CN1515917A - Optical filter - Google Patents
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- CN1515917A CN1515917A CNA031235298A CN03123529A CN1515917A CN 1515917 A CN1515917 A CN 1515917A CN A031235298 A CNA031235298 A CN A031235298A CN 03123529 A CN03123529 A CN 03123529A CN 1515917 A CN1515917 A CN 1515917A
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- fiber
- light filter
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
An optical filter comprises a fiber holder (10) having plane surface, on which a spiral groove (22) is; and a optical fiber (20) fixed in said spiral groove (22) and having refractive index modulated periodically.
Description
The application is to be on July 7th, 1998 applying date, is entitled as the dividing an application of application for a patent for invention 98115691.6 of " manufacture method of light filter and equipment, light filter, fiber bracket and phase place cover ".
Technical field
The present invention relates to a kind of light filter that constitutes by the Bragg grating that is formed at inside of optical fibre, be used to make the method and apparatus of such light filter, and the fiber bracket and the phase place cover (phase mask) that are used for described manufacture method.
Background technology
Bragg grating in the fiber also is called for short and makes fibre bragg grating or FBG, can be used as light filter in the optical communication field, to realize the purpose of wavelength-division multiplex and frequency dispersion compensation.No. 5367588 United States Patent (USP) has been described a kind of method of making Bragg grating in the fiber, and this method is to shine a kind of light-sensitive optical fibre with ultraviolet light by a phase grating cover.Described phase grating cover is made of a kind of quartz glass plate, is transparent to ultraviolet light, and has the periodic undulations structure of parallel fluted at the one side surface.Described groove line for example is the parallel channel with rectangular cross section.The diffraction that produces in the described phase place cover was modulated outgoing ultraviolet light intensity with the cycle of being determined by grating spacing or pitch.
Described light-sensitive optical fibre and described phase grating cover on the vertical direction of described groove line on contact or approximate the contact.The irradiation of ultraviolet light changes the refractive index of fibre core, thereby the refractive index in the fibre core has been added modulation signature with the cycle identical with described phase grating cover.This index modulation has promptly constituted Bragg grating.
Pitch by the control phase grating cover can form the linear frequency modulation Bragg grating.By regulating the ultraviolet light intensity, can form a kind of toe (apodized) Bragg grating of cutting along fiber length.
Described phase grating cover can be made by the active-ion-etch of fused quartz substrate, and for example (No.6) (on March 18th, 1993) the 567th page is described such for Electronics Letters, Vol.29 as " electronics communication " the 29th the 6th phase of volume.
As everyone knows, the performance parameter of light filter depends on the length of modulated grating such as the top flatness of reflection bandwidth and reflectance spectrum.When Bragg grating in the fiber was used for the frequency dispersion compensation, reflectance bandwidth ax λ for example was determined by following formula, and in the formula, L is the length of Bragg grating, and c is the light velocity, and D is the frequency dispersion value:
Δλ＝2L/(cD)
This formula shows that for given frequency dispersion D, reflectance bandwidth ax λ is directly proportional with grating length L.
But it is very difficult making the interior Bragg grating of long fiber with the phase grating cover of type described above, because because phase grating cover itself will be made in vacuum chamber, its size is exactly limited.Can adopt a kind of substep reprocessing method, that is, make fiber pass through described phase grating cover.But this method is time-consuming and go on foot one and to need between next step to aim at very accurately.Because above-mentioned reason, be about most in 100 millimeters (100mm) with the length restriction of Bragg grating in the fiber of traditional phase grating cover manufacturing.
Therefore, the restricted length of conventional phase grating cover just becomes the obstacle that obtains the wide and filter properties that other is good of width reflection belt.Restricted length has also hindered carries out effective side lobe reduction to Bragg grating in the fiber.
Use another obstacle of Bragg grating in the long fiber to be, the fiber that needs to contain grating encapsulates in some way, is not subjected to the influence of temperature variation and other external factor with the protection grating.Traditional method for packing can not be applied to the big fiber of length easily.
Summary of the invention
Therefore, an object of the present invention is to make a kind of light filter, it has length Bragg grating in the fiber more than 100 millimeters.
Another object of the present invention provides the equipment of making this light filter.
Another object of the present invention provides a kind of fiber bracket that can be used for the manufacturing of this light filter.
Another object of the present invention provides a kind of phase grating cover that can be used for the manufacturing of this light filter.
Another object of the present invention is to make a kind of light filter with Bragg grating in the pinpoint accuracy fiber.
Another object of the present invention is to make a kind of light filter with length greater than 100 millimeters side lobe reduction Bragg grating.
Another object of the present invention is to make a kind of light filter with length greater than 100 millimeters linear frequency modulation Bragg grating.
Another object of the present invention provides the light filter that a kind of quilt effectively encapsulates.
Another object of the present invention provides a kind of by the light filter of compact package.
Another object of the present invention provides a kind of by the light filter of good protection.
The method of a kind of light filter of manufacturing of the present invention comprises the following steps:
Optical fiber with photosensitive fibre core is fixed in the snail structure of a fiber bracket upper surface;
One phase place cover is placed in parallel on the upper surface of described fiber bracket, and the lower surface with spiral diffraction grating of described phase place cover is over against described optical fiber; With
See through described phase place cover with ultraviolet light and shine described optical fiber, thereby obtain Bragg grating in the fiber.
Irradiating step is preferably carried out with ultraviolet light beam radial scan phase place cover simultaneously by rotating described fiber bracket and phase place cover.Described scanning is synchronized with each other with rotation, so that ultraviolet light beam can be followed the trail of the helical structure of optical fiber.
Fiber bracket of the present invention has the spiral fluted flat board by one and constitutes, and described helicla flute is used for fixing light-sensitive optical fibre.
Phase place cover of the present invention is made of a flat board to UV transparent, has periodically concave point spiral grating in one surface.
The equipment that is used for making light filter of the present invention comprises universal stage and optical system that sees through phase place cover irradiation light-sensitive optical fibre with ultraviolet light of fiber bracket of the present invention, phase place cover of the present invention, supporting fiber bracket and phase place cover.
