CN1466016A - Pendulum type digital exposure method - Google Patents
Pendulum type digital exposure method Download PDFInfo
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- CN1466016A CN1466016A CNA021208239A CN02120823A CN1466016A CN 1466016 A CN1466016 A CN 1466016A CN A021208239 A CNA021208239 A CN A021208239A CN 02120823 A CN02120823 A CN 02120823A CN 1466016 A CN1466016 A CN 1466016A
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- sensitization
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Abstract
The invention is a method that uses the technique of high-frequency pendulum to perform the repeated asynchronous sensitization for 4 times on the same RGB unit within the space of sub-1/2 on the same-level sensitive boards, and improves the image rasolution by the logic process. Every 3 sensitive boards compose a RGB unit on the RGB sensitive board, and meanwhile each sensitive board separated into 3 layers forms a RGB unit, the RGB unit adheres to the pendulum sensitive bed, and the sensitive bed makes the repeated sensitization within the space for 1/2 to form 4 logic units, thus making the same-level sensitive board's resolution improve at 4 times.
Description
Affiliated technical field
The technical field of the invention is microelectric technique and semiconductor Precision Machining field, and the digital film that utilizes pendulum model exposure method to produce can substitute the employed silver salt film of all traditional cameras.
Background technology
The resolution of digital film generally only reaches 130 everything elements, thinks further to improve machining precision and the semi-conductive precision that picture resolution just must improve photographic plate.But owing to be subjected to the influence of Laser Processing precision, the qualification rate of photographic plate is only 20% when reaching 13.5 microns, and the cost of digital film and digital camera just increases greatly like this.
Summary of the invention
Utilize high-frequency pendulum technique, carrying out repeating for four times asynchronous exposure process logical process on the photographic plate of same precision, in inferior 1/2nd spacings, improve the resolution of image
The invention solves and have the shortcoming that digital film can not increase substantially picture resolution now
Will the synthetic RGB unit (as Fig. 1) of average per three photographic plates on RGB discrete photographic plate.Each photographic plate divides three layers simultaneously, forms a RGB unit and improves three times of resolution (as Fig. 2).Use pendulum model sensitization bed that photosensitive unit is repeated sensitization then in inferior 1/2nd spacings and form four RGB logical blocks, photographic plate at the same level is improved four times of resolution (as Fig. 3).
Beneficial effect of the present invention significantly improves machining precision and semiconductor precision for not needing, and has solved the expensive of digital film and problem that resolution is low.
Embodiment on CCD or CMOS photographic plate with 18 microns or more the narrow laser beam finishing technology cut out the photosensitive unit of 500 everything elements, photosensitive unit is repeated exposure with the pendulum model photoresist process form four logical blocks in 1/2nd tools, photographic plate at the same level can be improved four resolutions.
Claims (3)
1 utilizes high frequency technique to make CCD or CMOS photographic plate repeat asynchronous sensitization four times in inferior 1/2nd photosensitive unit areas, and with four images through logical process, generation is four times in the image effect of the resolution of sensitization precision.
The 2 sensitization beds according to right 1 described technical method design form four RGB with photosensitive unit in 1/2nd spacings or logical block improves four times of resolution with photographic plate at the same level.
3 can solve the problem that further raising sensitization precision has been subject to processing the limitation of precision and semiconductor precision according to right two described pendulum model exposure methods.The photographic plate processing cost is significantly reduced under the image effect of equal resolution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA021208239A CN1466016A (en) | 2002-06-04 | 2002-06-04 | Pendulum type digital exposure method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA021208239A CN1466016A (en) | 2002-06-04 | 2002-06-04 | Pendulum type digital exposure method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1466016A true CN1466016A (en) | 2004-01-07 |
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ID=34142114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA021208239A Pending CN1466016A (en) | 2002-06-04 | 2002-06-04 | Pendulum type digital exposure method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1466016A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105953747A (en) * | 2016-06-07 | 2016-09-21 | 杭州电子科技大学 | Structured light projection full view three-dimensional imaging system and method |
-
2002
- 2002-06-04 CN CNA021208239A patent/CN1466016A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105953747A (en) * | 2016-06-07 | 2016-09-21 | 杭州电子科技大学 | Structured light projection full view three-dimensional imaging system and method |
| CN105953747B (en) * | 2016-06-07 | 2019-04-02 | 杭州电子科技大学 | Structured light projection full view 3-D imaging system and method |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |