CN1450426A - Optical method for real time latent image self-moritoring in holographic raster mfg - Google Patents
Optical method for real time latent image self-moritoring in holographic raster mfg Download PDFInfo
- Publication number
- CN1450426A CN1450426A CN 03121147 CN03121147A CN1450426A CN 1450426 A CN1450426 A CN 1450426A CN 03121147 CN03121147 CN 03121147 CN 03121147 A CN03121147 A CN 03121147A CN 1450426 A CN1450426 A CN 1450426A
- Authority
- CN
- China
- Prior art keywords
- time
- image
- sub
- real
- grating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Landscapes
- Holo Graphy (AREA)
Abstract
The invention refers to a real-time latent-image self-monitoring method in the course of making a holographic grating. It uses arbitrary interference recording light beam of the light intensity acting on the grating as the real-time sub-image self-monotiring incident light beam, and when the ratio of the wavelength of the incident light beam and the period of the grating lambda/d<2/3, the grating has multiple diffraction levels, it real-time self-monitors the light beam outside the system collimated and photoelectricly multiplied in the transmission direction of self-diffractions Ir2 and Ir1 of arbitrary level sub-image, or real-timely self-monitors the autocollimating level returning according to the original route filtered, collimated and photoelectricaly multiplied.
Description
Technical field
The present invention relates to real-time sub-image in a kind of holographic grating making from monitoring the optical means of usefulness, especially relate to real-time sub-image in a kind of holographic grating making that is widely used in fields such as spectral instrument, measurement, optical information processing and optical communication from the optical means of monitoring usefulness.
Background technology
Diffraction grating has in many fields such as spectral instrument, measurement, optical information processing and optical communications widely and uses owing to have unique corrugated and cut apart and dispersion characteristics, and wherein technological core often.At present, in scientific research research and in the high-tech product, China all needs a large amount of diffraction grating, and the grating that quality and performance requirement are higher all depends on import basically.The method for making of diffraction grating has multiple, because holographic grating does not have ghost line, method for making is simple relatively, along with the development of laser technology and photosensitive material, more and more becomes the main method that various countries make diffraction grating.The method for making of traditional holographic grating need be carried out a large amount of process test research, by correction process parameter repeatedly to obtain best process conditions.Because the factor that influence the holographic grating final mass is very many, many these factors still change in manufacturing process, so complex manufacturing process, time-consuming and be difficult to control, and depend on very much technician individual's experience.In order to reduce dependence to the technician personal experience, improve the controllability and the repeatability of technological process, own characteristic according to the different process step, the main technique step is set up corresponding real-time monitoring system be very important, this direct relation the quality and the production efficiency of holographic grating.
Photoresist exposes to holographic interference fringes, the decomposition reaction of emulsion generation photochemistry; The exposure difference that the glue-line of different spatial absorbs, its refractive index and absorption coefficient produce the small variation of varying degree, form sub-image; The position phase depth of modulation of sub-image grating increases earlier with the time shutter growth and afterwards subtracts, and therefore need monitor in real time to obtain optimum exposure exposure process.Because the position phase depth of modulation of the sub-image grating that produces is always very shallow, diffraction efficiency is very low, monitoring in real time is difficulty very, the sub-image diffracted intensity in the photoresist print that has exposed but also do not had to develop is surveyed on the general off-line of people ground (in non real-time), referring to document Latent Image Diffraction from Sub-Micron Photoresist Gratings, E.Yoon, C.A.Green, R.A.Gottscho, T.R.Hayes, and K.P.Giapis, J.Vac.Sci.Technol.B10,2230 (1992); Document Use of diffracted light from latent images to improve lithographycontrol.Hickman KC. Gaspar SM. Bishop KP. Naqvi SSH. McNeil NR.Tipton GD.Stallard BR.Draper BL.Journal of Vacuum Science ﹠amp; Technology B, vol.10, no.5, Sept.