CN1382561A - Magnetic suspension drive system for superfine machining - Google Patents
Magnetic suspension drive system for superfine machining Download PDFInfo
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- CN1382561A CN1382561A CN 02111833 CN02111833A CN1382561A CN 1382561 A CN1382561 A CN 1382561A CN 02111833 CN02111833 CN 02111833 CN 02111833 A CN02111833 A CN 02111833A CN 1382561 A CN1382561 A CN 1382561A
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- temperature sensor
- magnetic suspension
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- sensor
- drive unit
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
A magnetic suspension driving system for superfinishing is composed of a constant-temp cavity controlled by cold-hot driver, guide track in said cavity, drive coils at both sides of guide track, suspending magnetic steel under it, drive unit on said guide track, the guide and drive magnetic steels relative to said drive coils. the permanent magnet, exciting coil and core of magnetic pole, which are relative to said suspending magnetic steel, force sensor and temp sensor. Its advantages are low static and dynamic friction forces, not losing all of sucking-floating force even if current is suddenly lost, high stability and high controllability.
Description
Technical field
The present invention relates to a kind of semi-suction type of often leading magnetic suspension drive system that is used for ultraprecise processing.
Background technology
The factor of restriction ultraprecise processing is more, as beating of the distortion of the influence of environment temperature, guide rail, revolving body or the like, and the dynamic and static friction coefficient of guide rail differs bigger, causing jump feed and cause the vibration of closed-loop control system, also is one of key factor that influences ultraprecise processing development.The conventional method that reduces sound attitude coefficient of friction at present is to adopt hydrostatic slideway, and the shortcoming of doing like this is the device complexity, in case leakage of oil will cause environmental pollution; Another newer method is to add the magnetic olein on guide rail; utilize the frictional energy of mechanical OnNow; the cation on rapid activator metal surface; the formation cation protective layer and the same sex are repelled each other on two contact-making surfaces; make dynamic friction coefficient drop to very low level; can not solve the too big problem of static friction coefficient but do like this, in the closed-loop control process, equally can be because of the different vibrations that cause control system of sound attitude coefficient of friction.Differ bigger problem at current ultraprecise processing middle guide sound attitude coefficient of friction, propose to be used for the semi-suction type of often the leading magnetic suspension drive system of ultraprecise processing.
Summary of the invention
The purpose of this invention is to provide a kind of semi-suction type of often leading magnetic suspension drive system that is used for ultraprecise processing.
It has the constant temperature chamber, the constant temperature chamber is by cold and hot driver control, being provided with rail in the constant temperature chamber leads, rail is led both sides and is provided with the driving winding, the lower end is provided with the suspension magnet steel, on guide rail, be provided with drive unit, be provided with and track driving corresponding guiding of winding and driving magnet steel in drive unit two inboards, be provided with the corresponding permanent magnet of suspension magnet steel, magnet exciting coil, pole core with the guide rail lower end in the drive unit lower end, also be provided with the power sensor in the drive unit both sides, the upper end is provided with temperature sensor, is provided with temperature sensor in the guide rail lower end.
Advantage of the present invention is:
1) often leads semi-suction type magnetic suspension driver, because of inhaling floating effect the contact force between two contact-making surfaces is reduced greatly, under the constant situation of sound attitude coefficient of friction, can reduce sound attitude frictional force more greatly, thereby suppress because of the different caused vibrations of sound attitude frictional force.
2) often lead semi-suction type magnetic suspension driver, be in half suspended state on the one hand, promptly will leave and not leave guide rail; Adopt the composite excitation mode on the other hand.Even so lose electric current suddenly, also can not lose attraction force fully and impact and influence the precision of driver and guide rail.
3) often lead semi-suction type magnetic suspension driver, be not in the semi-suction state because of driver leaves guide rail, so its stability is better than magnetic suspension driver.
4) often lead semi-suction type magnetic suspension driver, because of adopting the composite excitation system, controllability is good.
