CN1512598A - Defilming method for double layer antireflective titanium oxide/yttrium oxide coating - Google Patents

Defilming method for double layer antireflective titanium oxide/yttrium oxide coating Download PDF

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Publication number
CN1512598A
CN1512598A CNA021591458A CN02159145A CN1512598A CN 1512598 A CN1512598 A CN 1512598A CN A021591458 A CNA021591458 A CN A021591458A CN 02159145 A CN02159145 A CN 02159145A CN 1512598 A CN1512598 A CN 1512598A
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film
double layer
titanium oxide
moves back
battery
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CN1288763C (en
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刘汉英
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CETC 18 Research Institute
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CETC 18 Research Institute
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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Abstract

This invention relates to a defilm method for double layer anti-reflecting film Tioxide/yttria including the following process: 1. immersing a battery with double layer anti-reflecting film Tioxide/yttria in concentrated sulfuric acid of 95% over for defilm for 2-6 seconds to be washed for 6-8 times with deionized water, 2. immersing into phthoric acid of HF:H20=1:4-1:10 for defilming for 3-10seconds to be washed for 6-8 times with deionized water, 3. dehydration drying.

Description

Double layer antireflection coating titanium oxide/yittrium oxide moves back film method
Technical field
The invention belongs to technical field of solar cells, particularly relate to a kind of double layer antireflection coating titanium oxide/yittrium oxide and move back film method.
Background technology
At present, the antireflective coating titanium oxide/silica of traditional handicraft, it moves back the film hydrofluoric acid solution.But this method can not be moved back film, not reach demand of technical standard titanium sesquioxide/yttria film.Therefore, can't handle existing defective titanium sesquioxide/yttria film battery.
Summary of the invention
The present invention provides a kind of double layer antireflection coating titanium oxide/yittrium oxide to move back film method for solving the problem that prior art exists.
The purpose of this invention is to provide a kind of easy to operate, technical process is simple, the titanium oxide of system easy to control the quality/yittrium oxide duplicature moves back film method.
The present invention adopts following technical scheme:
Double layer antireflection coating titanium oxide/yittrium oxide moves back film method, double layer antireflection coating is immersed acid after, water cleans again, it is characterized in that moving back film method and comprises following technical process:
(1) will there be the battery of double layer antireflection coating titanium oxide/yittrium oxide to immerse in the sulfuric acid and move back film, then, use deionized water rinsing;
(2) immerse volume ratio HF: H again 2O=1: 4-1: move back film in 10 the hydrofluoric acid, moving back the film time is 3-10 second, then, uses deionized water rinsing;
(3) battery dehydrates.
The present invention can also adopt following technical measures:
Above-mentioned double layer antireflection coating titanium oxide/yittrium oxide moves back film method, be characterized in will have the battery of double layer antireflection coating titanium oxide/yittrium oxide to immerse concentration be to move back film in the concentrated sulfuric acid more than 95%, moving back the film time is 2-6 second.
Above-mentioned double layer antireflection coating titanium oxide/yittrium oxide moves back film method, is characterized in moving back film time 3-5 second.
Above-mentioned double layer antireflection coating titanium oxide/yittrium oxide moves back film method, be characterized in the battery of double-deck reflectance coating titanium oxide/yittrium oxide immerse concentration be move back film in the concentrated sulfuric acid 95% or more after, usefulness deionized water rinsing 6-8 time.
Above-mentioned double layer antireflection coating titanium oxide/yittrium oxide moves back film method, and the volume ratio that is characterized in hydrofluoric acid is 1: 6-1: 8, and moving back the film time is 6-9 second.
Above-mentioned double layer antireflection coating titanium oxide/yittrium oxide moves back film method, be characterized in that hydrofluoric acid moves back film after, with deionized water rinsing 6-8 time.
Above-mentioned double layer antireflection coating titanium oxide/yittrium oxide moves back film method, is characterized in that battery dehydrates to adopt air-dry mode or drying mode after the cotton ball soaked in alcohol wiping.
Advantage that the present invention has and good effect:
Double layer antireflection coating titanium oxide/yittrium oxide moves back film method, owing to adopted technical scheme of the present invention, can be fully that titanium oxide/yittrium oxide double layer antireflection coating stripping is clean, the plated film again that does not influence battery again uses, and technological operation is simple, easy to control, cost is low, stable and reliable product quality.
The antireflective evaporation is last one technology of silicon solar cell monomer manufacture craft, and the present invention can be used for losing efficacy or the artificial origin does not open defective titanium oxide/yittrium oxide film battery that oxygen fill valve causes and moves back film owing to oxygen fill valve.
Description of drawings
Fig. 1 is double layer antireflection coating titanium oxide of the present invention/yittrium oxide battery structure schematic diagram.
Embodiment
For further understanding summary of the invention of the present invention, characteristics and effect, enumerate following example now and be described in detail as follows:
Embodiment 1
With reference to accompanying drawing 1, the structure of battery is followed successively by negative electrode 1, yittrium oxide film 2, oxidation titanium film 3, silicon 4 and positive electrode 5 from top to bottom.
Double layer antireflection coating titanium oxide/yittrium oxide battery move back film method, with the antireflective coating evaporation because defective titanium oxide/yittrium oxide film battery TDB24.5 * 40.2 that oxygen fill valve lost efficacy and to cause, immersion concentration is 98% 4 seconds of the commercially available concentrated sulfuric acid earlier, takes out back deionized water rinsing 7 times; Immerse volume ratio HF: H again 2O=1: 78 seconds of hydrofluoric acid, then with deionization flushing 7 times; Do with cotton ball soaked in alcohol wiping and fan at last.
Through above processes, can finish the membrane process that moves back of double layer antireflection coating titanium oxide/yittrium oxide battery, obtain the qualified film silicon solar cell that moves back.

