CN1475598A - Deivce for preventing condensation of plasma eraporating and plating equipment - Google Patents
Deivce for preventing condensation of plasma eraporating and plating equipment Download PDFInfo
- Publication number
- CN1475598A CN1475598A CNA021257906A CN02125790A CN1475598A CN 1475598 A CN1475598 A CN 1475598A CN A021257906 A CNA021257906 A CN A021257906A CN 02125790 A CN02125790 A CN 02125790A CN 1475598 A CN1475598 A CN 1475598A
- Authority
- CN
- China
- Prior art keywords
- workplace
- injection tube
- plasma
- gas injection
- mentioned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
A condensation preventer for plasma evaporator is composed of plasma evaporating chamber, winder for driving material, cooler connected to cooling tube, container of anticorrosion liquid, injection tube of gas (hexamethyl disiloxane, HMDSO) and heater. It features that said injection tube of HMDSO is surrounded by an external pipe communicated to heater, so preventing condensation of HMDSO. Its advantages are high uniformity of evaporated layer and low cost.
Description
Technical field
What the present invention relates to is the invention of plasma body evaporated device aspect, particularly be the invention that prevents the condensing device of gas injection tube aspect in the plasma body evaporated device.
Background technology
Usually the cabinet inside at air-conditioner outdoor unit has heat exchanger, and this heat exchanger is made up of the bracing frame of stainless steel and the radiator element and the copper pipe of aluminium material.Because the heat exchanger operated by rotary motion of air-conditioner outdoor unit out of doors, often contacts with wind facies with rainwater, therefore, not only require heat-exchange capacity strong to the heat exchanger of air-conditioner outdoor unit, also need the requirement of certain corrosion resistance nature.Though the material of radiator element is selected material preferably, i.e. processing easily, corrosion-resistant good with heat-exchange capacity, but because the coastland high temperature in South-West Asia or South East Asia wets more and salt is big, so the radiator element of the heat exchanger of air-conditioner outdoor unit still corrodes easily.
In order to adapt to above-mentioned harsh climate condition, for the air-conditioner outdoor unit that is provided with in above-mentioned area, the processing using plasma evaporation coating method to the radiator element of heat exchanger is plated in the insulating corrosion-resisting film on the radiator element of heat exchanger.At present very active to the research of this technology.
Utilizing plasma body to form in the method for corrosion-resisting film, the most representative is with hexamethyldisiloxane MDSO (Hexamethylidisiloxane, (CH3) 3SiOSi (CH3) 3) utilize the carrying gas delivery in workplace, form the corrosion-resisting film of insulativity, but carry hexamethyldisiloxane HMDSO at normal temperatures in workplace, hexamethyldisiloxane HMDSO can be condensing, causes this technology normally not carry out.
Summary of the invention
The objective of the invention is to overcome the deficiency of above-mentioned technology, a kind of plasma body evaporating-plating equipment that utilizes is provided, the heated water coolant that will circulate wraps in outside the gas injection tube after being input to heater heats, prevents the condensing device of hexamethyldisiloxane HMDSO in the gas injection tube.
The present invention solves the problems of the technologies described above the technical scheme that is adopted: a kind of deivce for preventing condensation of plasma eraporating and plating equipment, its structure comprises that inside is equipped with the plasma body evaporation workplace of electrode, the up-coiler that the workplace both sides have the driving strip material to move, the workplace upside has the cooler that is connected with the workplace cooling jacket, the downside of workplace has its inside that liquid corrosion-resistant raw material tank is housed, be connected with gas injection tube between workplace and the tank, workplace cooling jacket after heat exchange connects a well heater, and well heater is connected with the outboard tube that is enclosed in the gas injection tube periphery.
The invention has the beneficial effects as follows: water coolant of the present invention is after cooling jacket is to the workplace cooling, the warm water that is heated to form certain temperature enters heater heats again, this warm water heater via further is transported to the inside that surrounds the gas injection tube outboard tube after the heating, and gas injection tube is heated.Owing to wrapping the pyritous outboard tube in the gas injection tube periphery, guarantee the high temperature in the gas injection tube, can prevent that the homogeneity of evaporation thickness is guaranteed by gas injection tube condensing to the hexamethyldisiloxane HMDSO of workplace delivered inside.The time of water heating is short, saves the energy, reduces cost.
Description of drawings
Fig. 1 is that plasma body evaporating-plating equipment of the present invention prevents gas injection tube condensing works structural representation;
Fig. 2 points out out A-A ' sectional view among Fig. 1.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are described in further detail:
The present invention is a kind of deivce for preventing condensation of plasma eraporating and plating equipment, its structure comprises that inside is equipped with the plasma body evaporation workplace 101 of electrode, the up-coiler 105 and 107 that workplace 101 both sides have the driving strip material to move, the workplace upside has the cooler 115 that is connected with workplace cooling jacket 114, the downside of workplace has its inside that liquid corrosion-resistant raw material tank 111 is housed, be connected with gas injection tube 112 between workplace 101 and the tank 111, workplace cooling jacket 114 after heat exchange connects a well heater 117, and well heater 117 is connected with the outboard tube 118 that is enclosed in gas injection tube 112 peripheries.
