CN1371001A - Grating fabricating equipment and process - Google Patents
Grating fabricating equipment and process Download PDFInfo
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- CN1371001A CN1371001A CN 02104455 CN02104455A CN1371001A CN 1371001 A CN1371001 A CN 1371001A CN 02104455 CN02104455 CN 02104455 CN 02104455 A CN02104455 A CN 02104455A CN 1371001 A CN1371001 A CN 1371001A
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Abstract
The present invention relates to the equipment and process for fabricating low-cost precise grating, especially of diffraction grating and various waveguide grating including fiber Bragg grating, and can generate continuous grating structure and write required fringes directly to fiber or planar waveguide to form Bragg grating, and may be used in fabricating various gratings. Technologically, the present invention includes separate frequency shift of two laser beams with equal or near strength, convergence of the laser beams to generate interference fringes, and graving photosensitive medium with the interference fringes while shifting the interference fringers. The present invention can solve the problems of chirp, toe cutting, phase shift and long grating write in grating fabrication.
Description
Technical field
The present invention relates to the manufacture method and the device thereof of grating, particularly the manufacture method and the device thereof of diffraction grating and the various waveguide optical gratings that comprise Fiber Bragg Grating FBG (being called for short FBG).
Background technology
Grating is a kind of optical element commonly used.Traditional raster is made up of the determining deviation optical grating construction that has of many repetitions.The optical grating construction of these repetitions is to the amplitude of incident light, phase place (or both) produce modulation, and make incident light produce diffraction through behind the grating, form diffraction lights at different levels.The tradition diffraction grating is the Primary Component that constitutes various spectroanalysis instruments.Diffraction grating the earliest is to make with the method for mechanical scratching, and present grating adopts holographic interference exposure and chemical etching method and electron beam delineation method to make mostly.
Optical grating construction is write in the optical fiber (or planar optical waveguide), can form Fiber Bragg Grating FBG.The Fiber Bragg Grating FBG device is to it is found that behind the light sensitive characteristic of optical fiber and the full optical fibre device that develops rapidly.The appearance of FBG has brought a revolution to optical fiber communication and optical fiber sensing technology.FBG structurally sees very simple, promptly forms to have the index modulation of some cycles in fiber cores.When the light wavelength of transmitting in the optical fiber satisfied Bragg condition, because the interference of light effect, the light of this wavelength was reflected by FBG, and its reflectivity can be near 100%.Can be made into broadband device when needing.Because FBG is full optical fibre device, compare with the optical fibre device of other types, it is low that FBG has the loss of insertion, need not distinguishing features such as light path adjustment.The These characteristics of FBG all is extremely important to optical fiber communication and Fibre Optical Sensor.In optical fiber telecommunications system, the Fiber Bragg Grating FBG device is often used as optical filter in wavelength-division multiplex (WDM) technology, Erbium-Doped Fiber Amplifier (EDFA) (EDFA) gainequalizer and chromatic dispersion compensator etc.
The manufacture process of FBG is exactly to produce interference fringe with Ultra-Violet Laser by certain mode to produce periodic index modulation in having the fiber cores of photosensitivity.Above-mentioned interference fringe can be produced by the two-beam interference light path, and the length of formed interference fringe field is determined by the laser beam width.In order to produce the interference fringe field of certain-length, usually with laser beam along extending transversely.The laser wave front that expands after restrainting is sphere or approximate sphere, therefore can form certain striped gradient, and this gradient is fixed the interference fringe field, the size of uncontrollable local striped gradient.In the commercial production, generally use mask technique at present, promptly use prefabricated phase grating (being commonly called as template) to produce interference fringe, the optical fiber that will have light sensitive characteristic places and makes Fiber Bragg Grating FBG after the template.Compare with double beam interferometer, template has good stability, the coherence of ultraviolet laser is required low, uses significant advantages such as simple.But high-quality template construct difficulty is so cost an arm and a leg.In addition, a kind of template can only produce the striped of a kind of fixed cycle, so usually need to prepare multiple different template.
