CN1488779A - Multipurpose laser electrochemical micromanufacturing apparatus - Google Patents
Multipurpose laser electrochemical micromanufacturing apparatus Download PDFInfo
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- CN1488779A CN1488779A CNA031252796A CN03125279A CN1488779A CN 1488779 A CN1488779 A CN 1488779A CN A031252796 A CNA031252796 A CN A031252796A CN 03125279 A CN03125279 A CN 03125279A CN 1488779 A CN1488779 A CN 1488779A
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Abstract
The present invention discloses a multipurpose laser electrochemical micromaking equipment, its structure includes: replaceable lining positioned in the external shell, movable cover plate placed on the external shell, positive and negative power-line terminals on the cover plate, gas inlet, exhaust outlet and replaceable laser window. The electrode frames are mutually perpendicular, and their distance and positions can be regulated by means of two groups of regulating screw bars and regulating nuts which are respectively fixed on the cover plate, and a pair of mobile electrode grippers is set on the electrode frame.
Description
Technical field
The invention belongs to little manufacturing process and apparatus technology thereof, be specifically related to the little manufacturing installation of a kind of multi-purpose laser electrochemistry.Adopt the present invention by increasing and decreasing some parts, to constitute different devices, thereby carry out the little manufacturing of laser, chemical little manufacturing, the little manufacturing of electrochemistry, the little manufacturing of laser chemistry and the little manufacturing of laser electrochemistry at different needs.This device is particularly suitable for above-mentioned several technologies are compared experimental study.
Background technology
In existing little manufacturing process, for the figure that needing on substrate, to obtain, generally adopt photoetching process gluing on substrate to make micro structured pattern, then, with etching or sedimentary method the structure through exposure is carried out etching or deposition again.According to the method difference of etching, can be divided into wet etching and dry etching two big classes.Common wet etching can be divided into two kinds of chemical etching and electrochemical etchings again.Although there is the little problem of depth-to-width ratio in wet etching,, etching apparatus is simple, still has the certain development prospect.
Have the depth-to-width ratio problem of smaller at wet etching, the induced with laser chemistry micro fabrication of rising in recent years can reduce deleterious lateral encroaching influence, improves the microstructure depth-to-width ratio.These technologies adopt CO usually
2Laser apparatus (10.6 micron wave length) or Ar+ laser apparatus (as 488 nano wave lengths) are as light source.As human Ar+ laser radiation NaCl, NaNO such as the M.Datta of the eighties IBM Corporation
3, K
2SO
4Metal parts Deng in the neutral salt solution can improve the lateral encroaching problem.As with 22 watts of Ar
+Laser illumination NaNO
3Stainless steel plate in the solution (thickness is 750 microns), after 20 seconds, the degree of depth that steel plate is etched can reach 90 microns.But because of being subjected to the restriction of optical maser wavelength, often difficulty tackles the problem at its root, and in order to obtain the bigger microstructure of depth-to-width ratio, the inventor has proposed the employing excimer laser and induced electrochemical little manufacture method (seeing the other patent application of the inventor for details).These methods combine laser photochemistry, photoelectrochemistry technology, form a series of new little manufacturing process.
At the requirement of the little manufacturing process of difference, some manufacturing installations or experimental installation appearred.But these manufacturing installations or experimental installation often just form at certain specific technological design, can only finish the production or the experiment of certain special process.For example, people such as Li Chengde, ten thousand is full of, Chen Tao, Zuo Tiechuan directly carve little manufacturing process and design a kind of experimental installation at laser projection, utilize this device can realize the direct etching of laser; And the existing corresponding product of chemical Milling appts is sold, different electro chemical etching apparatus also has the people constantly to design, the Chinese patent application (96119282.8 of Yi Yuan blog article etc. for example, publication number is CN1163948A) a kind of new electro chemical etching apparatus disclosed, the negative electrode of this device has the shape identical with the figure that needs etching, and obviously, this experimental installation does not fit into the little manufacturing process of induced with laser electrochemistry.United States Patent (USP) 5773369 has provided a kind of synoptic diagram of induced with laser electrochemical etching experimental installation, and this experimental installation is regulated inconvenient, adopts open by design, environment is polluted easily the damage of harm laser equipment.In a word, more than these the device, all be to design at certain specific technology, do not have universality, simultaneously, also have some problems such as etching apparatus.Therefore, such device is unsuitable for the research that experimentizes of the little manufacturing process of laser electrochemistry.
Summary of the invention
The object of the present invention is to provide a kind of little manufacturing installation of multi-purpose laser electrochemistry that can overcome above-mentioned defective, this device has multiple function, it not only can be used for the little manufacturing process of laser electrochemistry, can also be used for the little manufacturing of laser, chemical little manufacturing, the little manufacturing of electrochemistry and the little manufacturing process of laser chemistry.
