CN1477310A - Axle sealing structure for vacuum pump - Google Patents
Axle sealing structure for vacuum pump Download PDFInfo
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- CN1477310A CN1477310A CNA021301840A CN02130184A CN1477310A CN 1477310 A CN1477310 A CN 1477310A CN A021301840 A CNA021301840 A CN A021301840A CN 02130184 A CN02130184 A CN 02130184A CN 1477310 A CN1477310 A CN 1477310A
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Abstract
The present invention relates to a Roots pump. It utilizes a pair of rotating shaft to make several rotors rotate to extract gas, every rotating shaft can be extended and passed through a rear shell member of said Roots pump. It includes several ring shaft seals, every shaft seal is mounted on the periphery of its respective rotating shaft and is received in the notch formed in interior of rear shell member, and also includes several labyrinths, every labyrinth is positioned between one end face of its respective shaft seal and bottom face of related notch, so that the diameter of every labyrinth can be enlarged so as to effectively prevent the oil from leaking into pump cavity.
Description
Technical field
The present invention relates to the vacuum pump sealing configuration, described vacuum pump is used by rotating shaft and is operated in gas transfer body gas bleeding in the pump chamber.
Background technique
Japan publication issue No.60-145475,3-89080 and 6-101674 describe a kind of vacuum pump that comprises many rotors.Each rotor plays a kind of effect of gas transfer body.Two rotors rotate with being bonded with each other, thereby transmit gas by a pump chamber.More particularly, a rotor is connected to first rotating shaft, and another is connected to second rotating shaft.Motor driven first rotating shaft.Gear mechanism is sent to second rotating shaft with the rotation of first rotating shaft.
Gear mechanism is arranged in one and maintains in the lubricant oil oil pocket.The pump of Japan publication issue No.60-145475 uses a kind of labyrinth seal, and it seals up the space between oil pocket and the pump chamber and leaks into pump chamber so that prevent lubricant oil from oil pocket.More particularly, a dividing plate separates oil pocket and pump chamber, and has the through hole that rotating shaft extends through.This labyrinth seal is installed between through-hole wall and the rotating shaft counterpart.The pump of Japan publication issue No.3-89080 comprises the bearing bore of the bearing that is used for holding supporting shaft.Between bearing bore and pump chamber, form an intermediate cavity.A dividing plate separates bearing bore and intermediate cavity, and has the through hole that rotating shaft extends through.Labyrinth seal is installed between through-hole wall and the rotating shaft.The pump of Japan publication issue No.6-101674 comprises flange seal circle and labyrinth seal.These sealings are installed in the through-hole wall of a dividing plate that oil pocket and pump chamber are separated and extend through between the rotating shaft of this through hole.
If this labyrinth seal comprises many annular grooves, sealability can keep for a long time.In addition, if the volume of each annular ditch groove is relatively large, the sealability of this labyrinth seal can improve.Yet in vacuum pump mentioned above, because the space is limited, the volume that increases each annular ditch groove is difficult.
Summary of the invention
Therefore, a target of the present invention is: improve preventing the sealability of oil leakage to the labyrinth seal of vacuum pump pump chamber.
In order to reach above-mentioned and other targets and according to purposes of the present invention, to the invention provides a kind of vacuum pump, it is used by rotating shaft and operates in gas transfer body gas bleeding in the pump chamber.Described vacuum pump comprises: an oilcan member, and it forms the oil district of a contiguous pump chamber, and rotating shaft has the extension that reaches the oil district from pump chamber by the oilcan member; The section roller sealing is positioned at extension on every side so that rotate integrally with rotating shaft.Shaft sealing has the first sealing formation surface of radially extending along shaft sealing; Second sealing forms the surface and is formed on the oilcan member.The second sealing formation surface is relative with the first sealing formation surface and parallel with the first sealing formation surface basically.Labyrinth seal forms between the surface in first and second sealings.
Use the method for giving an example to describe below in conjunction with accompanying drawing, make other aspects of the present invention and advantage become clearer by the principle of the invention.
