CN1308700C - Electro-optical modulation laser distance measuring method and device - Google Patents
Electro-optical modulation laser distance measuring method and device Download PDFInfo
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Abstract
一种电光调制激光测距方法及其装置,该方法是利用激光的偏振特性作为信息载体来进行激光测距:利用单轴晶体的横向电光效应,配合偏振分光器和偏振检偏器,在单轴晶体上平行光轴方向施加半波电压时,利用其扭转线偏振光偏振方向90°的特性,提取出一个以激光往返待测距离所需时间t为脉宽的光脉冲。本发明克服了现有测距方法由光电转换过程和电路系统本身引入的误差。本发明结构简单易行,操作方便,不受环境影响,抗干扰能力强,测量距离范围广,最近可测几米的距离,在激光器能量较高的情况下,最远可测10千米的距离。测量精度高,可达到厘米级的测量精度。
An electro-optical modulated laser ranging method and device, the method uses the polarization characteristics of laser as an information carrier to perform laser ranging: using the transverse electro-optical effect of a uniaxial crystal, in conjunction with a polarization beam splitter and a polarization analyzer, when a half-wave voltage is applied to the uniaxial crystal in a direction parallel to the optical axis, the characteristic of twisting the polarization direction of linear polarized light by 90° is utilized to extract a light pulse with a pulse width of the time t required for the laser to travel back and forth to the distance to be measured. The present invention overcomes the errors introduced by the photoelectric conversion process and the circuit system itself in the existing ranging method. The present invention has a simple structure, is easy to operate, is not affected by the environment, has strong anti-interference ability, and has a wide range of measuring distances. The closest distance that can be measured is a few meters. When the laser energy is high, the farthest distance that can be measured is 10 kilometers. The measurement accuracy is high, and the measurement accuracy can reach centimeter level.
Description
技术领域technical field
本发明涉及激光测距,特别是一种电光调制激光测距方法及其装置,可应用于工农业生产、军事、通信、遥感等诸多领域。The invention relates to laser ranging, in particular to an electro-optical modulation laser ranging method and its device, which can be applied to many fields such as industrial and agricultural production, military affairs, communication, and remote sensing.
背景技术Background technique
对距离的高精度测量是国家现代化建设诸多领域的关键技术之一。随着科技的发展,对距离测量的范围和精度要求越来越高。激光作为具有极高单色性、准直性、相干性的信息载体,成为了距离测量的首选工具。目前国内外先进的测距仪均利用激光作为信息载体来提高测距的精确度。The high-precision measurement of distance is one of the key technologies in many fields of national modernization. With the development of science and technology, the requirements for the range and accuracy of distance measurement are getting higher and higher. As an information carrier with extremely high monochromaticity, collimation, and coherence, laser has become the preferred tool for distance measurement. At present, the advanced range finders at home and abroad all use laser as the information carrier to improve the accuracy of distance measurement.
在先技术[1](参见Kozo Ohtani,Misuru Baba,A rangefindingapproach by detecting the position and the incident angle of alight-stripe,IEEE Instru.and Mea.Techno.Conf.2002)是一种几何光学的测距方法。激光器发射激光束,经目标反射后被PSD或CCD接收,然后根据接收到的光斑位置和激光器与接收器之间的几何位置关系,来计算目标与探测器之间距离。这种方法主要用于工业上的面型轮廓测量、2D/3D面型重构以及定位等,测量相对精度为0.85%左右,只能测很短的距离。随着距离的增加,精度急剧下降。The prior art [1] (see Kozo Ohtani, Misuru Baba, A range finding approach by detecting the position and the incident angle of alight-stripe, IEEE Instru.and Mea.Techno.Conf.2002) is a geometric optics ranging method . The laser emits a laser beam that is reflected by the target and is received by the PSD or CCD, and then calculates the distance between the target and the detector based on the received spot position and the geometric positional relationship between the laser and the receiver. This method is mainly used in industrial surface profile measurement, 2D/3D surface reconstruction and positioning, etc. The relative accuracy of measurement is about 0.85%, and it can only measure a very short distance. As the distance increases, the accuracy drops sharply.
在先技术[2](参见Raimo Ahola,Risto Myllyla,A new method formeasuring the time-of-flight in fast laser range finding,[J].Proc.SPIE vol.654,pp19-,1986)是一种利用光脉冲飞行时间的测距方法。由脉冲激光器发出一持续时间很短的脉冲激光,称之为主波。经过待测距离L后射向被测目标,被目标反射回来的脉冲激光称之为回波,回波返回测距仪后被光电探测器接收,根据主波信号和回波信号之间的时间间隔,即激光脉冲从激光器发射到被目标反射回来的往返时间t,就可以算出待测目标的距离,即L=ct/2,其中c为光速。这种方法除需要较高性能的激光器外,还需复杂的电路处理系统。首先要将部分主波光脉冲的能量转化为电脉冲,整形后经门控电路触发计数器,开始对时钟振荡器发出的时间脉冲个数进行计数;然后回波信号到达后被探测器再次转化为电信号,经过同样的电学处理过程,停止对时间脉冲信号的计数,由时间信号脉冲的个数确定光脉冲往返时间t。在光信号转化为电信号的过程中及对电信号的电路处理系统中都会引入很多误差。The prior art [2] (see Raimo Ahola, Risto Myllyla, A new method forming the time-of-flight in fast laser range finding, [J].Proc.SPIE vol.654, pp19-, 1986) is a Ranging method of light pulse time-of-flight. A pulse laser with a short duration is emitted by the pulse laser, which is called the main wave. After passing the distance L to be measured, it shoots to the target to be measured. The pulsed laser reflected by the target is called an echo. The echo returns to the distance meter and is received by the photoelectric detector. According to the time between the main wave signal and the echo signal Interval, that is, the round-trip time t from when the laser pulse is emitted from the laser to when it is reflected by the target, the distance to the target to be measured can be calculated, that is, L=ct/2, where c is the speed of light. This method requires not only a high-performance laser, but also a complex circuit processing system. First, part of the energy of the main wave light pulse is converted into an electrical pulse, and after shaping, the counter is triggered by a gating circuit to start counting the number of time pulses sent by the clock oscillator; then the echo signal is converted into an electrical pulse again by the detector after it arrives. After the signal undergoes the same electrical process, the counting of the time pulse signal is stopped, and the round-trip time t of the light pulse is determined by the number of time signal pulses. Many errors will be introduced in the process of converting optical signals into electrical signals and in the circuit processing system of electrical signals.
