CN1372334A - Process for preparing Si base Bi4 Ti3 O12 ferroelectric film - Google Patents
Process for preparing Si base Bi4 Ti3 O12 ferroelectric film Download PDFInfo
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- CN1372334A CN1372334A CN01138333.XA CN01138333A CN1372334A CN 1372334 A CN1372334 A CN 1372334A CN 01138333 A CN01138333 A CN 01138333A CN 1372334 A CN1372334 A CN 1372334A
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- 238000004519 manufacturing process Methods 0.000 title 1
- YRKCREAYFQTBPV-UHFFFAOYSA-N acetylacetone Chemical compound CC(=O)CC(C)=O YRKCREAYFQTBPV-UHFFFAOYSA-N 0.000 claims abstract description 88
- 238000000137 annealing Methods 0.000 claims abstract description 61
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 28
- RXPAJWPEYBDXOG-UHFFFAOYSA-N hydron;methyl 4-methoxypyridine-2-carboxylate;chloride Chemical compound Cl.COC(=O)C1=CC(OC)=CC=N1 RXPAJWPEYBDXOG-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 21
- 229960000583 acetic acid Drugs 0.000 claims abstract description 18
- 239000012362 glacial acetic acid Substances 0.000 claims abstract description 18
- 230000008569 process Effects 0.000 claims abstract description 18
- 239000013078 crystal Substances 0.000 claims abstract description 16
- 239000010408 film Substances 0.000 claims description 51
- 239000010409 thin film Substances 0.000 claims description 50
- 238000002360 preparation method Methods 0.000 claims description 31
- 238000005516 engineering process Methods 0.000 claims description 23
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 claims description 21
- 238000006243 chemical reaction Methods 0.000 claims description 18
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 17
- 239000000203 mixture Substances 0.000 claims description 17
- 239000001301 oxygen Substances 0.000 claims description 17
- 229910052760 oxygen Inorganic materials 0.000 claims description 17
- 239000003292 glue Substances 0.000 claims description 9
- 230000008859 change Effects 0.000 claims description 7
- 239000002994 raw material Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 6
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 238000004140 cleaning Methods 0.000 claims description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 claims description 5
- 229910052739 hydrogen Inorganic materials 0.000 claims description 5
- 238000012545 processing Methods 0.000 claims description 5
- 239000002904 solvent Substances 0.000 claims description 5
- 238000004381 surface treatment Methods 0.000 claims description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 abstract description 3
- -1 butyl titanic acid Chemical compound 0.000 abstract 2
- 238000001035 drying Methods 0.000 abstract 1
- 238000003672 processing method Methods 0.000 abstract 1
- LLZRNZOLAXHGLL-UHFFFAOYSA-J titanic acid Chemical compound O[Ti](O)(O)O LLZRNZOLAXHGLL-UHFFFAOYSA-J 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 description 9
- 238000012360 testing method Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000010287 polarization Effects 0.000 description 6
- 239000002243 precursor Substances 0.000 description 6
- 229910002651 NO3 Inorganic materials 0.000 description 5
- 238000002441 X-ray diffraction Methods 0.000 description 5
- 238000011160 research Methods 0.000 description 5
- 238000004626 scanning electron microscopy Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000012876 topography Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002679 ablation Methods 0.000 description 1
- 125000000218 acetic acid group Chemical group C(C)(=O)* 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005621 ferroelectricity Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 230000005616 pyroelectricity Effects 0.000 description 1
- 238000011896 sensitive detection Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
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- Inorganic Compounds Of Heavy Metals (AREA)
Abstract
This invention provides a processing method of Bi1Ti3O12 silicon group ferroelectric water employing butyl titanic acid, glacial acetic acid, bismuth nitrate, and acetylacetone to make up Bi1Ti3O12 sol at the mole rate of 3.00:4.20-4.40 of bytyl titanic acid and bismuth nitrate, the volume percentages of glacial acetic acid, acetylacetone and butyl titanic acid and 10-80%:10-80%:10% separately, by selecting 100 crystal p-type monocrystalline silicon as the substrate, to put drops of sol on it and even it to a moisture wafer to be dried by a fire and annealing to form the desired thickenss of BIT ferroelectric chip by repeating the abore processions of evening gel drying treatment and annealing, which can be used in the process of accumulator with good comprehensive performance in the structure, ferroelectric and dielectric spheres.
