CN1363509A - 微机电系统器件的真空封装方法 - Google Patents
微机电系统器件的真空封装方法 Download PDFInfo
- Publication number
- CN1363509A CN1363509A CN 02100469 CN02100469A CN1363509A CN 1363509 A CN1363509 A CN 1363509A CN 02100469 CN02100469 CN 02100469 CN 02100469 A CN02100469 A CN 02100469A CN 1363509 A CN1363509 A CN 1363509A
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- Prior art keywords
- vacuum
- mems device
- package casing
- package
- getter
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Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN 02100469 CN1259231C (zh) | 2002-02-01 | 2002-02-01 | 微机电系统器件的真空封装方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN 02100469 CN1259231C (zh) | 2002-02-01 | 2002-02-01 | 微机电系统器件的真空封装方法 |
Publications (2)
Publication Number | Publication Date |
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CN1363509A true CN1363509A (zh) | 2002-08-14 |
CN1259231C CN1259231C (zh) | 2006-06-14 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN 02100469 Expired - Fee Related CN1259231C (zh) | 2002-02-01 | 2002-02-01 | 微机电系统器件的真空封装方法 |
Country Status (1)
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CN (1) | CN1259231C (zh) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102329072A (zh) * | 2011-06-29 | 2012-01-25 | 洛阳兰迪玻璃机器股份有限公司 | 一种真空玻璃及真空玻璃制造方法 |
CN103958393A (zh) * | 2011-11-10 | 2014-07-30 | 株式会社优利电子 | Mems传感器封装及其方法 |
CN104700696A (zh) * | 2014-12-09 | 2015-06-10 | 中国科学技术馆 | 光压演示仪 |
-
2002
- 2002-02-01 CN CN 02100469 patent/CN1259231C/zh not_active Expired - Fee Related
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102329072A (zh) * | 2011-06-29 | 2012-01-25 | 洛阳兰迪玻璃机器股份有限公司 | 一种真空玻璃及真空玻璃制造方法 |
CN103958393A (zh) * | 2011-11-10 | 2014-07-30 | 株式会社优利电子 | Mems传感器封装及其方法 |
CN103958393B (zh) * | 2011-11-10 | 2016-08-17 | 株式会社优利电子 | Mems传感器封装及其方法 |
US9533875B2 (en) | 2011-11-10 | 2017-01-03 | U Electronics Co., Ltd. | MEMS sensor packaging and method thereof |
CN104700696A (zh) * | 2014-12-09 | 2015-06-10 | 中国科学技术馆 | 光压演示仪 |
Also Published As
Publication number | Publication date |
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CN1259231C (zh) | 2006-06-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C06 | Publication | ||
PB01 | Publication | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Beijing sealand Jiaxing United Technology Co., Ltd. Assignor: Peking University Contract fulfillment period: 2008.11.18 to 2015.11.18 contract change Contract record no.: 2008110000221 Denomination of invention: Vacuum packaging method for micro-electro-mechanical system devices Granted publication date: 20060614 License type: Exclusive license Record date: 20081230 |
|
LIC | Patent licence contract for exploitation submitted for record |
Free format text: EXCLUSIVE LICENSE; TIME LIMIT OF IMPLEMENTING CONTACT: 2008.11.18 TO 2015.11.18; CHANGE OF CONTRACT Name of requester: BEIJING GUOHAI JIAXING UNITED SCIENCE CO., LTD. Effective date: 20081230 |
|
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060614 Termination date: 20120201 |