在先技术[3](参见Fujima I,Seta K,Matsumoto H and O’ishi T1988GHz traveling-wave optical modulator for precision distancemeasurement Proc.SPIE vol 889 pp 86-90)是一种利用连续激光相位信息的测距方法。相位激光测距通过测量高频调制相位差来实现测距。仪器中的光源发出连续光,通过调制器调制后成为调制光射向目标,调制光的光强随时间作周期变化,采用正弦波调制,测定光波往返过程中的正弦波整周期数及不足一个周期的正弦函数的相位,就可确定光波的往返时间的间隔t,从而计算出所测距离。这种方法仍需要将光信号转化为电信号后经电路系统来处理,由电子比相器比较发射和接受正弦波的相位差,而且还需增加精密调制正弦光强的电学装置。The prior art [3] (see Fujima I, Seta K, Matsumoto H and O'ishi T1988GHz traveling-wave optical modulator for precision distancemeasurement Proc. SPIE vol 889 pp 86-90) is a distance measurement using continuous laser phase information method. Phase laser ranging achieves ranging by measuring the phase difference of high-frequency modulation. The light source in the instrument emits continuous light, which is modulated by the modulator to become modulated light and shoots to the target. The light intensity of the modulated light changes periodically with time, and the sine wave modulation is used to measure the number of full cycles of the sine wave during the round trip of the light wave and less than one The phase of the periodic sine function can determine the interval t of the round-trip time of the light wave, and thus calculate the measured distance. This method still needs to convert the optical signal into an electrical signal and then process it through the circuit system. The phase difference between the emitted and received sine waves is compared by an electronic phase comparator, and an electrical device for precisely modulating the sinusoidal light intensity is also required.
在先技术[4](参见S F Collins,M M Murphy,K T V Grattan,etal.Asimple laser diode ranging scheme using an intensity modulatedFMCW approach[J].Meas.and Tech.,1993,4:1437-1439)是一种利用连续激光频率信息的测距方法。连续波调频激光测距原理是通过发射一频率连续可调的激光,通过测量接收到经目标反射回来激光的频率来推算距离。接收光与发射光由于啁啾而存在频率漂移,所以在混频器中将产生拍频,这个拍频与待测距离成正比。这种方法仍需要将光信号转化为电信号后经电路系统来处理,而且还需增加调节激光频率的附加电路系统。Prior technology [4] (see S F Collins, M M Murphy, K T V Grattan, et al. Asimple laser diode ranging scheme using an intensity modulated FMCW approach [J]. Meas. and Tech., 1993, 4: 1437-1439 ) is a ranging method using continuous laser frequency information. The principle of continuous wave FM laser ranging is to calculate the distance by emitting a continuously adjustable laser frequency and measuring the frequency of the received laser light reflected back from the target. There is a frequency drift between the received light and the emitted light due to chirp, so a beat frequency will be generated in the mixer, and this beat frequency is proportional to the distance to be measured. This method still needs to convert the optical signal into an electrical signal and then process it through the circuit system, and also needs to add an additional circuit system for adjusting the laser frequency.
发明内容:Invention content:
本发明要解决的技术问题在于克服上述在先前技术的不足,提供一种电光调制激光测距方法及其装置,以避免引入了复杂的电路系统,克服由光电转换过程和电路系统引入的误差。The technical problem to be solved by the present invention is to overcome the above-mentioned deficiencies in the prior art, provide an electro-optical modulation laser ranging method and its device, avoid the introduction of complex circuit systems, and overcome the errors introduced by the photoelectric conversion process and circuit system.
本发明的技术解决方案如下:Technical solution of the present invention is as follows:
一种电光调制激光测距方法,其特征是利用激光的偏振特性作为待测距离信息的载体,当在单轴电光晶体上平行光轴方向加半波电压的同时,在光路中的偏振分光器、单轴电光晶体、补偿晶体和偏振检偏器的作用,将往返于单轴电光晶体和待测物体之间的光束截断为脉宽t的矩形光脉冲,则单轴电光晶体和待测物体之间的距离L:An electro-optic modulation laser ranging method, characterized in that the polarization characteristics of the laser are used as the carrier of the distance information to be measured. , the uniaxial electro-optic crystal, the compensation crystal and the polarization analyzer, the light beam going back and forth between the uniaxial electro-optic crystal and the object to be measured is cut into a rectangular optical pulse with a pulse width t, then the uniaxial electro-optic crystal and the object to be measured The distance L between:
其中Vc为光在空气中的速度。where Vc is the speed of light in air.
