CN1315058A - Piezo-actuator - Google Patents
Piezo-actuator Download PDFInfo
- Publication number
- CN1315058A CN1315058A CN00801151A CN00801151A CN1315058A CN 1315058 A CN1315058 A CN 1315058A CN 00801151 A CN00801151 A CN 00801151A CN 00801151 A CN00801151 A CN 00801151A CN 1315058 A CN1315058 A CN 1315058A
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- CN
- China
- Prior art keywords
- actuator
- piezoelectric
- electrode
- thickening part
- zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000007935 neutral effect Effects 0.000 claims abstract description 22
- 230000008719 thickening Effects 0.000 claims description 21
- 238000010276 construction Methods 0.000 claims description 13
- 239000011435 rock Substances 0.000 claims description 11
- 230000004888 barrier function Effects 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims description 2
- 238000007493 shaping process Methods 0.000 abstract 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000013078 crystal Substances 0.000 description 3
- 230000002349 favourable effect Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
- H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/508—Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
Abstract
The invention relates to a piezo-actuator, for example, for actuating a mechanical component. The inventive piezo-actuator is provided with a multilayer structure of piezo-layers (2) and electrodes (3, 4) arranged therebetween. In the instance of a mutual lateral contacting (5, 6) of the electrodes, a neutral phase (7) without an electrode layer is provided, in which fissuring can occur and can be prevented by shaping the multilayer structure thus enabling an increased mechanical stress to be applied in the area of the neutral phases when the piezo-actuator (1) is mounted in a manner that is perpendicular to the layer structure.
Description
Technical merit
The present invention relates to a kind of piezoelectric-actuator according to the described type of independent claims, it for example is used to operate a mechanical component as a valve or analog.
Generally known, utilizing under the situation of so-called piezoelectric effect and can construct piezoelectric element by material with suitable crystal structure.Piezoelectric element carries out an automatic reaction during outside voltage on being applied in, according to crystal structure and voltage application zone, this reaction is the pressure on a predetermined direction or draws.This piezoelectric-actuator can be by multi-ply construction (multilayer cladding plate one executive component) at this, and wherein, these electrodes that are applied in voltage are positioned in respectively between these layers.It should be noted during piezoelectric-actuator in operation, can not allow mechanical stress in layer structure form the crackle of interference effect.
Advantage of the present invention
Start described type, for example can be used to the to operate machine piezoelectric-actuator of member utilizes the sandwich construction that is made of piezoelectric material layer and the electrode settled between them to constitute in an advantageous manner.Alternately under the situation that the side upper contact is connected, form a neutral phase at electrode in the zone between two piezoelectric material layers respectively.Because the electrode of connecting at a side upper contact is integrated in by pectination in this layer structure respectively, therefore, the electrode that accompanies on layer structure direction must be distinguished alternately in relative side upper contact connection.
These can be fully to lead on the relative side by the electrode of contacting at this on a side, otherwise voltage breakdown can cause piezoelectric-actuator to be damaged.When piezoelectric-actuator of operation, promptly, when in layer structure, being applied with a voltage between electrode of opposite, in electrode zone and in the neutrality of access failure electricity different mechanical forces appears in mutually, and they can cause occurring mechanical stress and form crackle in piezoelectric-actuator.
According to the present invention, when clamping piezoelectric-actuator, on purpose in neutral alpha region, be applied with the mechanical stress of raising in an advantageous manner perpendicular to layer structure with the sandwich construction moulding, form to stop crackle.
In a favourable form of implementation, the outer cap rock of at least one of sandwich construction outside on the end face by configuration like this, that is, it has a thickening part in neutral alpha region, and can be so on purpose obtains a prestressing force that has improved at this.This thickening part can for example form by the grinding cap rock with plain mode.
In another favourable form of implementation, between the layer of sandwich construction, settle an insulating barrier, it in neutral alpha region, have respectively a thickening part and with first embodiment in similarly mode work.
Another form of implementation has the electrode of particular configuration in sandwich construction in an advantageous manner, and they have a thickening part equally respectively in neutral alpha region, wherein, in view of different aforementioned forms of implementation, several or all features is made up mutually.
Except that by claims; also can draw these and further feature of the favourable further structure of the present invention by specification and accompanying drawing; wherein; each feature can be independent respectively or a plurality ofly be implemented in form of implementation of the present invention and in other field with the form that makes up below, and itself can be can be protected to be required the enforcement structure protected at this.