Description
The invention belongs to electric function thin-film material field, relate to a kind of preparation technology of Si based ferroelectric film, particularly a kind of Si base Bi
4Ti
3O
12Colloidal sol-the gel of ferroelectric thin film (" Sol-Gel ") preparation method.
Background technology
Ferroelectric crystal belongs to a subtribe of dielectric crystal, piezoelectric crystal and pyroelectric crystal, so ferroelectric crystal must have dielectric, piezoelectricity and electrical property of heat releasing except that ferroelectricity, the ferroelectric of light transmission also has electrooptical property.Because special dielectric, electric light, acousto-optic, the light of ferroelectric sells off, nonlinear optics, pyroelectricity and piezoelectric property, is a kind of material that has commercial application prospect, therefore ferroelectric application has caused the attention of community of physicists and material supply section educational circles very early.Since the seventies, because to going deep into of ferroelectric understanding, the expansion of artificial ferroelectric material kind, the progress of microelectronics integrated technology, ferroelectric thin film is the preparation method constantly make progress, the operating voltage of ferroelectric thin film device can reach 3～5V, can with Si or GaAs integrated technique compatibility, thereby for producing at a high speed, the high-density nonvolatile ferroelectric memory, pyroelectric infrared detector, electro-optical modulation device, device for non-linear optical such as image intensifer have been opened up new approach, in microelectronics, optoelectronics, field such as integrated optics and microelectromechanical systems demonstrates very application prospects.Si base Bi
4Ti
3O
12(being abbreviated as " BIT ") ferroelectric thin film has good spontaneous polarization ferroelectric properties, is one of preferred material of novel memory device, sensitive detection parts preparation.At present, this technical field has become one of focus of new material research in the world.
The research situation of the silica-based BIT ferroelectric thin film of external sol-gel prepared has been reported in document [1]-[4]: Bi is pressed in the preparation of colloidal sol
4Ti
3O
12(BIT) nominal composition batching; Adopt repeatedly even glue, once Tui Huo scheme film forming; Annealing temperature is higher; Substrate material mostly is metallic film, monocrystalline silicon or ceramic substrate.{[1]W.Wu，K.Fumoto，Y.Oishi?et?al.Bismuth?titanaten?thin?films?onSi?with?buffer?layers?prepared?by?laser?ablation?and?their?electricalproperties.Jpn.J.Appl.Phys.1996，35(2B)：1560-1563.[2]H.S.Gu，W.H.Sun，S.M.Wang?et?al.Synthesis?and?microstructure?of?c-axisoriented?Bi4Ti3O12?thin?films?using?sol-gel?process?on?silicon.J.Mater.Scie.Lett.1996，15(1)：53-54.[3]N.Tohge，Y.Fukuda?and?T.Minami.Formation?and?properties?of?ferroelectric?Bi4Ti3O12?films?by?the?sol-gelprocess.Jpn.J.Appl.Phys.1992，31(12A)：4016-4017.[4]A.Kakimi，S.Okamura，S.Ando?et?al.Effect?of?O2?gas?pressure?in?heat?treatmenton?surface?morphology?and?electric?properties?of?ferroelectric?Bi4Ti3O12thin?films?with?c-axis?orientation.Jpn.J.Appl.Phys.1995，34(9B)：5193-5197.}
In addition, aspect the research of Si based ferroelectric film, some research groups of Motorola, Siemens company, Japan and Korea S and domestic Sichuan University, Fudan University, Tsing-Hua University, Shanghai Inst. of Silicate, Chinese Academy of Sciences etc. have obtained some impressive progresses in the world, but the quality of film is compared with the requirement of practicability with process consistency, also has big distance, to Si base Bi
4Ti
3O
12The research of aspects such as the I-V characteristic of ferroelectric thin film, fatigue properties, Sol-Gel preparation technology and silicon planner technology compatibility awaits deeply.
Summary of the invention
The object of the present invention is to provide a kind of Si base Bi that overcomes above-mentioned defective
4Ti
3O
12The preparation technology of ferroelectric thin film, this technology can satisfy the requirement of silicon planner technology, and the ferroelectric thin film of its preparation has good I-V characteristic, fatigue properties, has better comprehensive performance at aspects such as structure, ferroelectric and dielectrics.