Light filter of the present invention is made of fiber bracket of the present invention and optical fiber.Described optical fiber is fixed in the described helicla flute, and has the refractive index through periodic modulation.
Use method of the present invention, utilize the fiber bracket and the phase place cover of five cun CD patterns, can factory length in four meters the fiber Bragg grating.Described fiber bracket and phase place cover can utilize and be used for the legacy equipment of processing semiconductor wafer and make.
Owing to use continuously manufacture method rather than substep repetition methods, can produce Bragg grating in the accurate fiber.
Change the dosage of the ultraviolet light of irradiation optical fiber by the zones of different on fiber bracket upper surface, can form Bragg grating in a kind of side lobe reduction fiber.If scan described phase place cover with ultraviolet light beam, the dosage of ultraviolet light can obtain changing by using a light-pulse generator and changing pulse repetition rate.In addition, can use a kind of variable attenuator, perhaps change the rotational speed of fiber bracket.
By the phase place cover is divided into concentric several regions, and change the concave point spacing of respectively distinguishing in the spiral diffraction grating, can make Bragg grating in the linear frequency modulation fiber.
Bragg grating can be packaged between fiber bracket of the present invention and the lid effectively in the fiber.This lid also can have helicla flute.
Described lid can form like this: after the Bragg grating, cover a protective seam on the fiber bracket in forming fiber.The fiber bracket then can be made like this: needle drawing on an on-chip polymeric layer, thus on this polymeric layer, form a helicla flute.In addition, a polymeric layer needle drawing can be formed a fiber mould, around this fiber mould, cover the one layer of polymeric protective seam then, remove this fiber mould at last, thereby on described polymer protective layer, form a helicla flute.On described substrate, can also cover a polymkeric substance protection bottom.Use said method, can produce compact, the good filter module of protection.
Description of drawings
In the accompanying drawings:
Fig. 1 has schematically illustrated the equipment that is used for making a kind of light filter of the present invention of implementing;
Fig. 2 A is the planimetric map of the fiber bracket among Fig. 1;
Fig. 2 B is the fiber bracket among Fig. 1 and the sectional view of optical fiber;
Fig. 3 A is the sectional view of an amplification, shows helicla flute among Fig. 1 and a kind of optimum structure of optical fiber;
Fig. 3 B is the sectional view of an amplification, shows the helicla flute among Fig. 1 and the another kind of optimum structure of optical fiber;
Fig. 4 is the planimetric map of the phase place cover among Fig. 1;
Fig. 5 A is an amplification view, shows the part phase place cover among Fig. 4;
Fig. 5 B passes the sectional view that is shown in the concave point among Fig. 5 A;
Fig. 6 is the amplification of Fig. 5 A, is used for illustrating the size of optical fiber and concave point;
Fig. 7 A is the partial plan layout with phase place cover of linear frequency modulation spiral grating;
Fig. 7 B is the sectional view of the linear frequency modulation spiral grating among Fig. 7 A;
Fig. 8 is a skeleton view, is used for illustrating the method for manufacturing light filter of the present invention;
Fig. 9 has schematically illustrated a kind of enforcement equipment of the present invention that is used for making the side lobe reduction light filter;
Figure 10 is the planimetric map of the fiber bracket among Fig. 9;
Figure 11 is a curve map, is used for pulse repetition rate in key diagram 9 apparatus shown;
Figure 12 is the curve map of a diagram with the apodization curve of the light filter of the device fabrication among Fig. 9.
Figure 13 has schematically illustrated another and has been used for making the enforcement equipment of the present invention of side lobe reduction light filter;
Figure 14 is a curve map, is used for illustrating the rotational speed of universal stage in the equipment of Figure 13;
Figure 15 A is the planimetric map that can be used to encapsulate the lid of light filter of the present invention;
Figure 15 B is the sectional view of the lid among Figure 15 A;
Figure 16 is a sectional view, is used for illustrating the encapsulation that the lid that utilizes among Figure 15 A carries out light filter;
Figure 17 A is another planimetric map that can be used to encapsulate the lid of light filter of the present invention;
Figure 17 B is the sectional view of the lid among Figure 17 A;
Figure 18 is a sectional view, is used for illustrating the another kind of method of making the lid that is used for light filter of the present invention;
Figure 19 A, 20A, 21A, 22A and 23A are skeleton view, are used for illustrating each step of the new method of making light filter;
Figure 19 B, 20B, 21B, 22B and 23B are the sectional views of each step shown in Figure 19 A, 20A, 21A, 22A and the 23A;
Figure 24 A, 25A, 26A, 27A, 28A, 29A and 30A are skeleton view, are used for illustrating each step of another new method of making light filter;
Figure 24 B, 25B, 26B, 27B, 28B, 29B and 30B are the sectional views of each step shown in Figure 24 A, 25A, 26A, 27A, 28A, 29A and the 30A;
Figure 31 A is an amplification profile, is used for the optimum shape of the fiber mould among the key diagram 27B;
Figure 31 B is an amplification profile, is used for the shape that fiber mould among the key diagram 27B should not adopt;
Figure 32 A, 33A, 34A, 35A, 36A, 37A, 38A and 39A are skeleton view, are used for illustrating each step of another new method of making light filter;
Figure 32 B, 33B, 34B, 35B, 36B, 37B, 38B and 39B are the sectional views of each step shown in Figure 32 A, 33A, 34A, 35A, 36A, 37A, 38A and the 39A;
Figure 40 A is the planimetric map of the fiber bracket of another kind of form of the present invention;
Figure 40 B is to use the skeleton view of a filter module of the fiber bracket among Figure 40 A.
Embodiment
Below with reference to appended illustrative embodiments various embodiments of the present invention are described.In different embodiment, similar part will not done the description that repeats with identical label indication.
Fig. 1 shows the first kind of embodiment that is used for making the equipment of light filter of the present invention.Its critical piece is a fiber bracket 10, phase place cover 12, universal stage 14, an optical system 16 and a scanning monitor 18.Light-sensitive optical fibre 20 is placed in the helicla flute 22 of fiber bracket 10 upper surface 10a.Fiber bracket 10 is placed on the universal stage 14,12 tops that are fixed on fiber bracket 10 of phase place cover.Optical system 16 is sent a branch of ultraviolet light, sees through phase place cover 12 irradiation light-sensitive optical fibres 20.Scanning monitor 18 is being controlled optical system 16, so that when universal stage rotates, ultraviolet light beam scans described light-sensitive optical fibre 20.