实施上述电光调制激光测距方法的电光调制激光测距装置,特征在于其构成:包括一台输出准直连续激光的激光器,沿光束前进方向依次是偏振分光器、单轴电光晶体、补偿晶体、偏振检偏器,所述的单轴电光晶体及其补偿晶体选用同样大小的长方体LiNbO3晶体,边长b>a=c,且使光平行b边通过晶体,一对电极片紧贴在所述的单轴电光晶体的两b×c平面上,半波电压通过电极片垂直于b边加在单轴电光晶体上,所述的偏振分光器的起偏方向和偏振检偏器的检偏方向相互平行或相互垂直,单轴电光晶体和补偿晶体的光轴相互垂直放置,并且使二者的光轴方向均和偏振分光器的起偏方向、偏振检偏器检偏方向分别成45°,在偏振分光器的回波反射方向设置一探测器。The electro-optic modulation laser distance measuring device implementing the above-mentioned electro-optic modulation laser distance measurement method is characterized in that it consists of a laser that outputs a collimated continuous laser, and along the beam advancing direction are a polarization beam splitter, a uniaxial electro-optic crystal, a compensation crystal, Polarization analyzer, the uniaxial electro-optic crystal and its compensation crystal are cuboid LiNbO 3 crystals of the same size, side length b>a=c, and the light passes through the crystal parallel to side b, and a pair of electrode sheets are closely attached to the On the two b×c planes of the uniaxial electro-optic crystal, the half-wave voltage is applied to the uniaxial electro-optic crystal through the electrode plate perpendicular to the side b, and the polarization direction of the polarization beam splitter and the polarization analyzer of the polarization analyzer The directions are parallel or perpendicular to each other, the optical axes of the uniaxial electro-optic crystal and the compensation crystal are placed perpendicular to each other, and the directions of the optical axes of the two are 45° to the polarization direction of the polarization beam splitter and the analysis direction of the polarization analyzer , and a detector is arranged in the echo reflection direction of the polarization beam splitter.
本发明的技术效果:Technical effect of the present invention:
与在先技术相比:在先技术[1]是微短距离的测量方法,随着测量距离的增加,精度急剧下降,不适用大范围的距离测量;有广泛应用的在先技术[2][3][4]均需要将光信号转化为电信号来进行待测距离信息的分析和提取,不但在将光学问题转化为电学问题的过程中会引入多余的误差,而且在转化为电学问题后,大大增加了装置的复杂程度,同时又引入了许多电学方面的误差。与在先技术相比,本发明结构简单易行,操作方便,不受环境影响,抗干扰能力强,测量距离范围广,最近可测几米的距离,在激光器能量较高的情况下,最远可测10千米的距离。测量精度高,可达到厘米级的测量精度。Compared with the prior art: the prior art [1] is a micro-short distance measurement method, with the increase of the measurement distance, the accuracy drops sharply, and it is not suitable for large-scale distance measurement; there is a widely used prior art [2] [3][4] need to transform the optical signal into an electrical signal to analyze and extract the distance information to be measured. Not only will redundant errors be introduced in the process of converting optical problems into electrical problems, but also Finally, the complexity of the device is greatly increased, and many electrical errors are introduced at the same time. Compared with the prior art, the present invention is simple in structure, easy to operate, not affected by the environment, strong in anti-interference ability, wide in range of measuring distance, the nearest distance of several meters can be measured, and in the case of high laser energy, the furthest Can measure the distance of 10 kilometers. The measurement accuracy is high and can reach centimeter-level measurement accuracy.
附图说明:Description of drawings:
图1是本发明基本思路的示意图。Fig. 1 is a schematic diagram of the basic idea of the present invention.
图2是本发明原理的结构示意图。Fig. 2 is a structural schematic diagram of the principle of the present invention.
图3是本发明中各装置的结构和放置示意图。Fig. 3 is a schematic diagram of the structure and placement of each device in the present invention.
具体实施方式:Detailed ways:
下面结合附图和实施例对本发明作进一步说明。The present invention will be further described below in conjunction with drawings and embodiments.
本发明基本思想如图1所示,激光器发射出一束高准直性连续激光,遇到待测物体后反射沿原路返回。此时如果能在光源端“瞬时”插入一个与光传播方向成45°角的反射镜,使其反射面面向待测物体,则此时激光器发出的光被隔断,由待测物体反射回来的光也被隔断,同时被反射镜反射到另一方向,两端被截断的光束形成一矩形光脉冲,脉冲宽度为t,即为光由反射镜出发到待测物体反射回来再次到达反射镜所需的时间。由探测器接收此光脉冲,求得时间t,则可得待测距离L=vct/2,其中Vc为光在空气中的传播速度。本发明即是实现上述“瞬时”插入反射镜的功能。The basic idea of the present invention is shown in Figure 1. The laser emits a beam of highly collimated continuous laser light, which returns along the original path after encountering the object to be measured. At this time, if a reflector at an angle of 45° to the light propagation direction can be inserted "instantaneously" at the light source end, so that the reflective surface faces the object to be measured, then the light emitted by the laser is cut off at this time, and the light reflected back by the object to be measured The light is also cut off and reflected to the other direction by the reflector at the same time. The beams cut off at both ends form a rectangular light pulse with a pulse width of t, which is the time when the light starts from the reflector to the object to be measured and reflects back to the reflector again. required time. The light pulse is received by the detector, and the time t is obtained, then the distance to be measured can be L=vct/2, where Vc is the propagation speed of light in the air. The present invention realizes the above-mentioned function of "instantaneously" inserting the reflector.
本发明的基本结构如图2、3所示,由图可见,本发明实施所述电光调制激光测距方法的电光调制激光测距装置,其构成:包括一台输出准直连续激光的激光器1,沿光束前进方向依次是偏振分光器2、单轴电光晶体3、补偿晶体5、偏振检偏器6,所述的单轴电光晶体3及其补偿晶体5选用同样大小的长方体LiNbO3晶体,边长b>a=c,且使光平行b边通过晶体,一对电极片4紧贴在所述的单轴电光晶体3的两b×c平面上,半波电压通过电极片4垂直于b边加在单轴电光晶体3上,所述的偏振分光器2的起偏方向和偏振检偏器6的检偏方向相互平行或相互垂直,单轴电光晶体3和补偿晶体5的光轴相互垂直放置,并且使二者的光轴方向均和偏振分光器2的起偏方向、偏振检偏器6检偏方向分别成45°,在偏振分光器2的回波反射方向设置一探测器8。The basic structure of the present invention is shown in Figures 2 and 3. As can be seen from the figures, the electro-optic modulation laser distance measuring device for implementing the electro-optic modulation laser distance measurement method in the present invention consists of a laser 1 outputting a collimated continuous laser , followed by a polarization beam splitter 2, a uniaxial electro-optic crystal 3, a compensation crystal 5, and a polarization analyzer 6 along the beam advancing direction, and the uniaxial electro-optic crystal 3 and its compensation crystal 5 are cuboid LiNbO crystals of the same size, Side length b>a=c, and make the light pass through the crystal parallel to side b, a pair of electrode sheets 4 are close to the two b×c planes of the uniaxial electro-optic crystal 3, and the half-wave voltage passes through the electrode sheet 4 perpendicular to Side b is added on the uniaxial electro-optic crystal 3, the polarization direction of the polarization beam splitter 2 and the polarization analyzer 6 are parallel to each other or perpendicular to each other, the optical axis of the uniaxial electro-optic crystal 3 and the compensation crystal 5 Place them perpendicular to each other, and make the optical axis directions of the two and the polarization direction of the polarization beam splitter 2 and the polarization analysis direction of the polarization analyzer 6 respectively be 45°, and a detector is arranged in the echo reflection direction of the polarization beam splitter 2 8.
