CN1479031A - Filtering type temperature controlled helium gas microleak valve - Google Patents
Filtering type temperature controlled helium gas microleak valve Download PDFInfo
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- CN1479031A CN1479031A CNA031282873A CN03128287A CN1479031A CN 1479031 A CN1479031 A CN 1479031A CN A031282873 A CNA031282873 A CN A031282873A CN 03128287 A CN03128287 A CN 03128287A CN 1479031 A CN1479031 A CN 1479031A
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- helium
- seal closure
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- throttle pipe
- electric heating
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Abstract
A temp-controlled filter-type helium gas micro-releasing valve for filling helium gas in a supervacuum system is composed of gas channel and flow speed controller. Said gas channel consists of helium gas throttle tube, sealing cover, glass tubes, stainless steel tube and flange. Said flow speed controller cosnsits of electrothermal wire, temp sensor, heating electrode, Ni piece and constant temp controller.
Description
Technical field:
The present invention relates to throttle valve, relate in particular to the helium throttle valve.Be mainly used in and in ultra-high vacuum system, inject micro-highly purified helium.
Background technique:
A lot of Physical Experiments need be at pressure less than 10
-7Carry out under the UHV condition of Pa, the high-purity helium that charges into trace in vacuum system can play buffering or cooling action to operation material, to under the situation of not destroying the system vacuum degree, charge into the high-purity helium of trace, need connect helium tank by throttle valve, throttle valve is made up of venting channels and flow speed controller usually, the venting channels of existing throttle valve adopts little drain formation of tiny machinery, flow speed controller adopts knob structure, constitute a kind of microleak valve, realize flow velocity and the flow inflated by the turn-knob of regulating microleak valve, but, this microleak valve is when installing or changing gas cylinder, owing between microleak valve and gas cylinder, have air to enter ultra-high vacuum system, the degree of vacuum that guarantees system is unlikely to descend, it is very high just to require vacuum between microleak valve and gas cylinder to take out system index in advance, promptly the degree of vacuum of taking out system in advance will be extracted into identically with the system vacuum degree, and this need spend great amount of manpower and material resources.And this microleak valve is that the helium in the gas cylinder is directly charged in the vacuum system, guarantee to charge into the purity of helium, just requires to provide highly purified helium.
On the other hand, found in the research to the ultrahigh vacuum material: different materials has very big difference to the penetrating power of gas with various in the past, in 25～400 ℃ of scopes, under the condition of same pressure difference, it is high 3 more than the order of magnitude that silica glass is compared the permeation rate of other gases to the permeation rate of helium, and permeation rate can raise along with the rising of silica glass temperature.People need consider this characteristic when seeking suitable ultrahigh vacuum seal material.
Summary of the invention:
The objective of the invention is: a kind of filtering type temperature control helium microleak valve is provided, this microleak valve is to utilize silica glass that helium is had permselective characteristics, with its spool, by the flow velocity and the flow of temperature regulation helium of control silica glass as the helium microleak valve.Use the present invention to fill helium, not only reduce the requirement that vacuum is taken out system in advance greatly, can save great amount of manpower and material resources, also can reduce requirement, can reduce expenses helium purity to ultra-high vacuum system.
To achieve these goals, the following technological scheme of employing of the present invention:
Filtering type temperature control helium microleak valve is made up of venting channels and flow speed controller, the helium throttle pipe that little drain formation adopting quartz glass of venting channels is made, flow speed controller comprises temperature transducer, radiator valve and is looped around electric heating wire on the helium throttle pipe external diameter, and temperature is adjustable continuously in 25～400 ℃ of scopes.
Wherein, venting channels is made up of helium throttle pipe, seal closure, 95 material glass tubes, air outlet, suction port, Stainless Steel Tube, flange and five flint glass F pipes; Flow speed controller is made up of electric heating wire, temperature transducer, heating electrode, nickel sheet and radiator valve; Annexation is: flange connects the cylinder type Stainless Steel Tube, five flint glass F pipes are tightly connected on Stainless Steel Tube, welding 95 material glass tubes again, the helium throttle pipe made with silica glass of welding then, its endcapped, at 1～3 millimeter place of helium throttle pipe external diameter around electric heating wire, put seal closure again, the seal closure welding is fixed on the outer surface of 95 material glass tubes, on seal closure, have air outlet and suction port, the two ends of electric heating wire connect together by nickel sheet and heating electrode respectively, two heating electrode difference hermetically passing seal closures, two heating electrodes that expose seal closure link to each other with radiator valve, and temperature transducer hermetically passing seal closure links to each other with radiator valve.
