CN1442951A - Sound surface wave fan shaped filter having single phase single direction structure - Google Patents
Sound surface wave fan shaped filter having single phase single direction structure Download PDFInfo
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Abstract
The present invention relates to a fan-shaped filter for surface acoustic wave with single-phase and-single-direction structure includes two fan-shaped transducers made up by using the semiconductor plane process along the propagating direction of acoustic wave on a piezoelectric substrate, and the said transducer adopts the single-phase and single-direction structure and can be divided into any number of subfilters along the direction of surface acoustic wave, among which the subfilters use serial connection, parallel connection or serial-parallel mixed connection between themselves. Under certain rectangle factor of the device, the fan-shaped filter can have its length decreased by one half.
Description
Technical field
The present invention relates to a kind of Surface Acoustic Wave Filter (hereinafter to be referred as the SAW filter) in the acoustic technique, particularly relate to a kind of sound surface wave fan shaped filter with single phase single direction structure.
Background technology
The conventional Surface Acoustic Wave Filter with sector structure 1, as shown in Figure 1, described in document 1, IEEE 1998 Ultrasonics Sypisium Proceedings pp 27-37: wherein two slanted transducers 3,4 adopt control electrode width single phase single direction structure (being called for short EWC/SPUDT).2 is piezoelectric substrate in Fig. 1, the one-way of transducer 3,4 is by placing the middle reflecting electrode of device 5 to realize, especially the effect of indicated all reflecting electrodes of reflecting electrode 5 is to make radiative acoustic wave in the direction radiation homophase addition of pointing to another transducer, disappears mutually in that the direction that deviates from another transducer is anti-phase.
As another example, conventional SAW resonant mode single phase single direction filter 2, as shown in Figure 2, the type filter is introduced in document 2, IEEE 1994 Ultrasonics SypisiumProceedings pp 1-6, and it is made up of two resonant mode transducers 9,10 as shown in Figure 2.2 be substrate among Fig. 2 wherein; With the left-hand right side is forward, and 11 represent a forward resonant mode single phase single direction unit; 12 represent a reverse resonant mode single phase single direction unit.Transducer 9 is formed in parallel by several transducer unit identical with 11 electricity ends, and transducer 10 is formed in parallel by several transducer unit identical with 12 electricity ends.This structure is based on the EWC/SPUDT conversion and forms, and transducer transducing battle array finger width is 1/8th wavelength, and the reflection width of reflecting grating can change, and this structure forms resonant cavity in transducer, thereby can realize the squareness factor higher than common SPUDT.Wherein resonant mode single phase unidirectional transducer unit can be for as Fig. 3 (a), and 13 is the part in cycle with the wavelength in representing between the righting reflex grid region among Fig. 3 (a), and 14 is the part in cycle with the wavelength in representing between the back reflection grid region.Among Fig. 3 (b) in the righting reflex gate part corresponding diagram 3 (a) 13, oppositely in reflecting grating part corresponding diagram 3 (a) 14, empty reflecting grating is corresponding to the reflecting grating withdraw-weighted.As the modified model of resonant mode single phase unidirectional transducer in this illustration 3 (a), such as among document 3, the IEEE 1998Ultrasonics Sypisium Proceedings pp 47-50 introduction: the transducer unit of resonant mode single phase unidirectional transducer can be as two kinds of structures among Fig. 4.
As mentioned above, the fan-filter of the EWC/SPUDT type that filter 1 adopts can obtain the squareness factor of filter and low insertion loss.And in filter 2, the filter of being made up of resonant mode single phase unidirectional transducer structure has following characteristic, it can form resonant cavity in the middle of transducer, increase impulse response length, thereby can under the constant prerequisite of device size, realize littler squareness factor, or squareness factor reduces device size definitely under the situation.But some situation resonant mode single phase unidirectional transducer structure is impracticable, for example broadband filter.The finger of fan-filter is an inclination shape, according to discovering, the frequency response of fan-filter can be obtained according to following mode: the aperture differential of whole fan-filter is become the first series connection of some little passage tails, and as shown in Figure 1, each passage j is called auxiliary-filter (sub-filter).For auxiliary-filter (as the j passage among Fig. 1), when its aperture was enough little with respect to the wavelength of fan-filter centre frequency place correspondence, this auxiliary-filter just can be regarded an aclinal general filter in aperture as.The centre frequency of auxiliary-filter is by the decision of the finger width of auxiliary-filter, promptly by the wavelength decision, and the fan-shaped high auxiliary-filter of narrow end respective frequencies in the slanted transducer, the fan-shaped low auxiliary-filter of wide end respective frequencies.As 11 of shade identification division among Fig. 2.The same with common uniform pore size filter, shade identification division 7 among two transducers such as Fig. 1 about comprising in each auxiliary-filter, 8, like this, auxiliary-filter just can be used as the even general filter in aperture and calculate, the frequency response of auxiliary-filter also just can be found the solution according to the method for general filter, the total frequency response of fan-filter equal all auxiliary-filter frequency responses and.Though the slanted transducer structure that filter 1 adopts can be accomplished less squareness factor, but under the situation of some special applications, as requiring littler squareness factor under the prerequisite of identity unit size, when perhaps under identical squareness factor situation, requiring more the gadget size, adopt the fan-filter of conventional method not meet the demands.
Summary of the invention
The object of the present invention is to provide a kind of by piezoelectric substrate and two sound surface wave fan shaped filters that the single phase single direction slanted transducer is formed with single phase single direction structure, it can keep existing fan-filter advantage, size remains unchanged simultaneously, reach the squareness factor that further reduces filter, reach the purpose that further reduces device size when perhaps squareness factor is constant, thereby solve the still scabrous problem of prior art.
The object of the present invention is achieved like this:
Sound surface wave fan shaped filter with single phase single direction structure provided by the invention, comprise: two slanted transducers that adopt semiconductor planar technology to make are arranged on the sonic propagation direction of piezoelectric substrate upper edge, it is characterized in that: described slanted transducer adopts the resonant mode single phase single direction structure, this slanted transducer is divided into an auxiliary-filter arbitrarily along the surface acoustic wave direction, wherein adopt series, parallel or series and parallel to mix between the auxiliary-filter and link to each other, as shown in Figure 5.
Adopting series connection between the described auxiliary-filter is that auxiliary-filter links to each other with its next-door neighbour's next auxiliary-filter tail is first successively.
Adopting parallel connection between the described auxiliary-filter is to adopt parallel-connection structure between the electricity end of first continuous each auxiliary-filter of tail, fan-filter shown in Fig. 6 (a) is divided into two auxiliary-filters, these two auxiliary-filter electricity ends are in parallel, the wide end that is the following auxiliary-filter that narrow end of auxiliary-filter tightly links to each other by electrode and it above it links to each other, the link position of finger up and down that is close to two auxiliary-filter connection electrode is identical, the electrode that is connected two auxiliary-filters is alternately occurred by input and ground end, then by electrode respectively all inputs, hold and link together.
Adopt the segmentation series connection between the described auxiliary-filter, wherein auxiliary-filter by about two resonant mode single phase unidirectional transducers form, wherein each resonant mode single phase unidirectional transducer comprises 2 or 2 above resonant mode single phase single direction unit, (as Fig. 3 (a), shown in 4), can adopt the segmentation series connection between each resonant mode single phase single direction unit electricity end, shown in Fig. 6 (c), the transducer of each auxiliary-filter adopts the series connection of resonant mode single phase single direction cellular construction, be transducer about next-door neighbour two resonant mode single phase single direction unit among, wherein the first module finger that connects bottom electrode is swung to, select a wide end of electrode in Unit two or a narrow end to link then, the other end disconnects, form the segmentation cascaded structure of the transducer in the auxiliary-filter, last each auxiliary-filter tail is first to be connected, form the cascaded structure of this slanted transducer, shown in Fig. 6 (b).
Can adopt the series and parallel mixed structure between the resonant mode single phase single direction unit in the described auxiliary-filter, promptly can form several auxiliary-filter parallel connections by parallel-connection structure earlier, then each auxiliary-filter be adopted the segmentation cascaded structure; Perhaps can adopt the segmentation series connection to each auxiliary-filter earlier, adopt parallel-connection structure to connect to every section after the series connection then, be to be divided into two auxiliary-filter parallel connections earlier then every auxiliary-filter to be adopted two sections series connection as Fig. 6 (d).
The finger that also comprises resonant mode single phase single direction fan-filter can carry out the aperture weighting, makes the finger of filter become curved shape; As shown in Figure 7.