其中作为光源的连续波激光器1要具有较高的能量,以满足较远距离测量的需求。The continuous wave laser 1 used as the light source should have higher energy to meet the requirement of longer distance measurement.
所说偏振分光器2有两个作用:第一,将激光器1发射出的原始出射光A变为偏振方向和起偏器起偏方向平行的线偏振光B;第二,当由待测物体反射回来的线偏振回光F偏振方向和起偏器起偏方向垂直时,将回光F反射偏离出原光路,以便探测。基于以上原因,偏振分光器2应选用晶体材料制成的偏振分束器结构,如格兰棱镜等结构。偏振分光器2紧接激光器1放置在激光器1出光端,使原始出射光A垂直入射其表面。偏振分光器2的起偏方向2C沿图3中坐标x’方向,当无规偏振光A射入其中后,分为偏振方向相互垂直的两束光B和W1,沿起偏方向x’偏振的线偏振光B沿原光路穿过偏振分光器2,沿y’方向偏振的线偏振光W1成为无用光,偏离原光路出射。同时,当由待测物体反射回来的回光F偏振方向和偏振分光器2起偏方向x’平行时,回光F沿原光路穿过偏振分光器2,当回光F偏振方向和x’垂直时,回光F被偏振分光器2反射出原光路,进入探测器8。Said polarizing beam splitter 2 has two functions: the first is to change the original outgoing light A emitted by the laser 1 into linearly polarized light B whose polarization direction is parallel to the polarization direction of the polarizer; When the polarization direction of the reflected linearly polarized return light F is perpendicular to the polarization direction of the polarizer, the return light F is reflected and deviated from the original optical path for detection. Based on the above reasons, the polarizing beam splitter 2 should use a polarizing beam splitter structure made of crystal material, such as a Glan prism. The polarizing beam splitter 2 is placed next to the laser 1 at the light output end of the laser 1, so that the original outgoing light A is vertically incident on its surface. The polarization direction 2C of the polarizing beam splitter 2 is along the coordinate x' direction in Fig. 3, when random polarized light A enters it, it is divided into two beams of light B and W1 whose polarization directions are perpendicular to each other, and polarized along the polarization direction x' The linearly polarized light B passes through the polarizing beam splitter 2 along the original optical path, and the linearly polarized light W1 polarized along the y' direction becomes useless light, which deviates from the original optical path and exits. At the same time, when the polarization direction of the return light F reflected by the object to be measured is parallel to the polarization direction x' of the polarization beam splitter 2, the return light F passes through the polarization beam splitter 2 along the original optical path, and when the polarization direction of the return light F is parallel to the polarization direction x' When vertical, the return light F is reflected by the polarization beam splitter 2 out of the original optical path and enters the detector 8 .
所说单轴电光晶体3作用为:结合补偿晶体5共同作用,当在单轴电光晶体3上加半波电压V时,使依次通过单轴电光晶体3和补偿晶体5的线偏振光偏振方向扭转90°角,从而使从补偿晶体5出射的线偏振光C和从单轴电光晶体3入射的线偏振光B偏振方向相互垂直。单轴电光晶体3应选用具有横向电光调制性能的单轴晶体,如铌酸锂、钽酸锂等,其形状是长方体,几何尺寸为a×b×c,其中b>c。a和b之间无严格要求,因为激光光斑为圆形,从减小尺寸和节约材料的方面考虑,应使a=b。单轴电光晶体3上所加的半波电压V大小正比于晶体尺寸比a/b,因此,要得到较低的半波电压V,应该在满足允许激光光斑顺利通过ab面而选择最小边长a的条件下,尽量使b>a,但同时晶体边长b受到所得晶体最大长度的限制。长方体单轴电光晶体3放置方向使边长b平行于坐标轴z方向,边长a平行y方向,边长c平行x方向,使线偏振光B垂直入射到两个a×c面上。晶体晶轴方向3C选取沿坐标轴y方向,与偏振分光器2晶轴方向2C成45°角放置,同时垂直于单轴电光晶体3的两个b×c平面。一对电极片4分别贴在单轴电光晶体3的两个b×c平面上,大小以刚好覆盖两个b×c平面为佳。当在电极片4上加电压时,晶体中的电场方向平行于晶轴3C方向。The function of the uniaxial electro-optic crystal 3 is: combined with the compensation crystal 5, when a half-wave voltage V is applied to the uniaxial electro-optic crystal 3, the polarization direction of the linearly polarized light passing through the uniaxial electro-optic crystal 3 and the compensation crystal 5 in turn The angle is twisted by 90° so that the polarization directions of the linearly polarized light C emitted from the compensation crystal 5 and the linearly polarized light B incident from the uniaxial electro-optic crystal 3 are perpendicular to each other. The uniaxial electro-optic crystal 3 should be a uniaxial crystal with transverse electro-optic modulation properties, such as lithium niobate, lithium tantalate, etc., whose shape is a cuboid and whose geometric dimensions are a×b×c, where b>c. There is no strict requirement between a and b, because the laser spot is circular, from the aspect of size reduction and material saving, a=b should be made. The half-wave voltage V applied on the uniaxial electro-optic crystal 3 is proportional to the crystal size ratio a/b. Therefore, to obtain a lower half-wave voltage V, the minimum side length should be selected to allow the laser spot to pass through the ab plane smoothly Under the condition of a, try to make b>a, but at the same time, the crystal side length b is limited by the maximum length of the obtained crystal. The cuboid uniaxial electro-optic crystal 3 is placed in such a direction that the side length b is parallel to the coordinate axis z direction, the side length a is parallel to the y direction, and the side length c is parallel to the x direction, so that the linearly polarized light B is perpendicularly incident on the two a×c planes. The crystal axis direction 3C is selected along the coordinate axis y direction, placed at an angle of 45° to the crystal axis direction 2C of the polarizing beam splitter 2, and perpendicular to the two b×c planes of the uniaxial electro-optic crystal 3. A pair of electrode sheets 4 are respectively pasted on the two b×c planes of the uniaxial electro-optic crystal 3 , and the size is preferably just to cover the two b×c planes. When a voltage is applied to the electrode sheet 4, the direction of the electric field in the crystal is parallel to the direction of the crystal axis 3C.
