CN1318736A - All-direction piezoelectric accelerometer capable of being used at temperature as high as 200 deg.C - Google Patents
All-direction piezoelectric accelerometer capable of being used at temperature as high as 200 deg.C Download PDFInfo
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- CN1318736A CN1318736A CN 01113448 CN01113448A CN1318736A CN 1318736 A CN1318736 A CN 1318736A CN 01113448 CN01113448 CN 01113448 CN 01113448 A CN01113448 A CN 01113448A CN 1318736 A CN1318736 A CN 1318736A
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Abstract
The present invention belongs to vibrating sensor and features of inter communicating the erection threaded hole of normal central compressing piezoelectric accelerometer with the control hole of piezoelectric accelerometer, piezoelectric sensing element being replaced of Ca2+ or Ba2+ with high temperature piezoelectric ceramic of modified metaniobeta led by adding rare earth oxide, using high temperature conducting resin to connect the conducting wire and electric guiding pilot, using vitreous to replace the fluoroplastic in the mass block of high density tungsten-copper alloy and the insulation material of signal output structure component.
Description
The present invention relates to a kind of 360 ° of commutation piezoelectric accelerometers that can under 200 ℃ of high temperature, use, relate to or rather a kind of output cable can 360 ° the commutations and the center compression high-temperature piezoelectric accelerometer that can under 200 ℃ high temperature, use, belong to oscillation sensor field.
Any object all can have vibration, and whether the operation conditions of an object of big I reflection of vibratory output, an equipment is good.To the detection of vibratory output, almost relate to each engineering field.Detect vibration and just be unable to do without vibration-measuring sensor, piezoelectric accelerometer is one of wherein most widely used, that kind is maximum sensor.
Proper and the performance of the selection of piezoelectric accelerometer how, and is most important to accuracy, the fiduciary level of picking up tested signal.Because the accuracy of detection that can might have influence on testee as additional mass of piezoelectric accelerometer own, therefore, the general requirement of people is 1/5～1/10 of a testee weight as the quality of the accelerometer of primary instrument.Lighter weight and output cable can 360 ° of commutations, are that the user is needed.The installation of piezoelectric accelerometer is non-directional, be particularly suitable for online detection and monitoring to equipment, such as the cable of exporting in the field requirement of some installations directivity is arranged, or it is smaller in the space at detected position, or wish that loading and unloading are convenient, become each on-the-spot user desirable jointly, and existing general center compression piezoelectric accelerometer can't be accomplished this point.In addition, under some hot environments, and tested space is smaller again, at this moment just needs volume less, output cable can 360 ° commutation and may be under 200 ℃ high temperature the piezoelectric accelerometer of operate as normal.
Fig. 1 is the structural representation of general center compression piezoelectric accelerometer.1-base among the figure; The 2-housing; The 3-piezoelectric sensing element; The 4-mass; The 5-pre-load nut; 6-signal output; 7-installs screw; 8-draws electric sheet.From scheming as seen, piezoelectric accelerometer will be fixed on the testee by the screw thread on the installation screw 7 of its bottom.Because when the installation screw thread of each accelerometer bottom of processing; because of processing has caused physical dimension variant; so it is inconsistent that the outbound course and the desirable outbound course of setter of side direction output accelerometer take place through regular meeting; this has brought very big inconvenience for setter and tester; and in the smaller occasion in space, tested position, this brings certain degree of difficulty also can for the installation aspect.
Purpose of the present invention provides a kind of at what and can use under 200 ℃ of high temperature, output cable can 360 ° of commutations piezoelectric accelerometer, it has loading and unloading easily, volume is little, in light weight, highly sensitive, it is convenient to test, be suitable for online detection and monitoring to equipment, can be under 200 ℃ high temperature operate as normal, especially the field requirement in some installations has directivity, or it is smaller in the space at detected position, temperature is again than higher, and the hope loading and unloading are convenient, to the random occasion of cable requirement energy of output.
The objective of the invention is to implement by the component invention mode.At first general center compression piezoelectric accelerometer has been made four aspects and improved, to guarantee that piezoelectric accelerometer can use under 200 ℃ high temperature.1) selected the piezoelectric sensing element of modification lead meta-columbute high temperature ceramic material sensitive to heat-humidity for use as piezoelectric accelerometer; 2) the signal output is to use conducting resinl with drawing being connected of electric sheet; 3) material with mass changes high specific gravity (tungsten copper) alloy into by original stainless steel-like; 4) insulating material in the signal output is a vitreum.Secondly, structurally also improve, to guarantee that output can 360 ° of commutations.The improvement with regard to four aspects now elaborates one by one.
