CN1350182A - Improved shearing insulating piezoelectric accelerometer capable of being used at 200 deg.C - Google Patents
Improved shearing insulating piezoelectric accelerometer capable of being used at 200 deg.C Download PDFInfo
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- CN1350182A CN1350182A CN 01132377 CN01132377A CN1350182A CN 1350182 A CN1350182 A CN 1350182A CN 01132377 CN01132377 CN 01132377 CN 01132377 A CN01132377 A CN 01132377A CN 1350182 A CN1350182 A CN 1350182A
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- accelerometer
- insulator
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- high temperature
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Abstract
The sheared bottom-insulated piezoelectric accelerometer, capable of using at high temperature of 200 deg.C is characterized by that its piezoelectric sensing element is a modified lead metanibate high-temp. piezoelectric ceramics made up by using Ca (2+) or Ba (2+) and adding rare-earth oxide. At the same time it adopts a high specific weight elconite mass block, and uses glass body as insulating material of signal output device instead of fluoroplastics, and can uses polyimide material which can be used at 200-250 deg.C for a long period and possesses high impedance and good abrasive resistance to make insulator, and the internal cavity of insulator can be any one kind of inner hexagon, tetragonal or star form. It adopts screw and epoxy resin adhesive double connection process to fix said insulator to the base seat to the accelerometer.
Description
Technical field
The present invention relates to a kind of shearing-type piezoelectric accelerometer, belong to oscillation sensor field through the improved bottom insulation of under 200 ℃ of high temperature, using.
Background technology
How the operation conditions that the big I of vibratory output has reflected object, equipment to the detection of vibratory output, almost relates to each engineering field.Detecting vibration will have vibration measuring set, just bound vibration transducer.This wherein people to use maximum be inner no-movable part, volume is less, the piezoelectric accelerometer of dependable performance.Proper and the performance of the selection of piezoelectric accelerometer how, and is most important to accuracy, fiduciary level, the security of picking up tested signal.
Piezoelectric accelerometer is the high output impedance device, and the noise warning signal that induces from stube cable causes very big trouble to detection sometimes.These disturb from the loop that constitutes with the earth, the interference and the electromagnetic interference (EMI) of triboelectricity.It is that mechanical motion owing to cable enters accelerometer that triboelectricity is disturbed.It derives from dynamic distortion, compression and the stretching between each layer in the cable and causes localized capacitance and change in charge.The method that prevents is to adopt graphited accelerometer cable and be fixed up with adhesive plaster or cementing agent in the place of as close as possible accelerometer.The be everlasting cable of accelerometer of electromagnetic interference (EMI) produces during machine near running.The way that this available double layer screen line maybe can adopt the balanced type acceleration to take into account the differential type prime amplifier is solved.And what make on-the-spot user's worry most is the ground loop problem.Because accelerometer and measurement instrument are difference ground connection, ground loop flows at the insulation course (surface) of accelerometer cable sometimes.Also have, when detecting motor, if it is bad to run into the ground connection of motor itself, or because of the influence of ground loop, may makes tested alternating signal produce instability and influence measuring accuracy.In addition, to civilian mobile motor, in to vibration detection such as moving objects such as aircraft, naval vessels, because of ground connection nothing but must be with " floating ground " method of testing, or in the occasion that can not accomplish reliable ground at any time or the like.Like that, all sum up in the point that primary instrument---the bottom insulation problem of accelerometer to detecting.The past people require the test of insulation to the bottom, being or with insulated bolt with in the way of the bottom of accelerometer pad mica sheet, prevent to form ground loop, but this method being very inconvenient of employing.Reason is: use the insulated bolt such as the bakelite class to wear no resistance; And in the way of the bottom of accelerometer pad mica sheet, mica sheet is very easily broken.For safety, install reliably, efficiently, and the antijamming capability that increases accelerometer, this has just drawn the imagination of the bottom insulation type piezoelectric accelerometer that the present invention proposes.Because all obvious more traditional center compression of the cross sensitivity of shearing-type piezoelectric accelerometer, environmental sensitivity is good, so under many on-the-spot test environments, the data that record with the piezoelectric accelerometer of shearing-type bottom insulation type are than the result who records with general piezoelectric accelerometer, more reliable, accurate, improved measuring accuracy effectively.Under some hot environments, just need to have the shearing-type piezoelectric accelerometer of bottom insulation for using.