所说补偿晶体5起到辅助单轴电光晶体3完成调制偏振光的作用:第一,起到温度补偿作用,晶体的折射率对温度的影响比较敏感,特别是当光通过较长晶体路径时,折射率的微小变化都会对输出o光、e光的相位差产生很大影响;第二,和单轴电光晶体3一起作用,使不在单轴电光晶体3上加电压时,o光、e光通过这两个晶体后的光程差为零。要完成上述作用,补偿晶体5应该取和单轴电光晶体3相同材料和类似的长方体形状,几何尺寸为a’×b’×c’,必须严格使其长边长和电光晶体的长边长相等,即b’=b,对短边长a’、c’的要求比较宽松,保证激光束顺利通过即可,和单轴电光晶体3同样因素考虑,取a’=c’较好。要使补偿晶体5的光轴方向5C和单轴电光晶体3的光轴方向3C相互垂直放置,即方向5C应沿着坐标x轴的方向放置,同时使激光束垂直通过其两个a’×c’平面。The compensation crystal 5 plays the role of assisting the uniaxial electro-optic crystal 3 to complete the modulation of polarized light: first, it plays the role of temperature compensation, and the refractive index of the crystal is relatively sensitive to the influence of temperature, especially when light passes through a long crystal path , small changes in the refractive index will have a great impact on the phase difference of the output o-light and e-light; second, it works together with the uniaxial electro-optic crystal 3, so that when no voltage is applied to the uniaxial electro-optic crystal 3, the o-light, e-light The optical path difference of light passing through these two crystals is zero. To accomplish the above functions, the compensating crystal 5 should be made of the same material as the uniaxial electro-optic crystal 3 and have a similar cuboid shape, with a geometric dimension of a'×b'×c', and the length of its long side must be strictly the same as that of the electro-optic crystal. Etc., that is, b'=b, the requirements for the short side lengths a' and c' are relatively loose, and it is enough to ensure that the laser beam passes through smoothly. Considering the same factors as the uniaxial electro-optic crystal 3, it is better to take a'=c'. To make the optical axis direction 5C of the compensation crystal 5 and the optical axis direction 3C of the uniaxial electro-optic crystal 3 be placed perpendicular to each other, that is, the direction 5C should be placed along the direction of the coordinate x axis, while the laser beam is vertically passed through its two a'× c' plane.
所说偏振检偏器6起到只允许偏振方向和其检偏方向平行的偏振光通过,阻挡偏振方向和其检偏方向垂直的偏振光通过的作用,可选用任何具有单方向检偏作用的标准偏振检偏器件,对其结构没有特殊要求。偏振检偏器6的检偏光轴有两种放置方法,如图3中的实线6C方向和虚线6C’方向,方向6C和偏振分光器2的起偏方向2C平行,即和坐标轴x’同向,方向6C’和偏振分光器2的起偏方向2C垂直,即和坐标轴y’同向,方向6C和6C’相互垂直且分别和单轴电光晶体3的光轴方向3C和补偿晶体5的光轴方向5C成45°夹角。Said polarizing analyzer 6 plays the role of only allowing the polarized light whose polarization direction is parallel to its analyzing direction to pass through, and blocking the passing of the polarized light whose polarization direction is perpendicular to its analyzing direction. Standard polarization analyzer, no special requirements for its structure. There are two ways to place the analyzer optical axis of the polarization analyzer 6, such as the direction of the solid line 6C and the direction of the dotted line 6C' in Figure 3, and the direction 6C is parallel to the polarization direction 2C of the polarization beam splitter 2, that is, to the coordinate axis x' In the same direction, the direction 6C' is perpendicular to the polarization direction 2C of the polarization beam splitter 2, that is, it is in the same direction as the coordinate axis y', and the directions 6C and 6C' are perpendicular to each other and respectively to the optical axis direction 3C of the uniaxial electro-optic crystal 3 and the compensation crystal The optical axis direction 5C of 5 forms an included angle of 45°.