Comprise that also reflecting electrode in the single transducer in the resonant mode single phase single direction fan-filter can adopt EWC/SPUDT weighting, withdraw-weighted or both to combine.The finger beam of described fan-filter is determined by the band connection frequency of its frequency response: the wavelength X of the wideest end correspondence of fan-filter
MaxLeast significant end frequency f corresponding to passband
0-BW/2, the wavelength X of its narrowest end correspondence
MinMost significant end frequency f corresponding to band connection frequency
0The wavelength X (f) of the finger beam correspondence the in the middle of+BW/2, filter is corresponding frequency f in the middle of its frequency response passband.f
0: the centre frequency of filter, BW: the bandwidth of filter.For the auxiliary-filter of each Frequency point of frequency response passband corresponding to a common resonant mode single phase single direction filter.So the finger beam of auxiliary-filter is identical with common resonant mode single phase single direction filter with arrangement mode.
The invention has the advantages that, provided by the invention have the surface acoustic wave resonant fan-filter of single phase single direction structure under device size one stable condition, compare with the single phase single direction slanted transducer of routine, resonant mode single phase single direction fan-filter can be realized the long squareness factor that could realize of the common transducer of about twice; Under the certain situation of device squareness factor, slanted transducer length can reduce half in the device.Compare with the resonant mode single phase single direction filter of routine, conventional resonant mode single phase single direction filter relative bandwidth is usually less than 10%, the advantage that resonant mode single phase single direction fan-filter has been inherited fan-filter can realize wideer bandwidth, and bandwidth can reach more than 30%.
Description of drawings
Fig. 1 is a planimetric sketch of conventional EWC/SPUDT formula fan-filter.
Fig. 2 is a planimetric sketch of conventional resonant mode single phase single direction structure filter.
Fig. 3 (a) is in the face perpendicular to wafer and finger, a tangent plane sketch map of the resonant mode single phase single direction cellular construction that can adopt in the conventional resonant mode single phase single direction structure filter; What wherein finger beam was narrow is 1/8 wavelength, and wide is the 1/8-3/8 wavelength; The dotted line spacing is 1 wavelength;
Among Fig. 3 (b) righting reflex gate part corresponding diagram 3 (a) 13, oppositely in reflecting grating part corresponding diagram 3 (a) 14, empty reflecting grating is corresponding to the reflecting grating withdraw-weighted.
Fig. 4 is in the face perpendicular to wafer and finger, a tangent plane sketch map of the modified model resonant mode single phase single direction cellular construction that can adopt in the conventional resonant mode single phase single direction structure filter; Finger beam among the figure: narrow is 1/8 wavelength, and wide is the 1/8-3/8 wavelength;
Fig. 5 is the planimetric sketch with sound surface wave fan shaped filter structure of single phase single direction structure of the present invention.
Fig. 6 (a) is in the sound surface wave fan shaped filter with single phase single direction structure of the present invention, adopts a planimetric sketch of the fan-filter of parallel-connection structure
Fig. 6 (b) is in the sound surface wave fan shaped filter with single phase single direction structure of the present invention, adopts a planimetric sketch of the fan-filter of cascaded structure.
Fig. 6 (c) is the planimetric sketch that auxiliary-filter of the present invention adopts cascaded structure.
Fig. 6 (d) is in the sound surface wave fan shaped filter with single phase single direction structure of the present invention, adopts a planimetric sketch of the auxiliary-filter of connection in series-parallel mixed structure.
Fig. 7 is the aperture weighting fan-filter planimetric sketch that an employing of the present invention can be used for fan-filter.
Fig. 8 is the floor map of wave filter embodiment of the present invention.
Fig. 9 is the floor map of another wave filter embodiment of the present invention.
Figure 10 is the floor map of another kind of wave filter embodiment of the present invention.