Low Qm (the Q of the one, lead meta-columbute piezoelectric ceramics
m＜10), (Kt＞Kr) and high Curie temperature (Tc=579 ℃) make it that very wide application prospect arranged aspect industrial detection, medical diagnosis and the pyrostat for single vibration mode.Yet pure lead meta-columbute PbNb
2O
6Its ferroelectric phase is positioned at high-temperature region (～123 ℃), need technology with quenching freeze to normal temperature to it or low-temperature space uses, this becomes very complicated, difficult with regard to the preparation technology who causes pure lead meta-columbute piezoceramic material and element, thereby has limited the production and the widespread use of this class stupalith greatly.In order to make the lead meta-columbute piezoceramic material and the element of practical use, people have carried out reaching in a large number doping vario-property research, and the most frequently used is to adopt K
+, Ba
2+Ion exchange and interpolation ZrO
2, TiO
2And Nb
2O
5Realize etc. way.K
+, Ba
2+The interpolation of isoionic displacement and various oxides is though can improve the manufacturability of material and the piezoelectric property of raising material, anisotropy of material variation, Q more effectively
mIncrease, Curie temperature reduces, and this just makes the premium properties of pure lead meta-columbute material descend greatly, and should not at high temperature use.
The modification lead meta-columbute high-temperature ceramic materials that the present invention uses is a kind of effective adjuvant and a small amount of Ca of containing
2+Or Ba
2+The prepared modification lead meta-columbute of displacement piezoceramic material, to keep material when having pure lead meta-columbute advantage, improve the high-temperature piezoelectric performance and the shop characteristic of material, thereby material can be used under 200 ℃ high temperature.
The composition general formula of specifically, modification lead meta-columbute piezoceramic material can be expressed as Pb
1-xMe
xNb
2O
6+ ywt%.In the formula, Me is Ca
2+Or Ba
2+, displacement 0.00＜x＜0.10, y is a rare earth oxide, as CeO
2, Sm
2O
3, Nd
2O
3Or TeO
2In a kind of, y=0.05-0.30wt%.
By above-mentioned component, adopt the general technology of pottery, promptly prepare burden, ball milling mixing, drying, briquetting (pressure is 10MPa), synthetic 800 ℃/2 hours), fine grinding (ball milling), dry, add sticking granulation, moulding (forming pressure is 150-200 MPa), plastic removal (800 ℃/hour), sintering (1260-1300 ℃/20 '-30 '), the porcelain base of sintering is through cold working, cleaning, top electrode, polarization (180 ℃ of polarization temperature, polarizing voltage 5KV/mm), carry out performance test at last, promptly be prepared into operable high-temperature piezoelectric ceramic component.
The effect of this modification lead meta-columbute is as follows:
1. improved the shop characteristic of material, ceramic component need not to quench behind sintering, the high temperature ferroelectric phase can be remained to room temperature with the stove natural cooling;
2. improved the Kt (Kt=0.38-0.45) of material;
3. improved the Curie temperature (T of material
c=530-570 ℃.)；
4. reduce Q
mTo below 10;
5. can prepare different shape (disk, rectangular, hemisphere easily.Hollow ball, annulus, pipe and cylinder etc.) element, its size can reach rectangle or the square sheets that diameter 5～200mm and thickness 0.2～10mm or 5 * 5～200 * 200mm thickness are 0.2～10mm.The piezoelectric sensing element of usefulness is circular in the present invention, and it is of a size of Φ 10 * Φ 4 * 1mm.
The 2nd, is to general normal temperature piezoelectric accelerometer, and being connected of signal output and piezoelectric ceramic piece is to be welded in scolding tin by a lead of drawing from the signal output to draw on the electric sheet.Because the fusing point of scolding tin is not higher than 150 ℃, promptly about 150 ℃ or surpass 150 ℃, lead will come off from drawing electric sheet.Replace scolding tin in the present invention system with the commercially available high-temperature electric conduction glue of 200 ℃ of the high whats of heatproof degree, connect lead and draw electric sheet, can guarantee at least at 200 ℃ or surpass 200 ℃, the lead of drawing in the signal output and drawing between the electric sheet does not come off.The trade mark of high-temperature electric conduction glue is DAD-30, is produced by the SHANGHAI RESEARCH INSTITUTE OF SYNTHETIC RESINS.