偏振检偏器6的两种放置结构对应本发明的两种操作方法,在按照检偏方向6C放置的情况下为第一种操作方法。在这种情况下,首先不在单轴电光晶体3的一对电极片4上加电压,此时,激光器1发出的无规偏振光A首先垂直入射到偏振分光器2中,偏振分光器2将光束A分为两部分:转变为偏振方向垂直起偏方向2C偏振的无用光W1偏离原光路出射;转变为偏振方向平行于起偏方向2C偏振的线偏振光B沿原光路出射。沿2C方向偏振的光束B紧接着垂直两个a×c平面穿过单轴电光晶体3和垂直两个a’×c’平面穿过补偿晶体5。由于晶体的双折射作用,偏振方向和晶轴方向3C成45°角的线偏振光B进入单轴电光晶体3后被分为能量相等的寻常光o光和异常光e光,由于B垂直晶体光轴入射,偏振方向相互垂直的o光和e光同时沿原光路传播而不分离,其中o光偏振方向和单轴电光晶体3的光轴方向3C平行,e光和光轴方向3C垂直。晶体对o光和e光的折射率不同,不同的折射率导致当光束B穿出单轴电光晶体3后其同路的两分光o光和e光之间有一个光程差,从而使两同路光束之间产生一个相位差Г,其具体值依赖于电光晶体的边长b。两分光o光、e光紧接着进入补偿晶体5,在补偿晶体5的作用下,由于其光轴方向5C和单轴电光晶体3光轴方向3C相互垂直,在单轴电光晶体3中的两分光o光和e光进入补偿晶体5中后,原单轴电光晶体3中的o分光变为相对补偿晶体5来说的e分光,原单轴电光晶体3中的e分光变为相对于补偿晶体5的o分光,这样两分光在穿过补偿晶体5后又产生一个相位差Г’,并且由于边长b’=b,这个相位差Г’和穿过单轴电光晶体3后两分光的相位差Г大小相等且正负号相反,即Г=-Г’,因此,当线偏振光B依次穿过单轴电光晶体3和补偿晶体5后,其振幅相等的两分光之间相位差为零,出射两块晶体后其合成光偏振特性不变,成为和B偏振方向相同的线偏振光C。由于C的偏振方向和偏振检偏器6的检偏方向6C平行,因此线偏振光C可以不受影响地穿过偏振检偏器6而成为最终的出射光D。出射光D在经过一段待测距离L后照射到待测物体7表面而被反射回来,成为反射回光E,回光E保持从偏振检偏器6出射时的偏振态不变,沿坐标x’方向偏振,因此经过和从光束B到光束D逆反的变化过程,偏振态仍然不变而成为沿坐标轴x’方向偏振的线偏振光F射入到偏振分光器2中。偏振分光器2的起偏方向沿坐标轴x’方向,和F的偏振方向平行,这样,F就可顺利通过偏振分光器2成为无用光W2。综上所述,在从激光器1发出原始出射光A依次穿过各装置2、3、4、5、6到达待测物体7表面反射回来,再次穿过装置6、5、4、3、2成为无用光W2的整个过程中,除了无规偏振光A在偏振分光器2中分离出无用光W1外,其他光束B、C、D、E、F、W2均为和偏振分光器2、偏振检偏器3光轴方向平行偏振的线偏振光,在他们的传输过程中就好像图1中没有插入反射镜的情形下,装置2、3、4、5、6对光的传播是透明的一样。这是测距前的准备状态。The two placement structures of the polarizing analyzer 6 correspond to the two operating methods of the present invention, and the first operating method is placed according to the analyzing direction 6C. In this case, at first no voltage is applied to the pair of electrode sheets 4 of the uniaxial electro-optic crystal 3, at this moment, the random polarized light A emitted by the laser 1 is first vertically incident on the polarization beam splitter 2, and the polarization beam splitter 2 will The light beam A is divided into two parts: the unwanted light W1 that is transformed into a polarization direction perpendicular to the polarization direction 2C is emitted away from the original optical path; the linearly polarized light B that is transformed into a polarization direction parallel to the polarization direction 2C is emitted along the original optical path. The beam B polarized along the 2C direction then passes through the uniaxial electro-optic crystal 3 perpendicular to the two a×c planes and the compensation crystal 5 perpendicular to the two a′×c′ planes. Due to the birefringence of the crystal, the linearly polarized light B whose polarization direction and crystal axis direction 3C form an angle of 45° enters the uniaxial electro-optic crystal 3 and is divided into ordinary light o light and extraordinary light e light with equal energy. The optical axis is incident, and the o-light and e-light whose polarization directions are perpendicular to each other propagate along the original optical path without separation, wherein the polarization direction of the o-light is parallel to the optical axis direction 3C of the uniaxial electro-optic crystal 3, and the e-light is perpendicular to the optical axis direction 3C. The crystal has different refractive indexes for o-light and e-light, and the different refractive indexes lead to an optical path difference between the two beams o-light and e-light on the same path after the beam B passes through the uniaxial electro-optic crystal 3, so that the two A phase difference Γ is generated between the same beams, and its specific value depends on the side length b of the electro-optic crystal. The two light beams o light and e light then enter the compensation crystal 5. Under the action of the compensation crystal 5, since its optical axis direction 5C and the uniaxial electro-optic crystal 3 optical axis direction 3C are perpendicular to each other, the two in the uniaxial electro-optic crystal 3 After the split o light and e light enter the compensation crystal 5, the o split light in the original uniaxial electro-optic crystal 3 becomes the e split light relative to the compensation crystal 5, and the e split light in the original uniaxial electro-optic crystal 3 becomes relative to the compensation crystal 5 In this way, the two split lights produce a phase difference Г' after passing through the compensation crystal 5, and because the side length b'=b, this phase difference Г' and the phase difference of the two split lights after passing through the uniaxial electro-optic crystal 3 Γ is equal in size and opposite in sign, that is, Γ=-Г', therefore, when the linearly polarized light B passes through the uniaxial electro-optic crystal 3 and the compensation crystal 5 in sequence, the phase difference between the two split lights with equal amplitude is zero, After exiting the two crystals, the polarization characteristics of the synthesized light remain unchanged, and become linearly polarized light C with the same polarization direction as B. Since the polarization direction of C is parallel to the polarization analysis direction 6C of the polarization analyzer 6 , the linearly polarized light C can pass through the polarization analyzer 6 without being affected and become the final outgoing light D. The outgoing light D passes through a distance L to be measured and irradiates the surface of the object 7 to be measured and is reflected back to become the reflected light E. The polarization state of the returned light E remains unchanged when it emerges from the polarization analyzer 6, along the coordinate x 'direction polarization, so after going through the reverse change process from beam B to beam D, the polarization state remains unchanged and becomes linearly polarized light F polarized along the coordinate axis x', which enters the polarization beam splitter 2. The polarizing direction of the polarizing beam splitter 2 is along the coordinate axis x' and parallel to the polarizing direction of F, so that F can pass through the polarizing beam splitter 2 smoothly and become useless light W2. To sum up, the original outgoing light A from the laser 1 passes through each device 2, 3, 4, 5, 6 in turn, reaches the surface of the object 7 to be measured and reflects back, and then passes through the devices 6, 5, 4, 3, 2 again. In the whole process of becoming unwanted light W2, except that random polarized light A separates unwanted light W1 in polarization beam splitter 2, other light beams B, C, D, E, F, W2 are the same as polarization beam splitter 2, polarization Linearly polarized light polarized parallel to the optical axis of the analyzer 3, during their transmission, it is as if no mirror is inserted in Figure 1, and the devices 2, 3, 4, 5, and 6 are transparent to the transmission of light Same. This is the state of preparation before ranging.