The drawing explanation:
1-filter 2-substrate
The right transducer of the left transducer 4-fan-filter of 3-fan-filter
5-reflection grizzly bar 6-auxiliary-filter
The right transducer of the left transducer 8-auxiliary-filter of 7-auxiliary-filter
The right transducer of the left transducer 10-resonator filter of 9-resonator filter
The reverse resonant mode single phase single direction of 11-forward resonant mode single phase single direction unit 12-unit
Be the part in cycle with the wavelength between 13-righting reflex grid region,
Be the part in cycle with the wavelength between 14-back reflection grid region
Embodiment
Embodiment 1:
Make a sound surface wave fan shaped filter with single phase single direction structure by Fig. 5, centre frequency is f
0=49MHz, bandwidth side BW=14MHz.Auxiliary-filter adopts conventional resonant mode single phase unidirectional transducer structure as shown in Figure 2, and the resonant mode single phase single direction unit of its auxiliary-filter adopts Fig. 3 (a) unit.13 is the part in cycle with the wavelength in representing between the righting reflex grid region among Fig. 3 (a), and 14 is the part in cycle with the wavelength in representing between the back reflection grid region.Among Fig. 3 (b) in the righting reflex gate part corresponding diagram 3 (a) 13, in the back reflection gate part corresponding diagram 3 (a) 14, empty reflecting grating is corresponding to the reflecting grating withdraw-weighted.This filter 1 comprises: the lithium niobate substrate 2 that in model is YX-128 ° adopts semiconductor planar technology to make two slanted transducers 3,4 along on the sonic propagation direction, thickness 1500 dusts of aluminizing, and the aperture is 100 λ
0, fan-filter finger arrangement mode be left transducer 3 by 128 with the forward resonant mode single phase single direction unit 11 among Fig. 2, not segmentation constitutes.Right transducer 4 is by 84 as reverse resonant mode single phase single direction unit 12 among Fig. 2, not segmentation formation.λ
0: the wavelength of slanted transducer centre frequency correspondence.
The finger beam of described slanted transducer is by the decision of the band connection frequency of its frequency response: i.e. the wavelength X of the wideest end correspondence of fan-filter
MaxBe least significant end frequency f corresponding to passband
0-BW/2 is 42MHz, the wavelength X of its narrowest end correspondence
MinMost significant end frequency f corresponding to band connection frequency
0+ BW/2 is 56MHz.So the width of the wideest end reflection grizzly bar (electrode) 5 of slanted transducer, transducing electrode (finger beyond the reflection grizzly bar), finger spacing is respectively: 1/4 λ
MaxWith 1/8 λ
Max, 1/8 λ
Max, the narrowest end reflection grizzly bar (electrode) 5 with transducing electrode (finger beyond the reflection grizzly bar) width is respectively: 1/4 λ
MinWith 1/8 λ
Min, 1/8 λ
MinEvery finger connects into a trapezoidal finger by the wideest end and the narrowest end like this, and trapezoidal height is the aperture of slanted transducer.
Because all auxiliary-filters all adopt resonant mode single phase single direction filter 2, so can reach than the higher squareness factor of common single phase single direction filter.Frequency response all auxiliary-filter frequency responses and that be total slanted transducer, so this structure has the advantage of the big relative bandwidth of common slanted transducer again.
Embodiment 2: make a sound surface wave fan shaped filter with single phase single direction structure, fan-filter centre frequency f by Fig. 9
0=65MHz, bandwidth BW=9MHz.Its basic structure is identical with embodiment 1.Do not exist together for: substrate material: model is the YZ lithium niobate, and aluminium thickness 1600 dusts, left transducer 3 are divided into two sections series connection by Fig. 6 (b) and constitute.Promptly wherein auxiliary-filter is pressed shown in Fig. 6 (c).The left transducer of each auxiliary-filter adopts the series connection of resonant mode single phase single direction cellular construction, be left transducer about next-door neighbour two resonant mode single phase single direction unit among, wherein the unit finger that connects bottom electrode is swung to, select a wide end of electrode in Unit two or a narrow end to link then, the other end disconnects, form the segmentation cascaded structure of the transducer in the auxiliary-filter, each auxiliary-filter tail is first at last connects, and forms the cascaded structure of this slanted transducer.