For achieving the above object, Si base Bi
4Ti
3O
12The preparation technology of ferroelectric thin film comprises the following step of carrying out successively:
(1) selects for use resistivity＜10 Ω cm, (100) crystal orientation p type single crystalline Si substrate as substrate, and carry out surface treatment and cleaning according to the semiconductor planar technological requirement;
(2) adopt following raw material preparation Bi
4Ti
4O
12Colloidal sol:
Butyl titanate, glacial acetic acid, bismuth nitrate, acetylacetone,2,4-pentanedione, its proportioning is: (a) butyl titanate
(C
16H
36O
4Ti) with bismuth nitrate (Bi (NO3)
35H
2O) mol ratio is 3.00: 4.20-
4.40; (b) solvent glacial acetic acid CH
3COOH, acetylacetone,2,4-pentanedione CH
3COCH
2COCH
3And butyl titanate
(C
16H
36O
4Ti) percent by volume is respectively 10-80%: 10-80%: 10%.
(3) Bi for preparing
4Ti
3O
12Colloidal sol drips on the substrate, spares glue again, makes wet film;
(4) wet film of even good glue is dried processing, removes carbon, hydrogen composition in the wet film;
(5) will dry the film of handling and carry out annealing in process;
(6) repeat above-mentioned steps (3)-(5), determine number of repetition according to the thickness of required film, until acquisition
The film of desired thickness;
(7) to above-mentioned Si base Bi
4Ti
3O
12Ferroelectric thin film carries out annealing in process, forms Si base BIT ferroelectric thin film.
The best proportioning of described raw material is: (a) butyl titanate (C
16H
36O
4Ti) and bismuth nitrate
(Bi (NO
3)
35H
2O) mol ratio is: 3.00: 4.24; (b) solvent glacial acetic acid CH
3COOH, acetyl
Acetone CH
3COCH
2COCH
3Be respectively 10%: 80%: 10% with the percent by volume of butyl titanate.
Described step 2 comprises following each step successively:
(2.1) load weighted bismuth nitrate is put into container;
(2.2) add glacial acetic acid;
(2.3) use magnetic stirrer, make it reaction evenly fully, till bismuth nitrate dissolves fully;
(2.4) with measured butyl titanate (C
16H
36O
4Ti) put into another container;
(2.5) add an amount of acetylacetone,2,4-pentanedione, make its sufficient reacting, no longer change up to solution colour;
(2.6) use magnetic stirrer, make it reaction evenly fully;
(2.7) solution in above-mentioned two containers is mixed and adds remaining acetylacetone,2,4-pentanedione;
(2.8) use magnetic stirrer, make it reaction evenly fully, fully mix up to solution and be transparent dark
Red shape;
(2.9) filter;
Described annealing in process condition is: annealing temperature is 650～750 ℃, during annealing oxygen flow be the 1.5-3.5 liter/minute, the annealing time of step 5 is 4-6 minute, the annealing time of step 7 is 20-40 minute.
The ferroelectric thin film of the inventive method preparation can be used for memory to be made, and the inventor directly adopts sol-gel prepared Bi on the monocrystalline silicon substrate of (100) crystal orientation
4Ti
3O
12Ferroelectric thin film.This ferroelectric thin film has better comprehensive performance at aspects such as structure, ferroelectric and dielectrics.To aspect several, make a concrete analysis of in the embodiment part technique effect of the present invention.
In order to improve film performance, the present invention has adopted the process program different with documents: 1) consider Bi
2O
3Be easy to volatilization at high temperature, at Bi
4Ti
3O
12(BIT) on the basis of nominal composition batching, adopt the excessive composition prescription of Bi, to remedy the volatilization loss of Bi.2) process program that adopts repeatedly even glue, layering to anneal improves degree of crystallinity, reduces the film internal stress.3) improve film forming annealing process condition, with the further quality of forming film that improves.
Description of drawings
Fig. 1 is Si base Bi
4Ti
3O
12Ferroelectric thin film Sol-Gel preparation technology schematic flow sheet;
Fig. 2 is the sample in cross section figure for test usefulness of the present invention's preparation;
Fig. 3 is the XRD figure spectrum of the BIT ferroelectric thin film for preparing on the Si substrate;
Fig. 4 is the SEM photo of Si base BIT ferroelectric thin film surface topography;
Fig. 5 is the SEM photo of Si base BIT ferroelectric thin film section;
Fig. 6 is the AFM photo of BIT ferroelectric thin film under the different annealing temperature;
(a)550℃；(b)650℃；(c)750℃；(d)800℃
Fig. 7 is the electric hysteresis loop of Si base BIT ferroelectric thin film;
Fig. 8 is the I-V characteristic curve under the Si base Ag/BIT/Pt structure capacitive DC electric field;
Fig. 9 is the curve of fatigue of Si base BIT ferroelectric thin film.
Embodiment
Consider Bi
2O
3Be easy to volatilization at high temperature, therefore at Bi
4Ti
3O
12(BIT) on the basis of nominal composition batching, adopt the composition prescription of the excessive 5-10% of Bi, to remedy the volatilization loss of Bi.The BIT sol formulation is:
1. butyl titanate (C
16H
36O
4Ti) with bismuth nitrate (Bi (NO3)
35H
2O) mol ratio is
3.00∶4.20-4.40
2. solvent glacial acetic acid CH
3COOH, acetylacetone,2,4-pentanedione CH
3COCH
2COH
3And butyl titanate (C
16H
36O
4Ti)
Percent by volume be respectively 10-80%, 10-80% and 10%.Embodiment 1:(1) selects for use resistivity 3 Ω cm, (100) crystal orientation p type single crystalline Si substrate as substrate, and carry out surface treatment and cleaning according to the semiconductor planar technological requirement; (2) adopt following raw material (its purity is and analyzes pure 99.9%) preparation Bi
4Ti
3O
12Colloidal sol:
Butyl titanate (C
16H
36O
4Ti) 5.11ml
Glacial acetic acid (CH
3COOH) 6.00ml
Bismuth nitrate (Bi (NO3)
35H
2O) 10.67g
Acetylacetone,2,4-pentanedione (C
16H
36O
4Ti) 38.00ml
Concrete grammar is:
(2.1) load weighted bismuth nitrate is put into beaker;
(2.2) add glacial acetic acid;
(2.3) use magnetic stirrer, make it reaction evenly fully, till bismuth nitrate dissolves fully;
(2.4) with butyl titanate (C
16H
36O
4Ti) put into another beaker;
(2.5) add an amount of acetylacetone,2,4-pentanedione, make its sufficient reacting, no longer change up to solution colour;
(2.6) use magnetic stirrer, make it reaction evenly fully;
(2.7) solution in above-mentioned two beakers is mixed and adds remaining acetylacetone,2,4-pentanedione (twice common 38ml);
(2.8) use magnetic stirrer, make it reaction evenly fully, fully mix up to solution and be transparent kermesinus shape;
(2.9) filter, obtain Bi
4Ti
3O
12Precursor solution; (3) with the Bi for preparing
4Ti
3O
12Precursor solution drips 1-2 with dropper and drips on the substrate, starts sol evenning machine and spares glue, forms wet film; (4) will spare good wet film and on 200 ℃ constant temperature heat dish, dry processing, remove C, H composition in the wet film; (5) will dry the film of handling puts into quartz tube furnace and carries out taking out after the annealing in process.Annealing is carried out under oxygen atmosphere, and annealing temperature is 650 ℃, and oxygen during annealing (analyzing pure 99.9%) flow is 2 liters/minute, and the annealing time of step 5 is 5 minutes; (6) repeat above-mentioned steps 3-5 five times, can obtain the BIT ferroelectric thin film that thickness is about 640nm.(7) anneal in oxygen atmosphere at last, annealing temperature is 650 ℃, and oxygen during annealing (analyzing pure 99.9%) flow is 2 liters/minute, and annealing time is 40 minutes, forms required BIT ferroelectric thin film.