当需要进行距离测量时,在单轴电光晶体3的一对电极片4上加上半波电压V。之所以称之为半波电压,是因为在该电压作用下,由于晶体的横向电光效应,垂直晶轴3C穿过单轴电光晶体3的o光和e光间会在原来相位差Г的基础上增加一个相位差π。半波电压的大小V取决于激光波长、晶体的材料和边长比a/b,大小为:When distance measurement is required, a half-wave voltage V is applied to a pair of electrode sheets 4 of the uniaxial electro-optic crystal 3 . The reason why it is called a half-wave voltage is because under the action of this voltage, due to the transverse electro-optic effect of the crystal, the o-light and e-light passing through the uniaxial electro-optic crystal 3 on the vertical crystal axis 3C will be on the basis of the original phase difference Г Add a phase difference π. The size V of the half-wave voltage depends on the laser wavelength, the material of the crystal and the side length ratio a/b, and the size is:
其中入为激光波长,no和ne分别为单轴电光晶体3对应波长入的寻常光折射率和异常光折射率,r13和r33为晶体电光系数的两个对应分量。当在单轴电光晶体3上加上半波电压V后,由于对穿过单轴电光晶体3和补偿晶体5的同向等振幅分光o光和e光间增加了一个相位差π,此时对沿坐标轴x’方向偏振的线偏振光B而言,单轴电光晶体3和补偿晶体5作用在一起就起到一个1/2波片的作用,这时B依次穿过单轴电光晶体3和补偿晶体5后偏振方向扭转90°角,成为沿坐标轴y’方向偏振的线偏振光C。光C的偏振方向和偏振检偏器6的检偏方向6C相互垂直,因此加上半波电压后,从补偿晶体5射出的光束C不能通过偏振检偏器6,从而原来畅通的出射光束被从补偿晶体5面向偏振检偏器6的a’×c’平面处被截断。在加半波电压的同时,我们再来看先前已经出射的光D被待测物体7反射的回光E的情况:原来沿坐标轴x’方向偏振的回光E依次经过补偿晶体5和单轴电光晶体3后出射后,成为偏振方向和原来垂直而沿坐标轴y’方向偏振的线偏振回光F,在遇到偏振分光器2时,由于F的偏振方向和偏振分光器2的起偏方向相互垂直,回光F无法沿原光路通过,被同时起偏振分光作用的偏振分光器2反射到一边的接收探测器8上,从而也把原来畅通的反射回光从单轴电光晶体3面向偏振分光器2的a×c平面处截断。综上所述,当在单轴电光晶体3上加上半波电压V的同时,装置2、3、4、5、6就起到了图1中在光路中“瞬间”插入反射镜的作用:将原来往返于激光器1和待测物体7之间的光路截断,并且将截断后的光束段C-D-E-F反射到探测器8上,形成供测量的待测矩形光脉冲G。测得光脉冲G的脉宽t,即可求出待测距离L:where n is the laser wavelength, n o and n e are the ordinary and extraordinary light refractive indices of the uniaxial electro-optic crystal 3 respectively, and r 13 and r 33 are the two corresponding components of the electro-optic coefficient of the crystal. When a half-wave voltage V is applied to the uniaxial electro-optic crystal 3, a phase difference π is added between the o-light and e-light of the same direction and equal amplitude passing through the uniaxial electro-optic crystal 3 and the compensation crystal 5, at this time For the linearly polarized light B polarized along the coordinate axis x', the uniaxial electro-optic crystal 3 and the compensation crystal 5 act together as a 1/2 wave plate, and B passes through the uniaxial electro-optic crystal in turn 3 and the compensation crystal 5, the polarization direction is twisted at an angle of 90° to become linearly polarized light C polarized along the coordinate axis y' direction. The polarization direction of the light C and the polarization analyzer 6C are perpendicular to each other, so after the half-wave voltage is applied, the beam C emitted from the compensation crystal 5 cannot pass through the polarization analyzer 6, so that the original smooth outgoing beam is The a'×c' plane facing the polarization analyzer 6 from the compensation crystal 5 is truncated. While applying the half-wave voltage, let’s look at the return light E reflected by the object 7 that has been emitted before: the return light E that was originally polarized along the coordinate axis x’ direction passes through the compensation crystal 5 and the single axis in turn. After the electro-optic crystal 3 exits, it becomes the linearly polarized return light F whose polarization direction is perpendicular to the original and polarized along the coordinate axis y' direction. When encountering the polarization beam splitter 2, due to the polarization direction of F and the polarization of the polarization beam splitter The directions are perpendicular to each other, and the return light F cannot pass along the original optical path, and is reflected by the polarizing beam splitter 2 that simultaneously acts as a polarization splitter to the receiving detector 8 on one side, so that the originally smooth reflected return light is also directed from the uniaxial electro-optic crystal 3 The polarizing beam splitter 2 cuts off at the a×c plane. To sum up, when the half-wave voltage V is applied to the uniaxial electro-optic crystal 3, the devices 2, 3, 4, 5, and 6 play the role of "instantly" inserting a reflector in the optical path in Figure 1: The original optical path between the laser 1 and the object 7 to be measured is cut off, and the cut-off beam segment CDEF is reflected to the detector 8 to form a rectangular light pulse G to be measured. By measuring the pulse width t of the light pulse G, the distance to be measured L can be obtained:
其中Vc为光在空气中的速度。where Vc is the speed of light in air.