When making FBG,, all to consider how to introduce required toe (or claiming the to become mark) function of cutting no matter be to adopt double beam interferometry or mask technique.For example, be used for the FBG of WDM filtering, need control the amplitude of index modulation, it is increased by specific rule to the center by the grating two ends, and keep mean refractive index constant at the same time for suppressing the limit mould.And for example, when FBG is used as the EDFA gainequalizer, need reach so that its transmitted spectrum compensates the EDFA change in gain purpose of gain balance according to design of EDFA gain trace and making FBG.
Through years of researches and practice, people have proposed multiple apodization.Be published in ELECTRONICS LETTERSVol.31, in the paper of No.17 (1995), people such as Cole propose to introduce small shake along the optical fiber direction between template and optical fiber to be written, thereby the apodization that the interference fringe in the optical fiber " is blured ", this method has been awarded United States Patent (USP) (patent No. US Pat No.6072926).U.S. Patent No. 6130973 discloses a kind of by changing the apodization of Ultra-Violet Laser to the template incident angle.These methods all will be used template, make high-quality and Fiber Bragg Grating FBG that have good reproducibility, need the control of high-precision displacement or angle, the practical application difficulty.And the grating length that can write out is subjected to the restriction of template length.And long grating is for many application, all is vital as the chromatic dispersion compensation of two-forty (more than the 10Gbit/s) optical fiber telecommunications system.
Summary of the invention
For overcoming the prior art deficiency, a kind of high precision, the manufacture method and the device thereof of grating cheaply are provided, this method and device thereof can produce the continuity optical grating construction, can be directly used in desired striped is write optical fiber or slab guide, to form Bragg grating, it also can be used for various gratings and comprise the phase grating (template) that is used for the FBG manufacturing.The technical solution used in the present invention is: a kind of manufacturing installation of grating comprises; LASER Light Source, catoptron, semi-transparent semi-reflecting lens, lens, it is characterized in that, the laser beam that LASER Light Source produces is divided into the equal by force or approaching laser beam that equates of two-beam by semi-transparent semi-reflecting lens, described two-beam equates by force or can be changed the parallel of mutual spacing by additional device near the laser beam that equates to move, then, converge the generation interference fringe through optic frequency shift device, lens respectively, comprise speed pickup in addition and make by the portrayal light-sensitive medium with speed: V=d (f
S2-f
S1), the device that the direction of the laser beam that frequency shift amount is little behind described two bundle laser frequencies moves, wherein:
V: expression speed; D: expression interference fringe spacing; f
S1And f
S2: be the frequency of optic frequency shift device;
Described translational speed and direction that speed pickup will record feed back to the optic frequency shift device, and the optic frequency shift device changes frequency makes described interference fringe equate with translational speed, the direction of light-sensitive medium.The laser beam that described LASER Light Source produces is continuous Ultra-Violet Laser or continuous visible laser.Described optic frequency shift device is electric light frequency modulator or acousto-optic frequency modulator.The acousto-optic crsytal of described acousto-optic frequency modulator, to visible light wave range, typical material is the lead molybdate crystal; Can adopt molten English to the ultraviolet light wave band.Described frequency modulator is driven by drive source, can introduce phase shift between the drive signal that drive source produces.It can be laser interferometer or Laser Doppler Velocimeter that described speed pickup can adopt;
A kind of manufacture method of grating comprises the following steps:
Light intensity is equated or carry out frequency shifts respectively, and make two bundle laser have certain difference on the frequency, thereby the interference fringe that two bundle laser converge generation moves with certain speed and direction near the two bundle laser that equate;
Described interference fringe is converged in light-sensitive medium, its surface or inside to light-sensitive medium is portrayed;
In portrayal, light-sensitive medium is moved with speed and the direction identical with described interference fringe;
Wherein, described laser can be selected continuous Ultra-Violet Laser or continuous visible laser for use;
Then, can adopt the following step respectively:
Change the spacing of described interference fringe, to make the arrowband grating of different wave length;
In the grating ablation process, continuously change described two laser beam spacings, to make the broadband grating;
Change the intensity and the contrast of described interference fringe, to realize difform apodizing function;
Make interference fringe produce phase shifts, have the diffraction grating and the Bragg grating of phase shift with making.
Compare with existent method, the present invention has the following advantages:
1 fringe spacing is continuously adjustable and can accurately control, and can keep the invariant position of striate region when regulating fringe spacing.
2 can make the diffraction grating of random length or Fiber Bragg Grating FBG (length only loaded the mobile platform of photosensitive material maximum magnitude limit).
The local striped gradient (warbling) of 3 may command, thereby can make and have linearity, the grating of non-linear chirp.
4 can introduce any fringe phase moves.
5 can regulate fringe intensity and contrast continuously, can realize the apodizing function of arbitrary shape.
6 light paths are that aplanatism is arranged, and are insensitive to environmental change.
7 reduce manufacturing cost.
In a word, the invention provides comprehensively to solve in a kind of grating (comprising traditional diffraction grating and Fiber Bragg Grating FBG and other waveguide optical gratings) making and warble, cut toe, the scheme that phase shifts and long grating write.
Description of drawings
Fig. 1 is the device that continues optical grating construction according to the generation that the method for the invention constitutes.
Fig. 2 is the interference fringe field that is produced by two bundle coherent lights.
Fig. 3 is the acousto-optic frequency modulator that is used for embodiments of the invention optic frequency shift device.
Fig. 4 is the relation curve of acousto-optic frequency modulator 1 order diffraction light diffraction efficiency and driving power.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated.
In the accompanying drawing 1, continuous laser beam 101 is divided into light beam 106 and 107 through behind the semi-transparent semi-reflecting lens 102.The light intensity of light beam 106 and light beam 107 equates or approaching equating.Light beam 106 and light beam 107 by completely reflecting mirror 105 and 103 reflections, obtain parallel beam 109 and light beam 110 respectively.Catoptron 102,103,104,105 can be replaced and finished the branch beam function by prism or other forms of optical element.Light beam 109 and light beam 110 pass through optic frequency shift device 111 and 112 respectively.In the embodiments of the invention that here provide, optic frequency shift device 111 and 112 is the acousto-optic frequency modulator, and they also can be electric light or other forms of optical frequency modulator.
Accompanying drawing 3 has provided the acousto-optic frequency modulator that is used for embodiments of the invention, and wherein 305 is acousto-optic crsytal, and to visible light wave range, typical material is the lead molybdate crystal; Can adopt molten English to the ultraviolet light wave band.Under drive signal 307 excitations, transducer 306 produces ultrasound wave 308 in acousto-optic crsytal 305.Incident light 301 interacts with ultrasound wave 308, produces 1 order diffraction light 303 with optic frequency shift, and its frequency shift amount equals driving signal frequency, and light beam 304 is 0 grade of light (produces the inferior diffraction light of other grades sometimes, do not mark among the figure).
In the accompanying drawing 1, optic frequency shift device 111 is driven by the signal that drive source 118 produces, a certain fixed frequency f of modulating frequency for being provided with
S1Optic frequency shift device 112 drives its modulating frequency f by the signal that drive source 119 produces
S2By speed pickup 120 FEEDBACK CONTROL.Light beam 113 and 114 through frequency displacement is a directional light, and beam separation is D.This parallel beam is by positive lens 115, and converging beam 116 and 117 intersects at light-sensitive medium 121.Light-sensitive medium can be the optical fiber with photosensitivity, slab guide, and waveguide or surface scribble the substrate of photosensitive material.Because the coherence of laser, light beam 116 and 117 forms one group of interference fringe on light-sensitive medium surface or inside, as shown in Figure 2.The spacing d of interference fringe depends on the space D of light beam 113 and 114 and the focal length F of lens 115, and its expression formula is:
λ is an optical maser wavelength in the formula.
