CN1364679A - Low temperature work table - Google Patents
Low temperature work table Download PDFInfo
- Publication number
- CN1364679A CN1364679A CN 01107431 CN01107431A CN1364679A CN 1364679 A CN1364679 A CN 1364679A CN 01107431 CN01107431 CN 01107431 CN 01107431 A CN01107431 A CN 01107431A CN 1364679 A CN1364679 A CN 1364679A
- Authority
- CN
- China
- Prior art keywords
- low temperature
- work table
- operating room
- cold air
- temperature work
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
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Abstract
Description
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 01107431 CN1240523C (en) | 2001-01-10 | 2001-01-10 | Low temperature work table |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN 01107431 CN1240523C (en) | 2001-01-10 | 2001-01-10 | Low temperature work table |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1364679A true CN1364679A (en) | 2002-08-21 |
CN1240523C CN1240523C (en) | 2006-02-08 |
Family
ID=4656359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN 01107431 Expired - Fee Related CN1240523C (en) | 2001-01-10 | 2001-01-10 | Low temperature work table |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1240523C (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103456670A (en) * | 2007-07-13 | 2013-12-18 | 迈普尔平版印刷Ip有限公司 | Method of switching wafers in photoetching device |
US9645511B2 (en) | 2007-07-13 | 2017-05-09 | Mapper Lithography Ip B.V. | Lithography system, method of clamping and wafer table |
-
2001
- 2001-01-10 CN CN 01107431 patent/CN1240523C/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103456670A (en) * | 2007-07-13 | 2013-12-18 | 迈普尔平版印刷Ip有限公司 | Method of switching wafers in photoetching device |
US9645511B2 (en) | 2007-07-13 | 2017-05-09 | Mapper Lithography Ip B.V. | Lithography system, method of clamping and wafer table |
US9665013B2 (en) | 2007-07-13 | 2017-05-30 | Mapper Lithography Ip B.V. | Lithography system, method of clamping and wafer table |
USRE49488E1 (en) | 2007-07-13 | 2023-04-11 | Asml Netherlands B.V. | Lithography system, method of clamping and wafer table |
Also Published As
Publication number | Publication date |
---|---|
CN1240523C (en) | 2006-02-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: GUANGZHOU MEDICAL COLLEGE Free format text: FORMER OWNER: LIU JINBAO Effective date: 20080215 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20080215 Address after: No. 195 Dongfeng West Road, Guangdong, Guangzhou Province, Guangzhou Medical College Patentee after: Guangzhou Medical College Address before: No. 195 Dongfeng West Road, Guangdong, Guangzhou Province, Guangzhou Medical College Patentee before: Liu Jinbao |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060208 Termination date: 20100210 |