Description of drawings
With reference to following currently preferred embodiment explanation and accompanying drawing, can understand the present invention and target and advantage better, in the accompanying drawing:
Fig. 1 (a) is the transversal plane figure that shows first embodiment of the invention multi-stage roots (Roots) pump;
Fig. 1 (b) amplifies cross-sectional view, and it shows the sealing configuration around first rotating shaft of Fig. 1 (a) pump;
Fig. 1 (c) amplifies cross-sectional view, and it shows the sealing configuration around second rotating shaft of Fig. 1 (a) pump;
Fig. 2 (a) is the cross-sectional view that the 2a-2a line along Fig. 1 (a) dissects;
Fig. 2 (b) is the cross-sectional view that the 2b-2b line along Fig. 1 (a) dissects;
Fig. 3 (a) is the cross-sectional view that the 3a-3a line along Fig. 1 (a) dissects;
Fig. 3 (b) is the cross-sectional view that the 3b-3b line along Fig. 1 (a) dissects;
Fig. 4 (a) is the cross-sectional view that the 4a-4a line along Fig. 3 (b) dissects;
Fig. 4 (b) is the amplification cross-sectional view of a major component of displayed map 4 (a);
Fig. 4 (c) is another amplification cross-sectional view of a sealing configuration part of displayed map 4 (b);
Fig. 5 (a) is the cross-sectional view that the 5a-5a line along Fig. 3 (b) dissects;
Fig. 5 (b) is the amplification cross-sectional view of a major component of displayed map 5 (a);
Fig. 5 (c) is another amplification cross-sectional view of a sealing configuration part of displayed map 5 (b);
Fig. 6 is the perspective view that shows the sealing of first section roller;
Fig. 7 is the perspective view that shows the sealing of second section roller;
Fig. 8 is the cross-sectional view that shows a major component of second embodiment of the invention sealing configuration;
Fig. 9 is the cross-sectional view that shows a major component of third embodiment of the invention sealing configuration;
Figure 10 is the cross-sectional view that shows a major component of fourth embodiment of the invention sealing configuration;
Figure 11 is the cross-sectional view that shows a major component of fifth embodiment of the invention sealing configuration;
Figure 12 is the cross-sectional view that shows a major component of sixth embodiment of the invention sealing configuration;
Figure 13 is the cross-sectional view that shows a major component of seventh embodiment of the invention sealing configuration;
Figure 14 is the cross-sectional view that shows a major component of eighth embodiment of the invention sealing configuration;
Embodiment
First embodiment of the invention multi-stage roots pump 11 is described referring now to 1 (a) to 7.
Shown in Fig. 1 (a), pump 11, or a vacuum pump comprise a rotor shell member 12 and a preceding mould component 13. Mould component 12,13 links together.The front side of a preceding mould component 13 of lid 36 sealings.Mould component 14 is connected on the rear side of rotor shell member 12 after one.Rotor shell 12 comprises that a cylinder body 15 and many (being four in this embodiment) chamber form wall 16.Shown in Fig. 2 (b), cylinder body 15 comprises a pair of cylinder body portion 17,18, and each chamber forms wall 16 and comprises a pair of wall portion 161,162.It is identical from one another that a plurality of chambeies form wall 16.
Shown in Fig. 1 (a), first pump chamber 39 forms at preceding mould component 13 with between the most left chamber formation wall 16 that from then on figure observes.When observing from left to right in this figure, second, third and the 4th pump chamber 40,41,42 form between the wall 16 two adjacent chambers respectively according to this order and form.And the 5th pump chamber 43 forms formation between the wall 16 at back mould component 14 and the rightest chamber.
One first rotating shaft 19 is rotatably mounted by a pair of radial bearing 21,37 by preceding mould component 13 and back mould component 14.One second rotating shaft 20 is rotatably mounted by a pair of radial bearing 22,38 by preceding mould component 13 and back mould component 14.First and second rotating shafts 19,20 are parallel to each other and extend through the chamber and form wall 16.Radial bearing 37,38 is respectively by a pair of bearing housing 45,46 supportings that are installed in the back mould component 14. Bearing housing 45,46 is engaged in a pair of in the recess 47,48 that back mould component 14 rear sides form respectively.
The first, second, third, fourth and the 5th rotor 23,24,25,26 and 27 and first rotating shaft 19 integrally form.Equally, the first, second, third, fourth and the 5th rotor 28,29,30,31 and 32 and second rotating shaft 20 integrally form.Axis 191,201 directions along rotating shaft 19,20 are observed, and the shape and size of rotor 23-32 are identical.Yet the axial dimension of first to the 5th rotor 23-27 of first rotating shaft 19 diminishes gradually by this order.Equally, the axial dimension of the first of second rotating shaft 20 to the 5th rotor 28-32 diminishes gradually by this order.
The first rotor 23,28 is accommodated in first pump chamber 39 and is bonded with each other. Second rotor 24,29 is accommodated in second pump chamber 40 and is bonded with each other. Third trochanter 25,30 is accommodated in the 3rd pump chamber 41 and is bonded with each other.Fourth trochanter 26,31 is accommodated in the 4th pump chamber 42 and is bonded with each other.The 5th rotor 27,32 is accommodated in the 5th pump chamber 43 and is bonded with each other.First to the 5th pump chamber 39-43 cannot not be lubricated.Therefore, rotor 23-32 and cylinder body 15, chamber form any one maintenance contactless state in wall 16, preceding mould component 13 and the back mould component 14.In addition, the rotor of joint does not slide mutually.
Shown in Fig. 2 (a), the first rotor 23,28 forms a suction district 391 and a pressure area 392 in first pump chamber 39.Pressure in the pressure area 392 is higher than the pressure in the suction district 391.Second forms similar suction district and pressure area to fourth trochanter 24-26,29-31 in relevant pump chamber 40-42.Shown in Fig. 3 (a), the 5th rotor 27,32 forms a suction district 431 and a pressure area 432 in pump chamber 43, and they and suction district 391 and pressure area 392 are similar.
