CN1313921C - Remote mask layout inspecting method via network - Google Patents

Remote mask layout inspecting method via network Download PDF

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Publication number
CN1313921C
CN1313921C CNB021047197A CN02104719A CN1313921C CN 1313921 C CN1313921 C CN 1313921C CN B021047197 A CNB021047197 A CN B021047197A CN 02104719 A CN02104719 A CN 02104719A CN 1313921 C CN1313921 C CN 1313921C
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China
Prior art keywords
network
client computer
aid
website server
pictures
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Expired - Lifetime
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CNB021047197A
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Chinese (zh)
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CN1437108A (en
Inventor
王瑞明
陈怡旭
刘锦浩
李宗昇
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Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Priority to CNB021047197A priority Critical patent/CN1313921C/en
Publication of CN1437108A publication Critical patent/CN1437108A/en
Application granted granted Critical
Publication of CN1313921C publication Critical patent/CN1313921C/en
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Abstract

The present invention provides a remote mask layout inspecting method via networks, which comprises the following steps: first, a mask layout diagram is stored in a diagram reading computer which is provided with drawing software; a website server which is provided with a figure operation interface simulator based on a network communication protocol is logged on from a client computer via a first network; the diagram reading computer is logged on from the network server via a second network; the drawing software is started by the figure operation interface simulator based on the network communication protocol; by means of a browser on client computer, the drawing software is operated to inspect the mask layout diagram remotely.