Fig. 1 is the structural representation of general shear type piezoelectric accelerometer.1-base among the figure; 2-housing; 3-piezoelectric ceramic piece; 4-mass; 5-pretension tube; 6-lining; 7-jack.From scheming as seen, the bottom of shearing-type piezoelectric accelerometer is and the directly and tight manifold card in the surface of testee, has promptly constituted the loop with the earth.And by the loop signal that check system produces, might bring adverse consequences to detecting instrument and tester to test result, and the shearing-type piezoelectric accelerometer that is provided with can only at room temperature use.
Summary of the invention
Purpose of the present invention provides a kind of at what can use the shearing-type piezoelectric accelerometer of bottom insulation under 200 ℃ of high temperature through improved.This piezoelectric accelerometer is except the performance of common accelerometer, and its distinguishing feature is: insulation impedance is high, the steel screw of employing, wearing quality is strong, can be under 200 ℃ high temperature operate as normal.
The objective of the invention is that improved mode implements by making up.General shear type piezoelectric accelerometer has been made four aspects improved, to guarantee that piezoelectric accelerometer can use under 200 ℃ high temperature.1) selected the piezoelectric sensing element of modification lead meta-columbute high temperature ceramic material sensitive to heat-humidity for use as piezoelectric accelerometer; 2) material with mass changes high specific gravity (tungsten copper) alloy into by original stainless steel-like; 3) insulating material in the signal output is a vitreum; 4) the new insulator of design is placed between piezoelectric accelerometer base and the testee and insulate.The improvement with regard to four aspects now elaborates one by one.
Low Qm (the Q of the one, lead meta-columbute piezoelectric ceramics
m＜10), (Kt＞Kr) and high Curie temperature (Tc=579 ℃) make it that very wide application prospect arranged aspect industrial detection, medical diagnosis and the pyrostat for single vibration mode.Yet pure lead meta-columbute PbNb
2O
6Its ferroelectric phase is positioned at high-temperature region (～123 ℃), need technology with quenching freeze to normal temperature to it or low-temperature space uses, this becomes very complicated, difficult with regard to the preparation technology who causes pure lead meta-columbute piezoceramic material and element, thereby has limited the production and the widespread use of this class stupalith greatly.In order to make the lead meta-columbute piezoceramic material and the element of practical use, people have carried out reaching in a large number doping vario-property research, and the most frequently used is to adopt K
+, Ba
2+Ion exchange and interpolation ZrO
2, TiO
2And Nb
2O
5Realize etc. way.K
+, Ba
2+The interpolation of isoionic displacement and various oxides is though can improve the manufacturability of material and the piezoelectric property of raising material, anisotropy of material variation, Q more effectively
mIncrease, Curie temperature reduces, and this just makes the premium properties of pure lead meta-columbute material descend greatly, and should not at high temperature use.
The modification lead meta-columbute high-temperature ceramic materials that the present invention uses is a kind of effective adjuvant and a small amount of Ca of containing
2+Or Ba
2+The prepared modification lead meta-columbute of displacement piezoceramic material, to keep material when having pure lead meta-columbute advantage, improve the high-temperature piezoelectric performance and the shop characteristic of material, thereby material can be used under 200 ℃ high temperature.
The composition general formula of specifically, modification lead meta-columbute piezoceramic material can be expressed as Pb
1-xMe
xNb
2O
6Ten ywt%.In the formula, Me is Ca
2+Or Ba
2+, 0.01＜x＜0.10, y is a rare earth oxide, as CeO
2, Sm
2O
3, Nd
2O
3Or TeO
2In a kind of, y=0.05～0.30wt%.
By above-mentioned component, adopt the general technology of pottery, promptly prepare burden, ball milling mixing, drying, briquetting (pressure is 10MPa), synthetic 800 ℃/2 hours), fine grinding (ball milling), dry, add sticking granulation, (forming pressure is 150～200MPa), plastic removal (800 ℃/hour) in moulding, sintering (1260～1300 ℃/20 '～30 '), the porcelain base of sintering is through cold working, cleaning, top electrode, polarization (180 ℃ of polarization temperature, polarizing voltage 5KV/mm), carry out performance test at last, promptly be prepared into operable high-temperature piezoelectric ceramic component.