For sample is carried out electric performance test, need prepare top electrode (being the Ag electrode) at prepared ferroelectric thin film sample surfaces.The preparation of electrode adopts magnetically controlled DC sputtering technology to carry out.Cover above the ferroelectric thin film with homemade stainless steel substrates mask during preparation, have the aperture that a lot of diameters are 0.4mm on the mask, utilize magnetron sputtering to obtain required electrode at film surface.The about 70W of sputtering power, base vacuum are 3 * 10
-3Pa, sputter is one minute under the Ar atmosphere 20Pa pressure, the about 50nm of thickness of electrode.Full electrode (being the Pt electrode) at the bottom of the Si substrate back is by the same prepared of top electrode then.Above-mentioned preparation technology as shown in Figure 1, the sectional view of the specimen of its preparation as shown in Figure 2,1 is the Si substrate among the figure, 2 is the BIT film, 3 use the Ag electrode for test, 4 use the Pt electrode for testing.Each material purity of embodiment 2:(all requires to analyzing pure more than 99.9%) 1) select for use resistivity 5 Ω cm, (100) crystal orientation p type single crystalline Si substrate as substrate, and carry out surface treatment and cleaning according to the semiconductor planar technological requirement; (3) adopt following raw material (its purity is and analyzes pure 99.9%) preparation Bi
4Ti
3O
12Colloidal sol:
Butyl titanate (C
16H
36O
4Ti) 5.11ml
Glacial acetic acid (CH
3COOH) 15.00ml
Bismuth nitrate (Bi (NO3)
35H
2O) 10.40g
Acetylacetone,2,4-pentanedione (C
16H
36O
4Ti) 32.00ml
Concrete grammar is:
(2.1) load weighted bismuth nitrate is put into beaker;
(2.2) add glacial acetic acid;
(2.3) use magnetic stirrer, make it reaction evenly fully, till bismuth nitrate dissolves fully;
(2.4) with butyl titanate (C
16H
36O
4Ti) put into another beaker;
(2.5) add an amount of acetylacetone,2,4-pentanedione, make its sufficient reacting, no longer change up to solution colour;
(2.6) use magnetic stirrer, make it reaction evenly fully;
(2.7) solution in above-mentioned two beakers is mixed and adds remaining acetylacetone,2,4-pentanedione (twice common 38ml);
(2.8) use magnetic stirrer, make it reaction evenly fully, fully mix up to solution and be transparent kermesinus shape;
(2.9) filter, obtain Bi
4Ti
3O
12Precursor solution; (3) with the Bi for preparing
4Ti
3O
12Precursor solution drips 1-2 with dropper and drips on the substrate, starts sol evenning machine and spares glue, forms wet film; (5) will spare good wet film and on 200 ℃ constant temperature heat dish, dry processing, remove C, H composition in the wet film; (5) will dry the film of handling puts into quartz tube furnace and carries out taking out after the annealing in process.Annealing is carried out under oxygen atmosphere, and annealing temperature is 700 ℃, and oxygen during annealing (analyzing pure 99.9%) flow is 2 liters/minute, and the annealing time of step 5 is 5 minutes; (6) repeat above-mentioned steps 3-5 eight times, can obtain the BIT ferroelectric thin film that thickness is about 850nm.(7) anneal in oxygen atmosphere at last, annealing temperature is 700 ℃, and oxygen during annealing (analyzing pure 99.9%) flow is 2 liters/minute, and annealing time is 30 minutes, forms required BIT ferroelectric thin film.Each material purity of embodiment 3:(all requires to analyzing pure more than 99.9%) 1) select for use resistivity 10 Ω cm, (100) crystal orientation p type single crystalline Si substrate as substrate, and carry out surface treatment and cleaning according to the semiconductor planar technological requirement; (4) adopt following raw material (its purity is and analyzes pure 99.9%) preparation Bi
4Ti
3O
12Colloidal sol:
Butyl titanate (C
16H
36O
4Ti) 5.11ml
Glacial acetic acid (CH
3COOH) 30.00ml
Bismuth nitrate (Bi (NO3)
35H
2O) 10.50g
Acetylacetone,2,4-pentanedione (C
16H
36O
4Ti) 12.00ml
Concrete grammar is:
(2.1) load weighted bismuth nitrate is put into beaker;
(2.2) add glacial acetic acid;