The upper surface 10a of fiber bracket 10 is flat.Although leave certain space between fiber bracket 10 and the phase place cover 12 in the accompanying drawings, as will be described, the placement of phase place cover 12 also can contact with the upper surface 10a of fiber bracket 10.No matter under what situation, phase place cover 12 all will make the lower surface 12a of phase place cover 12 parallel with the upper surface 10a of fiber bracket 10 with respect to the fixing of fiber bracket 10.
The turning axle 24 of universal stage 14 is perpendicular to the upper surface 10a of fiber bracket 10.Universal stage 14 is made of a rotating disk 26 and a turning axle controller 28 of placing fiber bracket 10 on it, and the latter makes rotating disk 26 around turning axle 24 rotations.Turning axle controller 28 for example is made of a motor and the driving circuit (not shown) that is attached thereto.
Pass the place of the upper surface 26a of rotating disk 26 at turning axle 24, rotating disk 26 preferably has a for example outstanding wheel hub of cylindrical shape, the hole of an analogous shape on the lower surface of the latter and fiber bracket 10 is meshed, and aligns the center to guarantee fiber bracket 10 and phase place cover 12 exactly with turning axle 24.When turning axle controller 28 rotated rotating disk 26, fiber bracket 10 and phase place cover 12 were also around turning axle 24 rotations.
Scanning monitor 18 moves the mobile unit 33 that is made of catoptron 34 and cylindrical lens 36 in the direction of the arrow 40 of the direction of propagation that is parallel to the ultraviolet light that is sent by lasing light emitter 30.Whereby, the ultraviolet light beam 38 of ejaculation optical system 16 just scans the surface of phase place cover 12 diametrically.Coordinate the rotation of scanning and universal stage 14 by the master controller (not shown) of while gated sweep controller 18 and turning axle controller 28.The diffraction of 12 pairs of ultraviolet light beams 38 of phase place cover produces a diffracted beam 42, follows the trail of the spiral path of light-sensitive optical fibre 20 on fiber bracket 10 by the latter.Like this, this diffracted beam 42 has just formed Bragg grating in the fibre core of light-sensitive optical fibre 20.
Fig. 2 A shows the planimetric map of the upper surface 10a of fiber bracket 10.Fig. 2 B shows along the sectional view of I-I one line among Fig. 2 A.Also show light-sensitive optical fibre 20 in this two width of cloth accompanying drawing.
For clarity, the helix pitch of the spiral path of the helicla flute 22 among Fig. 2 A and Fig. 2 B is bigger, this spiral path near the edge of fiber bracket 10 a bit extend to always near the center a bit.For simplicity, suppose that whole spiral path is all scanned by optical system 16.In fact, optical system does not need to scan whole spiral path, and being scanned part and can distributing compactlyer of spiral path, so that the radius-of-curvature of spiral is not very greatly being scanned that part changes.Be scanned the best outer of part near fiber bracket 10.In addition, although the helicla flute 22 that is shown among Fig. 2 B has semicircular transversal section, this transversal section also can be other suitable shape rectangle or any.
Fig. 3 A and Fig. 3 B are the enlarged drawings in the C district among Fig. 2 B, show two kinds of possible rectangular cross sections of helicla flute 22.In two width of cloth figure, the width W of helicla flute 22 is identical with the diameter of light-sensitive optical fibre 20 basically.
In Fig. 3 A, the depth D of helicla flute 22 is substantially equal to half of diameter of light-sensitive optical fibre 20.For fixing light-sensitive optical fibre 20, helicla flute 22 is such degree of depth at least.The first half of light-sensitive optical fibre is projected into more than the upper surface 10a of fiber bracket 10, therefore, if use such helicla flute, between fiber bracket 10 and phase place cover 12, a bed course should be arranged, to prevent the damage to light-sensitive optical fibre 20.
In Fig. 3 B, the depth D of helicla flute 22 is greater than the diameter of light-sensitive optical fibre 20.Such helicla flute allows phase place cover 12 directly to contact with fiber bracket 10, and can not damage light-sensitive optical fibre 20.
Consider the coherent length of diffracted beam 42, phase place cover 12 lower surface 12a should be about 60 microns (60 μ m) to the distance of the fibre core of light-sensitive optical fibre 20.If fibre diameter for example is 125 microns, the width W of helicla flute 22 just should be 120 to 130 microns, and its depth D then should be about 60 to 130 microns.
Fig. 4 shows the planimetric map of the lower surface 12a of phase place cover 12.Phase place cover 12 for example is to be five cun disk with fiber bracket 10 the same diameters.As mentioned above, for phase place cover 12, quartz glass is suitable material.But other the material to UV transparent such as calcium fluoride or magnesium fluoride, all can be used.
Concave point on the lower surface 12a of phase place cover 12 constitutes spiral diffraction grating 44, and when phase place cover 12 was placed on the fiber bracket 10, described spiral diffraction grating was aimed at the helicla flute 22 on the fiber bracket 10 upper surface 10a.Spiral diffraction grating 44 around the center 46 of phase place cover 12 around.The described concave point periodic intervals of being separated by occurs, and the distance of its decentering 46 strengthens gradually.
Fig. 5 A shows the enlarged drawing in the C district among Fig. 4.Fig. 5 B then shows along the sectional view of the J-J curve among Fig. 5 A.The shape approximation that is shown in the concave point 48 among Fig. 5 A and Fig. 5 B is the right angle wedge shape, and its inner rim and outer rim (trend) are consistent with the path that spiral diffraction grating 44 is followed.If the inner edge length of certain concave point 48 is Λ
a, outer rim length is Λ
b, Λ then
aBe slightly smaller than Λ
bSpacing between the adjacent concave point 48 also is that outer rim is greater than inner edge.