Accompanying drawing
Embodiment to piezoelectric-actuator of the present invention is illustrated with reference to the accompanying drawings.Wherein,
Fig. 1 is the cutaway view of a piezoelectric-actuator, and it has the sandwich construction of the layer that is made of piezoelectric ceramic and electrode;
Fig. 2 is the partial sectional view by the layer structure in the neutral alpha region when not applying voltage;
Fig. 3 is the partial sectional view by the layer structure in the neutral alpha region when applying voltage;
Fig. 4 is first embodiment of a piezoelectric-actuator, and one of them outer cap rock has the thickening part on the side in neutral alpha region;
Fig. 5 is second embodiment of a piezoelectric-actuator, and one of them outer cap rock has the thickening part on relative angle in neutral alpha region;
Fig. 6 is the 3rd embodiment of a piezoelectric-actuator, and wherein electrode has the thickening part in neutral alpha region;
Fig. 7 is the 4th embodiment of a piezoelectric-actuator, wherein settles an insulating barrier between layer respectively, and described insulating barrier has the thickening part on the side in neutral alpha region.
The embodiment explanation
Figure 1 illustrates a piezoelectric-actuator 1, it is constructed by the piezoelectric membrane 2 of the quartz material with suitable crystal structure in known manner, like this, utilize so-called piezoelectric effect, when on electrode 3 and 4, applying an external voltage, realize an automatic reaction of piezoelectric-actuator 1 by contact-making surface 5 and 6.
Amplify a zone that shows piezoelectric-actuator 1 by Fig. 2, it shows electrode 3 and 4, wherein, this can be seen that the contacting of electrode 4 and contact-making surface 6.Because electrode 3 has other polarity to keep a spacing with this contact-making surface 6, therefore constituted neutral phase here, they 7 illustrate mutually for example by neutrality in the drawings.Therefore the piezoelectric effect difference of Chu Xianing produces mechanical stress in neutrality phase 7 for above-mentioned reasons and spatially, and these mechanical stresses cause material damage, and it schematically shows with wavy line 8 in the drawings.
Fig. 3 shows zone among the Fig. 2 that applies behind the voltage, and wherein, the automatic reaction of consequent piezoelectric-actuator illustrates with arrow 9 and 10.Can find out that at this elongation in the zone of neutrality phase 7 on arrow 9 directions is little, therefore be created in a power effect of arrow 10 directions, it causes in neutral alpha region 8 and forms crackle.
According to Fig. 4 the first embodiment of the present invention is illustrated, wherein, has settled the cap rock 11 of an outside on this sandwich construction, this cap rock is provided with a thickening part 12 in the zone of neutrality phase 7, and its maximum externally can reach the magnitude of 2 to 8 μ m.Can be by this thickening part 12 at a prestressing force of region generating (Vorspannung) of this neutrality phase 7 when clamping this piezoelectric-actuator 1, it has stoped formation crackle (see figure 3) in the zone 8 of electrode 3 and 4.
Can see second embodiment by Fig. 5, it shows the cap rock 11 of the outside that has thickening part 13, and described thickening part is arranged on the relative bight of piezoelectric-actuator.At this, neutral 7 be configured on the bight equally mutually, because electrode 3 and 4 contacting are realized at the contact-making surface of settling on the bight 14 and a sightless contact-making surface on diagonal by one in this embodiment.
In the embodiment of Fig. 6, by electrode 3 with 4 only neutrality mutually the thickening of the locality in 7 zones play in the neutrality thickening effect in 7 zones mutually.
The embodiment of Fig. 7 shows a piezoelectric-actuator 1, wherein, in the zone of neutrality phase 7 insulating barrier 15 in this extra thickening is being set between the piezoelectric layer 2, so that also bring a prestressing force at this when clamping piezoelectric-actuator 1, its stops crackle formation.
Claims (8)
1. piezoelectric-actuator has:
A sandwich construction of piezoelectric layer (2) and the electrode of settling therebetween (3,4);
The side contacting structure (5,6) that replaces of electrode (3,4), wherein, between two piezoelectric layers, have one and have a neutral phase (7) that does not have electrode layer in by the zone of the electrode of contacting (3,4) on the relative side respectively, and,
A molding structure of sandwich construction can be applied with the mechanical stress of increase by it in this neutrality phase (7) zone when clamping piezoelectric-actuator (1) perpendicular to layer structure.
2. according to the described piezoelectric-actuator of claim 1, it is characterized in that,
The outer cap rock of at least one of sandwich construction (11) outside on the end face by configuration like this, that is, it has a thickening part (12 in neutral phase (7) zone; 13).
3. according to the described piezoelectric-actuator of claim 2, it is characterized in that,
Thickening part (12) is set on the opposite side of cap rock (11) corresponding to the configuration of neutral phase (7).
4. according to the described piezoelectric-actuator of claim 2, it is characterized in that,
Thickening part (13) is set on the bight relative on the diagonal of cap rock (11) corresponding to the configuration of neutral phase (7).
5. according to the described piezoelectric-actuator of one of claim 2 to 4, it is characterized in that,
The thickening part is that the grinding by cap rock constitutes.
6. according to the described piezoelectric-actuator of claim 1, it is characterized in that,
Settled an insulating barrier (15) between (a plurality of or single) layer of sandwich construction, it has a thickening part respectively in the zone of neutral phase (7).
7. according to the described piezoelectric-actuator of claim 1, it is characterized in that,
The electrode of sandwich construction (3,4) has a thickening part respectively in the zone of neutral phase (7).