5), make displacement field stable, thereby reach the purpose that improves the driver feed accuracy by the temperature field in control constant temperature chamber.Employing is based on the multi-modal Intelligent Control Strategy of prediction, and the control object that solves non-linear, large dead time is to having a strong impact on that system causes.
Description of drawings
Accompanying drawing is the semi-suction type of often the leading magnetic suspension driving system structure schematic diagram that is used for ultraprecise processing.
The specific embodiment
The semi-suction type magnetic suspension drive system of often leading that is used for ultraprecise processing has constant temperature chamber 2, the constant temperature chamber is by cold and hot driver 1 control, in the constant temperature chamber, be provided with rail and lead 13, rail is led 13 both sides and is provided with driving winding 5, the lower end is provided with suspension magnet steel 12, on guide rail, be provided with drive unit 3, be provided with and track driving corresponding guiding of winding and driving magnet steel 6 in drive unit two inboards, be provided with and the corresponding permanent magnet 7 of the suspension magnet steel of guide rail lower end in the drive unit lower end, magnet exciting coil 8, pole core 9, also be provided with power sensor 11 in the drive unit both sides, the upper end is provided with temperature sensor 4, is provided with temperature sensor 10 in the guide rail lower end.
Said temperature sensor is thermal resistance temperature sensor, thermocouple temperature sensor, semiconductor temperature sensor, Quartz Temperature Sensor.Cold and hot driver is quartz heating-pipe, semiconductor cooler.The power sensor is metal strain formula power sensor, semiconductor power sensor, piezoelectric ceramics power sensor.
Often lead semi-suction type magnetic suspension driver and be placed on the guide rail, left-right symmetry, the excitation system by being fixed on the suspension magnet steel on the guide rail and adopting high performance permanent magnetic materials to mix with electric magnet exciting coil produces attraction force according to principle of opposite sex attraction.The base excitation of composite excitation system is provided by permanent magnetism, is finished by electric excitation and dynamically adjust, thereby has given prominence to the controllability advantage.The effect of attraction force is the contact force that reduces drive unit and guide rail, under static and situation that dynamic friction coefficient is constant, reduce static and dynamic frictional force greatly, thereby the vibration that inhibition causes because of sound attitude coefficient of friction difference improves the feed accuracy of ultraprecise processing.Constitute the control system of a closed loop by power sensor, suspension magnet steel and composite excitation system, make dynamic and static frictional force all less by multi-modal Based Intelligent Control, and near equating.In order to make drive unit keep stable, and under control system situation out of control, can not cause bigger impact, require drive unit not leave guide rail, be in half suspended state, therefore, attraction force should not be too big, by changing the size of attraction force, makes static friction, dynamic friction and the stability of driver be in optimum state.The feeding of drive unit is by driving winding and guiding and driving magnet steel control.In ultraprecise processing, in order to reduce the thermal deformation that causes because of variations in temperature, be placed in the constant temperature chamber often leading semi-suction type magnetic suspension driver, by a plurality of temperature sensors constant temperature cavity temperature field is detected, take into full account non-linear, the time lag characteristic of temperature field, displacement field, employing as the temperature in the actuating mechanism controls constant temperature chamber, makes cold and hot driver the temperature in constant temperature chamber in the course of work keep constant based on the multi-modal intelligent control algorithm of prediction.Temperature sensor refers to thermal resistance, thermocouple, semiconductor thermometric device, quartz crystal thermometric device etc., cold and hot driver refers to quartz heating-pipe, semiconductor cooler etc., the power sensor that the power sensor refers to be made of metal strain plate, semiconductor pressure sensor, piezoelectric ceramics pressure sensor etc.