Fig. 6 is shown in the part amplification view that being stacked among Fig. 5 A is fixed on the phase place cover 12 on the light-sensitive optical fibre 20 in the fiber bracket 10, and the J-J curve among the center of described light-sensitive optical fibre 20 and Fig. 5 A coincides.Originally illustrate when fiber bracket 10 and phase place cover 12 correct relative position relations to punctual spiral diffraction grating 44 and light-sensitive optical fibre 20.Light-sensitive optical fibre 20 comprises fibre core 20a and covering 20b, and the principal ingredient in these two parts all is silicon dioxide (SiO
2) and germanium dioxide (GeO
2).Adjust this two kinds of components in proportions, so that the refractive index of the refractive index ratio covering 20b of fibre core 20a is bigger.The diameter W of fibre core 20a
iIt is 10 microns.Whole fiber comprises fibre core 20a and covering 20b, its diameter W
2Be about 110 to 130 microns.
The outer rim length measured (Λ along fibre core 20a of concave point 48
1) and its inner edge length measured (Λ along fibre core 20a
2) between difference, be to determine by the ratio of the radius-of-curvature of core diameter and spiral.If helicla flute 22 is limited in a zone near the edge of fiber bracket 10, and spiral diffraction grating 44 also is positioned at the zone near phase place cover 12 edges similarly, and the spiral radius-of-curvature here is near 2.5 cun (about 64mm), so, and described Λ
1And Λ
2Between difference only have an appointment 0.015%.This species diversity is very little, can remarkable influence not arranged to the Bragg grating of making in fibre core.Except can obtaining bigger total length, the Bragg grating of producing with phase place cover of the present invention 12 is difficult to distinguish its difference basically with the Bragg grating with traditional phase place cover production.
By changing the spacing of concave point 48, can make chirped FM grating.Chirped FM grating can be widened the reflective band of light filter.Fig. 7 A shows the partial plan of the phase place cover 12 with linear frequency modulation spiral diffraction grating 44a.Fig. 7 B is the sectional view along the K-K curve among Fig. 7 A.
The part that is shown among Fig. 7 A and Fig. 7 B of chirped FM grating 44a is divided into three regional 50a, 50b and 50c.At the first district 50a, the spacing of concave point 48 is Λ
1, be Λ in second district
2, be Λ in the 3rd district
3, and Λ
1＜Λ
2＜Λ
3Pitch increases along the grating length direction like this step by step.Pitch continually varying chirped FM grating also can create.
Utilize the process of the said equipment manufacturing light filter as follows.
Suitable light-sensitive optical fibre 20 can be the SMF28 optical fiber that the Corning incorporated company of New York Corning makes.The fibre core and the covering of this optical fiber are encapsulated in the protective seam.The first step is that the instrument that utilizes instrument for example to be called the fiber stripper removes this protective seam, perhaps this optical fiber is immersed ethylene dichloride and removes this protective seam.
Go the light-sensitive optical fibre 20 of layer to be placed in the helicla flute 22 of fiber bracket 10 upper surface 10a, so that light-sensitive optical fibre 20 equally is fixed as same spiral layout with helicla flute 22, fiber bracket 10 and phase place cover 12 are aimed at mutually simultaneously.Described alignment procedures can be carried out on the platform by fiber bracket 10 and phase place cover 12 are placed on independently.The relative position of described platform can be adjusted at three orthogonal axes and a turning axle direction, sees through phase place cover 12 observation concave point 48 and fibers 20 with microscope simultaneously.When fiber bracket 10 and phase place cover 12 exactly mutually on time, utilize for example anchor clamps or clamp, perhaps the gas in space in the middle of it is extracted out, thereby they is fixed at this aligned position with vacuum cup.As mentioned above, can between fiber bracket 10 and phase place cover 12, place a bed course, with protection light-sensitive optical fibre 20.
Then, fiber bracket 10 and phase place cover 12 are placed on the rotating disk 26 of universal stage 14 as a single unit.Scanning monitor 18 and turning axle controller 28 move mobile unit 33 and rotating disk 26 to one initial positions, begin scanning in this position.After arriving this initial position and excitation laser source 30, turning axle controller 28 drives rotating disk 26 with a constant rotational speed, and fiber bracket 10 and phase place cover 12 are rotated along direction shown in the arrow among Fig. 8 52.18 of scanning monitors move mobile unit 33 with constant space rate direction shown in the arrow 40 in Fig. 8.These two kinds motions are coordinated mutually, make ultraviolet light beam 38 can follow the trail of the spiral pattern that phase place cover 12 lower surface 12a go up concave point 48, and make that diffracted beam 42 can be along spiral path from spiral outer end 54 to the direction of its inner 56 that follow the trail of light-sensitive optical fibre 20 from.
The repetition frequency of the pulse of sending with respect to lasing light emitter 30, described rotating speed is enough low, makes all points on the tracking path of ultraviolet light beam 38 all accept the luminous energy of basic equal dose.Concave point 48 produces the diffractogram of a rule, and this diffractogram has the strong and low light level of the high light of alternately arranging and distinguishes by force.Thereby the dosage of the luminous energy of being sent by diffracted beam 42 just is the cyclical variation of rule along the length direction of light-sensitive optical fibre 20.
The irradiation of ultraviolet light changes the refractive index of the fibre core 20a of light-sensitive optical fibre 20, therefore, the diffractogram that generates by concave point 48 just as one-period index modulation mould quilt " seal " in the fibre core.Thereby just in light-sensitive optical fibre 20, made Bragg grating in the fiber, thereby light-sensitive optical fibre 20 has been become a light filter.Light filter connects the standardization joints of optical fibre as the use of system element in the end of light-sensitive optical fibre 20 for convenience.Perhaps, at joints of optical fibre of a termination of light-sensitive optical fibre 20, at fiber termination connector of its another termination, with the reflection of light that suppresses to propagate by light filter.
Nearly 40 centimetres of the girths of five cun fiber brackets 10.If helicla flute 22 arranges that near the outer rim of fiber bracket 10 if make Bragg grating in one one meter (1m) long fiber, the spiral around fiber bracket 10 centers only needs to get final product around about three circles.The design of fiber bracket 10 and phase place cover 12 can make it possible to make the interior Bragg grating of fiber of at least four meters (4m) following random length.