8. according to the described piezoelectric-actuator of one of claim 2 to 7, it is characterized in that,
Several or all features of these claims make up mutually.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19928177A DE19928177C2 (en) | 1999-06-19 | 1999-06-19 | Piezo actuator |
| DE19928177.7 | 1999-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN1315058A true CN1315058A (en) | 2001-09-26 |
Family
ID=7911880
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN00801151A Pending CN1315058A (en) | 1999-06-19 | 2000-06-19 | Piezo-actuator |
Country Status (7)
| Country | Link |
|---|---|
| EP (1) | EP1110254A1 (en) |
| JP (1) | JP2003522510A (en) |
| KR (1) | KR20010072697A (en) |
| CN (1) | CN1315058A (en) |
| DE (1) | DE19928177C2 (en) |
| HU (1) | HUP0103374A3 (en) |
| WO (1) | WO2000079615A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1774822B (en) * | 2004-06-29 | 2010-05-05 | 西门子公司 | Piezoelectric component with a predetermined breaking point, method for producing the component and use of the component |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10201641A1 (en) | 2002-01-17 | 2003-08-07 | Epcos Ag | Piezoelectric component and method for its production |
| DE10207292B4 (en) * | 2002-02-21 | 2005-08-11 | Siemens Ag | Piezo stack and method for producing a piezo stack |
| DE102005008717A1 (en) | 2005-02-25 | 2006-08-31 | Robert Bosch Gmbh | Actuator module with a piezo actuator |
| DE102007060167A1 (en) | 2007-12-13 | 2009-06-25 | Robert Bosch Gmbh | Piezoelectric actuator with a multilayer structure of piezoelectric elements and a method for its production |
| DE102009058907B4 (en) | 2009-12-17 | 2012-12-13 | Eads Deutschland Gmbh | Piezoelectric actuator and method for operating a piezoelectric actuator, in particular in mobile technical devices |
| DE102011014296A1 (en) * | 2011-03-17 | 2012-09-20 | Epcos Ag | Piezoelectric actuator component and method for producing a piezoelectric Aktorbauelements |
| KR101471185B1 (en) * | 2013-04-11 | 2014-12-11 | 한국기계연구원 | Imprint lithography equipment with self-alignment function of contacting surface and method of imprinting lithography for using the same |
| KR20230139103A (en) | 2022-03-25 | 2023-10-05 | 보명건설 주식회사 | Sewer drainage Canal Non-excavation Partial Repairing Device and Method Using to Repairing Part with Reinforcement of Triple Concrete Structure |
| KR102495695B1 (en) | 2022-05-09 | 2023-02-06 | 박대용 | Sewage pipe non-excavation partial repair and monitoring system |
| KR102547025B1 (en) | 2022-05-09 | 2023-06-26 | 박대용 | Non-excavation partial repair apparatus and method for sewage pipe |
| KR102634118B1 (en) | 2022-12-29 | 2024-02-06 | 삼아건설 주식회사 | Apparatus and method for non-digging partial repair of sewer pipe |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04214686A (en) * | 1990-10-05 | 1992-08-05 | Nec Corp | Electrostrictive effect element |
| JPH04159785A (en) * | 1990-10-23 | 1992-06-02 | Nec Corp | Electrostrictive effect element |
| JP2940376B2 (en) * | 1993-12-24 | 1999-08-25 | 日立プラント建設株式会社 | Stacked piezoelectric actuator |
| JPH08274381A (en) * | 1995-03-31 | 1996-10-18 | Chichibu Onoda Cement Corp | Stacked piezoelectric actuator and its manufacture |
-
1999
- 1999-06-19 DE DE19928177A patent/DE19928177C2/en not_active Expired - Fee Related
-
2000
- 2000-06-19 HU HU0103374A patent/HUP0103374A3/en unknown
- 2000-06-19 KR KR1020017001996A patent/KR20010072697A/en not_active Application Discontinuation
- 2000-06-19 JP JP2001505080A patent/JP2003522510A/en active Pending
- 2000-06-19 WO PCT/DE2000/001929 patent/WO2000079615A1/en not_active Application Discontinuation
- 2000-06-19 CN CN00801151A patent/CN1315058A/en active Pending
- 2000-06-19 EP EP00951223A patent/EP1110254A1/en not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1774822B (en) * | 2004-06-29 | 2010-05-05 | 西门子公司 | Piezoelectric component with a predetermined breaking point, method for producing the component and use of the component |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2003522510A (en) | 2003-07-22 |
| DE19928177C2 (en) | 2001-04-26 |
| DE19928177A1 (en) | 2001-01-11 |
| EP1110254A1 (en) | 2001-06-27 |
| HUP0103374A3 (en) | 2002-03-28 |
| KR20010072697A (en) | 2001-07-31 |
| HUP0103374A2 (en) | 2002-01-28 |
| WO2000079615A1 (en) | 2000-12-28 |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |