CN1434277A - Method for purifying tested light spectrum in spectral system - Google Patents
Method for purifying tested light spectrum in spectral system Download PDFInfo
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- CN1434277A CN1434277A CN 03115779 CN03115779A CN1434277A CN 1434277 A CN1434277 A CN 1434277A CN 03115779 CN03115779 CN 03115779 CN 03115779 A CN03115779 A CN 03115779A CN 1434277 A CN1434277 A CN 1434277A
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Abstract
The invention refers to a purifying method of the tested spectrum in the prismatic system. According to the demand of the full-spectrum parallel measurement, it uses the character that the measured spectrum and the superposed non-measured one belongs to different wave bands to realize the purification by a positioning-mode filter pipe or device. The filter device consists of two or more areas with different permeation or reflection spectrum character, the area size and the spectrum character determined by the wavelength distribution and range of the two spectrums, the area division according to that the two spectrums disconnect at least 5nm on the spectrum segment in each area, and the design for the spectrum character should make the measured spectrum still reach the detector after permeation or reflection through the filter piece and have enough strength, and meanwhile the non-measured one can not reach the detector.
Description
Technical field:
The present invention relates to the neat process of tested spectrum in a kind of beam splitting system, belong to spectroscopy, spectral instrument and field of measuring technique.
Background technology:
In spectrophotometry and spectral measurement, general prism, grating or the acousto-optic modulators etc. of adopting are as light-splitting device, no matter adopt which kind of device, because the intrinsic optical characteristics of device or because the existence of parasitic light, common tested spectrum is unpurified, on the promptly tested spectrum toward contact overlapping non-tested spectral component.Eliminate the non-tested spectral component in the tested spectrum, pure tested spectrum is the matter of utmost importance that must solve in luminosity and the spectral technique.
The spectral measurement that with the grating is light-splitting device is an example, and according to grating equation: dsin θ=k λ for certain diffraction angle, has the luminous energy of several wavelength to satisfy grating equation, i.e. dsin θ=k usually
1λ
1=k
2λ
2=...=k
nλ
n, i.e. k in the diffraction spectrum
1The wavelength of level is λ
1Monochromatic light, k
2The wavelength of level is λ
2Monochromatic light ... and k
nThe wavelength of level is λ
nMonochromatic light all with appearing at same angle of diffraction position simultaneously, form overlapping spectrum, promptly so-called spectral order time overlapping phenomenon.Therefore although the diffraction efficiency difference of time spectrum not at the same level, multistage overlapping phenomenon always exists, and eliminates all the other grades time spectrum that is superimposed upon on the tested level time spectrum and be the problem of overriding concern and solution in the grating splitting system.
In traditional mechanical scanning type spectrophotometer or spectrometer, be to realize length scanning by rotating light-splitting device, timesharing partial wave progress row is measured, this serial metering system, allow to take in light path timesharing to insert the method for different optical filters, the wavelength or the elimination of parasitic light wavelength of the non-tested level that may present time reach the purpose of pure tested spectrum.This method has been widely used in the various spectral measurement instruments, and most of spectroscopic instruments all need to change several pieces different optical filters in the length scanning process.
In on-mechanical scanning spectrophotometer or spectrometer, owing to adopt the multichannel array type detecting device, measuring process need not mechanical scanning, just can finish the collection of all wavelengths information in the spectral range in moment, is a kind of parallel measurement mode.This supper-fast spectrophotometric mode has greatly improved the speed and the efficient of analyte detection process, what is more important, it for human postgraduateization reaction, life science and explosion etc. fast process strong means are provided.For this on-mechanical scan-type instrument, when wider range that spectrum covers, the method that different optical filters are cut in traditional timesharing can not be suitable for, must take new filtering method and filtering device to come pure tested spectrum.
Summary of the invention:
The objective of the invention is at the deficiencies in the prior art, propose the neat process of tested spectrum in a kind of novel beam splitting system, the effective non-tested spectrum of filtering, and satisfy the requirement of full spectrum parallel measurement.
For reaching such purpose, the present invention is according to the requirement of full spectrum parallel measurement, utilize the tested spectrum and the non-tested spectrum of stack to belong to different this character of wave band respectively, the filtering of the non-tested spectrum of all wave bands is realized by the optical filter or the device of a locate mode.Filtering device places between light-splitting device and the detector array, difference sees through or the two or more zones of reflective spectral property are formed by having, the size in each zone of light filter, see through or reflective spectral property is determined by the tested spectrum of selected arrangement light filter position and the Wavelength distribution and the wavelength coverage of non-tested overlapped spectra, the foundation of area dividing is that tested spectrum and non-tested spectrum disconnect (separating) 5nm at least in each zone on spectral coverage, the zone see through or the reflective spectral property design should be satisfied and makes measured spectrum still can reach detector after mating plate transmission or the reflection after filtration, and have enough intensity, make simultaneously non-measured spectrum after filtration the mating plate transmission or the reflection after can not reach detector.
Concrete grammar of the present invention is as follows:
1) the selection light filter places the appropriate location between light-splitting device and the multichannel array detector, the normally test surface of close detector.
2) selective light is by the mode of light filter.Can be through the light filter transmission, also can be through the light filter reflection.
3) analyze the Wavelength distribution and the locus distribution thereof of light filter tested on the whole spectrum of institute and non-tested spectrum.
4) the wavelength space distribution situation according to tested spectrum and non-tested spectrum is divided into 2 or above zone with spectral measurement face or optical filtering face.The principle of area dividing is to make to be presented on the tested spectrum on each zone and the wavelength zero lap of non-tested spectrum, disconnects on spectral band.The short wavelength of tested spectrum is greater than the long wavelength of non-tested spectrum, and perhaps the long wavelength of tested spectrum is less than the short wavelength of non-tested spectrum.The wavelength spacing that tested spectrum and non-tested spectrum disconnect is more than or equal to 5nm.
5) select a substrate suitable mutually with spectrum face size, each zone difference plated film or coating of dividing, make each zone have different optical reflections or see through characteristic, thereby make each zone all have " leading to " tested spectrum and the characteristic of " cutting " non-tested spectrum.Perhaps select to have the film or the wave plate of different optical reflection or transmissison characteristic, through tailoring, adopt the method that overlaps or glue together to be combined into the multizone light filter it, make each zone have different optical reflections or see through characteristic, thereby make each zone all have " leading to " tested spectrum and the characteristic of " cutting " non-tested spectrum.
Concrete grammar provided by the invention filtering effectively is superimposed upon non-tested spectral components on the tested spectrum, that wavelength is different with tested spectrum, and satisfies wide spectrum and compose the parallel high-speed Testing requirement entirely.
Description of drawings:
Fig. 1 is the Wavelength distribution and the position of appearing synoptic diagram of optical grating diffraction spectrum at different levels in the spectral measurement example of the present invention.
Among Fig. 1, the grating beam splitting scope is that 190～800nm, light source light spectrum scope are 185～1200nm.
Fig. 2 divides synoptic diagram for filter regions in the spectral measurement example of the present invention.
Fig. 3 divides the structural representation of trizonal optical filter on a substrate for the present invention.
Among Fig. 3, the length of substrate is respectively L, W, H, and the thin layer of substrate top is thin layer or dope layer, is divided into I, II, three zones of III, and each regional length is respectively L
1, L
2, L
3, width is smaller or equal to W, and thickness is determined according to actual conditions.
Fig. 4 does not add the holimium oxide solution abosrption spectrogram that records under the optical filter situation in the light path.
Horizontal ordinate among Fig. 4 is the pixel number (corresponding to wavelength) of detector array, ordinate is an absorbance, the holimium oxide solution absorption spectrum substantial deviation standard diagram that shows among the figure, the beginning absorbance is obviously bigger than normal from about the 370nm (corresponding 100 pixels), can also observe the absorption peak of several multistage spectrums, show that the existence of multistage spectrum has had a strong impact on the accuracy of photometric measurement.
Fig. 5 is for adding the holimium oxide solution abosrption spectrogram that records under the optical filter situation of example design of the present invention in the light path.
Horizontal ordinate among Fig. 5 is the pixel number (corresponding to wavelength) of detector array, and ordinate is an absorbance, and the holimium oxide solution absorption spectrum and the standard diagram that show among the figure meet, and shows that the multistage spectrum that overlaps on the tested one-level spectrum is by effectively filtering.
Embodiment:
Below in conjunction with drawings and Examples technical scheme of the present invention is further described.
If measure the spectrum of grating first order diffraction 190～800nm scope, the spectral range 185～1200nm of light source.
Novel filter design method is as follows:
1) select light filter to be close on the multichannel array detector test surface.
2) selective light is a transmission mode through the mode of light filter.
3) analyze the Wavelength distribution and the locus distribution thereof of light filter tested on the whole primary spectrum of institute and non-tested multiple order spectrum:
The Wavelength distribution of optical grating diffraction spectrum at different levels and position of appearing distribute as accompanying drawing 1
By grating equation: at the λ of the first order diffraction spectrum wavelength location second level diffraction spectrum λ ' that will superpose, third level diffraction spectrum λ " ..., and satisfy λ=2 λ '=3 λ "=... the corresponding relation of wave band:
At first-order diffraction spectrum 185～370nm scope, spectrum zero lap;
In first-order diffraction spectrum 370～555nm scope, the overlapping secondary spectrum of 185～277.5nm;
In first-order diffraction spectrum 555～740nm scope, the overlapping secondary spectrum that 277.5～370nm is arranged and three grades of spectrums of 185～246.7nm;
In first-order diffraction spectrum 740～800n spectral range, the overlapping secondary spectrum that 370～400nm is not only arranged, three grades of spectrums of 246.7～266.7nm also have the level Four of 185～200nm to compose.
In sum, though not at the same level time spectrum is overlapping on the position, the range of wavelengths difference at spectrums at different levels place.
4) the wavelength space distribution situation according to tested spectrum and non-tested spectrum is divided into 3 zones with the spectrum face.Make and the tested spectrum in each zone and the wavelength zero lap of non-tested spectrum on spectral band, disconnect 5nm at least.
Area dividing synoptic diagram such as accompanying drawing 2 are divided according to the wavelength location of first-order diffraction spectrum, and 190～300nm is the I district, and 300～530nm is the II district, and 530nm～800nm is the III district.I has only primary spectrum in the district, zero lap spectrum; The overlapped spectra scope in II district is 185～265nm, and (300～530nm) separate 35nm, and the overlapped spectra scope in III district is 185～400nm, and (530nm～800nm) separates 130nm with tested primary spectrum with tested primary spectrum.
5) select a quartz substrate suitable mutually with spectrum face size, area I is not carried out plated film or other processing; Area I I plated film, the membranous type light transmission rate is: cutoff wavelength sees through the long wave of wavelength greater than 285nm smaller or equal to the shortwave of 265nm; Area I II plated film, the membranous type light transmission rate is: cutoff wavelength sees through the long wave of wavelength greater than 470nm smaller or equal to the shortwave of 450nm.Specific embodiment: (the novel filter design in the CCD spectrometer)
The light filter of design is used to adopt CCD to compose the spectrometer system of parallel detecting entirely, the spectral range 190～800nm of spectrometer, and novel filter places the test surface precontract 1mm place of CCD, take transmission mode, on a substrate, divide three zones to carry out mask and plated film, area dividing such as accompanying drawing 2, the size of optical filter is slightly larger than the size of CCD, the optical filter substrate of this example design is a quartz wave-plate, structure such as accompanying drawing 3, concrete parameter is: L=40mm, W=10mm, H=1mm, L
1=16mm, L
2=8mm, L
3=16mm.
The I district is plated film not, and wavelength all can see through more than or equal to the light of 190nm
II district plated film, wavelength are more than or equal to the light transmission (transmitance is not less than 80%) of 295nm, and wavelength ends (transmitance is not more than 0.5%) smaller or equal to the light of 265nm
III district plated film, wavelength are more than or equal to the light transmission (transmitance is not less than 80%) of 480nm, and wavelength ends (transmitance is not more than 0.5%) smaller or equal to the light of 450nm
Do not add the holimium oxide solution abosrption spectrogram such as the accompanying drawing 4 that record under the optical filter situation in the light path, horizontal ordinate among the figure is the pixel number (corresponding to wavelength) of detector array, ordinate is an absorbance, the holimium oxide solution absorption spectrum substantial deviation standard diagram that shows among the figure, the beginning absorbance is obviously bigger than normal from about the 370nm (corresponding 100 pixels), can also observe the absorption peak of several multistage spectrums, show that the existence of multistage spectrum has had a strong impact on the accuracy of photometric measurement.Add holimium oxide solution abosrption spectrogram such as the accompanying drawing 5 that records under the optical filter situation of example design in the light path, horizontal ordinate among the figure is the pixel number (corresponding to wavelength) of detector array, ordinate is an absorbance, the holimium oxide solution absorption spectrum and the standard diagram that show among the figure meet, and show that the multistage spectrum that overlaps on the tested one-level spectrum is by effectively filtering.