Shown in Fig. 1 (a), a gear hub member 33 is connected with back mould component 14.In the mould component 14 of back, form a pair of through hole 141,142. Rotating shaft 19,20 extends through through hole 141,142 and relevant recess 47,48 respectively.Therefore rotating shaft 19,20 is stretched into gear hub member 33 so that form extension 193,203 respectively.A pair of gear 34,35 is separately fixed on the extension 193,203 and is meshing with each other.An electric notor M is connected on the gear hub member 33.Axle joiner 44 is sent to the driving force of motor M in first rotating shaft 19.Therefore motor M makes first rotating shaft 19 along by the arrow R1 indicated direction rotation of Fig. 2 (a) to 3 (b). Gear 34,35 rotations with first rotating shaft 19 are sent to second rotating shaft 20.So second rotating shaft 20 along by Fig. 2 (a) to the rotation of the arrow R2 indicated direction of 3 (b).Therefore, first and second rotating shafts 19,20 are rotated in opposite direction.Gear 34,35 forms a gear mechanism so that rotating shaft 19,20 is integrally rotated.
Shown in Fig. 4 (a) and 4 (b), a gear receiving cavity 331 forms and is used for keeping the lubricant oil Y of oilgear 34,35 usefulness in gear part 33.Gear receiving cavity 331 is oil districts of a sealing.Therefore gear hub member 33 and back mould component 14 form an oilcan, or the oil district of vicinity the 5th pump chamber 43.Back mould component 14 as the 5th pump chamber and this oil distinguish from dividing plate.Gear 34,35 rotations are so that the lubricant oil Y of stirring in gear receiving cavity 331.So lubricant oil Y lubricates radial bearing 37,38.The space 371,381 of each radial bearing 37,38 allows lubricant oil Y to enter a part that is positioned at 371,381 inboards, space of related recess 47,48.So recess 47,48 links to each other with gear receiving cavity 331 by space 371,381 and forms part oil district.
Shown in Fig. 2 (b), form passage 163 of wall 16 inner formation in each chamber.Each chamber forms wall 16 and has the 164 and outlets 165 of an inlet that link to each other with passage 163.Adjacent pump chamber 39-43 is connected with each other by the passage 163 that relevant chamber forms wall 16.
Shown in Fig. 2 (a), an inlet 181 extends through the cylinder body portion 18 of cylinder body 15 and links to each other with the suction district 391 of first pump chamber 39.Shown in Fig. 3 (a), an outlet 171 extends through the cylinder body portion 17 of cylinder body 15 and links to each other with the pressure area 432 of the 5th pump chamber 43.When gas from entering the mouth 181 when entering the suction district 391 of first pump chamber 39, the rotation of the first rotor 23,28 is sent to pressure area 392 with this gas.This gas compresses in pressure area 392, and 164 enters the passage 163 that adjacent chambers forms wall 16 from entering the mouth.So this gas arrives the suction district of second pump chamber 40 from the outlet 165 of passage 163.After, this gas repeats above-mentioned steps, flows to the 3rd, the 4th and the 5th pump chamber 41,42 and 43 in this order from second pump chamber 40.The volume of first to the 5th pump chamber 39-43 diminishes in this order gradually.When gas arrived the suction district 431 of the 5th pump chamber 43, the rotation of the 5th rotor 27,32 was sent to pressure area 432 with this gas.This gas is from exporting 171 outsides that are discharged into vacuum pump 11 then.That is to say that each rotor 23-32 is as the gas transfer body that transmits gas.
Shown in Fig. 1 (a), first and second section rollers sealing 49,50 is fixedly mounted in respectively around first and second rotating shafts 19,20.Shaft sealing 49,50 is positioned at related recess 47,48 and integrally rotates with relevant rotating shaft 19,20.A seal ring 51 is arranged between the circumference side 192 of the shaft sealing 49 inner circumference sides and first rotating shaft 19.In the same way, a seal ring 52 is arranged between the circumference side 202 of the shaft sealing 50 inner circumference sides and second rotating shaft 20.Each seal ring 51,52 prevents that the circumference side 192,202 along relevant rotating shaft 19,20 leaks into the 5th pump chamber 43 to lubricant oil Y from related recess 47,48.
Shown in Fig. 4 (b), 4 (c), 5 (b) and 5 (c), between the peripheral wall 471,481 of the excircle side 491,501 of part and related recess 47,48, a space is arranged with each shaft sealing 49,50 maximum diameter.Equally, between the bottom 472,482 of the leading flank 492,502 of each shaft sealing 49,50 and related recess 47,48, a space is arranged also.
Stretch out many annular projections 53 coaxially from the bottom surface 472 of recess 47.In the same way, stretch out many annular projections 54 coaxially from the bottom surface 482 of recess 48.In addition, in shaft sealing 49 leading flanks 492 relative, form many annular ditch grooves 55 coaxially with the bottom surface 472 of recess 47.In the same way, in shaft sealing 50 leading flanks 502 relative, form many annular ditch grooves 56 coaxially with the bottom surface 482 of recess 48.Each annular projection 53,54 stretches among the associated channels 55,56, so that the far-end of projection 53,54 is positioned at the place, bottom near groove 55,56.Each projection 53 is divided into chamber, a pair of labyrinth 551,552 with associated channels 55 inside of first shaft sealing 49.Each projection 54 is divided into chamber, a pair of labyrinth 561,562 with associated channels 56 inside of second shaft sealing 50.