Claims (4)
1. one kind is used for the semi-suction type of often the leading magnetic suspension drive system that ultraprecise is processed, it is characterized in that it has constant temperature chamber (2), the constant temperature chamber is controlled by cold and hot driver (1), in the constant temperature chamber, be provided with rail and lead (13), rail is led (13) both sides and is provided with driving winding (5), the lower end is provided with suspension magnet steel (12), on guide rail, be provided with drive unit (3), be provided with and track driving corresponding guiding of winding and driving magnet steel (6) in drive unit two inboards, be provided with the corresponding permanent magnet of suspension magnet steel (7) with the guide rail lower end in the drive unit lower end, magnet exciting coil (8), pole core (9), also be provided with power sensor (11) in the drive unit both sides, the upper end is provided with temperature sensor (4), is provided with temperature sensor (10) in the guide rail lower end.
2. a kind of semi-suction type of often leading magnetic suspension drive system that is used for ultraprecise processing according to claim 1 is characterized in that said temperature sensor is thermal resistance temperature sensor, thermocouple temperature sensor, semiconductor temperature sensor, Quartz Temperature Sensor.
3. a kind of semi-suction type of often leading magnetic suspension drive system that is used for ultraprecise processing according to claim 1 is characterized in that said cold and hot driver is quartz heating-pipe, semiconductor cooler.
4. a kind of semi-suction type of often leading magnetic suspension drive system that is used for ultraprecise processing according to claim 1 is characterized in that said power sensor is metal strain formula power sensor, semiconductor power sensor, piezoelectric ceramics power sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021118337A CN1180919C (en) | 2002-05-21 | 2002-05-21 | Magnetic suspension drive system for superfine machining |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021118337A CN1180919C (en) | 2002-05-21 | 2002-05-21 | Magnetic suspension drive system for superfine machining |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1382561A true CN1382561A (en) | 2002-12-04 |
| CN1180919C CN1180919C (en) | 2004-12-22 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021118337A Expired - Fee Related CN1180919C (en) | 2002-05-21 | 2002-05-21 | Magnetic suspension drive system for superfine machining |
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| CN (1) | CN1180919C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1808866B (en) * | 2005-01-21 | 2010-05-26 | 北京前沿科学研究所 | Fully compensated permanent magnetic suspension structure |
| CN103427722A (en) * | 2012-05-14 | 2013-12-04 | 罗才德 | Magnetic levitation disc-shaped power generator |
| CN107966995A (en) * | 2017-12-01 | 2018-04-27 | 西安交通大学 | A kind of the angular adjustment platform and adjusting method of the driving of normal direction electromagnetic stress |
| CN108506342A (en) * | 2018-03-20 | 2018-09-07 | 北京石油化工学院 | A kind of double drive overhead traveling crane of active levitation |
| CN109199796A (en) * | 2018-10-29 | 2019-01-15 | 西安交通大学医学院第附属医院 | A kind of pneumatic electromagnetic levitation type recovery set for lower limbs |
| CN113328653A (en) * | 2021-05-31 | 2021-08-31 | 南京航空航天大学 | Novel anti-magnetic suspension voltage induction type micro-driver and control method thereof |
-
2002
- 2002-05-21 CN CNB021118337A patent/CN1180919C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1808866B (en) * | 2005-01-21 | 2010-05-26 | 北京前沿科学研究所 | Fully compensated permanent magnetic suspension structure |
| CN103427722A (en) * | 2012-05-14 | 2013-12-04 | 罗才德 | Magnetic levitation disc-shaped power generator |
| CN107966995A (en) * | 2017-12-01 | 2018-04-27 | 西安交通大学 | A kind of the angular adjustment platform and adjusting method of the driving of normal direction electromagnetic stress |
| CN108506342A (en) * | 2018-03-20 | 2018-09-07 | 北京石油化工学院 | A kind of double drive overhead traveling crane of active levitation |
| CN109199796A (en) * | 2018-10-29 | 2019-01-15 | 西安交通大学医学院第附属医院 | A kind of pneumatic electromagnetic levitation type recovery set for lower limbs |
| CN113328653A (en) * | 2021-05-31 | 2021-08-31 | 南京航空航天大学 | Novel anti-magnetic suspension voltage induction type micro-driver and control method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1180919C (en) | 2004-12-22 |
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