CN1506149A - Waste gas treater - Google Patents

Abstract

The waste gas treater includes a packed washing tower, a gas intake pipe, an ultrasonic two-phase flow spray humidifier and a gas exhaust pipe. Waste gas is made to flow into the packed washing tower via the gas intake pipe, the humidifier set inside the gas intake pipe produces water fog to adsorb the pollutant in the waste gas, and the gas exhaust pipe set in the upper part of the packed washing tower is used to exhaust waste gas. Waste gas is first treated with the humidifier to eliminate its pollutant via absorption before being washed in the packed washing tower, and this can ensure the elimination of pollutant in the waste gas.

Description

Emission-control equipment

Technical field

The present invention relates to a kind of emission-control equipment, particularly relevant for a kind of emission-control equipment, to reach the purpose of removing pollutant in the waste gas effectively in conjunction with ultrasonic two-phase flow spray humidifier.

Background technology

If at present general semiconductor factory house-owner utilizes a wet scrubbing apparatus to handle the waste gas that contains the organic or inorganic pollutant that it produces, for example HF, HCl, HBr and NH ₃Deng, and this kind wet scrubbing apparatus generally is to adopt a filled type scrubbing tower.

As shown in Figure 1, be the internal structural map of an existing filled type scrubbing tower 1.Has a tank 12 in the bottom of filled type scrubbing tower 1, water in tank 12 can be received lashes above filled type scrubbing tower 1 by a suction pump 14, and sprayed downwards by a plurality of hole for water sprayings 16, then, this water that sprays downwards can be through flowing into downwards in the tank 12 behind a plurality of Raschig rings (packing) 18 that are arranged at filled type scrubbing tower 1 centre again.When waste gas by the road 20 when entering in the filled type scrubbing tower 1, waste gas can be upwards by being arranged at a plurality of Raschig rings 18 of filled type scrubbing tower 1 centre, the water that sprayed from the hole for water spraying 16 this moment Raschig ring 18 of also can flowing through downwards, because the function of Raschig ring 18 is the contacts area that are used for increasing water and waste gas, so the part pollutant in the waste gas can flow in the tank 12 after being adsorbed with water, so promptly finish a clean cycle, the steam vent 22 that all the other waste gas then can be through being positioned at filled type scrubbing tower 1 top and discharging.

Yet, the mode that the existing filled type scrubbing tower of this kind 1 is handled waste gas only is to adsorb pollutant in the waste gas by water droplet, even cooperate Raschig ring 18 also can't really enlarge the contact area of waste gas and water effectively, so that the pollutant in the waste gas is adsorbed with water effectively, so waste gas is after handling through filled type scrubbing tower 1, the content of its pollutant is still quite high, and still can cause the injury of certain degree for surrounding environment.

Summary of the invention

In view of this, the purpose of this invention is to provide a kind of emission-control equipment, can remove pollutant in the waste gas effectively.

The present invention adopts as detailed below basically, and feature solves above-mentioned problem.That is to say that the present invention is applicable to handle and contains the waste gas of pollutant, and comprises a filled type scrubbing tower; One air inlet pipe is connected in this filled type scrubbing tower, and wherein, this waste gas flows in this filled type scrubbing tower through this air inlet pipe; One ultrasonic two-phase flow spray humidifier is arranged in this air inlet pipe, and in order to produce a trickle water smoke, wherein, this pollutant in this waste gas is adsorbed by this trickle water smoke; And a blast pipe, be arranged on this filled type scrubbing tower, in order to discharge this waste gas.

Simultaneously, according to emission-control equipment of the present invention, this ultrasonic two-phase flow spray humidifier has more a venturi tube.

Again in the present invention, this ultrasonic two-phase flow spray humidifier also has a water inlet, and in order to import current, this ultrasonic two-phase flow spray humidifier is directly clashed into these current by pressure-air through this venturi tube, with water smoke in the middle of producing one.

Again in the present invention, this ultrasonic two-phase flow spray humidifier also has a ultrasonic resonance amplifier, and this centre water smoke directly clashes into this ultrasonic resonance amplifier, to produce this trickle water smoke.

Again in the present invention, this filled type scrubbing tower also has a tank, is arranged at the below of this filled type scrubbing tower.