当偏振检偏器6的检偏方向按照图3中虚线表示的6C’方向放置,而其它装置位置不便时,对应本发明的第二种操作方法。此操作方法下,在单轴电光晶体3的一对电极片4上加半波电压V的状态为测距前的准备状态。此时,偏振方向和单轴电光晶体3晶轴3C成45°夹角的线偏振光B依次经过单轴电光晶体3和补偿晶体5后,偏振方向扭转90°成为线偏振光C,线偏振光C的偏振方向此时刚好和偏振检偏器6的检偏方向6C’平行,因此可顺利通过偏振检偏器6成为最终出射光D。被待测物体7反射回来的回光E通过偏振检偏器6后又依次经过补偿晶体5和单轴电光晶体3,其偏振方向再次被扭转90°成为偏振方向和偏振分光器2的起偏方向2C平行的线偏振光F,光F顺利通过偏振分光器2成为无用光W2。可见,在单轴电光晶体3上加电压的时候,装置2、3、4、5、6对激光B、C、D、E、F、W2的传播来说就像是透明的一样。当需要进行测距时,撤掉加在单轴电光晶体3上的半波电压V,此时装置2、3、4、5、6就像在图1的光路中“瞬间”插入的反射镜一样,将出射光路从补偿晶体5面向偏振检偏器6的a’×c’平面处被截断,将反射回光光路从单轴电光晶体3面向偏振分光器2的a×c平面处被截断,同时将截断后的光束段C-D-E-F反射到探测器8上,形成供测量的待测矩形光脉冲G。When the polarization analysis direction of the polarization analyzer 6 is placed according to the 6C' direction indicated by the dotted line in Fig. 3, and other devices are inconveniently positioned, it corresponds to the second operation method of the present invention. Under this operation method, the state of applying the half-wave voltage V to the pair of electrode sheets 4 of the uniaxial electro-optic crystal 3 is the preparation state before ranging. At this time, the linearly polarized light B whose polarization direction forms an angle of 45° with the crystal axis 3C of the uniaxial electro-optic crystal 3 passes through the uniaxial electro-optic crystal 3 and the compensation crystal 5 sequentially, and the polarization direction is twisted by 90° to become linearly polarized light C, which is linearly polarized The polarization direction of the light C is just parallel to the polarization analysis direction 6C' of the polarization analyzer 6 at this time, so it can pass through the polarization analyzer 6 smoothly to become the final outgoing light D. The return light E reflected by the object 7 to be measured passes through the polarization analyzer 6 and then passes through the compensation crystal 5 and the uniaxial electro-optic crystal 3 in sequence, and its polarization direction is twisted 90° again to become the polarization direction and the polarization of the polarization beam splitter 2 The linearly polarized light F parallel to the direction 2C, the light F smoothly passes through the polarizing beam splitter 2 and becomes useless light W2. It can be seen that when a voltage is applied to the uniaxial electro-optic crystal 3, the devices 2, 3, 4, 5, and 6 are transparent to the propagation of the laser light B, C, D, E, F, and W2. When distance measurement is required, the half-wave voltage V applied to the uniaxial electro-optic crystal 3 is removed, and the devices 2, 3, 4, 5, and 6 are like reflectors inserted "instantly" in the optical path of Fig. 1 Similarly, the outgoing optical path is cut off from the a'×c' plane where the compensation crystal 5 faces the polarization analyzer 6, and the reflected light path is cut off from the a×c plane where the uniaxial electro-optic crystal 3 faces the polarizing beam splitter 2 truncate, and at the same time reflect the truncated beam segment C-D-E-F to the detector 8 to form a rectangular light pulse G to be measured.
激光器1选取波长632.8nm的He-Ne激光器,偏振分光器2选用格兰棱镜,单轴电光晶体3和补偿晶体5均选取相同尺寸的铌酸锂LiNbO3,令单轴电光晶体3的光轴为坐标y轴,补偿晶体3的光轴为坐标x轴。装置2、3、5、6要选取适当的体积大小,保证激光光斑在照射到这些装置表面时能完全通过而能量不外泄。装置2、3、4、5、6之间应该不留空隙地紧贴着相互放置。当激光波长为632.8nm时,LiNbO3晶体的两个主折射率为no=2.2864,ne=2.2024。Laser 1 selects a He-Ne laser with a wavelength of 632.8nm, polarizing beam splitter 2 selects a Glan prism, and both uniaxial electro-optic crystal 3 and compensation crystal 5 select lithium niobate LiNbO 3 of the same size, so that the optical axis of uniaxial electro-optic crystal 3 is the coordinate y-axis, and the optical axis of the compensation crystal 3 is the coordinate x-axis. Devices 2, 3, 5, and 6 should be selected with appropriate volumes to ensure that the laser spot can completely pass through when it irradiates the surface of these devices without energy leakage. The devices 2, 3, 4, 5, 6 should be placed close to each other without leaving any gaps. When the laser wavelength is 632.8nm, the two principal refractive indices of LiNbO 3 crystal are no =2.2864 and ne =2.2024.
例1:example 1:
如图3所示的结构。单轴电光晶体3、补偿晶体5的尺寸为a×b×c=a’×b’×c’=0.2×3.4×0.2cm3,一对电极片大小以刚好覆盖单轴电光晶体3的两个b×c平面为准,此时半波电压V=235V(纵横比为a/b=1∶17)。The structure shown in Figure 3. The dimensions of the uniaxial electro-optic crystal 3 and the compensation crystal 5 are a×b×c=a’×b’×c’=0.2×3.4×0.2cm 3 , and the size of a pair of electrode pieces is just enough to cover both sides of the uniaxial electro-optic crystal 3. A b×c plane shall prevail, at this time the half-wave voltage V=235V (the aspect ratio is a/b=1:17).
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