply 5 with columnar electrode 8, wherein, columnar electrode 8 is connected with the power utmost point of radio-frequency power supply 5 by a stopping condenser 6, and tubulose grid electrode 9 ' be connected with ground 3, thereby tubulose grid electrode 9 ' and columnar electrode 8 between radio frequency discharge, produce an equally distributed vertically plasma body 1.In addition, the negative pole of negative high voltage power source 2 is connected with tubular workpiece 4, the plus earth of negative high voltage 2, thus positive ion is quickened to be injected into the internal surface of tubular workpiece 4.Because tubulose grid electrode 9 ' existence, will on the internal surface of tubular workpiece 4, form the aperture plate shade, thereby cause the inhomogeneous of modifying inner surface of tubular workpiece.
For solving the problem of non-uniform of this modifying inner surface of tubular workpiece, in the method for modifying inner surface of tubular workpiece of the present invention, hollow edged electrode 9 with the tubulose grid electrode 9 of prior art among Fig. 1 ' should constitute for circumferential equally distributed wire electrode as shown in Figure 2, and between tubular workpiece 4 and hollow edged electrode 9, put add negative high voltage in, drive hollow edged electrode 9 or tubular workpiece 4 with motor 12, make between hollow edged electrode 9 and the tubular workpiece 4 to relatively rotate.Be that tubular workpiece 4 is static shown in Fig. 2, motor 12 drives hollow edged electrode 9 and rotates; But also can be that hollow edged electrode 9 does not rotate, rotate and drive tubular workpiece 4 by motor 12.
Mainly comprise a Processing Room 10, columnar electrode 8, hollow edged electrode 9, motor 12, radio-frequency power supply 5, negative high voltage power source 2, vacuum extractor 11 and working gas source 14 and 15 in the isolated plant of modifying inner surface of tubular workpiece method of the present invention shown in Figure 2.According to modifying inner surface of tubular workpiece method of the present invention, at first tubular workpiece 4 is placed Processing Room 10, and columnar electrode 8 and the hollow edged electrode 9 and the coaxial from inside to outside setting of tubular workpiece 4 that will make by titanium, aluminium or chromium usually.By vacuum extractor 11 Processing Room 10 is vacuumized, for example be evacuated to 10
-3Pa; (2) then charge into working gas in this Processing Room 10, the most frequently used working gas is the mixed gas of nitrogen, argon gas or their formations.Can change the size of air pressure and airshed by fine setting needle-valve 7, make the air pressure of working gas maintain 10Pa-90Pa; Then, connect radio-frequency power supply 5, its radio frequency power is chosen as between 100-200 watt usually, thereby produces an equally distributed vertically stable state radio-frequency plasma 1 in Processing Room; This plasma body 1 can spread to inner surface of tubular workpiece by hollow edged electrode, and diffusion plasma body 1 is uniformly vertically, and this is uniform with regard to the dosage that has guaranteed to incide tubular workpiece 4 internal surfaces; At this moment, connect the power supply of motor 12, control hollow edged electrode 9 slowly rotates, and tubular workpiece 4 is connected with the negative pole of negative high voltage power source 2, this negative high voltage voltage is pulse negative high voltage voltage, as 60 hertz of-10 kilovolts, frequency, generally be negative several ten thousand volts, also can be the negative direct current high voltage power supply, as-2000 volts negative direct current high voltage power supply, generally be that negative hundreds of is to negative several kilovolts.Thereby between the internal surface of hollow edged electrode 9 and tubular workpiece 4, promptly form even radial electric field, positive ion is quickened to be injected into tubular workpiece 4 internal surfaces acceleration of ions.After machining, can close high-voltage power supply, radio-frequency power supply, take out tubular workpiece.
For tubular workpiece than columnar electrode 8 and hollow edged electrode 9 length, then can adopt the staging treating mode, for example earlier the half section internal surface in tubular workpiece 4 left sides be carried out modification, and then modification is carried out for half section in the right side, its interface can overlappingly be processed, and also can be divided into three sections, four sections processing according to different situations.
Certainly, in above-mentioned modifying process, also can directly tubular workpiece itself be used as Processing Room, thereby this isolated plant can save Processing Room.In addition, the drive unit that motor is such places outside the Processing Room usually, if but with no oily motor, also can be placed on outside the Processing Room.
At last, to analyzing with the internal surface of the inventive method modification tubular workpiece.