Description

Carry out the method for remote mask layout inspecting via network
Technical field
The present invention relates to a kind of method of mask layout inspecting, particularly a kind of method of carrying out remote mask layout inspecting via the Internet.
Background technology
Integrated circuit (IC) design company is after giving the circuit arrangement map that designs the wafer manufacturer manufacturing, usually wafer manufacturer is after mask layout is completed, can carry out mask data figure (Mask DataJobview) program with the aid of pictures, being about to this mask layout delivers integrated circuit (IC) design company and inspects, to confirm this mask layout, after confirming to finish, carry out the next step of mask manufacture again.And in the program of aforementioned conventional, if the client does not possess the mapping software that is used for mask layout, CAD/CAM (computer-aided design (CAD) and computer-aided manufacturing) software as present wafer manufacturer use, then wafer manufacturer only can provide some specific places for the client these mask layouts to be inspected, and both sides need agreement time and place with the aid of pictures earlier.This is very inconvenient and can expend many times and manpower for the client.
The method that solves is to prepare the CAD/CAM software identical with wafer manufacturer by the client, then wafer manufacturer can be sent to client computer in FTP (File Transfer Protocol) mode with the archives of mask layout, to carry out program with the aid of pictures, but thus, the client also must spend money and time and safeguard this CAD/CAM software.No matter and in aforementioned specific place or directly with the aid of pictures on client computer, all need the archives of mask layout to be sent to the locality in the FTP mode by mask design office, this FTP load mode will expend and transmit and the time of downloading archives.Above-mentioned traditional program with the aid of pictures will have influence on the time of whole ic manufacturing process.
There are some shortcomings in above-mentioned traditional method, the firstth, need labor intensive and the time handle, secondly be that the time of whole ic manufacturing process increases, and client's mask layout inspecting at any time, carry out program with the aid of pictures all needs the other designated time at every turn, and the client is brought inconvenience.
Summary of the invention
Therefore the objective of the invention is, a kind of method of carrying out remote mask layout inspecting via the Internet is being provided, make the client can reach time mask layout inspecting fast and easily in any place, shorten the time that mask layout is confirmed, and then shorten the time of whole ic manufacturing process.
For reaching above-mentioned and other purpose of the present invention, the present invention proposes a kind ofly to carry out the method for remote mask layout inspecting via network, comprises the following steps.
At first store mask layout to computing machine with the aid of pictures, this computing machine with the aid of pictures is equipped with mapping software; Login Website server from client computer via first network, this Website server is equipped with the graphic operation interface simulation device of communications protocol Network Based; Login computing machine with the aid of pictures from Website server via second network; Utilize the graphic operation interface simulation device of communications protocol Network Based to open mapping software; And from client computer mask layout is carried out long-range inspecting by the browser operation mapping software on the client computer.
Below in conjunction with accompanying drawing and preferred embodiment explanation the present invention.
Description of drawings
As follows in order better to understand above and other objects of the present invention, feature and advantage to description of drawings:
Fig. 1 carries out the employed hardware and software of method of remote mask layout inspecting and the system block diagram of network for of the present invention via the Internet.
Fig. 2 is the process flow diagram that carries out the method for remote mask layout inspecting via the Internet of the present invention.
Symbol description
10, Website server; 20, computing machine with the aid of pictures;
30, fire wall; 40, client computer;
12, graphic operation interface simulation device;
22, mapping software; 24, storage device;
26, mask layout; 42, browser;
60, first network; 70, second network.
Embodiment
Of the present inventionly carrying out the method for remote mask layout inspecting via network, is new and effective method, can provide the client to reach time mask layout inspecting fast and easily in any place.
Fig. 1 carries out the employed system block diagram of remote mask layout inspecting for of the present invention via network.Shown in the 1st figure, this system comprises Website server 10, computing machine with the aid of pictures 20, fire wall 30 and client computer 40, wherein, the connection of client computer 40 and Website server 10, be to see through first network 60, as Internet (Internet), Intranet (Intranet), LAN (local area network, LAN), Wide Area Network (wide area network, WAN) or the network type of other type.Spendable network communication protocol comprises, hypertext transmission communication agreement (http), ssl protocol (Security Socket Layer), long-range communications protocol (telnet), the long-range executive routine (rexec of logining, remote execute), the long-range (rlogin that logins, remote login), remote command (rcmd, remote command) or long-range shell (rsh, remote shell); And being connected of Website server 10 and computing machine 20 with the aid of pictures, then be to see through second network 70, as Internet (Internet), Intranet (Intranet), LAN (local area network, LAN), Wide Area Network (wide area network, WAN) or the network type of other type.Spendable network communication protocol comprises, hypertext transmission communication agreement (http), ssl protocol (Security Socket Layer), long-range communications protocol (telnet), the long-range executive routine (rexec of logining, remote execute), the long-range (rlogin that logins, remote login), remote command (rcmd, remote command) or long-range shell (rsh, remoteshell).Website server 10 and computing machine with the aid of pictures 20 can be the computer host systems of any pattern, and also or the main frame of multiple pattern or server are in series, employed job platform can be a UNIX operating system.The graphic operation interface simulation device 12 of communications protocol Network Based is installed, as X Window emulator (Web-base X-windows emulation) in the Website server 10.