Be connected on the cooler 115 through the outboard tube after the heat exchange 118.
As shown in the figure, the upside of box-type plasma body evaporation workplace 101 inside is fixed with upper electrode 102, and the downside of this upper electrode 102 is fixed with lower electrode 103.
Be provided with between coiling 106 at the front end of workplace 101, up-coiler 105 be housed in 106 between reeling, up-coiler 105 is to workplace 101 inner supply strip material 104.Be provided with between coiling 108 in the rear end of workplace 101, between reeling, up-coiler 107 be housed, the strip material 104 that up-coiler 107 is reeled and come out from workplace 101 in 108.Between coiling 105 export department and reel between 108 inlet portion be provided with a pair of pedestal fairload 109 that guiding strip material 104 moves.
In addition, on one side be provided with tank 111 in the bottom of workplace 101, storage hexamethyldisiloxane MDSO (Hexamethylidisiloxane, (CH3) 3SiOSi (CH3) 3) 110 in the tank 111.Tank 111 is attached at by gas injection tube 112 and workplace 101.In addition, tank 111 also is attached on the gaseous storage container (not expressing in the drawing), and the above-mentioned gas tank is used for storage carrying gas, and above-mentioned carrying gas can make above-mentioned storage hexamethyldisiloxane HMDSO110 foaming.
Above-mentioned carrying gas generally adopts argon gas, oxygen, the nonreactive gas of nitrogen etc. arrives in the above-mentioned tank 111 in the carrying gas delivery, after the hexamethyldisiloxane HMDS0110 that is stored at tank 111 inside foamed, just be fed in the workplace 101.
The periphery of above-mentioned workplace 101 is provided with cooling jacket 114, and the water coolant in order to by carrying to the cooler 115 that is arranged on workplace 101 tops makes above-mentioned workplace 101 inner sustain certain temperatures.
In addition, the downside of above-mentioned workplace 101 is provided with well heater 117, and well heater 117 is attached on the cooling jacket 114 by recovery tube 116.So the warm water of spending in 114 pairs of above-mentioned workplaces 101 cooled Celsius approximately 30 of above-mentioned cooling jacket to 50 degree can be recovered to well heater 117 and heat.Surround the outboard tube 118 that supplying high temperature water is used in the outside of above-mentioned gas injection tube 112, the outboard tube 118 that supplying high temperature water is used is attached on the well heater 117 by connecting piece 119 and carries high-temperature water, above-mentioned gas injection tube 112 is heated, make it keep certain temperature.
In addition supplying high temperature water with outboard tube 118 by being attached on the cooler 115, so the above-mentioned supplying high temperature water of flowing through comes back on the cooler 115 after with the high-temperature water of outboard tube 118 gas injection tube 112 being heated at supply pipe 120.
Do not express in the drawing to the direct current power supply mechanism of upper electrode 102 and lower electrode 103 supplying DC power sources and the motor of rotation up-coiler 105 and up-coiler 107.
Below working process of the present invention is elaborated:
Connect power supply, then up-coiler 105 is to rotation counterclockwise, up-coiler 107 makes the strip material 104 that is wound on the above-mentioned up-coiler 105 through being arranged between the upper electrode 102 and lower electrode 103 in the workplace 101 to the clockwise direction rotation, and continuous reeling is on above-mentioned up-coiler 107.
Open the valve of gaseous storage container (not expressing in the drawing), then carry gas and carry to above-mentioned tank 111.Carrying gas is foamed the hexamethyldisiloxane HMDSO110 in the tank 111, and the hexamethyldisiloxane HMDS0110 that is foamed is to the interior conveying of workplace 101.
Be transported to the inside of workplace 101 as HMDS01 10 after, direct current power supply mechanism then produces plasma body between upper electrode 102 and the lower electrode 103 to upper electrode 102 and lower electrode 103 supplying DC power sources.By plasma body, excite the gas of workplace on the surface of the strip material of transferring continuously 104, to carry out evaporation.
In addition, the machine 115 refrigerative water that are cooled are transported to cooling jacket 114, the above-mentioned workplace 101 of carrying out the evaporation operation are cooled off, so certain temperature can be kept in workplace 101 inside.
Being transported to water coolant after the above-mentioned workplace 101 of above-mentioned cooling jacket 114 coolings will become Celsius approximately 30 and spend the warm water of spending to 50; Warm water is transported to well heater 117 by recovery tube 116, and warm water is heated and becomes high-temperature water; High-temperature water be transported to by connecting piece 119 outboard tube 118 of surrounding gas injection tube 112 peripheries in, gas injection tube 112 is heated, so can prevent by above-mentioned gas injection tube 112 condensing to the HMDS0110 of above-mentioned workplace 101 delivered inside.