Embodiment 3: make a sound surface wave fan shaped filter with single phase single direction structure, fan-filter centre frequency f by Fig. 9
0=70MHz, bandwidth BW=9MHz.Its basic structure is identical with embodiment 1.Do not exist together and be substrate material: quartz, aluminium thickness 1200 dusts, adopt parallel-connection structure between two auxiliary-filters of left side transducer, fan-filter shown in Fig. 6 (a) is divided into two auxiliary-filters, these two auxiliary-filter electricity ends are in parallel, the wide end that is the following auxiliary-filter that narrow end of auxiliary-filter tightly links to each other by electrode and it above it links to each other, the link position of finger up and down that is close to two auxiliary-filter connection electrode is identical, the electrode that is connected two auxiliary-filters is alternately occurred by input and ground end, then by electrode respectively all inputs, hold and link together.Withdraw-weighted was realized after transducer finger arrangement mode adopted the hamming weighting, and refer to that logarithm is 186 pairs, resonant element adopts as the forward resonant mode single phase single direction unit 11 among Fig. 2, and withdraw-weighted was realized after reflecting grating adopted transducer time domain convolution.Right transducer takes the transducer that do not have the resonant mode single phase single direction unit of segmentation to constitute as the reverse resonant mode single phase single direction unit 12 among Fig. 2 by 260, reflecting grating to adopt withdraw-weighted realization after the transducer time domain convolution.The aperture is 90 λ
0
Embodiment 4: make a sound surface wave fan shaped filter with single phase single direction structure, fan-filter centre frequency f by Figure 10
0=60MHz, bandwidth BW=8.2MHz.Its basic structure is identical with embodiment 3.Difference is: substrate material: model is that 36 ° of Y cut lithium tantalate, aluminium thickness 1300 dusts, and left transducer is divided into the auxiliary-filter of two equal apertures, adopt parallel-connection structure between two auxiliary-filters, with embodiment 3, cascaded structure is all adopted in auxiliary-filter inside, with embodiment 2.Make as the left transducer of two auxiliary-filters adopts as the forward resonant element of Fig. 2 severally 70, the reverse resonant element number of right transducer such as Fig. 2 is 100.The aperture is 80 λ
0
The concrete making step of resonant mode single phase single direction fan-filter is as follows: by the squareness factor requirement that device proposes, tentatively determine the squareness factor of single auxiliary-filter.Try to achieve the combining structure of the resonant mode single phase single direction unit of two auxiliary-filters in the same passage again according to common optimization method, and try to achieve the frequency response of this auxiliary-filter; The corresponding centre frequency of each auxiliary-filter, corresponding and its wavelength (the narrowest finger beam is 1/8 wavelength) of the auxiliary-filter centre frequency of fan-filter, the auxiliary-filter centre frequency of wide end is corresponding to the minimum point of the band connection frequency of fan-filter, and the auxiliary-filter centre frequency of narrow end is corresponding to the peak of the band connection frequency of fan-filter; For different auxiliary-filters different centre frequencies is arranged, obtain the frequency response of all auxiliary-filters, to all auxiliary-filters summations, obtain total filter response then according to identical principle.
Claims (8)
1. sound surface wave fan shaped filter with single phase single direction structure, comprise: two slanted transducers that adopt semiconductor planar technology to make are arranged on the sonic propagation direction of piezoelectric substrate upper edge, it is characterized in that: described slanted transducer adopts the resonant mode single phase single direction structure, this slanted transducer is divided into an auxiliary-filter arbitrarily along the surface acoustic wave direction, wherein adopts series, parallel or series and parallel to mix between the auxiliary-filter and links to each other.
2. by the described sound surface wave fan shaped filter with single phase single direction structure of claim 1, it is characterized in that: adopting series connection between the described auxiliary-filter is that all auxiliary-filters link to each other with its next-door neighbour's next auxiliary-filter tail is first.
3. by the described surface acoustic wave resonant fan-filter of claim 1, it is characterized in that: adopt the electricity end in parallel between the described auxiliary-filter with single phase single direction structure; The wide end of the following auxiliary-filter that narrow end of auxiliary-filter tightly links to each other by electrode and it above it links to each other, the link position of finger up and down that is close to two auxiliary-filter connection electrode is identical, the electrode that is connected two auxiliary-filters is alternately occurred by input and ground end, then by electrode respectively all inputs, hold and link together.
4. by the described sound surface wave fan shaped filter of claim 1 with single phase single direction structure, it is characterized in that: connect between the described auxiliary-filter and adopt auxiliary-filter to link to each other, comprise between each resonant mode single phase single direction unit electricity end and adopt the segmentation series connection with its next-door neighbour's next auxiliary-filter tail is first; Wherein left transducer about the unit of next-door neighbour among the two resonant mode single phase single direction unit finger that connects bottom electrode swing to, select a wide end of electrode in Unit two or a narrow end to link then, the other end disconnects, form the segmentation cascaded structure of the transducer in the auxiliary-filter, each auxiliary-filter tail head is connected to form the segmentation cascaded structure at last.