-Oct.1992, pp.2259-66; Document Bishop; Kenneth P.; Brueck; Steven R.J.; Gaspar; Susan M.; Hickman; Kirt C.; McNeil; John R.; Naqvi; S.Sohail H.; Stallard; BrianR.; Tipton; Gary D.Diffracted light from latent images in photoresist for exposurecontrol.United States Patent:5,674,652.; The sub-image of having reported is the document such as the Real-timelatent image monitoring during holographic fabrication of submicron diffractiongratings.Gregus JA.Green CA.Yoon E.Ostermayer FW.Hayes TR.Pawelek R.Gottscho RA.Sohail S.Naqvi H.Journal of Vacuum Science ﹠amp of monitoring in real time; Technology B, vol.11, no.6, Nov.-Dec.1993, pp.2468-72 and document Use of real-time latent images to write longholographic diffraction gratings in photoresist.Napier BR.Phillips NJ.SPIE-Int.Soc.Opt.Eng.Proceedings of Spie-the International Society for Optical Engineering, vol.3011,1997, pp.182-93., these real-time monitoring systems need add the monitoring system of a complexity.In order to obtain more intense diffraction light, adopt short wavelength's laser to monitor usually; Because it is very strong that photoresist absorbs the short wavelength, must decay to safe energy intensity to the incident light of monitoring usefulness; In order to survey so weak signal, add that also chopper modulates signal, but general diffraction efficiency can only reach 10
-6～10
-7Magnitude, this makes incident light and diffraction direction of light be difficult to determine, practical operation is inconvenience very, and to the fluctuation of bias light and the laser output power comparison sensitivity that seems.So sub-image method of real-time complex and expensive, operating difficulties before this and the monitoring curve feature that is obtained are obvious inadequately, and also are in the laboratory exploratory stage basically, still do not possess practicality.In addition, up to the present, increase substantially the flute profile quality of holographic grating and the technology of production efficiency and do not appear in the newspapers.
Summary of the invention
It is low to the purpose of this invention is to provide a kind of cost, workable, and system itself can realize that real-time sub-image in the holographic grating making of " monitoring " certainly is from the optical means of monitoring usefulness.
For achieving the above object, real-time sub-image in a kind of holographic grating making that the present invention proposes is from the optical means of monitoring usefulness, one of its feature is: it interferes the light intensity that acts on holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, grating exists a plurality of propagation orders of diffraction inferior, to wherein propagating out the inferior sub-image self-diffraction I of arbitrary number of level outside the system
R2And I
L1The direction of propagation on light beam behind collimation and photomultiplier transit, carry out in real time from monitoring.Described method is at the sub-image self-diffraction I of holographic interference system
R2And I
L1The direction of propagation on add a collimation lens, place a photomultiplier on its focal plane the energy of converging light surveyed, then signal is passed to registering instrument and can be realized sub-image is carried out in real time from monitoring.
Real-time sub-image in a kind of holographic grating making that the present invention proposes is from the optical means of monitoring usefulness, two of its feature is: it interferes the light intensity that acts on holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, grating exists a plurality of propagation orders of diffraction inferior, to inferior the carrying out behind filtering, collimation and photomultiplier transit in real time from monitoring of autocollimation level that wherein returns by former road.Described method is with left and right sides road writing light beam I
lAnd I
rWhat produce respectively propagates and turns back to four orders of diffraction time I that lays equal stress on and be combined into any in the position of pinhole filter by former road along both direction
L0, I
R1, I
L-1And I
R0It is inferior to isolate any one level that needs detection through plane mirror, through collimation lens and be placed on the photomultiplier that the energy to converging light on the focal plane is surveyed, the sub-image self-diffraction signal that is detected that is received this photomultiplier output by registering instrument is realized sub-image is carried out in real time from monitoring again.