(2.3) use magnetic stirrer, make it reaction evenly fully, till bismuth nitrate dissolves fully;
(2.4) with butyl titanate (C
16H
36O
4Ti) put into another beaker;
(2.5) add an amount of acetylacetone,2,4-pentanedione, make its sufficient reacting, no longer change up to solution colour;
(2.6) use magnetic stirrer, make it reaction evenly fully;
(2.7) solution in above-mentioned two beakers is mixed and adds remaining acetylacetone,2,4-pentanedione (twice common 12ml);
(2.8) use magnetic stirrer, make it reaction evenly fully, fully mix up to solution and be transparent kermesinus shape;
(2.9) filter, obtain Bi
4Ti
3O
12Precursor solution; (3) with the Bi for preparing
4Ti
3O
12Precursor solution drips 1-2 with dropper and drips on the substrate, starts sol evenning machine and spares glue, forms wet film; (6) will spare good wet film and on 200 ℃ constant temperature heat dish, dry processing, remove C, H composition in the wet film; (5) will dry the film of handling puts into quartz tube furnace and carries out taking out after the annealing in process.Annealing is carried out under oxygen atmosphere, and annealing temperature is 750 ℃, and oxygen during annealing (analyzing pure 99.9%) flow is 2 liters/minute, and the annealing time of step 5 is 5 minutes; (6) repeat above-mentioned steps 3-5 twice, can obtain the BIT ferroelectric thin film that thickness is about 210nm.(7) anneal in oxygen atmosphere at last, annealing temperature is 750 ℃, and oxygen during annealing (analyzing pure 99.9%) flow is 2 liters/minute, and annealing time is 25 minutes, forms required BIT ferroelectric thin film.
In above-mentioned example example, step 2 is carried out after can moving to step 1.
Fig. 3-9 has further shown technique effect of the present invention from several aspects, makes a concrete analysis of as follows: 1.Bi
4Ti
3O
12The X-ray diffraction of ferroelectric thin film (XRD) atlas analysis
With X-ray diffraction to Si of the present invention base Bi
4Ti
3O
12The phase structure of ferroelectric thin film sample is analyzed.Figure 3 shows that the XRD figure spectrum of a typical BIT film sample.As seen from the figure, substrate is to Bi
4Ti
3O
12The growth orientation of ferroelectric thin film there is no tangible influence, and the two all presents the polycrystalline natural orientation, and each main diffraction maximum all occurs, shows that the film crystallization is good.2.Si basic Bi
4Ti
3O
12The surface topography of ferroelectric thin film
The inventor mainly adopts scanning electron microscopy (SEM) and atomic force microscope (AFM) that the surface topography of prepared BIT ferroelectric thin film sample is observed.(1) scanning electron microscopy (SEM) of Si base BIT ferroelectric thin film is observed
Analyzed the BIT film sample with sem observation.Fig. 4 is the SEM surface topography of a typical sample of BIT film.Can see that it is irregular spherical that BIT crystal grain is, crystal grain is clear and legible, and crystal grain diameter is about 110nm, illustrates that the BIT thin film crystallization is all right.Section to Si substrate BIT film sample has carried out sem observation, as shown in Figure 5.Among the figure between BIT film and the Si substrate clear smooth interface show and do not form mutual reactance and diffusion layer between film and the substrate.(2) atomic force microscope (AFM) of .Si base BIT ferroelectric thin film is observed
Fig. 6 (a)-(d) has provided the atomic force microscope observation picture of thin film crystallization situation under 550 ℃, 650 ℃, 750 ℃ and 800 ℃ of each annealing temperatures.As seen, grain size increases with the rising of annealing temperature, the about respectively 60nm of the average-size of crystal grain, and 90nm, 110nm and 120nm, the roughness of sample surfaces also increases its 4 μ m with the rising of annealing temperature simultaneously
2Mean roughness in the zone is respectively 83 , 97 , 108 and 124 .3.Si the electric hysteresis loop of basic BIT ferroelectric thin film