Mapping software 22 is installed as CAD/CAM (computer-aided design (CAD) and computer-aided manufacturing software) software in the computing machine 20 with the aid of pictures, and comprise storage device 24 as hard disk to store mask layout Figure 26.Client computer 40 can be the computer host system of any pattern, can use the job platform of any pattern, and a browser 40 is installed in it.The fire wall 30 of present embodiment is between Website server 10 and client computer 40, and between Website server 10 and computing machine with the aid of pictures 20, to be used for stoping hacker attacks.
For example, when client computer 40 is logined Website server 10 via first network 60, must be through fire wall 30, wherein, fire wall 30 has first and detects rule, whether can login Website server 10 via first network 60 in order to limit client computer 40.This first detection rule is shown in table 1 fire wall setting principle, comprise that source procotol (IP) is the network address of client computer 40, the destination network agreement is the network address of Website server 10, the data transmission system that reaches client computer 40 and Website server 10 meets a network security transmission agreement, as the SSL communications protocol.
In addition, when Website server 10 is logined computing machine 20 with the aid of pictures via second network 70, also must pass through fire wall 30, wherein, fire wall 30 has second and detects rule, whether can login computing machine 20 with the aid of pictures via second network 70 from Website server 10 in order to limit client computer 40.This second detection rule is as shown in table 1, comprise that source procotol (IP) is the network address of Website server 10, the destination network agreement is the network address of computing machine 20 with the aid of pictures, and the data transmission system that reaches 20 in the webserver 10 and computing machine with the aid of pictures meets the long-range communications protocol (telnet) of logining.
Table 1
The fire wall setting principle The network address of source procotol The network address of destination network agreement Network protocol service
First detects rule Client computer Website server The SSL communications protocol
Second detects rule Website server Computing machine with the aid of pictures The long-range communications protocol of logining
Change speech, when the user when client computer 40 is logined Website server 10 via network 60, must must use the communications protocol of encrypting to limit through fire wall 30, as ssl protocol (SecureSocket Layer).When the user when Website server is logined computing machine 20 with the aid of pictures via Internet 70, must be through fire wall 30 to limit the long-range service of logining (telnet) that only can use port numbering 23.
The 2nd figure is the method flow diagram that carries out remote mask layout inspecting via network, is simplified illustration, only lists the situation that single client uses client computer 40 herein.Yet for industry technician, this system also can serve simultaneously and use a plurality of clients of computing machine separately, carries out program as described below.
At first, according to step S100, will be stored to mask layout Figure 26 that mapping software 22 is completed as CAD/CAM software in the computing machine with the aid of pictures 20 as storage device 24.
Afterwards, optionally carry out (inessential) step S102, the notice client computer carries out program with the aid of pictures, as foundation step S102A, notify with E-mail mode, step S102B also provides the transaction authentication number TID (transaction id) and the related data of each product of client of this mask layout Figure 26, as the reference table (reference table) of mask layout.
Then,,, use browser 42 to login Website server 10, therebetween for stoping hacker attacks must use the communications protocol of encrypting to limit, as ssl protocol through fire wall 30 via first network 60 from client computer 40 by first account number according to step S104.
Secondly, according to step S106, by second account number, login computing machine 20 with the aid of pictures from Website server 10 via second network 70, as foundation step S106A, login with the aid of pictures computing machine 20 via arbitrary network on-line service that Website server provides via second network 70 from Website server 10 with the transaction authentication number TID and second account number.Therebetween for stoping hacker attacks only can use the long-range service of logining (telnet) with qualification through fire wall 30.
According to step S108, the graphic operation interface simulation device 12 that uses communications protocol Network Based is opened the mapping software 22 of computing machine 20 with the aid of pictures, as CAD/CAM software as the X Window emulator then.
At last, according to step S110, carry out long-range inspecting from 40 couples of mask layout Figure 26 of client computer by the browser operation mapping software of client computer.
As mentioned above, network in present embodiment program with the aid of pictures, system is an example with UNIX operating system and X Window, and be applicable to that a plurality of users carry out long-range inspecting simultaneously, wafer manufacturer can be accepted customer consignment manufacturing from all parts of the world simultaneously, after each client's mask layout is completed, can notify each client with the aid of pictures respectively, and the transaction authentication number TID of the mask layout of each its product of client is provided.So, each client only can use its in advance each given first account number login Website server 10 and each second account number is logined computing machine 20 with the aid of pictures.And be the rule of depositing of coming each other mask layout of layout according to each other account number with the mode that mask layout is stored to computing machine with the aid of pictures, so each account number with the aid of pictures only can be seen the mask layout in this account number.
The program with the aid of pictures of invention has multiple advantages, comprising: make the client can reach the time in any place fast and easily with the aid of pictures; The client need not spend money and CAD/CAM software is bought and safeguarded to the time; Shorten the time that mask layout is confirmed, and then shorten the time of whole ic manufacturing process.
Though the present invention has done above explanation with preferred embodiment; yet above embodiment can not limit the present invention; any industry technician; without departing from the spirit and scope of the present invention; can make some changes and improvements, so protection scope of the present invention is as the criterion with the scope that claims were defined.

