CN1332061C - Quick steaming container - Google Patents
Quick steaming container Download PDFInfo
- Publication number
- CN1332061C CN1332061C CNB001350625A CN00135062A CN1332061C CN 1332061 C CN1332061 C CN 1332061C CN B001350625 A CNB001350625 A CN B001350625A CN 00135062 A CN00135062 A CN 00135062A CN 1332061 C CN1332061 C CN 1332061C
- Authority
- CN
- China
- Prior art keywords
- pit
- leg
- cross
- furnace pot
- miniaturization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (8)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB001350625A CN1332061C (en) | 2000-12-14 | 2000-12-14 | Quick steaming container |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB001350625A CN1332061C (en) | 2000-12-14 | 2000-12-14 | Quick steaming container |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1358880A CN1358880A (en) | 2002-07-17 |
CN1332061C true CN1332061C (en) | 2007-08-15 |
Family
ID=4596545
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB001350625A Expired - Fee Related CN1332061C (en) | 2000-12-14 | 2000-12-14 | Quick steaming container |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1332061C (en) |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3452970A (en) * | 1967-05-12 | 1969-07-01 | Siemens Ag | Vaporization vessel for use in vapor deposition upon a carrier support |
US3541301A (en) * | 1967-11-06 | 1970-11-17 | Comp Generale Electricite | Source for evaporation in a vacuum |
US3636305A (en) * | 1971-03-10 | 1972-01-18 | Gte Sylvania Inc | Apparatus for metal vaporization comprising a heater and a refractory vessel |
US4112290A (en) * | 1976-10-27 | 1978-09-05 | Denki Kagaku Kogyo Kabushiki Kaisha | Evaporation vessel for use in vacuum evaporation |
US4264803A (en) * | 1978-01-10 | 1981-04-28 | Union Carbide Corporation | Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization |
US4446357A (en) * | 1981-10-30 | 1984-05-01 | Kennecott Corporation | Resistance-heated boat for metal vaporization |
US4884788A (en) * | 1988-04-12 | 1989-12-05 | Union Carbide Corporation | Boron nitride containing vessel having a surface coating of titanium iron-silicon thereon |
US5239612A (en) * | 1991-12-20 | 1993-08-24 | Praxair S.T. Technology, Inc. | Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat |
JPH06136518A (en) * | 1992-10-22 | 1994-05-17 | Shibaura Eng Works Co Ltd | Evaporation vessel for vacuum vapor deposition |
CN1167509A (en) * | 1994-09-28 | 1997-12-10 | 先进陶瓷公司 | Evaporator having multiple coating |
CN1167508A (en) * | 1994-09-28 | 1997-12-10 | 先进陶瓷公司 | High density flash evaporator |
CN2318232Y (en) * | 1997-10-06 | 1999-05-12 | 冶金部西南地质勘查局成都大西南工业公司 | Refractory metal evaporation boat |
-
2000
- 2000-12-14 CN CNB001350625A patent/CN1332061C/en not_active Expired - Fee Related
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3452970A (en) * | 1967-05-12 | 1969-07-01 | Siemens Ag | Vaporization vessel for use in vapor deposition upon a carrier support |
US3541301A (en) * | 1967-11-06 | 1970-11-17 | Comp Generale Electricite | Source for evaporation in a vacuum |
US3636305A (en) * | 1971-03-10 | 1972-01-18 | Gte Sylvania Inc | Apparatus for metal vaporization comprising a heater and a refractory vessel |
US4112290A (en) * | 1976-10-27 | 1978-09-05 | Denki Kagaku Kogyo Kabushiki Kaisha | Evaporation vessel for use in vacuum evaporation |
US4264803A (en) * | 1978-01-10 | 1981-04-28 | Union Carbide Corporation | Resistance-heated pyrolytic boron nitride coated graphite boat for metal vaporization |
US4446357A (en) * | 1981-10-30 | 1984-05-01 | Kennecott Corporation | Resistance-heated boat for metal vaporization |
US4884788A (en) * | 1988-04-12 | 1989-12-05 | Union Carbide Corporation | Boron nitride containing vessel having a surface coating of titanium iron-silicon thereon |
US5239612A (en) * | 1991-12-20 | 1993-08-24 | Praxair S.T. Technology, Inc. | Method for resistance heating of metal using a pyrolytic boron nitride coated graphite boat |
JPH06136518A (en) * | 1992-10-22 | 1994-05-17 | Shibaura Eng Works Co Ltd | Evaporation vessel for vacuum vapor deposition |
CN1167509A (en) * | 1994-09-28 | 1997-12-10 | 先进陶瓷公司 | Evaporator having multiple coating |
CN1167508A (en) * | 1994-09-28 | 1997-12-10 | 先进陶瓷公司 | High density flash evaporator |
CN2318232Y (en) * | 1997-10-06 | 1999-05-12 | 冶金部西南地质勘查局成都大西南工业公司 | Refractory metal evaporation boat |
Also Published As
Publication number | Publication date |
---|---|
CN1358880A (en) | 2002-07-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
ASS | Succession or assignment of patent right |
Owner name: GENERAL ELECTRIC CO. Free format text: FORMER OWNER: ADVANCED CERAMICS CORP. Effective date: 20070105 |
|
C41 | Transfer of patent application or patent right or utility model | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20070105 Address after: American New York Applicant after: General Electric Company Address before: ohio Applicant before: Advanced Ceramics Corp. |
|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
C17 | Cessation of patent right | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070815 Termination date: 20100114 |