Adopt the special-purpose ferroelectric tester RT66A of import that the electric hysteresis loop of Si base BIT film is tested, as shown in Figure 7.To sample given among the figure, its film thickness is 400nm, and the about 2.9V of coercive voltage can calculate the about 71kV/cm of its coercive electric field, the about 8 μ C/cm of residual polarization
2Because the dividing potential drop effect of space charge layer among the Si, actually drop to voltage on the ferroelectric thin film well below applied voltage.This is the best result of the MFS (Metal-ferroelectric-semiconductor) of BIT ferroelectric thin film employing up to now structured testing.4.Si basic Bi
4Ti
3O
12The I-V characteristic of ferroelectric thin film
To being deposited on Pt/Ti/SiO
2The leakage current of the BIT ferroelectric thin film the on/p-Si substrate is tested.Sample thin film surface adopt the magnetically controlled sputter method deposit diameter be the Ag top electrode of 0.4mm, promptly specimen is the Ag/BIT/Pt capacitance structure, is that the Ag electrode is a positive voltage when connecing positive source with top electrode in the test.Test result as shown in Figure 8.As seen from the figure, the leakage conductance model difference of film under different field intensity, and the I-V curve is obviously different under forward and the negative sense electric field action, forward leakage current is significantly less than the negative sense leakage current, differs three more than the order of magnitude as leakage current density under the ± 5V voltage.5.Si basic Bi
4Ti
3O
12The fatigue properties of ferroelectric thin film
With RT66A the fatigue properties of silica-based BIT film are tested.Sample is the Ag/BIT/Pt structure capacitive, and the test signal pulses width is 8.6 * 10
-6Second, frequency is 10
5Hz, signal voltage are 5V.Sample is through 10
9The situation of change of test polarization intensity after the inferior polarization reversal, as shown in Figure 9.As seen from the figure, film is through 10
7After the inferior polarization reversal, fatigue substantially appears, even experienced 10
9After the inferior counter-rotating, the slippage of residual polarization only is about 12%.
Claims (9)
1. Si base Bi
4Ti
3O
12The preparation technology of ferroelectric thin film is characterized in that: this technology comprises the following step of carrying out successively:
(1) selects for use resistivity＜10 Ω cm, (100) crystal orientation p type single crystalline Si substrate as substrate, and press
Carry out surface treatment and cleaning according to the semiconductor planar technological requirement;
(2) adopt following raw material preparation Bi
4Ti
3O
12Colloidal sol:
Butyl titanate, glacial acetic acid, bismuth nitrate, acetylacetone,2,4-pentanedione, its proportioning is: (a) butyl titanate
(C
16H
36O
4Ti) with bismuth nitrate (Bi (NO
3)
35H
2O) mol ratio is 3.00: 4.20-
4.40; (b) solvent glacial acetic acid CH
3COOH, acetylacetone,2,4-pentanedione CH
3COCH
2COCH
3And butyl titanate
(C
16H
36O
4Ti) percent by volume is respectively 10-80%: 10-80%: 10%.
(3) Bi for preparing
4Ti
3O
12Colloidal sol drips on the substrate, spares glue again, makes wet film;
(4) wet film of even good glue is dried processing, removes carbon, hydrogen composition in the wet film;
(5) will dry the film of handling and carry out annealing in process;
(6) repeat above-mentioned steps (3)-(5), determine number of repetition according to the thickness of required film, until acquisition
The film of desired thickness;
(7) to above-mentioned Si base Bi
4Ti
3O
12Ferroelectric thin film carries out annealing in process, forms Si base BIT ferroelectric thin film.
2. preparation technology according to claim 1 is characterized in that: described step 1 and the exchange of step 2 order.
3. preparation technology according to claim 1 and 2 is characterized in that: described proportion of raw materials is: (a) butyl titanate (C
16H
36O
4Ti) with bismuth nitrate (Bi (NO
3)
35H
2O) mol ratio is: 3.00: 4.24; (b) solvent glacial acetic acid CH
3COOH, acetylacetone,2,4-pentanedione CH
3COH
2COH
3Be respectively 10%: 80%: 10% with the percent by volume of butyl titanate.