Real-time sub-image in a kind of holographic grating making that the present invention proposes is from the optical means of monitoring usefulness, three of its feature is: it interferes the light intensity that acts on holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, grating exists the order of diffraction of two propagation inferior, carries out behind filtering, collimation and photomultiplier transit in real time from monitoring the autocollimation level of returning by former road is inferior.Described method is with left and right sides road writing light beam I
lAnd I
rWhat produce respectively propagates and turns back to four orders of diffraction time I that lays equal stress on and be combined into any in the position of pinhole filter by former road along both direction
L0, I
R1, I
L-1And I
R0It is inferior to isolate any one level that needs detection through plane mirror, through collimation lens and be placed on the photomultiplier that the energy to converging light on the focal plane is surveyed, the sub-image self-diffraction signal that is detected that is received this photomultiplier output by registering instrument is realized sub-image is carried out in real time from monitoring again.
Because the present invention uses same coherent source with being coupled into a complete optical system before and after monitoring system and the holographic interference exposure system, total system realizes succinctly and easily, has dissolved the difficulty that two-way laser is controlled simultaneously; The relative space position of grating substrate and writing light beam is fixed, and then the sub-image self-diffraction level time direction of propagation is also fixed, and this has guaranteed that the self-diffraction level time direction of being monitored in real time is very easy to determine, makes easy to operate, signal aim at easily.
This monitoring method does not need special monitoring laser instrument, there is not complicated monitoring light path, there is no need that also the incident beam of monitoring usefulness is carried out " pre-service " and (comprise the modulation of energy attenuation and signal, and independent fast gate control etc.)---system itself realizes " monitoring certainly ", simplified whole monitoring system, reduced equipment cost significantly and improved operability.Because the incident beam that the interference writing light beam of holographic grating is monitored as real-time sub-image simultaneously is not so incident intensity (light intensity of interfering beam) is subjected to any restriction; In addition, collimating mirror is assembled the directional light of self-diffraction, produce the effect of area integral, these 2 have guaranteed that fundamentally the sub-image self-diffraction signal that can be detected has very high energy density just---solve the weak difficulty of surveying of signal, reached the unconspicuous problem of unique point.For above-mentioned reasons, also there is no need special lock ring amplifier in this monitoring method; For the substrate of different area, only need that the gear of registering instrument is transferred to the appropriate location and can obtain good output signal.The direction of propagation that enters most of parasitic light of surveying light path is different with the self-diffraction level that is detected time direction, then pass through collimation lens, they will focus on outside the PMT test surface (being placed on the back focal plane of collimating mirror), so system has noise resisting ability preferably.
Use this real-time sub-image from monitoring system, can obtain the very significantly real-time monitoring curve of feature; This technology can be sensitive and detects the drift of the optimum exposure that individual difference causes between the print objectively, so can compensate it; Use this technology, the nonlinear effect that can make full use of photoresist is produced non-sinusoidal holographic grating flute profile---trapezoidal or rectangle; Significantly improve groove quality, yield rate and the production efficiency of holographic grating, and can significantly shorten the The Study on New Technology cycle.
Description of drawings
The sub-image that Fig. 1 produces in exposure process for photoresist of the present invention is to writing light beam " self-diffraction " schematic diagram.
Fig. 2 a works as for the present invention
The time realize that to wherein propagating out arbitrary number of level time outside the system real-time sub-image from monitoring is from monitoring device in the holographic grating making.
Fig. 2 b works as for the present invention
The time the real-time sub-image of the autocollimation level wherein returned by former road time being monitored in the holographic grating making from monitoring device.
Fig. 2 c works as for the present invention
The time the real-time sub-image of the autocollimation level wherein returned by former road time being monitored in the holographic grating making from monitoring device.
Fig. 3 is the real-time monitoring curve signature analysis of the present invention figure.It is once that omnidistance sub-image is from monitoring curve in real time, and ordinate is left interfering beam " one-level self-diffraction " energy, asks when horizontal ordinate is exposure, can be divided into 4 districts to entire curve according to its characteristic: horizontal pre-exposure district, as figure AB section; Linear rising area is as figure BC section; Horizontal saturation region is as figure CE section; The linear district that descends is as figure EF section.
Fig. 4 a is that the real-time sub-image of print 1 is from monitoring curve figure.
Fig. 4 b is that the real-time sub-image of print 1 is monitored electron scanning micrograph certainly.
Fig. 5 a is that the real-time sub-image of print 2 is from monitoring curve figure.