Except can make than traditional step and repeat process in the longer fiber of getable grating the Bragg grating, the present invention also the homogeneity of product and repeatable aspect be better than classic method because whole grating all is to finish in once single continuous process.These advantages have improved production output, thereby have reduced manufacturing cost.
Fig. 9 shows second kind of embodiment of the equipment of the present invention that is used for making light filter.Except the parts shown in first kind of embodiment, this second kind of embodiment also comprises a side lobe reduction system, and the latter is made of a frequency regulator 70 and a master controller 72.Described frequency regulator 70 is controlled the repetition frequency of the ultraviolet light pulse that is sent by lasing light emitter 30,72 gated sweep controllers 18 of described master controller, turning axle controller 28 and frequency regulator 70.The energy of each ultraviolet light pulse is irrelevant with repetition frequency basically, therefore, by changing repetition frequency, frequency regulator 70 just can change be transported to the fibre core various piece energy how much.
The repetition frequency of the positional information gating pulse that frequency regulator 70 is provided according to master controller 72.Shown in the dotted line among Figure 10, fiber bracket 10 is divided into three substantially concentric zones.At the first district 58a, from the outer end 54 of light-sensitive optical fibre 20, repetition frequency rises gradually.At the second district 58b, it is constant that repetition frequency keeps.At the 3rd district 58c, repetition frequency descends gradually, up to the inner 56 of light-sensitive optical fibre 20.
The result of this repetition frequency control is that the dosage of the ultraviolet light that fibre core is received is decay gradually near fiber two ends 54 and 56.The degree of modulation of fiber refractive index thereby formation side lobe reduction, as shown in figure 12.Among the figure, transverse axis is the position along the fibre length direction.Position a and b are corresponding to the two ends of Bragg grating in the fiber, and regional c, d and e are corresponding to regional 58a, 58b and 58c on the fiber bracket 10.The longitudinal axis is represented the degree of modulation of refractive index.Shown in curve f, degree of modulation rises in the c district, and is constant in the d district, descends in the e district.
Along aspect acutance and the reflective band top flatness, Bragg grating can provide excellent characteristic in the Sidelobe Suppression fiber in Sidelobe Suppression, reflective band side.Thereby obtain suitable apodization curve by the gating pulse repetition frequency, can obtain desirable filter properties.
As the remodeling of second kind of embodiment, can use variable attenuator 32.Like this, the dosage that is transported to the ultraviolet light of fibre core just can be controlled by the control decay factor, and needn't the gating pulse repetition frequency.
Figure 13 shows the third embodiment of present device.The 3rd embodiment has the parts shown in first kind of embodiment, one and is similar to master controller 72 and speed control 74 that is shown in second kind of master controller 72 among the embodiment substantially.The positional information that the latter provides according to master controller 72 is controlled the turning axle controller 28 of universal stage 14.In the present embodiment, it is constant that the pulse repetition rate of lasing light emitter 30 keeps.
From initial moment t
0To moment t
1Corresponding to the first scanning area 58a among Figure 10, from moment t
1To moment t
2, corresponding to the second district 58b among Figure 10, from moment t
2To moment t
3, corresponding to the 3rd district 58c.Master controller 72 and scanning monitor 18 change the movement velocity of mobile unit 33, so that the rotational speed of sweep frequency and universal stage 14 keeps coordination, and make ultraviolet light beam 38 follow the trail of the spiral path of light-sensitive optical fibre 20 exactly.
The third embodiment has and second kind of effect that embodiment is identical, can produce the side lobe reduction light filter with optional refractive index adjustment curve.By suitably controlling the rotational speed of universal stage 14, can obtain desirable filter properties easily.
The 4th embodiment of the present invention relates to the encapsulation of the light filter that first, second, third embodiment is made.Present embodiment provides a kind of two-piece type encapsulation.Wherein, fiber bracket 10 is as the bottom packaging part, in addition with one independently lid as upper package.
Figure 15 A shows the planimetric map of seeing from below of lid 60.Figure 15 B shows along the sectional view of the L-L line among Figure 15 A.
If fix lid and fiber bracket 10, a groove that is used for collecting excess adhesive is arranged preferably on fiber bracket 10 with epoxy adhesive.Ginseng Figure 17 A, this groove 64 is ring grooves, is arranged on the outer peripheral edges place near fiber bracket 10.Figure 17 B showed the sectional view of the M-M line among Figure 17 A, and this figure shows that groove 64 can be wideer darker than the helicla flute 22 that is used for fixing optical fiber.Epoxy adhesive is used on fiber bracket 10 and the lid 60 amalgamation surfaces suitable position in groove 64 inboards.When fiber bracket 10 and lid 60 sticked together, some bonding agents wherein may be got into groove 64.Can be but these bonding agents are focused in the groove 64 from not being expressed into the edge of fiber bracket 10 and lid 60 between fiber bracket 10 and the lid 60.So just simplified encapsulation process.
Thermal expansivity also have another benefit about equally.In fiber in the manufacture process of Bragg grating, can make the size of light-sensitive optical fibre 20 and fiber bracket 10 that the heating of ultraviolet light beam 38 is had identical reaction.
Do a comparison.The thermal expansivity of aluminium is about 20 * 10
-6/ ℃, the thermal expansivity of stainless steel (SUS304) is about 18 * 10
-6/ ℃, all the thermal expansivity with light-sensitive optical fibre 20 differs greatly.
Self-evident, the outside inlet of the end of receiving light filter 20 should be provided, can be used as a filter module use and must not open enclosure so that encapsulate light filter.If be connected to optical fiber 20 two ends be two joints of optical fibre, perhaps joints of optical fibre and a fiber termination connector, they can be housed inside in the notch of two caves on the lid 60 or expansion.For the sake of simplicity, cave or notch are all not shown in the drawings.
This 4th embodiment provides a kind of enclosure that is easy to assemble, and need not operate light-sensitive optical fibre 20 in encapsulation process.This enclosure is solid reliable on mechanics, can ambient light filter avoids the accidental injury of multiple external factor.These characteristics can reduce the encapsulation labor cost, and improve production output.