Lasing beam diameter is W on the positive lens 115 if incide, and the width B in interference fringe district is:
The fringe number N that wherein comprises is:
Because light beam 116 and 117 has difference on the frequency, the interference fringe that forms moves with certain speed.The striped moving direction depends on the size of optic frequency shift device 111 and 112 introducing frequency shift amounts.If the frequency shift amount f of frequency shifter 112
S2Frequency shift amount f greater than optic frequency shift device 111
S1, striped will move up along 124 directions of arrow among Fig. 1, otherwise then move down.The striped translational speed is by difference on the frequency between light beam 116 and 117 and the decision of interference fringe spacing, promptly
V＝d(f
s2-f
s1)
Light-sensitive medium 121 can be loaded on mobile platform or other devices, and its translational speed is detected by speed pickup 120.Speed pickup 120 can be a laser interferometer, Laser Doppler Velocimeter or other velocity measuring devices.The frequency of the output signal feedback-controlled optics frequency shifter 112 of speed pickup 120 makes the moving direction of the interference fringe that is produced and moving direction and the speed that speed equals light-sensitive medium 121.Therefore, can be at light-sensitive medium 121 surfaces or the inner optical grating construction that produces continuity.
When light beam 101 is continuous Ultra-Violet Laser, be the laser of 244nm through the wavelength that frequency multiplication produces for example by Argon ion laser, the method according to this invention and as shown in Figure 1 or similar device can write optical fiber or slab guide with various optical grating constructions and make Bragg grating.When light beam 101 is continuous visible laser, light-sensitive medium 121 is that the surface is when scribbling the substrate of photosensitive material, according to method provided by the present invention and as shown in Figure 1 or similar device, can form various continuity optical grating constructions at substrate surface, after other processing, and make various amplitudes or phase grating.
Change the spacing of the focal length may command interference fringe of the spacing of light beam 113 and 114 or lens 115.When the focal length of the spacing of light beam 113 and 114 and lens 115 was fixed value, the Bragg grating of formation was single wavelength, can make narrow band filter.Following form has been listed when beam separation D=25mm the pairing interference fringe spacing of different focal length of lens F d, and optical fiber effective refractive index n
EffThe centre wavelength of=1.46 o'clock Fiber Bragg Grating FBGs.Therefore, after beam separation is selected,, can produce the diffraction grating with different cycles or the Bragg grating of different-waveband as long as change the lens of different focal.
| Optical maser wavelength is 244nm, D=25mm, n eff＝1.46 | |||
| Focal length of lens F (mm) | ????44 | ????53 | ????62 |
| Interference fringe spacing d (nm) | ????446.43 | ????531.47 | ????617.30 |
| Bragg wavelengths Bragg(nm) | ????1303.59 | ????1551.90 | ????1802.50 |
If continuously change beam separation D in the grating ablation process, then can make broadband grating with various chirp rate.The method that changes beam separation D comprises translation catoptron 103 and catoptron 105, or other similar approach.For example, optical maser wavelength is 244nm, when the condenser lens of selecting focal length F=53mm for use, and optical fiber effective refractive index n
Eff, when changing, beam separation can write out the Chirp Bragg grating of 1469nm-1646nm at=1.46 o'clock in D=25 ± 1.5mm scope.Adopt another characteristics of method provided by the present invention to be, the position of striate region remains unchanged when changing beam separation.
If use I
1And I
2The light intensity of representing incident beam 116 and 117 respectively, then
I
1＝I·k(P
1)
I
2＝I·k(P
2)
Wherein, I is the light intensity (being made as equal for simplicity) that incides acousto- optic frequency modulator 111 and 112, k (P) expression as shown in Figure 4 acousto-optic frequency modulator 1 order diffraction light diffraction efficiency and the relation curve of driving power, P
1And P
2Be respectively the output power of the source of speeding 118 and 119.The intensity of light beam intersection internal interference striped is by DC component L
DcWith AC compounent I
AcConstitute, they can be expressed as
I
dc＝I
1+I
2＝I[k(P
1)+k(P
2)]
I
Ac=2 (I
1I
2)
1/2=2I[k (P
1) k (P
2)]
1/2As seen, change the output power P of drive source 118 and 119
1And P
2Can control the intensity and the contrast of interference fringe respectively, so can realize the apodizing function of arbitrary shape.