Claims (2)
1, the neat process of tested spectrum in a kind of beam splitting system is characterized in that comprising following concrete steps:
1) select light filter to place between light-splitting device and the multichannel array detector;
2) selective light is transmission or reflection by the mode of light filter;
3) analyze the Wavelength distribution and the locus distribution thereof of light filter tested on the whole spectrum of institute and non-tested spectrum;
4) the wavelength space distribution situation according to tested spectrum and non-tested spectrum is divided into 2 or above zone with spectral measurement face or optical filtering face, make and to be presented on the tested spectrum on each zone and the wavelength zero lap of non-tested spectrum, on spectral band, disconnect, the short wavelength of tested spectrum is greater than the long wavelength of non-tested spectrum, perhaps the long wavelength of tested spectrum is less than the short wavelength of non-tested spectrum, and the wavelength spacing that tested spectrum and non-tested spectrum disconnect is more than or equal to 5nm;
5) select a substrate suitable mutually with spectrum face size, each zone difference plated film or coating of dividing, make each zone have different optical reflections or see through characteristic, thereby make each zone all have " leading to " tested spectrum and the characteristic of " cutting " non-tested spectrum; Perhaps select to have the film or the wave plate of different optical reflection or transmissison characteristic, through tailoring, adopt the method that overlaps or glue together to be combined into the multizone light filter it, make each zone have different optical reflections or see through characteristic, thereby make each zone all have " leading to " tested spectrum and the characteristic of " cutting " non-tested spectrum.
2, the filtering device of pure tested spectrum in a kind of beam splitting system, it is characterized in that having two or more and have different seeing through or the zone of reflective spectral property, it is the substrate after a process plated film or coating are handled, or have different see through or the material of reflective spectral property is spliced by two or more than two, the dividing region foundation is that each interior tested spectrum in zone and non-tested spectrum disconnect 5nm. at least on spectral coverage, each zone see through or foundation that reflective spectral property is determined is to make tested spectrum still can arrive detector after mating plate transmission or the reflection after filtration, arrive detector by non-tested spectrum again simultaneously.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03115779 CN1268902C (en) | 2003-03-13 | 2003-03-13 | Method for purifying tested light spectrum in spectral system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03115779 CN1268902C (en) | 2003-03-13 | 2003-03-13 | Method for purifying tested light spectrum in spectral system |
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| CN1434277A true CN1434277A (en) | 2003-08-06 |
| CN1268902C CN1268902C (en) | 2006-08-09 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538964A (en) * | 2012-01-17 | 2012-07-04 | 西安工业大学 | Spectral space matching method for grating imaging spectrometer |
| CN106644066A (en) * | 2016-11-25 | 2017-05-10 | 中国科学院上海技术物理研究所 | Stray light inhibition method for imaging spectrometer |
| CN106969835A (en) * | 2017-04-25 | 2017-07-21 | 杭州博源光电科技有限公司 | A kind of two grades applied to spectral instrument and the removing method of Advanced Diffraction spectrum |
| CN109946282A (en) * | 2019-04-18 | 2019-06-28 | 上海理工大学 | It is a kind of for measuring the measurement method of fluorescence membrane transmissivity or reflectance spectrum |
| CN113419289A (en) * | 2021-05-13 | 2021-09-21 | 中国电子科技集团公司第十一研究所 | Method for mounting multi-spectral filter for infrared detector and infrared detector |
-
2003
- 2003-03-13 CN CN 03115779 patent/CN1268902C/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102538964A (en) * | 2012-01-17 | 2012-07-04 | 西安工业大学 | Spectral space matching method for grating imaging spectrometer |
| CN106644066A (en) * | 2016-11-25 | 2017-05-10 | 中国科学院上海技术物理研究所 | Stray light inhibition method for imaging spectrometer |
| CN106644066B (en) * | 2016-11-25 | 2018-06-26 | 中国科学院上海技术物理研究所 | A kind of veiling glare suppressing method of imaging spectrometer |
| CN106969835A (en) * | 2017-04-25 | 2017-07-21 | 杭州博源光电科技有限公司 | A kind of two grades applied to spectral instrument and the removing method of Advanced Diffraction spectrum |
| CN106969835B (en) * | 2017-04-25 | 2018-09-28 | 杭州博源光电科技有限公司 | A kind of removing method of two level and Advanced Diffraction spectrum applied to spectral instrument |
| CN109946282A (en) * | 2019-04-18 | 2019-06-28 | 上海理工大学 | It is a kind of for measuring the measurement method of fluorescence membrane transmissivity or reflectance spectrum |
| CN109946282B (en) * | 2019-04-18 | 2021-09-07 | 上海理工大学 | Measuring method for measuring transmittance or reflectance spectrum of fluorescent film |
| CN113419289A (en) * | 2021-05-13 | 2021-09-21 | 中国电子科技集团公司第十一研究所 | Method for mounting multi-spectral filter for infrared detector and infrared detector |
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| Publication number | Publication date |
|---|---|
| CN1268902C (en) | 2006-08-09 |
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