The little manufacturing installation of a kind of multi-purpose laser electrochemistry of the present invention, comprise electrode, it is characterized in that: removable lining is positioned at shell, shell is provided with movable cover plate, cover plate is provided with the positive and negative terminal stud of power supply, inlet mouth, venting port and removable laser window, electrode suppor is vertical mutually, and regulates its distance and position by two groups of fixing adjusting screw mandrel and setting nuts on the cover board respectively, and electrode suppor is provided with a pair of removable electrode anchor clamps.
The said device of the present invention adopts can change the parts that maybe can regulate, according to different processing requirements, increase and decrease some parts or connection, make this device be adapted to the little manufacturing of laser, chemical little manufacturing, the little manufacturing of electrochemistry, the little manufacturing of laser chemistry and the little manufacturing process of laser electrochemistry, and can satisfy the requirement that parameter and condition change in the above-mentioned technology.Adopt sealed structure and gas barrier to make this device not pollute for indoor equipment.This device achieves the above object by changing or regulating some parts simultaneously, has simplicity of design, characteristics easy to adjust, cheap for manufacturing cost are installed.
Description of drawings
Fig. 1 is the little manufacturing installation synoptic diagram of multifunction laser electrochemistry.
Fig. 2 is the sectional view of Fig. 1 along the A-A line.
Embodiment
As shown in Figure 1, be provided with removable lining 110 in the shell 112 of this device, cover and on the movable cover plate 115 on the shell, be provided with the positive and negative terminal stud 100 of power supply and 101, inlet mouth 102, venting port 104 and removable laser window 103, electrode suppor 106,107 is vertical mutually, and regulate its distance and position by two groups of fixing adjusting screw mandrel 109,117 and setting nuts 108,118 on the cover board respectively, electrode suppor 106 is provided with a pair of removable electrode anchor clamps 111.
This device has adopted capable of being combined, dismountable mode to satisfy the requirement of different little manufacturing process.Two terminal studs can adopt redness and density bullet, and its upper end links with the positive pole and the negative pole of power supply respectively, and its lower end links with anode and cathode electrode respectively, and can make up according to different needs.The material of laser window can be selected according to different optical maser wavelengths, transmitance and homogeneity, for example, at the laser of 248nm, adopts the quartzy glass of synthetic, and at infrared laser etc., adopt natural quartz glass.Working electrode or workpiece and supporting electrode are separately fixed on the electrode suppor 106,107.The distance between working electrode and the laser window can be changed easily,, two distance between electrodes can also be regulated by setting nut.Electrode suppor can add or remove as required, and the shape of electrode suppor and electrode holder and size, can change as required.Parts such as cover plate, electrode suppor, setting nut, adjusting screw mandrel, removable lining can be chosen according to different reaction mediums.When being salt, acid, alkali etc. for reaction medium, adopt polypropylene and ABS plastic and synthetic glass etc.; And medium can adopt tetrafluoroethylene when being halogen gas and its solution.When not adding power supply, if do not add laser, and feed reactant gases or workpiece is immersed reaction liquid, can carry out chemical etching or the little manufacturing of chemical deposition; If only add laser, then can realize the little manufacturing process of laser; When adding laser, feed assisted reaction gas or workpiece is immersed reaction liquid, carry out laser chemistry etching or the little manufacturing of laser chemistry deposit.Adding under the situation of power supply,, and feeding reactant gases or workpiece is immersed reaction liquid, can carry out electrochemical etching or the little manufacturing of electrochemical deposition if do not add laser; If add laser, feed assisted reaction gas or workpiece is immersed reaction liquid, carry out laser electrochemical etching or the little manufacturing of laser electrochemical deposition.
Below with several specific embodiments explanation the specific embodiment of the present invention.
Example 1: the little manufacturing installation of multifunction laser electrochemistry
With the little manufacturing installation of multifunction laser electrochemistry is example, and the embodiment of the said little manufacturing installation of the present invention is described.The little manufacturing installation synoptic diagram of this multifunction laser electrochemistry as shown in Figure 1.This device comprises electrode suppor 106,107, setting nut 108, the adjusting screw mandrel 109,117 of power-line terminal 100 and 101, inlet mouth 102, removable laser window 103, venting port 104, adjustable distance and position, parts such as removable lining 110, electrode holder 111, shell 112, base 113, attachment bolt 114 and cover plate 115.