On drive signal, introduce phase shift by drive source 118 or 119 and can make interference fringe produce phase shifts, thereby make along having the diffraction grating and the Bragg grating of phase shift with the grid vertical direction.
Claims (8)
1. the manufacturing installation of a grating comprises: LASER Light Source, catoptron, semi-transparent semi-reflecting lens, lens, it is characterized in that, also comprise the optic frequency shift device, the laser beam that LASER Light Source produces is divided into the equal by force or approaching laser beam that equates of two-beam by semi-transparent semi-reflecting lens, described two-beam equates by force or can be changed the parallel of mutual spacing by additional device near the laser beam that equates to move, then, converge the generation interference fringe through optic frequency shift device, lens respectively, comprise speed pickup in addition and make by the portrayal light-sensitive medium with speed: V=d (f
S2-f
S1), the device that the direction of the laser beam that frequency shift amount is little behind described two bundle laser frequencies moves, wherein:
V: expression speed; D: expression interference fringe spacing; f
S1And f
S2Frequency for the optic frequency shift device;
Described translational speed and direction that speed pickup will record feed back to the optic frequency shift device, and the optic frequency shift device changes frequency makes described interference fringe equate with translational speed, the direction of light-sensitive medium;
2. the manufacturing installation of a kind of grating according to claim 3 is characterized in that, the laser beam that described LASER Light Source produces is continuous Ultra-Violet Laser or continuous visible laser;
3. the manufacturing installation of a kind of grating according to claim 3 is characterized in that, described optic frequency shift device is optical frequency modulator or acousto-optic frequency modulator;
4. the manufacturing installation of a kind of grating according to claim 5 is characterized in that, the acousto-optic crsytal of described acousto-optic frequency modulator, and to visible light wave range, typical material is the lead molybdate crystal; Can adopt molten English to the ultraviolet light wave band;
5. the manufacturing installation of a kind of grating according to claim 3 is characterized in that, described frequency modulator is driven by drive source, can introduce phase shift between the drive signal that drive source produces;
6. the manufacturing installation of a kind of grating according to claim 3 is characterized in that, described sensor can be laser interferometer or Laser Doppler Velocimeter;
7. the manufacture method of a grating is characterized in that, comprises the following steps:
Light intensity is equated or carry out frequency shifts respectively, and make two bundle laser have certain difference on the frequency, thereby the interference fringe that two bundle laser converge generation moves with certain speed and direction near the two bundle laser that equate;
Described interference fringe is converged in light-sensitive medium, its surface or inside to light-sensitive medium is portrayed;
In portrayal, make the speed of light-sensitive medium and described moving interference fringes identical with direction;
Then, can adopt the following step respectively:
Change the spacing of described interference fringe, to make different wave length arrowband grating;
In the grating ablation process, continuously change described two laser beam spacings, to make the broadband grating;
Change the intensity and the contrast of described interference fringe, to realize difform apodizing function;
Make interference fringe produce phase shifts, have the diffraction grating and the Bragg grating of phase shift with making,