The 3rd. the output sensitivity S ≈ md of piezoelectric accelerometer
33(quality * piezoelectric modulus).Because the piezoelectric coefficient d of modification lead meta-columbute piezoelectric ceramics
33=80, only be 1/4～1/6 of general emission type piezoelectric ceramics, therefore use modification lead meta-columbute piezoelectric ceramics as sensitive element, the output sensitivity of piezoelectric accelerometer is reduced.As everyone knows, the ratio of high specific gravity (tungsten copper) alloy weighs about 17, is the twice of stainless steel-like material, for improving the output sensitivity of piezoelectric accelerometer, proposes among the present invention to replace the material of stainless steel as mass with high specific gravity (tungsten copper) alloy.Tungsten-copper alloy is produced by Shanghai City non-ferrous metal research institute.
The 4th. in general normal temperature piezoelectric accelerometer, an insulator made from fluoroplastic class material is arranged between the shell of signal output and its inner core, to guarantee signal and ground insulation.And fluoroplastic will to wear out about 200 ℃～250 ℃ be that the insulation degree descends under the high temperature, this will influence the detection of signal.The insulating material that proposes in the signal output among the present invention replaces fluoroplastic with vitreum for this reason, thereby effectively improves the insulation impedance of signal output, to guarantee the precision of input.
Improvement through above-mentioned four aspects, center compression piezoelectric accelerometer can be used under 200 ℃ of high temperature, but can't realize that output can 360 ° of commutations, desire realizes this 360 ° of commutations, structurally make a big improvement again, thereby really reach two purposes of the present invention.
Structural improvement is: will install and fix the central through hole 11 that screw passes center compression piezoelectric accelerometer earlier, be the signal output of this accelerometer the whole needed direction of tester that arrives of adjustable positions of output cable then, tighten standing screw at last, this accelerometer is installed on the testee fully.The internal diameter that screw is installed usually is 3～6mm, and the external diameter of mounting screw is M3～M6, is decided by the installation screw of testee position.
Fig. 2 is the structural representation of the center compression high-temperature piezoelectric accelerometer that output provided by the invention can 360 ° of commutations.1-base among the figure; The 2-housing; The 5-pre-load nut; 6-signal output; 8-draws electric sheet; High-temperature piezoelectric sensitive element after the 9-modification; 10-high specific gravity mass; The 11-central through hole.From figure, can be clear that, the operator is as long as pass mounting screw the central through hole of piezoelectric accelerometer, after the output terminal of degree of will speed up meter (being the direction of output cable) turns to the position that oneself needs, it is fixed on the testee, this just makes installation and checkout person that the direction of output cable can 360 ° of hopes of arbitrarily adjusting be obtained implementing again.Another characteristics of this piezoelectric accelerometer are that volume is less, and weight is lighter.
Fig. 3 can use under 200 ℃ of high temperature for provided by the invention, the scheme of installation of the center compression high-temperature piezoelectric accelerometer that output can 360 ° of commutations.6-signal output among the figure; 12-installs and fixes screw; The 13-testee; 14-output can 360 ° of commutations center compression high-temperature piezoelectric accelerometer.Can see that piezoelectric accelerometer 14 can link to each other gib screw 12 easily by central through hole 11 with testee 13.Owing to adopted this fixing means, the high characteristics of center compression high-temperature piezoelectric accelerometer output sensitivity had both been kept, increased the contact stiffness of piezoelectric accelerometer bottom again, the reliability of accelerometer output signal is improved with the testee surface.The internal diameter that screw is installed usually is 4mm, and the external diameter of mounting screw is M4, and signal output 6 is adjustable to direction as shown in the figure, i.e. the required direction of tester.
Below in conjunction with embodiment, further specify progress of the present invention and characteristics, but the present invention never only limits to what embodiment.
Embodiment 1. selects x=0.03 (Me=Ca) for use, the modification lead meta-columbute high-temperature piezoelectric stupalith of y=0.1 (CeO2) replaces piezoceramic material, the usefulness high-temperature electric conduction glue replacement scolding tin that general piezoelectric accelerometer is used, connect drawing lead and drawing electric sheet, replace stainless steel as the material of mass, with vitreum replacement fluoroplastic in the signal output with high specific gravity (tungsten copper) alloy, as the insulating material in the signal output, the structural representation of center compression high-temperature piezoelectric accelerometer that can 360 ° of commutations by output shown in Figure 2 is assembled.
Claims (4)
1. one kind can use under 200 ℃ of high temperature 360 ° commutation center compression piezoelectric accelerometers comprise base, mass, sensitive element, signal output and standing screw, and its feature is at what:
(1) select for use modification lead meta-columbute high temperature ceramic material sensitive to heat-humidity as sensitive element;
(2) the signal output with draw the conducting resinl of using 200 ℃ of high temperature resistant high whats being connected of electric sheet instead;
(3) material of mass adopts hyperbaric tungsten-copper alloy;
(4) shell of signal output and the insulator between the inner core are made by vitreum;
(5) screw is installed and is communicated with, make the position of output cable can 360 ° of commutations with the central through hole of center compression piezoelectric accelerometer.
2. by the described 360 ° of commutation piezoelectric accelerometers that can use under 200 ℃ of high temperature of claim 1, its feature is formed general formula at the described modification lead meta-columbute of what high temperature ceramic material sensitive to heat-humidity and is:
Pb
1-xMe
xNb
2O
6+Yywt％，
Me is Ca in the formula
2+Or Ba
2+, incorporation 0.00＜x＜0.10, y is the rare earth oxide additive, as CeO
2, Sm
2O
3, Nd
2O
3Or TeO
2In a kind of, addition is 0.05～0.30wt%.
3. by the described 360 ° of commutation piezoelectric accelerometers that can use under 200 ℃ of high temperature of claim 2, its feature at the preparation condition of the described modification lead meta-columbute of what high temperature sensitive element is:
(1) synthesis temperature is 800 ℃ of insulations 2 hours;
(2) sintering temperature is 1260～1300 ℃ of insulations 20～30 minutes;
(3) the polarization temperature is 180 ℃, polarizing voltage 5KV/mm.
4. by the described 360 ° of commutations of claim 1 and 200 ℃ of piezoelectric accelerometers that high temperature uses, the internal diameter that its feature is installed screw at what is 3～6mm, and the external diameter that installs and fixes screw is M3～M6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01113448 CN1318736A (en) | 2001-06-15 | 2001-06-15 | All-direction piezoelectric accelerometer capable of being used at temperature as high as 200 deg.C |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 01113448 CN1318736A (en) | 2001-06-15 | 2001-06-15 | All-direction piezoelectric accelerometer capable of being used at temperature as high as 200 deg.C |
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|---|---|
| CN1318736A true CN1318736A (en) | 2001-10-24 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100523766C (en) * | 2005-10-27 | 2009-08-05 | 中国科学院上海硅酸盐研究所 | Output joint of differentiated piezoelectric acceleraometer of resisting moderate and high temperature |
| CN102798460A (en) * | 2012-08-08 | 2012-11-28 | 北京理工大学 | Impact-type piezoelectric acceleration transducer |
| CN107525580A (en) * | 2016-12-08 | 2017-12-29 | 苏州长风航空电子有限公司 | Built-in amplifying circuit annular shearing piezoelectric element structure |
-
2001
- 2001-06-15 CN CN 01113448 patent/CN1318736A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100523766C (en) * | 2005-10-27 | 2009-08-05 | 中国科学院上海硅酸盐研究所 | Output joint of differentiated piezoelectric acceleraometer of resisting moderate and high temperature |
| CN102798460A (en) * | 2012-08-08 | 2012-11-28 | 北京理工大学 | Impact-type piezoelectric acceleration transducer |
| CN107525580A (en) * | 2016-12-08 | 2017-12-29 | 苏州长风航空电子有限公司 | Built-in amplifying circuit annular shearing piezoelectric element structure |
| CN107525580B (en) * | 2016-12-08 | 2019-11-26 | 苏州长风航空电子有限公司 | Built-in amplifying circuit annular shears piezoelectric element structure |
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