(1) x-ray photoelectron of N1s and Ti2p can be seen Fig. 3 and Fig. 4 respectively by spectrogram, and the N1s peak is a combined at 396.6eV, and Ti-N associative key bound energy is 454eV, and Ti-O associative key bound energy is 458.5eV, and the peak of 2p3/2 is at 458.05eV among the figure, so TiO
2Composition is more, and this mainly is because inner surface of tubular workpiece is oxidized, but we have seen the existence of TiN phase, and this is identical with the generation composition that discharges with grid electrode RF.
(2) in the prior art, when the less or plasma density of distance is lower between grid electrode 9 and the tubular workpiece 4, because ion implantation translational motion can be seen tangible aperture plate shade at inner surface of tubular workpiece, Fig. 5 and Fig. 6 are illustrated respectively in that the epontic TiN film of same Si is sheltered from by aperture plate and are not blocked the surface topography that the atomic force microscope in dwelling is seen by aperture plate, obviously, grain growing shown in Figure 5 is lax, grain growing shown in Figure 6 is tight, and the ununiformity of this surface filming certainly will cause the ununiformity of surface chemistry performance and mechanical property.And the present invention with the piped aperture plate change do an electrode and make it to rotate after, the tubular workpiece woman surface topography of processing is then evenly closely.
More than experiment and analytical results show: the method for a kind of modifying inner surface of tubular workpiece provided by the invention, no matter process the tubular workpiece of what shape, as long as process corresponding hollow edged electrode and columnar electrode, just can really thoroughly realize inner surface of tubular workpiece modification uniformly and effectively.
Claims (8)
1, a kind of method of modifying inner surface of tubular workpiece, in the method, this tubular workpiece is placed a Processing Room, and a columnar electrode and can be allowed the hollow edged electrode of plasma diffusion, coaxial arrangement is in this tubular workpiece from the inside to the outside, this two electrode and radio-frequency power supply are connected, thereby in Processing Room, produce an equally distributed vertically stable state radio-frequency plasma, it is characterized in that: described hollow edged electrode is made by circumferential equally distributed wire electrode, when between tubular workpiece and hollow edged electrode, applying negative high voltage, make between hollow edged electrode and the tubular workpiece to relatively rotate, thereby relatively equably acceleration of ions is injected into inner surface of tubular workpiece.
2, according to the method for the described modifying inner surface of tubular workpiece of claim 1, it is characterized in that: described modifying inner surface of tubular workpiece is that segmentation is carried out.
3, according to the method for the described modifying inner surface of tubular workpiece of claim 1, it is characterized in that: relatively rotating by rotating tubular workpiece between described hollow edged electrode and the tubular workpiece realizes.
4, according to the method for each described modifying inner surface of tubular workpiece in the claim 1 to 3, its feature also is: the negative high voltage between described tubular workpiece and the hollow edged electrode is pulse or negative direct current high voltage, or alternately applies pulse negative high voltage and negative direct current high voltage between tubular workpiece and hollow edged electrode.
5, a kind of isolated plant of realizing the described modifying inner surface of tubular workpiece method of claim 1, this device comprises a Processing Room, place columnar electrode and hollow edged electrode in this Processing Room, coaxial setting, connect the radio-frequency power supply of this two electrode and put on hollow edged electrode and tubular workpiece between negative high voltage power source, it is characterized in that: described hollow edged electrode is made of circumferential equally distributed wire electrode, and this device also comprises a drive unit that tubular workpiece and hollow edged electrode are produced relative rotation.
6, according to the isolated plant of the described realization modifying inner surface of tubular workpiece of claim 5 method, its feature also is: described Processing Room is made of tubular workpiece itself, columnar electrode and the hollow edged electrode and the coaxial setting of tubular workpiece that are made of wire electrode.
7, according to the isolated plant of the described modifying inner surface of tubular workpiece method of claim 5, its feature also is: described drive unit is positioned at Processing Room.