Fig. 5 b is that the real-time sub-image of print 2 is monitored electron scanning micrograph certainly.
Fig. 6 a is that the real-time sub-image of print 3 is from monitoring curve figure.
Fig. 6 b is that the real-time sub-image of print 3 is monitored electron scanning micrograph certainly.
Fig. 7 a is that the real-time sub-image of print 4 is from monitoring curve figure.
Fig. 7 b is that the real-time sub-image of print 4 is monitored electron scanning micrograph certainly.
Fig. 8 a is that the real-time sub-image of print 5 is from monitoring curve figure.
Fig. 8 b is that the real-time sub-image of print 5 is monitored electron scanning micrograph certainly.Thickness difference between print 1,2 and back three prints, the three print thickness in back are identical, and it is all inequality from time and the amplitude of the unique point C of monitoring curve that each print arrives sub-image, but all stop exposure after being right after unique point C, the grating flute profile is all near rectangle, and bottom land does not totally have cull.
Embodiment
The present invention will be further described below in conjunction with accompanying drawing:
The present invention finds, there is " self-diffraction " phenomenon in the sub-image that photoresist produces in exposure process simultaneously to writing light beam, as shown in Figure 1, (1) is left road incident light, (2) be the right wing incident light, (3) are that the self-diffraction level is inferior, and (4) are interference fringe, (5) be latent image in the photoresist, (6) are substrate.According to this fact, real-time sub-image in the holographic grating making that the present invention proposes from one of optical means of monitoring usefulness is, it interferes the light intensity of holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, grating exists a plurality of propagation orders of diffraction inferior, the arbitrary number of level of wherein propagating out outside the system is realized from monitoring: shown in Fig. 2 a, at the sub-image self-diffraction I of holographic interference system
R2And I
L1The direction of propagation on add a collimation lens (1), place a photomultiplier (2) on its focal plane the energy of converging light surveyed, then signal is passed to registering instrument (3) and can be realized sub-image is carried out in real time from monitoring.
Real-time sub-image in the holographic grating making that the present invention proposes from two of the optical means of monitoring usefulness is, it interferes the light intensity of holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, there are a plurality of propagation orders of diffraction time in grating, the autocollimation level wherein returned by former road time is monitored: shown in Fig. 2 b, because the left and right sides road writing light beam I of any one collimation and holographic interference optical system (4)
lAnd I
rFour orders of diffraction time I that produces respectively along the both direction propagation
L0, I
R1, I
L-1And I
R0Lay equal stress on and be combined into a bit in the position that turns back to pinhole filter (5) by former road, through plane mirror (6) and collimation lens (1) and be placed on the photomultiplier (2) that the energy to converging light on the focal plane is surveyed, receive the sub-image self-diffraction signal that is detected by registering instrument (3) and realize sub-image is carried out in real time from monitoring.
Real-time sub-image in a kind of holographic grating making that the present invention proposes is from the optical means of monitoring usefulness, three of its feature is: it interferes the light intensity of holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, grating exists the order of diffraction of two propagation inferior, monitors the autocollimation level of returning by former road is inferior: shown in Fig. 2 c, with the left and right sides road writing light beam I of any one collimation and holographic interference optical system (4)
lAnd I
rProduce four orders of diffraction time I that both direction is propagated respectively
L0, I
R1, I
L-1And I
R0Lay equal stress on and be combined into a bit in the position that turns back to pinhole filter (5) by former road, through plane mirror (6) and collimation lens (1) and be placed on the photomultiplier (2) that the energy to converging light on the focal plane is surveyed, receive the sub-image self-diffraction signal that is detected by registering instrument (3) and realize sub-image is carried out in real time from monitoring again.
Determining of sub-image self-diffraction level time and direction:
If use the HeCd laser instrument of wavelength X=441.6nm, make the holographic grating of 1200lp/mm, corresponding interference half-angle | θ | 15.36 ° of ≈.But sub-image is derived as follows to the energy level of interfering the writing light beam self-diffraction with direction:
Two plane waves interfere the cycle of the holographic grating that produces to be,
Following formula explanation, wavelength are that the two bundle angles of λ are the directional light interference of 2 θ, and the generation cycle is the interference fringe of d.Since the cycle be on the occasion of, so angle θ takes absolute value (with respect to the angle of diffraction that has sign symbol to define).