The characteristic of this modification lead meta-columbute is:
1. improved the shop characteristic of material, ceramic component need not to quench behind sintering, the high temperature ferroelectric phase can be remained to room temperature with the stove natural cooling;
2. improved the Kt value of material, between Jie's what 0.38～0.45;
3. improved the Curie temperature of material, T
C=530～570 ℃;
4. reduce Q
mTo below 10;
5. can prepare different shape (disk, rectangular, hemisphere easily.Hollow ball, annulus, pipe and cylinder etc.) element, its size can reach rectangle or the square sheets that diameter 5～200mm and thickness 0.2～10mm or 5 * 5～200 * 200mm thickness are 0.2～10mm.The piezoelectric sensing element of usefulness is an oblong-shaped in the present invention, and it is of a size of wide 6mm, long 8mm, thick 1mm.
The 2nd, is well-known, the output sensitivity S ≈ md of piezoelectric accelerometer
33(quality * piezoelectric modulus).Because the piezoelectric coefficient d of modification lead meta-columbute piezoelectric ceramics
33=80, only be 1/4～1/6 of general emission type piezoelectric ceramics, therefore use modification lead meta-columbute piezoelectric ceramics as sensitive element, T
CThough improve much, serviceability temperature is corresponding have been brought up to more than 200 ℃, the output sensitivity of piezoelectric accelerometer reduces.And the ratio of high specific gravity (tungsten copper) alloy weighs about 17, is the twice of stainless steel-like material, for improving the output sensitivity of piezoelectric accelerometer, proposes among the present invention to replace the material of stainless steel as mass with high specific gravity (tungsten copper) alloy.Tungsten-copper alloy is produced by Shanghai City non-ferrous metal research institute.
The 3rd. in general normal temperature piezoelectric accelerometer, an insulator made from fluoroplastic class material is arranged between the shell of signal output and its inner core, to guarantee signal and ground insulation.And fluoroplastic will to wear out about 200 ℃～250 ℃ be that the insulation degree descends under the high temperature, this will influence the detection of signal.The insulating material that proposes in the signal output among the present invention replaces fluoroplastic with vitreum for this reason, thereby effectively improves the insulation impedance of signal output, to guarantee the precision of input.
The 4th. designed insulator, be placed in as shown in Figure 2 in the middle of the bottom of piezoelectric accelerometer.Among the insulator of the present invention design such as Fig. 28, its height should be less than the height of the hexagonal base of accelerometer, and its cylindrical A should be less than the plane of symmetry of accelerometer base hexagonal, and its height is between 1～2mm.The cavity shape of insulator or interior hexagonal, four directions or quincunx in any.The profile that the screw thread inserts of accelerometer is installed with what should be corresponding with the insulator cavity shape.The installation screw internal diameter of inserts is M3～M8mm.
This screw thread inserts that is used to install accelerometer can be in advance and insulator be pressed into one, also can add tackifier it is fixed in the insulator by screw thread.Also insulate fully with the accelerometer body owing to be used for fixing the installation screw of accelerometer, this has just prevented from arrogantly to constitute the interference in loop effectively, thereby has improved accuracy of detection and reliability.
Insulator is to have selected the polyimide material that can use for a long time under 200～250 ℃ of high temperature for use in the base shown in Figure 3.The direct impedance of this material is very high and wearing quality is good.Combination between insulator and the accelerometer base is connected with epoxy glue is dual by screw thread.This shows that the shearing insulating piezoelectric accelerometer that the utility model provides is except the characteristic with common accelerometer, its remarkable characteristic is the insulation impedance height, the steel screw of employing, and wearing quality is good, and can use safely under 200 ℃ of high temperature.
Description of drawings
Fig. 1 is the structural representation of general shear type piezoelectric accelerometer.
A kind of structural representation that Fig. 2 proposes for the present invention through the improved shearing insulating piezoelectric accelerometer that can under 200 ℃ of high temperature, use.
Fig. 3 for the utility model design a kind of in the diagrammatic cross-section of hexagonal insulator.