Again in the present invention, also comprise a suction pump, be connected in the top of this tank and this filled type scrubbing tower, wherein, the water in this tank is to receive lashes to the top of this filled type scrubbing tower by this suction pump.

Again in the present invention, this filled type scrubbing tower also has a plurality of Raschig rings, is arranged in this filled type scrubbing tower, and is positioned at the top of this tank.

Again in the present invention, this filled type scrubbing tower also has a plurality of hole for water sprayings, is arranged on these a plurality of Raschig rings, and the water in this tank is to be sprayed on these a plurality of Raschig rings through these a plurality of hole for water sprayings.

The invention has the beneficial effects as follows, before waste gas enters the filled type scrubbing tower, earlier the trickle water smoke that is produced by ultrasonic two-phase flow sprayer adsorbs the pollutant in the waste gas, and then by the washing of filled type scrubbing tower, so can be really the pollutant in the scavenging effectively.

For above-mentioned purpose of the present invention, feature and advantage can be become apparent, hereinafter special description one preferred embodiment and conjunction with figs. elaborate.

Description of drawings

Fig. 1 is existing filled type scrubbing tower internal structure schematic diagram;

Fig. 2 is the internal structure schematic diagram of emission-control equipment of the present invention;

Fig. 3 is the organigram of the ultrasonic two-phase flow spray humidifier that adopts of the present invention.

Wherein, description of reference numerals is as follows:

1 existing filled type scrubbing tower

12 tanks

14 suction pumps

16 hole for water sprayings

18 Raschig rings

20 pipelines

22 steam vents

100 emission-control equipments

110 filled type scrubbing towers

112 Raschig rings

114 tanks

116 hole for water sprayings

120 air inlet pipe

130 ultrasonic two-phase flow spray humidifier

131 venturi tubes

132 water inlets

133 outlets

134 ultrasonic resonance amplifiers

140 blast pipes

150 suction pumps

S1, S2, S3 thief hatch

The specific embodiment

As shown in Figure 2, the emission-control equipment 100 of present embodiment mainly includes a filled type scrubbing tower 110, an air inlet pipe 120, four ultrasonic two-phase flow spray humidifier 130 and blast pipes 140.Air inlet pipe 120 is connected in filled type scrubbing tower 110, and waste gas flows in the filled type scrubbing tower 110 through air inlet pipe 120.Four ultrasonic two-phase flow spray humidifier 130 are arranged in the air inlet pipe 120, and in the present embodiment, each ultrasonic two-phase flow spray humidifier 130 is 150mm with the distance of air inlet pipe 120 walls.Simultaneously, the distance of 130 of relative two ultrasonic two-phase flow spray humidifier is 500mm.In addition, blast pipe 140 is the tops that are arranged at filled type scrubbing tower 110, in order to discharge treated waste gas later.

In addition, below filled type scrubbing tower 110, also have a tank 114, and in filled type scrubbing tower 110, also be provided with a plurality of Raschig rings 112.In addition, a suction pump 150 is connected in the top of tank 114 and filled type scrubbing tower 110.

Next the structure and the working method of ultrasonic two-phase flow spray humidifier 130 will be described earlier.As shown in Figure 3, compressed air enters along the direction shown in the arrow A in the venturi tube 131 of ultrasonic two-phase flow spray humidifier 130, and water then is 132 inflows along the direction shown in the arrow B from water inlet.Compressed air can directly clash into current so that water generates atomizes for the first time, and by droplet and the bubble of outlet 133 to have atomized near the ejection of the ultraspeed of the velocity of sound, and then directly bump is arranged at the ultrasonic resonance amplifier 134 that exports 133 places, and generation ultrasonic covibration makes the established small and broken globule be subjected to the influence of ultrasonic concussion, again with small globule fragmentation, thereby forming how small water smoke, this is atomizing for the second time.

In theory, generally Guan Liuzhong drips and directly equals d _pTrickle water droplet for the removal ability of inorganic pollution on every side, can utilize following formula to try to achieve basically:

$\frac{{\mathrm{dC}}_g}{\mathrm{dt}}=-\mathrm{\πd}{p}^{2}N{K}_c(C_g-\frac{C_{\mathrm{aq}}{Q}_l}{Q_g{H}^{*}})---\left(1\right)$

$\frac{{\mathrm{dC}}_{\mathrm{aq}}}{\mathrm{dt}}=\frac{{6K}_c}{\mathrm{dpRT}}(\frac{C_g{Q}_g}{Q_l}-\frac{C_{\mathrm{aq}}}{H^{*}})---\left(2\right)$

Wherein, C _g, C _AqBe respectively in the pipe stream air and the inorganic pollution substrate concentration (ppb) in the trickle water droplet, N is the quantity of Guan Liuzhong water droplet, K _cFor matter passes coefficient (m/sec), Q _lAnd Q _gThen be respectively the liquid of Guan Liuzhong and the flow of gas (1pm).As for H* then is effective Henry'S coefficient of each pollutant, effectively the numerical value of Henry'S coefficient then with the Henry's constant of each pollutant and water in dissociation equilibrium constant (K ₁, K ₂) size suitable relation is arranged.Basically, HF, HCl, HNO ₃, NH ₃And effective Henry'S coefficient of S (IV) can be expressed from the next:

${H^{*}}_{\mathrm{HN}{O}_3,\mathrm{HCl},\mathrm{HF}}=H_{\mathrm{HN}{O}_3,\mathrm{HCl},\mathrm{HF}}(1+\frac{K_1}{\left[H^{+}\right]})---\left(3\right)$

${H^{*}}_{N{H}_3}=H_{{\mathrm{NH}}_3}\left(\frac{K_1\left[H^{+}\right]}{K_w}\right)---\left(4\right)$

${H^{*}}_{S\left(\mathrm{IV}\right)}=H_{S{O}_2}(1+\frac{K_1}{\left[H^{+}\right]}+\frac{K_1{K}_2}{{\left[H^{+}\right]}^2})---\left(5\right)$

As for the trickle water droplet of distribution of Guan Liuzhong different-grain diameter and quantity, for the needed time t of percentage p% that removes the ambient contamination thing _p, can be expressed from the next:

$t_p=-\frac{1}{\mathrm{\α}}ln(1-p\%)---\left(6\right)$

Wherein, α is the removal coefficient (Scavenging coefficient) of pollutant, can be expressed from the next:

$\mathrm{\α}=\underset{0.1}{\overset{\∞}{\∫}}\mathrm{\π}{\mathrm{dp}}^2{K}_c\mathrm{Nf}\left(\mathrm{dp}\right)\mathrm{ddp}---\left(7\right)$

In addition, f (dp) then represents the particle diameter distribution ratio of water droplet under different-grain diameter, can be expressed from the next:

$f\left(\mathrm{dp}\right)=\frac{1}{\sqrt{2\mathrm{\π}}\mathrm{dp}\ln {\mathrm{\σ}}_g}\exp \left(\frac{-{(\ln \mathrm{dp}-\ln \mathrm{CMD})}^2}{2{\left(\ln {\mathrm{\σ}}_g\right)}^2}\right)---\left(8\right)$

Wherein, σ _gBe the geometric mean diameter (GSM) that water droplet distributes, CMD then is the number average grain diameter of Guan Liuzhong water droplet.

As shown in Figure 2, when waste gas with the direction shown in the arrow during by air inlet pipe 120 input, the trickle water smoke that is sprayed by ultrasonic two-phase flow spray humidifier 130 just can be earlier with the inorganic pollution in the waste gas (for example HF, HCl, HBr and NH ₃Deng) adsorb to get up, at this, the trickle water smoke emission direction of ultrasonic two-phase flow spray humidifier 130 is identical with the waste gas inflow direction.Then, waste gas can continue to be input in the filled type scrubbing tower 110 together with the trickle water smoke that contains inorganic pollution, and upwards by being arranged at a plurality of Raschig rings 112 wherein.Simultaneously, the water in the tank 114 is received lashes to the top of filled type scrubbing tower 110 by suction pump 150, and is sprayed on the Raschig ring 112 through a plurality of hole for water sprayings 116.Then, the trickle water smoke that contains inorganic pollution can combine once more with the water droplet on being sprayed on Raschig ring 112, and can fall into to tank 114 because of the gravity of water droplet.Then can upwards be discharged outside to as for remaining air or the waste gas after this emission-control equipment 100 is handled through blast pipe 140.

For the pollutant removal function of verifying that emission-control equipment 100 of the present invention is had, on emission-control equipment 100, be respectively arranged with three thief hatch S1 (before the ultrasonic two-phase flow spray humidifier 130), S2 (intersection of air inlet pipe 120 and filled type scrubbing tower 110) and S3 (blast pipe 140 places of filled type scrubbing tower 110), as shown in Figure 2, measuring pollutant levels respectively, and measurement data is shown in the table one.

Table one: the measured value of exhaust emission substrate concentration

P water＝2Kg/cm 2????????????????????P air＝3kg/cm 2
					S1	S2	S3
HCL	51.98	24.73	17.79
				NH 3	237526.28	4778.07	2475.38
F -	498.90	69.31	4.23
				NH 4 +	879.50	668.61	617.21

Unit: μ g/m ³(F ^-, NH ₄ ⁺); Ppb (HCL, NH ₃)

As shown in Table 1, water flow pressure in entering ultrasonic two-phase flow spray humidifier 130 and air pressure are respectively 2kg/cm ²And 3kg/cm ²The time, waste gas is by after the ultrasonic two-phase flow spray humidifier 130, and before entering filled type scrubbing tower 110, the pollutant in the waste gas (HCl, NH ₃, F ^-And NH ₄ ⁺) the i.e. significantly attenuating of concentration.So waste gas is after the carrying out washing treatment by filled type scrubbing tower 110, the pollutant levels of its discharge can more reduce.Hence one can see that, and the exhaust-gas treatment mode of emission-control equipment 100 of the present invention is compared with the exhaust-gas treatment mode of only using existing filled type scrubbing tower, has the effect that improves pollutant removal really.

Though the present invention discloses as above with preferred embodiment, but be not in order to qualification the present invention, any those skilled in the art, without departing from the spirit and scope of the present invention, the equivalent structure transformation of having done all is included in the claim of the present invention.

Claims (8)

1. an emission-control equipment is applicable to and handles the waste gas that contains pollutant, it is characterized in that, comprising:

One filled type scrubbing tower;

One air inlet pipe is connected in this filled type scrubbing tower, and wherein, this waste gas is flowed in this filled type scrubbing tower by this air inlet pipe;

One ultrasonic two-phase flow spray humidifier is arranged in this air inlet pipe, and in order to produce trickle water smoke, wherein, this pollutant in this waste gas is adsorbed by this trickle water smoke; And

One blast pipe is arranged on this filled type scrubbing tower, in order to discharge this waste gas.

2. emission-control equipment as claimed in claim 1 is characterized in that this ultrasonic two-phase flow spray humidifier has a venturi tube.

3. emission-control equipment as claimed in claim 2, it is characterized in that this ultrasonic two-phase flow spray humidifier has a water inlet, in order to import current, this ultrasonic two-phase flow spray humidifier is directly clashed into these current by pressure-air through this venturi tube, with water smoke in the middle of producing one.

4. emission-control equipment as claimed in claim 3 is characterized in that, this ultrasonic two-phase flow spray humidifier also has a ultrasonic resonance amplifier, and this centre water smoke directly clashes into this ultrasonic resonance amplifier, to produce this trickle water smoke.

5. emission-control equipment as claimed in claim 1 is characterized in that, this filled type scrubbing tower also has a tank, is arranged at the below of this filled type scrubbing tower.

6. emission-control equipment as claimed in claim 5 is characterized in that, also comprises a suction pump, is connected in the top of this tank and this filled type scrubbing tower, and the water in this tank is lashed to the top of this filled type scrubbing tower by this suction pump.

7. emission-control equipment as claimed in claim 6 is characterized in that, this filled type scrubbing tower also has a plurality of Raschig rings, is arranged in this filled type scrubbing tower, and is positioned at this tank top.

8. emission-control equipment as claimed in claim 7 is characterized in that, this filled type scrubbing tower also has a plurality of hole for water sprayings, is arranged at this Raschig ring top, and the water in this tank is sprayed on this Raschig ring by this hole for water spraying.

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