8, according to the isolated plant of each described modifying inner surface of tubular workpiece method in the claim 5 to 7, its feature also is: described drive unit drives with hollow edged electrode or tubular workpiece and is connected.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031050581A CN1209491C (en) | 2003-03-04 | 2003-03-04 | Method and special apparatus for modifying inner surface of tubular workpiece |
| AU2003303989A AU2003303989A1 (en) | 2003-03-04 | 2003-11-10 | A method and special apparatus for modifying the internal surface of tubular workpiece |
| CNB200380110083XA CN100422382C (en) | 2003-03-04 | 2003-11-10 | Tubular workpiece internal surface modifying method and its special-purpose device |
| PCT/CN2003/000947 WO2004079040A1 (en) | 2003-03-04 | 2003-11-10 | A method and special apparatus for modifying the internal surface of tubular workpiece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031050581A CN1209491C (en) | 2003-03-04 | 2003-03-04 | Method and special apparatus for modifying inner surface of tubular workpiece |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1526852A true CN1526852A (en) | 2004-09-08 |
| CN1209491C CN1209491C (en) | 2005-07-06 |
Family
ID=32932354
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031050581A Expired - Fee Related CN1209491C (en) | 2003-03-04 | 2003-03-04 | Method and special apparatus for modifying inner surface of tubular workpiece |
| CNB200380110083XA Expired - Fee Related CN100422382C (en) | 2003-03-04 | 2003-11-10 | Tubular workpiece internal surface modifying method and its special-purpose device |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB200380110083XA Expired - Fee Related CN100422382C (en) | 2003-03-04 | 2003-11-10 | Tubular workpiece internal surface modifying method and its special-purpose device |
Country Status (3)
| Country | Link |
|---|---|
| CN (2) | CN1209491C (en) |
| AU (1) | AU2003303989A1 (en) |
| WO (1) | WO2004079040A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560403A (en) * | 2010-12-31 | 2012-07-11 | 中央民族大学 | Method for modifying inner surface of bottle-shaped workpiece |
| CN106973481A (en) * | 2017-03-10 | 2017-07-21 | 浙江理工大学 | A kind of atmospheric pressure plasma system for tubular material surface continuous modification |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7626135B2 (en) * | 2006-05-10 | 2009-12-01 | Sub-One Technology, Inc. | Electrode systems and methods of using electrodes |
| CN102149247B (en) * | 2011-04-08 | 2012-10-10 | 东南大学 | Device and method for generating low-energy high-density plasma by multi-level ionization |
| CN102496556A (en) * | 2011-12-30 | 2012-06-13 | 邱永红 | Mass analyzer of annular cylindrical electric field |
| CN104108053B (en) * | 2014-06-19 | 2016-04-20 | 华中科技大学 | Large complicated metal surface plasma body and pulsed discharge composite polishing processing method |
| CN108342896B (en) * | 2018-02-13 | 2019-12-31 | 南通大学 | Plasma treatment device for inner and outer surfaces of tubular fabric and using method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05253680A (en) * | 1992-03-12 | 1993-10-05 | Hitachi Ltd | Method and apparatus for modifying tube inside surface |
| GB9924999D0 (en) * | 1999-10-22 | 1999-12-22 | Aea Technology Plc | Reactor for the plasma treatment of gases |
| CN1137284C (en) * | 2001-04-27 | 2004-02-04 | 中国科学院物理研究所 | Method for modifying inner surface of tubular workpiece |
| CN1180124C (en) * | 2002-09-30 | 2004-12-15 | 哈尔滨工业大学 | Tube type work piece inner surface beam ion implantation installation |
| CN2577436Y (en) * | 2002-09-30 | 2003-10-01 | 哈尔滨工业大学 | Apparatus for injecting ions onto inner surface of tubular workpiece using high-voltage glow-discharge |
-
2003
- 2003-03-04 CN CNB031050581A patent/CN1209491C/en not_active Expired - Fee Related
- 2003-11-10 CN CNB200380110083XA patent/CN100422382C/en not_active Expired - Fee Related
- 2003-11-10 AU AU2003303989A patent/AU2003303989A1/en not_active Abandoned
- 2003-11-10 WO PCT/CN2003/000947 patent/WO2004079040A1/en not_active Application Discontinuation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102560403A (en) * | 2010-12-31 | 2012-07-11 | 中央民族大学 | Method for modifying inner surface of bottle-shaped workpiece |
| CN106973481A (en) * | 2017-03-10 | 2017-07-21 | 浙江理工大学 | A kind of atmospheric pressure plasma system for tubular material surface continuous modification |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2003303989A1 (en) | 2004-09-28 |
| CN1209491C (en) | 2005-07-06 |
| WO2004079040A1 (en) | 2004-09-16 |
| CN100422382C (en) | 2008-10-01 |
| CN1756859A (en) | 2006-04-05 |
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