The 5th embodiment is described below.Present embodiment is still relevant with the encapsulation of the light filter of manufacturing of the present invention.
Ginseng Figure 18, in forming fiber Bragg grating and remove phase place cover 12 after, in the 5th embodiment, cover fiber bracket 10 with a protective seam 66.Described protective seam 66 for example is one of above-mentioned different materials, is aluminium oxide, titanium dioxide, aluminium nitride or boron nitride.Protective seam 66 is coated on the fiber bracket 10 as the metal alkoxides solution, use be; Common thick film forms technology, such as serigraphy, scraping blade printing, dip-coating, spin coating or spraying.Then, make protective seam 66 dryings by thermal treatment.Can use gentle heat-treat condition, such as under 40 to 80 ℃ temperature, handling two hours.
The protective seam 66 of one of above-mentioned material also can form with plating process, such as vacuum evaporation or (cathode) sputtering.
The inlet that leads to the end of light-sensitive optical fibre 20 is to be provided by the opening on fiber bracket 10 or the protective seam 66.(these openings have omitted among the figure.) best, the joints of optical fibre on the end of light-sensitive optical fibre 20 connects, perhaps joints of optical fibre and a fiber termination connector are to form an encapsulation filter module as the 4th embodiment.
Protective seam 66 should be enough thick, covering light-sensitive optical fibre 20 fully, but do not need thick degree to the independent lid that is used for the 4th embodiment.Therefore, the filter module that forms among the 5th embodiment has thin form and compact advantage.
As the 4th embodiment, the 5th embodiment also provides a kind of enclosure that is easy to assemble and need not operate fiber.The 5th embodiment has also shortened total manufacturing time, because protective seam 66 is when forming on just attached to fiber bracket 10.In addition; by light-sensitive optical fibre 20 is securely fixed in the helicla flute 22; compare with the 4th embodiment; protective seam 66 provides more perfectly protection; make light-sensitive optical fibre avoid the influence of external action; comprise protection, thereby make that transportation, storage and the installation of encapsulation light filter are very easy vibration.Protective seam 66 also helps to reduce the aging variation of light filter, thereby stablizes its optical characteristics.
The 6th embodiment is described below.Present embodiment is made fiber bracket 10 by the UV cured polymeric layer on the ceramic substrate is carried out the photetching needle drawing, and encapsulates light filter by the UV cured polymeric layer of another layer of plating behind the Bragg grating in forming fiber.
Figure 19 A is the skeleton view that is used for illustrating the first step of making light filter.Figure 19 B was the sectional view of the N-N line among Figure 19 A.Figure 20 A shows the similar skeleton view of each manufacturing step subsequently to Figure 23 A, and Figure 20 B then shows corresponding sectional view to Figure 23 B.
Figure 19 A and 19B show a ceramic substrate 80, be coated with a UV cured polymeric layer 82 on it, the latter for example (NipponSynthetic Chemical Industry Company of Osaka, Japan) form by the Japanese synthetic chemical industry company of Japanese Osaka by the negative dry plate photosensitive resin of the NEF-150 of Zhi Zaoing.This polymeric layer 82 can use general laminating apparatus to be attached on the substrate 80.The thickness of NEF-150 is 50 microns, but can be with two-layer or three be laminated to that to form gross thickness together be 100 or 150 microns UV cured polymeric layer 82.
The gross thickness of UV cured polymeric layer 82 will become the thickness of the helicla flute 22 that the back will form.If necessary, unite the thickness that uses same manufacturer and be 25 microns negative dry plate photosensitive resin NEF-125, can obtain 125 microns gross thickness.
Ginseng Figure 20 A and 20B shine by seeing through a cover (not shown) with ultraviolet light, and UV cured polymeric layer 82 is hardened.Described cover be for the spiral zone 84 that makes the place that prepare to form helicla flute 22 not illuminated.Suitable illuminate condition is 100 to 600mJ/cm
2 Flushing polymeric layer 82 in 0.5% aqueous sodium carbonate for example then removing unhardened part 84, thereby stays next helicla flute 22 shown in Figure 21 A and 21B.This has just finished the manufacturing of fiber bracket 10.
Then, shown in Figure 22 A and Figure 22 B, light-sensitive optical fibre 20 is placed helicla flute 22, be used in the method for describing among first, second or the 3rd embodiment, can produce Bragg grating in the fiber.After finishing said process, remove phase place cover 12, shown in Figure 23 A and 23B, cover fiber bracket 10 and light-sensitive optical fibre 20 with a upper protective layer 86.Described upper protective layer 86 for example is made up of the UV cured polymeric material that JSR company in Tokyo makes, and the commodity of this material are called Desolite.This material is covered the upper surface of fiber bracket 10, cover light-sensitive optical fibre 20, under UV-irradiation, harden then.
Final step is a (not shown), the joints of optical fibre on the end of light-sensitive optical fibre 20 connects, and perhaps joints of optical fibre and a fiber termination connector are so that the last filter module that forms encapsulation.
Enclosure is made of substrate 80 and two polymeric layers 82 and 84, is simplifying manufacture process, thin and compact shape and to aspect the good protective value of optical fiber, the advantage same with the 5th embodiment is being arranged all.Present embodiment also has an advantage to be, with being shown in the photoetching process of Figure 19 A to 21B, the formation of helicla flute 22 can have high accuracy to size.Especially, spiral fluted degree of depth homogeneous very.This accuracy and homogeneity make the interior same homogeneous of Bragg grating of resulting fiber with accurate.Because accuracy and repeatability, described photoetching process is applicable to production a large amount of, robotization.
The 7th embodiment is described below.Present embodiment is to make fiber bracket 10 like this: needle drawing on a UV cured polymeric layer; thereby on a ceramic substrate, form a fiber mould; cover on the substrate with a protective material layer then, remove the aforementioned fibers mould again, stay a groove and admit light-sensitive optical fibre 20.In forming fiber behind the Bragg grating, another layer protective material in the covering, thus light filter is encapsulated.
Figure 24 A is the skeleton view that is used for illustrating the first step of making light filter.Figure 24 B was the sectional view of the O-O line among Figure 24 A.Figure 25 A shows the similar skeleton view of each manufacturing step subsequently to Figure 30 A, and Figure 25 B then shows corresponding sectional view to Figure 30 B.