8. the manufacture method of a kind of grating according to claim 1, described laser can be selected continuous Ultra-Violet Laser or visible laser continuously for use.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021044554A CN1177238C (en) | 2002-03-19 | 2002-03-19 | Grating fabricating equipment and process |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021044554A CN1177238C (en) | 2002-03-19 | 2002-03-19 | Grating fabricating equipment and process |
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| Publication Number | Publication Date |
|---|---|
| CN1371001A true CN1371001A (en) | 2002-09-25 |
| CN1177238C CN1177238C (en) | 2004-11-24 |
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|---|---|---|---|
| CNB021044554A Expired - Fee Related CN1177238C (en) | 2002-03-19 | 2002-03-19 | Grating fabricating equipment and process |
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| CN102074892A (en) * | 2010-12-07 | 2011-05-25 | 北京邮电大学 | Manufacturing method of tunable semiconductor laser |
| CN103323912A (en) * | 2013-05-21 | 2013-09-25 | 浙江工业大学 | Photo-refraction long-period waveguide grating coupler |
| WO2014111000A1 (en) * | 2013-01-17 | 2014-07-24 | 清华大学 | Optical grating phase modulator for laser interference photoetching system |
| CN105631139A (en) * | 2015-12-30 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Split type grating ruling cutter parametric design method |
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| CN108318063A (en) * | 2016-12-29 | 2018-07-24 | 恩德莱斯和豪瑟尔分析仪表两合公司 | System at least one process variable for determining and monitoring medium |
| CN111880254A (en) * | 2020-07-14 | 2020-11-03 | 浙江大学 | Preparation method of grating with continuously-changed diffraction efficiency |
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| CN102074892B (en) * | 2010-12-07 | 2012-02-22 | 北京邮电大学 | Manufacturing method of tunable semiconductor laser |
| CN102074892A (en) * | 2010-12-07 | 2011-05-25 | 北京邮电大学 | Manufacturing method of tunable semiconductor laser |
| WO2014111000A1 (en) * | 2013-01-17 | 2014-07-24 | 清华大学 | Optical grating phase modulator for laser interference photoetching system |
| US9869857B2 (en) | 2013-01-17 | 2018-01-16 | Tsinghua University | Optical grating phase modulator for laser interference photoetching system |
| CN103323912A (en) * | 2013-05-21 | 2013-09-25 | 浙江工业大学 | Photo-refraction long-period waveguide grating coupler |
| CN105631139A (en) * | 2015-12-30 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | Split type grating ruling cutter parametric design method |
| CN105631139B (en) * | 2015-12-30 | 2018-09-21 | 中国科学院长春光学精密机械与物理研究所 | One kind splitting type grating ruling cutter parameterization design method |
| CN108318063B (en) * | 2016-12-29 | 2021-09-17 | 恩德莱斯和豪瑟尔分析仪表两合公司 | System for determining and monitoring at least one process variable of a medium |
| CN108318063A (en) * | 2016-12-29 | 2018-07-24 | 恩德莱斯和豪瑟尔分析仪表两合公司 | System at least one process variable for determining and monitoring medium |
| CN106772782A (en) * | 2017-01-19 | 2017-05-31 | 华中科技大学 | A kind of continuous Written Device of multifunctional optical fiber micro-structural and method |
| CN106772782B (en) * | 2017-01-19 | 2017-10-31 | 华中科技大学 | A kind of continuous Written Device of multifunctional optical fiber micro-structural and method |
| CN107806820A (en) * | 2017-10-20 | 2018-03-16 | 北京航空航天大学 | A kind of method of the reflectance factor and phase of regulation and control atomic raster |
| CN111880254B (en) * | 2020-07-14 | 2021-05-14 | 浙江大学 | Preparation method of grating with continuously-changed diffraction efficiency |
| CN111880254A (en) * | 2020-07-14 | 2020-11-03 | 浙江大学 | Preparation method of grating with continuously-changed diffraction efficiency |
| CN112285724A (en) * | 2020-10-21 | 2021-01-29 | 电子科技大学 | All-solid-state laser radar and design method thereof |
| CN112285724B (en) * | 2020-10-21 | 2023-10-17 | 电子科技大学 | All-solid-state laser radar and design method thereof |
| CN114089458A (en) * | 2022-01-20 | 2022-02-25 | 深圳珑璟光电科技有限公司 | Large-size holographic grating and manufacturing device thereof |
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