5. by the described sound surface wave fan shaped filter of claim 1, it is characterized in that: connect the resonant mode single phase single direction unit that adopts in the filter between the described auxiliary-filter and can adopt the series and parallel mixed structure with single phase single direction structure.
6. by the described sound surface wave fan shaped filter of claim 1, it is characterized in that: comprise that also reflecting electrode in the single transducer in the resonant mode single phase single direction fan-filter can adopt control electrode width weighed, withdraw-weighted or both to combine with single phase single direction structure.
7. by the described sound surface wave fan shaped filter of claim 1 with single phase single direction structure, it is characterized in that: the finger beam of auxiliary-filter is by the band connection frequency decision of its frequency response, the finger beam of the wideest end correspondence of the finger beam of its fan-filter is corresponding to the least significant end frequency of passband, the finger beam of its narrowest end correspondence is corresponding to the most significant end frequency of band connection frequency, and the finger beam in the middle of the filter is corresponding to corresponding frequency in the middle of its frequency response passband.
8. by the described sound surface wave fan shaped filter of claim 1 with single phase single direction structure, it is characterized in that: in the described auxiliary-filter by about two resonant mode single phase unidirectional transducers form, wherein each resonant mode single phase unidirectional transducer is made up of 2 or 2 above resonant mode single phase single direction unit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 02104118 CN1238968C (en) | 2002-03-06 | 2002-03-06 | Sound surface wave fan shaped filter having single phase single direction structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02104118 CN1238968C (en) | 2002-03-06 | 2002-03-06 | Sound surface wave fan shaped filter having single phase single direction structure |
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| CN1442951A true CN1442951A (en) | 2003-09-17 |
| CN1238968C CN1238968C (en) | 2006-01-25 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102324908A (en) * | 2011-07-07 | 2012-01-18 | 中国电子科技集团公司第五十五研究所 | SAW device with stack bar battle array structure paracycle |
| CN102497173A (en) * | 2011-12-19 | 2012-06-13 | 北京中讯四方科技股份有限公司 | Novel suspension electrode structure acoustic surface wave filter |
| CN105406834A (en) * | 2015-11-19 | 2016-03-16 | 北京中讯四方科技股份有限公司 | Surface acoustic wave filter based on capacitive weighed fan-shaped single-phase unidirectional transducers |
| CN112422099A (en) * | 2020-11-25 | 2021-02-26 | 成都燎原星光电子有限责任公司 | Chip structure of broadband low-loss surface acoustic wave filter |
| CN114611533A (en) * | 2022-01-28 | 2022-06-10 | 金陵科技学院 | Interdigital unilateral inclined weighted surface acoustic wave type Morlet wavelet processor |
-
2002
- 2002-03-06 CN CN 02104118 patent/CN1238968C/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102324908A (en) * | 2011-07-07 | 2012-01-18 | 中国电子科技集团公司第五十五研究所 | SAW device with stack bar battle array structure paracycle |
| CN102497173A (en) * | 2011-12-19 | 2012-06-13 | 北京中讯四方科技股份有限公司 | Novel suspension electrode structure acoustic surface wave filter |
| CN102497173B (en) * | 2011-12-19 | 2014-12-17 | 北京中讯四方科技股份有限公司 | Novel suspension electrode structure acoustic surface wave filter |
| CN105406834A (en) * | 2015-11-19 | 2016-03-16 | 北京中讯四方科技股份有限公司 | Surface acoustic wave filter based on capacitive weighed fan-shaped single-phase unidirectional transducers |
| CN105406834B (en) * | 2015-11-19 | 2017-12-01 | 北京中讯四方科技股份有限公司 | A kind of fan-shaped single phase unidirectional transducer SAW filter based on electric capacity weighting |
| CN112422099A (en) * | 2020-11-25 | 2021-02-26 | 成都燎原星光电子有限责任公司 | Chip structure of broadband low-loss surface acoustic wave filter |
| CN114611533A (en) * | 2022-01-28 | 2022-06-10 | 金陵科技学院 | Interdigital unilateral inclined weighted surface acoustic wave type Morlet wavelet processor |
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| CN1238968C (en) | 2006-01-25 |
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