Ginseng Figure 24 A and 24B, a ceramic substrate 80 is covered by a UV cured polymeric layer 82, and the latter's thickness is substantially equal to the diameter of light-sensitive optical fibre 20.Described polymeric layer 82 for example can use the stack membrane that is made of NEF-125 and/or NEF-150 photosensitive resin.
Ginseng Figure 25 A and 25B shine by seeing through a cover (not shown) with ultraviolet light, and UV cured polymeric layer 82 is hardened.Described cover only exposes the spiral zone 84 in the place of preparing formation helicla flute 22, and this zone 84 is shone.Can use the illuminate condition identical (100 to 600mJ/cm with the 6th embodiment
2).
Ginseng Figure 26 A and 26B, flushing polymeric layer 82 in 0.5% aqueous sodium carbonate for example removing unhardened part 88, thereby stays next fiber mould 88.
Ginseng Figure 27 A and 27B cover described substrate 80 with a protective material layer such as Desolite then.The liquid condition that is coated in of described material is carried out, and the space of ring type filling around fiber mould 88 is up to equal with the upper surface of fiber mould 88 basically.With the upper surface wiped clean of fiber mould 88, do not make and leave described protective material on this surface.Then, described protective material sclerosis, thus form a protective seam 90.With anything unexpected stayed fiber mould 88 upper surfaces protective seam 90 all polish off.
If use Desolite, can be by make protective seam 90 sclerosis with UV-irradiation.But, also can form protective seam 90, such as epoxy resin, acryl resin, urethane acrylate (polyurethane acrylate) or similar material with other material.
Ginseng Figure 28 A and 28B remove fiber mould 88 and formation helicla flute 22, thereby have finished the manufacturing of fiber bracket 10.The removal of fiber mould 88 can be used following method: fiber bracket 10 be impregnated in some minutes in the sodium hydroxide solution, then the fiber mould is peeled off from substrate 80.The concentration of sodium hydroxide solution should be in the magnitude of a few percent.
Then, shown in Figure 29 A and Figure 29 B, light-sensitive optical fibre 20 is placed helicla flute 22, be used in the method for describing among first, second or the 3rd embodiment, can produce Bragg grating in the fiber.In forming fiber, behind the Bragg grating, shown in Figure 30 A and 30B, cover light-sensitive optical fibre 20 and protective seam 90 with a upper protective layer 86.The material of described upper protective layer 86 for example is Desolite.The same with the 6th embodiment, the joints of optical fibre on the end of light-sensitive optical fibre 20 connects, perhaps joints of optical fibre and a fiber termination connector are so that form filter module at last.
For the ease of removing fiber mould 88, fiber mould 88 is preferably the shape of falling from power shown in Figure 31 A,, makes that the top of fiber mould 88 is wideer than the bottom that is.Should avoid the platform shape shown in Figure 31 B, because like this fiber mould 88 just is difficult to remove more.
The same with the 6th embodiment, this 7th embodiment can make the helicla flute 22 of the homogeneous with high accuracy to size, is very suitable for production a large amount of, robotization.Another advantage of present embodiment is, two protective seams 86 and 90 can be made up of such as Desolite commaterial, and this is particularly in order to protect the purpose of optical fiber.The enclosure that obtains like this thereby good protective value is provided can not only be prevented physical shock and vibration, can also the moisture-proof anticorrosive erosion.
The 8th embodiment is described below.Present embodiment has added a protection bottom on fiber bracket 10.
Figure 32 A is used for illustrating the skeleton view of making the first step of light filter in the 8th embodiment.Figure 32 B was the sectional view of the P-P line among Figure 32 A.Figure 33 A shows the similar skeleton view of each manufacturing step subsequently to Figure 39 A, and Figure 33 B then shows corresponding sectional view to Figure 39 B.
Ginseng Figure 32 A and 32B, ceramic substrate 80 are at first covered by a suitable UV cured polymeric material, and this material needs not to be photosensitive resin.Under UV-irradiation, make this material sclerosis then, thereby on substrate 80, form a protection bottom 92.
The same among step subsequently and the 7th embodiment.Shown in Figure 33 A and 33B, on protection bottom 92, cover the UV cured polymeric layer 82 of one deck, to the needle drawing of latter's photetching (Figure 34 A and 34B), form the fiber mould 88 that is shown in Figure 35 A and 35B.Shown in Figure 36 A and 36B, form a protective seam 90, then fiber mould 88 is removed, stay a helicla flute 22 that is shown among 37A and the 37B.Shown in Figure 38 A and 38B, light-sensitive optical fibre is placed in the helicla flute 22.In forming fiber, behind the Bragg grating, shown in Figure 39 A and 39B, add one deck upper protective layer 86.
In the 8th embodiment, light-sensitive optical fibre 20 all is subjected to the protection of suitable protective material on all directions.Protection bottom 92 and protective seam 90 in fiber in the Bragg grating forming process and light filter all light-sensitive optical fibre 20 is protected after packed.
Figure 40 A and 40B show the remodeling of aforementioned each embodiment.Wherein, fiber bracket 10 and its lid are annular.Shown in Figure 40 A, the helicla flute at light-sensitive optical fibre 20 places extends to a opening 96 on the excircle from an opening 94 on the inner periphery of the fiber bracket 10 (perhaps its lid 60) of annular.Light-sensitive optical fibre 20 is divided into three sections 98a, 98b and 98c.Bragg grating only forms in the 98b of stage casing in the fiber.Ultraviolet light beam does not scan inner segment 98a and outer section 98c.Stretch out from opening 94,96 at the two ends of light-sensitive optical fibre 20, so that can connect the joints of optical fibre 100 or joints of optical fibre and a fiber termination connector thereon shown in Figure 40 B.
Figure 40 B shows a lid 60 as the 4th type that embodiment describes, but is annular.Five, the 6th, the 7th and the 8th embodiment can use the fiber bracket 10 of annular, and the protective seam of similar annular shape.