1-base among the figure; 2-housing; 3-piezoelectric ceramic piece; 4-mass; 5-pretension tube; 6-lining; 7-jack; 8-insulator; 9-installation screw; 10-screw thread inserts; 11-high-temperature piezoelectric potsherd.
As seen from Figure 1, the bottom of shearing-type piezoelectric accelerometer is directly also tight with the surface of testee Close manifold card, namely consisted of the loop with the earth. And the loop signal that is produced by check system, might be to surveying Test result brings adverse consequences to detecting instrument and tester.
Insulator shown in Figure 3 is to have selected the polyamides Asia that can use for a long time under 200～250 ℃ of high temperature The amine material. The direct impedance of this material is very high and wearability good. Owing to be used for the fixedly peace of accelerometer The dress screw thread also insulate fully with the accelerometer body, and this has just prevented from arrogantly consisting of the loop effectively Disturb, thereby improved accuracy of detection and reliability.
Embodiment
By further illustrating substantive distinguishing features of the present invention and marked improvement below by embodiment, but the present invention is by no means only for what embodiment.
Embodiment 1 piezoelectric ceramic piece consists of Pb
0.95Ca
0.05Nd
2O
6, with CeO
2Be adjuvant, addition is 0.10wt, makes the high-temperature piezoelectric ceramic component through general ceramic process, its Tc=540 ℃, Kt=0.40, Qm＜10 are processed into and are of a size of wide 6mm, long 8mm, the oblong-shaped of thick 1mm is used than about 17 the tungsten-copper alloy of weighing as mass, and the inner chamber of insulator is interior sexangle (as shown in Figure 3), highly be 1mm in, it is to be made by the polyimide material that can use for a long time under 200～250 ℃ of high temperature.Adopt screw thread to be connected between insulator and the accelerometer with epoxy resin is dual.The screw thread inserts that is used to install accelerometer is pressed into one with insulator in advance, and the installation screw hole dimensions in the inserts is 4mm, the center of its position what base, and insulate with base.Improvement through this four aspect can be used produced shearing insulating piezoelectric accelerometer under 200 ℃ of high temperature.
Claims (4)
1. one kind through the improved shearing-type bottom insulation piezoelectric accelerometer that can use under 200 ℃ of high temperature, comprises base, mass, piezo ceramic element, pretension tube, insulator, installation screw, and its feature is at what:
(1) selecting general formula for use is Pb
1-xMe
xNb
2O
6Ten ywt% modification lead meta-columbute high temperature ceramic material sensitive to heat-humidity are as the high-temperature piezoelectric sensitive element, in the formula: Me is Ca
2+Or Ba
2+, 0.01＜x＜0.10, y=0.05～0.30, wt%, y are CeO
2, Sm
2O
3, Nd
2O
3Or TeO
2In a kind of;
(2) adopt tungsten-copper alloy as mass;
(3) insulator is set in the centre of piezoelectric accelerometer base, insulator adopts screw thread and the dual method of attachment of epoxy resin, and itself and accelerometer are fixed; The screw thread inserts that accelerometer is installed is in insulator, insulate fully with the accelerometer base in the centre of the installation screw position what accelerometer in the inserts;
(4) shell of signal output and the insulator between the inner core are made by vitreum.
2. by the described shearing-type bottom insulation piezoelectric accelerometer that can under 200 ℃ of high temperature, use of claim 1, its feature the cavity shape of the described insulator of what or interior hexagonal or four directions or quincunx in any; The profile that the screw thread inserts of accelerometer is installed with what should be corresponding with the insulator cavity shape.
3. by claim 1 or the 2 described shearing-type bottom insulation piezoelectric accelerometers that can use under 200 ℃ of high temperature, its feature is pressed into one at the described screw thread inserts of what or with insulator, or adds tackifier by screw thread it is fixed in the insulator; Installation screw internal diameter on the inserts is M3～M8mm.