Shown in Fig. 4 (c), on the leading flank 492 of first shaft sealing 49, apply a resin layer 59 securely.Shown in Fig. 5 (c), on the leading flank 502 of second shaft sealing 50, apply a resin layer 60 securely.At the space g1 between resin layer 59 and the bottom surface 472 less than the space G1 between each protruding 53 far-end and associated channels 55 bottom surfaces.At the space g2 between resin layer 60 and the bottom surface 482 less than the space G2 between each protruding 54 far-end and associated channels 56 bottom surfaces.Each space G1, G2 are substantially equal to the space between the peripheral wall 471,481 of the excircle side 491,502 of reference axis sealing 49,50 and recess 47,48.Space g1 is the minimum aperture between first shaft sealing 49 and back mould component 14.Space g2 is the minimum aperture between second shaft sealing 50 and back mould component 14.In the present invention, term " minimum aperture " refers to the space with a size, and this size can be improved the sealing in chamber, labyrinth.
As Fig. 1 (b), 4 (b) with shown in 6, on the excircle side 491 of first shaft sealing 49, form one first spiral groove 61.As Fig. 1 (c), 5 (c) with shown in 7, on the excircle side 501 of second shaft sealing 50, form one second spiral groove 62.Observe from the sense of rotation R1 of first rotating shaft 19, first spiral groove 61 forms a path, this path from corresponding to a side of gear receiving cavity 331 towards the 5th pump chamber 43.Observe from the sense of rotation R2 of second rotating shaft 20, second spiral groove 62 forms a path, this path from corresponding to a side of gear receiving cavity 331 towards the 5th pump chamber 43.In this manner, each spiral groove 61,62 produces a kind of pump action, and this pump action transmits from the side corresponding to the 5th pump chamber 43 this fluid when rotating shaft 19,20 rotations towards gear receiving cavity 331.That is to say, each spiral groove 61,62 forms a pumping installations, this pumping installations advances the lubricant oil Y between the peripheral wall 471,481 of the excircle side 491,501 of reference axis sealing 49,50 and recess 47,48, makes it from the side Chao You district motion corresponding to the 5th pump chamber 43.
Shown in Fig. 3 (b), form the formation first and second head pressure guide lines 63,64 in the wall surface 143 in the chamber of the back mould component 14 that forms final stage the 5th pump chamber 43.Shown in Fig. 4 (a), the first head pressure guide line 63 is connected to pressure maximum district 432, and its volume changes because of the rotation of the 5th rotor 27,32.The first head pressure guide line 63 is also connected to the through hole 141 that first rotating shaft 19 extends through.Shown in Fig. 5 (a), the second head pressure guide line 64 is connected to pressure maximum district 432, and the through hole 142 that extends through of second rotating shaft 20.
Shown in Fig. 1 (a), 4 (a) and 5 (a), in the mould component 14 of back, form a ring-type cooling chamber 65 round shaft sealing 49,50.Cooling water circulates in cooling chamber 65 so that cool off lubricant oil Y in the recess 47,48.
First embodiment has following effect.
The diameter of leading flank 492,502 that is installed in each shaft sealing 49,50 around the relevant rotating shaft 19,20 is greater than the diameter of rotating shaft 19,20 circumference sides 192,202.In this embodiment, each labyrinth seal 57,58 is arranged between the bottom surface 472,482 of the leading flank 492,502 of reference axis sealing 49,50 and recess 47,48.Therefore, compare between the mould component 14 in the circumference side 192,202 and the back that are arranged in each rotating shaft 19,20 with labyrinth seal, and the diameter of each labyrinth seal 57,58 is relatively large.The diameter of each labyrinth seal 57,58 is big more, and the volume in chamber, labyrinth 551,552,561,562 is just big more separately.This has improved the sealability of labyrinth seal 57,58.Therefore, thus the layout of each labyrinth seal 57,58 of this embodiment is for increasing separately the volume in chamber, labyrinth 551,552,561,562 that to improve labyrinth seal 57,58 sealability aspects be preferred.
Space between the wall of each recess 47,48 and the reference axis sealing 49,50 is more little, and what lubricant oil Y entered this space may be just more little.In this embodiment, the leading flank 492,502 of the bottom surface 472,482 of each recess 47,48 and reference axis sealing 49,50 can be closer to each other on whole substantially surface in the mode of unanimity.This is convenient to make minimum aperture g1, g2 to minimize.Each minimum aperture g1, g2 are more little, and the sealability of relevant labyrinth seal 57,58 is good more.Therefore, the position of each labyrinth seal 57,58 of this embodiment is preferred.
When Roots pump 11 was assembled fully, the resin layer 59,60 of each shaft sealing 49,50 contacted with the bottom surface 472,482 of related recess 47,48. Recess 47,48 is arranged in the back mould component 14 that is made of metal.When Roots pump 11 work, resin layer 59,60 slides simply along the bottom surface 472,482 of related recess 47,48 under the situation that does not influence each axis of rotation 19,20 rotation.