In the aforementioned embodiment, other remodeling also all is possible.For example, the second and the 3rd embodiment can merge, thereby changes the pulse repetition rate of lasing light emitter 30 and the rotating speed of universal stage 14 simultaneously.Also have, fiber bracket 10 and phase place cover 12 may not be disks, and they can be Any shape, only need have that even curface can form the round screw thread groove in the above and the round screw thread diffraction grating gets final product.
Those skilled in the art can explicit example for reference, and also might there be other remodeling in the present invention and surmount the scope of claim of the present invention.
Claims (15)
1, a kind of light filter comprises:
Fiber bracket (10) with flat surface has helicla flute (22) on described surface; With
Article one, have by the refractive index of periodic modulation, be fixed on the optical fiber (20) in the described helicla flute (22).
2, light filter as claimed in claim 1, wherein, described optical fiber (20) is photosensitive.
3, light filter as claimed in claim 1 also comprises a lid (60) that covers the flat surface of described fiber bracket (10), to protect described optical fiber (20).
4, light filter as claimed in claim 2, wherein, described fiber bracket (10) and described lid (60) are made by one of following material: aluminium oxide, titanium dioxide, aluminium nitride and boron nitride.
5, light filter as claimed in claim 3, wherein, the thermal expansivity of described fiber bracket (10) and described lid (66) is not less than 10
-7/ ℃ be not higher than 10
-6/ ℃.
6, light filter as claimed in claim 3, wherein, described lid (60) with a kind of adhesive on described fiber bracket (10).
7, light filter as claimed in claim 6, wherein, described bonding agent is an epoxy adhesive.
8, light filter as claimed in claim 6, wherein, described fiber bracket (10) has a groove (64), is used for taking in the redundance of described bonding agent.
9, light filter as claimed in claim 3, wherein, described lid (66) is made of a protective seam that is formed on the described fiber bracket (10).
10, light filter as claimed in claim 1, wherein, described fiber bracket (10) comprising:
A smooth substrate (80); With
Zone outside the spiral zone that constitutes described helicla flute (22) covers the polymeric layer (82) of described smooth substrate (80).
11, light filter as claimed in claim 10 also comprises a protection bottom (92) that covers described smooth substrate (80), and this protection bottom is in described polymeric layer (82) below and described helicla flute (22).
12, light filter as claimed in claim 11, wherein, described protection bottom (92) is made up of a kind of polymeric material.
13, light filter as claimed in claim 10 also comprises a upper protective layer (86) that covers described polymeric layer (82) and described optical fiber (20).
14, light filter as claimed in claim 13, wherein, described upper protective layer (86) is made up of a kind of polymeric material.
15, light filter as claimed in claim 10, wherein, described fiber bracket (10) is an annular disk shaped, described helicla flute (22) extends to the inner periphery of described fiber bracket (10) from the excircle of described fiber bracket (10).
Applications Claiming Priority (8)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1827501/1997 | 1997-07-08 | ||
| JP82750197 | 1997-07-08 | ||
| JP21522897 | 1997-08-08 | ||
| JP215227/1997 | 1997-08-08 | ||
| JP21522797A JP3338337B2 (en) | 1997-08-08 | 1997-08-08 | Optical filter manufacturing method and optical filter manufacturing apparatus |
| JP215228/1997 | 1997-08-08 | ||
| JP301302/1997 | 1997-10-31 | ||
| JP30130297A JP3386350B2 (en) | 1997-08-08 | 1997-10-31 | Optical filter manufacturing method and optical filter manufacturing apparatus |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB981156916A Division CN1157614C (en) | 1997-07-08 | 1998-07-07 | Optical filter making method and equipment, optical filter, fiber holding-seat and phase hood |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1515917A true CN1515917A (en) | 2004-07-28 |
Family
ID=34279933
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA031235298A Pending CN1515917A (en) | 1997-07-08 | 1998-07-07 | Optical filter |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1515917A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103635758A (en) * | 2011-03-14 | 2014-03-12 | 日光储备有限公司 | Apparatus and method for pointing light sources |
| US9910156B2 (en) | 2012-06-30 | 2018-03-06 | Solarreserve Technology, Llc | Using optical proxy light to aim redirected light at a target using heliostats |
| US9939177B2 (en) | 2011-03-14 | 2018-04-10 | Solarreserve Technology, Llc | Optical proxy for sensing and pointing of light sources |
| CN111552023A (en) * | 2020-03-29 | 2020-08-18 | 桂林电子科技大学 | Special-shaped core fiber grating preparation technology based on semi-circle phase compensation plate |
| US20220260778A1 (en) * | 2020-09-24 | 2022-08-18 | Globalfoundries U.S. Inc. | Waveguide absorbers |
-
1998
- 1998-07-07 CN CNA031235298A patent/CN1515917A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103635758A (en) * | 2011-03-14 | 2014-03-12 | 日光储备有限公司 | Apparatus and method for pointing light sources |
| CN103635758B (en) * | 2011-03-14 | 2017-08-01 | 日光储备技术有限公司 | For making light source point to the apparatus and method aimed at |
| US9910127B2 (en) | 2011-03-14 | 2018-03-06 | Solarreserve Technology, Llc | Apparatus and method for pointing light sources |
| US9939177B2 (en) | 2011-03-14 | 2018-04-10 | Solarreserve Technology, Llc | Optical proxy for sensing and pointing of light sources |
| US9910156B2 (en) | 2012-06-30 | 2018-03-06 | Solarreserve Technology, Llc | Using optical proxy light to aim redirected light at a target using heliostats |
| CN111552023A (en) * | 2020-03-29 | 2020-08-18 | 桂林电子科技大学 | Special-shaped core fiber grating preparation technology based on semi-circle phase compensation plate |
| CN111552023B (en) * | 2020-03-29 | 2022-10-25 | 桂林电子科技大学 | System and method for preparing special-shaped core fiber grating based on semi-circle phase compensation plate |
| US20220260778A1 (en) * | 2020-09-24 | 2022-08-18 | Globalfoundries U.S. Inc. | Waveguide absorbers |
| US11747562B2 (en) * | 2020-09-24 | 2023-09-05 | Globalfoundries U.S. Inc. | Waveguide absorbers |
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