Claims (16)

1. one kind is carried out the method for remote mask layout inspecting via network, comprises the following steps:
Store mask layout to counter with the aid of pictures, this counter with the aid of pictures is equipped with mapping software;
Login Website server from client's counter via first network, this Website server is equipped with the graphic operation interface simulation device of communications protocol Network Based, wherein, when this client computer is logined this Website server via this first network certainly, must be through a fire wall;
Login this computing machine with the aid of pictures from this Website server via second network, wherein, when this Website server is logined this computing machine with the aid of pictures via this second network certainly, must be through this fire wall;
Utilize the graphic operation interface simulation device of this communications protocol Network Based to open this mapping software; And
This mapping software carries out long-range inspecting from this client computer to this mask layout by the browser operation on this client computer.
2. the method for claim 1, wherein this mapping software comprises computer-aided design (CAD) and computer-aided manufacturing software.
3. the method for claim 1, wherein this first network is selected from Internet, Intranet, LAN or Wide Area Network.
The method of claim 1, wherein the employed network communication protocol of this first network be selected from hypertext transmission communication agreement, long-rangely login communications protocol, long-range executive routine, long-rangely login, remote command or long-range shell.
5. the method for claim 1, wherein this second network is selected from Internet, Intranet, LAN or Wide Area Network.
The method of claim 1, wherein the employed network communication protocol of this second network be selected from hypertext transmission communication agreement, long-rangely login communications protocol, long-range executive routine, long-rangely login, remote command or long-range shell.
7. the method for claim 1, wherein this client computer is imported first account number to login this Website server via this first network.
8. the method for claim 1, wherein this client computer is imported second account number to login this computing machine with the aid of pictures via this second network.
9. the method for claim 1, wherein also be included in and store this mask layout to this computing machine with the aid of pictures, notify this client computer to carry out long-range inspecting, and the transaction authentication number and the related data of this mask layout are provided.
10. method as claimed in claim 9, wherein, this notice is to carry out with E-mail mode.
11. method as claimed in claim 9, wherein, this client computer also comprises this transaction authentication number of input.
12. the method for claim 1, wherein this fire wall has the first detection rule, whether can login this Website server via this first network in order to limit this client computer.
13. method as claimed in claim 12, wherein, this first detection rule comprises the network address of source procotol for this client computer, the destination network agreement is the network address of this Website server, and the data transmission of this client computer and this Website server meets the network security transmission agreement.
14. method as claimed in claim 13, wherein, this network security transmission agreement comprises the SSL communications protocol.
15. the method for claim 1, wherein this fire wall has the second detection rule, whether can login this computing machine with the aid of pictures via this second network from this Website server in order to limit this client computer.
16. method as claimed in claim 15, wherein, this second detection rule comprises the network address of source procotol for this Website server, the destination network agreement is the network address of this computing machine with the aid of pictures, and the data transmission of this webserver and this intercomputer with the aid of pictures meets this long-range communications protocol of logining.
CNB021047197A 2002-02-09 2002-02-09 Remote mask layout inspecting method via network Expired - Lifetime CN1313921C (en)

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CN1313921C true CN1313921C (en) 2007-05-02

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100367484C (en) * 2004-12-22 2008-02-06 盟图科技股份有限公司 Method and system for measuring width of junction in graph of mask designed

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1199475A (en) * 1995-10-16 1998-11-18 英国电讯有限公司 Remote access data visualisation system
CN1227689A (en) * 1996-08-03 1999-09-01 国际商业机器公司 System and method for controlling data access in a computer network
GB2339034A (en) * 1998-03-24 2000-01-12 Symicron Limited Providing browser access to an information database stored remote from an Internet Service Provider
GB2341523A (en) * 1998-09-12 2000-03-15 Ibm Establishing communication in a computer network
CN1260542A (en) * 1998-07-17 2000-07-19 特克特朗尼克公司 Remote monitoring and controlling based on wanwei network for measuring instrument

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1199475A (en) * 1995-10-16 1998-11-18 英国电讯有限公司 Remote access data visualisation system
CN1227689A (en) * 1996-08-03 1999-09-01 国际商业机器公司 System and method for controlling data access in a computer network
GB2339034A (en) * 1998-03-24 2000-01-12 Symicron Limited Providing browser access to an information database stored remote from an Internet Service Provider
CN1260542A (en) * 1998-07-17 2000-07-19 特克特朗尼克公司 Remote monitoring and controlling based on wanwei network for measuring instrument
GB2341523A (en) * 1998-09-12 2000-03-15 Ibm Establishing communication in a computer network

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