Claims (7)

1. double layer antireflection coating titanium oxide/yittrium oxide moves back film method, double layer antireflection coating is immersed acid after, water cleans again, it is characterized in that moving back film method and comprises following technical process:
(1) will there be the battery of double layer antireflection coating titanium oxide/yittrium oxide to immerse in the sulfuric acid and move back film, then, use deionized water rinsing;
(2) immerse volume ratio HF: H again 2O=1: 4-1: move back film in 10 the hydrofluoric acid, moving back the film time is 3-10 second, then, uses deionized water rinsing;
(3) battery dehydrates.
2. the film method that moves back according to claim 1 is characterized in that: will have the battery of double layer antireflection coating titanium oxide/yittrium oxide to immerse concentration is to move back film in the concentrated sulfuric acid more than 95%, and moving back the film time is 2-6 second.
3. the film method that moves back according to claim 2 is characterized in that: move back film time 3-5 second.
4. the film method that moves back according to claim 2 is characterized in that: with the battery of double-deck reflectance coating titanium oxide/yittrium oxide immerse concentration be move back film in the concentrated sulfuric acid 95% or more after, usefulness deionized water rinsing 6-8 time.
5. the film method that moves back according to claim 1 is characterized in that: the volume ratio of hydrofluoric acid is 1: 6-1: 8, and moving back the film time is 6-9 second.
6. the film method that moves back according to claim 1 is characterized in that: after hydrofluoric acid moves back film, use deionized water rinsing 6-8 time.
7. the film method that moves back according to claim 1 is characterized in that: battery dehydrates and adopts air-dry mode or drying mode after the cotton ball soaked in alcohol wiping.
CNB021591458A 2002-12-30 2002-12-30 Defilming method for double layer antireflective titanium oxide/yttrium oxide coating Expired - Fee Related CN1288763C (en)

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CNB021591458A CN1288763C (en) 2002-12-30 2002-12-30 Defilming method for double layer antireflective titanium oxide/yttrium oxide coating

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Application Number Priority Date Filing Date Title
CNB021591458A CN1288763C (en) 2002-12-30 2002-12-30 Defilming method for double layer antireflective titanium oxide/yttrium oxide coating

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CN1512598A true CN1512598A (en) 2004-07-14
CN1288763C CN1288763C (en) 2006-12-06

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100373636C (en) * 2005-11-14 2008-03-05 浙江大学 Method of preparing compound wavelength conversion-antireflecting on silicon solar energy battery surface
CN101273238B (en) * 2005-08-02 2010-04-07 桑斯翠普有限公司 Nickel-alumina coated solar absorbers
CN104529531A (en) * 2015-01-21 2015-04-22 浙江星星瑞金科技股份有限公司 Method for deplating sapphire plated layer by using waste polishing solution

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8119438B2 (en) * 2007-10-24 2012-02-21 Mitsubishi Electric Corporation Method of manufacturing solar cell

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101273238B (en) * 2005-08-02 2010-04-07 桑斯翠普有限公司 Nickel-alumina coated solar absorbers
CN100373636C (en) * 2005-11-14 2008-03-05 浙江大学 Method of preparing compound wavelength conversion-antireflecting on silicon solar energy battery surface
CN104529531A (en) * 2015-01-21 2015-04-22 浙江星星瑞金科技股份有限公司 Method for deplating sapphire plated layer by using waste polishing solution

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