The present invention has following advantage and effect: use the present invention, as long as the forvacuum degree reaches 0.1Pa, greatly reduce the requirement of system that vacuum is taken out in advance, can save great amount of manpower and material resources; Because the adopting quartz glass pipe is as spool, and silica glass has optionally infiltration to helium, therefore, charges into the helium purity height of system, can reduce the requirement to helium purity, has reduced expense; In addition, owing to adopt temperature control mode, so it is simple to operate.
Description of drawings:
Fig. 1 is the structural representation of apparatus of the present invention.
Wherein: 1 helium throttle pipe, 2 electric heating wire, 3 seal closures, 4 temperature transducers, 5 radiator valves, 6 nine five material glass tubes, 7 air outlets, 8 suction ports, 9 five flint glass F pipes, 10 Stainless Steel Tubes, 11 nickel sheets, 12 heating electrodes, 13 flanges.
Embodiment:
Below in conjunction with accompanying drawing, the present invention is further illustrated.
As shown in Figure 1, the present invention is made up of helium throttle pipe 1, electric heating wire 2, seal closure 3, temperature transducer 4, radiator valve 5,95 material glass tubes 6, air outlet 7, suction port 8, five flint glass F pipes 9, Stainless Steel Tube 10, nickel sheet 11, heating electrode 12, flange 13.Annexation between each parts is: be connected cylinder type Stainless Steel Tube 10 with the steel flange 13 that vacuum system connects, five flint glass F pipes 9 are tightly connected on Stainless Steel Tube 10, welding 95 material glass tubes 6 on five flint glass F pipes 9, welding helium throttle pipe 1 on 95 material glass tubes 6, helium throttle pipe 1 adopting quartz glass, the other end sealing of helium throttle pipe 1, the outside of helium throttle pipe 1 is around electric heating wire 2, helium throttle pipe 1 and electric heating wire 2 keep 1～3 mm clearance, outside at electric heating wire 2 puts seal closure 3 again, seal closure 3 adopts 95 material glass, the outer surface sealing of one end of seal closure 3 and 95 material glass tubes 6 is welded together, an air outlet 7 and a suction port 8 are opened in the other end sealing of seal closure 3 on seal closure 3.Electric heating wire 2 two ends connect together by nickel sheet 11 and heating electrode 12 respectively, two heating electrode 12 difference hermetically passing seal closures 3, and two heating electrodes that expose seal closure 3 link to each other with radiator valve 5.The electrode hermetically passing seal closure 3 of temperature transducer 4 links to each other 5 with radiator valve.
Using method of the present invention is: the present invention is connected on the vacuum system by steel flange 13, air outlet 7 by vacuum rubber pipe and vacuum in advance the system of taking out link to each other, suction port 8 links to each other with the helium steel cylinder by the vacuum rubber pipe, and the electrode of heating electrode 12 and temperature transducer 4 links to each other with radiator valve 5.Open vacuum and take out system in advance, bled in space between helium throttle pipe 1 and the seal closure 3, when degree of vacuum reaches the 0.1Pa left and right sides, close vacuum and take out system in advance, open the valve of helium steel cylinder, between helium throttle pipe 1 and seal closure 3, be full of the helium of certain purity this moment, regulate radiator valve 5, the temperature of helium throttle pipe 1 is slowly raise,, slowly fill into helium in the ultra-high vacuum system to improve the permeation rate of 1 pair of helium of helium throttle pipe, note monitoring the vacuum measuring instrument indication of vacuum system, after the air pressure of helium in the vacuum system reaches needed index, regulate radiator valve 5, the temperature of helium throttle pipe 1 is slowly reduced, air pressure up to helium is constant at needed value stabilization, at this moment, vacuum system reaches a kind of transient equiliblium of inflating and bleeding, and gas replenishment process is finished.
Claims (2)
1, filtering type temperature control helium microleak valve, this microleak valve is made up of venting channels and flow speed controller, it is characterized in that, the helium throttle pipe (1) that little drain formation adopting quartz glass of venting channels is made, flow speed controller comprises temperature transducer (4), radiator valve (5) and is looped around electric heating wire (2) on helium throttle pipe (1) external diameter, and temperature is adjustable continuously in 25～400 ℃ of scopes.
2, filtering type temperature control helium microleak valve according to claim 1, it is characterized in that described venting channels is made up of helium throttle pipe (1), seal closure (3), 95 material glass tubes (6), air outlet (7), suction port (8), Stainless Steel Tube (10), flange (13) and five flint glass F pipes (9); Described flow speed controller is made up of electric heating wire (2), temperature transducer (4), heating electrode (12), nickel sheet (11) and radiator valve (5); Wherein flange (13) connects cylinder type Stainless Steel Tube (10), five flint glass F pipes (9) are tightly connected on Stainless Steel Tube (10), welding 95 material glass tubes (6) again, the helium throttle pipe (1) made with silica glass of welding then, its endcapped, at 1～3 millimeter place of helium throttle pipe (1) external diameter around electric heating wire (2), put seal closure (3) again, seal closure (3) welding is fixed on the outer surface of 95 material glass tubes (6), on seal closure (3), have air outlet (7) and suction port (8), the two ends of electric heating wire (2) connect together by nickel sheet (11) and heating electrode (12) respectively, two heating electrodes (12) are hermetically passing seal closure (3) respectively, two heating electrodes (12) that expose seal closure (3) link to each other with radiator valve (5), temperature transducer (4) hermetically passing seal closure (3) links to each other with radiator valve (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031282873A CN100393385C (en) | 2003-07-08 | 2003-07-08 | Filtering type temperature controlled helium gas microleak valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB031282873A CN100393385C (en) | 2003-07-08 | 2003-07-08 | Filtering type temperature controlled helium gas microleak valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1479031A true CN1479031A (en) | 2004-03-03 |
| CN100393385C CN100393385C (en) | 2008-06-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB031282873A Expired - Fee Related CN100393385C (en) | 2003-07-08 | 2003-07-08 | Filtering type temperature controlled helium gas microleak valve |
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| CN (1) | CN100393385C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101968661A (en) * | 2010-09-26 | 2011-02-09 | 中国科学院武汉物理与数学研究所 | Constant-pressure helium control device of vacuum system and constant-pressure control method |
| CN104280280A (en) * | 2014-10-13 | 2015-01-14 | 赵烨梁 | Device for preparing unimolecular sample by microleakage sample injection method |
| CN111577913A (en) * | 2020-05-18 | 2020-08-25 | 中国科学院微电子研究所 | Semiconductor process equipment, isolation valve and control method |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1030821A (en) * | 1987-07-20 | 1989-02-01 | 黄明荣 | Static high-vacuum valve |
| CN87217105U (en) * | 1987-12-29 | 1988-11-23 | 四川民盟智力服务中心 | Propelling greaseless vacuum valve |
| JPH0791563A (en) * | 1993-09-24 | 1995-04-04 | Mitsubishi Heavy Ind Ltd | Non-penetrating remote valve |
| CN2264039Y (en) * | 1996-07-26 | 1997-10-08 | 核工业西南物理研究院 | Gas-liquid separator having nitrogen reclaimed |
-
2003
- 2003-07-08 CN CNB031282873A patent/CN100393385C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101968661A (en) * | 2010-09-26 | 2011-02-09 | 中国科学院武汉物理与数学研究所 | Constant-pressure helium control device of vacuum system and constant-pressure control method |
| CN101968661B (en) * | 2010-09-26 | 2012-05-23 | 中国科学院武汉物理与数学研究所 | Constant-pressure helium control device of vacuum system and constant-pressure control method |
| CN104280280A (en) * | 2014-10-13 | 2015-01-14 | 赵烨梁 | Device for preparing unimolecular sample by microleakage sample injection method |
| CN111577913A (en) * | 2020-05-18 | 2020-08-25 | 中国科学院微电子研究所 | Semiconductor process equipment, isolation valve and control method |
| CN111577913B (en) * | 2020-05-18 | 2022-07-12 | 中国科学院微电子研究所 | Semiconductor process equipment, isolation valve and control method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100393385C (en) | 2008-06-11 |
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Granted publication date: 20080611 Termination date: 20100708 |