More particularly, when making Roots pump 11, the total amount (F1+d1) of the thickness d 1 (seeing Fig. 4 (c)) of degree of depth F1 of each annular groove 55 (seeing Fig. 4 (c)) and resin layer 59 is chosen to be a bit larger tham the protrusion amount H1 (seeing Fig. 4 (c)) of each annular protrusion 53.First rotating shaft 19 and first shaft sealing 49 are assembled together then, so that the bottom surface 472 of resin layer 59 contact recesses 47.In this state, allow first rotating shaft 19 to rotate reposefully.Equally, the total amount (F2+d2) of the thickness d 2 (seeing Fig. 5 (c)) of degree of depth F2 of each annular groove 56 (seeing Fig. 5 (c)) and resin layer 60 is chosen to be a bit larger tham the protrusion amount H2 (seeing Fig. 5 (c)) of each annular protrusion 54.Second rotating shaft 20 and second shaft sealing 50 are assembled together then, so that the bottom surface 482 of resin layer 60 contact recesses 48.In this state, allow second rotating shaft 20 to rotate reposefully.
Therefore, each resin layer 59,60 minimizes minimum aperture g1, g2 between shaft sealing 49,50 and the back mould component 14.If the sealing in each chamber, labyrinth 551,552,561,562 is improved, the sealability of each labyrinth seal 57,58 also can be improved.Can improve the sealing in chamber, labyrinth 551,552,561,562 by minimum aperture g1, the g2 that reduces separately.That is to say that each resin layer 59,60 of this embodiment has improved the sealability of labyrinth seal 57,58.
As described, the bottom surface 472,482 of each resin layer 59,60 contact related recess 47,48 under the situation that does not hinder 19,20 rotations of rotating shaft separately.Therefore, leading flank 492,502 places that each resin layer 59,60 are placed on reference axis sealing 49,50 are preferred for minimum aperture g1, g2 are minimized.
During first rotating shaft, 19 rotations, first spiral groove 61 of first shaft sealing 49 forms a path along the peripheral wall 471 of recess 47.This just transmits from the side corresponding to the 5th pump chamber 43 the lubricant oil Y in corresponding first spiral groove 61 paths towards gear receiving cavity 331.According to identical method, during second rotating shaft, 20 rotations, second spiral groove 62 of second shaft sealing 50 forms a path along the peripheral wall 481 of recess 48.So the lubricant oil corresponding to second spiral groove, 62 paths flows towards gear receiving cavity 331 from the side corresponding to the 5th pump chamber 43.Therefore, have each shaft sealing 49,50 and have the sealability of improved sealing lubricating oil Y as the spiral groove 61,62 of pumping installations.
Each spiral groove 61,62 seals 49,50 excircle side 491,501 along reference axis, or has the excircle side layout of the part of shaft sealing 49,50 maximum diameters.So the peripheral velocity at the part place that arranges each spiral groove 61,62 becomes maximum.Therefore, each spiral groove 61,62 is with higher relatively speed rotation.The gas that this promotes effectively between the peripheral wall 471,481 of the excircle side 491,501 of each shaft sealing 49,50 and related recess 47,48 makes it move towards gear receiving cavity 331 from the side corresponding to the 5th pump chamber 43.Lubricant oil Y between the peripheral wall 471,481 of the excircle side 491,501 of each shaft sealing 49,50 and related recess 47,48 is along with the motion of gas, thus also effectively from corresponding to a side of the 5th pump chamber 43 towards 331 motions of gear receiving cavity.Therefore, each spiral groove 61,62 of this embodiment arranges that for preventing that oil from leaking into the 5th pump chamber 43 from recess 47,48 be preferred.
If the rotation period of each spiral groove 61,62 increases, the sealability of shaft sealing 49,50 is just improved separately.Because it is relatively easy to increase the rotation period of each spiral groove 61,62, this spiral groove the 61, the 62nd, preferred pumping installations.
Each rotating shaft 19,20 comprises many and rotating shaft 19,20 integrally formed rotors.Therefore, whole if each shaft sealing 49,50 and relevant rotating shaft 19,20 form, the maximum diameter of shaft sealing 49,50 just must be selected according to the back diameter of the through hole separately 141,142 of mould component 14.Yet in this embodiment, each shaft sealing 49,50 was opened formation in 19,20 minutes with relevant rotating shaft.Thereby therefore shaft sealing 49,50 can be made the pumping effect that definite shape and size are advantageously improved this pumping installations.
The circumference side 192 of first rotating shaft 19 forms a small space with respect to the wall of through hole 141.Each the 5th rotor 27,32 forms the surface with respect to the chamber of back mould component 14 and 143 also forms a slight void.These spaces are that the 5th pump chamber 43 interior pressure import first labyrinth seal 57 with final stage.In addition, the circumference side 202 of second rotating shaft 50 forms a micro-gap with respect to the wall of through hole 142.Therefore pressure in the 5th pump chamber 43 be imported into second labyrinth seal 58.
Under the situation that does not have head pressure guide line 63,64, labyrinth seal 57,58 equally is subjected to the influence of suction district 431 internal pressures and pressure area 432 internal pressures of the 5th pump chamber 43.More particularly, if the pressure in the suction district 431 is P1, the pressure in 432 districts, pressure maximum district is that (P2＞P1), the pressure P 1 from the 5th pump chamber 43, only about half of ((P2+P1)/2) of P2 total value are born in each labyrinth seal 57,58 to P2.
Pressure in each recess 47,48 that links to each other with gear receiving cavity 331 is corresponding with atmospheric pressure (about 1000 holders), the influence that it is not worked by each rotor 23-32.The pump action of spiral groove 61,62 makes the space internal pressure between each shaft sealing 49,50 and related recess 47,48 walls be reduced to a horizontal P3, and this horizontal P3 is lower than the atmospheric pressure at part place between each spiral groove 61,62 and relevant labyrinth seal 57,58.Therefore, if pump 11 does not have head pressure guide line 63,64, just become in the radial inner end of each labyrinth seal 57,58 and the pressure difference between the radial outer end and to be about P3-(P2+P1)/2.
Each head pressure guide line 63,64 of this embodiment has improved the effect that the pressure in the pressure maximum district 432 is directed to relevant labyrinth seal 57,58.That is to say that the effect that the pressure in the pressure maximum district 432 is directed to labyrinth seal 57,58 by head pressure guide line 63,64 is better than the pressure in the suction district 431 are directed to the effect of labyrinth seal 57,58.So the pressure that is held by each labyrinth seal 57,58 becomes more much bigger than value mentioned above (P2+P1)/2.Therefore, radial inner end and the pressure difference between the radial outer end in each labyrinth seal 57,58 becomes more much smaller than P3-(P2+P1)/2.Consequently, the effect that prevents oil leakage of each labyrinth seal improves.
The effect that pressure in the pressure maximum district 432 are directed to each labyrinth seal 57,58 depends on the connection area of each head pressure guide line 63,64.Owing to realize having the head pressure guide line 63,64 of the connection area that suits the requirements easily, head pressure guide line 63,64 can most desirably be directed to labyrinth seal 57,58 with the pressure in the pressure maximum district 432.
Head pressure guide line 63,64 is arranged in the chamber that forms the 5th pump chamber 43 and forms on the wall surface 143.Each through hole 141,142 that relevant rotating shaft 19,20 extends through forms in the chamber forms wall surface 143.The pressure maximum district 432 of the 5th pump chamber 43 forms wall surface 143 in the face of the chamber.Therefore, each head pressure guide line 63,64 forms on chamber shaping wall surface 143 easily, so that line 63,64 links to each other with associated through-holes 141,142 with pressure maximum district 432.
If Roots pump 11 is a dry type, lubricant oil Y does not just circulate in any pump chamber 39-43.The present invention is preferably applied in such pump.
Shown in second to the 8th embodiment of Fig. 8 to 14, the present invention can modification.Although in Fig. 8 to 13, only describe the labyrinth seal that is used for first rotating shaft 19, provide an identical labyrinth seal for these embodiments' second rotating shaft 20.
In a second embodiment, as shown in Figure 8, the many annular projections 66 that stretch out from the leading flank 492 of shaft sealing 49 are relative with the annular projection 53 that stretches out from the bottom surface 472 of recess 47.Far-end in each projection 66 forms a resin layer 67.Annular projection 66,53 forms a labyrinth seal.
As shown in Figure 9, different with first embodiment, the 3rd embodiment does not comprise the annular protrusion 53 that stretches out from the bottom surface 472 of recess 47 in addition.As an alternative, a plurality of annular grooves 55 that form in shaft sealing 49 constitute a labyrinth seal.
As shown in figure 10, different with first embodiment, the 4th embodiment does not comprise a plurality of annular grooves 55 that form in addition in shaft sealing 49.As an alternative, a plurality of annular protrusions 53 that stretch out from the bottom surface 472 of recess 47 form a labyrinth seal.Far-end in each projection 53 forms a resin layer 68.
As shown in figure 11, different with first embodiment, the 5th embodiment does not comprise a plurality of annular protrusions 53 that stretch out from the bottom surface 472 of recess 47 in addition.As an alternative, a plurality of annular grooves 55 of shaft sealing 49 form a labyrinth seal.On the bottom surface 472 of recess 47, form a resin layer 69.
As shown in figure 12, different with first embodiment, the 6th embodiment does not comprise a plurality of annular grooves 55 that form in addition in shaft sealing 49.As an alternative, a plurality of annular protrusions 53 that stretch out from the bottom surface 472 of recess 47 form a labyrinth seal.Leading flank 492 places in shaft sealing 49 form a resin layer 70.
In the 7th embodiment, as shown in figure 13, shaft sealing 49A integrally forms with rotating shaft 19 and links to each other with the 5th rotor 23.Shaft sealing 49A is contained in the recess 71, and described recess 71 forms in a side relative with rotor shell member 12 of back mould component 14.Labyrinth seal 72 is arranged between the bottom surface 711 of the trailing flank of shaft sealing 49A and recess 71.
As shown in figure 14, the 8th embodiment comprises a pair of shaft sealing 49B, 50B.A pair of rubber slip ring 73,74 is installed respectively around shaft sealing 49B, 50B.Around slip ring 73, form many anti-leak projectioies 731, and around slip ring 74, form many anti-leak projectioies 741.When first rotating shaft, 19 rotations, anti-leak projection 731 is slided along the peripheral wall 471 of recess 47 with the way of contact.Equally, when second rotating shaft, 20 rotations, anti-leak projection 741 is slided along the peripheral wall 481 of recess 48 with the way of contact.Each anti-leak projection 731,741 does not cover round the whole circumference of the axis 191,201 of the axis of reference axis sealing 49B, 50B or relevant rotating shaft 19,20, and is formed obliquely with respect to axis 191,201.Recessed 731 of each anti-leak, 741 forms a path, when relevant rotating shaft 19,20 sense of rotation are observed this path from corresponding to a side of gear receiving cavity 331 towards the 5th pump chamber 43.
When first rotating shaft, 19 rotations, anti-leak projection 731 promotes the lubricant oil Y between the excircle side of the peripheral wall 471 of recess 47 and the first shaft sealing 49B, makes it to move towards gear receiving cavity 331 from the side corresponding to the 5th pump chamber 43.In the same way, when second rotating shaft, 20 rotations, anti-leak projection 741 promotes the lubricant oil Y between the excircle side of the peripheral wall 481 of recess 48 and the second shaft sealing 50B, makes it to move towards gear receiving cavity 331 from the side corresponding to the 5th pump chamber 43.
Form an independent anti-leak projection if be centered around axis 191,201 whole circumference on every side of each rotating shaft 19,20, the axial dimension of each slip ring 73,74 just must strengthen.In this case, the slip resistance of each slip ring 73,74 becomes relatively large, and this is unfavorable.Otherwise a plurality of anti-leak projectioies 731,741 of the 8th embodiment do not need to strengthen the axial dimension of slip ring 73,74.
The present invention can make following modification.
The bottom surface of each recess 47,48 can be tapered with the leading flank of relevant rotating shaft 49,50, so that labyrinth seal is disposed between the relative conical surface.
In first embodiment, resin layer can be applied to the far-end of each projection 53,54.
Can between the leading flank 492,502 of the bottom surface 472,482 of each recess 47,48 and reference axis sealing 49,50, arrange a resin plate, thereby form a resin layer.
The present invention can be applicable in the other types vacuum pump except that Roots type.
This example and embodiment only make the usefulness of description, do not provide constraints, and the present invention are not subjected to the restriction of given details herein, and can carry out modification in the scope of claims and equivalency range thereof.
Claims (15)
1. vacuum pump, it is characterized in that by gas transfer body (23-32) gas bleeding in rotating shaft (19,20) the operation pump chamber (39-43) described vacuum pump comprises:
One oilcan member (14,33), wherein said oilcan member (14,33) the oil district (331) of a contiguous pump chamber of formation (39-43), and described rotating shaft (19,20) has the extension that reaches described oil district (331) from described pump chamber (39-43) by described oilcan member (14,33);
The sealing of one section roller (49,50,49A, 49B, 50B), it be positioned at around the described extension in case with described rotating shaft (19,20) rotation integrally, wherein said shaft sealing (49,50,49A, 49B 50B) has in described shaft sealing (49,50,49A, 49B, upwardly extending first sealing in footpath 50B) forms the surface;
One second sealing forms the surface, and it is gone up at described oilcan member (14,33) and forms, wherein said second sealing form surface and described first sealing form the surface relative and with described first seal the surperficial almost parallel of formation; And
One labyrinth seal (57,58,72), it forms between the surface in described first and second sealings.
2. vacuum pump as claimed in claim 1 is characterized in that, described oilcan member (14,33) has and holds described shaft sealing (49,50,49A, 49B, recess (47,48 50B), 71), and described second sealing form the wall portion that the surface forms described recess (47,48,71).
3. vacuum pump as claimed in claim 2 is characterized in that, described first sealing form the surface be described shaft sealing (49,50,49A, 49B, end surfaces 50B), it is the bottom surface of described recess (47,48,71) that described second sealing forms the surface.
4. as claim 2 or 3 described vacuum pumps, it is characterized in that described shaft sealing (49,50,49A, 49B, 50B) comprise a pumping installations (61,62,731,741), it advances in described shaft sealing (49,50,49A, 49B 50B) forms described recess (47 with one, 48,71) oil between the surface makes it to move towards described oil district (331) from the side corresponding to described pump chamber (39-43).
5. vacuum pump as claimed in claim 4 is characterized in that, described pumping installations (61,62,731,741) be positioned at described shaft sealing (49,50,49A, 49B is on excircle side 50B).
6. as claim 4 or 5 described vacuum pumps, it is characterized in that, described pumping installations is a spiral groove (61,62), and described spiral groove (61,62) formation one path, from described rotating shaft (19,20) sense of rotation is observed, described path from corresponding to the side in described oil district (331) towards described pump chamber (39-43).
7. as each described vacuum pump in the above-mentioned claim 1 to 6, it is characterized in that described shaft sealing (49,50,49A, 49B, 50B) be independent of described rotating shaft (19,20) and form a seal ring (51,52) be positioned at described shaft sealing (49,50,49A, 49B, 50B) and described rotating shaft (19,20) between, and described seal ring (51,52) prevents that the circumference side of described oil from described oil district (331) along described rotating shaft (19,20) from leaking into described pump chamber (39-43).
8. as each described vacuum pump in the above-mentioned claim 1 to 7, it is characterized in that described labyrinth seal (57,58,72) comprise a resin layer, described resin layer described shaft sealing (49,50,49A, 49B, 50B) and at least one of described oilcan member (14,33) go up formation.
9. as each described vacuum pump in the above-mentioned claim 1 to 8, it is characterized in that, described oilcan member (14,33) comprise the through hole (141,142) that a described rotating shaft (19,20) extends through, and described vacuum pump comprises pressure guide line (63,64), described pressure guide line will be directed to described through hole (141,142) from the described gas pressure that described pump chamber (39-43) is discharged into described vacuum pump outside.
10. vacuum pump as claimed in claim 9 is characterized in that, described pressure guide line (63,64) pressure that will be arranged in a pressure maximum district (432) of described pump chamber (39-43) passes through described through hole (141,142) be directed to described labyrinth seal (57,58,72).
11., it is characterized in that described pressure guide line (63,64) forms as claim 9 or 10 described vacuum pumps in described oilcan member (14,33).
12. vacuum pump as claimed in claim 10 is characterized in that, described oilcan member (14,33) has a wall surface that is exposed to described pressure maximum district (432), and described pressure guide line (63,64) is the groove that forms on described wall surface.
13., it is characterized in that as each described vacuum pump of above-mentioned claim 1 to 12, support the bearing (37,38) of described rotating shaft (19,20), wherein said bearing (37,38) is supported by described oilcan member (14,33) and is positioned at described oil distinguishes (331).
14. as each described vacuum pump of above-mentioned claim 1 to 13, it is characterized in that, described rotating shaft is one of many parallel shafts (19,20), a gear mechanism (34,35) with described rotating shaft (19,20) interconnect, so that described rotating shaft (19,20) is integrally rotated, and described gear mechanism (34,35) is arranged in described oil district (331).
15. vacuum pump as claimed in claim 14, it is characterized in that, form many rotors (23-32) round each described rotating shaft (19,20), so that each rotor (23-32) is used as described gas transfer body, and the rotor of a rotating shaft engages with the rotor of other rotating shafts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021301840A CN100400881C (en) | 2002-08-23 | 2002-08-23 | Axle sealing structure for vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021301840A CN100400881C (en) | 2002-08-23 | 2002-08-23 | Axle sealing structure for vacuum pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1477310A true CN1477310A (en) | 2004-02-25 |
| CN100400881C CN100400881C (en) | 2008-07-09 |
Family
ID=34144416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021301840A Expired - Fee Related CN100400881C (en) | 2002-08-23 | 2002-08-23 | Axle sealing structure for vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100400881C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1877132B (en) * | 2005-06-07 | 2010-11-17 | 株式会社荏原制作所 | Vacuum air-discharging system |
| CN102656368A (en) * | 2009-11-11 | 2012-09-05 | 爱德华兹有限公司 | Corrosion resistant shaft sealing for a vacuum pump |
| CN103047143A (en) * | 2013-01-29 | 2013-04-17 | 天津市天鼓机械制造有限公司 | Sealing impeller for Roots blower |
| CN103062058A (en) * | 2013-01-29 | 2013-04-24 | 天津市天鼓机械制造有限公司 | Sealed impeller of fan |
| CN105650282A (en) * | 2014-11-12 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Centrifugal non-contact sealing structure |
| CN107061284A (en) * | 2017-04-11 | 2017-08-18 | 浙江神工真空设备制造有限公司 | A kind of Roots vaccum pump |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5951190A (en) * | 1982-09-17 | 1984-03-24 | Hitachi Ltd | Oil thrower device of oil-free screw compressor |
| FR2638788B1 (en) * | 1988-11-07 | 1994-01-28 | Alcatel Cit | MULTI-STAGE ROOTS TYPE VACUUM PUMP |
| US5364245A (en) * | 1991-02-01 | 1994-11-15 | Leybold Aktiengesellschaft | Dry-running twin-shaft vacuum pump |
| DE19822283A1 (en) * | 1998-05-18 | 1999-11-25 | Sgi Prozess Technik Gmbh | Rotary tooth compressor and method for operating one |
| DE29904411U1 (en) * | 1999-03-10 | 2000-07-20 | GHH-RAND Schraubenkompressoren GmbH & Co. KG, 46145 Oberhausen | Screw compressor |
-
2002
- 2002-08-23 CN CNB021301840A patent/CN100400881C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1877132B (en) * | 2005-06-07 | 2010-11-17 | 株式会社荏原制作所 | Vacuum air-discharging system |
| CN102656368A (en) * | 2009-11-11 | 2012-09-05 | 爱德华兹有限公司 | Corrosion resistant shaft sealing for a vacuum pump |
| CN102656368B (en) * | 2009-11-11 | 2015-12-09 | 爱德华兹有限公司 | For the anticorrosive shaft sealing of vacuum pump |
| US9261099B2 (en) | 2009-11-11 | 2016-02-16 | Edwards Limited | Vacuum pump |
| CN103047143A (en) * | 2013-01-29 | 2013-04-17 | 天津市天鼓机械制造有限公司 | Sealing impeller for Roots blower |
| CN103062058A (en) * | 2013-01-29 | 2013-04-24 | 天津市天鼓机械制造有限公司 | Sealed impeller of fan |
| CN105650282A (en) * | 2014-11-12 | 2016-06-08 | 中国科学院沈阳科学仪器股份有限公司 | Centrifugal non-contact sealing structure |
| CN107061284A (en) * | 2017-04-11 | 2017-08-18 | 浙江神工真空设备制造有限公司 | A kind of Roots vaccum pump |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100400881C (en) | 2008-07-09 |
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