CN1501465A - Control of crystal grain size of polysilicon film and detecting method thereof - Google Patents
Control of crystal grain size of polysilicon film and detecting method thereof Download PDFInfo
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- CN1501465A CN1501465A CNA02151447XA CN02151447A CN1501465A CN 1501465 A CN1501465 A CN 1501465A CN A02151447X A CNA02151447X A CN A02151447XA CN 02151447 A CN02151447 A CN 02151447A CN 1501465 A CN1501465 A CN 1501465A
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Abstract
The invention discloses a polycrystalline silicon thin film crystal particle size control and detecting method comprising, providing a first substrate covered by a first non-crystalline silicon layer, implementing annealing treatment to the first non-crystalline silicon layer using laser rays of dissimilar energy density to form a plurality of first polycrystalline silicon areas, measuring the light spectrum change of each first polycrystalline silicon area with a finite photon energy range, providing a second substrate covered by a second non-crystalline silicon layer, implementing annealing treatment to the first non-crystalline silicon layer using the above laser energy density to obtain largest polycrystalline silicon crystal particle dimension, and detecting its crystal particle dimension using an elliptical instrument.
Description
Technical field
The present invention relates to a kind of detection method of semiconductive thin film, be particularly related to a kind of ellipsograph (ellipsometer) that utilizes and detect the method whether the polysilicon membrane crystallite dimension meets the specification, use the laser energy density that crystallization control uses and improve element characteristic and acceptance rate.
Background technology
Present Thin Film Transistor-LCD (thin film transistor-liquid crystal display, TFT-LCD) technology is divided into two kinds, and one is traditional amorphous silicon film transistor, and another is a polycrystalline SiTFT.Because the electronics translational speed of polycrystalline SiTFT is between 10 times to 100 times of amorphous silicon film transistor.Therefore, the TFT-LCD industry has taken up to study and develop, with the drive circuit of polycrystalline SiTFT as pixel (pixel) switch element and LCD periphery.
Low temperature polycrystalline silicon (low temperaturepolysilicon, LTPS) technology are adopted in the making of above-mentioned polycrystalline SiTFT usually.(excimerlaser annealing ELA) makes original amorphous silicon membrane be transformed into polysilicon structure in so-called LTPS technology utilization quasi-molecule laser annealing processing.Because technological temperature is below 600 ℃, so be applicable to transparent glass substrate.The electronics translational speed of polycrystalline SiTFT is relevant with the crystallite dimension of polysilicon membrane.That is the electronics translational speed of polycrystalline SiTFT is along with the crystallite dimension of polysilicon membrane increases and increases.Moreover the crystallite dimension of polysilicon membrane is relevant with the laser energy density that puts on amorphous silicon membrane.Therefore, be necessary polysilicon membrane is detected determining the laser energy density of use, and then the crystallite dimension of control polysilicon membrane.
In order to detect the polysilicon membrane crystallite dimension, utilize the light microscope more than 500 to 1000 times to come viewing film surface roughness (roughness) traditionally with crystallite dimension index as polysilicon membrane, because this kind mode extremely relies on human eye, therefore can't obtain accurate measurement result and not be suitable for large-sized substrate.In addition, (scanning electron beam microscope SEM) detects the crystallite dimension of polysilicon membrane to another traditional detection mode in order to adopt scanning electron microscopy.Yet said method is that destructive (destructive) detects, and must expend many times and make sample and observation, and seriously influences production capacity.In order to shorten Measuring Time, also the someone advise using atomic force microscope (atomic force microscope, AFM).Although AFM can measure and observe crystallite dimension, also to spend 30 minutes and not be suitable for the multiple spot analysis yet analyze a point.
Now, also the someone uses ellipsograph to detect, its after spectral measurement finishes, utilize the effective mass approximation method (effective medium approximation, EMA) or Abbe's law (dispersionlaw) make spectrum and return.Yet said method can't accurately obtain best laser energy density and percent crystallization in massecuite (crystalline ratio), and particularly (superlateral growth is in the time of SLG) when polysilicon membrane is in super horizontal growth.
Summary of the invention
Therefore, the object of the present invention is to provide a kind of detection method of polysilicon membrane, it measures the spectrum change of polysilicon membrane by ellipsograph, obtain a judge index via quantification detecting the crystallite dimension of polysilicon membrane accurately, apace, and the destructiveness that replaces traditional off-line (off-line) detects and effectively improves production capacity.
Another object of the present invention is to provide a kind of control method of crystallite dimension of polysilicon membrane, its judge index that is obtained by different laser energy density decides the optimization laser energy density that laser annealing is handled, with the crystallite dimension of control polysilicon membrane.
According to above-mentioned purpose, the invention provides a kind of detection method of polysilicon membrane.At first, provide a substrate, be coated with an amorphous silicon layer on it.Then, amorphous silicon layer is implemented annealing in process, amorphous silicon layer is transformed into a polysilicon layer with a laser with a set energy density.At last, measure the spectrum change of polysilicon layer, obtain a judge index via quantification, to monitor the crystallite dimension of polysilicon layer by judge index in a set photon energy range by a full spectrum ellipsograph.
According to above-mentioned purpose, the invention provides a kind of control method of crystallite dimension of polysilicon membrane again.At first, provide one first substrate, be coated with one first amorphous silicon layer on it.Then, with laser first amorphous silicon layer is implemented annealing in process respectively, in first amorphous silicon layer, to form a plurality of first multi-crystal silicon areas with different first set energy densities.Then, measure the spectrum change of these first multi-crystal silicon areas, obtain a plurality of judge index via quantification, to determine one second set energy density by these judge index in a set photon energy range by an optical instrument.Then, provide one second substrate, be coated with one second amorphous silicon layer on it.At last, with laser second amorphous silicon layer is implemented annealing in process, to control the crystallite dimension that second amorphous silicon layer is transformed into one second polysilicon layer with second set energy density.
Above-mentioned laser is an excimer laser, and the first set energy density is 300 to 500mJ/cm
2Scope.Moreover the second set energy density is the energy density that can meet the polysilicon grain dimensions.
Moreover above-mentioned spectrum change is meant that phase difference changes or intensity variation.
Moreover set photon energy range is between 2.2 to 2.7 electron-volts (eV), and preferred set photon energy range is between 2.3 to 2.5 electron-volts (eV).
Description of drawings
For above-mentioned purpose of the present invention, feature and advantage can be become apparent, preferred embodiment cited below particularly, and conjunction with figs. are described in detail below:
Fig. 1 is the flow chart that illustrates according to the polysilicon membrane detection method of the embodiment of the invention;
Fig. 2 is the schematic diagram that illustrates according to the ellipsograph detection of the embodiment of the invention;
Fig. 3 is the flow chart that illustrates according to the control method of the crystallite dimension of the polysilicon membrane of the embodiment of the invention; And
Fig. 4 is the curve chart that illustrates according to the relation of the phase difference of the embodiment of the invention and photon energy.
Description of reference numerals in the accompanying drawing is as follows:
100～substrate; 102～polysilicon layer;
200～light source generator; 202～polarizer;
204～pivot analysis instrument; 206～detector;
L～measuring light.
Embodiment
Fig. 1 is the flow chart that illustrates according to the polysilicon membrane detection method of the embodiment of the invention.At first, carry out step S10, a substrate is provided, a transparent glass substrate for example is formed with an amorphous silicon (layer of α-Si) on this substrate.In the present embodiment, this substrate is in order to make Thin Film Transistor-LCD (TFT-LCD).Amorphous silicon layer on the substrate is used for the channel layer of follow-up making thin-film transistor.This amorphous silicon layer can by chemical vapour deposition technique (chemical vapor deposition, CVD) or additive method form, its thickness is about the scope of 300 to 1000 dusts ().
Next, carry out step S12, with the laser with a set energy density amorphous silicon layer is implemented annealing in process, for example quasi-molecule laser annealing is handled (ELA), amorphous silicon layer is transformed into a polysilicon (p-Si) layer.In the present embodiment, the set energy density of laser is 300 to 500mJ/cm
2Scope.