During oblique incidence, grating equation is
According to (2) formula and (3) formula, for the right wing light beam, θ＜0 is if get m successively
r=0,1 ,-1,2, corresponding angle of diffraction is respectively β
r=-15.36 °, 15.36 ° ,-52.64 °, 52.64 °; For left road light beam, θ＞0 is if get m successively
r=-1,0 ,-2,1, corresponding angle of diffraction is respectively β
r=-15.36 °, 15.36 ° ,-52.64 °, 52.64 °.
In this interference system, it is inferior that sub-image can only produce four orders of diffraction respectively to left and right sides writing light beam, because two beam interferometer light are symmetrical two bundle incident lights for the plane of sub-image grating, the space distribution of two groups of diffraction lights of their correspondences also is symmetrical, and occur in pairs, the direction of propagation is identical.Wherein preceding two pairs form the autocollimatic direct light, return the pin hole position along optical interference circuit; Propagate out outside the system two pairs of backs, can be detected easily.Because symmetry, the energy that the back is two groups also are symmetrical (light intensity of supposing left and right sides road light beam equate), optional one is surveyed and is got final product.
It is to be noted, the self-diffraction light of sub-image only can be kept the specific direction of propagation at the reflection semispace, transmission direction at the sub-image grating, because the scattering of photoresist, base material, the particular propagation direction of self-diffraction light is destroyed, become the scattered light of disperse state, perhaps base material itself is light tight, can't be used to monitor.
Monitoring curve principal feature and optimum exposure district determine:
Use this from monitoring technology, can obtain the very significantly real-time monitoring curve of feature, as shown in Figure 3, this is once that omnidistance sub-image in real time is from monitoring curve, the original depth of photoresist is about 0.6um, ordinate is left interfering beam " one-level self-diffraction " energy, and horizontal ordinate is the time shutter, can be divided into 4 districts to entire curve according to its characteristic:
(1) horizontal pre-exposure district is as figure AB section;
(2) linear rising area is as figure BC section;
(3) horizontal saturation region is as figure CE section;
(4) the linear district that descends is as figure EF section.
Experiment showed, the rising edge of optimum exposure district, CD section among the figure in horizontal saturation region.This is the judgement rule of sub-image in monitoring technology is implemented.According to the unique point of registering instrument curve of output, just can accurately control exposure.
The making of trapezoidal or rectangle holographic grating:
Use Shipley S1805 photoresist, the photoresist original depth is controlled at 0.46～0.75um and does not wait, and the volume dilution ratio of Shipley 351 developer solutions and deionized water is 1: 4.Owing to have certain compensation relationship between exposure and the development, so it is irrational using identical development time for different exposures, for this reason, the method of the real-time monitoring of also adopting prior art to developing, generally the ad-hoc location at the real-time monitoring curve that develops stops to develop, and gives different development times the most rational of exposure coupling.Exposure is controlled from monitoring curve by real-time sub-image, stops exposure behind the unique point C of curve.
Among Fig. 4 a, 1 time shutter of print is 172 seconds, developed 112 seconds, and photoresist thickness 0.46um, the holographic grating flute profile of gained is a rectangle, bottom land does not totally have cull.
Among Fig. 5 a, 2 time shutter of print are 189 seconds, and development time is 300 seconds, photoresist thickness 0.60um, and the holographic grating flute profile of gained is near rectangle, and bottom land does not totally have cull.
Among Fig. 6 a, 3 time shutter of print are 180 seconds, and development time is 360 seconds.Photoresist thickness 0.75um, flute profile is a rectangle, bottom land does not totally have cull.
Among Fig. 7 a, 4 time shutter of print are 214 seconds, and development time is 210 seconds.Photoresist thickness 0.75um, flute profile is a rectangle, bottom land does not totally have cull.
Among Fig. 8 a, 5 time shutter of print are 210 seconds, and development time is 180 seconds.Photoresist thickness 0.75um, flute profile is a rectangle, bottom land does not totally have cull.
Print 1,2 is different with the thickness of print 6,7,8, the three print thickness in back are identical, it is all inequality from time and the amplitude of the unique point C of monitoring curve that each print arrives sub-image, as seen, no matter photoresist thickness does not wait or because other process conditions difference, sub-image from monitoring curve in real time tracing display go out the position that unique point C occurs; Behind this point, stop exposure,, just can obtain the holographic grating flute profile of trapezoidal or rectangle, and bottom land does not totally have cull by the further optimization of developing.
Claims (6)
1, the real-time sub-image in a kind of holographic grating making is from the optical means of monitoring usefulness, it is characterized in that: it interferes the light intensity that acts on holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, grating exists a plurality of propagation orders of diffraction inferior, to wherein propagating out the inferior sub-image self-diffraction I of arbitrary number of level outside the system
R2And I
L1The direction of propagation on light beam behind collimation and photomultiplier transit, carry out in real time from monitoring.
2, in accordance with the method for claim 1, it is characterized in that: this method is at the sub-image self-diffraction I of holographic interference system
R2And I
L1The direction of propagation on add a collimation lens, place a photomultiplier on its focal plane the energy of converging light surveyed, then signal is passed to registering instrument and can be realized sub-image is carried out in real time from monitoring.
3, the real-time sub-image in a kind of holographic grating making is from the optical means of monitoring usefulness, it is characterized in that: it interferes the light intensity that acts on holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, grating exists a plurality of propagation orders of diffraction inferior, to inferior the carrying out behind filtering, collimation and photomultiplier transit in real time from monitoring of autocollimation level that wherein returns by former road.
4, in accordance with the method for claim 3, it is characterized in that: this method is with left and right sides road writing light beam I
lAnd I
rWhat produce respectively propagates and turns back to four orders of diffraction time I that lays equal stress on and be combined into any in the position of pinhole filter by former road along both direction
L0, I
R1, I
L-1And I
R0It is inferior to isolate any one level that needs detection through plane mirror, through collimation lens and be placed on the photomultiplier that the energy to converging light on the focal plane is surveyed, the sub-image self-diffraction signal that is detected that is received this photomultiplier output by registering instrument is realized sub-image is carried out in real time from monitoring again.
5, the real-time sub-image in a kind of holographic grating making is from the optical means of monitoring usefulness, it is characterized in that: it interferes the light intensity that acts on holographic grating writing light beam to monitor the incident beam of usefulness simultaneously certainly as real-time sub-image arbitrarily, when the wavelength of incident beam and the periodic ratio of grating
The time, grating exists the order of diffraction of two propagation inferior, to carrying out in real time from monitoring behind time filtering of autocollimation level, collimation and the photomultiplier transit that return by former road.