In addition, the above-mentioned supplying high temperature water of flowing through has heated after the above-mentioned gas injection tube 112 with the warm water of outboard tube 118 inside, comes back to above-mentioned cooler 115 by supply pipe 120 again and cools off, and becomes water coolant and re-uses.
Claims (2)
1. deivce for preventing condensation of plasma eraporating and plating equipment, its structure comprises that inside is equipped with the plasma body evaporation workplace (101) of electrode, up-coiler (105) and (107) that workplace (101) both sides have the driving strip material to move, the workplace upside has the cooler (115) that is connected with workplace cooling jacket (114), the downside of workplace has its inside that liquid corrosion-resistant raw material tank (111) is housed, be connected with gas injection tube (112) between workplace (101) and the tank (111), it is characterized in that the workplace cooling jacket (114) after heat exchange connects a well heater (117), well heater (117) is connected with the outboard tube (118) that is enclosed in gas injection tube (112) periphery.
2. according to the device in the claim 1, it is characterized in that being connected on the cooler (115) through the outboard tube after the heat exchange (118).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02125790 CN1197992C (en) | 2002-08-19 | 2002-08-19 | Deivce for preventing condensation of plasma eraporating and plating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02125790 CN1197992C (en) | 2002-08-19 | 2002-08-19 | Deivce for preventing condensation of plasma eraporating and plating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1475598A true CN1475598A (en) | 2004-02-18 |
| CN1197992C CN1197992C (en) | 2005-04-20 |
Family
ID=34143068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02125790 Expired - Fee Related CN1197992C (en) | 2002-08-19 | 2002-08-19 | Deivce for preventing condensation of plasma eraporating and plating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1197992C (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103155118A (en) * | 2010-10-19 | 2013-06-12 | 应用材料公司 | Chamber lid heater ring assembly |
| US8741062B2 (en) | 2008-04-22 | 2014-06-03 | Picosun Oy | Apparatus and methods for deposition reactors |
-
2002
- 2002-08-19 CN CN 02125790 patent/CN1197992C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8741062B2 (en) | 2008-04-22 | 2014-06-03 | Picosun Oy | Apparatus and methods for deposition reactors |
| US8753716B2 (en) | 2008-04-22 | 2014-06-17 | Picosun Oy | Method of depositing material using a deposition reactor |
| CN103155118A (en) * | 2010-10-19 | 2013-06-12 | 应用材料公司 | Chamber lid heater ring assembly |
| CN103155118B (en) * | 2010-10-19 | 2016-11-09 | 应用材料公司 | Pit cover heater ring assemblies |
| US10595365B2 (en) | 2010-10-19 | 2020-03-17 | Applied Materials, Inc. | Chamber lid heater ring assembly |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1197992C (en) | 2005-04-20 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US6158499A (en) | Method and apparatus for thermal energy storage | |
| CA2411693C (en) | Storage container for cryogenic fuel | |
| EP1354165B1 (en) | Gas delivery at high flow rates | |
| CN1794004B (en) | Superconducting technology device | |
| KR101142901B1 (en) | Cooling system for superconducting power apparatus | |
| CN104677000B (en) | Liquid nitrogen cooling cryogenic device and implementation method for same | |
| JP2005507069A (en) | Improved water heater | |
| CN102605404A (en) | Heat exchange method and device for anode oxidation groove liquid of aluminum profile | |
| JP2002340296A (en) | Liquefied gas vaporizing and heating device | |
| CN105734245B (en) | Copper pipe processing online annealing equipment protection gas power-economizing method and system | |
| CN1197992C (en) | Deivce for preventing condensation of plasma eraporating and plating equipment | |
| JP2002089791A (en) | Liquefied gas vaporizer | |
| CN209459448U (en) | A kind of frozen water machine cooling device | |
| US6357250B1 (en) | Trim cooler | |
| CN212140008U (en) | Cold and hot show cupboard of intelligence lift | |
| CN217057140U (en) | Portable solid hydrogen storage hydrogen charging and discharging device | |
| CN217058152U (en) | Puffed rice cooling device is used in puffed rice production | |
| CN205528935U (en) | Equipment protective gas economizer system that anneals is on line processed to copper pipe | |
| CN111219948A (en) | Intermittent operation heat exchange device and end constant temperature method | |
| JP4132130B2 (en) | Cooling device for high-temperature superconducting magnetic shield | |
| US4083759A (en) | Method for reducing sludge formation in the continuous production of iron by electrolysis of ferrous electrolyte | |
| CN219040680U (en) | Energy storage system device | |
| CN213818721U (en) | Explosion-proof control cabinet for gasification station | |
| CN113085484B (en) | Air conditioner heat pump system and electric automobile with same | |
| CN216260701U (en) | Liquid nitrogen circulating cooling device for fine organic chemical synthesis |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20050420 |