Next, carry out step S14, by an optical instrument, a full spectrum ellipsograph (spectroscopic ellipsometer) for example, measure the spectrum change of polysilicon layer, for example phase difference (phase difference, cos (delta)) changes or intensity variation (tan (psi)).
Please refer to Fig. 2, it illustrates the schematic diagram according to the ellipsograph detection of the embodiment of the invention.Provide a measuring light L by a light source generator 200, and form polarised light (p-polarized light) (not shown) parallel by a polarizer (polarizer) 202 and reach polarised light (s-polarized light) (not shown) vertical and be projected to polysilicon layer 102 on the substrate of glass 100 with the plane of incidence with the plane of incidence.Two polarised lights reflex to pivot analysis instrument (analyzer) 204 and detector 206 via polysilicon layer 102.Afterwards, can learn the spectrum change of two reflect polarized light in a set photon energy (photo energy) scope by pivot analysis instrument 204 and detector 206, for example phase difference (cos (delta)) changes or intensity variation (tan (psi)).In the present embodiment, set photon energy range is between 2.2 to 2.7 electron-volts (eV), and preferred set photon energy range is between 2.3 to 2.5 electron-volts (eV).
Test discovery via the inventor, when polysilicon layer was formed with largest grain size, two reflect polarized light were in above-mentioned set photon energy range, and spectrum has obvious variation.
At last, carry out step S16, monitor the crystallite dimension of polysilicon layer by the measurement result of ellipsograph.Above-mentioned spectrum change can obtain a judge index via quantizing to calculate.In the present embodiment, turn example into phase difference variable, (for example, among the 2.3eV～2.5eV), the slope value of calculating the spectrum minimum is with as judge index in set photon energy range.Can determine by this judge index whether the crystal size of polysilicon layer meets the specification, and reach the purpose of monitoring polysilicon layer.Need not destroy substrate owing to utilize ellipsograph to detect, therefore can reduce manufacturing cost and shorten Measuring Time.Moreover ellipsograph can be integrated in the laser annealing treatment system, therefore can do online (in-line) and detect.When crystallite dimension does not meet technological requirement, can sound a warning immediately, the technologist is checked immediately and the energy density of adjusting laser is guaranteed the acceptance rate of subsequent product to obtain best crystallite dimension once again.Moreover laser annealing technique belongs to the FEOL of low temperature polycrystalline silicon technology, and this detects abnormal products and in time being scrapped or remake (rework) to technology again, can effectively reduce cost.
The present invention further proposes the control method of the crystallite dimension of polysilicon membrane.Please refer to Fig. 3, it illustrates the flow chart according to the control method of the crystallite dimension of the polysilicon membrane of the embodiment of the invention.At first, carry out step S20, a test substrate is provided, transparent glass substrate for example is formed with an amorphous silicon (layer of α-Si) on the substrate.In the present embodiment, test substrate is used for measuring machine.
Next, carry out step S22, with the laser with different set energy densities the amorphous silicon layer on the test substrate is implemented annealing in process respectively, for example quasi-molecule laser annealing is handled (ELA), to form a plurality of polysilicons (p-Si) district in amorphous silicon layer.In the present embodiment, the set energy density of laser is 300 to 500mJ/cm
2Scope.
Next, carry out step S24, owing to put on the laser energy density difference on the test substrate, so the crystallite dimension that each multi-crystal silicon area forms on the substrate is also inequality.Can measure these multi-crystal silicon areas on the test substrate in the spectrum change of a set photon energy range by the ellipsograph checkout gear of Fig. 2, for example phase difference (cos (delta)) changes or intensity variation (tan (psi)).Similarly, set photon energy range is between 2.2 to 2.7 electron-volts, and preferred set photon energy range is between 2.3 to 2.5 electron-volts.
For example, provide a test substrate, and 300 to 500mJ/cm
2The energy density scope in choose different set laser energy density A, B, C, D, and E and respectively test substrate is implemented annealing in process, on test substrate, to form the multi-crystal silicon area of various grain sizes.Then, (relation of 2.2eV～2.7eV), it the results are shown in Fig. 4 to measure the phase difference of each multi-crystal silicon area and photon energy.
Next, carry out step S26, from Fig. 4, determine the preferred laser energy density scope of annealing in process.Curve in Fig. 4 is represented the variation of phase difference with photon energy, and it is via quantizing to obtain corresponding judge index, by these judge index to determine the preferred laser energy density scope of annealing in process.In the present embodiment, judge index by set photon energy range (for example, among the 2.3eV～2.5eV), the minimum slope value gained of calculated curve.Via quantize to calculate the judge index of trying to achieve obviously make curve A, B, and C separate with curve D, E generation.That is, with have set energy density A, B, and the laser of C implement the multi-crystal silicon area of annealing in process, its crystallite dimension can be up to specification.Therefore, preferred laser energy density scope is between B and C.
Next, carry out step S28, a product substrate is provided, a transparent glass substrate for example is formed with an amorphous silicon (layer of α-Si) on it.Herein, the product substrate is used to make Thin Film Transistor-LCD (TFT-LCD), and amorphous silicon layer is used for the channel layer of follow-up making thin-film transistor.
At last, carry out step S30, utilize laser that the amorphous silicon layer on the product substrate is implemented annealing in process, use the crystallite dimension that the control amorphous silicon layer is transformed into polysilicon layer with set energy density A.Moreover the step S14 that can carry out Fig. 1 is to S16, to implement online detection.When crystallite dimension does not meet technological requirement, can sound a warning immediately, the technologist is checked immediately and the energy density of adjusting laser is guaranteed the acceptance rate of subsequent product to obtain best crystallite dimension once again.
Compared with prior art, therefore the crystallite dimension that method of the present invention can accurately online detection polysilicon membrane can improve acceptance rate and increase production capacity.Moreover, because ellipsograph detects to non-destructive detects, therefore can reduce manufacturing cost.
Though the present invention with preferred embodiment openly as above; but it is not in order to limit the present invention; under the situation that does not break away from the spirit and scope of the present invention, those skilled in the art can do to change and retouching, so protection scope of the present invention should be as the criterion so that appended claim is determined.
Claims (19)
1. the detection method of a polysilicon membrane comprises the following steps:
One substrate is provided, is coated with an amorphous silicon layer on this substrate;
With a laser this amorphous silicon layer is implemented annealing in process, so that this amorphous silicon layer is transformed into a polysilicon layer with a set energy density; And
Measure the spectrum change of this polysilicon layer by an optical instrument, and obtain a judge index, to monitor the crystallite dimension of this polysilicon layer by judge index via quantification in a set photon energy range.
2. the detection method of polysilicon membrane as claimed in claim 1, wherein this substrate is a glass substrate.
3. the detection method of polysilicon membrane as claimed in claim 1, wherein this laser is an excimer laser.
4. the detection method of polysilicon membrane as claimed in claim 3, wherein this set energy density is 300 to 500mJ/cm
2Scope.
5. the detection method of polysilicon membrane as claimed in claim 1, wherein this optical instrument is a full spectrum ellipsograph.
6. the detection method of polysilicon membrane as claimed in claim 1, wherein this set photon energy range is between 2.2 to 2.7 electron-volts.
7. the detection method of polysilicon membrane as claimed in claim 1, wherein this set photon energy range is between 2.3 to 2.5 electron-volts.
8. the detection method of polysilicon membrane as claimed in claim 1, wherein this spectrum change is that phase difference changes and intensity variation a kind of.