6, in accordance with the method for claim 5, it is characterized in that: this method is with left and right sides road writing light beam I
lAnd I
rWhat produce respectively propagates and turns back to four orders of diffraction time I that lays equal stress on and be combined into any in the position of pinhole filter by former road along both direction
L0, I
R1, I
L-1And I
R0It is inferior to isolate any one level that needs detection through plane mirror, through collimation lens and be placed on the photomultiplier that the energy to converging light on the focal plane is surveyed, the sub-image self-diffraction signal that is detected that is received this photomultiplier output by registering instrument is realized sub-image is carried out in real time from monitoring again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB03121147XA CN100386698C (en) | 2003-03-28 | 2003-03-28 | Optical method for real time latent image self-moritoring in holographic raster mfg |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB03121147XA CN100386698C (en) | 2003-03-28 | 2003-03-28 | Optical method for real time latent image self-moritoring in holographic raster mfg |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1450426A true CN1450426A (en) | 2003-10-22 |
| CN100386698C CN100386698C (en) | 2008-05-07 |
Family
ID=28684403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB03121147XA Expired - Fee Related CN100386698C (en) | 2003-03-28 | 2003-03-28 | Optical method for real time latent image self-moritoring in holographic raster mfg |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN100386698C (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101441431B (en) * | 2008-12-29 | 2011-11-30 | 中国科学院长春光学精密机械与物理研究所 | Method for real time monitoring exposure amount in holographic grating manufacture |
| CN109655953A (en) * | 2018-12-29 | 2019-04-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of method of real-time monitoring developing process |
| CN112513689A (en) * | 2018-08-03 | 2021-03-16 | 脸谱科技有限责任公司 | System for monitoring grating formation |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5674652A (en) * | 1991-02-28 | 1997-10-07 | University Of New Mexico | Diffracted light from latent images in photoresist for exposure control |
| JP3639202B2 (en) * | 2000-07-05 | 2005-04-20 | 株式会社オプトウエア | Optical information recording apparatus and method, optical information reproducing apparatus and method, and optical information recording and reproducing apparatus and method |
-
2003
- 2003-03-28 CN CNB03121147XA patent/CN100386698C/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101441431B (en) * | 2008-12-29 | 2011-11-30 | 中国科学院长春光学精密机械与物理研究所 | Method for real time monitoring exposure amount in holographic grating manufacture |
| CN112513689A (en) * | 2018-08-03 | 2021-03-16 | 脸谱科技有限责任公司 | System for monitoring grating formation |
| CN112513689B (en) * | 2018-08-03 | 2022-12-06 | 元平台技术有限公司 | System for monitoring grating formation |
| CN109655953A (en) * | 2018-12-29 | 2019-04-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of method of real-time monitoring developing process |
Also Published As
| Publication number | Publication date |
|---|---|
| CN100386698C (en) | 2008-05-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7718326B2 (en) | Seamless stitching of patterns formed by interference lithography | |
| US8542356B2 (en) | Measurement method and measurement system for measuring birefringence | |
| US6641268B2 (en) | Interferometric projection system | |
| US20140307242A1 (en) | Method and apparatus for printing periodic patterns using multiple lasers | |
| CN102625921A (en) | Method and apparatus for retrieving a phase of a wavefield | |
| JP2003194586A (en) | Optical encoder and scale for encoder | |
| WO2015120070A1 (en) | Grazing order metrology | |
| JP4417881B2 (en) | Manufacturing method of member having fine structure, and exposure method used for manufacturing method thereof | |
| Külich | Reconstructing volume holograms without image field losses | |
| Ma et al. | Achieving unlimited recording length in interference lithography via broad-beam scanning exposure with self-referencing alignment | |
| CN100386698C (en) | Optical method for real time latent image self-moritoring in holographic raster mfg | |
| Murukeshan et al. | Nano-scale three dimensional surface relief features using single exposure counter-propagating multiple evanescent waves interference phenomenon | |
| US20030179373A1 (en) | Method for position and/or angle measurement by means of gratings | |
| Bouhelier et al. | Plasmon transmissivity and reflectivity of narrow grooves in a silver film | |
| Golani et al. | Simulating semiconductor structures for next-generation optical inspection technologies | |
| US11714382B2 (en) | Fabrication and replication of volume holographic optical elements | |
| Ewart | OPTICS: the science of light | |
| CN1243213C (en) | X ray interferometer with twin zone plates | |
| Hawley | Applications and practical considerations of polarisation structuring by a Fresnel cone | |
| Walsh | Design methods for diffractive waveplate geometric phase elements | |
| Sun et al. | Extinction ratio and image accuracy of relayed-microgrid polarimetric imaging systems: theory and experiment | |
| Head | Off-null focused beam scatterometry using spatially varying polarization states | |
| Zhao | Design and Application of Waveguide Holographic Optical Elements | |
| Kumar et al. | Multiple-exposure speckle photography of the out-of-plane motion: comparative performance of filtering by collimated and converging beams | |
| Feng | Development and implementation of quadratically distorted (QD) grating and grisms system for 4D multi-colour microscopy imaging (MCMI) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20080507 |