4. preparation technology according to claim 1 and 2 is characterized in that: described step 2 comprises following each step successively:
(2.1) load weighted bismuth nitrate is put into container;
(2.2) add glacial acetic acid;
(2.3) use magnetic stirrer, make it reaction evenly fully, till bismuth nitrate dissolves fully;
(2.4) with measured butyl titanate (C
16H
36O
4Ti) put into another container;
(2.5) add an amount of acetylacetone,2,4-pentanedione, make its sufficient reacting, no longer change up to solution colour;
(2.6) use magnetic stirrer, make it reaction evenly fully;
(2.7) solution in above-mentioned two containers is mixed and adds remaining acetylacetone,2,4-pentanedione;
(2.8) use magnetic stirrer, make it reaction evenly fully, fully mix up to solution and be transparent dark
Red shape;
(2.9) filter;
5. preparation technology according to claim 3 is characterized in that: described step 2 comprises following each step successively:
(2.1) load weighted bismuth nitrate is put into container;
(2.2) add glacial acetic acid;
(2.3) use magnetic stirrer, make it reaction evenly fully, till bismuth nitrate dissolves fully;
(2.4) with measured butyl titanate (C
16H
36O
4Ti) put into another container;
(2.5) add an amount of acetylacetone,2,4-pentanedione, make its sufficient reacting, no longer change up to solution colour;
(2.6) use magnetic stirrer, make it reaction evenly fully;
(2.7) solution in above-mentioned two containers is mixed and adds remaining acetylacetone,2,4-pentanedione;
(2.8) use magnetic stirrer, make it reaction evenly fully, fully mix up to solution and be transparent dark
Red shape;
(2.9) filter;
6. preparation technology according to claim 1 and 2, it is characterized in that: described annealing in process condition is: annealing temperature is 650～750 ℃, during annealing oxygen flow be the 1.5-3.5 liter/minute, the annealing time of step 5 is 4-6 minute, the annealing time of step 7 is 20-40 minute.
7. preparation technology according to claim 3, it is characterized in that: described annealing in process condition is: annealing temperature is 650～750 ℃, during annealing oxygen flow be the 1.5-3.5 liter/minute, the annealing time of step 5 is 4-6 minute, the annealing time of step 7 is 20-40 minute.
8. preparation technology according to claim 4, it is characterized in that: described annealing in process condition is: annealing temperature is 650～750 ℃, during annealing oxygen flow be the 1.5-3.5 liter/minute, the annealing time of step 5 is 4-6 minute, the annealing time of step 7 is 20-40 minute.
9. preparation technology according to claim 5, it is characterized in that: described annealing in process condition is: annealing temperature is 650～750 ℃, during annealing oxygen flow be the 1.5-3.5 liter/minute, the annealing time of step 5 is 4-6 minute, the annealing time of step 7 is 20-40 minute.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100466320C (en) * | 2007-02-12 | 2009-03-04 | 清华大学 | Nd-doped Bi4Ti3O12 ferroelectric thin film for the ferroelectric memory and its low temperature preparation method |
| CN1967749B (en) * | 2005-11-18 | 2010-05-12 | 同济大学 | A low temperature preparing method of non lead ferroelectric film |
| CN107814567A (en) * | 2017-11-03 | 2018-03-20 | 天津师范大学 | A kind of pseudo- ferroelectric ceramics with relatively low coercive field and preparation method thereof |
| CN114774891A (en) * | 2022-04-21 | 2022-07-22 | 南京卡巴卡电子科技有限公司 | Sb2O3Thin film material and preparation of Sb based on sol-gel method2O3Method and application of thin film material |
-
2001
- 2001-12-20 CN CNB01138333XA patent/CN1160806C/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1967749B (en) * | 2005-11-18 | 2010-05-12 | 同济大学 | A low temperature preparing method of non lead ferroelectric film |
| CN100466320C (en) * | 2007-02-12 | 2009-03-04 | 清华大学 | Nd-doped Bi4Ti3O12 ferroelectric thin film for the ferroelectric memory and its low temperature preparation method |
| CN107814567A (en) * | 2017-11-03 | 2018-03-20 | 天津师范大学 | A kind of pseudo- ferroelectric ceramics with relatively low coercive field and preparation method thereof |
| CN114774891A (en) * | 2022-04-21 | 2022-07-22 | 南京卡巴卡电子科技有限公司 | Sb2O3Thin film material and preparation of Sb based on sol-gel method2O3Method and application of thin film material |
| CN114774891B (en) * | 2022-04-21 | 2024-01-16 | 南京卡巴卡电子科技有限公司 | Sb 2 O 3 Thin film material and Sb prepared based on sol-gel method 2 O 3 Method and use of film materials |
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| Publication number | Publication date |
|---|---|
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