9. the control method of the crystallite dimension of a polysilicon membrane comprises the following steps:
One first substrate is provided, is coated with one first amorphous silicon layer on this first substrate;
With laser this first amorphous silicon layer is implemented annealing in process respectively, in this first amorphous silicon layer, to form a plurality of first multi-crystal silicon areas with different first set energy densities;
Measure the spectrum change of those first multi-crystal silicon areas by an optical instrument, and obtain a plurality of judge index, to determine one second set energy density by these judge index via quantification in a set photon energy range;
One second substrate is provided, is coated with one second amorphous silicon layer on this second substrate; And
With laser this second amorphous silicon layer is implemented annealing in process, to control the crystallite dimension that this second amorphous silicon layer is transformed into one second polysilicon layer with this second set energy density.
10. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 9, also comprise by this optical instrument and measure the spectrum change of this second polysilicon layer in this set photon energy range, and obtain a judge index via quantification, to monitor the step of the crystallite dimension of this second polysilicon layer by judge index.
11. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 10, wherein this spectrum change is a kind of of phase difference variation and intensity variation.
12. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 9, wherein those first substrates and this second substrate are glass substrate.
13. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 9, wherein this laser is an excimer laser.
14. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 13, wherein those first set energy densities are 300 to 500mJ/cm
2Scope.
15. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 9, wherein this optical instrument is a full spectrum ellipsograph.
16. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 9, wherein this set photon energy range is between 2.2 to 2.7 electron-volts.
17. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 9, wherein this set photon energy range is between 2.3 to 2.5 electron-volts.
18. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 9, wherein this spectrum change is a kind of of phase difference variation and intensity variation.
19. the control method of the crystallite dimension of polysilicon membrane as claimed in claim 9, wherein this second set energy density is for meeting the energy density of polysilicon grain dimensions.
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| CN 02151447 CN1270367C (en) | 2002-11-19 | 2002-11-19 | Control of crystal grain size of polysilicon film and detecting method thereof |
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| CN 02151447 CN1270367C (en) | 2002-11-19 | 2002-11-19 | Control of crystal grain size of polysilicon film and detecting method thereof |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7473657B2 (en) | 2005-02-28 | 2009-01-06 | Nec Lcd Technologies, Ltd. | Laser irradiation method and apparatus for forming a polycrystalline silicon film |
| CN100451608C (en) * | 2006-03-30 | 2009-01-14 | 西安电子科技大学 | Optical sensor for thin film detection |
| CN101354236B (en) * | 2008-08-05 | 2010-06-02 | 上海新傲科技股份有限公司 | Method for performing nondestructive detection of granule geometric dimension for multi-layer film surface of substrate |
| CN101866838A (en) * | 2010-05-24 | 2010-10-20 | 南通大学 | Amorphous silicon film controllable iso-epitaxial growth method |
| CN101834114B (en) * | 2009-03-11 | 2011-11-23 | 台湾积体电路制造股份有限公司 | Advanced process control method for gate profile and system for fabricating integrated circuit |
| CN109950166A (en) * | 2019-03-11 | 2019-06-28 | 武汉新芯集成电路制造有限公司 | The detection method of crystallite dimension |
-
2002
- 2002-11-19 CN CN 02151447 patent/CN1270367C/en not_active Expired - Lifetime
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7473657B2 (en) | 2005-02-28 | 2009-01-06 | Nec Lcd Technologies, Ltd. | Laser irradiation method and apparatus for forming a polycrystalline silicon film |
| CN100451608C (en) * | 2006-03-30 | 2009-01-14 | 西安电子科技大学 | Optical sensor for thin film detection |
| CN101354236B (en) * | 2008-08-05 | 2010-06-02 | 上海新傲科技股份有限公司 | Method for performing nondestructive detection of granule geometric dimension for multi-layer film surface of substrate |
| CN101834114B (en) * | 2009-03-11 | 2011-11-23 | 台湾积体电路制造股份有限公司 | Advanced process control method for gate profile and system for fabricating integrated circuit |
| CN101866838A (en) * | 2010-05-24 | 2010-10-20 | 南通大学 | Amorphous silicon film controllable iso-epitaxial growth method |
| CN109950166A (en) * | 2019-03-11 | 2019-06-28 | 武汉新芯集成电路制造有限公司 | The detection method of crystallite dimension |
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| CN1270367C (en) | 2006-08-16 |
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