During use,, select corresponding laser window, form laser window 103, will consider the transmitance and the homogeneity of laser when selecting window material according to the difference of optical maser wavelength.For example at the excimer laser of 193nm and 248nm, the optical quartz that can adopt synthetic is through polishing as window, at CO
2The laser that laser apparatus produces can adopt natural quartz through polishing as window or the like.After selecting window, window assembly is installed on the cover board.Then, workpiece and supporting electrode are installed in respectively on the electrode suppor 106,107 with electrode holder 111, then, be contained in and regulate on the screw mandrel 109, regulate distance between distance between electrodes and workpiece and the cover plate (image distance of this distance and laser imaging have between relation) with setting nut.What person of workpiece and supporting electrode can adjust according to experiment or technological design near laser window.Electrode holder can adopt mechanical system also can adopt electromagnetism or other modes.Electrode holder can rely in the position on the electrode suppor in its slideway 116 in support and to move and change.Electrode holder can be a mechanical system, also can be electromagnetism and pneumatics, and this specification sheets provides the simple anchor clamps of being made up of T type bolt, nut.Wherein, T type bolt passes the groove in the slideway, and workpiece or electrode are added between nut and the electrode suppor.The direction that is fixed on the electrode on the electrode suppor can be carried out conversion as requested.Then, stainless steel casing 112 is placed in the groove of base 113, lining 110 is put into stainless steel casing, a certain amount of electrolytic solution is imported in the lining, cover cover plate 115, connect with attachment bolt at last, connect airway, connect power supply, can constitute the little manufacturing installation of the multi-functional laser electrochemistry of cover, wherein, if workpiece and anode are linked, then constitute the little manufacturing installation of laser electrochemical etching,, then constitute the little manufacturing installation of laser electrochemical deposition if workpiece and negative electrode are linked.If need in manufacturing processed, add assist gas, can insert by inlet mouth; If do not need assist gas, can inlet mouth be blocked with a plug.
Treat that workpiece machines,, screw off the knob of power-line terminal earlier, lay down attachment bolt, take off cover plate, then, unclamp anchor clamps, take out workpiece and get final product at deenergization with after closing laser apparatus.
Example 2: the little manufacturing installation of laser chemistry
If do not connect power supply, removing electrode then becomes the little manufacturing installation of laser chemistry in the last little manufacturing installation of routine described multifunction laser electrochemistry.
Example 3: the little manufacturing installation of electrochemistry
If the device in the example 1 adopts general glass window, and obstructed laser, then constitute the little manufacturing installation of electrochemistry.
Example 4: chemical little manufacturing installation
If do not connect power supply, removing electrode then becomes the little manufacturing installation of laser chemistry in the last little manufacturing installation of routine described electrochemistry.
Example 5: the little manufacturing installation of laser scribing
The device that example 1 adopts if do not connect power supply, is removed electrode, and the etching liquid of not packing into, then becomes the little manufacturing installation of laser scribing.
Claims (1)
1, the little manufacturing installation of a kind of multi-purpose laser electrochemistry, comprise electrode, it is characterized in that: removable lining (110) is positioned at shell (112), shell (112) is provided with movable cover plate (115), cover plate (115) just is being provided with power supply, negative terminal (100,101), inlet mouth (102), venting port (104) and removable laser window (103), electrode suppor (106,107) vertical mutually, and respectively by two groups of adjusting screw mandrels (109 that are fixed on the cover plate (115), 117) and setting nut (108,118) regulate its distance and position, electrode suppor (106) is provided with a pair of removable electrode anchor clamps (111).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03125279 CN1233874C (en) | 2003-08-15 | 2003-08-15 | Multipurpose laser electrochemical micromanufacturing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03125279 CN1233874C (en) | 2003-08-15 | 2003-08-15 | Multipurpose laser electrochemical micromanufacturing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1488779A true CN1488779A (en) | 2004-04-14 |
| CN1233874C CN1233874C (en) | 2005-12-28 |
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ID=34153011
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03125279 Expired - Fee Related CN1233874C (en) | 2003-08-15 | 2003-08-15 | Multipurpose laser electrochemical micromanufacturing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1233874C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1312459C (en) * | 2005-06-16 | 2007-04-25 | 华中科技大学 | Device of measuring dynamic characteristics of micro electromechanical system possessing environment-loading function |
| CN102888639A (en) * | 2012-10-11 | 2013-01-23 | 桂林电子科技大学 | Electrode distance adjustable type microarc oxidation electrode holder |
-
2003
- 2003-08-15 CN CN 03125279 patent/CN1233874C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1312459C (en) * | 2005-06-16 | 2007-04-25 | 华中科技大学 | Device of measuring dynamic characteristics of micro electromechanical system possessing environment-loading function |
| CN102888639A (en) * | 2012-10-11 | 2013-01-23 | 桂林电子科技大学 | Electrode distance adjustable type microarc oxidation electrode holder |
| CN102888639B (en) * | 2012-10-11 | 2015-11-04 | 桂林电子科技大学 | Electrode distance adjustable type microarc oxidation electrode holder |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1233874C (en) | 2005-12-28 |
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