4. by claims 1 described shearing-type bottom insulation piezoelectric accelerometer that can use under 200 ℃ of high temperature, its feature has selected for use the polyimide material of long-time use under 200～250 ℃ of high temperature to make at the what insulator; Height is between 1～2mm, and cylindrical should be less than the plane of symmetry of accelerometer base hexagonal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011323779A CN1147731C (en) | 2001-11-30 | 2001-11-30 | Improved shearing insulating piezoelectric accelerometer capable of being used at 200 deg.C |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB011323779A CN1147731C (en) | 2001-11-30 | 2001-11-30 | Improved shearing insulating piezoelectric accelerometer capable of being used at 200 deg.C |
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| Publication Number | Publication Date |
|---|---|
| CN1350182A true CN1350182A (en) | 2002-05-22 |
| CN1147731C CN1147731C (en) | 2004-04-28 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675341A (en) * | 2013-12-26 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | Piezoelectric acceleration sensor |
| CN107045084A (en) * | 2017-02-24 | 2017-08-15 | 苏州东菱振动试验仪器有限公司 | A kind of tangential piezoelectric constant d15Measurement apparatus and method |
| CN107110885A (en) * | 2015-06-26 | 2017-08-29 | 厦门乃尔电子有限公司 | Shearing-type piezoelectric transducer |
| CN108008148A (en) * | 2017-11-08 | 2018-05-08 | 中国航空工业集团公司金城南京机电液压工程研究中心 | A kind of passive acceleration transducer of piezoelectric type |
| CN108267615A (en) * | 2017-12-18 | 2018-07-10 | 北京遥测技术研究所 | A kind of HI high impact piezoelectric accelerometer |
| CN108291926A (en) * | 2015-12-04 | 2018-07-17 | 基斯特勒控股公司 | Accelerograph and the method for manufacturing this accelerograph |
| CN108369244A (en) * | 2015-12-04 | 2018-08-03 | 基斯特勒控股公司 | Accelerograph and method for manufacturing this accelerograph |
| CN110608833A (en) * | 2019-09-12 | 2019-12-24 | 江苏方天电力技术有限公司 | System and method for measuring axial force of pull rod under thermal state condition |
-
2001
- 2001-11-30 CN CNB011323779A patent/CN1147731C/en not_active Expired - Fee Related
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103675341A (en) * | 2013-12-26 | 2014-03-26 | 中国科学院上海硅酸盐研究所 | Piezoelectric acceleration sensor |
| CN107110885A (en) * | 2015-06-26 | 2017-08-29 | 厦门乃尔电子有限公司 | Shearing-type piezoelectric transducer |
| CN108291926A (en) * | 2015-12-04 | 2018-07-17 | 基斯特勒控股公司 | Accelerograph and the method for manufacturing this accelerograph |
| CN108369244A (en) * | 2015-12-04 | 2018-08-03 | 基斯特勒控股公司 | Accelerograph and method for manufacturing this accelerograph |
| CN108369244B (en) * | 2015-12-04 | 2020-08-07 | 基斯特勒控股公司 | Acceleration measuring device and method for producing such an acceleration measuring device |
| CN108291926B (en) * | 2015-12-04 | 2020-08-07 | 基斯特勒控股公司 | Acceleration measuring device and method for producing such an acceleration measuring device |
| CN107045084A (en) * | 2017-02-24 | 2017-08-15 | 苏州东菱振动试验仪器有限公司 | A kind of tangential piezoelectric constant d15Measurement apparatus and method |
| CN107045084B (en) * | 2017-02-24 | 2023-11-03 | 苏州东菱振动试验仪器有限公司 | Tangential piezoelectric constant d 15 Measuring device and method of (a) |
| CN108008148A (en) * | 2017-11-08 | 2018-05-08 | 中国航空工业集团公司金城南京机电液压工程研究中心 | A kind of passive acceleration transducer of piezoelectric type |
| CN108267615A (en) * | 2017-12-18 | 2018-07-10 | 北京遥测技术研究所 | A kind of HI high impact piezoelectric accelerometer |
| CN108267615B (en) * | 2017-12-18 | 2021-02-09 | 北京遥测技术研究所 | High-impact piezoelectric accelerometer |
| CN110608833A (en) * | 2019-09-12 | 2019-12-24 | 江苏方天电力技术有限公司 | System and method for measuring axial force of pull rod under thermal state condition |
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| Publication number | Publication date |
|---|---|
| CN1147731C (en) | 2004-04-28 |
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